JP2006349390A - Projector - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To improve structure of a photoconverting element for converting optically a light from a light source into a pattern light to make the structure suitable for inexpensive and precise manufacturing, in a technique for projecting the pattern light onto an object. <P>SOLUTION: A projection part 12 is provided with the light source 68, a light modulating element 200 for modulating the light from the light source at least partially, angularly or with luminous-intensity-distribution to be emitted, and an optical system 32 for transmitting selectively an angular component having a radiation angle characteristic matched with a predetermined incident opening, out of the plurality of angular components. The light modulating element conducts optical modulation, to an incident light, depending on a surface shape of the light modulating element. The light modulating element has at least one set of two portions with the surface shapes different from each other. The angular component having the radiation angle characteristic matched with an incident opening angle is emitted as a component passing the optical system thereinafter, from one out of the two portions, and the angular component having the radiation angle characteristic not matched with the incident opening angle is emitted as a component not passing the optical system thereinafter, from the other of the two portions. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a technique for projecting a patterned electromagnetic wave onto an object, and more particularly to an improvement in the structure of a converter that converts an electromagnetic wave from an electromagnetic wave source into a patterned electromagnetic wave.

  A technique for projecting a pattern electromagnetic wave onto an object has already been used (see, for example, Patent Document 1). This projection technique is used, for example, for a purpose of projecting a precision pattern onto an object such as a semiconductor device substrate or a purpose of optically measuring a planar shape or a three-dimensional shape of an object.

  A projection device that projects a pattern electromagnetic wave onto an object generally includes an electromagnetic wave source, a converter that converts the electromagnetic wave from the electromagnetic wave source into a pattern electromagnetic wave, and an optical system that projects the pattern electromagnetic wave from the converter onto the object. Configured as follows.

  An example of this type of projection apparatus is a projection apparatus that uses light as an electromagnetic wave and projects pattern light as an electromagnetic wave pattern onto an object. In general, the projection apparatus includes a light source, a light converter that optically converts light from the light source into pattern light, and an optical system that projects the pattern light from the light converter onto an object. Is done.

  The pattern light is generated, for example, in a stripe shape in which bright portions and dark portions are alternately arranged. Therefore, the light converter is conventionally manufactured as a photomask that masks light from the light source spatially. The photomask is usually processed so that a light transmission portion corresponding to a bright portion in the pattern light and a light blocking portion corresponding to a dark portion in the pattern light are alternately arranged, and the light transmission portion is usually an air opening. . Thus, a normal photomask converts light from a light source into pattern light by spatially selectively transmitting and blocking light.

  Thus, the above-described projection technique can be used, for example, to project pattern light onto an object using the photomask, thereby optically measuring the shape of the object. In this case, the resolution at which the shape of the object can be measured is improved as the distance between the bright part and the dark part in the pattern light, that is, the interval between the pattern lines is shorter.

In addition, in order to satisfy the desire to improve the projection accuracy of a projector that projects precise pattern light, or to measure the planar shape or three-dimensional shape of the object by projecting the pattern light onto the object In order to satisfy the desire to improve the measurement accuracy, it may be necessary to improve the accuracy of the shape of the projected pattern light. In this case, it is required to manufacture the photomask with higher accuracy.
JP 2003-42736 A

  As one of the methods conventionally used for manufacturing a photomask finely and with high accuracy, there is a method that should be called a metal film forming method. According to this method, first, a metal film such as a chromium film is coated on the entire surface of a flat plate such as glass, and then an electron beam lithography process is performed to form an air opening as a light transmission part. The beam is locally irradiated, and the metal film is locally removed according to the irradiation pattern.

  As another method conventionally used for manufacturing a photomask finely and with high accuracy, there is a method that should be referred to as a screen printing method. According to this method, a pattern corresponding to the pattern light to be generated is formed on the surface of a flat plate such as glass by a copying plate printing method.

  However, since the above-described metal film forming method requires precise and continuous irradiation of an electron beam, the manufacturing cost per time of the photomask is high and the manufacturing time is long. Tends to rise. In the screen printing method described above, it is difficult to improve the shape accuracy of the photomask because the shape accuracy of the pattern that can be formed is at most several tens of μm.

  Against the background described above, the present invention is a technique for projecting a pattern electromagnetic wave onto an object, and a structure of a conversion body that converts an electromagnetic wave from an electromagnetic wave source into a pattern electromagnetic wave is manufactured at low cost and with high accuracy. It is an object of the present invention to improve it so as to be suitable.

  The following aspects are obtained by the present invention. Each aspect is divided into sections, each section is given a number, and is described in a form that cites other section numbers as necessary. This is to facilitate understanding of some of the technical features that the present invention can employ and combinations thereof, and the technical features that can be employed by the present invention and combinations thereof are limited to the following embodiments. Should not be interpreted. That is, it should be construed that it is not impeded to appropriately extract and employ the technical features described in the present specification as technical features of the present invention although they are not described in the following embodiments.

  Further, describing each section in the form of quoting the numbers of the other sections does not necessarily prevent the technical features described in each section from being separated from the technical features described in the other sections. It should not be construed as meaning, but it should be construed that the technical features described in each section can be appropriately made independent depending on the nature.

(1) A projection device that projects pattern light onto an object,
A light source;
A light modulator for emitting incident light from the light source after being at least partially modulated in an angular or luminous intensity distribution; and
An optical system that selectively allows passage of a plurality of angular components of light emitted from the light modulator and having a radiation angle characteristic suitable for a predetermined incident aperture; and
The light modulator performs optical modulation on the incident light depending on a surface shape of the light modulator,
The light modulator is configured such that at least one set of two portions having different surface shapes are arranged alternately in a direction along the light modulator,
From one of the two parts, an angle component having a radiation angle characteristic suitable for the incident aperture is emitted as a passing light component that subsequently passes through the optical system, while the other of the two parts. From the above, a projection device in which an angle component having a radiation angle characteristic that does not match the incident aperture is emitted as a non-passing light component that does not pass through the optical system thereafter.

  In this projection apparatus, after the light conversion body that optically converts incident light from the light source into pattern light is passed through the light conversion body that at least partially transmits or reflects the incident light from the light source. Is configured as a light modulator that modulates with respect to the angle or luminous intensity distribution (in this case, the term “luminosity” is defined as the luminous intensity when the main modulation position is observed from the outside). This light modulator performs optical modulation depending on the surface shape of the light modulator with respect to the incident light from the light source.

  The light modulator can be configured to extend in a direction intersecting with incident light from the light source, but can also be configured not to extend in a direction intersecting with the incident light. Even in the latter case, the light modulator is configured to emit the incident light from the light source after being at least partially modulated in an angular or luminous intensity distribution.

  Here, when the term “intersection” means that it intersects at right angles, the fact that the light modulator does not extend in a direction intersecting with the incident light means that the light modulator can intersect the incident light at a non-right angle. And the possibility that the light modulator is parallel to the incident light. On the other hand, if the term “intersection” means that the light modulator intersects with the incident light regardless of whether it is a right angle, it does not extend in the direction intersecting with the incident light. It only includes the possibility that the light modulator is parallel to the incident light.

  By the way, light modulators installed so as not to extend in the direction that intersects the incident light (for example, the electromagnetic field is set in a space that substantially includes the traveling direction of light from the light source, or in a space that includes a certain surface and its periphery. The light modulator) can be configured to modulate electromagnetic waves (general display of light). A typical example of this type of light modulator is an acousto-optic element, but this element is not configured to have at least one set of two portions having different surface shapes, or even Nor are these two parts arranged alternately.

  In the projection apparatus according to this section, the light modulator selectively selects one having a radiation angle characteristic suitable for a predetermined incident aperture from a plurality of angle components of light emitted from the light modulator. Used with a passing optical system.

  On the other hand, the light modulator is configured such that at least one set of two portions having different surface shapes are alternately arranged in the direction along the light modulator. From one of these two parts, an angle component having a radiation angle characteristic that matches the incident aperture is emitted as a passing light component that subsequently passes through the optical system. Further, from the other of the two portions, an angular component having a radiation angle characteristic that does not match the incident aperture is emitted as a non-passing light component that does not pass through the optical system thereafter.

  Thus, in this projection apparatus, the incident light from the light source is optically converted into pattern light by the cooperative action of the optical action depending on the surface shape of the light modulator and the angle selective light transmission characteristic of the optical system. Can be converted into an object and projected onto an object.

  In this projection apparatus, the light modulator has a light transmitting part and a light blocking part in that it performs optical modulation depending on the surface shape of the light modulator, and selectively transmits light from the light source. -The structure and principle adopted to generate the pattern light are different from the above-described photomask to be blocked. As a result, when this light modulator is employed as the light converter, unlike the case where the photomask is employed, for example, it is not essential to form an air opening in order to manufacture the light converter. .

  Specifically, in order to manufacture the light modulator in the projection apparatus according to this section, for example, a specific shape (for example, uneven shape) may be given to the surface of the light modulator. In order to give a specific shape to the surface of the light modulator, for example, a mold is pressed against the surface of the material of the light modulator, thereby transferring the inverted shape of the mold to the surface of the light modulator. It is possible to adopt the law. Unlike the case of manufacturing the above-described photomask, this processing method can be performed relatively easily because it does not involve a relatively complicated process such as local excision of the material.

  Therefore, according to the projection apparatus according to this section, the structure of the light modulator is a structure suitable for being manufactured finely and with high accuracy, and thus it is easy to simplify the manufacture of the light modulator. Become. This facilitates mass production of the light modulator, and hence facilitates reduction of the manufacturing cost of the light modulator.

  The “optical action” in this section includes, for example, refraction, reflection, diffraction, scattering, and the like. The phenomena of refraction, reflection, and diffraction are all classified into narrowly defined deflections. Therefore, it is possible to classify the incident light into an optical action that modulates the incident light angularly. It is possible to classify into an optical action that modulates light intensity distribution.

  However, scattering is common to refraction, reflection, and diffraction in that it is a phenomenon in which the traveling direction of a portion for generating a dark portion in pattern light in incident light is changed so as to avoid the optical system. Therefore, this scattering can also be classified into an optical action (deflection in a broad sense) that angularly modulates incident light.

  The “modulation” in this section includes, for example, deflection by refraction, deflection by reflection, deflection by diffraction, deflection by scattering, and the like.

(2) The projection device according to (1), wherein the light modulator extends in a direction that is in tolerance with the incident light.

(3) The projection device according to (1) or (2), wherein the light modulator is a transmissive type that transmits the incident light.

(4) The projection apparatus according to (1) or (2), wherein the light modulator is a reflection type that reflects the incident light.

(5) One of the two parts has a surface perpendicular to the incident light, and is a light rectilinear part that emits the incident light without being modulated by the surface,
The other of the two parts is a light modulator that has a surface inclined with respect to the incident light, and the incident light is modulated and emitted by the surface.
Any one of the items (1) to (4), wherein the light emitted from one of the light straight traveling part and the light modulation part is the passing light component, and the light emitted from the other is the non-passing light component. The projection apparatus described in 1.

(6) The two parts are two light modulators each having a surface inclined with respect to the incident light, and the incident light is modulated by the surface and emitted.
The two light modulation units are different from each other in the angle of the surface with respect to the incident light, and the radiation angle characteristics of the emitted light from the respective light modulation units are also different from each other.
The light emitted from one of the two light modulators is the passing light component, while the light emitted from the other is the non-passing light component. Projection device.

(7) The projection device according to any one of (1) to (6), wherein at least one of the two portions is configured as a roof-type prism.

(8) The projection device according to any one of (1) to (6), wherein at least one of the two portions has a mechanical random scattering shape as a surface shape thereof.

(9) The projection device according to any one of (1) to (6), wherein at least one of the two portions is configured as a diffraction grating.

(10) The pattern light includes at least two types of pattern light,
The light modulator is moved relative to the incident light to selectively project the at least two types of pattern light onto the object. Projection device.

  According to this projection apparatus, the type of pattern light projected onto the object can be switched by moving the same light modulator relative to the incident light. By referring to a plurality of captured images obtained by capturing an object for each pattern light, it is possible to generate three-dimensional information of the object.

  In order to generate the three-dimensional information of an object, for example, a known spatial encoding method is performed on a plurality of captured images, thereby generating code information for each pattern light, that is, for each captured image. The Based on the generated code information, ID determination of each strap boundary on each captured image is performed.

(11) The projection device according to any one of (1) to (10), wherein the two portions have a stripe shape.

  According to this projection apparatus, the pattern light emitted from the light modulator has a stripe structure. This projection apparatus is applied to two-dimensional or three-dimensional projection. A typical example of this projection apparatus is a three-dimensional input apparatus that three-dimensionally projects a light stripe pattern onto an object.

(12) A projection device that projects a pattern electromagnetic wave onto an object,
An electromagnetic source,
An electromagnetic wave modulator that emits an electromagnetic wave emitted from the electromagnetic wave source after being modulated at least partially in an electromagnetic power radiation distribution per angular or solid angle;
A selection unit that selectively allows passage of a plurality of angular components of the electromagnetic wave emitted from the electromagnetic wave modulator and having a radiation angle characteristic suitable for a predetermined incident aperture;
The electromagnetic wave modulator performs electromagnetic wave modulation depending on the surface shape of the electromagnetic wave modulator with respect to the incident electromagnetic wave,
The electromagnetic wave modulator is configured such that at least one set of two portions having different surface shapes are arranged alternately in a direction along the electromagnetic wave modulator,
From one of the two parts, an angle component having a radiation angle characteristic suitable for the incident aperture is emitted as a selected electromagnetic wave component that is then selected by the selection unit, while From the other side, a projection apparatus that emits an angle component having a radiation angle characteristic that does not match the incident aperture as a non-selective electromagnetic wave component that is not subsequently selected by the selection unit.

  According to this projection apparatus, an electromagnetic pattern can be projected onto an object with any kind of electromagnetic waves such as X-rays and radio waves as well as light.

  An example of a specific industrial application of the projection apparatus is medical treatment. In this example, X-rays are selected as electromagnetic waves, and an X-ray intensity distribution pattern is locally projected onto a patient as an object. According to this projection apparatus, it becomes easy to accurately project a two-dimensional or three-dimensional X-ray pattern onto a patient, so that effective X-ray therapy is facilitated.

  Another example of an industrial specific application of this projection apparatus is printing (representation formation). In this example, radio waves are selected as electromagnetic waves. In this example, an apparatus that forms a latent image pattern by an electric field and then generates an n-dimensional representation that can be perceived by a human or a robot by a development process (specifically, for example, a flat printer that generates a two-dimensional representation). ) Can be manufactured at low cost by configuring as the projection apparatus according to this section.

  “Electromagnetic wave” in this section includes X-rays, ultraviolet light, visible light, infrared light, radio waves, and the like. An example of this “electromagnetic wave” is a terahertz wave (an electromagnetic wave having an intermediate frequency between infrared light and millimeter wave), and this terahertz wave can be modulated by, for example, a dielectric prism. In any case, this “electromagnetic wave” may be any material as long as it can undergo optical modulation depending on the surface shape of the light modulator.

  Hereinafter, some of the more specific embodiments of the present invention will be described in detail with reference to the drawings.

  FIG. 1 is a perspective view showing the appearance of a three-dimensional input device 10 according to an embodiment of the present invention. The three-dimensional input device 10 projects three-dimensional information and surface color information of the subject S based on projection of a plurality of types of stripe pattern light onto the subject S (object), imaging of the subject S, and the imaging result. It is designed to perform signal processing acquired by a computer.

  1 to 5 show the external configuration of the three-dimensional input device 10, while FIGS. 6 to 12 show the internal configuration of the three-dimensional input device 10. Hereinafter, first, the external configuration will be described, and then the internal configuration will be described.

  As shown in FIG. 1, the three-dimensional input device 10 is configured to include a measurement head MH, a rotary table unit RT, and a holder HD.

  The measuring head MH is provided for optically imaging the subject S and measuring the three-dimensional shape and surface color of the subject S based on the imaging result. The rotary table unit RT enables imaging of the subject S by the measuring head MH each time the subject S is indexed and rotated with respect to the measuring head MH, thereby dividing the entire area of the outer surface of the subject S into a plurality of partial regions. It is provided to make it possible to take images.

