JP2007019192A5 - - Google Patents

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Publication number
JP2007019192A5
JP2007019192A5 JP2005198091A JP2005198091A JP2007019192A5 JP 2007019192 A5 JP2007019192 A5 JP 2007019192A5 JP 2005198091 A JP2005198091 A JP 2005198091A JP 2005198091 A JP2005198091 A JP 2005198091A JP 2007019192 A5 JP2007019192 A5 JP 2007019192A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2005198091A
Other versions
JP2007019192A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2005198091A priority Critical patent/JP2007019192A/ja
Priority claimed from JP2005198091A external-priority patent/JP2007019192A/ja
Publication of JP2007019192A publication Critical patent/JP2007019192A/ja
Publication of JP2007019192A5 publication Critical patent/JP2007019192A5/ja
Pending legal-status Critical Current

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JP2005198091A 2005-07-06 2005-07-06 荷電ビームレンズ、及び荷電ビーム露光装置 Pending JP2007019192A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005198091A JP2007019192A (ja) 2005-07-06 2005-07-06 荷電ビームレンズ、及び荷電ビーム露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005198091A JP2007019192A (ja) 2005-07-06 2005-07-06 荷電ビームレンズ、及び荷電ビーム露光装置

Publications (2)

Publication Number Publication Date
JP2007019192A JP2007019192A (ja) 2007-01-25
JP2007019192A5 true JP2007019192A5 (ja) 2008-08-28

Family

ID=37756096

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005198091A Pending JP2007019192A (ja) 2005-07-06 2005-07-06 荷電ビームレンズ、及び荷電ビーム露光装置

Country Status (1)

Country Link
JP (1) JP2007019192A (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8089056B2 (en) * 2008-02-26 2012-01-03 Mapper Lithography Ip B.V. Projection lens arrangement

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4451041B2 (ja) * 2000-04-04 2010-04-14 株式会社アドバンテスト 多軸電子レンズを用いたマルチビーム露光装置、複数の電子ビームを集束する多軸電子レンズ、半導体素子製造方法
EP1432008B1 (en) * 2002-12-17 2010-05-05 ICT, Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik Mbh Multi-axis compound lens, beam system making use of the compound lens, and method using the compound lens
JP4459568B2 (ja) * 2003-08-06 2010-04-28 キヤノン株式会社 マルチ荷電ビームレンズおよびそれを用いた荷電ビーム露光装置
CN102709143B (zh) * 2003-09-05 2016-03-09 卡尔蔡司Smt有限责任公司 电子光学排布结构、多电子分束检验系统和方法

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