JP2006514262A - Measuring device and calibration method of the measuring device - Google Patents

Abstract

In the measuring device, the calibration standard is measured to obtain an error model, and the measurement result from which the influence of the systematic error is removed is displayed. If the operator is satisfied with the measurement result, the calibration operation is completed. If the operator is dissatisfied with the measurement result, the desired parameter of the calibration standard is measured again, the error coefficient is obtained again, and the measurement result from which the influence of the system error is removed is displayed again. The measurement result is held until the calibration operation is completed, and when the calibration standard is remeasured during the calibration operation, the measurement value is held so that the latest measurement result is referred to.

Description

  The present invention relates to a measurement apparatus having a calibration function, and more particularly to a measurement apparatus that improves work efficiency during calibration in an apparatus having two or more measurement terminals.

  Many measuring devices have at least incomplete parts, and a deviation occurs between the measured value of the device and the true value. Therefore, the measurement apparatus calibrates the measurement apparatus prior to measurement of an object to be measured (hereinafter referred to as DUT) so that the influence of the systematic error can be removed from the measurement value. Hereinafter, the systematic error is also simply referred to as an error.

  Here, a network analyzer is taken as an example of a measurement apparatus, and a conventional calibration method and its procedure are described below.

  FIG. 1 is a diagram showing a schematic configuration of a 2-port network analyzer 100. In FIG. 1, the network analyzer 100 includes a CPU 120, a memory 130 that is an example of a storage unit, an input device 140, a measurement unit 150, and a display unit 160 that is an example of an output unit. Note that these components are connected to each other by a bus 110. The CPU 120 exchanges data with the memory 130, the input device 140, the measurement unit 150, or the display unit 160, and performs arithmetic processing as necessary. The memory 130 stores setting information of the network analyzer 100, measurement values obtained by the measurement unit 150, and the like. The input device 140 receives a command from outside the network analyzer 100. The measurement unit 150 includes ports A and B which are measurement terminals, and can measure incident signal power and reflected signal power at each port. The incident signal is an output signal at the port, and the reflected signal is an input signal at the port.

  In such a network analyzer 100, when a two-port device is connected between port A and port B and the forward and reverse network characteristics of the device are measured, signal leakage, signal reflection, and frequency response are related. There are 12 systematic errors.

  One of the calibration methods for removing the influence of these errors from the measured value is a TRL (Thru-Reflect-Line) calibration method. The TRL calibration method is characterized by the use of three types of calibration standards: thru, reflect, and line, and can eliminate the effects of 10 errors in 2-port calibration, making it suitable for non-coaxial environments and on-wafer measurements. Is available. The reflect standard is either an open standard or a short standard.

  FIG. 2 is a flowchart showing the procedure of the TRL calibration method implemented by the network analyzer 100. First, in step P21, data from the input device 140 is received, and a calibration standard characteristic value used for calibration is set. Note that both port A and port B are used for the measurement of the calibration standard. Next, in step P <b> 22, the measurement unit 150 measures the calibration standard connected to the port A and port B, and the CPU 120 receives the measurement value from the measurement unit 150 and stores it in the memory 130.

  The TRL calibration method needs to measure 12 parameters of the calibration standard in the case of 2-port calibration. Accordingly, in step P23, it is determined whether or not all of the measurement values have been obtained, and processing is performed to repeat step P22 until all of the measurement values are obtained.

  In step P24, the CPU 120 refers to the 14 parameter measurement values stored in the memory 130, obtains 10 error values, and stores the error values in the memory 130 as error coefficients. Finally, the 14 parameter measurement values stored in the memory are erased. The network analyzer 100 can output the measured value of the DUT from which the influence of the obtained error is removed, that is, the corrected measured value, after the calibration according to the above-described procedure.

  By the way, after calibration is performed, the calibration standard cannot be obtained accurately due to poor calibration standard connection or incorrect calibration standard connection due to the large number of measurement terminals. is there. Whether or not the error has been accurately determined can be confirmed by observing the corrected measurement value, but according to the conventional configuration procedure, the corrected measurement value can only be observed after calibration. . After the calibration, all calibration standard parameter measurement values were deleted, and only specific parameters could not be measured again, and the efficiency of the calibration work was not good. Recently, the measuring apparatus and the DUT are provided with many ports, and the trouble at the time of recalibration increases, and this problem becomes serious.

An object of the present invention is to solve the above-described problems of the prior art, and an object of the present invention is to output a desired parameter measurement value from which an influence of an error is removed during a calibration operation. By doing this, it is possible to reduce the man-hours required when re-measurement of the calibration standard is necessary.

