JP2007026562A - Thin-film magnetic head and its manufacturing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a thin-film magnetic head capable of simultaneously satisfying high density recording and leakage magnetic field reduction in accordance with the improvement of track density, and its manufacturing method. <P>SOLUTION: A recording head tip comprises a lower magnetic pole main layer 14, a lower magnetic pole tip layer 16, a projecting part 26, a recording gap layer 28, an upper magnetic pole tip layer 34 and an upper magnetic pole upper layer 46. The projecting part 26 is made of a soft magnetic material of high saturation magnetic flux density Bs, has saturation magnetic flux density Bs higher than that of the lower magnetic pole tip layer 16 and has width being almost the same as track width Tw of the upper magnetic pole tip layer 34. When the saturation magnetic flux density Bs of the lower magnetic pole tip layer 16 is about 2. 2T, it is desirable that the saturation magnetic flux density Bs of the projecting part 26 is around 2. 4T. Additionally, the depth Ln of the projecting part 26 is longer than the depth Gd of the lower magnetic pole tip layer 16 in which throat height is substantially determined. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a thin film magnetic head used in a magnetic disk device and a manufacturing method thereof, and more particularly to a thin film magnetic head suitable for high density recording and a manufacturing method thereof.

  In recent years, with the improvement in recording density of magnetic disk devices, there has been a strong demand for the development of a thin film magnetic head with improved recording medium performance and excellent recording / reproducing characteristics. Currently, as a reproducing head, a head using a GMR (giant magnetoresistive effect) element capable of obtaining a high reproducing output is used. In addition, TMR (tunnel magnetoresistive) elements and CPP (Current Perpendicular to Planer) elements capable of obtaining higher reproduction sensitivity have been developed. On the other hand, a conventional induction type thin film recording head using electromagnetic induction is used as the recording head, and a thin film magnetic head in which the above reproducing head and recording head are integrally formed is used.

  In order to realize high density recording, it is necessary to improve track density as well as linear recording density. When the track density is improved and the track pitch is narrowed, information on adjacent tracks is affected by a leakage magnetic field from the recording head, and a so-called ATI (Adjacent Track Interference) problem occurs in which signals are erased or weakened.

  Conventionally, measures have been taken to reduce the leakage magnetic field during recording, such as lowering the recording magnetic field itself, narrowing the recording track width, etc. Considering recording on a high coercive force medium for the purpose of increasing the track density However, it has been difficult to satisfy high density recording and leakage magnetic field reduction at the same time with the measures taken so far.

  In Patent Document 1, a lower magnetic pole tip having a width in the track width direction smaller than the width of the lower magnetic pole main layer is provided on the lower magnetic pole main layer, and the width of the air bearing surface on the upper magnetic pole side of the lower magnetic pole tip is the track width. The track width accuracy is improved by providing a protrusion step portion whose width in the position away from the air bearing surface in the rear direction of the head is larger than the width of the upper magnetic pole, and unnecessary medium surface at the off-track position A thin film magnetic head is disclosed in which the magnetic field strength is increased by reducing the internal magnetic field and further increasing the height of the lower magnetic pole tip.

  In Patent Document 2, a bottom pole tip layer is provided on a bottom pole main layer, and a bottom pole projection layer, a recording gap layer, and a top pole tip layer having substantially the same planar shape on the flat surface are formed from the bottom pole tip layer. A thin film that eliminates the need for trimming the bottom pole, improves the track width accuracy, and reduces the leakage flux from the top pole tip layer to the bottom pole main layer by forming the same frame using a plating method so as to be long. A magnetic head is disclosed.

JP 2003-36506 A JP 2003-85709 A

  In order to realize high-density recording and reduction of leakage magnetic field, it is necessary to shorten the throat height to increase the recording magnetic field and prevent magnetic saturation at the magnetic pole tip. In the invention described in Patent Document 1, when the throat height is shortened, magnetic saturation at the tip of the magnetic pole becomes a problem. In the invention described in Patent Document 2, since the lower magnetic pole protrusion layer, the recording gap layer, and the upper magnetic pole tip layer are formed by plating, the selection of the material for the lower magnetic pole protrusion is limited, and a high recording magnetic field is generated. There is a limit.

