JP2007019269A - Xy stage and semiconductor manufacturing device having it - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an XY stage which can move a moving table rapidly, requires a short time for positioning, has high positioning accuracy, and uses a highly reliable control system by preventing generation of vibration by canceling reaction force produced by movement of the moving table; and to provide a semiconductor manufacturing device having it. <P>SOLUTION: The XY stage cancels reaction force due to movement of a moving table and prevents generation of vibration by forming force having the magnitude the same as the force required for acceleration/deceleration in movement of the moving table and in an opposite direction thereof by providing a mass body and a driving means for driving the mass body to an opposite direction of the direction of movement of the moving table to the XY stage. The semiconductor manufacturing device has the XY stage. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to an XY stage and a semiconductor manufacturing apparatus including the XY stage, and more particularly, to an XY stage that includes a vibration control device that prevents vibration generated by high-speed movement of a moving table, and that can move at high speed, and a semiconductor manufacturing apparatus including the XY stage. It relates to the device.

  In the manufacture of semiconductors, semiconductor manufacturing apparatuses having a movable table that can move in two axial directions (X-axis and Y-axis) perpendicular to each other on a plane are widely used. For example, by mounting a bonding head that can move in the vertical direction (Z-axis) on a moving table, the bonding head can be moved in three dimensions, so that the bonding head moves at high speed and is positioned accurately. It is hoped that it can be done.

  However, even when the positioning accuracy of the motor that moves the moving table is improved and it is possible to move the moving table at a high speed, the reaction force is generated when the moving table or its load is accelerated or decelerated. The wire bonding apparatus generates vibration. When vibration is generated in the wire bonding apparatus, the vibration is transmitted to the moving table, its mounted object, and also the workpiece, and not only the positioning accuracy of the moving table is lowered but also the stability of bondability is impaired. This tendency becomes more prominent as the drive motor moves faster.

  As a method for preventing the vibration of the semiconductor manufacturing apparatus due to the movement of the moving table, it is conceivable to improve the rigidity by making the base of the apparatus thick, but this is not preferable because the base becomes large and heavy. Further, since the reaction force itself generated by the movement of the moving table is not reduced, the installation floor of the apparatus is vibrated, causing a conveyance abnormality in an adjacent workpiece conveyance system or the like.

  As a technique for preventing the vibration of the semiconductor manufacturing apparatus due to the movement of the moving table, when the driving target is driven by the motor, the motor body moves in the opposite direction to the driving target, and the driving target is driven. There is a motor drive device and an XY table in a semiconductor manufacturing apparatus configured to cancel the reaction force due to (see Patent Document 1).

JP 2000-3920 A

  However, in the conventional stage, although the generation of the vibration of the semiconductor manufacturing apparatus due to the movement of the moving table can be suppressed, the operation time of the damper for returning the motor to the original position is extra because the motor body moves. This is necessary and hinders the speeding up of work. In addition, in order to perform positioning of the drive target, a motor speed sensor and a position / speed sensor of the drive target are required, which complicates the control and reduces the reliability of positioning accuracy.

  Therefore, the present invention prevents the occurrence of vibration caused by the movement of the moving table, enables the moving table to move at high speed, uses a control system with high positioning accuracy, and high reliability. It is an object of the present invention to provide a conventional XY stage or a semiconductor manufacturing apparatus including the XY stage.

  In order to solve the above-described problems, the present invention provides an XY stage having a mass body and a driving means for driving the mass body in a direction opposite to the direction in which the movement table moves, thereby moving the movement table. An XY stage that has the same magnitude as that required for acceleration / deceleration of the motor and forms a force in the opposite direction, cancels the reaction force caused by the movement of the moving table, and prevents the occurrence of vibration, and a semiconductor manufacturing apparatus including the XY stage provide.

  That is, the present invention is an XY stage having a moving table that moves along an X axis and a Y axis that are orthogonal to each other as a first means for solving the above-described problems, and is engaged with the moving table. An X-axis movable body provided with an X-axis movable body that moves the moving table in the X-axis direction, a first drive unit that drives the X-axis movable body, and an X-axis mass body that is installed so as to be movable in the X-axis direction , And an X-axis vibration control device including a second drive unit that drives the X-axis mass body in a direction opposite to the moving direction of the X-axis movable body, a Y-axis movable body that moves the moving table in the Y-axis direction, and Y-axis moving device provided with third driving means for driving Y-axis movable body, Y-axis mass body installed so as to be movable in Y-axis direction, and Y-axis mass body as a moving direction of Y-axis movable body A Y-axis damping device having a fourth driving means for driving in the opposite direction; To provide an XY stage to be.

