JP2007039182A - Roller conveyor port and positioning method for conveyed material - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a roller conveyor port and a positioning method for a conveyed material capable of accurately stopping the conveyed material in a stop position of the roller conveyor port. <P>SOLUTION: The roller conveyor port 20 comprises a drive roller module 21 extending toward a conveyance direction C, a control device 22 of the drive roller module 21, and position detecting means 41, 42 detecting the position of the conveyed material 55. At least the pair of the position detecting means 41, 42 are arrange lengthwise in the conveyance direction C. When one position detecting means 41 becomes a detectable state and the other position detecting means 42 becomes an undetectable state, it is determined that the conveyed material 55 is conveyed to the stop position 40. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a roller conveyor port and a method for positioning a conveying material that can accurately stop the conveying material at a predetermined stop position.

Conventionally, in a semiconductor manufacturing factory, an OHS (Over Head Shuttle), an OHT (Over Hoist Transport), and a roller conveyor are widely used as a transport system for transporting a carrier or the like in which a semiconductor substrate is accommodated (Patent Document 1). reference).
Here, in the roller conveyor, a roller conveyor port is provided in front of the semiconductor device and the stocker, and the carrier stationary on the roller conveyor port is transferred to the semiconductor device and the stocker using a transfer robot. It is. In order to stably perform the transfer operation by the transfer robot, the carrier stop position accuracy on the roller conveyor port becomes a problem.

FIG. 9 shows an example of a conventional roller conveyor port.
The roller conveyor port 1 includes a driving roller module 2, a control device 3 for the driving roller module 2, and a photo sensor 4.
The driving roller module 2 includes a plurality of driving rollers 5, driving means 6 for the driving rollers 5, a driven roller 7 disposed so as to face the driving roller 5, and rollers that support the driving roller 5 and the driven roller 7. And a support frame 8.

The pair of roller support frames 8 are arranged in parallel so as to face each other and so as to extend in the transport direction C.
A plurality of roller shafts 9 are rotatably supported on the roller support frame 8, and a load receiving portion 10 is provided on the outer peripheral surface of the roller shaft 9. On the roller support frame 8 side of the load receiving portion 10, A flange portion 11 having a diameter larger than that of the cargo receiving portion 10 is formed.

  The roller support frame 8 on which the driving roller 5 is supported has a motor 12 as a driving means 6 for driving the driving roller 5, a timing belt 13 that connects the driving shaft of the motor 12 and the roller shaft 9, and a timing belt 13. And a tension roller 14 for maintaining the tension.

  The photosensor 4 provided in the roller conveyor port 1 includes a light emitting element 4A and a light receiving element 4B. A sensor holder 15 is provided on the roller support frame 8, the light emitting element 4 A is fixed to the sensor holder 15 of the roller support frame 8 on which the driving roller 5 is supported, and the sensor holder 15 of the roller support frame 8 on which the driven roller 7 is supported. The light receiving element 4B is fixed to the surface. The position of the beam 16 irradiated from the light emitting element 4 </ b> A is the stop position 17 of the carrier 18.

  In the roller conveyor port 1 configured as described above, the carrier 18 is placed on the load receiving portion 10 of the driving roller 5 and the driven roller 7. In this state, when the motor 12 is driven, the timing belt 13 rotates and the plurality of driving rollers 5 rotate in synchronism with each other so that the carrier 18 placed on the driving roller 5 and the driven roller 7 is conveyed. It is conveyed toward C.

When the carrier 18 is transported to the portion of the photosensor 4 and the beam 16 irradiated from the light emitting element 4A is blocked by the carrier 18 and an output signal is obtained from the photosensor 4, the motor 12 is stopped, and the carrier 18 Is stopped at the stop position 17.
Special table 2003-524544 gazette Japanese Patent Laid-Open No. 2001-31235

However, in the conventional roller conveyor port 1 provided with one photosensor 4, due to the problem of the beam diameter from the light emitting element 4A and the beam directivity, the stop position 17 is accurate, for example, within a range of ± 1 mm. It was difficult to stop.
Further, even after the motor 12 is stopped, the carrier 18 may move due to the inertial force and may exceed the stop position 17. In order to prevent this, when the detection level of the photosensor 4 is excessively lowered so that the carrier 18 can be detected at an early stage, the carrier 18 may stop before the stop position 17. .

