JP2006331763A - Plasma processing device and plasma processing method using the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a plasma processing device capable of processing an object to be processed continuously or in a manner of semi-batch, capable of reducing consumption amount of plasma generating gas, and an effective plasma processing method using the same. <P>SOLUTION: The plasma processing device is composed of a plasma generating means 1, a transport means 2, and in addition, a plasma generating gas (light gas) introducing means 3 capable of introducing light gas lighter than air as plasma generating gas G to the plasma generating means 1 and neighboring area thereof, and further, a gas storing means 4 arranged so as to cover the plasma generating means 1 from upper part thereof, capable of intensively storing plasma generating gas (light gas) G introduced from the plasma generating gas (light gas) introducing means 3 to the plasma generating means 1 and neighboring area thereof. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a plasma processing apparatus and a plasma processing method using the same. More specifically, a plasma processing apparatus capable of processing an object to be processed continuously or semi-batch and reducing the amount of plasma generating gas used, and an efficient plasma processing using the same. Regarding the method.

Medical devices such as syringes and blister packs, packaging materials such as wastes and foods, etc. need to be sterilized and sterilized before being used. As such an apparatus / method for sterilization / sterilization treatment, for example, a gas-sealed chamber having a roughened surface, an article (object to be sterilized) containing zone, and a sterilizer comprising a barrier means, and a load, Charging a gas-tight chamber having a roughened surface; introducing a bactericidal fluid into the chamber; exposing a load to the bactericidal fluid; generating plasma in the chamber; Disclosed is a sterilization method that includes a step of maintaining plasma for a certain period of time and can increase the steady concentration of active species in contact with a load (see Patent Document 1).
Japanese National Patent Publication No. 11-505166

  However, the sterilization apparatus and sterilization method disclosed in Patent Document 1 batch-processes a predetermined number of articles (substances to be sterilized) each time, and is sufficiently satisfactory in terms of sterilization efficiency. There was a problem of not getting.

  The present invention has been made in order to solve the above-described problem, and can treat the object to be treated continuously or semi-batch, and can reduce the amount of plasma generating gas used. It is an object of the present invention to provide a plasma processing apparatus and an efficient plasma processing method using the same.

  In order to achieve the above object, according to the present invention, the following plasma processing apparatus and a plasma processing method using the same are provided.

[1] Plasma generating means capable of generating plasma in an atmosphere containing a gas for generating plasma between opposing electrodes, carrying an object to be processed into the plasma generating means, and the inside of the plasma generating means And plasma generated by the plasma generating means when the object to be processed passes through the plasma generating means. A plasma processing apparatus including a transporting means capable of processing by the plasma generating apparatus, wherein a lighter gas than the air as the plasma generating gas can be introduced into the plasma generating means and the vicinity thereof Gas (light gas) introducing means, and the plasma generating means are disposed so as to cover from above, The plasma generating gas (light gas) introduced from the plasma generating gas (light gas) introducing means is further provided with a gas storing means capable of concentratingly storing the plasma generating gas (light gas) in the vicinity of the plasma generating means. A plasma processing apparatus.

[2] The plasma processing apparatus according to [1], wherein the plasma generating gas (light gas) is helium gas.

[3] From the plasma generation unit, the transfer unit can transfer the workpiece to the plasma generation unit, a passage unit that can pass through the plasma generation unit, and the plasma generation unit. An unloading unit that can be unloaded,
The passing portions of the plasma generating means, the gas storage means, and the transport means are disposed above the carry-in section and the carry-out section of the transport means, respectively, and the transport means is the object to be processed. A lifting part capable of raising an object from the placement position of the carry-in part to the placement position of the passage part and lowering the object from the placement position of the passage part to the placement position of the carry-out part; The plasma processing apparatus according to [1] or [2].

[4] The plasma processing apparatus according to any one of [1] to [3], wherein the object to be processed can be processed continuously or semi-batch by plasma generated by the plasma generating means.

[5] The plasma processing apparatus according to any one of [1] to [4], wherein the processing of the object to be processed is a sterilizing / sterilizing process of the object to be sterilized.