  For the subject S, a plurality of partial images are acquired by imaging for each partial region. Here, the term “image” is interpreted to include not only a normal planar image but also a three-dimensional image having surface color information of the three-dimensional object and its three-dimensional shape information.

  The obtained partial images are combined with one shape stitch image by shape stitch processing after three-dimensional shape information is individually extracted from them. Subsequently, the surface color information (texture) in the plurality of partial images acquired for the subject S is mapped to the shape stitch image. At the same time, by the texture stitch processing, the plurality of surface colors represented by the surface color information are joined together without having a boundary color difference at the joint of the plurality of partial images. By these processes, a three-dimensional input result for the subject S, that is, three-dimensional color shape data is generated.

  As shown in FIG. 1, the holder HD is provided to hold the rotary table unit RT while being attached to the measurement head MH. This holder HD is itself deformable. Specifically, in the present embodiment, the holder HD is designed to realize deformation by folding. The holder HD selectively realizes an unfolded state in which the rotary table unit RT is unfolded with respect to the measuring head MH and a stored state in which it is stored by its deformation. Further, in the present embodiment, the holder HD is detachably attached to the measurement head MH.

  1 is a perspective view of the holder HD in the unfolded state, and FIG. 2A is a side view of the measurement head MH and a part of the holder HD in the unfolded state. The measuring head MD is shown in a rear view. FIG. 3 shows a rear view of the measuring head MH in the detached state in which the measuring head MH is detached from the holder HD. FIG. 4 shows the rotary table unit RT in a front sectional view.

  FIG. 5A shows a perspective view of the holder HD in the retracted state (folded state) together with the measuring head MH and the rotary table unit RT. FIG. 5B shows a perspective view of the holder HD in the retracted state being housed in the outer box OC as a carrying case together with the measuring head MH and the rotary table unit RT. The three-dimensional input device 10 can be carried in the accommodated state shown in FIG.

  As shown in FIG. 1, the measurement head MH includes a projection unit 12 for projecting pattern light onto the subject S, an imaging unit 14 for imaging the subject S, and three-dimensional information and surface color information of the subject S. A processing unit 16 that performs signal processing is provided to perform acquisition. The projection unit 12, the imaging unit 14, and the processing unit 16 are attached to the casing 20 of the measurement head MH that has a substantially rectangular parallelepiped shape.

  As shown in FIG. 1, the lens barrel 24 and the flash 26 are mounted on the casing 20 in such a posture that each part is exposed in front of the casing 20. Further, an imaging optical system 30 that is a part of the imaging unit 14 is attached to the casing 20 in a posture in which a part of the lens is exposed in the front of the casing 20. The imaging optical system 30 receives image light representing the subject S at the exposed portion thereof.

  As shown in FIG. 1, the lens barrel 24 protrudes from the front surface of the casing 20, and houses therein a projection optical system 32 that is a part of the projection unit 12 as shown in FIG. 6. The projection optical system 32 is configured to include a plurality of projection lenses 34 and a diaphragm 36.

  The lens barrel 24 holds the projection optical system 32 in a state where the projection optical system 32 can be entirely moved in the lens barrel holder 250 for focus adjustment. Further, the lens barrel 24 protects the projection optical system 32 from damage. is doing. From the exposed end surface of the lens barrel 24, the outermost one of the plurality of projection lenses 34 is exposed. The projection optical system 32 projects pattern light toward the subject S with the outermost projection lens 34 as the final emission surface.

  The flash 26 is a light source that emits light to supplement insufficient illuminance in dark place photography. For example, the flash 26 includes a discharge tube filled with xenon gas. Therefore, the flash 26 can be repeatedly used by discharging a charger (not shown) built in the casing 20.

  As shown in FIG. 1, a release button 40 is attached to the casing 20 on the upper surface thereof. As shown in FIG. 2 (b), the casing 20 further has a mode changeover switch 42 (consisting of three buttons in the example shown in FIG. 2 (b)) and four contact points on the back surface thereof. A cursor key (direction key) 43 and a monitor LCD 44 are attached. Each of the mode changeover switch 42 and the four-contact cursor key 43 constitutes an example of a function button.

  The release button 40 is operated by the user to operate the three-dimensional input device 10. The release button 40 is composed of a two-stage push button type switch that can issue different commands depending on whether the user's operation state (pressed state) is “half-pressed state” or “full-pressed state”. ing. The operation state of the release button 40 is monitored by the processing unit 16. When the “half-pressed state” is detected by the processing unit 16, well-known auto focus (AF) and automatic exposure (AF) functions are activated, and the focus, aperture, and shutter speed are automatically adjusted. On the other hand, if the “fully pressed state” is detected by the processing unit 16, imaging or the like is performed.

  The mode changeover switch 42 indicates the operation mode of the three-dimensional input device 10 by a later-described SLOW mode (indicated by “S” in FIG. 2B) and FAST mode (indicated by “F” in FIG. 2B). ) And an off mode (indicated by “OFF” in FIG. 2B) is operated by the user to set as one of a plurality of types of modes. The operation state of the mode changeover switch 42 is monitored by the processing unit 16. When the operation state of the mode changeover switch 42 is detected by the processing unit 16, the process in the mode corresponding to the detected operation state is 3. This is performed in the dimension input device 10.

  The monitor LCD 44 is configured using a liquid crystal display, and receives an image signal from the processing unit 16 and displays an image to the user. The monitor LCD 44 displays, for example, an image (stereoscopic image) representing the detection result of the three-dimensional shape of the subject S.

  As shown in FIG. 2, the casing 20 is further equipped with an antenna 50 as an RF (wireless) interface. The antenna 50 is connected to the RF driver 52 as shown in FIG. The antenna 50 wirelessly transmits and receives data representing the subject S as a stereoscopic image and other information to an external interface (not shown) via the RF driver 52.

  Here, the configuration of the holder HD will be described in detail with reference to FIG.

  The holder HD is configured by a plurality of plate-like members arranged in a line and connected to each other so as to be foldable. That is, the holder HD is configured by hinge-joining a plurality of plate-like members in a row.

  Specifically, the holder HD includes a plate-like head base 130 to which the measurement head MH is detachably attached, a plate-like table base 132 attached to the rotary table unit RT, and the head base 130 and the table base. The first relay base 134 and the second relay base 136, both of which are located between the first relay base 134 and the second relay base 136, are provided as a plurality of plate-like members connected to each other so as to be foldable.

  As shown in FIG. 1, the measuring head MH generally has a rectangular parallelepiped that is long in the vertical direction. When the upper surface and the lower surface of the measuring head MH are compared with each other in terms of dimensions, the lateral dimensions are almost equal. Although common, the vertical dimension is longer on the front and back surfaces than on the top and bottom surfaces. On the other hand, as will be described in detail later with reference to FIG. 5, in the retracted state of the holder HD, the head base 130 is mounted on the lower surface of the measurement head MH, and the first relay base 134 covers the front of the measurement head MH. The second relay base 136 covers the upper surface of the measurement head MH, and the table base 132 covers the rear surface of the measurement head MH. Therefore, the first relay base 134 and the table base 132 have a longer vertical dimension than the head base 130 and the second relay base 136.

  Of the two surfaces of the first relay base 134, instructions relating to the operation method of the three-dimensional input device 10 are attached to the surface facing the front surface of the measuring head MH in the retracted state, that is, the surface exposed in the expanded state. The ink traction display surface displayed by is assigned.

  As shown in FIG. 1, the head base 130 and the first relay base 134 are connected to each other by a joint 140 having an axis common to them. The first relay base 134 and the second relay base 136 are connected to each other by a joint 142 having an axis common to them. The second relay base 136 and the table base 132 are rotatably connected to each other by a joint 144 having an axis common to them.

  Here, referring to FIG. 1 and FIG. 3, a structure in which the measuring head MH is detachably mounted on the head base 130 will be described.

  The measuring head MH is attached to the head base 130 by mechanically engaging the upper surface of the head base 130. In order to realize the engagement, as shown in FIG. 3, the measurement head MH is formed with a head settling portion 150 at a lower end portion that is an engagement portion with the head base 130. The head seating portion 150 includes first and second engaging claws 152 and 154 as a pair of male engaging portions.

  As shown in FIG. 3, the first and second engaging claws 152 and 154 are respectively arranged at a pair of positions separated from each other in the lateral direction of the measuring head MH, that is, in the width direction of the head base 130. Are formed so as to extend in the longitudinal direction of the head base 130, that is, in the length direction of the head base 130. In the present embodiment, in order to fix the measurement head MH to the head base 130 as firmly as possible, the distance between the first and second engaging claws 152 and 154 is as long as possible. The positions of the first and second engaging claws 152 and 154 are selected.

  As shown in FIG. 3, the head base 130 is formed with a head receiving portion 160 that fixedly receives the head seating portion 150 by mechanical engagement with the head seating portion 150. The head receiving portion 160 includes a head base retracting space 162 into which the head retracting portion 150 is fitted, and further, first and second engaging claws 152 and 154 of the measuring head MH are respectively engaged. The second claw abutting portions 164 and 166 are provided as a pair of female side engaging portions.

  The first claw abutment portion 164 engages with the corresponding first engagement claw 152 to prevent the measurement head MH from being detached from the head base 130 in a direction perpendicular to the upper surface thereof. It is a butting part. On the other hand, the second claw abutting portion 166 (a) engages with the corresponding second engagement claw 154 so that the measuring head MH is detached from the head base 130 in a direction perpendicular to the upper surface thereof. And (b) a release position that allows the measurement head MH to disengage from the head base 130 in a direction perpendicular to the upper surface thereof, by disengaging from the corresponding second engagement pawl 154. And a movable claw abutting portion that is displaceable.

  An example of the second claw abutting portion 166 is a pivot axis extending in the length direction of the head base 130 (a direction perpendicular to a rotation plane in which the measurement head MH rotates when the measurement head MH is attached to or detached from the head base 130). A pivot member 170 pivotable about is included.

  The pivot member 170 is pivotally mounted to the head base 130 by a joint 172 having an axis coaxial with the pivot axis. The pivot member 170 includes a movable engagement portion 174 that mechanically engages with the corresponding second engagement claw 154 and prevents the second engagement claw 154 from being detached. The pivot member 170 is always biased by a spring 176 as an elastic member so that the movable engagement portion 174 engages the second engagement claw 154 from above. In the present embodiment, the pivot member 170 further includes an operation portion 178 that is pressed by the user to release the engagement by the movable engagement portion 174, and a movable engagement by expanding the elastic force of the spring 176. And leverage 180 to be transmitted to the section 174.

  Next, with reference to FIG. 3, the attaching / detaching operation of the measuring head MH with respect to the head base 130 will be described.

  In order to mount the measurement head MH on the head base 130, the user moves the movable engagement portion 174 from the engagement position to the release position against the elastic force of the spring 176 by operating the operation portion 178 of the pivot member 170. Press in the release direction. In the pressed state, the user makes the first engaging claw 152 enter and contact the first claw abutting portion 164 while the head settling portion 150 enters the head base settling space 162. The measurement head MH is lowered while rotating in a generally vertical plane. Thereafter, the user releases the pressing of the operation portion 178, whereby the pivot member 170 is rotated from the release position to the engagement position by the elastic recovery force of the spring 176, and the movable engagement portion 174 is moved to the second engagement position. It engages with the claw 154 from above and strikes. As a result, the first engagement claw 152 is prevented from separating upward from the first claw abutting portion 164, and the second engagement claw 154 is moved upward from the second claw abutting portion 166. The withdrawal is also prevented. Thereby, the measurement head MH is prevented from being detached from the head base 130.

  On the other hand, in order to detach the measuring head MH from the head base 130, the user moves the operation portion 178 of the pivot member 170 in the release direction against the elastic force of the spring 176 in the same manner as described above. Press. In the pressed state, the user moves the measurement head MH so that the first engaging claw 152 is retracted from the first claw abutting portion 164 while the head retracting portion 150 is retracted from the head base retracting space 162. In general, the measurement head MH is lifted while rotating in the vertical plane, and the measurement head MH is detached from the head base 130. Thereafter, the user releases the pressing of the operation unit 178, whereby the pivot member 170 is restored from the released position to the engaged position by the elastic recovery force of the spring 176.

  Next, the rotary table unit RT will be described in detail with reference to FIG.

  The turntable unit RT includes a turntable 184 on which the subject S is to be placed, and a support frame 186 that rotatably supports the turntable 184. The support frame 186 has a thin hollow box shape so as to include an upper plate portion 188 and a lower plate portion 189, and the upper surface of the rotary table 184 is exposed from the opening of the upper plate portion 188. In the present embodiment, the lower plate portion 189 of the support frame 186 also functions as the table base 132.

  The upper surface of the turntable 184 is a placement surface 190 on which the subject S to be imaged is placed. On the other hand, a rotary shaft 191 extends coaxially from the lower surface of the rotary table 184, and the rotary shaft 191 is rotatably supported by a support frame 186 via a bearing 192. The bearing 192 is held by a bearing holder 193 formed on the support frame 186.

  A table motor 194 that rotates the rotary table 184 is attached to the support frame 186. A motor box 195 that accommodates the table motor 194 is formed on the support frame 186.

  The motor box 195 is formed on the upper surface of the upper plate portion 188 of the support frame 186 so as to protrude upward from the upper surface. The upper surface of the motor box 195 is set higher than the upper surface of the rotary table 184. As a result, when the subject S is rotated together with the turntable 184, the subject S protrudes outward from the projection space on which the turntable 184 is coaxially projected, and is above the upper surface of the turntable 184 in the motor box 195. The portion located at the position abuts on the subject S and changes the direction of the subject S.

  Therefore, the motor box 195 not only functions as a housing portion for the table motor 194 but also functions as a position restricting portion 196 that restricts the position where the subject S is positioned on the rotary table 184.

  In order to transmit the rotation of the table motor 194 to the rotary table 184, the motor gear 197 is coaxially fixed to the rotary shaft of the table motor 194, and the table gear 198 that meshes with the motor gear 197 is fixed coaxially to the rotary table 184. Since the motor gear 197 has a smaller diameter than the table gear 198, the rotational speed of the table gear 198 is reduced and transmitted to the rotary table 184.

  Incidentally, the table motor 194 can be attached to the support frame 186 so as not to protrude from the upper surface of the upper plate portion 188 of the support frame 186. On the other hand, even if the table motor 194 is disposed in the upper space of the upper surface of the upper plate portion 188 excluding the portion where the rotary table 184 is exposed, there is no problem, but it is advantageous for thinning the support frame 186. .

  Therefore, according to the present embodiment, by arranging the table motor 194 so as to protrude from the upper surface of the upper plate portion 188, in addition to the function as the position restricting portion 196 described above, the support frame 186 can be easily thinned. The function of making is also realized.

  FIG. 5A shows the measurement head MH, the holder HD, and the rotary table in a state in which the holder HD is folded so as to cover the measurement head MH on four surfaces, ie, the front and rear surfaces and the upper and lower surfaces. The unit RT is shown in perspective view. In the retracted state, the holder HD has a generally rectangular parallelepiped shape.

  FIG. 5B is a perspective view showing the state in which the measuring head MH, the holder HD, and the rotary table unit RT are inserted and accommodated in the outer box OC when the holder HD is stored. In the present embodiment, the measurement head MH, the holder HD, and the rotary table unit RT are inserted into the outer box OC with the measurement head MH lying on its side.

  The three-dimensional input device 10 operates according to a mode selected by the user from among a plurality of types of modes. These modes include a SLOW mode, a FAST mode, and an off mode. The SLOW mode is a low-speed imaging mode in which the subject S is imaged with high accuracy at low speed, and is an imaging accuracy priority mode. The FAST mode is a high-speed imaging mode that images the subject S at high speed with low accuracy, and is an imaging time priority mode. The off mode is a mode in which the operation of the three-dimensional input device 10 is stopped.