  Another object is to make the parameter measurement values of the calibration standard unavailable when the calibration operation is interrupted or terminated, thereby wasting resources of the storage means for storing the measurement values, and when calibration is performed again. In addition, it is possible to suppress the confusion of the worker due to the mixing of the new measurement value and the old measurement value.

  Furthermore, another object is to obtain the above-described measurement terminal combination obtained by selecting M measurement terminals fewer than N from the N measurement terminals when calibrating N measurement terminals. By calibrating the measurement terminals for each combination, it is easy to verify the error coefficient obtained by the calibration and to deal with when a defective error coefficient is obtained.

  In short, the first invention is a method for calibrating a measuring device using a calibration standard in a measuring device having a measuring terminal and a storage means, and outputs a desired parameter measurement value from which the influence of error has been removed. After that, while holding the stored parameter measurement value of the calibration standard, the desired parameter of the calibration standard is measured again, and the remeasured value can be stored in the storage means.

  Further, according to the second invention, in the first invention, the parameter measurement value of the calibration standard is made unavailable when the calibration operation is interrupted or terminated.

  Furthermore, the third invention is a method of calibrating a measuring apparatus using a calibration standard in a measuring apparatus having measuring terminals, and when N measuring terminals are calibrated, N measuring terminals are connected to N measuring terminals. In the combination of the measurement terminals obtained by selecting less than M measurement terminals, the measurement terminals are calibrated for each obtained combination.

  According to the present invention, since the desired parameter measurement value from which the influence of the error has been removed is output during the calibration operation, it is possible to reduce the man-hour involved when the calibration standard needs to be remeasured.

  In addition, when the calibration operation is interrupted or terminated, the calibration standard parameter measurement values are made unusable, so that the storage means for storing the measurement values is wasted and new measurement values and old ones are stored when the calibration operation is performed again. It is possible to suppress the operator's confusion caused by mixing with measured values.

  Further, when N measurement terminals are calibrated, in the combination of the measurement terminals obtained by selecting M measurement terminals fewer than N from the N measurement terminals, the measurement is performed for each obtained combination. Since the terminal is calibrated, it is possible to easily verify the error coefficient obtained by the calibration and to deal with when a defective error coefficient is obtained.

  Hereinafter, the present invention will be described based on embodiments shown in the accompanying drawings. This embodiment is a four-port network analyzer calibrated by the method of the present invention, and a schematic configuration diagram thereof is shown in FIG.

  In FIG. 3, the network analyzer 300 is an example of a measurement device, and includes a CPU 320 that is an example of a control unit, a memory 330 that is an example of a storage unit, an input device 340, and a measurement unit 350 that is an example of a measurement unit. , A display unit 360 as an example of output means, and a hard disk drive (hereinafter referred to as HDD) 370 as an example of a recording medium. Note that these components are connected to each other by a bus 310. The CPU 320 calibrates the network analyzer 300 by executing the calibration program read from the HDD 370 to control the measurement unit 350, the display unit 360, and the like. The memory 330 stores setting information of the network analyzer 300, measurement values obtained by the measurement unit 350, and the like. Although not shown, the input device 340 is connected to a keyboard, a mouse, and the like, and receives an external command. The measurement unit 350 includes port 1, port 2, port 3 and port 4 which are examples of measurement terminals, and can measure incident signal power and reflected signal power at each port.

An internal configuration diagram of the measurement unit 350 is shown in FIG. In FIG. 4, a measurement unit 350 includes a signal source SG, switches SW ₁ , SW ₂ , SW ₃ and SW _4, and reference receivers R ₁ , R ₂ , R ₃ and R ₄ for measuring incident signal power. And test receivers T ₁ , T ₂ , T ₃ and T ₄ for measuring the reflected signal power.

  The signal source SG is a device that outputs a reference signal for measurement, and the amplitude and frequency of the output signal are variable.

Switch SW ₁ is connected to the port 1 and the signal source SG, terminate or to conduct the port 1 and the signal source SG. Switch SW ₂ is connected to a signal source SG and port 2 is terminated either by conduction port 2 and signal source SG. Switch SW ₃ is connected to a signal source SG and port 3, terminate or to conduct the port 3 and the signal source SG. Switch SW ₄ is connected to a signal source SG and port 4 is terminated either by conduction port 4 a signal source SG. Note that any one of the switches operates to connect the port and the signal source SG, and the other three switches operate to terminate the port.

