JP2007038170A - Nozzle cleaning device - Google Patents

Nozzle cleaning device Download PDF

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JP2007038170A
JP2007038170A JP2005227001A JP2005227001A JP2007038170A JP 2007038170 A JP2007038170 A JP 2007038170A JP 2005227001 A JP2005227001 A JP 2005227001A JP 2005227001 A JP2005227001 A JP 2005227001A JP 2007038170 A JP2007038170 A JP 2007038170A
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nozzle
cleaning
cleaning liquid
discharge
suction nozzle
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Satoyoshi Okada
悟儀 岡田
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Olympus Corp
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Olympus Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a nozzle cleaning device which can prevent the cleaning liquid from being crystallized out to the upper part of a holder, by suppressing the spring-back height of an ejected cleaning liquid low by a simple constitution. <P>SOLUTION: In the nozzle cleaning device 1 in which an ejection nozzle 3 and a suction nozzle 2 are arranged adjacently to each other, the ejection nozzle 3 ejects the cleaning liquid 6 into a cleaning tank 4, the suction nozzle 2 sucks the cleaning liquid 6 to clean the suction nozzle 2; a discharge part 7 for the cleaning liquid 6 is installed on the suction nozzle 2 side of the cleaning tank 4, the overflow of the cleaning liquid 6 is guided to the discharge part 7, and a splash scattered on the surface of the cleaning liquid 6 is directed to the discharge part 7. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、吐出ノズルと吸引ノズルとが隣接配置され、前記吐出ノズルから洗浄槽に洗浄液を吐出し、前記吸引ノズルが前記洗浄液を吸引し、前記吸引ノズルを洗浄するノズル洗浄装置に関するものである。   The present invention relates to a nozzle cleaning device in which a discharge nozzle and a suction nozzle are disposed adjacent to each other, discharge a cleaning liquid from the discharge nozzle to a cleaning tank, the suction nozzle sucks the cleaning liquid, and cleans the suction nozzle. .

従来、試薬を用いて検体の分析を行う自動分析装置は、これらの試薬あるいは検体をピペット吸引によって分注する分注ノズルを備える。この分注ノズルは、ディスポーザブル型（使い捨て）ノズルの他に、ノズルの内側および外側を洗浄して再利用が可能な洗浄型ノズルが知られ、この洗浄型ノズルを洗浄するノズル洗浄装置が知られている。   Conventionally, an automatic analyzer that analyzes a sample using a reagent includes a dispensing nozzle that dispenses the reagent or the sample by pipette suction. In addition to disposable (disposable) nozzles, there are known cleaning type nozzles that can be reused by cleaning the inside and outside of the nozzle, and a nozzle cleaning device that cleans this cleaning type nozzle. ing.

ノズル洗浄装置においては、吐出ノズルと吸引ノズルとが隣接配置され、吐出ノズルから洗浄槽に洗浄液を吐出し、吸引ノズルによって洗浄液を吸引することによって、吸引ノズルの内側および外側を洗浄する。吐出ノズルから吐出される洗浄液は、高圧力を伴って吐出されるため、吐出ノズルから吐出された洗浄液が洗浄槽から外部に飛散することを防止する技術が開示されている（特許文献１）。   In the nozzle cleaning device, the discharge nozzle and the suction nozzle are disposed adjacent to each other, and the cleaning liquid is discharged from the discharge nozzle to the cleaning tank, and the cleaning liquid is sucked by the suction nozzle, thereby cleaning the inside and the outside of the suction nozzle. Since the cleaning liquid discharged from the discharge nozzle is discharged with a high pressure, a technique for preventing the cleaning liquid discharged from the discharge nozzle from scattering from the cleaning tank to the outside is disclosed (Patent Document 1).

特開平８−２８５８６１号公報JP-A-8-285861

ところで、一般に吐出ノズルから吐出された高圧の洗浄液は、洗浄液面で飛散し跳ね返る。この跳ね返った洗浄液が吐出ノズルと吸引ノズルとを固定するホルダ下部に付着すると、毛細管現象によりホルダ上部に上昇し、ホルダ上部で結晶析出する。この結晶析出物は、外見を損い、装置を使用するユーザーに対し、悪印象を与えるという問題点があった。   By the way, generally, the high-pressure cleaning liquid discharged from the discharge nozzle scatters and rebounds on the surface of the cleaning liquid. When the cleaning liquid that has bounced back adheres to the lower part of the holder that fixes the discharge nozzle and the suction nozzle, it rises to the upper part of the holder due to a capillary phenomenon, and crystals are deposited on the upper part of the holder. This crystal precipitate has a problem that it looks bad and gives a bad impression to a user who uses the apparatus.