  The imaging unit 14 images the subject S, and from the imaging result, a pixel thinned image formed by thinning out any of a plurality of pixels constituting the entire image representing the subject S, and all the pixels are thinned out. It is configured such that it is possible to selectively extract the non-pixel thinned image formed without any delay. Furthermore, the imaging unit 14 is configured to take out the pixel-thinned image from the imaging result after taking the subject S in a time shorter than the time required to take out the pixel non-thinned image.

  In the field of imaging using a CCD, an addition method and a selection method are already known in order to extract a pixel-thinned image from the imaging result of the subject S.

  According to the addition method, the illuminance detection values of a plurality of target pixels belonging to each of a plurality of pixel groups in which a plurality of pixels constituting the entire image representing the subject S are grouped are added for each pixel group. The detected illuminance values of a plurality of target pixels belonging to each pixel group are evenly distributed using the added illuminance.

  On the other hand, according to the selection method, a representative pixel representing the target pixel is selected for each pixel group from a plurality of target pixels belonging to each of the plurality of pixel groups, and the selected representative pixel The detected illuminance values of a plurality of target pixels belonging to each pixel group are evenly distributed using the detected illuminance values.

  In the present embodiment, the imaging unit 14 is designed to extract a pixel-thinned image from the imaging result of the subject S in accordance with a preselected one of the addition method and the selection method.

  The thinned-out image processing mode for extracting a pixel-thinned image from the imaging result of the subject S is suitable for a low-speed imaging mode in which the subject S is imaged with high accuracy at low speed. On the other hand, the non-decimated image processing mode for extracting the pixel non-decimated image from the imaging result of the subject S is suitable for the high-speed imaging mode for imaging the subject S at high speed with low accuracy.

  Therefore, in this embodiment, when the FAST mode is selected by the user, the thinned image processing mode is set, while when the SLOW mode is selected by the user, the non-thinned image processing mode is set.

  The projection unit 12 is a unit for projecting pattern light onto the subject S. As shown in FIGS. 6 and 7, the projection unit 12 includes a substrate 60 and an LED 62 (for example, a single LED element bonded to a metal substrate that outputs light from a relatively wide emission surface. (Radiation type LED), illumination diaphragm 63, light source lens 64, projection mechanism 66 for sending the plate-shaped light modulator 200 using a feed motor (for example, pulse motor) 65 as a drive source, and the projection optical system 32 , Provided in series along the projection direction.

  FIG. 7 shows in detail the substrate 60, the LED 62, the illumination stop 63, the light source lens 64, the light modulator 200, and the projection optical system 32 in the hardware configuration of the projection unit 12. Yes. FIG. 8 shows in detail the software configuration and electrical connection relationship of the entire three-dimensional input apparatus 10 including the projection unit 12. 9 to 11 show the projection mechanism 66 in detail in the hardware configuration of the projection unit 12, and FIGS. 12 to 14 show the light modulator 200 in an enlarged manner.

  The imaging unit 14 is a unit for imaging the subject S. As shown in FIG. 6, the imaging unit 14 includes an imaging optical system 30 and a CCD (Charge Coupled Device) 70 in series along the incident direction of image light. The CCD 70 is configured to perform progressive scanning by an interline transfer method.

  The imaging optical system 30 is configured by using a plurality of lenses as shown in FIG. The imaging optical system 30 automatically adjusts the focal length, aperture, and shutter time by a well-known autofocus function and automatic exposure function, and forms an image of external light on the CCD 70.

  The CCD 70 is configured by arranging photoelectric conversion elements such as photodiode elements in a matrix. The CCD 70 generates a signal corresponding to the color and intensity of light of an image formed on the surface of the CCD 70 via the imaging optical system 30 for each pixel. The generated signal is converted into digital data and output to the processing unit 16.

  As shown in the block diagram of FIG. 8, the processing unit 16 is electrically connected to the flash 26, the release button 40, and the mode switch 42. The processing unit 16 is further electrically connected to the monitor LCD 44 via the monitor LCD driver 72, to the antenna 50 via the RF driver 52, and to the battery 74 via the power interface 76. The flash 26 and the like are controlled by the processing unit 16.

  The processing unit 16 is further electrically connected to the external memory 78 and the cache memory 80, respectively. The processing unit 16 is further electrically connected to the LED 62 via the light source driver 84, to the feed motor 65 of the projection mechanism 66 via the feed motor driver 86, and to the CCD 70 via the CCD interface 88. Yes. The LEDs 62 and the like are controlled by the processing unit 16.

  The external memory 78 is a detachable flash ROM, and can store a captured image captured in the stereoscopic image mode and three-dimensional information (including the above-described three-dimensional color shape data and related information). is there. In order to configure the external memory 78, for example, an SD card (registered trademark), a compact flash (registered trademark) card, or the like can be used.

  The cache memory 80 is a storage device that can read and write data at high speed. The cache memory 80 is used, for example, to enable a captured image captured in the digital camera mode to be transferred to the cache memory 80 at a high speed and stored in the external memory 78 after being processed by the processing unit 16. The In order to configure the cache memory 80, for example, SDRAM, DDRRAM, or the like can be used.

  The power interface 76, the light source driver 84, the feed motor driver 86, and the CCD interface 88 are constituted by various ICs (Integrated Circuits) that control the battery 74, the LED 62, the feed motor 65 of the projection mechanism 66, and the CCD 70, respectively.

  As shown in FIG. 2A, the measurement head MH is provided with an AC adapter terminal 90, a USB terminal 91, and a table motor terminal 92. As shown in FIG. 6, the AC adapter terminal 90 is electrically connected to the battery 74, so that the three-dimensional input device 10 can use an external AC power source as a power source. Yes. The USB terminal 91 is connected to the processing unit 16 via the USB driver 93 as shown in FIG. As shown in FIG. 6, the table motor terminal 92 is connected to the processing unit 16 via a table motor driver 94.

  As shown in FIG. 1, a harness 95 as an electric line extends from the table motor 194 of the rotary table unit RT. The harness 95 passes through the second relay base 136, the first relay base 134, and the head base 130 in that order, and is connected to the tip of the harness 95 as shown in FIG. The plug 96 is connected to the table motor terminal 92. The harness 95 functions as an electric line that supplies a control signal and power from the measurement head MH to the table motor 194. Therefore, as shown in FIG. 8, the table motor 194 is connected to the processing unit 16 via the table motor driver 94.

  As shown in FIG. 1, the position of the harness 95 that passes through the second relay base 136 is defined by a harness stop 97, and the position that passes through the first relay base 134 is defined by two harness stops 98 and 98. Has been.

  In addition, it is possible to adopt other modes as wiring for connecting the measuring head MH and the table motor 194 to each other. For example, a harness 95 is embedded in each base 130, 132, 134, 136. It is possible to adopt the embodiment.

  As described above, the projection unit 12 includes the substrate 60, the LED 62, the illumination diaphragm 63, the light source lens 64, the projection mechanism 66, and the projection optical system 32 as shown in FIG. Are provided in series. The substrate 60, the LEDs 62, the illumination diaphragm 63, and the light source lens 64 constitute a light source unit 68.

  The substrate 60 is electrically connected to the mounted LED 62 by mounting the LED 62 on the substrate 60. The substrate 60 is manufactured using, for example, an aluminum substrate coated with an insulating synthetic resin and then patterned by electroless plating, or a single-layer or multi-layer substrate having a glass epoxy base as a core. can do. The LED 62 is a light source that emits radial amber light toward the projection mechanism 66 in a wide area, and is housed in an LED casing 100 whose front side is made of transparent resin.

  As shown in FIG. 7, the illumination stop 63 is provided to guide only a necessary portion to the light source lens 64 by shielding an unnecessary portion of the light output from the LED 62. The light source lens 64 is a lens that collects light emitted radially from the LED 62, and the material thereof is an optical plastic represented by acrylic.

  In the present embodiment, as shown in FIG. 7, the radial light emitted from the LED 62 is efficiently collected by the light source lens 64, and the emitted light from the LED 62 is incident on the incident surface 106 of the projection mechanism 66 on a predetermined surface. It has an incident angle characteristic having a cone apex angle, and is incident so that the axis of the cone is substantially a right angle, and is emitted from the exit surface 108 of the projection mechanism 66 as radiation having high directivity. In this sense, the light source lens 64 functions as a collimating lens. In FIG. 7, the directivity characteristics of two attention points A and B separated from each other on the emission surface 108 are represented by an illuminance distribution graph (θ: half-value spread half angle).

  The projection optical system 32 includes a plurality of projection lenses 34 for projecting light that has passed through the projection mechanism 66 toward the subject S. These projection lenses 34 have a telecentric lens configuration composed of a combination of a glass lens and an optical plastic lens.

  Here, the term “telecentric” is described by taking the incident-side telecentric characteristics described here as an example. The principal ray passing through the projection optical system 32 is parallel to the optical axis in the incident-side space, and the entrance pupil This means that the position of is infinite.

  Since the projection optical system 32 has telecentric characteristics as described above and has an incident aperture angle θNA of about 0.1, only light within ± 5 ° perpendicular to the incident aperture angle θNA is inside the projection optical system 32. The optical path of the projection optical system 32 is restricted so that it can pass through the aperture 36.

  Therefore, in the present embodiment, due to the telecentricity of the projection optical system 32, the projection optical system 32 can project only light that passes through the projection mechanism 66 within ± 5 ° perpendicular to the object. The image quality can be easily improved.

  To explain the reason, only a specific angle component emitted from the projection target (in this embodiment, the light modulator 200 is applicable, but generally a slide or transmissive liquid crystal) is imaged. This is because it is advantageous in terms of specifications of most optical characteristics such as resolution characteristics, spectrum characteristics, illuminance distribution characteristics, and contrast characteristics.

  Here, the projection mechanism 66 in the hardware configuration of the projection unit 12 will be described in detail with reference to FIGS. 9 to 11.

  This projection mechanism 66 selectively converts the incident light from the light source unit 68 into a plurality of types of pattern light, thereby switching the types of pattern light projected onto the subject S, and converting these types of pattern light into It is provided for sequentially projecting onto the subject S. FIG. 9 shows the projection mechanism 66 in a front view (a view of the projection mechanism 66 viewed from the projection optical system 32 side in the optical axis direction of the projection optical system 32).

  As shown in FIG. 9, the projection mechanism 66 selectively converts incident light from the light source unit 68 into a plurality of types of pattern light, thereby switching the type of pattern light projected on the subject S. A light modulator 200 that is formed in a plate shape and extends in the length direction is provided in a posture orthogonal to the optical axis of the projection lens 34.

  The projection mechanism 66 includes a carriage 202 that is reciprocated linearly by a feed motor 65, and the light modulator 200 is mounted on the carriage 202 so as to be rotatable and adjustable in a plane parallel to the surface of the light modulator 200. Has been. The projection mechanism 66 feeds the light modulator 200 in the length direction by the reciprocating rotational movement of the feed motor 65.

  Specifically, as shown in FIG. 9, the projection mechanism 66 includes a housing 204 (also functions as a housing for the measurement head MH). A feed motor 65 is attached to the housing 204. A main guide 210 and a sub guide 212 are arranged between the two support portions 206 and 206 of the housing 204 facing each other so as to extend in parallel to each other with a gap in the radial direction.

  The main guide 210 and the sub guide 212 are fixedly attached to the two support portions 206 and 206 at both ends, respectively. Both the main guide 210 and the sub guide 212 have the same circular cross section and extend straight, the material is, for example, stainless steel, and the outer shape is processed with an accuracy such that the cylindricity is, for example, about 3 μm. ing. Both the main guide 210 and the sub guide 212 function as a feed guide that linearly extends in a direction intersecting with incident light from an LED 62 (not shown) located behind the light modulator 200.

  By the main guide 210 and the sub guide 212, the carriage 202 is guided so as to linearly reciprocate. In order to realize the guidance, as shown in FIG. 9, the carriage 202 includes a fitting portion 214 and a slider 216 which are separated in a direction perpendicular to the moving direction thereof.

  The carriage 202 is supported by the main guide 210 at the fitting portion 214 so as to be slidable around the axis of the main guide 210. Specifically, for example, a sliding bearing (made of an oil-immersed porous metal body that enables sliding using the liquid interface with the main guide 210) 218 is fixed to the fitting portion 214, and the sliding bearing 218 is fixed to the sliding bearing 218. The main guide 210 is slidably fitted using an intervening lubricant (such as grease).

  The main guide 210 and the slide bearing 218 are manufactured while controlling the component shape accuracy of the main guide 210 and the slide bearing 218 so that the fitting clearance accuracy between them is 12 μm at the maximum. The By adopting such a configuration, it is possible to suppress the positional deviation of the light modulator 200 due to the fitting clearance between the main guide 210 and the slide bearing 218 within 12 μm. As a result, it is possible to accurately project the pattern light onto the subject S in a state where the deviation of the projection position is small.

  Assuming that the magnification of the projection optical system 32 is 40, the positional deviation of the pattern light on the subject S does not exceed 0.48 mm unless the positional deviation of the light modulator 200 exceeds 12 μm. As described above, it is easy to improve the three-dimensional input accuracy of the subject S by an appropriate combination of the highly accurate linear motion mechanism with less play and the moving light modulator 200.

  On the other hand, the carriage 202 is slid along the outer peripheral surface of the slider 216 in the axial direction of the sub guide 212 while being in contact with the outer peripheral surface of the sub guide 212. The slider 216 is slidably pressed against the outer peripheral surface of the sub guide 212 via an intervening lubricant (such as grease). The pressing is performed using a tension applied in advance to a feed belt 220 described later.

  In this embodiment, the carriage 202 is fitted to the main guide 210 so as to be slidable and rotatable in both forward and reverse directions around the main guide 210, but the forward and reverse directions of the carriage 202 are brought about by contact between the slider 216 and the sub guide 212. Both directions of slide rotation are mechanically blocked in one direction. On the other hand, the light modulator 200 includes a plurality of planar optical elements 260 (see FIG. 12) corresponding to a plurality of types of pattern light projections to be selectively realized, which will be described in detail later. A plurality of planar optical elements 260 corresponding to the plurality of types of pattern light projections are arranged in series in the same plane. In the present embodiment, the carriage 202 is arranged such that the traveling direction of incident light from the light source unit 68 is substantially perpendicularly incident on the plurality of planar optical elements 260 in a state where the carriage 202 is in contact with the sub guide 212. Arranged on the projection mechanism 66.

  In addition, in this embodiment, although the main guide 210 and the sub guide 212 are both configured as rods having a cylindrical outer peripheral surface, it is not essential to configure at least the sub guide 212 as such. . For example, the sub-guide 212 can be configured to have a flat portion extending parallel to the axis thereof, and the slider 216 can be received in a plane on the flat portion.

  As shown in FIG. 9, the projection mechanism 66 further includes a drive mechanism 222 that drives the carriage 202 along the main guide 210 and the sub guide 212. The drive mechanism 222 includes a feed motor 65 and a feed belt 220 (an example of a transmission medium that forms a closed curve).

  As shown in FIG. 9, the feed belt 220 is disposed in a long space between the main guide 210 and the sub guide 212. In the space, a drive gear (an example of a drive rotator) 224 and a driven gear (an example of a driven rotator) 226 are arranged apart from each other in the moving direction of the carriage 202. A feed belt 220 is wound around the drive gear 224 and the driven gear 226. A plurality of teeth are formed on the inner peripheral surface of the feed belt 220, and these teeth include a plurality of teeth formed on the outer peripheral surface of the drive gear 224 and a plurality of teeth formed on the outer peripheral surface of the driven gear 226. Is engaged.

  As a result of the feed belt 220 being wound around the drive gear 224 and the driven gear 226, two straight portions are formed on the feed belt 220, and the carriage 202 is fixed to one of the two straight portions. Yes. Specifically, one end of the feed belt 220 is fixed to one of the two connecting portions 230 and 230 separated in the moving direction of the carriage 202, and the other end is the other of the two connecting portions 230 and 230. It is fixed to.

  The drive gear 224 is driven by the feed motor 65, whereby the reciprocating linear motion of the feed belt 220 is realized. On the other hand, the driven gear 226 is rotatably supported by a support shaft 234 fixed to the housing 204.