  An object of the present invention is to provide a thin film magnetic head that can satisfy high density recording and leakage magnetic field reduction simultaneously, and a method of manufacturing the same.

  In order to achieve the above object, a representative thin film magnetic head of the present invention includes a reproducing unit having a magnetic shield layer and a reproducing element formed on a substrate, a lower magnetic pole and an upper magnetic pole facing each other with a recording gap therebetween. In the thin film magnetic head that combines the recording portion having the lower magnetic pole and the coil that goes around the upper magnetic pole, the lower magnetic pole is the lower magnetic pole main layer, and the lower magnetic pole tip layer provided on the air bearing surface side of the lower magnetic pole main layer A lower magnetic pole rear end layer provided at the rear end of the lower magnetic pole main layer, and a soft magnetic material protrusion provided on the lower magnetic pole front end layer, having a saturation magnetic flux density higher than that of the lower magnetic pole front end layer, The upper magnetic pole has an upper magnetic pole tip layer facing the protrusion, and an upper magnetic pole upper layer magnetically connected to the upper magnetic pole front end layer and the lower magnetic pole rear end layer. It is characterized by having.

  According to the present invention, it is possible to provide a thin film magnetic head capable of satisfying both high density recording and leakage magnetic field reduction and a method for manufacturing the same.

  Hereinafter, the present invention will be described in detail with reference to examples. A configuration example of the thin film magnetic head according to the first embodiment is shown in FIGS. FIG. 1 is a perspective view and a partially enlarged view of the vicinity of the leading end of the recording head, and FIG. 2 is a sectional view of the entire head. In FIG. 2, since it will become complicated if each part is hatched, only the characteristic part is hatched. First, the configuration of the entire head will be described with reference to FIG. A lower magnetic shield layer 4 made of a soft magnetic material is provided on a substrate 2 made of a nonmagnetic material to improve reproduction resolution and eliminate the influence of an external magnetic field, and a reproduction gap made of a nonmagnetic insulating material is provided thereon. 6 is provided, and a reproducing element 8 made of a GMR element, a TMR element, or a CPP element is provided in the reproducing gap. An upper magnetic shield layer 10 is provided thereon, and a separate layer 12 made of a nonmagnetic material for separating the recording head and the reproducing head is further provided.

  A lower magnetic pole main layer 14 is provided on the separate layer 12, and a lower magnetic pole tip layer 16 and a lower magnetic pole rear end layer 18 are provided on the lower magnetic pole main layer 14. A lower coil 22 is provided between the lower magnetic pole front end layer 16 and the lower magnetic pole rear end layer 18 via a nonmagnetic insulating layer 20, and a nonmagnetic insulating material 24 is filled between and above the lower coil 22. . A protrusion 26 and a recording gap layer 28 made of a soft magnetic layer are provided on the bottom pole tip layer 16 and the nonmagnetic insulating layer 24, and a nonmagnetic insulating layer 30 is provided behind the protrusion 26 and the recording gap layer 28. Filled. The lower magnetic pole main layer 14, the lower magnetic pole front end layer 16, the lower magnetic pole rear end layer 18, and the protrusion 26 constitute a lower magnetic pole.

  An insulating layer 32 used for trimming the protrusion 26 remains on the recording gap layer 28 and the nonmagnetic insulating layer 30, and an upper magnetic pole tip layer 34 and an upper magnetic pole rear end layer 36 are provided before and after this. Yes. A nonmagnetic insulating layer 38 is filled between the upper magnetic pole front end layer 34 and the upper magnetic pole rear end layer 36, and an upper coil 42 is provided on the nonmagnetic insulating layer 38 via a nonmagnetic insulating layer 40. A nonmagnetic insulating material 44 is filled between 42 and the upper part. An upper magnetic pole upper layer 46 magnetically connected to the upper magnetic pole front end layer 34 and the upper magnetic pole rear end layer 36 is provided thereon, and a protective layer 50 covering the entire head is provided. The upper magnetic pole upper layer 46, the upper magnetic pole front end layer 34, and the upper magnetic pole rear end layer 36 constitute an upper magnetic pole.

