JP2007001190A - Head module, liquid ejection head, liquid ejector and method for manufacturing head module - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To reduce a production cost while lessening the deformation and damage of a nozzle sheet. <P>SOLUTION: The nozzle sheets 25 are arranged, respectively, so that nozzles may be located in a head-chip stationing hole 11b for each head-chip stationing hole 11b in the surface of one side of a module frame 11 and cover a part of the area of the head-chip stationing hole 11b, and the nozzle sheets are formed with the minimum size required for covering a part of the area of the head-chip stationing hole 11b. A flexible wiring substrate 3 is arranged so as to cover the exposed electrode of the head chip 20 in both sides wherein the nozzle sheets 25 of the module frame 11 are provided while its electrode being electrically connected to the electrode of the head chip 20. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a head module that constitutes a part of a head for discharging a liquid, a liquid discharge head and a liquid discharge apparatus using the head module, and a method of manufacturing the head module. Specifically, the present invention relates to a technique related to reduction in material cost of the head module.

Conventionally, an ink jet printer has been known as an example of a liquid ejecting apparatus, and various techniques have been disclosed for a head (liquid ejecting head) used in the ink jet printer or the like.
For example, Patent Document 1 discloses a technique for forming a line head by attaching a plurality of head chips to one nozzle sheet.
Japanese Patent No. 3608526

  In the above-mentioned Patent Document 1, a large number of nozzles (ink ejection ports) are formed on one nozzle sheet made of nickel formed by electroforming. A plurality of head chips are affixed to the single nozzle sheet. Further, a head frame in which holes are formed so as to surround the attached head chip is bonded to the nozzle sheet, and the nozzle sheet is supported.

For example, Patent Document 2 discloses a technique in which one liquid discharge head is divided into a plurality of head modules, each head module is manufactured, and the plurality of manufactured head modules are arranged to form a liquid discharge head. .
In Japanese Patent Application Laid-Open No. 2005-131948, one nozzle sheet is attached to each head module, and four head chips are attached to the head module.

  In the above-mentioned patent document 1, the position accuracy of each nozzle can be improved in that one liquid discharge head is formed by one nozzle sheet. However, when the nozzle sheet is so large, there is a problem that the strength of the nozzle sheet is lacking and it is easily deformed or damaged. In addition, if a part of the liquid ejection head malfunctions due to partial damage of the nozzle sheet or misalignment of the head chip mounting position, the entire liquid ejection head becomes defective, making process management difficult and causing problems in mass productivity. There is. Furthermore, in terms of maintenance, even if the head chip is partially damaged or malfunctioned, the entire liquid discharge head must be replaced, which is inefficient and expensive repair costs. There is a problem that it takes.

On the other hand, in the technique of Patent Document 2, since the liquid discharge head is divided into a plurality of head modules, it is only necessary to replace a damaged or malfunctioning head module, which is suitable for mass production and maintenance. This is also advantageous.
However, the nozzle sheet is a thin foil formed of a metal such as nickel and is precisely processed by an electroforming method or the like. For this reason, although the technique of patent document 2 can make cost lower than the technique of patent document 1, since it is the structure which affixes one nozzle sheet to a module frame, a nozzle sheet is still expensive. there were.
Therefore, the problem to be solved by the present invention is to reduce the manufacturing cost and to reduce the deformation and breakage of the nozzle sheet.