また、洗浄液面から跳ね返った洗浄液が吐出ノズルの先端に付着すると、この部分で洗浄液が結晶化して固化し、洗浄液の吐出方向を変化させ、洗浄槽に洗浄液を所定量貯めることができず、吸引ノズルを洗浄できないという問題点があった。   In addition, if the cleaning liquid bounced off the cleaning liquid surface adheres to the tip of the discharge nozzle, the cleaning liquid crystallizes and solidifies at this portion, changes the discharge direction of the cleaning liquid, and the cleaning liquid cannot be stored in a predetermined amount in the cleaning tank. There was a problem that the nozzle could not be cleaned.

本発明は、上記に鑑みてなされたものであって、簡易な構成で洗浄槽に吐出された洗浄液の跳ね返りをホルダおよび吐出ノズルに対して防止できるノズル洗浄装置を提供することを目的とする。   The present invention has been made in view of the above, and an object of the present invention is to provide a nozzle cleaning device that can prevent the cleaning liquid discharged to the cleaning tank from rebounding with respect to the holder and the discharge nozzle with a simple configuration.

上記目的を達成するために、請求項１にかかるノズル洗浄装置は、吐出ノズルと吸引ノズルとが隣接配置され、前記吐出ノズルから洗浄槽に洗浄液を吐出し、前記吸引ノズルが前記洗浄液を吸引し、前記吸引ノズルを洗浄するノズル洗浄装置において、前記洗浄槽の前記吸引ノズル側に前記洗浄液の排出部を設け、前記洗浄液の越流を前記排出部に案内し、前記洗浄液面で飛散した飛沫を前記排出部に向かわせることを特徴とする。   In order to achieve the above object, a nozzle cleaning device according to a first aspect includes a discharge nozzle and a suction nozzle disposed adjacent to each other, and discharges a cleaning liquid from the discharge nozzle to a cleaning tank, and the suction nozzle sucks the cleaning liquid. In the nozzle cleaning device for cleaning the suction nozzle, the cleaning liquid discharge section is provided on the suction nozzle side of the cleaning tank, the overflow of the cleaning liquid is guided to the discharge section, and splashes scattered on the cleaning liquid surface are detected. It is directed to the discharge part.

また、請求項２にかかるノズル洗浄装置は、上記の発明において、前記排出部は、前記吸引ノズル側が低く形成された前記洗浄槽の端面に形成されることを特徴とする。   According to a second aspect of the present invention, there is provided the nozzle cleaning device according to the above invention, wherein the discharge portion is formed on an end surface of the cleaning tank in which the suction nozzle side is formed low.

また、請求項３にかかるノズル洗浄装置は、上記の発明において、前記洗浄槽は、前記吐出ノズル側から前記吸引ノズル側へ向けて下降傾斜した端面を有することを特徴とする。   According to a third aspect of the present invention, there is provided the nozzle cleaning device according to the above invention, wherein the cleaning tank has an end surface that is inclined downward from the discharge nozzle side toward the suction nozzle side.

また、請求項４にかかるノズル洗浄装置は、上記の発明において、前記洗浄槽は、前記吸引ノズル側の端面にスリットを有することを特徴とする。   According to a fourth aspect of the present invention, there is provided the nozzle cleaning device according to the above invention, wherein the cleaning tank has a slit on an end face on the suction nozzle side.

本発明にかかるノズル洗浄装置は、吐出された洗浄液の排出部を吸引ノズル側に設け、洗浄液の跳ね返りを排出部側に誘導することによって、ホルダおよび吐出ノズルに対する洗浄液の付着を防止できるという効果を奏する。   The nozzle cleaning apparatus according to the present invention has an effect of preventing the cleaning liquid from adhering to the holder and the discharge nozzle by providing the discharge section of the discharged cleaning liquid on the suction nozzle side and guiding the rebound of the cleaning liquid to the discharge section side. Play.

