JP2007033392A5 - - Google Patents
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- JP2007033392A5 JP2007033392A5 JP2005220980A JP2005220980A JP2007033392A5 JP 2007033392 A5 JP2007033392 A5 JP 2007033392A5 JP 2005220980 A JP2005220980 A JP 2005220980A JP 2005220980 A JP2005220980 A JP 2005220980A JP 2007033392 A5 JP2007033392 A5 JP 2007033392A5
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- JP
- Japan
- Prior art keywords
- signal
- radiation
- pulse
- detection element
- radiation detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 230000005855 radiation Effects 0.000 claims 17
- 238000001514 detection method Methods 0.000 claims 8
- 238000001228 spectrum Methods 0.000 claims 7
- 238000004458 analytical method Methods 0.000 claims 3
- 230000035945 sensitivity Effects 0.000 claims 3
- 238000010894 electron beam technology Methods 0.000 claims 2
- 150000002500 ions Chemical class 0.000 claims 2
- 238000007493 shaping process Methods 0.000 claims 2
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000012216 screening Methods 0.000 claims 1
Claims (3)
前記放射線検出素子を駆動する電力供給手段と、
前記放射線検出素子からの信号を電気信号に変換し増幅する信号読み出し手段と、
前記増幅された電気信号の波形をパルス信号に整形処理する波形整形器と、
前記パルス信号を波高スペクトルに対応して選別する波高分析器とからなる放射線分析
装置において、
前記放射線検出素子に異なる２種類以上の波高値の電流パルスを印加するパルス信号印加手段と、
前記波高分析器から出力された波高スペクトルと前記電流パルスに対応するエネルギー
スペクトルとから感度補正を行う演算処理装置と
を備えることを特徴とする放射線分析装置。 A radiation detection element that detects radiation energy as a temperature change;
Power supply means for driving the radiation detection element;
A signal readout means for converting a signal from the radiation detection element into an electric signal and amplifying the signal;
A waveform shaper for shaping the waveform of the amplified electrical signal into a pulse signal;
In a radiation analyzer comprising a pulse height analyzer for selecting the pulse signal corresponding to a pulse height spectrum,
Pulse signal applying means for applying current pulses of two or more different peak values to the radiation detection element;
A radiation analysis apparatus comprising: an arithmetic processing unit that performs sensitivity correction from a wave height spectrum output from the wave height analyzer and an energy spectrum corresponding to the current pulse.
該筐体に納められた電子線、イオン、Ｘ線のいずれかを放出する線源と、
試料ホルダと、
を備え、
該試料ホルダ上の試料に前記電子線、イオン、Ｘ線のいずれかを照射し、前記試料から
発生するＸ線のエネルギーを請求項１に記載の放射線分析装置により
分析することを特徴とするＸ線計測装置。 A housing,
A radiation source that emits one of electron beams, ions, and X-rays contained in the housing;
A sample holder;
With
The X-ray energy generated by irradiating the sample on the sample holder with one of the electron beam, ion, and X-ray, and analyzing the X-ray energy generated from the sample with the radiation analyzer according to claim 1 Line measuring device.
放射線照射によって試料から放射される放射線を放射線検出素子で検出する工程と、
前記放射線検出素子からの信号を信号読み出し手段によって電気信号に変換し増幅する
工程と、
波形整形器により前記電気信号をパルス信号に波形整形処理する工程と、
波高分析器により前記波形整形されたパルス信号を波高値に対応して選別する工程と、
波高分析器で前記選別された波高値に対応した計数値を示す波高スペクトルにする工程
とからなる放射線分析方法において、
パルス信号印加手段から異なる２種類以上の波高値の電流パルスを放射線検出素子に供給する工程と、
前記波高分析器から出力された前記電流パルスを含む波高スペクトルを演算処理装置回
路で保存する工程と、
該演算処理装置で、前記保存された波高スペクトルの前記電流パルス信号に対応する波
高エネルギーと前記電流パルスに対応するエネルギースペクトルとから、前記異なる２種類以上の前記電流パルスごとに感度係数を求める感度係数を求める工程を有することを特徴とする放射線分析方法。 Supplying power to the radiation detection element by means of power supply means;
A step of detecting radiation emitted from the sample by radiation irradiation with a radiation detection element;
Converting the signal from the radiation detection element into an electric signal by a signal reading means and amplifying the signal;
A step of waveform shaping the electrical signal into a pulse signal by a waveform shaper;
Screening the waveform-shaped pulse signal by a wave height analyzer according to the wave height value; and
In a radiation analysis method comprising a step of making a pulse height spectrum indicating a count value corresponding to the selected peak value by a pulse height analyzer,
Supplying two or more different peak current pulses from the pulse signal applying means to the radiation detection element;
Storing a wave height spectrum including the current pulse output from the wave height analyzer in an arithmetic processing unit circuit;
Sensitivity for obtaining a sensitivity coefficient for each of the two or more different current pulses from the pulse height energy corresponding to the current pulse signal of the stored pulse height spectrum and the energy spectrum corresponding to the current pulse in the arithmetic processing unit. A radiation analysis method comprising a step of obtaining a coefficient.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005220980A JP2007033392A (en) | 2005-07-29 | 2005-07-29 | Radiation analyzer and radiation analysis method, and x-ray measuring device using the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005220980A JP2007033392A (en) | 2005-07-29 | 2005-07-29 | Radiation analyzer and radiation analysis method, and x-ray measuring device using the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2007033392A JP2007033392A (en) | 2007-02-08 |
| JP2007033392A5 true JP2007033392A5 (en) | 2008-05-22 |
Family
ID=37792824
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005220980A Withdrawn JP2007033392A (en) | 2005-07-29 | 2005-07-29 | Radiation analyzer and radiation analysis method, and x-ray measuring device using the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2007033392A (en) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5146745B2 (en) * | 2008-05-09 | 2013-02-20 | エスアイアイ・ナノテクノロジー株式会社 | X-ray analyzer |
| JP5146746B2 (en) * | 2008-05-14 | 2013-02-20 | エスアイアイ・ナノテクノロジー株式会社 | X-ray analyzer |
| JP5216673B2 (en) * | 2009-04-09 | 2013-06-19 | 浜松ホトニクス株式会社 | Light receiver for distance meter and distance meter |
| JP2015094624A (en) * | 2013-11-11 | 2015-05-18 | 国立大学法人京都大学 | Radiation detection system, data processing apparatus, radiation detection method, and wave height value distribution data processing program |
| KR101672874B1 (en) | 2014-04-17 | 2016-11-29 | 아주대학교산학협력단 | Apparatus for detecting radiation portable and method using the same |
| JP6516320B2 (en) | 2015-01-20 | 2019-05-22 | 株式会社日立ハイテクサイエンス | Radiation analyzer |
| JP6510245B2 (en) | 2015-01-20 | 2019-05-08 | 株式会社日立ハイテクサイエンス | Radiation analyzer |
| JP7026443B2 (en) * | 2017-03-03 | 2022-02-28 | 三菱電機株式会社 | Radioactive dust monitor |
| JP2018162984A (en) * | 2017-03-24 | 2018-10-18 | 株式会社日立ハイテクサイエンス | Radiation analyzer |
| CN109507714B (en) * | 2018-12-27 | 2020-06-05 | 江苏赛诺格兰医疗科技有限公司 | Method for rapidly judging gain state of detector |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004361275A (en) * | 2003-06-05 | 2004-12-24 | Sii Nanotechnology Inc | Radiation measuring instrument, and analyzer using the same |
-
2005
- 2005-07-29 JP JP2005220980A patent/JP2007033392A/en not_active Withdrawn
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