  The present invention has been made in view of the above-described circumstances, and an object of the present invention is to provide a roller conveyor port and a method for positioning a conveying material that can accurately stop the conveying material at a stop position of the roller conveyor port.

In order to achieve the above object, the present invention proposes the following means.
The invention according to claim 1 is a roller conveyor port comprising a driving roller module extending in the conveying direction, a control device for the driving roller module, and position detecting means for detecting the position of the conveying material. The position detection means are arranged in a column in the transport direction, and the transport material is stopped when one of the position detection means is in a detection state and the other position detection means is in a non-detection state. It is characterized in that it is judged that it has been transported to a position.

  According to the roller conveyor port of this configuration, the pair of position detection means is arranged in the conveyance direction, and the stop position of the conveyance material is determined by the two position detection means. In comparison, the conveying material can be accurately stopped at a predetermined stop position. Therefore, for example, the transfer work of the conveying material by the transfer robot or the like can be stably performed.

The invention according to claim 2 is characterized in that the position detection means is a position detection sensor, and one of the position detection sensors and the other of the position detection sensors transmit different output signals.
According to the roller conveyor port of this configuration, since the pair of position detection sensors are arranged, the conveyance material can be stopped so that the leading end portion of the conveyance material is positioned between the pair of position detection sensors. Here, since the other position detection sensor can detect that the conveyance material has exceeded the stop position, the detection level of one of the position detection sensors can be increased and the detection timing of the conveyance material can be delayed. Stopping near the stop position can be prevented, and the conveying material can be stopped with high accuracy. Also, variation in the stopping position of the conveying material can be suppressed by reducing the distance between the position detection sensors. .

Since one position detection sensor and the other position detection sensor transmit different output signals in the detection state and the non-detection state, both the one position detection sensor and the other position detection sensor When the high level (H) output signal is transmitted, it can be determined that the conveying material is placed at the stop position, and the conveying material can be transferred to the next step. Therefore, even if a low level (L) output signal is transmitted due to noise or circuit trouble, the process does not proceed to the next step, so that malfunction can be avoided and the operation of the roller conveyor port can be performed stably.
In addition, since a pair of position detection sensors are provided, when one position detection sensor fails, the failure of the position detection sensor is confirmed at an early stage by analyzing the pattern of the output signals of these position detection sensors. be able to.

According to a third aspect of the present invention, the position detection sensor is a photosensor including a light emitting element and a light receiving element, and the light emitting element and the light receiving element are mutually connected by the one photosensor and the other photosensor. It is characterized by being arranged differently.
According to the roller conveyor port of this configuration, the position of the conveying material can be detected by the photosensor configured by the light emitting element and the light receiving element. In addition, since the arrangement of the light emitting element and the light receiving element is reversed between one photosensor and the other photosensor, for example, the light receiving element of the other photosensor receives the beam emitted from the light emitting element of one photosensor. The distance between the two photosensors can be reduced without any risk of malfunction. Therefore, the stop position accuracy of the conveying material can be further improved.

The invention according to claim 4 is characterized in that the position detection sensor includes an ultrasonic transmitter and an ultrasonic receiver.
According to the roller conveyor port having this configuration, the position of the conveying material can be reliably detected by the ultrasonic transmitter and the ultrasonic receiver, and the conveying material can be accurately stopped at the stop position.

The invention according to claim 5 is characterized in that the position detection sensor is constituted by a magnetic sensor, and the conveying member is provided with a magnetic member.
According to the roller conveyor port of this configuration, since the magnetic member provided in the transport material can be detected by the magnetic sensor, the position of the transport material can be reliably detected, and the transport material can be accurately stopped at the stop position. Can do.

According to a sixth aspect of the present invention, the pair of position detection means arranged in the transport direction includes a detection member provided in the transport material, a transmission hole formed in the detection member, a single photosensor, It is characterized by comprising.
According to the roller conveyor port having this configuration, after the beam from the light emitting element is once interrupted by the detection member or the conveying material, the beam passes through the transmission hole and reaches the light receiving element. Here, the roller conveyor is prepared to stop when it receives an output signal when the beam from the light emitting element is interrupted, and is stopped when the transmission hole is detected, so that the conveying material is accurately stopped at the stop position. be able to.