以下に添付図面を参照して、この発明にかかるノズル洗浄装置の好適な実施の形態を詳細に説明する。   Exemplary embodiments of a nozzle cleaning device according to the present invention will be explained below in detail with reference to the accompanying drawings.

（実施の形態）
図１は、この発明にかかるノズル洗浄装置１の概要構成を示す断面模式図である。図１に示すように、このノズル洗浄装置１は、洗浄液６を吐出する吐出ノズル３と、洗浄液６を吸引する吸引ノズル２と、洗浄液６を貯留する洗浄槽４と、吐出ノズル３と吸引ノズル２とを固定するホルダ５とを有する。 (Embodiment)
FIG. 1 is a schematic cross-sectional view showing a schematic configuration of a nozzle cleaning device 1 according to the present invention. As shown in FIG. 1, the nozzle cleaning device 1 includes a discharge nozzle 3 that discharges a cleaning liquid 6, a suction nozzle 2 that sucks the cleaning liquid 6, a cleaning tank 4 that stores the cleaning liquid 6, a discharge nozzle 3, and a suction nozzle. 2 and a holder 5 for fixing the two.

洗浄槽４の上部は、３２°に傾斜した端面が形成され、この傾斜は、吐出ノズル３側から吸引ノズル２側へ向かって低くなっている。この傾斜の最も低い位置が洗浄液６の排出部７となる。また、洗浄槽４は、この傾斜を有する上部が下部に比して大口径となっており、ノズルホルダ（図示せず）に容易に矜持されるようになっている。   The upper surface of the cleaning tank 4 is formed with an end face inclined at 32 °, and this inclination is lowered from the discharge nozzle 3 side toward the suction nozzle 2 side. The position with the lowest inclination is the discharge part 7 for the cleaning liquid 6. Moreover, the upper part which has this inclination has a large diameter compared with the lower part, and the washing tank 4 is easily held by a nozzle holder (not shown).

吸引ノズル２の先端は、吐出ノズル３の先端よりも長く、吐出ノズル３は、洗浄液６を吐出し洗浄槽４を洗浄液６によって満たし、吸引ノズル２の外側を洗浄する。吸引ノズル２は、洗浄槽４に満たされた洗浄液６を吸引し、吸引ノズル２の内側を洗浄する。吐出ノズル３の先端と洗浄槽４に満たされた洗浄液６の液面とは、ほぼ一致している。   The tip of the suction nozzle 2 is longer than the tip of the discharge nozzle 3, and the discharge nozzle 3 discharges the cleaning liquid 6, fills the cleaning tank 4 with the cleaning liquid 6, and cleans the outside of the suction nozzle 2. The suction nozzle 2 sucks the cleaning liquid 6 filled in the cleaning tank 4 and cleans the inside of the suction nozzle 2. The tip of the discharge nozzle 3 and the liquid level of the cleaning liquid 6 filled in the cleaning tank 4 are substantially coincident.

ところで、この洗浄槽４の上部に形成された傾斜によって、吸引ノズル２側に洗浄液６の排出部７が形成され、吐出ノズル４から吐出された洗浄液６は、排出部７に向かい排出される。吐出ノズル３から洗浄液６の液面に吐出されることにより、液面では、吐出ノズル３側から排出部７への流れが形成されている。そこで、吐出ノズル３から液面に吐出され飛散した飛沫は、液面で形成された流れに沿って跳ね返り、排出部７方向に向かう。   By the way, the discharge portion 7 for the cleaning liquid 6 is formed on the suction nozzle 2 side by the inclination formed in the upper portion of the cleaning tank 4, and the cleaning liquid 6 discharged from the discharge nozzle 4 is discharged toward the discharge portion 7. By discharging from the discharge nozzle 3 onto the liquid surface of the cleaning liquid 6, a flow from the discharge nozzle 3 side to the discharge portion 7 is formed on the liquid surface. Therefore, the splashes discharged and scattered from the discharge nozzle 3 bounce along the flow formed on the liquid surface and travel toward the discharge unit 7.