The present invention solves the above-described problems by the following means.
According to the first aspect of the present invention, a plurality of energy generating elements are arranged substantially linearly at a constant interval on a semiconductor substrate, and the energy generating element is provided on a surface provided with the energy generating elements. A head chip provided with a barrier layer for forming a liquid chamber around the element and an electrode for electrical connection to the outside, a nozzle sheet on which a nozzle is formed, and the electrode of the head chip electrically A wiring board to be connected; and a module frame in which a plurality of head chip arrangement holes, which are holes for arranging the head chips therein and are slightly larger than the outer shape of the head chip, are formed by the energy generating element. A head module that discharges the liquid in the liquid chamber from the nozzle by applying a discharge force to the liquid in the liquid chamber. The nozzle is positioned in the head chip arrangement hole and covers a part of the area of the head chip arrangement hole with respect to each head chip arrangement hole on one side surface of the module frame. The head chip is formed in a minimum necessary size so as to cover a part of the region of the head chip arrangement hole, and the head chip is arranged at a position where the energy generating element of the head chip and the nozzle face each other. As described above, from the other side surface of the module frame, each of the head chip arrangement holes is arranged in each of the head chip arrangement holes, and the electrodes of the head chips arranged in the head chip arrangement holes are The wiring board is exposed from a region not covered by the nozzle sheet, and the wiring board has electrodes on the wiring board and the power on the head chip. Doo is are electrically connected, in the surface side of the nozzle seat is provided in the module frame, characterized in that it is arranged so as to cover the electrodes exposed in the head chip.

In the above invention, the head chip arrangement hole is formed in the module frame, and the nozzle sheet is arranged so as to cover a part of each head chip arrangement hole. Then, the head chip is arranged in the head chip arrangement hole from the surface opposite to the surface on which the nozzle sheet is provided, and the energy generating element of the head chip and the nozzle of the nozzle sheet face each other. In this state, the wiring board is disposed on the nozzle sheet side.
Further, the head chip arrangement hole is slightly larger than the head chip, and the nozzle sheet is formed in a minimum necessary size to cover a part of the head chip arrangement hole. Therefore, a nozzle sheet can be made into the minimum necessary size.

  The energy generating element of the present invention may be a heating resistor (heating element) such as a heater, a piezoelectric element such as a piezo element, MEMS, or the like, but in the following embodiments, a thermal heating resistor is used. The body 22 corresponds. In the embodiment, the module frame 11 is provided with eight head chip placement holes 11 b, and one head module 10 is provided with eight head chips 20. Then, two head modules 10 are connected in series to form a line head (length of A4 plate), and four rows are provided, and Y (yellow), M (magenta), C (cyan), and A liquid discharge head 1 which is a color line head of four colors of K (black) is formed.

  According to the head module of the present invention, since one nozzle sheet is used for each head chip and the size of the nozzle sheet can be minimized, the manufacturing cost of the nozzle sheet is reduced and the rigidity of the nozzle sheet is reduced. (Strength) can be secured.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a plan view showing a liquid discharge head 1 according to an embodiment of the present invention, as viewed from the liquid discharge surface side. FIG. 2 is a view as seen from the opposite side of FIG. FIG. 3 is a diagram in which the control board 4 is arranged on the front side of FIG.

  The liquid discharge head 1 is used as a head mounted on a liquid discharge apparatus (in this embodiment, a color line inkjet printer). As shown in FIG. 1, the liquid ejection head 1 includes a head frame 2, a flexible wiring board 3, and a plurality of head modules 10. In the plan view of FIG. 1, two head modules 10 are connected in series in the longitudinal direction, and the two head modules 10 cover one A4 width and print one color. . The two head modules 10 connected in series are provided in four rows to form a liquid ejection head 1 of four colors (Y, M, C, and K).

Further, eight head chips 20 are provided in each head module 10. FIG. 4 is a cross-sectional view showing the periphery of one head chip 20.
The head chip 20 includes a semiconductor substrate 21 made of silicon or the like, and a heating resistor 22 (corresponding to an energy generating element in the present invention) deposited on one surface of the semiconductor substrate 21. An electrode 23 is formed on the edge of the semiconductor substrate 21 that is on the same side as the surface on which the heating resistor 22 is formed and opposite to the edge on which the heating resistor 22 is formed. The heating resistor 22 and the electrode 23 are connected via a conductor portion (not shown) formed on the semiconductor substrate 21.