The invention according to claim 7 is a positioning method of a conveying material for determining a stop position of the conveying material conveyed by the roller conveyor extending in the conveying direction, wherein at least a pair of position detecting means are arranged in tandem in the conveying direction. Further, it is characterized in that it is determined that the transport material has been transported to the stop position when one of the position detection means is in a detection state and the other position detection means is in a non-detection state.
According to the positioning method of this configuration, the stop position of the transport material can be determined with high accuracy by using the two position detection means.

  As described above, according to the present invention, it is possible to provide a roller conveyor port and a method for positioning a conveying material that can accurately stop the conveying material at the stop position of the roller conveyor port.

A first embodiment of the present invention will be described with reference to the accompanying drawings. 1 to 3 show a roller conveyor port according to the first embodiment of the present invention. FIG. 4 shows an entire transfer system of, for example, a semiconductor manufacturing factory in which the roller conveyor port of the present invention is used.
The transport system 50 shown in FIG. 4 includes an inter-process track 51 that circulates greatly in the factory, and four intra-process tracks 52 provided so as to branch from the inter-process track 51.

  The inter-process track 51 has a rectangular shape when viewed from above, and a corner turntable 54 is provided at a portion where the four straight conveyors 53 intersect with each other. A carrier 55 containing a semiconductor substrate is placed on the linear conveyor 53, and the carrier 55 moves on the linear conveyor 53 and is rotated by 90 ° on the corner turntable 54, whereby a process is performed. It is set as the structure which can go around the intermediate track 51. FIG. In the present embodiment, as shown in FIG. 4, the carrier 55 is moved around in the turning direction X.

  Between the inter-process track 51 and the intra-process track 52, a pair of inter-track ports 57 for connecting the inter-process track 51 and the intra-process track 52 are provided. Of these, turntables 56 are provided at portions connected to the inter-orbit port 57. A carrier 55 orbiting the inter-process track 51 is placed on a turntable 56 provided in the inter-process track 51 and rotated by 90 °, and the turntable provided in the intra-process track 52 via the inter-track port 57. 56. In this way, the carrier 55 is transferred from the inter-process track 51 to the intra-process track 52.

  As shown in FIG. 4, the in-process track 52 has a rectangular shape when viewed from above, and includes four linear conveyors 53 and a corner turntable 54 at a portion where the linear conveyors 53 intersect, The in-process track 52 is configured to circulate in the circulatory direction Y. Further, the intra-process track 52 is provided with a plurality (six in this embodiment, as shown in FIG. 4) of semiconductor devices 58 so as to branch from the straight conveyor 53.

  Between the in-process track 52 and the semiconductor device 58, a carry-in turntable 59, a carry-in conveyor port 60, a carry-out conveyor port 61, and a carry-out turntable 62 are provided. The carrier 55 that has been transported on the in-process track 52 is rotated 90 ° by the carry-in turntable 59 and transferred to the carry-in conveyor port 60. Here, the carrier 55 is transferred into the semiconductor device 58 by a transfer robot (not shown). After being processed by the semiconductor device 58, the carrier 55 is placed on the carry-out conveyor port 61 and returns to the in-process track 52 via the carry-out turntable 62. Then, it is transferred to the next semiconductor device 58.

  The carrier 55 that has been processed in the in-process track 52 is placed on the turntable 56 provided in the in-process track 52 and rotated by 90 °, and is transferred to the in-process track 51 via the inter-track port 57. It is conveyed to the provided turntable 56. As a result, the carrier 55 is transferred from the intra-process track 52 to the inter-process track 51 and transferred to the next process.

Here, the roller conveyor port 20 shown in FIG. 1 is used as the carry-in conveyor port 60 to the semiconductor device 58.
The roller conveyor port 20 includes a driving roller module 21 and a control device 22 for the driving roller module 21 and includes a pair of photosensors 41 and 42 as position detection sensors.
The driving roller module 21 includes a plurality of driving rollers 23, a driving unit 24 for the driving rollers 23, a driven roller 25 disposed so as to face the driving rollers 23, and a driving roller support frame 26 that supports the driving rollers 23. And a driven roller support frame 27 that supports the driven roller 25.