図２は、このノズル洗浄装置１の概要構成を示す上面図である。黒色の矢印は、洗浄液６上部の流れの方向を示す。図２に示すように、吐出ノズル３から吐出された洗浄液６は、洗浄槽４の洗浄液６の流れに従い、吸引ノズル２を回り込むようにして排出部７に向かう。   FIG. 2 is a top view showing a schematic configuration of the nozzle cleaning device 1. The black arrow indicates the direction of flow above the cleaning liquid 6. As shown in FIG. 2, the cleaning liquid 6 discharged from the discharge nozzle 3 follows the flow of the cleaning liquid 6 in the cleaning tank 4 and travels around the suction nozzle 2 toward the discharge unit 7.

図３は、このノズル洗浄装置１の吐出ノズル３先端部を示した拡大断面図である。黒色の矢印は、吐出ノズル３から吐出される洗浄液６の方向と、洗浄液６表面の流れと、吐出された洗浄液６の飛散方向を示す。図３に示すように、吐出ノズル３から洗浄液６が垂直に吐出されるが、吐出された洗浄液６の表面には、排出部７に向う流れが形成されている。そのため、吐出ノズル３から吐出され、洗浄液６の液面で飛散する飛沫は、洗浄液６の流れに従って、排出部７の方向へ向かう。   FIG. 3 is an enlarged cross-sectional view showing the tip of the discharge nozzle 3 of the nozzle cleaning device 1. The black arrows indicate the direction of the cleaning liquid 6 discharged from the discharge nozzle 3, the flow on the surface of the cleaning liquid 6, and the scattering direction of the discharged cleaning liquid 6. As shown in FIG. 3, the cleaning liquid 6 is discharged vertically from the discharge nozzle 3, and a flow toward the discharge unit 7 is formed on the surface of the discharged cleaning liquid 6. Therefore, the droplets discharged from the discharge nozzle 3 and scattered on the surface of the cleaning liquid 6 are directed toward the discharge unit 7 according to the flow of the cleaning liquid 6.

洗浄液６で飛散した飛沫が垂直に吐出ノズル３方向に向かわず、排出部７方向に向かう。このため、吐出ノズル３方向に跳ね返る飛沫の高さは低くなり、ホルダ５下部に達する洗浄液６の量が減少し、毛細管現象によりホルダ５上部に上昇する洗浄液６の量を低減できる、この結果、ホルダ５上部での洗浄液６の結晶化を防止できる。   The splashes scattered by the cleaning liquid 6 do not go in the direction of the discharge nozzle 3 vertically but in the direction of the discharge unit 7. For this reason, the height of the splash splashing in the direction of the discharge nozzle 3 is reduced, the amount of the cleaning liquid 6 reaching the lower part of the holder 5 is reduced, and the amount of the cleaning liquid 6 rising to the upper part of the holder 5 due to capillary action can be reduced. Crystallization of the cleaning liquid 6 on the upper part of the holder 5 can be prevented.

ここで、この発明にかかる洗浄槽４と従来の洗浄槽とによる洗浄液の跳ね返りの高さに関する実証実験を行った。図６は、従来の洗浄槽４Ｄの外観を示す斜視図であり、洗浄槽４Ｄは、全体の形状がテーパ状となっており、上部は、下部に比して大口径になっている。   Here, a demonstration experiment on the height of the rebound of the cleaning liquid by the cleaning tank 4 according to the present invention and the conventional cleaning tank was performed. FIG. 6 is a perspective view showing an appearance of a conventional cleaning tank 4D. The cleaning tank 4D has a tapered shape as a whole, and the upper part has a larger diameter than the lower part.

洗浄液６の液面とホルダ５の下端との距離を２１ｍｍとした場合、この発明にかかる洗浄槽４を用いた場合、跳ね返り高さは、最大９ｍｍであり、洗浄槽４Ｄを用いた場合、跳ね返り高さは、最大１８ｍｍであった。つまり、洗浄槽４を用いた場合、洗浄液６の跳ね返り高さを従来の１／３に抑制でき、ホルダ５上部での洗浄液６の結晶析出を防止できる。   When the distance between the liquid level of the cleaning liquid 6 and the lower end of the holder 5 is 21 mm, when the cleaning tank 4 according to the present invention is used, the rebound height is 9 mm at the maximum, and when the cleaning tank 4D is used, the rebound is rebounded. The height was a maximum of 18 mm. That is, when the cleaning tank 4 is used, the rebound height of the cleaning liquid 6 can be suppressed to 1/3 of the conventional level, and crystal precipitation of the cleaning liquid 6 on the holder 5 can be prevented.