  The tip 47 of the upper magnetic pole upper layer 46 is recessed from the air bearing surface ABS, and the rear end 48 and the upper magnetic pole rear end layer 36 of the upper magnetic pole upper layer 46 are magnetically connected to the lower magnetic pole rear end layer 18. The lower layer coil 22 and the upper layer coil 42 are configured to go around the lower magnetic pole rear end layer 18 and the rear end portion 48 of the upper magnetic pole upper layer 46. By applying a recording current to the lower layer coil 22 and the upper layer coil 42, the lower magnetic pole tip layer 16, the lower magnetic pole main layer 14, the lower magnetic pole trailing layer 18, the upper magnetic pole trailing layer 36, the upper magnetic pole upper layer 46, and the upper magnetic pole tip. A magnetic flux is induced in the layer 34, and a signal is recorded on a recording medium (magnetic disk) 100 that moves away from the air bearing surface ABS by a recording magnetic field generated from the tip of the recording gap layer 28.

  FIG. 1 shows the bottom pole main layer 14, bottom pole tip layer 16, protrusion 26, recording gap layer 28, top pole tip layer 34, and top pole top layer 46 near the tip of the recording head. The protrusion 26 is made of a soft magnetic material having a high saturation magnetic flux density Bs, has a saturation magnetic flux density Bs higher than that of the lower magnetic pole tip layer 16, and has a width substantially the same as the track width Tw of the upper magnetic pole tip layer 34. When the saturation magnetic flux density Bs of the lower magnetic pole tip layer 16 is about 2.2 T, it is desirable that the saturation magnetic flux density Bs of the protrusion 26 is 2.3 T or more and about 2.4 T. Further, the depth Ln of the protrusion 26 is longer than the depth Gd of the lower magnetic pole tip layer 16 that substantially determines the throat height. The protrusion 26 may be made of only a high Bs material, or the lower magnetic pole tip layer 16 below the protrusion 26 may be protruded by trimming to constitute a part of the protrusion 26. The upper magnetic pole tip layer 34 may be a single soft magnetic material having a saturation magnetic flux density Bs higher than that of the upper magnetic pole main layer 46, but has a three-layer structure as shown in FIG. The layer P1 is a high Bs material of 2.4T or more, the second soft magnetic layer P2 thereon is a 1.7T-2.4T Bs material, and the third soft magnetic layer P3 thereon is about 1.7T. By using the Bs material, the magnetic flux can be efficiently guided to the recording gap side and the tip of the magnetic pole.

  As described above, the protrusion 26 is formed of a high Bs soft magnetic material and is higher than the Bs of the lower magnetic pole tip layer 16, thereby preventing magnetic saturation of the protrusion 26. Further, by reducing the depth Gd of the bottom pole tip layer 16, the leakage magnetic field from the top pole tip layer 34 to the bottom pole tip layer 16 can be reduced. Accordingly, the magnetic flux guided to the upper magnetic pole tip layer 34 is prevented from leaking to the lower magnetic pole tip layer 16 in the middle, and the protrusion 26 is not magnetically saturated, and therefore an unnecessary fringe magnetic field is generated in the track width direction. Can be reduced. That is, generation of a strong recording magnetic field necessary for high density recording and reduction of leakage magnetic field can be satisfied at the same time.

  The surface on which the top pole tip layer 34 is formed needs to be flattened (CMP) in order to realize the formation of the track width with high accuracy, but the soft magnetic layer of the high Bs material constituting the protrusion 26 is reproducible. In order to arrange well, it is necessary to form a film after the planarization process in consideration of the end point accuracy of CMP. Further, in order to generate a strong recording magnetic field, it is necessary to shorten the throat height, and therefore, a process margin for forming a high Bs film pattern in a portion having a short length (projecting portion of the bottom pole tip layer 16). Becomes narrower. However, the protrusion 26 is formed with good reproducibility by making the length of the protrusion 26 longer than the length (depth) Gd of the bottom pole tip layer 16 that determines the throat height as in the above embodiment. A process margin can be secured.