  According to this, a force having the same magnitude as the force necessary to move the X-axis drive body including the X-axis movable body, the moving table, and the mounted object in the X-axis direction is the direction in which the X-axis drive body moves. The reaction forces of each other cancel each other and vibrations generated by the movement of the moving table can be suppressed. The same applies to the Y-axis direction. Since vibrations generated in this way are suppressed, the movable body can be moved not only at high speed, but also the time required for positioning is shortened and positioning accuracy is improved. In addition, it is not necessary to feed back signals from vibration sensors, position sensors, etc. to control the vibration damping device, and it is only necessary to perform sequence control to drive a movement amount that is inversely proportional to the mass of the mass body, and the control method is simple. Yes, a highly reliable control system can be used.

  In the present invention, as a second means for solving the above-mentioned problems, the centroid of the X-axis mass body and the centroid of the X-axis movable body move on substantially the same X-axis line in the XY stage as the first means. As described above, an X-axis mass body is disposed, and an XY stage on which the Y-axis mass body is disposed so that the center of gravity of the Y-axis mass body and the center of gravity of the Y-axis movable body move on substantially the same Y-axis line. provide.

  According to this, for example, in the X-axis direction on the plane, when the moving table is at the center of the moving range in the Y-axis direction and the X-axis movable body moves in the X-axis direction, The reaction force and the reaction force due to the movement of the X-axis mass are on the same straight line, and the moment to rotate the device when the XY stage is viewed from above is zero, and the vibration due to the moment in the yaw direction Can be suppressed. The same applies to the Y-axis direction.

  Further, according to the present invention, as a third means for solving the above-described problem, in the XY stage as the first means, there are two X-axis mass bodies and two second drive means, respectively, and two X-axis mass bodies are provided. The X-axis mass body is disposed so that the center of gravity of the X-axis and the center of gravity of the X-axis movable body move on substantially the same X-axis, and the center of gravity of the Y-axis mass body and the center of gravity of the Y-axis movable body are substantially the same. An XY stage in which the Y-axis mass body is disposed so as to move on the axis is provided.

  According to this, similarly to the second means, vibration due to the moment in the yaw direction can be suppressed, and both the X-axis mass body and the Y-axis mass body are arranged at positions in the Y-axis direction from the moving table. It becomes possible. Therefore, the vibration damping device can be made compact in the X-axis direction, and a degree of freedom is given to the layout design of the X-axis mass body.

  Further, according to the present invention, as a fourth means for solving the above-described problem, in the XY stage as the first means, there are two X-axis mass bodies and two second driving means, respectively, and two X-axis mass bodies are provided. The X-axis mass body is disposed so that the total center of gravity of the X-axis and the center of gravity of the X-axis movable body move on substantially the same X-axis, and there are two Y-axis mass bodies and four fourth driving means, respectively. Provided is an XY stage provided with an X-axis mass body so that the total center of gravity of the Y-axis mass body and the center of gravity of the Y-axis movable body move on substantially the same Y-axis line.

  According to this, similarly to the second and third means, it is possible to suppress the vibration due to the moment in the yaw direction, and it is possible to further give a degree of freedom to the arrangement design of the mass body.

  In the XY stage according to any one of the first to fourth means, the center of gravity of the X-axis mass body and the center of gravity of the X-axis movable body are substantially the same as the fifth means for solving the above problems. The X-axis mass body is disposed so as to move on a horizontal plane, and the Y-axis mass body is disposed so that the center of gravity of the Y-axis mass body and the center of gravity of the Y-axis movable body move on substantially the same horizontal plane. Provide XY stage.

  According to this, for example, when the X-axis movable body moves in the X-axis direction in the X-axis longitudinal section, the reaction force due to the movement of the X-axis drive body and the reaction force due to the movement of the X-axis mass body are substantially on the same straight line. The moment in the roll direction, that is, when the XY stage is viewed in the X-axis longitudinal section, becomes 0 when the roll direction, that is, the XY stage is viewed in the X-axis longitudinal section, and vibration due to the moment in the roll direction can be suppressed. Similarly, with respect to the Y-axis vertical section, it is possible to suppress vibration due to a moment that attempts to rotate the apparatus when the pitch direction, that is, the XY stage is viewed in the Y-axis vertical section.