As shown in FIGS. 1 and 2, the driving roller support frame 26 and the driven roller support frame 27 are arranged in parallel so as to face each other and extend in the transport direction C.
A plurality of roller shafts 28 are rotatably supported on the drive roller support frame 26, and a load receiving portion 29 is provided on the outer peripheral surface of the roller shaft 28, and the load receiving portion 29 is disposed on the drive roller support frame 26 side. Is formed with a flange 30 that is one step larger in diameter than the cargo receiving portion 29. A cylindrical urethane rubber 31 is fitted on the outer peripheral surface of the cargo receiving portion 29.

  The driving roller support frame 26 is provided with driving means 24 for driving the driving roller 23. As shown in FIG. 3, the drive means 24 includes a motor 32, a sprocket 34 fixed to a drive shaft 33 of the motor 32, a toothed pulley 35 and a tension roller 36 provided on the roller shaft 28, the sprocket 34, a tooth A timing belt 37 that connects the attached pulley 35 and the tension roller 36 is configured.

  The timing belt 37 is an endless belt, and the inner peripheral surface is a tooth-like surface that can be engaged with the tooth portions formed on the outer peripheral surfaces of the toothed pulley 35 and the sprocket 34, and the outer peripheral surface is a smooth surface. Yes. An inner peripheral surface of the timing belt 37 is engaged with the toothed pulley 35 and the sprocket 34, and a tension roller 36 is engaged with the outer peripheral surface.

  Similarly to the drive roller support frame 26, the driven roller support frame 27 includes a roller shaft 28, a cargo receiving portion 29, a flange portion 30, and urethane rubber 31.

The roller conveyor port 20 is provided with a pair of photosensors 41 and 42 as position detection sensors. The photosensors 41 and 42 are composed of light emitting elements 41A and 42A and light receiving elements 41B and 42B. When the light receiving elements 41B and 42B receive the beam 43 emitted from the light emitting elements 41A and 42A, the light emitting elements 41A and 42A. And whether or not an object exists between the light receiving elements 41B and 42B.
Further, in the photosensors 41 and 42, the detection level can be adjusted by adjusting the threshold value when detecting the presence or absence of an object.

In the first photosensor 41, a light emitting element 41A is fixed to a sensor holder 38 provided on the driving roller support frame 26, and a light receiving element 41B is fixed to a sensor holder 38 provided on the opposite driven roller support frame 27. . On the other hand, in the second photosensor 42, the light receiving element 42B is fixed to the sensor holder 38 provided on the driving roller support frame 26, and the light emitting element 42A is fixed to the sensor holder 38 provided on the opposite driven roller support frame 27. ing.
That is, in the first photosensor 41 and the second photosensor 42, the light emitting elements 41A and 42A and the light receiving elements 41B and 42B are arranged so as to be different from each other.

  In the present embodiment, as shown in FIG. 1, the pair of photosensors 41 and 42 are arranged so as to sandwich the stop position 40 of the carrier 55. The first photosensor 41 is disposed behind the stop position 40 in the transport direction C, that is, on the front side of the stop position 40, and the first photosensor 41 is positioned forward of the transport direction C with respect to the stop position 40, that is, on the back side of the stop position 40. Two photosensors 42 are arranged.

  The first photosensor 41 transmits a low level (L) output signal when the light receiving element 41B receives the beam 43, and transmits a high level (H) output signal when an object is detected. It is configured. On the other hand, in contrast to the first photosensor 41, the second photosensor 42 transmits a high level (H) output signal when the light receiving element 42B receives the beam 43, and low when an object is detected. A level (L) output signal is transmitted.

  In the roller conveyor port 20 configured as described above, the carrier 55 is placed on the urethane rubber 31 of the driving roller 23 and the driven roller 25. In this state, by driving the drive shaft 33 of the motor 32, the sprocket 34 is rotated. With this rotation, the timing belt 37 rotates and the plurality of drive rollers 23 are rotated in synchronism. The carrier 55 placed on the roller 23 and the driven roller 25 is transported in the transport direction C. Here, the flange portion 30 formed on the driving roller 23 and the driven roller 25 serves as a guide for preventing the carrier 55 from dropping from the roller conveyor port 20 to the side.