Test receiver T ₁ is connected to port 1 via directional coupler C _T1 and measures the incident signal power at port 1. The reference receiver R ₁ is connected to the port 1 via the directional coupler C _R1 and measures the reflected signal power at the port 1. Test receiver T ₂ are connected to the port 2 via the tropism coupler C _T2, measures the incident signal power at port 2. Reference receiver R ₂ is connected to the port 2 via the directional coupler C _R2, measuring the reflected signal power at port 2. Test receiver T ₃ is connected to port 3 via directional coupler C _T3 and measures the incident signal power at port 3. Reference receiver R ₃ is connected to a port 3 via a directional coupler C _R3, measuring the reflected signal power at port 3. Test receiver T ₄ is connected to port 4 via directional coupler C _T4 and measures the incident signal power at port 4. The reference receiver R ₄ is connected to the port 4 via the directional coupler C _R4 and measures the reflected signal power at the port 4.

  When the network analyzer 300 performs the TRL calibration method, the memory 330 stores information about the calibration standard, the measured value of the calibration standard parameter, and the value of the systematic error obtained from the measured value of the parameter. The information regarding the calibration standard includes the delay amount and characteristic impedance of the through standard, the type and delay amount and characteristic impedance of the reflect standard, and the delay amount and characteristic impedance of the line standard and two frequencies indicating the applicable frequency range.

  The type of the reflect standard is either an open standard or a short standard as described above. Since the frequency range to which one line standard can be applied is limited, in this example, two different line standards are used to ensure a wide frequency range.

  When measuring a 4-port device using the network analyzer 300, there are the most systematic errors, and the number is 48. If the TRL calibration method is used, the error value can be obtained for 36 systematic errors out of 48. Note that the value of the systematic error is also referred to as an error coefficient. The 36 error coefficients include the following error coefficients. That is, the directionality Ed, source matching Ed, and reflection tracking Er in each of the four ports are load matching El and transmission tracking Et in a set of two ports selected from the four ports. Since the network analyzer 300 performs measurement at a plurality of points in the measurement frequency range, the set of 36 error coefficients is stored in the memory 330 as the number of the measurement frequency points.

  The load matching and transmission tracking are stored in the [n * n] array so that the program can easily refer to them.

  In addition, in order to obtain 36 error coefficients at one measurement frequency point, 64 parameters of the calibration standard must be measured. Specifically, it is as follows.

  6 port combinations when selecting 2 ports from 4 ports: 1-2 port, 1-3 port, 1-4 port, 2-3 port, 2-4 port or 3-4 port Four S-parameters which are transmission coefficients and reflection coefficients measured at each port of each set when a through standard and a line standard are connected to the set. Two parameters which are switch matching measured in relation to each port of each set when a through standard is connected to the above six types of port set. One S-parameter that is the reflection coefficient measured at each port when the reflect standard is connected to each of the four ports.

Here, C is a combination _n C ₂ for selecting two from n. Note that a set of these measurement parameters is stored in the memory 330 in the same manner as the error coefficient.

  In the network analyzer 300 configured as described above, a processing procedure of a program for calibration will be described below with reference to a flowchart shown in FIG.

  First, in step P41, data from the input device 440 is received, and information related to a calibration standard used for calibration is set. An example of a screen displayed on the display unit 360 in association with Step P41 is shown in FIG. In FIG. 6, a dialog box 600 includes a list box for selecting channels and ports, a [Define Calkit] button for opening a calibration standard setting dialog box, and [Measure>] for opening a calibration standard measurement dialog box. It has buttons and a message box. These buttons, list boxes, and the like are operated by a pointer or the like displayed on the screen by the display unit 360 in conjunction with a mouse connected to the input device. The network analyzer 300 can display a plurality of independent windows for displaying the measurement results. In this embodiment, the window is referred to as a channel. When displaying different measurement parameters for each channel, the operator may have to calibrate the required ports for each channel. Therefore, in the dialog box 600, a channel and a port can be selected. For example, the channel can select a number from 1 to 9 from the list. When the number of ports to be calibrated is two, select one of the ports 1-2, 1-3, 1-4, 2-3, 2-4, 3-4 When the number is three, any pair of ports 1-2-3, 1-2-4, 1-3-4, 2-3-4 is selected and the number is four. When all ports are selected.