[6] The conveying means passes through the inside of the plasma generating means together with the object to be treated (sterilized / sterilized material) and is subjected to plasma treatment to sterilize / sterilize the object to be treated (sterilized / sterilized material). The plasma processing apparatus according to [5], further including a biological indicator mounting portion for mounting a biological indicator capable of verifying processing.
[7] The above-mentioned [5] or [6], wherein the plasma generating means has a sampling nozzle that enables sampling for verification of the presence or absence of bacteria in the plasma generating gas (light gas) existing in the plasma generating means The plasma processing apparatus according to 1.
[8] A plasma processing method for processing an object to be processed using the plasma processing apparatus according to any one of [1] to [7].

[9] The plasma processing method according to [8], wherein 0.1 to 25% oxygen gas is introduced into the gas storage means in addition to the plasma generating gas (light gas).

[10] The plasma processing method according to [8] or [9], in which plasma processing is performed after water is disposed in the vicinity of the processing object or after water is sprayed or added to the processing object in advance.

[11] The plasma processing method according to any one of [8] to [10], wherein the processing of the object to be processed is a sterilizing / sterilizing process of the object to be sterilized.

[12] The sterilization / sterilization of the object to be treated (sterilized / sterilized material) as the conveying means passes through the inside of the plasma generating means together with the object to be treated (sterilized / sterilized material). [11] The verification of the sterilization / sterilization treatment of the object to be processed (sterilized / sterilized) is performed using a biological indicator mounting part for attaching a biological indicator capable of verifying the process. The plasma processing method as described in any one of.

[13] Using the plasma generating means having a sampling nozzle capable of sampling for verifying the presence or absence of bacteria in the plasma generating gas (light gas) existing in the plasma generating means, The plasma processing method according to [11] or [12], wherein the presence or absence of bacteria in the gas (light gas) is verified.

  INDUSTRIAL APPLICABILITY According to the present invention, a plasma processing apparatus capable of processing an object to be processed continuously or semi-batch and reducing the amount of plasma generating gas used, and an efficient plasma processing using the same. A method is provided.

  Hereinafter, the best mode for carrying out the present invention will be specifically described with reference to the drawings.

  FIG. 1 shows a case where a three-dimensional device such as a syringe is used as an object to be processed in the plasma processing apparatus of the present invention, and the object to be processed can be continuously processed. It is explanatory drawing which shows this typically. FIG. 2 is a perspective view showing a specific example in the case where a flat electrode is used as an electrode in the first embodiment shown in FIG.

  As shown in FIGS. 1 and 2, the plasma processing apparatus according to the first embodiment is capable of generating plasma in an atmosphere containing a plasma generating gas G between the counter electrodes 11 and 12. The means 1 and the object to be processed S (three-dimensional equipment S1 such as a syringe) can be carried into the plasma generating means 1, passed through the inside of the plasma generating means 1, and unloaded from the plasma generating means 1. At the same time, when the object to be processed S (three-dimensional equipment S1 such as a syringe) passes through the plasma generating means 1, the object to be processed S (three-dimensional equipment S1 such as a syringe) was generated by the plasma generating means 1. A plasma processing apparatus 10 having a conveying means 2 capable of processing with plasma, and generating a light-weight gas that is lighter than air as a plasma generating gas G Plasma generating gas (light gas) introducing means 3 that can be introduced into the stage 1 and the vicinity thereof, and plasma generating gas (light gas) disposed so as to cover the plasma generating means 1 from above. ) The plasma generating gas (lightweight gas) G introduced from the introducing means 3 is further provided with the gas storing means 4 capable of concentratingly storing the gas in the plasma generating means 1 and the vicinity thereof.

  Further, the conveying means 2 can pass the workpiece S (three-dimensional equipment S1 such as a syringe) into the plasma generating means 1 and the inside of the plasma generating means 1. The passage section 22 and the unloading section 23 that can be unloaded from the plasma generation means 1, and the passage section 22 of the plasma generation means 1, the gas storage means 4, and the conveyance means 2 are the carry-in section 21 of the conveyance means 2. In addition, the transfer means 2 disposes the workpiece S (three-dimensional equipment S1 such as a syringe) from the disposition position of the carry-in portion 21 to the disposition portion 22. It is preferable to further include an elevating part 24 that can be raised to a position and lowered from the position where the passage part 22 is disposed to the position where the carry-out part 23 is disposed.