  A barrier layer 24 and a nozzle sheet 25 are laminated on the surface of the head chip 20 on which the heating resistor 22 is formed. The barrier layer 24 forms a side wall of the ink liquid chamber (pressurizing chamber) 26 and serves to bond a head chip 20 and a nozzle sheet 25 described later. The barrier layer 24 is made of, for example, a photosensitive cyclized rubber resist or an exposure curable dry film resist, and is laminated on the entire surface of the semiconductor chip 21 of the head chip 20 on which the heating resistor 22 is formed, and then the photolithography process. Thus, an unnecessary portion is removed by the above. Further, the barrier layer 24 is formed in a substantially concave shape when viewed in plan so as to surround the vicinity of the three sides of the heating resistor 22.

  Furthermore, the nozzle sheet 25 is formed with a plurality of nozzles 25a, for example, formed by an electroforming technique using nickel. In the nozzle sheet 25, more specifically, the central axis of the nozzle 25a and the heat generation so that the position of the nozzle 25a matches the position of the heating resistor 22, that is, the nozzle 25a faces the heating resistor 22. The resistor 22 is bonded to the barrier layer 24 so that the center of the resistor 22 coincides with the plan view.

  The ink liquid chamber 26 is composed of the semiconductor substrate 21, the barrier layer 24, and the nozzle sheet 25 so as to surround the heating resistor 22. The ink liquid chamber 26 is filled with the ink to be ejected, and the ink is applied when the ink is ejected. It becomes a pressure chamber. The surface of the semiconductor substrate 21 on which the heat generating resistor 22 is formed constitutes the bottom wall of the ink liquid chamber 26, and the portion of the barrier layer 24 surrounding the heat generating resistor 22 in a substantially concave shape forms the side wall of the ink liquid chamber 26. The nozzle sheet 25 constitutes the top wall of the ink liquid chamber 26. The ink liquid chamber 26 communicates with a flow path 27 between the head chip 20 and the module frame 11 as shown in FIG.

  The one head chip 20 is usually provided with heating resistors 22 in units of 100, and each of the heating resistors 22 is uniquely selected by a command from a control unit (not shown) of the printer. The ink in the ink liquid chamber 26 corresponding to the heating resistor 22 can be ejected from the nozzle 25 a facing the ink liquid chamber 26.

  That is, when the ink liquid chamber 26 is filled with ink, the heating resistor 22 is rapidly heated by passing a pulse current through the heating resistor 22 for a short time, for example, 1 to 3 μsec. As a result, a gas-phase ink bubble is generated at a portion in contact with the heating resistor 22, and a certain volume of ink is pushed away (the ink boils) due to the expansion of the ink bubble. As a result, ink having a volume equivalent to the pushed ink in the portion in contact with the nozzle 25a is ejected from the nozzle 25a as an ink droplet. The droplets are landed on the photographic paper to form dots (pixels).

Next, a more detailed structure and manufacturing process of the head module 10 will be described.
FIG. 5A is a plan view showing one module frame 11. The head module 10 according to this embodiment includes a module frame 11, eight head chips 20 and a nozzle sheet 25, and a buffer tank 12.

The module frame 11 is formed in a substantially rectangular shape when viewed in a plan view, and has engaging portions 11a cut out in a substantially L shape on both left and right ends.
The module frame 11 is made of, for example, stainless steel and has a thickness of about 0.5 mm. In this embodiment, substantially rectangular head chip arrangement holes 11b are formed at eight locations. The head chip placement hole 11b has a hole shape slightly larger than the outer shape of the head chip 20, so that the head chip 20 can be completely placed inside.

  The module frame 11 is formed with two attachment holes 11d for fixing to the head frame 2. . The attachment hole 11d is used when the head module 10 is attached to the head frame 2. Furthermore, a groove 11c (a hatched portion in FIG. 5A) is formed so as to surround a part of the outer edge portion of each head chip arrangement hole 11b.