  FIG. 7 shows a calibration standard setting dialog box displayed by pressing the [define Calkit] button. In FIG. 7, a dialog box 700 includes an input box for setting information related to a calibration standard, a radio button, and a check box. Since the line standard does not necessarily need to use two standards, the line standard to be used can be selected by a check box.

  As the type of the reflect standard, either an open standard or a short standard is selected by a radio button. Other setting information related to the calibration standard such as the delay amount is set by inputting a numerical value in the input box. In addition, the dialog box 700 has a [Save] button for saving information on the calibration standard in a storage medium such as the HDD 370, a [Recall] button for reading and reflecting the setting information saved in the storage medium, or a default setting. [Default] button to reflect information is provided. By pressing [Close] after the setting is completed, the information set in the dialog box 700 is stored in the memory 330, and the dialog box 700 is closed.

  When the information about the channel, port, and calibration standard is set correctly, the text “ok” is displayed in the message box, and the [Measure>] button can be pressed. Note that the [Measure>] button cannot be used until the calibration standard information is correctly set. Even after the “ok” character string is displayed in the message box, the channel and port can change the selection, and the [define Calkit] button can be used. When the [Measure>] button is pressed, information on the selected channel and port is stored in the memory 330, the dialog box 600 is closed, and the process proceeds to step P42.

  In step P42, a dialog box related to the measurement of the calibration standard is displayed by the display unit 360, and the calibration standard is measured. Here, an example of a screen displayed by the display unit 360 in relation to Step P42 is shown in FIG. In FIG. 7, a dialog box 810 lists the ports or sets to be connected for each of the calibration standards based on the ports selected in dialog box 600. As is apparent with reference to the dialog boxes of FIGS. 6 and 7, the network analyzer 300 is set to perform a two-port calibration between ports 1-2 in the measurement frequency range of 1.0 to 8.5 GHz. Therefore, in the group of calibration standards on the dialog box 810, port 1 or port 2 or port 1-2 is designated as a port to be connected. For example, in the [Reflection] group indicating the reflection standard connection, two buttons are displayed, and numbers indicating the port numbers [1] and [2] are respectively displayed. For example, when a reflect standard is connected to port 1 and the [1] button in the [Reflection] group is pressed, the reflect standard at port 1 is measured, and the measured value is stored in memory 330. In other calibration standard groups, buttons displaying a port or a set of ports to which the calibration standard is connected are listed. When these buttons are pressed and the associated measurement is completed, the color changes.

  In step P43, determination and branch processing are performed so that the processing in step P42 is continued until all the measurements necessary for calibration are completed. The dialog box 810 has an [Update CalCoef] button for obtaining an error coefficient and reflecting it in the removal of the influence of miscalculation in the subsequent measurement, so that it can be pushed when all the measurements necessary for calibration are completed. become. Further, when all the measurements are completed, the buttons listed in each calibration standard group on the dialog box 810 have all changed color. Such a dialog box is illustrated in FIG. Note that the [Update CalCoef] button cannot be used until all the measurements necessary for calibration are completed.

  Since the dialog box 810 has a [Close] button, the calibration operation can be interrupted. When the calibration operation is interrupted, channel and port selection information and calibration standard setting information are retained, and all measured values obtained before the interruption are deleted. Further, since the dialog box 810 includes a [<Setup] button, it is possible to reselect a channel and a port or reset information on a calibration standard. When reselected or reset, the calibration standard parameter measurements and button colors are not initialized or changed.

  When the [Update CalCoef] button is pressed, the program process proceeds to step P44.

  In step P <b> 44, the CPU 320 calculates an error coefficient with reference to the parameter measurement value stored in the memory 330 and stores the error coefficient in the memory 330. That is, a systematic error is obtained. Further, in step P45, the CPU 320 refers to the error coefficient stored in the memory 330 and the measurement value obtained from the measurement unit 350, and outputs the desired parameter measurement value from which the influence of the error has been removed to the display unit 360. . Note that the error to be removed includes a drift error in the short term.

  An output example of the display unit 360 is shown in FIGS. FIG. 10 shows a measurement result 910 of a desired parameter when the error coefficient cannot be obtained satisfactorily. On the other hand, FIG. 11 shows a measurement result 920 of a desired parameter when the error coefficient can be obtained satisfactorily. Both measurement results 910 and 920 are the measurement results of the transmission coefficient S21 from the port 1 to the port 2 when the through standard is connected between the port 1 and the port 2, and are measured in the same manner as the normal measurement. Is output. Whether or not the obtained error coefficient is valid can be determined, for example, by observing the amplitude of the measurement result (step P45).