  Further, according to the present invention, as a sixth means for solving the above-described problem, in the XY stage of any one of the first to fifth means, there are two first and third driving means, respectively, Provided is an XY stage that is a linear motor including a stator and a mover that moves along the stator.

  According to this, even when the movable range of the X-axis movable body and the Y-axis movable body is increased, the lateral dimension of the entire moving device does not become larger than the movable range. For example, when an AC servo motor or voice coil motor is used Compared to the above, the lateral dimensions of the XY stage can be reduced. Further, it is possible to realize an XY stage that can move at a high speed and has a wide movement range, which is impossible in reality with these motors. Furthermore, high-precision positioning is possible by using a high-resolution linear scale.

  Moreover, this invention provides the semiconductor manufacturing apparatus provided with the XY stage in any one of the 1st-6th means as a 7th means for solving the said subject.

  According to this, since the vibration due to the reaction force when the moving table moves can be suppressed, a semiconductor manufacturing apparatus that does not vibrate the installation floor and does not vibrate the installation floor can be obtained without increasing the size of the gantry of the semiconductor manufacturing apparatus.

  By using the above means, it is possible to suppress the vibration generated by the reaction force when the moving table moves. In addition, the moments in the yaw direction, roll direction, and pitch direction can be reduced to suppress vibration due to each moment. Since vibrations generated in this way are suppressed, not only high-speed movement is possible, but also the time required for positioning is shortened, and the positioning accuracy is improved. Furthermore, the control method of the vibration damping device is simple and a reliable control system can be used.

As the best mode of the present invention,
In an XY stage having a moving table that moves along an X axis and a Y axis perpendicular to each other,
An X-axis movable body that engages with the movable table and moves the movable table in the X-axis direction, and a linear stator and a movable element that moves along the stator, and drives the X-axis movable body. An X-axis moving device provided with a linear motor (first driving means);
X-axis vibration suppression device comprising two X-axis mass bodies installed so as to be movable in the X-axis direction, and two second driving means for driving the X-axis mass body in the direction opposite to the moving direction of the X-axis movable body Equipment,
Two linear motors (a third motor) for driving the Y-axis movable body, which include a Y-axis movable body that moves the moving table in the Y-axis direction, and a linear stator and a movable element that can move along the stator. Y-axis moving device provided with a driving means)
A Y-axis mass body that is movably installed in the Y-axis direction, and a Y-axis damping device that includes a fourth drive unit that drives the Y-axis mass body in a direction opposite to the movement direction of the Y-axis movable body. And
The X-axis mass body is disposed so that the total center of gravity of the two X-axis mass bodies and the center of gravity of the X-axis movable body are on the substantially same X-axis line and move on substantially the same horizontal plane,
The Y-axis mass body is arranged so that the center of gravity of the Y-axis mass body and the center of gravity of the Y-axis movable body move on substantially the same Y-axis and on the same horizontal plane.

  According to this, when the moving table is at the center of the moving range in the X-axis and Y-axis directions, the total center of gravity of the two X-axis mass bodies is the X-axis including the X-axis movable body, the moving table, and its mounted items. Near the same height of the X-axis passing through the center of gravity of the driving body, the center of gravity of the Y-axis mass body is the same as the Y-axis passing through the center of gravity of the Y-axis driving body including the Y-axis movable body, the moving table, and its load. Near the height. With such an arrangement, when the moving table moves from the center of the movable range, the reaction force due to the movement of the moving table and the reaction force due to the movement of the mass body are on the same line, thereby suppressing vibration. Can do.

  Furthermore, the base plate to which the reaction force of the X-axis drive body is transmitted and the base plate to which the reaction force of the X-axis mass body are transmitted are made of the same member or are directly fixed, thereby further suppressing vibration. can do. The same applies to the Y-axis direction.