Next, a method of manufacturing the thin film magnetic head according to the first embodiment will be described with reference to FIGS. 3A to 3K. As shown in FIG. 3A, a lower magnetic shield layer 4 made of a soft magnetic material is formed on a substrate 2 made of a ceramic material such as Al ₂ O ₃ —TiC by plating, and a reproduction made of a nonmagnetic insulating material is formed thereon. A reproducing element 8 made of a GMR element, TMR element, or CPP element is formed in the gap 6 and reproducing gap by sputtering. An upper magnetic shield layer 10 made of a soft magnetic material is formed on the reproduction gap 6 by plating. Further, a separate layer 12 made of a nonmagnetic material that separates the recording head and the reproducing head is formed by sputtering.

  Subsequently, as shown in FIG. 3B, a lower magnetic pole main layer 14 made of a soft magnetic material is formed by a plating method, and the lower magnetic pole tip layer 16 is placed at a position exposed at the air bearing surface ABS of the lower magnetic pole main layer 14 at the back gap position. The lower magnetic pole rear end layer 18 is formed by plating with a soft magnetic material having a saturation magnetic flux density Bs of about 2.2T.

Next, as shown in FIG. 3C, a nonmagnetic insulating layer 20 is filled between the lower magnetic pole front end layer 16 and the lower magnetic pole rear end layer 18 by sputtering, and a lower layer coil 22 such as Cu is formed on the nonmagnetic insulating layer 20. It is formed by a plating method. An insulating material such as a resist is filled between the lower coil 20 by a coating method, and a nonmagnetic insulating layer 24 made of Al ₂ O ₃ or the like is formed thereon by sputtering. After forming the nonmagnetic insulating layer 24, planarization is performed by CMP.

Subsequently, as shown in FIG. 3D, a soft magnetic layer serving as the protrusion 26 is formed by sputtering a soft magnetic material having a saturation magnetic flux density Bs of about 2.4 T, and a non-magnetic layer such as Al ₂ O ₃ is formed thereon. A recording gap layer 28 made of a magnetic insulating material is formed by sputtering.

  Next, as shown in FIG. 3E, the recording gap layer 28 on the lower magnetic pole rear end layer 18 is removed by ion milling, and a resist is selectively formed at positions corresponding to the lower magnetic pole front end layer 16 and the lower magnetic pole rear end layer 18. Pattern R is formed. At this time, the resist pattern R has an overhang shape for lift-off. The rear end on the air bearing surface side of the resist pattern R is on the back gap side from the rear end of the lower magnetic pole front end layer 16. This positional relationship has an advantage that the lower magnetic pole rear end layer 18 can be easily aligned with the short length in the depth direction.

  Subsequently, as shown in FIG. 3F, the recording gap layer 28 and the soft magnetic layer 26 are etched by ion milling using the resist pattern R as a mask.

Next, as shown in FIG. 3G, a nonmagnetic insulating layer 30 such as Al ₂ O ₃ or SiO _{2 is} formed by sputtering using the resist pattern R as a mask, and removed by etching the recording gap layer 28 and the soft magnetic layer 26. Fill the area and flatten it by CMP.

  In the above process, the rear end of the soft magnetic layer 26 is determined by the rear end edge of the lift-off resist pattern R. Further, in order to backfill the nonmagnetic insulating layer 30 with a high productivity lift-off, the rear end position cannot be obtained with high accuracy. Due to such restrictions, the length of the soft magnetic layer 26 is set longer than the rear end of the bottom pole tip layer 16 in consideration of productivity.

Next, as shown in FIG. 3H, the resist pattern R is dissolved by a lift-off process, and the resist pattern R and the nonmagnetic insulating layer deposited thereon are removed. Thereafter, a nonmagnetic insulating layer 32 such as Al ₂ O ₃ for trimming is formed by sputtering, and an upper magnetic pole front end layer 34 and an upper magnetic pole rear end layer 36 are formed by sputtering and plating.