FIG. 5 shows a process of attaching the nozzle sheet 25 to the module frame 11. As shown in FIG. 5, the adhesive 14 is applied (printed) to a region surrounded by the periphery of the head chip arrangement hole 11b and the groove 11c ((b) in the figure). The region of the adhesive 14 is formed in a size that substantially matches the outer edge portion of the nozzle sheet 25 when the nozzle sheet 25 is affixed.
And after application | coating of the adhesive agent 14, the nozzle sheet 25 is stuck on the module frame 11 ((c) in a figure). At this time, excess adhesive 14 enters the groove 11c and is absorbed by the groove 11c.

  Further, the nozzle sheet 25 is stuck so as to cover a part of the area of the head chip arrangement hole 11b. Furthermore, the nozzle sheet 25 is formed in the minimum necessary size to be supported by the module frame 11, and when the nozzle sheet 25 is stuck on the head chip placement hole 11c, the nozzle sheet 25 is formed. Is formed in a size that exists only in the application range of the head chip arrangement hole 11b and the adhesive 14. That is, the nozzle sheet 25 is formed in the minimum necessary size so as to cover a necessary part of the region of the head chip arrangement hole 11b and to have a minimum adhesion area.

  Further, in the present embodiment, the nozzle sheet 25 is bonded to the module frame 11 by hot pressing by hot pressing. This joining is performed at the highest temperature (for example, about 150 ° C. under the first temperature environment in the present invention) in the manufacturing process of the head module 10 and the liquid discharge head 1. When the module frame 11 and the nozzle sheet 25 are compared, the nozzle sheet 25 has a larger coefficient of linear expansion (easily expands and contracts due to temperature changes). Below this temperature, the nozzle sheet 25 is stretched by the module frame 11.

That is, the expansion and contraction due to the temperature change of the nozzle sheet 25 is governed by the module frame 11 after the nozzle sheet 25 and the module frame 11 are joined.
Therefore, in order to ensure the rigidity of the module frame 11 as much as possible, it is preferable that the opening area of the head chip arrangement hole 11b of the module frame 11 is minimized. Therefore, the head chip 20 has an outer shape slightly larger than the head chip arrangement hole 11b.

The nozzle 25a is formed by aligning the number of through-holes facing the number of heating resistors 22 in one head chip 20 in one direction.
The nozzle 25a is formed by an excimer laser. Further, since the nozzle 25a formed by the laser beam is tapered, the laser beam is irradiated from the module frame 11 side to form the nozzle 25a. Thus, the nozzle 25a becomes a hole having a taper so that the opening diameter gradually decreases as it approaches the ink ejection surface (the outer surface of the nozzle sheet 25).

  Further, the pitch between the nozzles 25a of the nozzle 25a row located in each head chip arrangement hole 11b is the same as the arrangement pitch of the heating resistors 22 of the head chip 20 (when forming the head module 10 with a resolution of 600 dpi, And about 42.3 μm).

  Furthermore, in FIG. 5, the nozzle 25a row in each head chip arrangement hole 11b is a line connecting the nozzle 25a row in each head chip arrangement hole 11b (a line passing through the center of each nozzle 25a). The line is formed on the center line side of the module frame 11 drawn parallel to the longitudinal direction of the module frame 11. Further, when the head chip arrangement holes 11b are “N1”, “N2”, “N3”,..., “N8” in order from the left side, “N1”, “N3”, “N5” and “N7” The nozzle 25a row in the “th” head chip arrangement hole 11b is formed so as to be aligned on a straight line parallel to the center line. The same applies to the “N2”, “N4”, “N6” and “N8” -th relationships.

Therefore, the nozzle 25a rows in the adjacent head chip arrangement holes 11b, for example, the nozzle 25a rows in the “N1” -th and “N2” -th head chip arrangement holes 11b are on two straight lines parallel to the center line. Align.
In the present embodiment, eight head chip arrangement holes 11b are formed for one module frame 11, but the above relationship is satisfied even when more or fewer head chip arrangement holes 11b are formed. Like that.