The total mass of the X-axis drive body is Wx, the total mass of the two X-axis mass bodies is Vx, the distance that each of the first drive means moves the X-axis drive body is Lx, and the second When the first drive means moves the X-axis drive body, where Mx is the distance that each of the drive means moves the X-axis mass body in the direction opposite to the X-axis drive body, the second drive means ,
Mx = Lx * Wx / Vx
The X-axis mass is moved by the distance calculated in (1). Similarly, the total mass of the Y-axis drive body is Wy, the mass of the Y-axis mass body is Vy, the distance that each of the third drive means moves the Y-axis drive body is Ly, and the fourth drive means Is the distance by which the Y-axis mass is moved in the opposite direction to the Y-axis drive, and when the third drive moves the Y-axis drive, the fourth drive has the following formula:
My = Ly * Wy / Vy
The Y-axis mass body is moved by the distance calculated in (1).

  That is, the acceleration of the moving mass body is a value obtained by multiplying the acceleration of the moving driving body by the inverse ratio of the mass of the mass body and the driving body. For example, when the mass of the driving body is 5 kg, the mass of the mass body is 20 kg, and the acceleration of the driving body is 2 G, the acceleration of the mass body is 0.5 G. By driving the driving means in this way, the reaction force due to the movement of the moving table and the reaction force due to the movement of the mass body cancel each other out, and vibration can be suppressed.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings as appropriate.

  FIG. 1 is a developed perspective view of an XY stage according to the present invention. The XY stage includes a moving table 21, an X-axis vibration control device 1X, an X-axis movement device 11X, a Y-axis vibration control device 1Y, and a Y-axis movement device 11Y. In the figure, members having the same functions except for the difference between the X-axis and the Y-axis are given the same reference numerals, and X or Y indicating the X-axis or Y-axis is added after the reference signs. is doing.

  The Y-axis damping device 1Y includes a Y-axis damping base plate 2Y, a Y-axis damping damper base plate 3Y, a Y-axis damping weight 4Y as a Y-axis mass body, and a fourth driving unit. Y-axis vibration control drive motor 5Y. The Y-axis damping base plate 2Y has an opening for moving the mounted bonding head. The rectangular Y-axis damping damper base plate 3Y and the rectangular parallelepiped Y-axis damping weight 4Y have long sides extending in the X-axis direction, and the midpoint of each long side is the Y-axis damping base plate. It is arranged so as to be on the Y axis passing through the center of the 2Y opening. The Y-axis damping weight 4Y is installed so as to be movable in the Y-axis direction, and moves by driving the Y-axis damping drive motor 5Y.

  The Y-axis moving device 11Y disposed on the Y-axis vibration damping device 1Y is a third plate that moves the Y-axis table base plate 12Y, the Y-axis table 13Y as a Y-axis movable body, and the Y-axis table 13Y. Two Y-axis linear motors 14 </ b> Y as driving means and a moving table 21. The Y-axis linear motor 14Y includes a Y-axis linear motor plate 14aY as a linear stator and a Y-axis linear motor coil 14bY as a mover that moves along the stator. The rectangular Y-axis table base plate 12Y is provided with two Y-axis linear motor plates 14aY extending in the Y-axis direction on two sides in the same manner as the Y-axis damping base plate 2Y. Yes. The rectangular Y-axis table 13Y includes Y-axis linear motor coils 14bY at both ends, is installed so as to be movable in the Y-axis direction, and moves along the Y-axis linear motor plate 14aY by driving the motor. On two sides of the upper surface of the Y-axis table 13Y, a moving table guide 19 extending in the X-axis direction is provided, and a moving table 21 is installed to be movable in the X-axis direction. The moving table 21 includes an X-axis driving guide bearing block 22 on its upper surface, and is moved in the X-axis direction by being driven by a driving force in the X-axis direction.

  An X-axis damping device 1X disposed on the Y-axis moving device 11Y includes an X-axis damping base plate 2X, an X-axis damping damper base plate 3X, and two X-axis mass bodies. It has a shaft damping weight 4X and an X-axis damping drive motor 5X as a second drive means. The X-axis damping base plate 2X has an opening, like the Y-axis damping base plate 2Y. The two rectangular X-axis damping damper base plates 3X and the two rectangular parallelepiped X-axis damping weights 4X are symmetrical in the Y-axis direction with respect to the center of the opening of the X-axis damping base plate 2X. Are attached so that each long side extends in the X-axis direction and the midpoint of the long side is on the Y-axis passing through the center line of the opening of the X-axis damping base plate 2X. It has been. The two X-axis damping weights 4X are installed so as to be movable in the X-axis direction, and are moved by driving the two X-axis damping drive motors 5X.