この実施の形態では、洗浄槽４に洗浄液６を排出する排出部７を設けることによって、洗浄液６の跳ね返り高さを抑制し、ホルダ５上部での洗浄液６の結晶析出を確実に防止できる。   In this embodiment, by providing the discharge section 7 for discharging the cleaning liquid 6 in the cleaning tank 4, the rebound height of the cleaning liquid 6 can be suppressed, and the crystal deposition of the cleaning liquid 6 on the holder 5 can be reliably prevented.

（変形例１）
実施の形態では、洗浄槽４の上部を傾斜させた形状に形成し、下部をストレート管にしていたが、この変形例１では、ストレート管を斜めに切断し、洗浄槽を容易に製造できるようにしている。図４は、この変形例１にかかる洗浄槽４Ａの外観を示す斜視図である。図４に示すように、洗浄槽４Ａは、ストレート円管を斜めに切断して形成されたものであり、傾斜の下端が排出部７となっている。 (Modification 1)
In the embodiment, the upper part of the cleaning tank 4 is formed in an inclined shape and the lower part is formed as a straight pipe. However, in this modification 1, the straight pipe is cut obliquely so that the cleaning tank can be easily manufactured. I have to. FIG. 4 is a perspective view showing an appearance of the cleaning tank 4A according to the first modification. As shown in FIG. 4, the cleaning tank 4 </ b> A is formed by obliquely cutting a straight circular tube, and the lower end of the inclination is the discharge portion 7.

（変形例２）
実施の形態では、洗浄槽４の吸引ノズル側に低い端面を形成し排出部７を形成していたが、このようにして形成した排出部７は、吐出ノズル３の吐出量等によって部位が変動する。この変形例２では、洗浄槽にスリットを設け排出部を確定するようにしている。 (Modification 2)
In the embodiment, the lower end face is formed on the suction nozzle side of the cleaning tank 4 to form the discharge portion 7. However, the portion of the discharge portion 7 formed in this way varies depending on the discharge amount of the discharge nozzle 3 and the like. To do. In this modified example 2, a slit is provided in the cleaning tank so as to determine the discharge part.

図５は、この変形例２にかかる洗浄槽４Ｂの外観を示す斜視図である。図５に示すように、この洗浄槽４Ｂは、全体が円管形状であり、上部に切り欠きが形成されている。この切りかきが洗浄液６の排出部７となる。この排出部７は、多少の洗浄液６の吐出条件が変動しても排出する位置が不動であり、跳ね返り高さが洗浄液６の吐出条件に左右されない利点がある。   FIG. 5 is a perspective view showing an appearance of the cleaning tank 4B according to the second modification. As shown in FIG. 5, the entire cleaning tank 4B has a circular tube shape, and a notch is formed in the upper part. This scraping becomes the discharge part 7 for the cleaning liquid 6. The discharge portion 7 has an advantage that the discharge position does not move even if the discharge condition of the cleaning liquid 6 slightly fluctuates, and the bounce height does not depend on the discharge condition of the cleaning liquid 6.

この発明の実施の形態にかかるノズル洗浄装置の概要構成を示す断面図である。It is sectional drawing which shows schematic structure of the nozzle washing | cleaning apparatus concerning embodiment of this invention. この発明の実施の形態にかかるノズル洗浄装置の概要構成を示す上面図である。It is a top view which shows schematic structure of the nozzle cleaning apparatus concerning embodiment of this invention. この発明の実施の形態にかかる洗浄槽上部を示す断面図である。It is sectional drawing which shows the washing tank upper part concerning embodiment of this invention. この発明の実施の形態の変形例１にかかる洗浄槽の外観を示す斜視図である。It is a perspective view which shows the external appearance of the washing tank concerning the modification 1 of embodiment of this invention. この発明の実施の形態の変形例２にかかる洗浄槽の外観を示す斜視図である。It is a perspective view which shows the external appearance of the washing tank concerning the modification 2 of embodiment of this invention. 従来の洗浄槽の外観を示す斜視図である。It is a perspective view which shows the external appearance of the conventional washing tank.