  In the first embodiment, a belt conveyor in which a belt is rotated by a roller is used as the carry-in unit 21, the passage unit 22, and the carry-out unit 23 of the transport unit 2. In this case, as shown in FIG. 2, it is preferable to use a mesh belt (mesh belt 29) as the conveyor belt so that the workpiece is uniformly irradiated with plasma. Although an insulating material is used for the mesh belt 29, a conductive material may be used, grounded, and discharge may be performed between the electrode 11 and the mesh belt 29 and between the electrode 12 and the mesh belt 29. Good. Further, a conveyor system using a roller instead of the mesh belt 29 may be used, and a roller may be used as an electrode to cause discharge between the electrodes 11 and 12. Further, the roller may be grounded and a discharge may be generated between the roller and the electrode 11 or the electrode 12. In the passage part 22, a plurality of rollers, a belt, a work object table (stopper), etc. are used to raise the work object S (three-dimensional equipment S1 such as a syringe) received from the carry-in part 21 and carry it out. The elevating part 24 is formed by being lowered toward the part 23. As the raising / lowering part 24, what was comprised like the belt conveyor which attached the stopper 25 for hold | maintaining a to-be-processed object can be mentioned, for example.

  Examples of the object to be processed S used in the present embodiment include medical equipment, food packaging sheets, and the like. In particular, it is particularly effective for those to which high temperature treatment cannot be applied. Specifically, blister packs, blister pack sheets, syringes, syringe gaskets, vial rubber stoppers, injection needles, gauze, non-woven fabrics and other medical equipment; food packaging sheets; semiconductor wafers; liquid crystal glass substrates; ceramics A substrate etc. can be mentioned. It can also be used for sterilization and sterilization of prefilled syringes injected with antibody drugs and protein preparations, or blister packs containing prefilled syringes. In addition, as a shape of the to-be-processed object S, any one of three-dimensional equipment S1 such as a syringe in the first embodiment, a long sheet S2 and a short sheet S3 in second to third embodiments to be described later. It may be of a shape.

  The plasma generating gas (light gas) G used in the present embodiment is not particularly limited as long as it is lighter than air and has a lower excitation voltage. For example, rare gas (helium, argon, neon) Etc.), nitrogen gas, oxygen gas, hydrogen, air (atmosphere), chlorine gas, ammonia gas, SF6, CF-based gas and the like. Among these, helium gas is preferred because it has the lowest excitation voltage and discharge is likely to occur. In addition, liquids such as hydrogen peroxide, peracetic acid, ethanol, methanol, water, etc. may be sprayed or evaporated to form a mist, and moisture may be added near the object to be treated (sterilized / sterilized). May be provided. By comprising in this way, OH radical etc. can be produced | generated and it can use for processes, such as a sterilization / sterilization use, a semiconductor wafer, organic substance removal on a glass, and surface modification. Moreover, you may use the above-mentioned gas and liquid individually or as a mixture combined with other gas and liquid. Further, in addition to the plasma generating gas (light gas), 0.1 to 25% oxygen gas may be introduced into the gas storage means. By comprising in this way, oxygen can be activated, an oxygen radical, ozone gas can be produced | generated, and it can use for processes, such as a disinfection / sterilization use, a semiconductor wafer, organic substance removal on a glass, and surface modification. Since helium gas or the like may slightly leak from the gas storage means, it is preferable to periodically replenish from the plasma generation gas (light gas) introduction means.

  There is no restriction | limiting in particular as a plasma generation means used for this Embodiment, The thing generally used can be used suitably. For example, as shown in FIG. 2, a substrate in which electrodes 11 and 12 are embedded in a dielectric substrate 13 can be used. Here, although there is no restriction | limiting in particular as a dielectric material which comprises the board | substrate 13, For example, ceramics can be mentioned. Of these, alumina, magnesia, zirconia, silica, mullite, spinel, cordierite, aluminum nitride, silicon nitride, titanium-barium oxide, barium-titanium-zinc oxide, and the like are preferable. The substrate 13 can be produced by a so-called green sheet lamination method.

  Moreover, there is no restriction | limiting in particular also about the material of an electrode, What is necessary is just a material which has predetermined electroconductivity. Specifically, tungsten, molybdenum, manganese, titanium, chromium, zirconium, nickel, silver, iron, copper, platinum, palladium, or an alloy thereof can be given. In addition, the shape of the electrode may be any of a flat plate, a linear shape, a coaxial cylindrical shape, and the like. The planar pattern can be appropriately selected according to the type of active species, the lifetime, and the generation amount. For example, the planar pattern of the electrodes may be comb-like or mesh-like.