  In FIG. 10, the light modulator 200 and the carriage 202 of the projection mechanism 66 together with the light source unit 68 and the projection optical system 32 are plan views, that is, perpendicular to the optical axis common to the light source unit 68 and the projection optical system 32. It is shown in the figure seen in various directions.

  As shown in FIG. 10, the light source unit 68 is configured by a collimating lens 240 held by a collimating lens barrel 242. The collimating lens 240 is configured to include the illumination stop 63 and the light source lens 64 shown in FIG.

  As shown in FIG. 10, the projection optical system 32 is configured by screwing the lens barrel 24 into the lens barrel holder 250. As shown in FIG. 6, a plurality of projection lenses 34 and a diaphragm 36 are arranged in the lens barrel 24. The lens barrel holder 250 is attached to the housing 204 in a state where the lens barrel holder 250 is fitted and positioned in a recess 252 formed in the housing 204.

  As shown in FIGS. 9 and 10, the light modulator 200 has a plurality of planar optical elements 260 formed on a substrate 264 in a line in a plane.

  Here, the manufacturing process of the light modulator 200 will be described. A mold (not shown) in which the inverted shape of the plurality of planar optical elements 260 is formed with high accuracy is attached to the surface of the substrate 264 (the emission surface 108). The imprint molding technique for transferring the shape of the mold onto the surface of the substrate 264 with high accuracy is performed. By this transfer, a plurality of planar optical elements 260 are formed on the substrate 264. The shape, optical action, and manufacturing method of these planar optical elements 60 will be described in detail later.

  As shown in FIGS. 9 to 11, the projection mechanism 66 further includes a plane parallel to the light modulator 200 (moving plane that is a plane on which the light modulator 200 is moved) rotation angle (on the light modulator 200. A rotation angle adjusting mechanism 270 for adjusting the inclination in the parallel plane is provided. The rotation angle adjusting mechanism 270 rotates the substrate 264 relative to the carriage 202 within the moving plane, and a support mechanism 272 that supports the substrate 264 on the carriage 202 while being rotatable in the moving plane. And a rotation mechanism 274. In the present embodiment, the substrate 264 of the light modulator 200 functions as a linear movable member that supports the plurality of planar optical elements 260.

  As shown in FIGS. 9 and 10, the support mechanism 272 includes a pair of holders 280 and 280 that hold the substrate 264 at both side positions in the moving direction thereof. In FIG. 11, only the holder 280 located on the right side in FIG. 9 among the pair of holders 280 and 280 is typically shown in an enlarged front view together with its peripheral elements.

  As shown in FIG. 10, each holder 280 holds a corresponding portion of the substrate 264 from both sides in the thickness direction of the substrate 264 so as to sandwich a slight gap. The light modulator 200 is arranged on the back side of the carriage 202 by the pair of holders 280, 280, but light is emitted from the light modulator 200 to the projection optical system 32 through a through hole 284 formed in the carriage 202. After that.

  In each holder 280, the substrate 264 is allowed to relatively move (including relative rotational movement) in a plane parallel to the substrate 264, but a fixing screw 286 as a fixture attached to each holder 280 is provided. When screwed in toward the substrate 264, the substrate 264 is mechanically fixed at that position.

  As shown in FIG. 11, the rotation mechanism 274 is configured mainly with an adjustment piece 290. The adjustment piece 290 is configured to include an adjustment screw 292 and a main body portion 294 to which the adjustment screw 292 is screwed. The adjustment screw 292 is formed as a male screw that is formed on the main body 294 and is screwed into the screw. The adjustment screw 292 has a rotation center line parallel to the moving plane.

  As shown in FIG. 11, the main body portion 294 is fixed to the substrate 264. The adjustment screw 292 protrudes from the main body 294 at the tip thereof, and is engaged with the carriage 202 at the protruding portion. The adjustment screw 292 is rotated by the operator at the head thereof. In accordance with the rotation operation amount, the amount of protrusion of the adjustment screw 292 from the main body 294 changes, and as a result, the distance between the main body 294 and the carriage 202 changes in a plane parallel to the light modulator 200.

  Therefore, according to the adjustment piece 290, it is possible to finely adjust the rotation angle of the light modulator 200, that is, the in-plane inclination, according to the operation amount by the operator. Specifically, the fine adjustment amount is set within a tolerance range with a parallelism of about 12 μm with respect to the movement straight line of the linear motion device (carriage 202). As a result, it becomes easy to improve the three-dimensional input accuracy of the subject S.

  In addition, although not shown, the fixing screw 286 and the adjusting screw 292 are prevented from loosening by applying a screw fixing adhesive between the fixing screw 286 and the adjusting screw 292.

  As shown in FIG. 10, the housing 204 protrudes locally toward the carriage 202 behind the projection optical system 32. Specifically, the housing 204 extends behind the projection optical system 32 and extends to a position near the exit surface 108 of the light modulator 200 and has a light shielding property and has a thin pyramid shape. 296.

  The guide portion 296 has a window portion 297 at the tip thereof, and the window portion 297 optically communicates only with a selected one of the plurality of planar optical elements 260. The guide portion 296 and the window portion 297 are formed integrally with the housing 204, and the material is typically glass fiber reinforced polycarbonate with high molding accuracy.

  Only the pattern light emitted from the selected planar optical element 260 enters the space in the guiding portion 296 through the window portion 297 having light transmittance. The entered pattern light then enters the projection optical system 32 without leaking outside the guiding portion 296. The guiding unit 296 prevents disturbance light from entering from the outside and entering the projection optical system 32.

  As shown in FIG. 9, a positioning post 298 is fixed to the housing 204, and a photo interrupter 300 as a position sensor is attached to the positioning post 298. The photo interrupter 300 optically detects a positioning claw (detected element) 302 that moves integrally with the carriage 202, and thereby detects that the carriage 202 is located at a specific position.

  As shown in FIG. 8, the photo interrupter 300 is electrically connected to the processing unit 16. The PI signal output from the photo interrupter 300 to the processing unit 16 is at a low level (effective) where light is incident on the photo interrupter 300 if there is no positioning claw 302, but if the positioning claw 302 is detected, the light is blocked. Thus, it is designed to change to a high level that does not enter the photo interrupter 300.

  Here, the light modulator 200 will be described in detail with reference to FIGS.

  In FIG. 12, the light modulator 200 is enlarged and shown in a front view. In this light modulator 200, a plurality of planar optical elements 260 respectively corresponding to the plurality of types of pattern light are formed in a line and in a plane in the length direction of the light modulator 200. These planar optical elements 260 are selectively positioned to face the window 297 shown in FIG.

  In the present embodiment, eight types of pattern light are sequentially projected onto the subject S in order to image the subject S. These eight types of pattern light are eight types of pattern light that are projected onto the subject S when the subject S is imaged in order to measure the three-dimensional shape of the subject S by a spatial encoding method described later. In order to perform such projection, as shown in FIG. 12, the light modulator 200 includes eight planar optical elements 260 respectively corresponding to the eight types of pattern light. In FIG. 12, the pattern numbers PN0 to PN7 of the eight planar optical elements 260 are indicated as codes 0 to 7, respectively.

  The light modulator 200 is a plate-shaped molded product using a transparent material that can be easily molded. Such transparent materials include, for example, PMMA as the most commonly used acrylic optical plastic, an optical plastic called amorphous polyolefin, which has suppressed expansion due to moisture absorption, and a low melting point suitable for molding. There is a mold glass material. The light modulator 200 is manufactured by the same process as a normal lens molding process (for example, an optical plastic lens molding process). The process is performed using a mold, and a reverse shape of the target surface shape of the light modulator 200 (eight planar optical elements 260) is formed on the mold by a precision processing technique.

  When a mass-production molding process such as injection molding or cast molding is applied to the material selected as described above using the mold thus processed, the surface of the substrate 264 made of the material is applied to the surface. A minute uneven pattern is transferred. In general, the pattern transfer accuracy is nanometer accuracy, and paying attention to this, the transfer technology is referred to as nanoimprint technology.

  Therefore, if the light modulator 200 is manufactured by a process capable of high-accuracy transfer in this way, the accuracy of the surface shape of the light modulator 200 is improved, and consequently, the three-dimensional input accuracy of the three-dimensional input device 10 is also improved. . Further, since this process is suitable for mass production of the light modulator 200, the shape accuracy of the light modulator 200 can be increased to the limit, and the production cost of the light modulator 200 can be reduced to the limit. As such, it has a remarkable effect.

  Next, the shape and optical action of the light modulator 200 will be described with a focus on one planar optical element 260.

  First, as schematically described, in the light modulator 200, the light emitted from the light source unit 68 is incident as incident light, and the incident light is periodically and angularly modulated with respect to the space to be emitted. To be emitted. The light modulator 200 extends in a direction crossing the incident light. When the incident light is incident, the light modulator 200 performs optical modulation, that is, periodic angle modulation depending on the surface shape of the light modulator 200. Do. In the present embodiment, “modulation” means a deflection action.

  On the other hand, as shown in FIG. 7, the lens barrel 24 (including the projection lens 34 and the diaphragm 36) of the projection optical system 32 is predetermined among a plurality of angle components of the light emitted from the light modulator 200. An incident aperture, that is, one having a radiation angle characteristic that fits within the incident aperture angle θNA is selectively passed.

  Each type of pattern light is generated so that a bright part and a dark part are aligned as a projection result. In order to realize such an arrangement, the light modulator 200 includes two portions having different surface shapes, that is, in this embodiment, as shown in a cross-sectional view in FIG. At least one set of the portions 312 is configured to be alternately arranged in the direction along the light modulator 200.

  An angle component having a radiation angle characteristic suitable for the incident aperture is emitted from the light straight traveling section 310 as a passing light component that subsequently passes through the projection optical system 32. Therefore, the bright part in each type of pattern light is generated by the light emitted from the light straight traveling part 310 and passing through the projection optical system 32.

  On the other hand, an angle component having a radiation angle characteristic that does not match the incident aperture is emitted from the light deflecting unit 312 as a non-passing light component that does not pass through the projection optical system 32 thereafter. Therefore, due to the presence of light emitted from the light deflecting unit 312 but not passing through the projection optical system 32, a dark part in each type of pattern light is generated. In this way, a bright portion and a dark portion geometric pattern are formed in the pattern light projected onto the subject S.

  In this embodiment, the light modulator 200 is a transmission type that transmits the incident light in a non-selective manner with respect to space. That is, almost all of the light incident on the light modulator 200 passes through the light modulator 200 regardless of the incident position.

  As described above, the light modulator 200 is configured such that the light rectilinear unit 310 and the light deflecting unit 312 are arranged, and the light rectilinear unit 310 and the light deflecting unit 312 transmit the incident light. It is common in that it is an optical system.

  However, as shown in FIG. 13, the light rectilinear portion 310 has a partial emission surface 320 as a surface orthogonal to the incident light, and the incident light is emitted by the partial emission surface 320 without being modulated. On the other hand, the light deflection unit 312 has a partial emission surface 322 as a group of surfaces inclined with respect to the incident light, and the incident light is modulated by the partial emission surface 322 and emitted.

  In FIG. 13, the incident light to the light straight traveling unit 310 is represented by “Lin-S”, and the light emitted from the light straight traveling unit 310 that is parallel to the incident light Lin-S is “Lout-S”. ". Further, the incident light to the light deflecting unit 312 is expressed as “Lin-D”, and the light emitted from the light deflecting unit 312 and deflected at a certain angle with respect to the incident light Lin-D is “Lout”. -D ".

  In short, the light rectilinear unit 310 does not have an angle modulation (deflection) action for modulating the traveling angle of light, whereas the light deflector 312 includes the light rectilinear unit 310 and the light deflector. This is different from the unit 312 in terms of the presence or absence of an angle modulation action, that is, the emission angle of emitted light.

  The surface shape of the light exit surface 108 of the light modulator 200 will be described in more detail. The partial light exit surface 320 of the light rectilinear portion 310 has a planar shape, whereas the partial light exit surface of the light deflector 312. In this embodiment, 322 has a roof-type prism shape composed of slope groups.

  In FIG. 14, the surface shape of the emission surface 108 of the light modulator 200 is further enlarged and shown in a sectional view. With reference to FIG. 14, the light deflection action as the light modulation action in the light modulator 200 will be described in detail.

  Prior to that, various symbols are defined as follows.

  θ: Tilt angle of roof prism

  θt: light deflection angle (normal line NL of the exit surface 108, that is, the traveling angle of the emitted light with respect to the incident light on the light modulator 200)

  θi: incident half angle

  p: width of the roof-type prism

  d: Depth of roof-type prism

  Note that the depth d is

  d = p · tan θ

In the application example in which the tilt angle θ is 5 degrees and the width p is 0.036 mm, the depth d is 3.15 μm.

  If the refractive index of the light modulator 200 is expressed by “n”, the light deflection angle θt can be obtained using the following equation according to Snell's law.

  n · sin θ = sin (θt−θ)

  In an application example in which the refractive index n is 1.49 and the tilt angle θ is 5 degrees, the light deflection angle θt is obtained as 12.46 degrees. Assuming that the incident half angle θi of the incident light to the light modulator 200 is 5 degrees, the light that has passed through the light deflecting unit 312 is light at an angle of 7.46 degrees or more with respect to the normal line NL of the emission surface 108. The light is emitted from the modulator 200 as outgoing light Lout-D.

  As described above, the lens barrel 24 of the projection optical system 32 has telecentricity with the incident aperture being 0.1, that is, the incident aperture angle θNA being 5 degrees, and ±± It is designed so that only light within 5 degrees can pass through the aperture 36. For this reason, due to the presence of the exit light Lout-D, an image plane (for example, a subject) that is optically conjugate with the pattern surface of the light modulator 200, that is, the exit surface 108 even when entering the projection optical system 32. A region (dark part) where light does not reach is formed on the surface of S).

  Therefore, this is coupled with the fact that all of the light that has passed through the light straight section 310 is projected as a region (bright part) where the light reaches the image plane through the diaphragm 36, and thus the image plane. Allows light to be projected in a desired geometric pattern on top.

  In the example shown in FIG. 14, the light deflection unit 312 is configured by forming a roof prism on the surface of the substrate 264 as a recess with respect to the surface of the substrate 264 and so that the light deflection direction is not uniform. However, the light deflection unit 312 can employ other configurations.

  For example, as shown in FIG. 15A, a roof prism is formed on the surface of the substrate 264 as a recess with respect to the surface of the substrate 264, and the light deflection direction is uniform. The unit 312 can be configured. Further, as shown in FIG. 15B, a roof-type prism is formed on the surface of the substrate 264 as a convex portion with respect to the surface of the substrate 264, and it does not matter whether the light deflection direction is uniform or not. By forming the light deflection unit 312, the light deflection unit 312 can be configured.

  Further, as shown in FIG. 15C, the light deflection unit 312 is configured by giving a mechanical random scattering shape (for example, a texture shape frequently used for surface shape processing of a molded product) to the surface of the substrate 264. It is possible. In the mechanical random scattering shape, for example, a random pattern is formed on the surface of the substrate 264 so that the Rz value of the surface roughness of the substrate 264 is about 1 μm by cutting and chemical processing. In this example, the incident light to the light deflecting unit 312 is subjected to a deflecting action so as to be deflected in a random direction by the random scattering surface of the substrate 264.

  The luminous intensity distribution of the scattered light emitted from the random scattering surface is represented by “I”, and the scattering angle formed by each angle component of the scattered light with respect to the optical axis of the incident light to the light deflecting unit 312 is represented by “θ”. For example, the light intensity distribution I is generally defined as a function of the scattering angle θ. Specifically, the luminous intensity distribution I is

I (θ) = A · cos ⁿ θ [cd]

Can be defined as However, “A” represents a constant and “n” represents a scattering coefficient.

  In an application example in which the scattering coefficient n is 1 (referred to as the Lambertian scattering characteristic) for the random scattering surface of the light deflecting unit 312, when the incident aperture of the projection optical system 32 is 0.1, the light deflecting unit The optical transmittance of the optical system composed of 312 and the optical projection system 32 is about 0.8%. Therefore, in this application example, the desired geometry is ensured while ensuring a sufficiently large contrast between the light emitted from the light straight traveling unit 310 and the light emitted from the light deflecting unit 312 that is 100 times or more. Pattern light can be projected onto the subject S.