  As is clear with reference to FIG. 10 or FIG. 11, since the dialog box for measuring the calibration standard is displayed together with the measurement result, only the desired parameter of the calibration standard parameters that have already been measured is remeasured. I can do it. For example, when the obtained error coefficient is bad, the button displaying the port number listed in the dialog box 830 in FIG. 10 is selected, and the measurement result shown in FIG. 11 is obtained. The desired parameters of the calibration standard can be remeasured. Since the dialog box 830 has an [Update CalCoef] button similar to the dialog box shown in FIG. 9, when the [Update CalCoef] button is pressed after re-measurement, a new error coefficient is obtained and the error coefficient is reflected. The measured result is displayed.

  During the process of the calibration program outlined above and shown in detail in the flowchart of FIG. 5, the measurement results for the desired parameters specified at that time are displayed in the background of the displayed dialog box. Even during the processing of the program, a desired parameter can be designated in the same way as normal measurement, and the display format of the measurement result of the parameter can be changed. For example, when a measurement result is displayed in a window displayed on the display unit 360, it can be displayed in a waveform, a numerical value displayed in a list, or another format, and the window scrolls when the measurement result is displayed in a list. You can also operate the bar. Other settings related to measurement can also be changed during the calibration program.

  In FIG. 11, the dialog box 840 is the same as the dialog box 830 in FIG. 10 and includes a [Close] button. Therefore, if it is determined that the obtained error coefficient is valid, the [Close] button Press to finish the calibration process. Even when the calibration operation is completed, the channel and port selection information and the calibration standard setting information are retained, but all measured values obtained before the completion are deleted.

  As described above, since the dialog box 810 includes the [<Setup] button, it is possible to reselect the channel and port or reset the information regarding the calibration standard. The parameter measurements and button colors are not initialized or changed. This makes it possible to divide the n-port calibration into a plurality of 2-port calibrations and perform it in stages, thereby contributing to an improvement in the efficiency of the calibration work.

  For example, when 3-port calibration is performed for 1-2-3 port, it can be replaced by performing 2-port calibration for 1-2 port and 2-port calibration for 1-3 port. Compared with 3-port calibration, 2-port calibration is limited in the factors that affect the calibration standard measurement results, such as the connection port and connection status of the calibration standard. And it becomes easy to handle when the obtained error coefficient is not valid.

  If the above-described calibration program is stored in a recording medium so that the network analyzer 300 can execute the program, the storage medium may be built in the network analyzer 300 or provided separately from the network analyzer 300. good. For example, the program can be recorded in a storage medium such as a CD ROM, a flexible disk, a memory card, or an external connection type HDD, and the program can be mounted on the network analyzer 300 from these storage mediums. Of course, the program may be recorded in the ROM and installed in the network analyzer 300.

It is a schematic block diagram of the network analyzer which can be calibrated by the conventional method. It is a flowchart which shows the calibration procedure by a conventional method. It is a schematic block diagram of the network analyzer which can be calibrated by the method of this invention. It is a figure which shows the detailed internal structure of the measurement part of the network analyzer which can be calibrated by the method of this invention. It is a flowchart which shows the calibration procedure by this invention method. It is a figure which shows the screen which the calibration program by a method of this invention displays. It is a figure which shows the screen which the calibration program by a method of this invention displays. It is a figure which shows the screen which the calibration program by a method of this invention displays. It is a figure which shows the screen which the calibration program by a method of this invention displays. It is a figure which shows the screen which the calibration program by a method of this invention displays. It is a figure which shows the screen which the calibration program by a method of this invention displays.

Explanation of symbols

100, 300 Network analyzer 110, 310 Bus 120, 320 CPU
130, 330 Memory 140, 340 Input device 150, 350 Measuring unit 160, 360 Display unit 370 Hard disk drive 600, 700, 810, 820, 830, 840 Dialog box 910, 920 Measurement result

Claims (13)