  The plasma generating gas (light gas) G is introduced from the plasma generating gas (light gas) introduction means 3 to the gas storage means 4, but the plasma generating gas (light gas) introduction means 3 is particularly limited. However, for example, a light gas gas decompressed from a commercially available gas cylinder through a regulator and a flow rate controlled by a flow meter can be cited as a suitable example.

  The gas storage means 4 is not particularly limited as long as the gas for generating plasma (lightweight gas) G can be stored in a concentrated manner in the plasma generation means 1 and its vicinity. As a suitable example, an inorganic material such as glass or ceramics, or a box-shaped resin material such as acrylic or polypropylene, whose upper end is hermetically sealed can be given.

  FIG. 3 schematically shows a second embodiment in which a long sheet is used as an object to be processed in the plasma processing apparatus of the present invention, and the object to be processed can be continuously processed. It is explanatory drawing shown in. FIG. 4 is a perspective view showing a specific example in the case where a flat electrode is used as an electrode in the second embodiment shown in FIG.

  As shown in FIGS. 3 and 4, the plasma processing apparatus of the second embodiment is a case where a long sheet S2 is used as the object to be processed S. In this case, the mesh belt (see FIG. 2) is used. The long sheet S2 itself can be viewed as a belt and transported without being placed. That is, the roll of the long sheet S2 before the process wound around the roller 26 is used to move the workpiece S (long sheet S2) from the carry-in part 21 of the conveying means 2 toward the passing part 22 using a plurality of rollers. While raising and lowering, it is comprised toward the carrying-out part 23, and the raising / lowering part 24 is formed. Moreover, in the carrying-out part 23, the long sheet S2 after a process is wound around the roller 27, and it winds up in roll shape.

  FIG. 5 schematically shows a third embodiment in which a short sheet is used as an object to be processed in the plasma processing apparatus of the present invention, and the object to be processed can be continuously processed. It is explanatory drawing shown. FIG. 6 is a perspective view showing a specific example when a flat plate-type electrode is used as an electrode in the third embodiment shown in FIG. 5, and FIG. 7 is an electrode in the third embodiment shown in FIG. It is a perspective view which shows the specific example at the time of using a linear type electrode and a flat plate type electrode as.

  As shown in FIGS. 5-7, the plasma processing apparatus of 3rd Embodiment is a case where the short sheet S3 is used as the to-be-processed object S, and a fundamental structure is the above-mentioned 1st Embodiment. The guide roller 28 is disposed so that the short sheet S3 does not deviate from the carry-in part 21, the passage part 22 and the carry-out part 23 (particularly the lifting part 24) of the conveying means 2. ing.

  FIG. 8 (a) shows a case where a three-dimensional device such as a syringe is used as an object to be processed and a parallel plate electrode is used as an electrode in the plasma processing apparatus of the present invention. FIG. 8B is an explanatory view schematically showing a fourth embodiment that can be performed, and shows a state in which the object to be processed is moved to a position just below the passage part at the carry-in part, and FIG. 8 (c) shows a state in which the object to be processed is processed by the passage (plasma generating means), and FIG. 8 (d) The state which moves a to-be-processed object from a passage part to right under a passage part by a raising / lowering part is shown, and FIG.8 (e) shows the state carried out by the carrying-out part from right under a passage part. FIG. 9 is a perspective view showing one specific example of the fourth embodiment shown in FIG. 8, and FIG. 10 is a perspective view showing another specific example of the fourth embodiment shown in FIG. is there.

  As shown in FIGS. 8 to 10, the plasma processing apparatus according to the fourth embodiment is capable of generating plasma in an atmosphere containing a plasma generating gas G between the counter electrodes 11 and 12. The means 1 and the object to be processed S (three-dimensional equipment S1 such as a syringe) can be carried into the plasma generating means 1, passed through the inside of the plasma generating means 1, and unloaded from the plasma generating means 1. At the same time, when the object to be processed S (three-dimensional equipment S1 such as a syringe) passes through the plasma generating means 1, the object to be processed S (three-dimensional equipment S1 such as a syringe) was generated by the plasma generating means 1. A plasma processing apparatus 10 having a conveying means 2 capable of processing by plasma, and generating a light-weight gas that is lighter than air as a plasma generating gas G. Plasma generating gas (light gas) introducing means 3 that can be introduced in the vicinity of the means 1 and plasma generating gas (light gas) disposed so as to cover the plasma generating means 1 from above. ) The plasma generating gas (lightweight gas) G introduced from the introducing means 3 is further provided with the gas storing means 4 capable of concentratingly storing the gas in the plasma generating means 1 and the vicinity thereof.