  Next, the head chip 20 in which the barrier layer 24 is laminated is arranged and fixed in each head chip arrangement hole 11b. This is performed in a second temperature environment lower than the first temperature environment (for example, at room temperature (about 25 ° C.)). Thereby, the barrier layer 24 and the nozzle sheet 25 are adhered. Here, the head chip 20 is thermocompression bonded while being aligned using a chip mounter. Further, in this case, thermocompression bonding is performed with an accuracy of, for example, about ± 1 μm so that the nozzle 25a is positioned directly below the heating resistor 22 of the head chip 20.

  By the way, when the head chip 20 and the nozzle sheet 25 are compared, the nozzle sheet 25 has a larger linear expansion coefficient. The thermocompression bonding temperature of the head chip 20 is lower than the bonding temperature between the module frame 11 and the nozzle sheet 25. Therefore, when the head chip 20 is thermocompression bonded, the nozzle sheet 25 bonded to the module frame 11 is in a tensioned state, so that the deflection of the nozzle sheet 25 can be prevented and flatness can be ensured.

  Thus, when the head chip 20 on which the barrier layer 24 is formed is arranged in the head chip arrangement hole 11b and the nozzle sheet 25 and the head chip 20 are bonded, the surface of the nozzle sheet 25 on the head chip 20 side, The ink liquid chamber 26 is formed as described above by the barrier layer 24 and the surface of the head chip 20 on which the heating resistor 22 is formed.

  Furthermore, when the head chip 20 is attached to the nozzle sheet 25, the electrode 23 of the head chip 20 is exposed to the outside without being hidden by the nozzle sheet 25 (see FIG. 4). Accordingly, the head chip 20 is formed so as to be electrically connected to the head chip 20 even after the head chip 20 is arranged in the head chip arrangement hole 11b.

  Subsequently, the electrode 23 provided on the head chip 20 side and the flexible wiring board 3 are joined (electrically connected). This step is also performed, for example, in a third temperature environment lower than the first temperature environment (for example, at normal temperature (about 25 ° C.)). FIG. 6 is a plan view showing a state where the flexible wiring board 3 is joined after the nozzle sheet 25 and the head chip 20 are attached to the module frame 11. In FIG. 6, the front side is the sticking surface side of the nozzle sheet 25, but for ease of understanding of the drawing, the head chip 20 attached from the opposite side is shown by a solid line (hatched portion). Show.

  The flexible wiring board 3 has a so-called sandwich structure in which a copper foil is sandwiched from both sides with polyimide or the like. Two flexible wiring boards 3 are attached to one head module 10. The four head chips 20 are arranged in two rows by four, and one flexible wiring board 3 is attached to each row. As shown in FIG. 7, the wiring pattern 3 a is formed on the flexible wiring board 3, and each wiring pattern 3 a is bonded to the electrode 23 of the head chip 20. At this time, the nozzle sheet 25 is attached so that the outer edge of the nozzle sheet 25 and the outer edge of the flexible wiring board 3 are close to each other.

Here, as shown in FIG. 4, the electrode 23 of the head chip 20 and the flexible wiring board 3 are connected via an anisotropic conductive film 28 (ACF connection).
After the connection, a resin 29 such as an epoxy resin is provided in the gap between the head chip 20 and the module frame 11 (opposite the flow path 27), and the anisotropic conductive film 28 is sealed. When the head module 10 is used, the periphery of the head chip 20 (upper side in FIG. 4) is soaked with ink so that the ink does not enter the live part and short-circuit. In addition, a gap is formed between the outer edge of the flexible wiring board 3 and the outer edge of the nozzle sheet 25. A resin 30 is provided from the nozzle sheet 25 side so as to fill the gap, and this gap is sealed.