The first photosensor 41 detects the carrier 55 and transmits a high level (H) output signal, and the second photosensor 42 transmits a high level (H) output signal without detecting the carrier 55. It is determined that 55 has been transported to the stop position 40, the motor 32 is stopped, and the carrier 55 is stopped.
The carrier 55 stopped at the stop position 40 is transferred to the semiconductor device 58 by a transfer robot (not shown).

  In the roller conveyor port 20 configured as described above, the first photo sensor 41 and the second photo sensor 42 are disposed so as to sandwich the stop position 40. Therefore, when the carrier 55 exceeds the stop position 40, the second photo sensor 41 and the second photo sensor 42 are disposed. By detecting that the stop position 40 has been exceeded by the sensor 42, the carrier 55 can be returned to the side opposite to the transport direction C. Therefore, the detection level of the first photosensor 41 can be increased to delay the detection timing of the carrier 55, and the carrier 55 can be prevented from stopping before the stop position 40. Therefore, the carrier 55 can be accurately stopped at the stop position 40.

  In the present embodiment, the arrangement of the light receiving elements 41B and 42B and the light emitting elements 41A and 42A is reversed between the first photosensor 41 and the second photosensor 42. Therefore, the light emitting element 41A of the first photosensor 41 is used. Since the light receiving element 42B of the second photosensor 42 does not receive the beam 43 irradiated from the second photosensor 42, malfunction can be prevented. Therefore, the interval between the first photosensor 41 and the second photosensor 42 can be reduced, and variations in the stop position 40 of the carrier 55 can be suppressed to a small value.

Furthermore, since it is determined that the carrier 55 is placed at the stop position 40 by both the first photosensor 41 and the second photosensor 42 being at a high level output, malfunction due to noise or circuit trouble can be avoided. The transfer from the roller conveyor port 20 to the semiconductor device 58 by the transfer robot can be performed stably.
Note that different types of photosensors may be used for the first photosensor 41 and the second photosensor 42. For example, when a red semiconductor laser is used for the first photosensor 41 and a blue semiconductor laser is used for the second photosensor 42, mutual interference between the first photosensor 41 and the second photosensor 42 is reliably avoided. It is preferable because it is possible. Moreover, mutual interference can be avoided even if the light emitting elements 41A and 42A and the light receiving elements 41B and 42B of the first photosensor 41 and the second photosensor 42 are arranged in the same manner.

  Next, a method for stopping another carrier 55 using the roller conveyor port 20 will be described. When the carrier 55 is conveyed on the roller conveyor port 20 and the first photosensor 41 detects the carrier 55, preparation for stopping is performed. The stop preparation is to reduce the rotation speed of the motor 32 and reduce the conveyance speed. When the second photosensor 42 detects the carrier 55, the motor 32 is stopped and the carrier 55 is stopped. Then, the motor 32 is rotated in the reverse direction to transfer the carrier 55 to the side opposite to the conveyance direction C, and it is determined that the carrier 55 is placed at the stop position 40 when the second photosensor 42 no longer detects the carrier 55. Is.

  In this method, the carrier 55 can be reliably stopped between the first photosensor 41 and the second photosensor 42. In particular, even when the detection level of the first photosensor 41 cannot be increased, it is effective because the carrier 55 can be prevented from stopping on the near side of the first photosensor 41.

A failure diagnosis method for the photosensors 41 and 42 in this stopping method will be described. The normal output signal pattern (output signal of the first photosensor 41 / output signal of the second photosensor) in this stopping method is as follows.
When neither the first photosensor 41 nor the second photosensor 42 detects the carrier 55, the carrier 55 is transported (L / H). When the first photosensor 41 detects the carrier 55, it becomes (H / H) and preparations for stop are made. When the second photosensor 42 detects the carrier 55, it becomes (H / L) and the conveyor is stopped. Then, the carrier 55 is fed back until (H / H) again. That is, changes in the output signals of the first photosensor 41 and the second photosensor 42 are (L / H) → (H / H) → (H / L) → (H / H).