  Further, as shown in FIG. 8A, the conveying means 2 moves the object to be processed S (three-dimensional equipment S1 such as a syringe) to a position just below a passage portion 22 (see FIG. 8C) described later. As shown in FIG. 8 (c), the carry-in portion 21 that can be carried into the plasma generation means 1 and the inside of the plasma generation means 1 to pass through the plasma generation means 1, and the workpiece S (Passing part 22 capable of processing a three-dimensional device S1 such as a syringe) and, as shown in FIG. 8 (e), directly below the plasma generating means 1 (passing part 22 (see FIG. 8 (c))). The plasma generating means 1, the gas storage means 4, and the passing section 22 of the transport means 2 are respectively located above the carry-in section 21 and the carry-out section 23 of the transport means 2. 8 (b), ( ), The conveying means 2 moves the processing object S (three-dimensional equipment S1 such as a syringe) from the arrangement position of the carry-in section 21 (position just below the passage section 22) to the arrangement position of the passage section 22. It is preferable to further include an elevating part 24 that can be moved up to and lowered from the position where the passage part 22 is disposed to the position where the carry-out part 23 is disposed (a position directly below the passage part 22).

  In 4th Embodiment, the thing of the belt conveyor system which a belt rotates with a roller can be mentioned as the carrying-in part 21 and the carrying-out part 23 of the conveyance means 2, for example. Further, the passage portion 22 can be configured by using a part of the elevating unit 24 (a portion of the elevating unit 24 located inside the plasma generating unit 1). Moreover, the raising / lowering part 24 can be raised / lowered by the lift using hydraulic pressure, electricity, etc., for example.

  FIG. 11A shows a case in which a three-dimensional device such as a syringe is used as an object to be processed and a coaxial cylindrical electrode is used as an electrode in the plasma processing apparatus of the present invention. It is explanatory drawing which shows typically 5th Embodiment which can do, and shows the state which moves a to-be-processed object to just under a passage part by a carrying-in part, FIG.11 (b) is a to-be-processed object 11 (c) shows a state in which the object to be processed is processed by the passage (plasma generating means), and FIG. 11 (d) The state which moves a to-be-processed object from a passage part to right under a passage part by a raising / lowering part is shown, and FIG.11 (e) shows the state carried out by the carrying-out part from right under a passage part. FIG. 12 is a perspective view showing a specific example of the fifth embodiment shown in FIG.

  The basic configuration of the fifth embodiment is the same as that of the fourth embodiment except that a coaxial cylindrical electrode is used as the electrode. In the case of the fourth embodiment, parallel plate electrodes are used as the electrodes. As a specific example of such a configuration, for example, as the gas storage means 4, a tubular body made of quartz, acrylic, glass, ceramics or the like whose upper end is blocked is used, and on the outer wall of the tubular body, as one electrode, A thin plate made of stainless steel, aluminum, copper or the like is wound around a coaxial cylindrical shape, and as the other electrode, a stainless steel linear body is disposed along the central axis of one electrode of the coaxial cylindrical shape, and between these electrodes. For example, plasma can be generated by applying a voltage to cause discharge.

  The plasma processing apparatus of the present invention can process an object to be processed continuously or semi-batch by plasma generated by plasma generating means, and can improve processing efficiency.

  The plasma processing apparatus of the present invention can be used for various processes such as sterilization / sterilization processing, organic substance removal processing, surface modification processing, etching, and ion implantation.

  In the plasma processing apparatus of the present invention, as will be described in detail later, the conveying means 2 (for example, the passage portion 22) passes through the inside of the plasma generating means 1 together with the object to be processed (sterilized / sterilized object) S. A biological indicator for attaching a biological indicator B (see FIGS. 13 (a) and 13 (b)) that can be verified with the sterilization and sterilization treatment of the object to be treated (sterilized / sterilized) S. It is preferable that it has the part 29a.