  Even if the contrast between the emitted light from the light straight traveling unit 310 and the emitted light from the light deflecting unit 312 is not sufficiently large, the boundary shape of the pattern light projected on the subject S is highly accurate. If the boundary between the bright part and the dark part (also referred to as “stripe boundary”) in the pattern light can be accurately detected, the coordinate value representing the three-dimensional shape of the subject S can be calculated with high accuracy. is there.

  In order to accurately perform the boundary position determination for determining the position of the stripe boundary, it will be described later to determine whether each part is a bright part or a dark part in the captured image captured for each pattern light. It is desirable to adopt a threshold value TH that is appropriately set from the luminance component of the captured image.

  As shown in FIG. 15D, the light deflection unit 312 can be configured by forming a diffraction grating on the surface of the substrate 264. An example of the diffraction grating is a binary grating groove having no slope structure.

  If the grating pitch is expressed as “gp”, the wavelength of the incident light to the light deflecting unit 312 as “λ”, and the diffraction angle of the diffraction grating as “θg”, the grating pitch gp, wavelength λ, and diffraction angle θg In general, the relationship

  gp · sin θg = λ

It is expressed by the following formula. When light is incident on the diffraction grating, a plurality of n-order diffracted lights are emitted from the diffraction grating in a plurality of directions having angles represented by “n · θg”, respectively. The plurality of nth-order diffracted lights correspond to a plurality of lights obtained by deflecting the same incident light on the diffraction grating at a plurality of different angles.

  For example, if the wavelength λ is selected to be 617 nm and the diffraction angle θg is selected to be 12.5 degrees, the grating pitch gp is 2.85 μm. When light is incident on a plurality of binary grating grooves regularly arranged at the grating pitch gp, a plurality of orders of diffracted light are generated. When such a diffraction grating is used, the diffraction angle θg of each nth-order diffracted light is determined only by the grating pitch gp, and the shapes within the individual pitches of the diffraction grating (for example, adjacent convex portions and concave portions). The power distribution ratio when the power of the incident light to the diffraction grating is distributed to each nth-order diffracted light is determined.

  Therefore, the grating is arranged so that the 0th-order diffracted light and the diffracted light whose absolute value of the order is 1 or more (high-order diffracted light and also deflected light with respect to the incident light) are not incident on the incident aperture of the projection optical system 32 as much as possible. The pitch gp is set, and the power distribution ratio of the incident light power to the zero-order diffracted light (straight-forward light) is 50% or less (the ratio of the incident light to the light deflecting unit 312 is 50% of the total incident light power) If it is set to about, the boundary position determination can be performed with sufficient accuracy. With this setting, the desired pattern light is generated with high accuracy as in some examples described above with reference to FIGS. 15A to 15C, and the three-dimensional information of the subject S is thereby generated. Can be input with high accuracy.

  In the example shown in FIG. 15D, of course, it is possible to design the diffraction grating so that the power distribution ratio of the power of the incident light to the 0th-order diffracted light (straight-forward light) is a value near 0%. . In such a design, the contrast between the light emitted from the light straight traveling part 310 and the light emitted from the light deflecting part 312 (diffraction grating) is maximized, and the light between the bright part and the dark part in each pattern light. The contrast at is also maximized.

  As an example of a diffraction grating in which the power distribution ratio of incident light power to zero-order diffracted light (straight-forward light) is near 0%, a diffraction grating using a slope called a blazed surface is already known. This diffraction grating has a shape that approximates the roof-type prism shown in FIG. 15A, and the material is directly processed to have a target shape by cutting with diamond turning, or the target It is possible to process a mold for molding so as to have an inverted shape, and to process the material so as to have a target shape using the mold.

  FIG. 8 is a block diagram showing the electrical configuration of the three-dimensional input device 10. The processing unit 16 is mainly configured by a computer 400, and the computer 400 is configured to include a CPU 402, a ROM 404, a RAM 406, and a bus 408.

  The CPU 402 executes the program stored in the ROM 404 while using the RAM 406, thereby detecting the operation state of the release button 40, capturing the image data from the CCD 70, transferring and storing the captured image data, and mode switching. Various processes such as detection of the operation state of the switch 42 are performed.

  The ROM 404 includes a camera control program 404a, an imaging processing program 404b, a luminance image generation program 404c, a code image generation program 404d, a code boundary extraction program 404e, a lens aberration correction program 404f, and a triangulation calculation program 404g. The table motor control program 404j is stored.

  The camera control program 404a is executed to execute control of the entire three-dimensional input device 10, and the control includes main processing conceptually represented in the flowchart in FIG.

  In order to detect the three-dimensional shape of the subject S, the imaging processing program 404b captures the subject S on which the pattern light is projected to acquire an image with pattern light, and further captures the subject S on which the pattern light is not projected. Then, it is executed to obtain a pattern light no image.

  The luminance image generation program 404c generates a plurality of luminance images respectively corresponding to the plurality of patterned light-present images based on the RGB values of each pixel acquired for the subject S by the execution of the imaging processing program 404b.

  In the present embodiment, a plurality of types of pattern light are sequentially projected in time series on the same subject S, and the subject S is imaged each time each pattern light is projected. The RGB values of each pixel are acquired for each of the plurality of pattern light existence images thus captured, and as a result, the same number of luminance images as the types of pattern light are generated.

  The code image generation program 404d generates a code image in which a spatial code is assigned to each pixel from a binary image generated by threshold processing for each of a plurality of luminance images generated by the execution of the luminance image generation program 404c. Executed to generate.

  Briefly, when the code image generation program 404d is executed, the interval between pattern lines in the luminance image of the subject S on which the narrowest interval between pattern lines is projected among the plurality of types of pattern light. Is acquired as a period, and the distribution of the entire luminance image of the period is acquired as a period distribution.

  When the code image generation program 404d is executed, a variable window whose size changes according to the acquired periodic distribution is set locally in the luminance image for each pattern light, thereby using the variable window. A threshold value is locally calculated and set for the entire luminance image by the filter processing. A binarized image is generated for each pattern light from the relationship between the threshold image representing the threshold distribution set in this way and the luminance image for each pattern light.

  A technique for locally calculating a threshold value for the entire luminance image by filtering using a variable window is disclosed in detail in Japanese Patent Application No. 2004-285736 of the present applicant, and refer to that specification. Is incorporated herein by reference.

  The code boundary extraction program 404e uses the code image generated by the execution of the code image generation program 404d and the luminance image generated by the execution of the luminance image generation program 404c, thereby converting the code boundary coordinates into sub-pixel accuracy. Run to ask for.

  The lens aberration correction program 404f is executed to correct the aberration of the imaging optical system 20 with respect to the code boundary coordinates obtained with subpixel accuracy by the execution of the code boundary extraction program 404e.

  The triangulation calculation program 404g is executed to calculate the three-dimensional coordinates of the real space related to the boundary coordinates from the boundary coordinates of the code subjected to the aberration correction by the execution of the lens aberration correction program 404f.

  The feed motor control program 404h is executed to control the feed motor 65 so as to sequentially project a plurality of types of pattern light onto the subject S. This feed motor control program 404h is conceptually represented in the flowchart of FIG. 19 together with other processes.

  The table motor control program 404j is executed to control the table motor 194 to index and rotate the rotary table 184 together with the subject S. This table motor control program 404j is conceptually represented in the flowchart of FIG. 18 together with other processes.

  In the present embodiment, the above-described series of pattern light projection onto the subject S and imaging of the subject S are performed each time the rotation position of the subject S is determined at equal intervals. Specifically, the rotation position of the subject S is intermittently determined by 90 degrees, and a series of pattern light projections and imaging of the subject S are performed at each index position. As a result, the entire area of the outer surface of the subject S is divided into four partial areas, and a stereoscopic image (three-dimensional shape information) is acquired for each partial area. The three-dimensional images are subjected to processing for removing portions that overlap each other and are combined with each other, whereby one whole image corresponding to the subject S is generated as a stitch image.

  Furthermore, in the present embodiment, the above-described three-dimensional color shape data is generated by mapping the surface color information measured for the same subject S to the generated stitch image. Thus, a series of three-dimensional input processes for the subject S is completed.

  As shown in FIG. 8, the RAM 406 includes a pattern light existence image storage unit 406a, a pattern light no image storage unit 406b, a luminance image storage unit 406c, a code image storage unit 406d, and a code boundary coordinate storage unit 406e. Aberration correction coordinate storage unit 406g, three-dimensional coordinate storage unit 406h, period distribution storage unit 406p, threshold image storage unit 406q, binarized image storage unit 406r, stitch image storage unit 406s, three-dimensional color The shape data storage unit 406t and the working area 410 are allocated as storage areas.

  The pattern light existence image storage unit 406a stores pattern light existence image data representing the pattern light existence image captured by the execution of the imaging processing program 404b. The pattern light no-image storage unit 406b stores pattern light no-image data representing the pattern light no-image captured by the execution of the imaging processing program 404b.

  The luminance image storage unit 406c stores data representing a luminance image generated by executing the luminance image generation program 404c. The code image storage unit 406d stores data representing a code image generated by executing the code image generation program 404d. The code boundary coordinate storage unit 406e stores data representing the boundary coordinates of each code extracted with subpixel accuracy by executing the code boundary extraction program 404e.

  The aberration correction coordinate storage unit 406g stores data representing the boundary coordinates of the code subjected to the aberration correction by the execution of the lens aberration correction program 404f. The three-dimensional coordinate storage unit 404h stores data representing the three-dimensional coordinates of the real space calculated by executing the triangulation calculation program 404g.

  The period distribution storage unit 406p, the threshold image storage unit 406q, and the binarized image storage unit 406r store data representing the period distribution, the threshold image, and the binarized image acquired by executing the code image generation program 404d, respectively.

  The stitch image storage unit 406s stores the above-described stitch image, and the three-dimensional color shape data storage unit 406t stores the above-described three-dimensional color shape data. The working area 410 stores data that the CPU 402 temporarily uses for its operation.

  Here, the camera control program 404a will be described with reference to FIG. When the camera control program 404a is executed by the computer 400, the main process described above is executed.

  In this main process, first, in step S101 (hereinafter simply referred to as “S101”; the same applies to other steps), the power source including the battery 74 is turned on. Next, in S102, the processing unit 16, peripheral interfaces, and the like are initialized.

  Subsequently, in S103, a key scan is performed to determine the operation state of the mode changeover switch 42. Thereafter, in S104, it is determined whether or not the SLOW mode is selected by the operation of the mode changeover switch 42. If it is assumed that the SLOW mode is selected this time, the determination is YES, and the above-described non-decimated image processing mode is set in S105. After execution of S105, S108, which will be described in detail later, is executed, and then the process returns to S103.

  On the other hand, this time, if it is assumed that the SLOW mode is not selected by the operation of the mode change switch 42, the determination in S104 is NO, and whether or not the FAST mode is selected by the operation of the mode change switch 42 in S106. Is determined. If it is assumed that the FAST mode is selected this time, the determination is YES, and the above-described thinned image processing mode is set in S107. After execution of S107, S108, which will be described in detail later, is executed, and then the process returns to S103.

  On the other hand, this time, if it is assumed that the FAST mode is not selected by the operation of the mode switch 42, the determination in S106 is NO, and whether or not the off mode is selected by the operation of the mode switch 42 in S112. Is determined. If it is assumed that the off mode is selected by operating the mode switch 42 this time, the determination is YES, and the main process of this time is immediately terminated. However, this time, the off mode is selected by operating the mode switch 42. If it is assumed that there is not, the determination is YES and the process returns to S103.

  17, S108 in FIG. 16 is conceptually represented by a flowchart as a stereoscopic image processing routine. By executing this stereoscopic image processing routine, stereoscopic image processing for detecting and displaying the three-dimensional shape of the subject S as a stereoscopic image is executed. In this stereoscopic image processing, the surface color of the same subject S is also detected. The three-dimensional color shape detection result is a combination of the detection result of the stereoscopic image and the detection result of the surface color in association with the position.

  In this stereoscopic image processing, first, in S1001, the finder image, that is, the same image as the image in the range visible through the imaging optical system 30 is displayed on the monitor LCD 44. Therefore, the user can confirm the captured image (imaging range) before actual imaging by viewing the image displayed on the monitor LCD 44.

  Next, in S1002, the operation state of the release button 40 is scanned, and then, in S1003, it is determined based on the scan result whether the release button 40 is in a half-pressed state. If it is in the half-pressed state, the determination is yes, and in S1004, the autofocus (AF) and automatic exposure (AE) functions are activated, thereby adjusting the focus, aperture, and shutter speed. If the release button 40 is not half-pressed, the determination in S1003 is NO, and the flow proceeds to S1010.

  After the execution of S1004, the operation state of the release button 40 is scanned again in S1005, and thereafter, in S1006, it is determined whether or not the release button 40 is fully pressed based on the scan result. If the release button 40 is not fully pressed, the determination in S1006 is NO and the process returns to S1002.

  If the release button 40 shifts from the half-pressed state to the fully-pressed state, the determination in S1006 becomes YES, and in S1007, the three-dimensional color shape detection process described later is executed, whereby the three-dimensional shape and surface color of the subject S are determined. Is detected.

  Briefly described, a three-dimensional color shape detection result for the subject S is generated by the three-dimensional color shape detection process. Here, the three-dimensional color shape detection result is a set of vertex coordinates acquired as a result of converting a plurality of spatial code boundary images detected in a spatial code image, which will be described later, into three-dimensional coordinates. Means that color shape information and polygon information are associated with each other. The color shape information is information representing a combination of real space coordinates and RGB values. The polygon information is information representing a combination of a plurality of vertices to be connected to each other in order to form a solid that three-dimensionally faces the subject S among the plurality of vertices.

  Thereafter, in S1008, the three-dimensional color shape detection result is stored in the external memory 78. Subsequently, in S1009, the three-dimensional color shape detection result is displayed on the monitor LCD 44 as a three-dimensional computer graphic image.

  Thereafter, in S1010, key scanning is performed in the same manner as in S103 in FIG. Subsequently, in S1011, it is determined whether or not the operation state of the mode switch 42 has changed. If there is no change, the determination in S1011 is YES and the process returns to S1001, but if there is a change, the determination in S1011 is NO and the current stereoscopic image processing ends.

  In the three-dimensional color shape detection process executed in S1007 in FIG. 17, the three-dimensional shape of the subject S is detected using a spatial coding method.

  In FIG. 18, S1007 in FIG. 17 is conceptually represented by a flowchart as a three-dimensional color shape detection processing routine. This three-dimensional color shape detection processing routine incorporates a table motor control program 404i, and this table motor control program 404i is configured to include S1201 and S1221 to S1223 in FIG.

  In this three-dimensional color shape detection processing routine, first, the rotational phase PH of the rotary table 184 is initialized to 0 in S1201. In the present embodiment, the rotation table 184 is stopped four times during one rotation, so that four rotation phases PH are set discretely on the rotation table 184. Specifically, the rotation phase PH includes “0” representing the initial rotation phase PH, “1” representing the next rotation phase PH, “2” representing the next rotation phase PH, and the last rotation phase. It is discretely changed to “3” representing PH.

  Next, in S1210, the imaging process program 404b is executed, whereby the imaging process is executed for the current rotational phase PH. In this imaging process, striped pattern light is projected from the projection unit 12 onto the subject S in time series. Further, a plurality of pattern light existence images obtained by imaging the subject S on which a plurality of types of pattern light are projected and a single pattern light no image obtained by imaging the same subject S on which the pattern light is not projected are acquired. Is done. This S1210 will be described in detail later with reference to FIG.

  When the imaging process ends, in S1220, a three-dimensional measurement process is executed for the current rotational phase PH. When this three-dimensional measurement process is executed, the three-dimensional shape of the subject S is actually measured using a plurality of pattern-lighted images and one pattern-lightless image acquired by the above-described imaging process. Is done. This S1220 will be described in detail later with reference to FIG.

  When this three-dimensional measurement process is completed, the rotational phase PH is incremented by 1 in preparation for the next imaging in S1221. Subsequently, in S1222, it is determined whether or not the current value of the rotational phase PH is greater than 4, that is, whether or not a series of imaging for the subject S has already been completed.