Next, as shown in FIGS. 4 and 8, the buffer tank 12 is bonded so as to cover the top of the head chip 20. FIG. 8 is a plan view showing the buffer tank 12 and the flexible wiring board 3.
The buffer tank 12 is a tank for temporarily storing ink, and one buffer tank 12 is provided for one head module 10.
As shown in FIG. 8, the buffer tank 12 has substantially the same shape as the module frame 11 when viewed in a plan view. And as shown in FIG. 4, the inside of the buffer tank 12 forms the liquid flow path (the dot part in FIG. 4) which became the cavity. In particular, the buffer tank 12 of the present embodiment is formed such that the lower surface side (bonding surface side with the module frame 11) is opened, the side walls and the top wall are formed to have the same thickness, and the cross section is substantially reverse concave. Has been.
The buffer tank 12 forms a liquid flow path common to all the head chips 20 and temporarily stores ink to be supplied to the ink liquid chamber 26. In the present embodiment, the buffer tank 12 is particularly rigid for fixing the module frame 11. It is also a support member.

When the buffer tank 12 is mounted on the module frame 11, as shown in FIG. 8, all the head chip arrangement holes 11b are covered. As shown in FIG. 4, the buffer tank 12 and the ink liquid chamber 26 of each head chip 20 are communicated with each other via a flow path 27 between the head chip placement hole 11 b and the head chip 20. As a result, the buffer tank 12 forms a liquid flow path common to all the head chips 20 in the head module 10.
Although not shown, a hole is formed in the top wall of the buffer tank 12, and ink is supplied into the buffer tank 12 from an ink tank (not shown) through this hole.

  The module frame 11, the head chips 20, and the buffer tank 12 have the same linear expansion coefficient. This is because a large difference in coefficient of linear expansion causes troubles such as peeling of the adhesive due to the action of thermal stress, which is avoided.

Furthermore, in the present embodiment, one liquid discharge head 1 is formed by using a plurality of the head modules 10.
As shown in FIG. 1, a rigid head frame 2 is formed with a head module arrangement hole 2a. In this embodiment, eight head modules 10 are arranged side by side in the head module arrangement hole 2a. (Two head modules 10 are connected in series, and the head modules 10 connected in series are arranged in four stages.) Each head module 10 is screwed and positioned.

  Further, as shown in FIG. 2, the buffer tanks 12 of the eight head modules 10 are visible. The buffer tanks 12 connected in series are connected by a U-shaped tube 13. Further, the connection side end portions (hatched portions in FIG. 2) of the two flexible wiring boards 3 extend perpendicular to the paper surface with respect to one head module 10.

  Next, as shown in FIG. 3, the control substrate 4 for controlling the discharge of the liquid and the like is screwed by screws 5 on the surface side where the buffer tank 12 is provided. On the control board 4, in addition to various capacitors, a connector 4a for connecting to the flexible wiring board 3 is provided. A notch 4b is formed in the vicinity of the connector 4a, and the leading end of the flexible wiring board 3 passes through the notch 4b and goes out from the lower side to the upper side of the control board 4, and the control board 4 connector 4a.

  In this way, two head modules 10 are connected in series to form an A4-compatible line head. Further, four rows of the head modules (consisting of two head modules 10) are arranged to form a color line head corresponding to four colors (colors) of Y, M, C, and K.

As described above, in this embodiment, since the material of the nozzle sheet 25 can be used only for necessary portions, the material cost of the nozzle sheet 25 per one liquid discharge head 1 and one head module 10 is reduced. It can be reduced to the limit. The cost of the nozzle sheet 25 formed by the electroforming method is substantially proportional to the area, but in this embodiment, compared with the case of the conventional Patent Document 1, the area is about 20%, which is about 80%. Cost can be reduced.
Further, by reducing the size of the nozzle sheet 25, it is possible to reduce the occurrence of defects in the manufacturing process such as deformation and tearing.