Here, when the first photosensor 41 fails and the output is always H, the failure of the first photosensor 41 is confirmed because it is (H / H) before the carrier 55 is transported. can do.
If the first photosensor 41 breaks down and the output is always L, even if the carrier 55 blocks the beam 43 of the first photosensor 41, it remains (L / H) and the carrier 55 is transported. To go. When the carrier 55 blocks the beam 43 of the second photosensor 42, the output becomes (L / L). At this time, the failure of the first photosensor 41 can be confirmed.

If the second photosensor 42 fails and the output is always L, the failure of the second photosensor 42 can be confirmed because it is (L / L) before the carrier 55 is transported.
When the second photosensor 42 breaks down and the output is constantly H, the carrier 55 becomes (H / H) when the beam 43 of the first photosensor 41 is cut off, and preparation for stop is made. Even when the carrier 55 is conveyed and the beam 43 of the second photosensor 42 is cut off, it remains (H / H), and further, the carrier 55 is carried and the carrier 55 blocks the beam 43 of the first photosensor 41. (L / H) when no more. At this time, the failure of the second photosensor 42 can be confirmed.

  In this way, by monitoring changes in the output signals of the first photosensor 41 and the second photosensor 42, it is possible to confirm the failure of the first photosensor 41 and the second photosensor 42 at an early stage. Therefore, the conveyance by the roller conveyor port 20 and the stop of the carrier 55 can be stably performed.

Next, the roller conveyor port which is the 2nd Embodiment of this invention is demonstrated. In addition, the same code | symbol is attached | subjected to the same member as 1st Embodiment, description is abbreviate | omitted, and only a different point is demonstrated. 5 and 6 show a roller conveyor port according to the second embodiment.
In this roller conveyor port 70, magnetic sensors 71 and 72 are arranged as position detection sensors between the driving roller 23 and the driven roller 25 in place of the photo sensor, and the first magnetic sensor 71 is located on the front side in the conveyance direction C. The second magnetic sensor 72 is located on the back side in the transport direction C.

A magnetic material 73 is provided on the bottom surface of the carrier 55 to be conveyed. The length of the magnetic material 73 in the transport direction C is shorter than the length of the magnetic sensors 71 and 72 in the transport direction C.
In the roller conveyor port 70 having this configuration, the motor 32 can be stopped and the carrier 55 can be stopped at the stop position when the first magnetic sensor 71 detects the magnetic material 73. When the carrier 55 exceeds the stop position. In this case, since the second magnetic sensor 72 detects the magnetic material 73, the carrier 55 can be accurately stopped at the stop position.

  Similarly to the roller conveyor port 20 according to the first embodiment, the motor 32 is prepared when the first magnetic sensor 71 detects the carrier 55 and the second magnetic sensor 72 detects the carrier 55 when the first magnetic sensor 71 detects the carrier 55. The carrier 55 can also be stopped by stopping the operation. Then, the motor 32 is rotated in the reverse direction to transfer the carrier 55 to the side opposite to the conveyance direction C, and when the second magnetic sensor 72 stops detecting the carrier 55, it is determined that the carrier 55 is placed at the stop position. Thereby, the carrier 55 can be accurately stopped at the stop position.

Next, the roller conveyor port which is the 3rd Embodiment of this invention is demonstrated. In addition, the same code | symbol is attached | subjected to the same member as 1st Embodiment, description is abbreviate | omitted, and only a different point is demonstrated. FIG. 7 shows a roller conveyor port according to the third embodiment.
This roller conveyor port 80 is provided with only one photo sensor 81, a light emitting element 81 A is fixed to a sensor holder 38 provided on the driving roller support frame 26, and a sensor holder provided on the driven roller support frame 27. A light receiving element 81 </ b> B is fixed to 38.