  Further, in the plasma processing apparatus of the present invention, as will be described in detail later, the plasma generating means 1 can perform sampling for verifying the presence or absence of bacteria in the plasma generating gas (light gas) G existing therein. It is preferable to have a sampling nozzle 14.

  As shown in FIG. 13 (a), the biological indicator mounting portion 29a may have a clip shape and a structure that sandwiches the biological indicator B. As shown in FIG. 13 (b), A configuration having a mesh-like box shape and accommodating the biological indicator B may be used. In this way, the biological indicator mounting portion 29a is disposed, for example, at a predetermined location of the passage portion 22 (for example, the mesh belt 29) of the transport means 2 (see FIGS. 1 and 5), and is sandwiched and stored therein. The biological indicator B is exposed to plasma in the same manner as the object to be processed.

  The plasma processing method of the present invention is characterized by processing an object to be processed using the above-described plasma processing apparatus. That is, using a gas storage means capable of storing a plasma generation gas (light weight gas) introduced from a plasma generation gas (light weight gas) introduction means, the plasma generation gas (light weight gas) is converted into plasma generation means. And a to-be-processed object can be processed in the state stored intensively in the vicinity. For this reason, it is possible to save the amount of plasma generation gas (lightweight gas) used, and to realize efficient plasma processing.

  In the plasma processing method of the present invention, preferably 0.1 to 25%, more preferably 1 to 10% of oxygen gas is introduced into the gas storage means in addition to the plasma generating gas (light gas). . By comprising in this way, oxygen can be activated, an oxygen radical, ozone gas can be produced | generated, and it can use for processes, such as a disinfection / sterilization use, a semiconductor wafer, organic substance removal on a glass, and surface modification. In addition, it is preferable to perform plasma treatment after disposing moisture in the vicinity of the object to be processed, or after previously spraying or adding moisture to the object to be processed. By comprising in this way, OH radical etc. can be produced | generated and it can use for processes, such as a sterilization / sterilization use, a semiconductor wafer, organic substance removal on a glass, and surface modification.

  In the plasma processing method of the present invention, the treatment of the object to be treated is preferably a sterilization / sterilization treatment of the object to be sterilized / sterilized. In order to verify the sterilization and sterilization effects, a biological indicator, which will be described in detail later, is moved along with the object to be treated (to be sterilized and sterilized) in the processing apparatus, and this is collected when it leaves the processing apparatus. In order to be able to evaluate the degree of sterilization and sterilization, for example, by installing a biological indicator mounting part in the passage part of the transport means, verification of sterilization and sterilization treatment of the object to be processed (sterilized and sterilized object) It is preferable to do. Further, the plasma generating gas (light gas) in the plasma processing chamber is sampled, and the presence or absence of bacteria in the plasma generating gas (light gas) is detected by ATP (adenosine 3) in the cells. It is possible to verify the presence or absence of bacteria in lightweight gas by providing a sampling nozzle in the plasma generation means so that it can be used for verification of sterilization and sterilization effects by plasma treatment by detecting phosphoric acid) with a reagent preferable.

  EXAMPLES Hereinafter, the present invention will be described more specifically with reference to examples, but the present invention is not limited to these examples.

Example 1
Four plate electrodes of 50mm x 90mm are used, two upper surfaces and two lower surfaces are arranged facing each other, the electrode interval is set to 5-15mm, and an 80mm x 80mm polypropylene sheet is placed between them to sterilize and sterilize the surface. went. At this time, the four electrodes were covered with a 150 mm × 150 mm × 50 mm stainless steel container sealed at the upper end, and this was used as a reactor. An SI thyristor pulse power source (peak voltage: 1 to 20 kV, frequency: 0.1 to 5 kHz) was used as a plasma generator. The power consumption was 20 to 400W. Helium (about 1000 mL) and oxygen (about 100 mL) were mixed and charged into the reactor. The evaluation of sterilization and sterilization effect was performed using a biological indicator (manufactured by Raven, USA, hereinafter abbreviated as “BI”) of Bacillus subtilis (Geobacillus stearothermophilus (ATCC # 7953)). Cellulose carrier with 1 × 10 ⁶ bacteria attached is glassine paper (glassine paper: there are about 200 meshes per 1 mm square, preventing entry of bacteria from outside and scattering of internal spores, and air flow Is embedded in an easy structure). A predetermined number of test paper-type BIs were pasted onto a polypropylene sheet, and after sterilization and sterilization treatment, the carrier was taken out from the primary package (glassine paper) in an aseptic condition and cultured. The culture medium in which TSB (Tryptic Soy Broth.) Medium and pH indicator (Bromocresol Purple) manufactured by Acumedia are placed in a glass test tube is used for culturing. The sample was kept in a test tube and cultured at 58-60 ° C. for 7 days, and the presence or absence of sterilization / sterilization was confirmed by the change in the color of the culture solution. It was found that there was no change in the color of the culture solution and that it was sterilized and sterilized. If sterilization / sterilization is poor, the culture solution changes from purple to yellow. As a result of the plasma discharge, it was possible to sterilize and sterilize by discharging for 1 minute. Furthermore, sterilization and sterilization are possible in a short time by applying energy. The gas leakage at this time was about 1%.