  The X-axis moving device 11X disposed on the X-axis vibration damping device 1X includes the same structure as the Y-axis moving device 11Y, and a description of the overlapping parts is omitted. A rectangular X-axis table 13X as an X-axis movable body installed so as to be movable in the X-axis direction has an X-axis guide bar 23 extending in the Y-axis direction on the lower surface. The X-axis guide bar 23 transmits a driving force in the X-axis direction via the X-axis driving guide bearing block 22 to move the moving table 21.

  FIG. 2 is a perspective view showing an XY stage according to the present invention. The Y-axis vibration control device 1Y, the Y-axis movement device 11Y, the X-axis vibration control device 1X, and the X-axis movement device 11X are shown in a tightly coupled state. The centers of the openings provided in the respective devices are coupled so as to coincide with each other in a plane, and the X-axis driving guide bearing block 22 and the X-axis guide bar 23 are fitted.

  FIG. 3 is a developed perspective view of the vibration damper of the X-axis vibration control device constituting the XY stage according to the present invention. The vibration damping damper includes an X-axis damping damper base plate 3X, an X-axis damping weight 4X, and an X-axis damping drive motor 5X. The X-axis damping weight 4X includes an X-axis damping weight base 4aX and an X-axis damping weight body 4bX, and is screwed to each other. The X-axis damping damper base plate 3X, which is rectangular in plan, has an X-axis damping drive motor 5X fixed to one of the short sides and an X-axis damping guide rail 6X on the other side. The X-axis damping drive motor 5X is a general rotary motor, and the X-axis damping ball screw 9X extended from the motor is held by the X-axis damping ball screw receiver 10X, A ball screw nut 9X is screwed. The X-axis damping weight base 4aX is fixed to the X-axis damping guide rail 6X and the X-axis damping ball screw nut 9X, and slides on the X-axis damping guide rail 6X. Induced by 7X.

  The driving force of the X-axis damping drive motor 5X is converted from rotational kinetic energy into linear kinetic energy via the X-axis damping ball screw 8X and the X-axis damping ball screw nut 9X. 4X is moved along the X-axis damping guide rail 6X.

  FIG. 4 is a schematic diagram showing a control system for the Y-axis moving device of the XY stage according to the present invention. A Y-axis linear motor driver 32Y and a Y-axis vibration control motor driver 35Y are connected to the motion control device 31. Two Y-axis linear motor cables 34Y and a Y-axis linear scale cable 33Y are connected to the Y-axis linear motor driver 32Y. Two Y-axis linear motor coils 14bY and Y-axis linear motor coils are connected to the Y-axis linear motor driver 32Y. It is connected to a sensor (not shown) provided in 14bY. A Y-axis damping motor cable 36Y connected to the Y-axis damping motor driver 35Y connects the Y-axis damping drive motor 5Y.

  The Y-axis linear motor driver 32Y controls the two Y-axis linear motor coils 14bY according to a command sent from the motion control device 31. The Y-axis linear motor coil 14bY is provided with a sensor, and the position and speed signals obtained by reading the linear scale 15Y are fed back to the Y-axis linear motor driver 32Y to enable high-precision positioning. On the other hand, the motion control device 31 sends a signal calculated so that the reaction forces of the Y-axis driver and the Y-axis damping weight cancel each other to the Y-axis damping motor driver 35Y. The Y-axis vibration suppression motor driver 35Y performs sequence control of the Y-axis vibration suppression drive motor 5Y according to the input signal.

  1 to 5 show one embodiment of the XY stage according to the present invention, the present invention is not limited to the embodiment shown here. For example, the Y-axis damping base plate 2Y of the Y-axis damping device 1Y and the Y-axis table base plate 12Y of the Y-axis moving device 11Y may be the same member. Alternatively, the Y-axis damping base plate 2Y of the Y-axis damping device 1Y and the X-axis damping base plate 2X of the X-axis damping device 1X may be the same member. Further, the moving table guide 20 may be installed on the upper surface of the X-axis table 13X instead of the Y-axis table 13Y, and the moving table 21 may be installed so as to be movable in the Y-axis direction. In this case, the X-axis drive guide bearing block 22 is disposed on the lower surface of the moving table 21 as a Y-axis drive guide bearing block, and the X-axis guide bar 23 is disposed on the upper surface of the Y-axis table 13Y as the Y-axis guide bar. To do. In the linear motor 14, the linear motor plate 14a as a stator may be a permanent magnet and the linear motor coil 14b as a mover may be a coil, or vice versa. Further, the vibration suppression drive motor 5 as the second and fourth drive means may be a linear motor instead of the rotary motor. Similarly, the linear motor 14 as the first and third drive means is rotated. A combination of a motor and a ball screw may be used.