Subsequently, as shown in FIG. 3I, the upper portions of the top pole tip layer 34, the recording gap layer 28, the soft magnetic layer 26, and the bottom pole tip layer 16 are trimmed by ion milling. The mask at this time is the top pole tip layer 34 and the nonmagnetic insulating layer 30 formed for trimming. By this trimming process, the upper widths of the top pole tip layer 34, the recording gap layer 28, the soft magnetic layer 26, and the bottom pole tip layer 16 are processed into the track width Tw. Further, a taper (indicated by a broken line) is formed on both sides of the protruding portion 26 toward the floating surface ABS. Thereafter, a nonmagnetic insulating layer 38 such as Al ₂ O _{3 is} filled between the upper magnetic pole front end layer 34 and the upper magnetic pole rear end layer 36 by sputtering, and the surface thereof is flattened by CMP.

Next, as shown in FIG. 3J, a nonmagnetic insulating layer 40 such as Al ₂ O _{3 is} formed on the flat surface by sputtering, and an upper coil 42 such as Cu is formed by a plating method.

Subsequently, as shown in FIG. 3K, the periphery of the coil is covered with an insulating material 44 such as a resist, and a smooth convex shape is formed by high-temperature heat treatment. Thereafter, the upper magnetic pole main layer 46 is formed by a plating method, and a protective layer 50 such as Al ₂ O _{3 is} formed by sputtering so as to cover the entire head.

  Next, a second embodiment will be described with reference to FIG. In the example shown in FIG. 4, the protruding portion 26 made of a high Bs material is configured by an upper portion having a substantially constant width (track width Tw) and a lower portion having a skirt extending toward the lower magnetic pole tip layer 16. It is. A recording gap layer (not shown) is formed at the tip of the protrusion 26. According to this configuration, it is possible to further reduce the generation of a fringe magnetic field in the track width direction from the upper magnetic pole tip layer 34 toward the lower magnetic pole tip layer 16 due to the action of the portion having the expanded base.

  FIG. 5 shows a third embodiment. In this example, the lower magnetic pole tip layer 16 is formed with a lower portion whose skirt extends from a portion having a substantially constant width of the protruding portion 26. The recording gap layer is omitted. Also in this configuration, the fringe magnetic field in the track width direction from the upper magnetic pole tip layer 34 toward the lower magnetic pole tip layer 16 is generated from the above embodiment by the action of the lower portion where the skirt of the protrusion 26 of the lower magnetic pole tip layer 16 widens. Can also be reduced.

  In the second and third embodiments shown in FIGS. 4 and 5, the formation of the lower portion where the skirt of the protrusion 26 is widened is the ion beam in the trimming process shown in FIG. 3I of the first embodiment. It can be formed by adjusting the incident angle.

  FIG. 6 shows a fourth embodiment. In this example, the lower magnetic pole main layer 14 and the lower magnetic pole tip layer 16 are retreated from the air bearing surface ABS. According to this configuration, in addition to the same effects as those of the above embodiments, the leakage magnetic field from the lower magnetic pole main layer 14 and the lower magnetic pole tip layer 16 toward the air bearing surface ABS can also be reduced.

  7A and 7B show the basic configuration of a magnetic disk device on which the thin film magnetic head 1 according to each of the above embodiments is mounted. 7A is a plan view of the apparatus, and FIG. 7B is a cross-sectional view. The magnetic disk 100 is directly connected to a motor 102 and is rotated when information is input / output. The thin film magnetic head 1 is attached to a suspension 104 and supported by a rotary actuator 108 via an arm 106. The suspension 104 has a function of holding the thin film magnetic head 1 on the magnetic disk 100 with a predetermined force. A signal processing circuit 110 for processing a recording signal and a reproduction signal is attached to the base of the apparatus, and a circuit board for controlling input / output of information and a substrate 112 for mounting a control circuit for each part are attached to the back of the base. The thin film magnetic head 1 is rotated by a rotary actuator 108, moves on the surface of the magnetic disk 100, is positioned at an arbitrary location, and then writes or reads magnetic information.