  If it is assumed that the current value of the rotational phase PH is not greater than 4, this time, the determination in S1222 is NO, and in S1223, the driving signal necessary to rotate the rotary table 184 by 90 degrees clockwise is the table. Output to the motor 194. As a result, the turntable 184 is rotated 90 degrees in the clockwise direction, so that the subject S is opposed to the measurement head MH in a partial area different from that at the previous imaging. Thereafter, S1210 and S1220 are executed, whereby the above-described imaging process and three-dimensional measurement process are performed for the next rotational phase PH.

  As a result of executing the loop of S1210 to S1223 as many times as necessary, if the determination in S1222 is YES, then in S1230, the three-dimensional shape measured for the subject S and the surface color are combined to detect the three-dimensional color shape. Results are generated. This S1230 will be described in detail later with reference to FIG.

  When this three-dimensional color shape detection result is generated, the current three-dimensional color shape detection process ends.

  Here, S1210 in FIG. 18 will be described in detail with reference to FIG. In FIG. 19, S1210 is conceptually represented by a flowchart as the imaging processing program 404b.

  The imaging processing program 404b incorporates a feed motor control program 404h, and the feed motor control program 404h is configured to include S2002 to S2005, S2010, S2016, and S2017 in FIG.

  In this imaging processing program 404b, first, in S2001, a pattern number PN indicating the number of pattern light to be generated this time is initialized to zero. This pattern number PN is the number of the selected optical element 260 to be selected as the position of the window 297 for projecting the current pattern light onto the subject S among the plurality of planar optical elements 260 (FIG. 12). Corresponds to “code” in FIG.

  Next, in S2002, the feed motor 65 is driven in a preset direction. Subsequently, in S2003, the PI signal is read from the photo interrupter 300. Thereafter, in S2004, it is determined whether or not the level of the read PI signal has just changed from the low level to the high level. That is, it is determined whether or not it is immediately after the carriage 202 is detected by the photo interrupter 300, that is, immediately after the carriage 202 is moved to the specific position.

  This time, if it is assumed that the level of the PI signal is not immediately after changing from the low level to the high level, the determination in S2004 is NO, and the execution of the loop from S2002 to S2004 is resumed. Assuming that the level of the PI signal has changed from a low level to a high level as a result of how many times the loop has been executed, the determination in S2004 is YES, and the flow proceeds to S2005.

  In S2005, a preset drive signal (for example, a drive pulse) is supplied to the feed motor 65 in order to further move the carriage 202 located at the above-mentioned specific position and position it at the home position. When the carriage 202 is positioned at its home position, the light modulator 200 generates a pattern light having the current pattern number PN among the plurality of planar optical elements 260 (the above-described selected optical element). It will face the window 297.

  After that, in S2006, projection of the PN-th pattern light to which the number equal to the current value of the pattern number PN among the plurality of pattern lights is started.

  Subsequently, in S2007, a projection process for projecting the PN-th pattern light onto the subject S is performed. FIG. 20 conceptually shows the details of S2007 as a projection processing subroutine in a flowchart. By executing this projection processing subroutine, the projection processing for projecting the PN-th pattern light from the projection unit 12 onto the subject S is executed in cooperation with the projection mechanism 66.

  In this projection processing, first, the light source driver 84 is driven in S3004, and then, in S3005, the LED 62 emits light by an electrical signal from the light source driver 84. This is the end of the current projection process.

  The light emitted from the LED 62 reaches the projection mechanism 66 through the light source lens 64. In the projection mechanism 66, spatial modulation corresponding to the surface shape of the selection optical element 260 of the light modulator 200 is performed. As a result, incident light on the projection mechanism 66 is converted into pattern light and output. The pattern light output from the projection mechanism 66 is projected as a projection image onto the subject S via the projection optical system 32.

  When the PN-th pattern light is projected onto the subject S as described above, subsequently, the subject S on which the PN-th pattern light is projected is imaged by the imaging unit 14 in S2008 in FIG. .

  By the imaging, a PN-th pattern light existence image obtained by imaging the subject S on which the PN-th pattern light is projected is acquired. The acquired pattern light present image is stored in the pattern light present image storage unit 406a in association with the corresponding pattern number PN.

  When the imaging is finished, the projection of the PN-th pattern light is finished in S2009. Subsequently, in S2010, the feed motor 65 is fed so that the carriage 202 is fed by one pitch in preparation for projecting the next pattern light. Is supplied with a drive signal. Thereafter, in S2011, the pattern number PN is incremented by 1 in preparation for projecting the next pattern light.

  Subsequently, in S2012, it is determined whether or not the current value of the pattern number PN is smaller than the maximum value PNmax. The maximum value PNmax is determined according to the total number of mask patterns used. For example, when 8 types of mask patterns are used, the maximum value PNmax is set to 8.

  If it is assumed that the current value of the pattern number PN is smaller than the maximum value PNmax this time, the determination in S2012 is YES, and then the execution of the loop from S2006 to S2012 is performed to project the pattern light having the current pattern number PN. Be resumed for.

  When the execution of the loop from S2006 to S2012 is repeated the same number of times as the number of types of pattern light, if the current value of the pattern number PN becomes a value not smaller than the maximum value PNmax, the determination in S2012 is NO, and the current imaging The process ends. Therefore, the same number of images with pattern light as the maximum value PNmax are acquired by one imaging process.

  Subsequently, in S2013, it is determined whether or not the flash mode is selected. If the flash mode is selected, the determination is YES, and the flash 26 is caused to emit light in S2014. If the flash mode is not selected, the determination in S2013 is NO and S2014 is skipped. In any case, the subject S is then imaged in S2015.

  This imaging is performed without projecting pattern light from the projection unit 12 onto the subject S for the purpose of measuring the surface color of the subject S. As a result, one pattern light no image is acquired for the subject 12. The acquired pattern light no image is stored in the pattern light no image storage unit 406b.

  Subsequently, in S2016, the feed motor 65 is driven so that the carriage 202 returns to the above-described home position. Thereafter, in S2017, the feed motor 65 is stopped and shifted to a standby state.

  Thus, one execution of the imaging processing program 404b is completed.

  FIG. 21 is a timing chart illustrating an example of the operation of the three-dimensional input apparatus 10 that accompanies one execution of the imaging processing program 404b. This operation example is executed by the three-dimensional input device 10 when the user operates the release button 40 in a fully-pressed state while the FAST mode is selected by the user.

  FIG. 21A shows a state in which the CCD 70 is continuously exposed a plurality of times by the incident light from the subject S. In FIG. 21B, for each of the multiple exposures, light is converted into an electrical signal by the CCD 70 for each pixel in the entire image represented by the incident light from the subject S and output from the CCD 70. The signal output timing is represented by a timing chart. In FIG. 21C, timings at which the image processing mode of the imaging unit 14 is temporally switched between the thinned image processing mode and the non-thinned image processing mode are shown in a timing chart.

  Further, FIG. 21D shows a timing chart showing the timing at which the state of the imaging unit 14 is temporally switched between a standby state and an operation state for imaging and signal extraction. In FIG. 21E, timings at which the respective planar optical elements 260 are determined in the light modulator 200 to form each pattern light are shown in a timing chart. FIG. 21F shows a timing chart showing the timing at which the flash 26 is temporally switched between the OFF state and the ON state. FIG. 21G shows a timing chart showing the timing at which the release button 40 is temporally switched between a non-operation state (OFF state) and an operation state (ON state).

  In the present embodiment, after the CCD 70 is exposed by incident light from the subject S, a signal reflecting the exposure is taken out from the CCD 70. One signal extraction corresponds to one exposure, and these exposure and signal extraction together constitute one individual imaging process.

  In the present embodiment, the acquisition of the three-dimensional shape information and the acquisition of the surface color information for the same subject S are continuously performed in that order.

  As described above, in order to acquire the three-dimensional shape information of the subject S, eight types of pattern light (pattern numbers PN = 0 to 7) are sequentially projected on the subject S, and the CCD 70 is projected for each projection of the pattern light. Exposure and signal extraction from the CCD 70 are performed. That is, in order to acquire the three-dimensional shape information of the subject S, the individual imaging processing for the subject S is sequentially performed a total of eight times. In FIG. 21, the number PN of the pattern light corresponding to each individual imaging process for acquiring the three-dimensional shape information is indicated by the numbers “0” to “7”.

  In order to acquire the surface color information of the subject S, the CCD 70 is exposed once by the incident light from the subject S, and then the signal is extracted. That is, in order to acquire the surface color information of the subject S, the individual imaging process for the subject S is performed once. In FIG. 21, a single individual imaging process for obtaining surface color information is indicated by a symbol “c”.

  In imaging for obtaining three-dimensional shape information, it is indispensable to project pattern light as illumination light on the subject S, whereas in imaging for obtaining surface color information, illumination light is projected onto the subject S. It is selective to do. Specifically, in imaging for acquiring surface color information, when the amount of light received from the subject S is insufficient, the flash 26 is automatically caused to emit light, thereby projecting illumination light onto the subject S. Is done.

  Therefore, in the present embodiment, eight individual imaging processes for acquiring three-dimensional shape information and one individual imaging process for acquiring surface color information are continuously performed, for a total of nine individual imaging processes. Imaging processing is continuously performed. In the present embodiment, these nine individual imaging processes cooperate with each other to constitute one whole imaging process.

  In these nine individual imaging processes, nine exposures are sequentially performed on the same subject S, and these nine exposures are performed at the same cycle as the video rate, for example. The period in which these nine exposures are continuously performed is a period in which the influence appears in the imaging result of the CCD 70 when the relative position between the subject S and the three-dimensional input device 10 changes. This period is the imaging time of the three-dimensional input device 10. It means that the moving image imaging capability of the three-dimensional input device 10 is higher as the imaging time is shorter.

  In one operation example shown in FIG. 21, signal extraction in eight individual imaging processes for acquiring three-dimensional shape information is performed as a thinned image process. Accordingly, in each individual imaging process for obtaining three-dimensional shape information, an electrical signal is output from the CCD 70 after the CCD 70 has been exposed and after a necessary signal extraction time t1 has elapsed. The signal extraction time t1 is also referred to as one frame extraction time. For each pattern light projection, the three-dimensional necessary for the three-dimensional shape information to be output from the CCD 70 after the exposure of the CCD 70 is completed. It means shape information output time.

  On the other hand, in the example shown in FIG. 21, signal extraction in one individual imaging process for acquiring surface color information is executed as non-decimated image processing. Therefore, for one individual imaging process for acquiring surface color information, an electrical signal is output from the CCD 70 after the exposure of the CCD 70 and after a necessary signal extraction time t2. The signal extraction time t2 is also called one frame extraction time, and means the surface color information output time required until the surface color information is output from the CCD 70 for one frame after the exposure of the CCD 70 is completed.

  The signal extraction time t1 required for the thinned-out image processing is shorter than the signal extraction time t2 required for the non-thinned-out image processing. For example, the signal extraction time t1 is about 33 ms, while the signal extraction time t2 is about 0.5 s.

  As shown in FIGS. 21A and 21B, in one individual imaging process, signal extraction is started after the exposure is completed, but the exposure in the next individual imaging process is performed in the previous individual imaging process. This is started before the signal extraction at is finished. That is, the signal extraction in one individual imaging process and the exposure in the next individual imaging process are performed so as to partially overlap in time. However, the signal extraction in a certain individual imaging process ends before the exposure in the next individual imaging process ends.

  Therefore, in the present embodiment, as shown in FIG. 21B, eight signal extractions for acquiring the three-dimensional shape information are continuously performed with no time gap.

  Each signal extraction is completed in about 33 ms if it is executed as a thinned image process. Therefore, eight signal extractions are completed in about 0.26 s. Therefore, the length of the part (hereinafter referred to as “partial imaging time”) necessary for imaging for obtaining the three-dimensional shape information in the imaging time (total imaging time) shown in FIG. 21 is the length of the signal extraction time. Therefore, a length of about 0.26 s is required.

  On the other hand, if each signal is extracted as non-decimated image processing, about 0.5 s is required. Therefore, about 5 s is required for eight signal extractions, and accordingly, the corresponding partial imaging time is also required to be as long as that.

  As described above, when the signal extraction from the CCD 70 is executed as the thinned image processing, the imaging time is shortened. As a result, the 3 of the subject S can be obtained regardless of the movement of the subject S and the camera shake of the three-dimensional input device 10. Dimensional shape can be measured with high accuracy.

  Further, as shown in FIG. 21, in the present embodiment, each of the second to eighth exposures for acquiring the three-dimensional shape information and the exposure for acquiring the surface color information are immediately preceding each other. The process is started without waiting for the end of signal extraction corresponding to the exposure. The signal extraction corresponding to the preceding exposure and the subsequent exposure are performed in parallel with each other, whereby nine signal extractions are continuously performed with no time gap. Therefore, the imaging time shown in FIG. 21, that is, the time necessary to continuously perform both the imaging for acquiring the three-dimensional shape information and the imaging for acquiring the surface color information is shortened.

  Specifically, since each signal extraction is completed in about 33 ms when it is executed as a thinned-out image process, nine signal extractions are completed in about 0.3 s, and thus correspond to it. The entire imaging time can be as long as that.

  Temporarily, one individual imaging process for surface color information acquisition, that is, surface color measurement imaging process (signal extraction is executed as non-decimated image processing) is performed eight times for acquiring three-dimensional shape information. When individual imaging processing, that is, three-dimensional measurement imaging processing (signal extraction is executed as a thinned-out image processing) is performed later, three-dimensional shape information is obtained until signal extraction in the preceding surface color measurement imaging processing is almost completed. You have to wait for the first exposure for acquisition. The waiting time is approximately equal to the length of the signal extraction time t2 and is about 0.5 s.

  In this case, there is a slightly longer time interval between the exposure for acquiring the surface color information and the first exposure for acquiring the three-dimensional shape information, and the total imaging time shown in FIG. 21 becomes longer. On the other hand, when the relative displacement between the measuring head MH and the subject S does not exist or is sufficiently small, it is not a problem that the entire imaging time is slightly long. On the other hand, when the relative displacement between the measuring head MH and the subject S is large, if the entire imaging time is long, the surface color information and the three-dimensional shape information are matched sufficiently accurately with respect to the pixel position. I will not. That is, the texture mapping accuracy is lowered.

  On the other hand, in this embodiment, as shown in FIG. 21, eight individual imaging processes for acquiring three-dimensional shape information are performed first, and one individual imaging process for acquiring surface color information is performed later. Done. As a result, the eighth exposure for acquiring the preceding three-dimensional shape information and the subsequent exposure for acquiring the surface color information are performed eight times for acquiring the preceding three-dimensional shape information. It becomes possible to carry out continuously with the same period. Therefore, according to the present embodiment, it is possible to reduce the total imaging time to about 0.3 s.

  Therefore, according to this embodiment, it is possible to continuously perform exposure for acquiring three-dimensional shape information and exposure for acquiring surface color information at sufficiently short time intervals, and as a result, the measurement head MH. Regardless of the presence or absence of relative displacement between the subject S and the subject S, high texture mapping accuracy is realized.

  Therefore, according to the present embodiment, when the signal extraction from the CCD 70 for obtaining the three-dimensional shape information is executed in the thinned image processing mode (when the user selects the FAST mode), the high texture resolution, that is, the surface color A three-dimensional input device 10 suitable for capturing a moving image with high texture mapping accuracy while ensuring measurement accuracy is provided.

  Furthermore, in this embodiment, the user can appropriately change the image processing mode for acquiring the three-dimensional shape information into a thinned image processing mode, that is, a FAST mode, and a non-thinned image processing mode, that is, a SLOW mode. It is. If the user selects the FAST mode in an environment where a decrease in texture mapping accuracy is a concern, the texture mapping accuracy does not decrease in spite of such an environment. On the other hand, if the user selects the SLOW mode in an environment where there is no concern about a decrease in texture mapping accuracy, not only high texture mapping accuracy but also high three-dimensional shape measurement accuracy is realized.