符号の説明Explanation of symbols

１ ノズル洗浄装置
２ 吸引ノズル
３ 吐出ノズル
４，４Ａ，４Ｂ，４Ｃ 洗浄槽
５ ホルダ
６ 洗浄液
７ 排出部 DESCRIPTION OF SYMBOLS 1 Nozzle cleaning apparatus 2 Suction nozzle 3 Discharge nozzle 4, 4A, 4B, 4C Cleaning tank 5 Holder 6 Cleaning liquid 7 Discharge part

Claims (4)

吐出ノズルと吸引ノズルとが隣接配置され、前記吐出ノズルから洗浄槽に洗浄液を吐出し、前記吸引ノズルが前記洗浄液を吸引し、前記吸引ノズルを洗浄するノズル洗浄装置において、
前記洗浄槽の前記吸引ノズル側に前記洗浄液の排出部を設け、前記洗浄液の越流を前記排出部に案内し、前記洗浄液面で飛散した飛沫を前記排出部に向かわせることを特徴とするノズル洗浄装置。 In a nozzle cleaning device in which a discharge nozzle and a suction nozzle are arranged adjacently, the cleaning liquid is discharged from the discharge nozzle to a cleaning tank, the suction nozzle sucks the cleaning liquid, and the suction nozzle is cleaned.
A nozzle provided with a discharge part of the cleaning liquid on the suction nozzle side of the cleaning tank, guides the overflow of the cleaning liquid to the discharge part, and directs splashes scattered on the surface of the cleaning liquid toward the discharge part Cleaning device. 前記排出部は、前記吸引ノズル側が低く形成された前記洗浄槽の端面に形成されることを特徴とする請求項１に記載のノズル洗浄装置。   2. The nozzle cleaning device according to claim 1, wherein the discharge unit is formed on an end surface of the cleaning tank in which the suction nozzle side is formed low. 前記洗浄槽は、前記吐出ノズル側から前記吸引ノズル側へ向けて下降傾斜した端面を有することを特徴とする請求項１または２に記載のノズル洗浄装置。   The nozzle cleaning device according to claim 1, wherein the cleaning tank has an end surface that is inclined downward from the discharge nozzle side toward the suction nozzle side. 前記洗浄槽は、前記吸引ノズル側の端面にスリットを有することを特徴とする請求項１または２に記載のノズル洗浄装置。   The nozzle cleaning apparatus according to claim 1, wherein the cleaning tank has a slit on an end surface on the suction nozzle side.
JP2005227001A 2005-08-04 2005-08-04 Nozzle cleaning device Pending JP2007038170A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106513355A (en) * 2015-09-09 2017-03-22 沈阳芯源微电子设备有限公司 Nozzle washing device and nozzle washing method
CN111569117A (en) * 2020-06-02 2020-08-25 杭州禄宏康养科技有限公司 Gynaecology is with medical care articles for use degassing unit

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06230014A (en) * 1993-02-02 1994-08-19 Olympus Optical Co Ltd Automatic analysis device
JPH06324053A (en) * 1993-05-13 1994-11-25 Hitachi Ltd Automatic chemical analyzer
JPH077787U (en) * 1993-06-29 1995-02-03 佳英 柴野 Ultrasonic cleaning tank
JPH08285861A (en) * 1995-04-17 1996-11-01 Aloka Co Ltd Nozzle cleaner

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06230014A (en) * 1993-02-02 1994-08-19 Olympus Optical Co Ltd Automatic analysis device
JPH06324053A (en) * 1993-05-13 1994-11-25 Hitachi Ltd Automatic chemical analyzer
JPH077787U (en) * 1993-06-29 1995-02-03 佳英 柴野 Ultrasonic cleaning tank
JPH08285861A (en) * 1995-04-17 1996-11-01 Aloka Co Ltd Nozzle cleaner

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106513355A (en) * 2015-09-09 2017-03-22 沈阳芯源微电子设备有限公司 Nozzle washing device and nozzle washing method
CN106513355B (en) * 2015-09-09 2019-11-26 沈阳芯源微电子设备股份有限公司 A kind of nozzle cleaning and cleaning method
CN111569117A (en) * 2020-06-02 2020-08-25 杭州禄宏康养科技有限公司 Gynaecology is with medical care articles for use degassing unit
CN111569117B (en) * 2020-06-02 2021-06-04 湖南省妇幼保健院 Gynaecology is with medical care articles for use degassing unit

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