FIG. 4 is a perspective view and a partially enlarged view of the vicinity of the tip of the recording head of the thin film magnetic head according to the first embodiment. 1 is an overall cross-sectional view of a thin film magnetic head according to a first embodiment. It is sectional drawing which shows the manufacturing method of the thin film magnetic head by a 1st Example. It is sectional drawing which shows the manufacturing method of the thin film magnetic head by a 1st Example. It is sectional drawing which shows the manufacturing method of the thin film magnetic head by a 1st Example. It is sectional drawing which shows the manufacturing method of the thin film magnetic head by a 1st Example. It is sectional drawing which shows the manufacturing method of the thin film magnetic head by a 1st Example. It is sectional drawing which shows the manufacturing method of the thin film magnetic head by a 1st Example. It is sectional drawing which shows the manufacturing method of the thin film magnetic head by a 1st Example. It is sectional drawing which shows the manufacturing method of the thin film magnetic head by a 1st Example. It is sectional drawing which shows the manufacturing method of the thin film magnetic head by a 1st Example. It is sectional drawing which shows the manufacturing method of the thin film magnetic head by a 1st Example. It is sectional drawing which shows the manufacturing method of the thin film magnetic head by a 1st Example. It is a perspective view of a recording head tip portion of a thin film magnetic head according to a second embodiment. FIG. 6 is a perspective view of a recording head tip portion of a thin film magnetic head according to a third embodiment. It is a perspective view which shows the whole thin film magnetic head by a 4th Example. It is a top view which shows the basic composition of the magnetic disc apparatus carrying a thin film magnetic head. 1 is a cross-sectional view of a magnetic disk device.

Explanation of symbols

1. Thin film magnetic head,
2 ... substrate,
4 ... Lower magnetic shield layer,
6 ... reproduction gap,
8 ... reproducing element,
10: Upper magnetic shield layer,
12 ... separate layer,
14 ... lower magnetic pole main layer,
16 ... bottom pole tip layer,
18 ... lower magnetic pole rear end layer,
22 ... lower layer coil,
24. Nonmagnetic insulating layer,
26 ... protrusions,
28. Recording gap layer,
30 ... nonmagnetic insulating layer,
32. Insulating layer for trimming,
34 ... top pole tip layer,
36 ... upper magnetic pole rear end layer,
38 ... nonmagnetic insulating layer,
42 ... upper coil,
44 ... nonmagnetic insulating layer,
46 ... upper magnetic pole upper layer,
50: protective layer.

Claims (10)