A measuring device,
Measuring means comprising a plurality of measuring terminals;
Control means for selecting at least one of the plurality of measurement terminals, measuring a calibration standard, and setting a characteristic value of the calibration standard to be measured;
Storage means for storing parameters of the calibration standard to be measured, and measured values of the parameters measured by the measuring means;
With
The measuring means calculates an error of the measured value of the parameter;
The error is stored in the storage means,
The measurement means removes the influence of the error from the measurement value and outputs it,
Obtaining and storing a remeasured value of the parameter while retaining the measured value of the parameter of the calibration standard in the storage means;
measuring device.   The apparatus according to claim 1, wherein the measurement unit stores the measurement value of the calibration standard again in the storage unit while holding the characteristic value of the calibration standard in the storage unit.   The apparatus according to claim 1, wherein the control means disables stored parameter measurements of the calibration standard.   The apparatus according to claim 1, wherein the measurement unit is a network analyzer having two or more measurement terminals. A method of calibrating a measuring apparatus having a plurality of measuring terminals and a storage means using a calibration standard,
Selecting at least one calibration standard from the measurement terminals;
Setting a characteristic value of the selected calibration standard;
Selecting parameters of the calibration standard;
Storing the measured value of the parameter of the calibration standard in the storage means;
Referring to the measured value of the parameter of the calibration standard stored in the storage means;
Determining an error of the measured value of the parameter;
Outputting the measurement value after removing the effect of error;
Re-measuring the value of the parameter of the calibration standard;
Storing the remeasured value in the storage means while retaining the measured value of the parameter of the calibration standard in the storage means;
Including methods. further,
Reselecting the desired parameters of the calibration standard;
Storing the remeasured value of the desired parameter in the storage means while retaining the measured value of the parameter in the storage means;
The method of claim 5 comprising: further,
6. The method according to claim 5, comprising disabling the measured value of the parameter of the calibration standard in the storage means when interrupting or terminating the step. A method for calibrating a measuring apparatus having a plurality of measuring terminals using a calibration standard,
Selecting at least one calibration standard from the measurement terminals;
Setting a characteristic value of the selected calibration standard;
Selecting parameters of the calibration standard;
Referring to the measured value of the parameter of the calibration standard stored in the storage means;
Determining an error of the measured value of the parameter;
Outputting the measurement value after removing the effect of error;
Re-measuring the value of the parameter of the calibration standard;
Storing the remeasured value in the storage means while holding the measured value of the parameter of the calibration standard in the storage means of the object to be measured connected to a desired terminal of the at least one measurement terminal When,
Including
When calibrating N measurement terminals, a preselected number of the measurement terminals in each of the combinations of measurement terminals obtained by selecting M measurement terminals less than N from the N measurement terminals. A method characterized by calibrating a measurement terminal.   The method according to claim 8, wherein the measurement device is a network analyzer having two or more measurement terminals. A recording medium recording a computer-readable program for calibrating a measuring apparatus having a measurement terminal and a storage means using a calibration standard, the program being
Program instructions for selecting the measurement terminal and the calibration standard;
Program instructions for setting characteristic values of the selected calibration standard;
Program instructions for measuring parameter values of the selected calibration standard;
Program instructions for storing the measured values in the storage means;
Program instructions for referring to the measured values of the parameters of the calibration standard stored in the storage means;
Program instructions for determining an error from the referenced value of the parameter of the calibration standard;
A program instruction for outputting the measured value of a desired parameter after removing the influence of the error;
Program instructions for re-measuring the parameters of the calibration standard;
A program instruction for storing the remeasured value in the storage means while retaining the measured value of the parameter of the calibration standard;
A recording medium comprising: The program further includes:
Re-measure the parameter of the selected calibration standard and store the re-measured value in the storage means in the storage means while retaining the measured value of the parameter of the calibration standard in the storage means Program instructions, to
The recording medium according to claim 10, comprising: The program further includes:
A program instruction for disabling the measured value of the parameter of the calibration standard in the storage means when interrupting or terminating the step;
The recording medium according to claim 10, comprising: A recording medium recording a computer-readable program for calibrating a measuring apparatus having a measurement terminal and a storage means using a calibration standard, the program being
Program instructions for selecting the measurement terminal and the calibration standard;
Program instructions for setting characteristic values of the selected calibration standard;
Program instructions for measuring parameter values of the selected calibration standard;
Program instructions for storing the measured values in the storage means;
Program instructions for referring to the measured values of the parameters of the calibration standard stored in the storage means;
Program instructions for determining an error from the referenced value of the parameter of the calibration standard;
A program instruction for outputting the measured value of a desired parameter after removing the influence of the error;
Program instructions for re-measuring the parameters of the calibration standard;
A program instruction for storing the remeasured value in the storage means while retaining the measured value of the parameter of the calibration standard;
Including
When the N measurement terminals are calibrated, the measurement terminals of the measurement device in each of the combinations of the measurement terminals obtained by selecting M measurement terminals fewer than N from the N measurement terminals. A recording medium characterized by being calibrated.

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