  Furthermore, instead of the liquid ejection head as in Patent Document 1, by dividing into a plurality of head modules 10, when there is a defect or failure in part, for example, only one head chip 20 does not operate as a defective product. In such a case, it is possible to cope with the problem by exchanging the defective head module 10, and it is not necessary to make the entire liquid discharge head 1 defective.

FIG. 2 is a plan view showing a liquid discharge head according to an embodiment of the present invention, as viewed from the liquid discharge surface side. It is the figure seen from the surface on the opposite side to FIG. It is the figure which has arrange | positioned the printed circuit board in the front side of FIG. It is sectional drawing which shows the circumference | surroundings of one head chip. It is a top view which shows the manufacturing process of a head module. It is a top view which shows the state which joined the flexible wiring board after the nozzle sheet and the head chip were affixed on the module frame. It is a perspective view which shows a head chip, a nozzle sheet, and a flexible wiring board. It is a top view which shows a flexible substrate and a buffer tank.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Liquid discharge head 2 Head frame 2a Head module arrangement | positioning hole 3 Flexible wiring board (wiring board)
DESCRIPTION OF SYMBOLS 10 Head module 11 Module frame 11b Head chip arrangement | positioning hole 20 Head chip 21 Semiconductor substrate 22 Heating resistor (energy generating element)
23 Electrode 24 Barrier layer 25 Nozzle sheet 25a Nozzle 26 Ink liquid chamber

Claims (7)