  A reproducing unit having a magnetic shield layer and a reproducing element formed on a substrate, a lower magnetic pole and an upper magnetic pole opposed via a recording gap, and a recording unit having a coil that goes around the lower magnetic pole and the upper magnetic pole In the thin film magnetic head, the lower magnetic pole includes a lower magnetic pole main layer, a lower magnetic pole tip layer provided on the air bearing surface side of the lower magnetic pole main layer, and a lower magnetic pole provided at the rear end of the lower magnetic pole main layer. An end layer and a protrusion of a soft magnetic material provided on the lower magnetic pole front end layer, and having a higher saturation magnetic flux density than the lower magnetic pole front end layer and a longer depth than the lower magnetic pole front end layer. The upper magnetic pole includes an upper magnetic pole front end layer facing the protrusion, and an upper magnetic pole upper layer magnetically connected to the upper magnetic pole front end layer and the lower magnetic pole rear end layer. Magnetic head.   2. A thin film magnetic head according to claim 1, wherein a saturation magnetic flux density of the protrusion is 2.3 T or more.   2. A thin film magnetic head according to claim 1, wherein a saturation magnetic flux density of the protrusion is about 2.4T.   2. The thin film magnetic head according to claim 1, wherein a saturation magnetic flux density of the lower magnetic pole front end layer is about 2.2 T, and a saturation magnetic flux density of the protrusion is about 2.4 T.   The upper magnetic pole tip layer includes a first soft magnetic layer having a saturation magnetic flux density of 2.4 T or more, a second soft magnetic layer having a saturation magnetic flux density of 1.7 T or more and less than 2.4 T, and a saturation magnetic flux density of about 1. 5. The thin film magnetic head according to claim 4, further comprising a 7T third soft magnetic layer.   2. The thin film magnetic head according to claim 1, wherein the lower magnetic pole tip layer has a protruding portion having the same width as the protruding portion below the protruding portion.   2. The thin film magnetic head according to claim 1, wherein the lower magnetic pole main layer and the lower magnetic pole tip layer are disposed so as to recede from the air bearing surface with respect to the reproducing portion and the protrusion.   A reproducing unit having a magnetic shield layer and a reproducing element formed on a substrate, a lower magnetic pole and an upper magnetic pole opposed via a recording gap, and a recording unit having a coil that goes around the lower magnetic pole and the upper magnetic pole In the thin film magnetic head, the lower magnetic pole includes a lower magnetic pole main layer, a lower magnetic pole tip layer provided on the air bearing surface side of the lower magnetic pole main layer, and a lower magnetic pole provided at the rear end of the lower magnetic pole main layer. An end layer and a soft magnetic material protrusion provided on the lower magnetic pole tip layer, the saturation magnetic flux density being higher than the lower magnetic pole tip layer, and the upper portion and the width having a substantially constant width being the lower magnetic pole tip layer The upper magnetic pole has an upper magnetic pole tip layer facing the protrusion, the upper magnetic pole tip layer, and the lower magnetic pole. Magnetically connected to the pole back end layer Thin-film magnetic head and having an upper magnetic pole layer was.   9. The thin film magnetic head according to claim 8, wherein a lower portion of the protrusion is a part of the lower magnetic pole tip layer. Forming a lower magnetic shield layer made of a soft magnetic material on a substrate made of a ceramic material by a plating method;
Forming a reproducing gap made of a nonmagnetic insulating material on the lower magnetic shield layer, and forming a reproducing element made of a GMR element, a TMR element or a CPP element in the reproducing gap by sputtering;
Forming an upper magnetic shield layer made of a soft magnetic material on the reproduction gap by a plating method;
Forming a separate layer made of a non-magnetic material on the upper magnetic shield layer by sputtering;
Forming a bottom pole main layer made of a soft magnetic material on the separate layer by a plating method;
Forming a lower magnetic pole front end layer on the air bearing surface side of the lower magnetic pole main layer, a lower magnetic pole rear end layer on the back gap side, and a soft magnetic material by a plating method;
Filling a nonmagnetic insulating layer between the lower magnetic pole front end layer and the lower magnetic pole rear end layer by sputtering, and forming a lower layer coil on the nonmagnetic insulating layer by a plating method;
Filling an insulating material between the lower coil, and forming a nonmagnetic insulating layer thereon by sputtering;
After forming the nonmagnetic insulating layer, performing a planarization process by CMP;
Forming a soft magnetic layer having a saturation magnetic flux density higher than that of the lower magnetic pole tip layer on the planarized surface by sputtering;
Forming a recording gap layer made of a nonmagnetic insulating material on the soft magnetic layer by sputtering;
Selectively forming a resist pattern at a position corresponding to the lower magnetic pole front end layer at the back gap side from the rear end of the lower magnetic pole front end layer, and a resist pattern at a position corresponding to the lower magnetic pole rear end layer;
Etching the recording gap layer and the soft magnetic layer by ion milling using the resist pattern as a mask;
Filling the non-magnetic insulating layer by sputtering in the region removed by the etching using the resist pattern as a mask;
After forming the nonmagnetic insulating layer, performing a planarization process by CMP;
Removing the resist pattern and forming a nonmagnetic insulating layer for trimming by sputtering;
Forming a top pole front end layer and the top pole back end layer on the planarized surface by sputtering and plating; and
Trimming the top pole tip layer, the recording gap layer, the soft magnetic layer and the bottom pole tip layer by ion milling using the top pole tip layer and the nonmagnetic insulating layer formed for trimming as a mask;
Filling a nonmagnetic insulating layer by sputtering between the upper magnetic pole front end layer and the upper magnetic pole rear end layer;
After forming the nonmagnetic insulating layer, performing a planarization process by CMP;
Forming a non-magnetic insulating layer on the planarized surface by sputtering and forming an upper coil thereon by plating;
Covering the periphery of the upper coil with an insulating material and forming a convex shape by heat treatment;
Forming an upper magnetic pole upper layer on the upper magnetic pole front end layer, the convex insulating material, and the upper magnetic pole rear end layer by a plating method;
Forming a protective layer by sputtering so as to cover the upper magnetic pole upper layer;
A method of manufacturing a thin film magnetic head, comprising:

Images