It is an XY stage expansion | deployment perspective view by this invention. It is the perspective view which showed the XY stage by this invention. FIG. 3 is a developed perspective view of a vibration damping damper of an X-axis vibration damping device constituting an XY stage according to the present invention. It is a schematic diagram which shows the control system of the Y-axis moving apparatus which comprises the XY stage by this invention.

Explanation of symbols

1 Damping device 2 Damping base plate 3 Damping damper base plate 4 Damping weight base 4a Damping weight base 4b Damping weight body 5 Damping drive motor 6 Damping guide rail 7 Damping guide 8 Damping ball screw 9 Damping ball screw nut 10 Damping ball screw receiver 11 Moving device 12 Table base plate 13 Table 14 Linear motor 14a Linear motor plate 14b Linear motor coil 15 Linear scale 20 Moving table guide 21 Moving table 22 X-axis drive guide bearing block 23 X-axis guide bar 31 Motion control device 32 Linear motor driver 33 Linear scale cable 34 Linear motor cable 35 Damping motor driver 36 Damping motor cable

Claims (7)

An XY stage having a moving table that moves along an X axis and a Y axis perpendicular to each other;
An X-axis moving device including an X-axis movable body that engages with the moving table and moves the movable table in the X-axis direction, and a first drive unit that drives the X-axis movable body;
X-axis vibration control device comprising: an X-axis mass body installed so as to be movable in the X-axis direction; and second driving means for driving the X-axis mass body in a direction opposite to the moving direction of the X-axis movable body When,
A Y-axis moving device including a Y-axis movable body that moves the moving table in the Y-axis direction, and a third drive unit that drives the Y-axis movable body;
Y-axis damping device comprising a Y-axis mass body that is movably installed in the Y-axis direction, and a fourth drive means for driving the Y-axis mass body in a direction opposite to the movement direction of the Y-axis movable body XY stage characterized by having. The X-axis mass body is arranged so that the center of gravity of the X-axis mass body and the center of gravity of the X-axis movable body move on substantially the same X-axis line,
2. The XY according to claim 1, wherein the Y-axis mass body is disposed such that the center of gravity of the Y-axis mass body and the center of gravity of the Y-axis movable body move on substantially the same Y-axis line. stage. There are two each of the X-axis mass body and the second driving means, and the total center of gravity of the two X-axis mass bodies and the center of gravity of the X-axis movable body move on substantially the same X-axis line. An X-axis mass body,
2. The XY according to claim 1, wherein the Y-axis mass body is disposed such that the center of gravity of the Y-axis mass body and the center of gravity of the Y-axis movable body move on substantially the same Y-axis line. stage. There are two each of the X-axis mass body and the second driving means, and the total center of gravity of the two X-axis mass bodies and the center of gravity of the X-axis movable body move on substantially the same X-axis line. An X-axis mass body,
The Y-axis mass body and the fourth driving means are each two, and the total center of gravity of the two Y-axis mass bodies and the center of gravity of the Y-axis movable body move on substantially the same Y-axis line. The XY stage according to claim 1, wherein an X-axis mass body is provided. The X-axis mass body is disposed so that the center of gravity of the X-axis mass body and the center of gravity of the X-axis movable body move on substantially the same horizontal plane,
The Y-axis mass body is disposed so that the center of gravity of the Y-axis mass body and the center of gravity of the Y-axis movable body move on substantially the same horizontal plane. The XY stage as described in any one.   6. The linear motor according to any one of claims 1 to 5, wherein there are two each of the first and third driving means, and the linear motor includes a linear stator and a movable element that moves along the stator. An XY stage according to any one of the above.   A semiconductor manufacturing apparatus comprising the XY stage according to any one of claims 1 to 6.

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