  The plasma processing apparatus of the present invention and the plasma processing method using the same are used in various industrial fields that require various processing such as sterilization / sterilization processing, organic substance removal processing, surface modification processing, etc., for example, medical equipment, food products Effectively used in the field of manufacturing and handling packaging sheets, semiconductor wafers and the like.

The plasma processing apparatus of this invention WHEREIN: It is a case where three-dimensional equipments, such as a syringe, are used as a to-be-processed object, Comprising: 1st Embodiment which can process a to-be-processed object continuously is typically It is explanatory drawing shown. It is a perspective view which shows the specific example at the time of using a flat type electrode as an electrode in 1st Embodiment shown in FIG. Explanatory drawing which shows typically 2nd Embodiment which is a case where a long sheet | seat is used as a to-be-processed object in the plasma processing apparatus of this invention, and can process a to-be-processed object continuously. It is. It is a perspective view which shows one specific example at the time of using a flat type electrode as an electrode in 2nd Embodiment shown in FIG. In the plasma processing apparatus of this invention, it is a case where a short sheet | seat is used as a to-be-processed object, Comprising: It is explanatory drawing which shows typically 3rd Embodiment which can process a to-be-processed object continuously. is there. It is a perspective view which shows a specific example at the time of using a flat type electrode as an electrode in 3rd Embodiment shown in FIG. It is a perspective view which shows the specific example at the time of using a linear type electrode and a flat plate type electrode as an electrode in 3rd Embodiment shown in FIG. FIG. 8 (a) shows a case where a three-dimensional device such as a syringe is used as an object to be processed and a parallel plate electrode is used as an electrode in the plasma processing apparatus of the present invention. FIG. 8B is an explanatory view schematically showing a fourth embodiment that can be performed, and shows a state in which the object to be processed is moved to a position just below the passage part at the carry-in part, and FIG. 8 (c) shows a state in which the object to be processed is processed by the passage (plasma generating means), and FIG. 8 (d) The state which moves a to-be-processed object from a passage part to right under a passage part by a raising / lowering part is shown, and FIG.8 (e) shows the state carried out by the carrying-out part from right under a passage part. It is a perspective view which shows one specific example of 4th Embodiment shown in FIG. It is a perspective view which shows the other specific example of 4th Embodiment shown in FIG. FIG. 11A shows a case in which a three-dimensional device such as a syringe is used as an object to be processed and a coaxial cylindrical electrode is used as an electrode in the plasma processing apparatus of the present invention. It is explanatory drawing which shows typically 5th Embodiment which can do, and shows the state which moves a to-be-processed object to just under a passage part by a carrying-in part, FIG.11 (b) is a to-be-processed object 11 (c) shows a state in which the object to be processed is processed by the passage (plasma generating means), and FIG. 11 (d) The state which moves a to-be-processed object from a passage part to right under a passage part by a raising / lowering part is shown, and FIG.11 (e) shows the state carried out by the carrying-out part from right under a passage part. It is a perspective view which shows one specific example of 5th Embodiment shown in FIG. Fig.13 (a) is explanatory drawing which shows typically an example of the biological indicator attachment part used for the plasma processing apparatus of this invention, FIG.13 (b) is another example of the biological indicator attachment part. It is explanatory drawing shown typically.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Plasma generation means, 2 ... Conveyance means, 3 ... Plasma generation gas (light weight gas) introduction means, 4 ... Gas storage means, 10 ... Plasma processing apparatus, 11 ... Counter electrode, 12 ... Counter electrode, 13 ... Substrate, DESCRIPTION OF SYMBOLS 14 ... Sampling nozzle, 21 ... Carry-in part, 22 ... Passing part, 23 ... Unloading part, 24 ... Lifting part, 25 ... Stopper, 26 ... Roller, 27 ... Roller, 28 ... Guide roller, 29 ... Mesh belt, 29a ... Bio Logical indicator mounting portion, B: Biological indicator, G: Plasma generating gas (light weight gas), S (S1, S2, S3): Work piece.