A plurality of energy generating elements arranged on a semiconductor substrate in a substantially straight line at regular intervals, and a barrier layer for forming a liquid chamber around the energy generating elements on a surface provided with the energy generating elements; A head chip provided with electrodes for electrical connection with the outside;
A nozzle sheet on which nozzles are formed;
A wiring board electrically connected to the electrode of the head chip;
A module frame in which a plurality of head chip arrangement holes, each of which is a hole for arranging the head chip and is slightly larger than the outer shape of the head chip,
A head module that discharges the liquid in the liquid chamber from the nozzle by applying a discharge force to the liquid in the liquid chamber by the energy generating element;
The nozzle sheet is located on one side of the module frame so that the nozzle is positioned in the head chip arrangement hole and covers a part of the area of the head chip arrangement hole with respect to each head chip arrangement hole. And is formed in a necessary minimum size to cover a part of the area of the head chip arrangement hole,
The head chip is arranged in each of the head chip arrangement holes from the other surface of the module frame so that the energy generating element of the head chip and the nozzle are opposed to each other.
The electrode of the head chip arranged in the head chip arrangement hole is exposed from a region not covered by the nozzle sheet of the head chip arrangement hole,
In the wiring board, the electrode of the wiring board and the electrode of the head chip are electrically connected, and the head chip is exposed on the side of the module frame where the nozzle sheet is provided. The head module is disposed so as to cover the electrode. The head module according to claim 1,
The head module is provided with a plurality of head chip arrays in which a plurality of the head chips are arranged in series. The head module according to claim 2,
One wiring board is provided for one head chip row. A head module. The head module according to claim 1,
Provided on the surface of the module frame opposite to the surface on which the nozzle sheet is disposed so as to cover all the head chip disposition holes, and provided with tanks communicating with the liquid chambers of all the head chips. A head module characterized by Multiple head modules;
A head frame in which a head module arrangement hole that accommodates a plurality of the head modules is formed, and
The head module is
A plurality of energy generating elements arranged on a semiconductor substrate in a substantially straight line at regular intervals, and a barrier layer for forming a liquid chamber around the energy generating elements on a surface provided with the energy generating elements; A head chip provided with electrodes for electrical connection with the outside;
A nozzle sheet on which nozzles are formed;
A wiring board electrically connected to the electrode of the head chip;
A module frame in which a plurality of head chip arrangement holes, each of which is a hole for arranging the head chip and is slightly larger than the outer shape of the head chip,
A liquid discharge head that discharges the liquid in the liquid chamber from the nozzle by applying a discharge force to the liquid in the liquid chamber by the energy generating element;
The nozzle sheet is located on one side of the module frame so that the nozzle is positioned in the head chip arrangement hole and covers a part of the area of the head chip arrangement hole with respect to each head chip arrangement hole. And is formed in a necessary minimum size to cover a part of the area of the head chip arrangement hole,
The head chip is arranged in each of the head chip arrangement holes from the other surface of the module frame so that the energy generating element of the head chip and the nozzle are opposed to each other.
The electrode of the head chip arranged in the head chip arrangement hole is exposed from a region not covered by the nozzle sheet of the head chip arrangement hole,
In the wiring board, the electrode of the wiring board and the electrode of the head chip are electrically connected, and the head chip is exposed on the side of the module frame where the nozzle sheet is provided. A liquid discharge head, which is disposed so as to cover the electrode. Multiple head modules;
A head frame in which a head module arrangement hole that accommodates a plurality of the head modules is formed, and
The head module is
A plurality of energy generating elements arranged on a semiconductor substrate in a substantially straight line at regular intervals, and a barrier layer for forming a liquid chamber around the energy generating elements on a surface provided with the energy generating elements; A head chip provided with electrodes for electrical connection with the outside;
A nozzle sheet on which nozzles are formed;
A wiring board electrically connected to the electrode of the head chip;
A module frame in which a plurality of head chip arrangement holes, each of which is a hole for arranging the head chip and is slightly larger than the outer shape of the head chip,
A liquid discharge device that discharges the liquid in the liquid chamber from the nozzle by applying a discharge force to the liquid in the liquid chamber by the energy generating element;
The nozzle sheet is located on one side of the module frame so that the nozzle is positioned in the head chip arrangement hole and covers a part of the area of the head chip arrangement hole with respect to each head chip arrangement hole. And is formed in a necessary minimum size to cover a part of the area of the head chip arrangement hole,
The head chip is arranged in each of the head chip arrangement holes from the other surface of the module frame so that the energy generating element of the head chip and the nozzle are opposed to each other.
The electrode of the head chip arranged in the head chip arrangement hole is exposed from a region not covered by the nozzle sheet of the head chip arrangement hole,
In the wiring board, the electrode of the wiring board and the electrode of the head chip are electrically connected, and the head chip is exposed on the side of the module frame where the nozzle sheet is provided. A liquid ejecting apparatus, wherein the liquid ejecting apparatus is disposed so as to cover the electrode. A plurality of energy generating elements arranged on a semiconductor substrate in a substantially straight line at regular intervals, and a barrier layer for forming a liquid chamber around the energy generating elements on a surface provided with the energy generating elements; A head chip provided with electrodes for electrical connection with the outside;
A nozzle sheet on which nozzles are formed;
A wiring board electrically connected to the electrode of the head chip;
A module frame having a plurality of head chip arrangement holes for arranging the head chip therein,
A method of manufacturing a head module that discharges liquid in the liquid chamber from the nozzle by applying a discharge force to the liquid in the liquid chamber by the energy generating element,
Under the first temperature environment, on one surface of the module frame, with respect to each head chip arrangement hole, the nozzle is positioned in the head chip arrangement hole, and a part of the area of the head chip arrangement hole is formed. A first step of sticking the nozzle sheet to cover each;
From the surface on the other side of the module frame, the energy generating element and the nozzle of the head chip are arranged at positions facing each other under a second temperature environment lower than the first temperature environment. A second step of attaching the head chip to each of the head chip placement holes;
And a third step of attaching the wiring board to the surface of the module frame on which the nozzle sheet is provided so that the electrode of the wiring board and the electrode of the head chip are electrically connected. A method for manufacturing a head module.

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