  As described above, according to the present embodiment, the user sets the three-dimensional input device 10 according to the use environment of the three-dimensional input device 10 and the user's request for each of the three-dimensional shape measurement accuracy and the texture mapping accuracy. It can be arbitrarily changed, so that the usability of the three-dimensional input device 10 is improved.

  Here, S1220 in FIG. 18 will be described in detail with reference to FIG. FIG. 22 conceptually shows the S1220 in a flowchart as a three-dimensional measurement processing subroutine.

  In this three-dimensional measurement processing subroutine, first, in S4001, a luminance image is generated by executing the luminance image generation program 404c.

  In S4001, the luminance value is defined as the Y value in the YCbCr space, and from the RGB value of each pixel,

  Y = 0.2989 · R + 0.5866 · G + 0.1145 · B

It is calculated using the following formula. By obtaining the Y value for each pixel, a plurality of luminance images corresponding to the plurality of pattern light existence images are generated. The generated luminance images are stored in the luminance image storage unit 406c in association with the pattern number PN. However, the formula used for calculating the luminance value is not limited to the above formula, and can be appropriately changed to another formula.

  Next, in S4002, the code image generation program 404d is executed. When the code image generation program 404d is executed, a plurality of generated luminance images are combined using the above-described spatial encoding method to generate a code image in which a spatial code is assigned to each pixel. Is done. The code image is generated by binarization processing by comparing a luminance image related to a plurality of types of pattern light existence images stored in the luminance image storage unit 406c and a threshold image to which a luminance threshold is assigned for each pixel. . The generated code image is stored in the code image storage unit 406d.

  FIG. 22 conceptually shows the details of the code image generation program 404d in a flowchart. The technology adopted in the code image generation program 404d is described in detail in the specification of the applicant's Japanese Patent Application No. 2004-285736. Therefore, by referring to the patent application, the contents of the patent application can be changed. Combined herein.

  Hereinafter, the code image generation program 404d will be described in time series, but prior to that, it will be described in principle.

  In the present embodiment, a plurality of luminance images are generated for the same subject S (three-dimensional object) under a plurality of types of pattern light. Each of the pattern lights is formed such that a bright part, that is, a bright pattern line having a width, and a dark part, that is, a dark pattern line having a width, are alternately repeated at a constant period. The pattern lights are different from each other with respect to the period, and are each referred to as a pattern light having a pattern number PN. Among the pattern lights, the pattern light having the shortest cycle is the pattern light having the pattern number PN of 0, and the pattern light having the longest cycle is the pattern light having the pattern number PN of (PNmax-1). .

  Since any luminance image is acquired under the corresponding pattern light, it is formed as a pattern image in which bright pattern lines as bright portions and dark pattern lines as dark portions are alternately arranged. Since the interval, that is, the period between the pattern lines depends on the relative geometric relationship (relationship between position and orientation) between the three-dimensional input device 10 and the subject S, it is constant at all positions in each luminance image. Not necessarily. A plurality of luminance images respectively acquired under a plurality of types of pattern light are specified using the pattern number PN of the corresponding pattern light.

  In the present embodiment, any one of the plurality of luminance images is selected as the representative pattern image. A typical example of the representative pattern image is a luminance image corresponding to one of a plurality of types of pattern light having a minimum pattern line cycle. This is a luminance image having a pattern number PN of 0.

  In the luminance image obtained by imaging the subject S on which the pattern light is projected, the luminance value changes spatially and periodically in the direction of the pixel column. In the graph representing the periodic change, there is an envelope that touches at a plurality of lower peak points (lowest luminance points). This envelope represents a spatial change in the luminance value in the luminance image obtained by imaging the same subject S in the non-irradiated state, that is, the luminance value of the background light of the subject S. For a luminance image in which such an envelope exists, in order to binarize the luminance value of each pixel accurately by threshold processing, it is desirable to change the threshold according to the pixel position. That is, it is desirable to adaptively change the threshold value by tracking the actual luminance value change of the luminance image.

  Based on such knowledge, in this embodiment, a filter window for calculating a threshold value by performing filter processing on the luminance image is set locally, and the threshold value suitable for the position by the filter processing is Set locally for the luminance image. If a window is set at a certain local position in the luminance image, the luminance value of the pixel existing in the window is extracted and referred to from among the plurality of pattern lines constituting the luminance image, and the window is set. A threshold value corresponding to the local position is set.

  The window used in this embodiment is a rectangular window. When this rectangular window is adopted, the luminance values of the pixels constituting the plurality of pattern lines existing in the rectangular window are extracted, and the threshold value is calculated by using the same weighting coefficient for the luminance values. Is done. The window function of the rectangular window is defined by the weight coefficient.

  Further, when a rectangular window is adopted, the number of pixels existing in the line direction in the rectangular window can be made variable according to the line direction size in the line direction in which the pattern line extends. . On the other hand, the number of pattern lines and the number of pixels existing in the column direction in the rectangular window are variable according to the column direction size in the column direction in which a plurality of pattern lines are arranged in a row. can do.

  Therefore, when a rectangular window is adopted, the threshold value calculated from the luminance image changes by setting the window in the luminance image depending on the column direction size of the rectangular window. Therefore, when it is necessary to adaptively change the threshold value, the column direction size of the rectangular window may be adaptively changed.

  In the present embodiment, the size of the window configured as a rectangular window is such that the number of pattern lines existing in the window is an integral multiple of the interval between the pattern lines, that is, the period (for example, the period in which bright pattern lines are repeated). It is desirable to set so that there is. That is, it is desirable to set the size of the window so that the same number of bright pattern lines and dark pattern lines exist in the window. With this setting, it is possible to obtain a desired threshold with high accuracy by calculating the average value of the luminance values of a plurality of pattern lines existing in the window.

  However, even on the same luminance image, the pattern line period may vary depending on the location. Therefore, when the size of the window is fixed, the number of pattern lines existing in the window varies depending on the location, and the threshold setting accuracy is lowered.

  In the present embodiment, among a plurality of luminance images, an image captured under the pattern light having the minimum pattern line period, that is, a luminance image having a pattern number PN of 0 is selected as the representative pattern image. Is done. Furthermore, in this embodiment, the window VW set locally with respect to the representative pattern image is configured as a variable window whose size is variable. Thereby, the size of the variable window VW is changed in conformity with the actual pattern line period of the representative pattern image.

  Therefore, according to the present embodiment, even if the pattern line period in the representative pattern image varies according to the position in the column direction, the size of the variable window VW is changed so as to follow it, and as a result, the pattern line period varies. Nevertheless, the number of bright and dark pattern lines existing in the variable window VW is kept constant. In the present embodiment, the threshold value TH is acquired for each local position where the variable window VW is set for the representative pattern image. The threshold value TH for each local position is accurately obtained based on the variable window VW having the optimum size for each local position.

  In addition, the size of the variable window VW that keeps the number of bright and dark pattern lines constant is minimum in a luminance image having a pattern number PN of zero. Therefore, by selecting a luminance image whose pattern number PN is 0 as a representative pattern image, the size of the minimum variable window VW can be made, and the calculation burden of the filter processing after using the variable window VW can be suppressed. It becomes possible.

  In the present embodiment, the variable window VW is configured as a rectangular window having a variable size. The size of the variable window VW is set so as to be variable in the column direction of the representative pattern image but fixed in the line direction.

  In the present embodiment, the size of the variable window VW, that is, the size in the column direction of the representative pattern image is set so as to adaptively reflect the actual pattern line period of the representative pattern image. Therefore, in order to set the size of the variable window VW, it is necessary that the actual pattern line period distribution of the representative pattern image is known in advance.

  Therefore, in this embodiment, prior to setting the size of the variable window VW, a fixed window with a fixed size is set for the representative pattern image. A plurality of continuous pixels captured by the set fixed window are selected as a plurality of target pixels, and an actual pattern line period distribution of the representative pattern image is acquired based on the luminance values of the selected target pixels. The

  In the present embodiment, further, FFT (Fast Fourier Transform) processing is performed on the luminance values of a plurality of pixels of interest in the representative pattern image, whereby the luminance value in the column direction of the representative pattern image. Intensity (eg, power spectrum) is acquired for each frequency component of the change. Here, the “frequency component” means the number of repetitions in which the change in luminance value is repeated when a plurality of target pixels captured by one fixed window are traced in the column direction.

  In the present embodiment, each of a plurality of continuous pixels continuously arranged in the column direction in the representative pattern image is sequentially selected as a target pixel, and the pattern line period for each of the selected target pixels is the representative pattern image. Obtained based on the luminance value distribution.

  The code image generation program 404d has been described in principle above. Hereinafter, the code image generation program 404d will be described in time series with reference to FIG.

  In the code image generation program 404d, first, in S5001, a luminance image obtained by imaging the subject S onto which pattern light having a pattern number PN of 0 is captured is read from the luminance image storage unit 406c as a representative pattern image.

  Next, in S5002, the pattern line cycle is calculated for each pixel that is continuously arranged in the column direction in the representative pattern image based on the read luminance image for the representative pattern image by the above-described approach by FFT conversion. Is done. The plurality of calculated pattern line periods are stored in the period distribution storage unit 406p in association with each pixel (each column direction pixel position).

  Subsequently, in S5003, the characteristics of the variable window VW are set locally based on the plurality of calculated pattern line periods. In the present embodiment, the line direction size of the variable window VW is set so as not to change regardless of the position on the representative pattern image where the variable window VW is set, whereas the column direction of the variable window VW The size is set so as to correspond to an integral multiple of the pattern line period calculated in association with each column direction pixel position.

  After that, in S5004, a variable window VW is set for the representative pattern image in a plane along the line direction and the column direction and in association with each pixel. Thereby, for each pixel, an average value of luminance values of a plurality of pixels existing in the variable window VW is calculated as a local threshold value. In S5004, a threshold image in which the calculated threshold value is assigned to each pixel is further generated. The generated threshold image is stored in the threshold image storage unit 406q.

  Subsequently, in S5005, the pattern number PN is initialized to 0. Thereafter, in S5006, it is determined whether or not the current value of the pattern number PN is smaller than the maximum value PNmax. Since the current value of the pattern number PN is 0 this time, the determination is no and the process moves to S5007.

  In S5007, the luminance value of the luminance image assigned the pattern number PN equal to the current value of the pattern number PN and the threshold value of the generated threshold image are compared with each other for each pixel. The comparison result is reflected in the binarized image for each pixel. Specifically, when the luminance value of the luminance image is larger than the threshold, data representing “1” is stored in the binarized image storage unit 406r in association with the corresponding pixel position in the binarized image, On the other hand, when the luminance value of the luminance image is not greater than the threshold value, data representing “0” is stored in the binarized image storage unit 406r in association with the corresponding pixel position in the binarized image.

  Thereafter, in S5008, the pattern number PN is incremented by one. Subsequently, returning to S5006, it is determined whether or not the current value of the pattern number PN is smaller than the maximum value PNmax. Again, if it is smaller than the maximum value PNmax, the determination is no and the process moves to S5007.

  As a result of the execution of S5006 to S5008 being repeated the same number of times as the number of types of pattern light, if the current value of the pattern number PN becomes a value not smaller than the maximum value PNmax, the determination in S5006 becomes YES, and the process proceeds to S5009.

  In S5009, for each pixel, the binarization corresponding to the luminance image in which the pixel value (“1” or “0”) from the same number of binarized images as the maximum value PNmax is the pattern number PN is 0. The spatial code is extracted from the image in accordance with the order from the binary image corresponding to the luminance image having the pattern number PN of (PNmax-1), and the spatial code arranged in the order from the least significant bit LSM to the most significant bit MSB is generated. The The number of bits of the spatial code for each pixel is the same as the maximum value PNmax. By generating a spatial code for each pixel, a spatial code image corresponding to the current subject S is generated. The generated spatial code is stored in the spatial code storage unit 116d in association with each pixel position. For example, when the maximum value PNmax is 8, the generated spatial code has a value in the range of 0 to 255.

  This completes one execution of the code image generation program 404d.

  Thereafter, in S4003 in FIG. 22, a code boundary coordinate detection process is performed by executing the code boundary extraction program 404e. Since the coding by the above-described spatial coding method is performed in units of pixels, the bright / dark boundary line in the actual pattern light and the spatial code boundary line in the generated code image (a certain spatial code is assigned) An error in sub-pixel accuracy occurs between the region and the boundary between the region assigned with another spatial code. Therefore, this code boundary coordinate detection process is performed for the purpose of detecting the boundary coordinate value of the spatial code with subpixel accuracy.

  For example, when 255 discrete reference line positions intersecting the line direction of each pattern light are set in the CCD coordinate system, the maximum value PNmax is 8 (the boundary is 255 because it has 256 spatial codes). , S4003 (execution of the code boundary extraction program 404e) in FIG. 22 detects boundary coordinate values of a maximum of about 65,000 spatial codes.

  The detected code boundary coordinate value is stored in the code boundary coordinate storage unit 406e. The code boundary coordinate values are defined in a CCD coordinate system ccdx-ccdy, which is a two-dimensional coordinate system set on the imaging plane of the CCD 70.

  Subsequently, in S4004, a lens aberration correction process is performed by executing the lens aberration correction program 404f. In this lens aberration correction processing, the actual imaging position of the light beam incident on the imaging optical system 30 that is affected by the aberration of the imaging optical system 30 is the ideal lens. If so, it is a process of correcting the image so as to approach the ideal image formation position where the image should be formed.

  By this lens aberration correction process, the code boundary coordinate value detected in S4003 is corrected so that an error caused by distortion of the imaging optical system 30 or the like is removed. The code boundary coordinates corrected as described above are stored in the aberration correction coordinate storage unit 406g.

  Neither the code boundary coordinate detection process nor the lens aberration correction process is indispensable for understanding the present invention, and is disclosed in detail in the specification of the applicant's Japanese Patent Application No. 2004-105426. The detailed description is omitted in this specification by combining it with this specification by referring to it.

  Thereafter, in S4005, real space conversion processing based on the principle of triangulation is performed by executing the triangulation calculation program 404g. If this real space conversion process is performed, the above-described code boundary coordinate values on the CCD coordinate system ccdx-ccdy and subjected to aberration correction are set in the real space according to the principle of triangulation. It is converted into a three-dimensional coordinate value on the real space coordinate system XYZ which is a three-dimensional coordinate system, and as a result, a three-dimensional coordinate value as a three-dimensional color shape detection result is acquired. The acquired three-dimensional coordinate value is stored in the three-dimensional coordinate storage unit 406h in association with the rotation phase PH of the corresponding partial image.

  In S4005, in order to spatially discretely measure the three-dimensional shape of the subject S as a collection of a plurality of three-dimensional vertices, the two-dimensional code image is discretely intersected with the line direction of each pattern light. Reference is made spatially with respect to a plurality of reference lines. As a result, not only a plurality of three-dimensional vertices respectively corresponding to a plurality of discrete points on the outer boundary of the code image are acquired, but also a plurality of discrete points (detected in S4003) inside the code image. A plurality of three-dimensional vertices respectively corresponding to the boundary coordinate points of the codes are acquired.

  Here, S1230 in FIG. 18 will be described in detail with reference to FIG. FIG. 24 conceptually shows the S1230 as a three-dimensional color shape detection result generation subroutine in a flowchart.

  In the three-dimensional color shape detection result generation subroutine, first, in S5501, a plurality of three-dimensional coordinate values are loaded from the three-dimensional coordinate storage unit 406h in association with the rotation phases PH0 to PH3. In the present embodiment, the entire outer surface of the subject S is divided into four partial surfaces (front, right side, left side, and back), and a stereoscopic image is generated for each partial surface. In S5501, a plurality of three-dimensional coordinate values belonging to each of the four partial surfaces are loaded from the three-dimensional coordinate storage unit 406h for all four partial surfaces.

  Next, in S5502, the plurality of loaded three-dimensional coordinate values (vertex coordinate values) are subjected to rotational transformation according to the rotational phase PH of each partial surface to which each three-dimensional coordinate value belongs, thereby A plurality of three-dimensional coordinate values belonging to the four partial surfaces are combined in anticipation of the rotational phase PH of each partial surface. As a result, four partial surfaces that are three-dimensionally expressed by a plurality of three-dimensional coordinate values are integrated, and an image showing the entire outer surface of the subject S is synthesized. However, at this stage, there is a portion that overlaps spatially due to the divided imaging method of the measurement head MH in the synthesized image.