Claims (13)

Plasma generating means capable of generating plasma in an atmosphere including a gas for generating plasma between the counter electrodes, carrying an object to be processed into the plasma generating means, and passing the inside of the plasma generating means And the plasma generating means can each be carried out, and when the object to be processed passes through the plasma generating means, the object to be processed is processed by the plasma generated by the plasma generating means. A plasma processing apparatus comprising a transfer means capable of
A plasma generating gas (light gas) introducing means capable of introducing a light weight gas that is lighter than air as the plasma generating gas into the plasma generating means and the vicinity thereof; and
The plasma generating gas (light gas) introduced from the plasma generating gas (light gas) introducing means, which is disposed so as to cover the plasma generating means from above, is introduced to the plasma generating means and the vicinity thereof. A plasma processing apparatus, further comprising gas storage means capable of storing in a concentrated manner.   The plasma processing apparatus according to claim 1, wherein the plasma generating gas (light gas) is helium gas. The transporting unit transports the workpiece to the plasma generating unit, a passing unit capable of passing the inside of the plasma generating unit, and unloads the plasma processing unit from the plasma generating unit. An unloading part capable of
The passing portions of the plasma generating means, the gas storage means, and the transport means are disposed above the carry-in section and the carry-out section of the transport means, respectively, and the transport means is the object to be processed. A lifting part capable of raising an object from the placement position of the carry-in part to the placement position of the passage part and lowering the object from the placement position of the passage part to the placement position of the carry-out part; The plasma processing apparatus according to claim 1 or 2.   The plasma processing apparatus according to any one of claims 1 to 3, wherein the object to be processed can be processed continuously or semi-batch by plasma generated by the plasma generating means.   The plasma processing apparatus according to claim 1, wherein the processing of the object to be processed is a sterilizing / sterilizing process of the object to be sterilized / sterilized.   Verification of the sterilization / sterilization treatment of the object to be processed (sterilized / sterilized material) by the transfer means passing through the inside of the plasma generating means together with the object to be processed (sterilized / sterilized) The plasma processing apparatus according to claim 5, further comprising a biological indicator mounting portion for mounting a biological indicator capable of performing the above.   The plasma processing apparatus according to claim 5 or 6, wherein the plasma generating means has a sampling nozzle that enables sampling for verification of the presence or absence of bacteria in the plasma generating gas (light gas) existing therein. .   A plasma processing method of processing an object to be processed using the plasma processing apparatus according to any one of 1 to 7 above.   The plasma processing method according to claim 8, wherein 0.1 to 25% of oxygen gas is introduced into the gas storage means in addition to the plasma generating gas (light gas).   The plasma processing method according to claim 8 or 9, wherein plasma processing is performed after water is disposed in the vicinity of the object to be processed, or after water is sprayed or added to the object to be processed in advance.   The plasma processing method according to claim 8, wherein the processing of the object to be processed is a sterilizing / sterilizing process of the object to be sterilized / sterilized.   Verification of the sterilization / sterilization treatment of the object to be treated (sterilized / sterilized material) by passing through the inside of the plasma generating means together with the object to be treated (sterilized / sterilized) as the conveying means The plasma according to claim 11, wherein the sterilization / sterilization treatment of the object to be processed (sterilized / sterilized) is verified by using a biological indicator attaching part for attaching a biological indicator capable of being treated. Processing method.   As the plasma generating means, a device having a sampling nozzle capable of sampling for verifying the presence or absence of bacteria in the plasma generating gas (light gas) existing inside the plasma generating gas (light weight) The plasma processing method according to claim 11 or 12, wherein the presence or absence of bacteria in the gas) is verified.

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