As shown in FIG. 7, the carrier 55 is provided with detection plates 82 projecting toward the front side in the transport direction C as detection members on both side surfaces of the carrier 55. Is formed.
In the roller conveyor port 80 having this configuration, when the photo sensor 81 detects the detection plate 82 of the carrier 55, preparation for stopping is performed, and the beam 43 from the light emitting element 81A passes through the transmission hole 83 and reaches the light receiving element 81B. By stopping the motor 32 at the time, the carrier 55 can be accurately stopped at the stop position. When the carrier 55 exceeds the stop position, it is determined by the beam 43 being blocked by the carrier 55, so that the motor 55 can be reversely rotated to reversely feed the carrier 55 to the stop position.

  Here, the accuracy of the stop position can be increased by changing the size of the transmission hole 83. Therefore, as shown in FIG. 8, an adjustment mechanism that can adjust the width of the transmission hole 83 may be provided in the detection plate 82. An adjustment plate 84 is disposed so that a part of the transmission hole 83 can be blocked, a long hole 85 extending in the adjustment direction is formed in the adjustment plate 84, and the adjustment plate 84 is fixed to the detection plate 82 with screws 86. . By moving the adjustment plate 84 along the long hole 85, the size of the transmission hole 83 can be changed, and the stop position accuracy of the carrier 55 can be adjusted.

As mentioned above, although embodiment of this invention was described, this invention is not limited to this, It can change suitably in the range which does not deviate from the technical idea of the invention.
For example, although it demonstrated as a roller conveyor port used for the conveyance system which conveys the carrier in which the semiconductor substrate was accommodated in the semiconductor manufacturing factory, it is not limited to this, It is used for another conveyance system, Also good.
Also, the driving means of the roller conveyor is not limited to this embodiment, and other driving means may be used.

It is a perspective view which shows the roller conveyor port which is the 1st Embodiment of this invention. It is a front view of FIG. It is a figure which shows the drive means of the drive roller with which the roller conveyor port in FIG. 1 was equipped. It is a conveyance system whole view in which the roller conveyor port of FIG. 1 is used. It is a front view which shows the roller conveyor port which is the 2nd Embodiment of this invention. FIG. 6 is a side view of FIG. 5. It is a perspective view which shows the roller conveyor port which is the 3rd Embodiment of this invention. It is a figure which shows the other example of the detection board in FIG. It is a perspective view which shows the conventional roller conveyor port.

Explanation of symbols

20, 70, 80 Roller conveyor port 21 Drive roller module 22 Controller 40 Stop position 41 First photo sensor (one position detection sensor)
42 Second photosensor (the other position detection sensor)
41A, 42A Light emitting element 41B, 42B Light receiving element 55 Carrier (conveying material)
71 First magnetic sensor 72 Second magnetic sensor 73 Magnetic member 82 Detection plate (detection member)
83 Transmission hole

Claims (7)

A roller conveyor port comprising a driving roller module extending in the conveying direction, a controller for the driving roller module, and a position detecting means for detecting the position of the conveying material;
At least a pair of the position detection means is arranged in a column in the conveyance direction, and one of the position detection means is in a detection state, and the other of the position detection means is in a non-detection state. It is determined that the roller has been transported to the stop position.   2. The roller conveyor port according to claim 1, wherein the position detection unit is a position detection sensor, and one of the position detection sensors and the other of the position detection sensors transmit different output signals.   The position detection sensor is a photosensor composed of a light emitting element and a light receiving element, and the light emitting element and the light receiving element are arranged differently in one photosensor and the other photosensor. The roller conveyor port according to claim 2, wherein   The roller conveyor port according to claim 2, wherein the position detection sensor includes an ultrasonic transmitter and an ultrasonic receiver.   The roller conveyor port according to claim 2, wherein the position detection sensor is constituted by a magnetic sensor, and the conveying material is provided with a magnetic member.   The pair of position detection means arranged in the transport direction is composed of a detection member provided in the transport material, a transmission hole formed in the detection member, and a single photosensor. The roller conveyor port according to claim 1. A conveying material positioning method for determining a stop position of a conveying material conveyed by a roller conveyor extending in a conveying direction,
At least a pair of position detection means is arranged in a column in the transport direction, and one of the position detection means is in a detection state, and the other position detection means is in a non-detection state. It is judged that it was conveyed to the said stop position, The positioning method of the conveying material characterized by the above-mentioned.

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