  Subsequently, in S5503, a spatially overlapping portion is extracted from the generated composite image. Further, two overlapping portions in each region in the length direction of the composite image are combined into one portion by a technique such as averaging of a plurality of three-dimensional coordinate values belonging to the two portions. As a result, spatial overlap is removed in the composite image, thereby completing the stitch image. Data representing the stitch image is stored in the stitch image storage unit 406s.

  Thereafter, in S6001, the RGB values (R luminance value, G luminance value, and B luminance value) corresponding to each real coordinate space coordinate value of the three-dimensional vertex group coordinate-converted to the above-described real space three-dimensional coordinate system are set as described above. Extracted from the surface color image.

  The relationship between the real space coordinate system and the plane coordinate system that defines the surface color image is geometrically associated with each other by the triangulation calculation described above. That is, there is a function used for mapping a code image, that is, a plane coordinate system defining a shape image, which is a two-dimensional image for measuring the three-dimensional shape of the subject S, to a real space three-dimensional coordinate system by calculation. In this case, by using an inverse function of the function, a real space three-dimensional coordinate system can be mapped by calculation to a plane coordinate system that defines a surface color image. Therefore, in S6001, it is possible to extract the surface color value, that is, the RGB value, corresponding to each three-dimensional vertex from the two-dimensional surface color image.

  In step S6002, color shape information is generated by combining corresponding real space coordinate values and RGB values for each vertex. Further, the generated color shape information is stored locally in the working area 410 in association with the corresponding vertex directly or indirectly.

  Subsequently, in S6003, in order to approximately represent the surface shape of the subject S by dividing it into triangles, which are examples of a plurality of polygons, among the plurality of vertices acquired for the subject S, the distance A plurality of vertices adjacent to each other are grouped in groups of three. For each group, three vertices are connected to each other to form one polygon.

  Thereafter, in S6004, for each polygon, a combination of three vertices to be connected to form the polygon is locally stored in the working area 410 as polygon information, directly or indirectly associated with each polygon. . The polygon information is stored in the three-dimensional color shape data storage unit 406t as information representing the three-dimensional color shape of the subject S as necessary.

  Thus, one execution of the three-dimensional color shape detection result generation subroutine is completed, and accordingly, one execution of the three-dimensional color shape detection processing routine shown in FIG. 18 is ended.

  In the present embodiment, when the user unfolds the holder HD so that the head base 130 and the table base 132 are on the same plane, the relative position of the rotary table 184 with respect to the measuring head MH is automatically and uniquely determined. It is decided. The relative position is defined by, for example, the distance from the measurement head MH and the angle of the measurement head MH with respect to the optical axis.

  In the present embodiment, the distance between the four plate-like members constituting the holder HD does not depend on the change in the posture of the holder HD, and the angle between the four plate-like members also depends on the posture of the holder HD. Does not depend on changes in

  Therefore, according to the present embodiment, the relative position of the rotary table 184, which is automatically positioned when the holder HD is expanded from the stored state, with respect to the measuring head MH is always reproduced as the same. Therefore, according to the present embodiment, the user can automatically position the subject S with respect to the measuring head MH simply by placing the subject S on the rotary table 184 in which the same unfolded position is reproduced. .

  As a result, according to the present embodiment, as long as the user places the subject S on the turntable 184, the changeable area of the relative position of the subject S with respect to the measurement head MH is reduced. The area (image pickup possible area) that the measurement head MH needs to image in consideration of the size of the area is also reduced.

  Therefore, according to the present embodiment, compared with the above-described conventional example having a high degree of spatial freedom when the subject S is arranged, the burden imposed on the measurement head MH for imaging and measuring the subject S is reduced. Easy to do.

  There are other reasons why the burden imposed on the measurement head MH for imaging and measurement of the subject S is reduced. To explain an example, in the three-dimensional shape measurement of the subject S from the four plane directions (PN = 0 to 3) using the rotation table 184, the coordinates of the rotation center axis of the rotation table 184 are estimated. Processing is highly efficient.

  Specifically, in this embodiment, the spatial coordinate value of the rotation center axis of the rotary table 184 on which the subject S is arranged with respect to the measurement head MH is known. Accordingly, by performing spatial rotation calculation processing around the rotation center axis for each three-dimensional coordinate value (calculated in S4005 in FIG. 23) which is a three-dimensional shape measurement result for each of the four surfaces, Polygon surface and texture stitch processing (combination processing) representing the shape and color of the subject S is performed, and as a result, the final output of the three-dimensional color shape detection result of the entire circumference of the subject S is generated (see FIG. 18 at S1230). As a result, the shape and color of the entire circumference of the subject S are correctly combined without any positional deviation.

  In the three-dimensional input device 10, when the holder HD is unfolded from the stored state, the rotary table 184 is automatically positioned. At this time, the relative position of the rotary table 184 with respect to the measuring head MH is set for each positioning. Is reproduced as the same thing. Therefore, according to the three-dimensional input device 10, every time the rotary table 184 is automatically positioned, the relative position of the rotation center axis of the rotary table 184 with respect to the measuring head MH is also reproduced as the same.

  Therefore, according to the three-dimensional input device 10, for the three-dimensional measurement of the subject S, detection or estimation of the rotation center axis of the turntable 184 can be omitted completely or partially.

  Even when the rotation center axis of the rotary table 184 is estimated, the size of the space area to be estimated is determined by the clearance existing in each joint (each hinge part) 140, 142, 144 of the holder HD at the time of deployment. It is sufficient to determine in consideration of the position fluctuation of the rotation center axis due to (again), and thus the space area can be small.

  In any case, according to the present embodiment, for the same subject S, the burden of the rotation center axis estimation process performed to correctly combine a plurality of shapes and colors independently measured for each surface is reduced. It becomes easy. Here, as an example of the “rotation center axis estimation process”, the coordinates of the rotation center axis are set so that the positional deviation between the plurality of color shapes discretely measured on the entire circumference of the subject S is substantially minimized. It is possible to employ a method for estimating

  To explain another reason for reducing the burden imposed on the measuring head MH for imaging and measuring the subject S, the rotary table 184 always has the same normal position (measuring head) every time the holder HD is deployed. (The distance and the angle from MH) are automatically positioned, so that the effect that the subject S is always located at the center of the imaging field, the effect that the focus adjustment can be simplified, and the like are obtained. The burden imposed on the measuring head MH for imaging and measuring the subject S is reduced.

  Furthermore, each time the holder HD is deployed, the rotary table 184 is always automatically positioned at the same normal position (distance and angle from the measuring head MH), and therefore, the entire position of the measuring head M that can be imaged is arranged. It becomes easy to image the subject S as large as possible on the entire screen within the imaging field of view. As a result, it becomes easy to improve the three-dimensional input accuracy of the subject S, and this also may reduce the burden imposed on the measurement head MH for imaging and measuring the subject S.

  Furthermore, according to the present embodiment, the rotary table unit RT and the measuring head MH are physically associated with each other by the holder HD that is deformable with geometric reproducibility. Therefore, according to this embodiment, the user can simplify the operation of storing the rotary table unit RT in the measuring head MH by the deformation of the holder HD, and the user can install the rotary table unit RT without any special consideration. It is possible to store in the measuring head MH in a compact manner.

  As is clear from the above description, in the present embodiment, the projection unit 12 constitutes an example of the “projection device” according to the item (1), and the light source unit 68 constitutes an example of the “light source” in the item. The light modulator 200 constitutes an example of the “light modulator” in the same term, and the projection optical system 32 constitutes an example of the “optical system” in the same term.

  Further, in the present embodiment, the light modulator 200 constitutes an example of the “transmission type light modulator” in the item (3), and the light rectilinear unit 310 corresponds to the “light rectilinear unit” in the item (5). One example is configured, and the light deflection unit 312 constitutes one example of the “light deflection unit” in the same section.

  Further, in the present embodiment, the projection unit 12 constitutes an example of the “projection device” according to the item (12), the light source unit 68 constitutes an example of the “electromagnetic wave source” in the item, and the light modulator 200. Constitutes an example of “electromagnetic wave modulator” in the same term, and the projection optical system 32 constitutes an example of “selection unit” in the same term.

  In addition, in the present embodiment, the light modulator 200 is configured to transmit light non-selectively with respect to space, but for example, light modulation with a format that performs light reflection non-selectively with respect to space. It is possible to change the body to implement the present invention.

  In addition, in this embodiment, the light modulator 200 is configured to include an optical rectilinear unit 310 that does not deflect incident light and an optical deflector 312 that deflects incident light. On the other hand, the light modulator 200 includes, for example, a small deflection unit and a large deflection unit that deflect incident light, and the large deflection unit deflects incident light at an angle larger than that of the small deflection unit. It is possible to carry out the present invention by substituting a light modulator including

  In addition, in this embodiment, a plurality of types of pattern light is selectively projected onto an object, but a three-dimensional input device that inputs a three-dimensional shape of the object by projecting fixed pattern light onto the object. It is possible to apply this invention to. In this case, a predetermined portion of the light modulator whose position is fixed with respect to the incident light has an action of dividing the incident light into a passing light component and a non-passing light component. As a result, like the above-described embodiment, it is easy to manufacture the three-dimensional input device at low cost while ensuring the input accuracy.

  As described above, some of the embodiments of the present invention have been described in detail with reference to the drawings. However, these are merely examples, and the knowledge of those skilled in the art including the aspects described in the above [Disclosure of the Invention] section. It is possible to implement the present invention in other forms in which various modifications and improvements are made based on the above.

It is a perspective view which shows the external appearance of the three-dimensional input device 10 according to one Embodiment of this invention in an unfolded state. It is the side view and back view which show the three-dimensional input device 10 shown in FIG. 1 in a partially expanded state. FIG. 2 is a partial cross-sectional rear view for explaining an attachment structure between a measurement head MH and a head base 130 in FIG. 1. FIG. 2 is a rear sectional view showing the rotary table unit RT in FIG. 1. It is the perspective view which shows the three-dimensional input device 10 shown in FIG. 1 in a storage state, and the perspective view for demonstrating a mode that the three-dimensional input device 10 is accommodated in the outer box OC. FIG. 2 is a plan sectional view showing an internal configuration of the measurement head MH in FIG. 1. It is a top view which expands and shows the projection part 12 in FIG. FIG. 2 is a block diagram conceptually showing an electrical configuration of the three-dimensional input device 10 shown in FIG. 1. It is a front view which shows the projection mechanism 66 in FIG. FIG. 10 is a partial cross-sectional plan view showing a main part of the projection mechanism 66 shown in FIG. 9. FIG. 10 is a partially enlarged front view showing a rotation angle adjusting mechanism 270 in FIG. 9. It is a front view which expands and shows the light modulator 200 in FIG. FIG. 13 is a cross-sectional view further enlarging a pair of light rectilinear portion 310 and light deflecting portion 312 in the light modulator 200 shown in FIG. 12. It is sectional drawing for demonstrating in principle the light deflection effect | action in each of the light rectilinear advance part 310 and the light deflection | deviation part 312 shown in FIG. FIG. 14 is a plurality of cross-sectional views illustrating a plurality of modified examples of the light deflection unit 312 illustrated in FIG. 13. It is a flowchart which represents notionally the main process performed in the camera control program in FIG. 17 is a flowchart conceptually showing stereoscopic image processing executed in S108 in FIG. FIG. 18 is a flowchart conceptually showing the three-dimensional color shape detection process executed in S1007 in FIG. 17 as a three-dimensional color shape detection process routine. FIG. 19 is a flowchart conceptually showing S1210 in FIG. 18 as an imaging processing program 404b. FIG. 20 is a flowchart conceptually showing the projection processing executed in S2007 in FIG. 19 as a projection processing subroutine. It is a timing chart for demonstrating an example of the action | operation of the three-dimensional input device 10 shown in FIG. FIG. 19 is a flowchart conceptually showing S1220 in FIG. 18 as a three-dimensional measurement processing subroutine. It is a flowchart which represents notionally the code image generation program 404d performed in S4002 in FIG. 19 is a flowchart conceptually showing S1230 in FIG. 18 as a three-dimensional color shape detection result generation routine.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 3D input device 12 Projection part 14 Imaging part 16 Processing part 24 Lens tube 32 Projection optical system 34 Projection lens 36 Diaphragm 66 Projection mechanism 68 Light source part 106 Incident surface 108 Output surface 200 Light modulator 260 Planar optical element 264 Substrate 310 Light straight section 312 Light deflection section

Claims (12)

A projection device that projects pattern light onto an object,
A light source;
A light modulator for emitting incident light from the light source after being at least partially modulated in an angular or luminous intensity distribution; and
An optical system that selectively allows passage of a plurality of angular components of light emitted from the light modulator and having a radiation angle characteristic suitable for a predetermined incident aperture; and
The light modulator performs optical modulation on the incident light depending on a surface shape of the light modulator,
The light modulator is configured such that at least one set of two portions having different surface shapes are arranged alternately in a direction along the light modulator,
From one of the two parts, an angle component having a radiation angle characteristic suitable for the incident aperture is emitted as a passing light component that subsequently passes through the optical system, while the other of the two parts. From the above, a projection device in which an angle component having a radiation angle characteristic that does not match the incident aperture is emitted as a non-passing light component that does not pass through the optical system thereafter.   The projection apparatus according to claim 1, wherein the light modulator extends in a direction that is in tolerance with the incident light.   The projection apparatus according to claim 1, wherein the light modulator is a transmissive type that transmits the incident light.   The projection device according to claim 1, wherein the light modulator is of a reflective type that reflects the incident light. One of the two parts has a surface perpendicular to the incident light, and is a light straight-ahead part that emits the incident light without being modulated by the surface,
The other of the two parts is a light modulator that has a surface inclined with respect to the incident light, and the incident light is modulated and emitted by the surface.
5. The light output from one of the light straight traveling part and the light modulation part is the passing light component, and the light emitted from the other is the non-passing light component. 6. Projection device. The two parts are two light modulators that both have a surface inclined with respect to the incident light, and the incident light is modulated and emitted by the surface,
The two light modulation units are different from each other in the angle of the surface with respect to the incident light, and the radiation angle characteristics of the emitted light from the respective light modulation units are also different from each other.
The projection apparatus according to claim 1, wherein light emitted from one of the two light modulation units is the passing light component, and light emitted from the other is the non-passing light component.   The projection device according to claim 1, wherein at least one of the two portions is configured as a roof prism.   The projection device according to claim 1, wherein at least one of the two portions has a mechanical random scattering shape as a surface shape thereof.   The projection apparatus according to claim 1, wherein at least one of the two parts is configured as a diffraction grating. The pattern light includes at least two types of pattern light,
The projection device according to claim 1, wherein the light modulator selectively moves the at least two kinds of pattern light onto the object by being moved relative to the incident light. .   The projection device according to claim 1, wherein the two portions are formed in a stripe shape. A projection device that projects a pattern electromagnetic wave on an object,
An electromagnetic source,
An electromagnetic wave modulator that emits an electromagnetic wave emitted from the electromagnetic wave source after being modulated at least partially in an electromagnetic power radiation distribution per angular or solid angle;
A selection unit that selectively allows passage of a plurality of angular components of the electromagnetic wave emitted from the electromagnetic wave modulator and having a radiation angle characteristic suitable for a predetermined incident aperture;
The electromagnetic wave modulator performs electromagnetic wave modulation depending on the surface shape of the electromagnetic wave modulator with respect to the incident electromagnetic wave,
The electromagnetic wave modulator is configured such that at least one set of two portions having different surface shapes are arranged alternately in a direction along the electromagnetic wave modulator,
From one of the two parts, an angle component having a radiation angle characteristic suitable for the incident aperture is emitted as a selected electromagnetic wave component that is then selected by the selection unit, while From the other side, a projection apparatus that emits an angle component having a radiation angle characteristic that does not match the incident aperture as a non-selective electromagnetic wave component that is not subsequently selected by the selection unit.

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