JP2006329857A5 - - Google Patents

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JP2006329857A5
JP2006329857A5 JP2005155314A JP2005155314A JP2006329857A5 JP 2006329857 A5 JP2006329857 A5 JP 2006329857A5 JP 2005155314 A JP2005155314 A JP 2005155314A JP 2005155314 A JP2005155314 A JP 2005155314A JP 2006329857 A5 JP2006329857 A5 JP 2006329857A5
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Japan
Prior art keywords
light
optical path
changing
path length
length control
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JP2005155314A
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Japanese (ja)
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JP2006329857A (en
JP4769490B2 (en
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Priority to JP2005155314A priority Critical patent/JP4769490B2/en
Priority claimed from JP2005155314A external-priority patent/JP4769490B2/en
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Publication of JP2006329857A5 publication Critical patent/JP2006329857A5/ja
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Publication of JP4769490B2 publication Critical patent/JP4769490B2/en
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Claims (8)

光の進行方向を変えるための部材を含み構成される固定部と、
光の進行方向を変えるための部材を含み構成され、且つ前記固定部との距離を変えるための駆動ステージから成る可動部と、
光が前記可動部と前記固定部との間を進むための少なくとも3つの光路と、を備え、
前記駆動ステージを制御することにより、前記光路を進む光に対して、前記距離と該光路の数との積から得る遅延時間を与えることを特徴とする光路長制御装置。
A fixed portion including a member for changing the traveling direction of light; and
A movable part configured to include a member for changing the traveling direction of light and comprising a driving stage for changing the distance from the fixed part;
And at least three optical paths for light to travel between the movable part and the fixed part,
An optical path length control device characterized in that a delay time obtained from a product of the distance and the number of optical paths is given to light traveling along the optical path by controlling the driving stage.
前記駆動ステージは、モーターあるいはピエゾ素子により構成されていることを特徴とする請求項1に記載の光路長制御装置。 The optical path length control device according to claim 1, wherein the drive stage is configured by a motor or a piezo element. 前記光の進行方向を変えるための部材が、前記可動部と前記固定部よりも小さい複数のミラーあるいはプリズムによって形成されていることを特徴とする請求項1あるいは2に記載の光路長制御装置。 The optical path length control device according to claim 1 or 2, wherein the member for changing the traveling direction of the light is formed by a plurality of mirrors or prisms smaller than the movable portion and the fixed portion. 前記光の進行方向を変えるための部材が、U字形状あるいはJ字形状に曲げられた光ファイバーにより形成されていることを特徴とする請求項1あるいは2に記載の光路長制御装置。 3. The optical path length control device according to claim 1, wherein the member for changing the traveling direction of the light is formed of an optical fiber bent into a U shape or a J shape. 前記光路は、光が前記可動部と前記固定部との間を往復するように構成されていることを特徴とする請求項1乃至4のいずれか1項に記載の光路長制御装置。 5. The optical path length control device according to claim 1, wherein the optical path is configured such that light reciprocates between the movable portion and the fixed portion. 6. 請求項1から5のいずれか1項に記載の光路長制御装置を含み構成される装置であって、
前記光が照射されることによりテラヘルツ波を発生あるいは検出することのできる光伝導素子を有し、
前記駆動ステージを制御することにより、前記光路を進む光が前記光伝導素子に到達するまでの遅延時間を変化させることを特徴とする装置。
An apparatus including the optical path length control apparatus according to any one of claims 1 to 5,
Having a photoconductive element capable of generating or detecting terahertz waves when irradiated with the light;
An apparatus characterized by changing a delay time until light traveling on the optical path reaches the photoconductive element by controlling the driving stage.
請求項1から5のいずれか1項に記載の光路長制御装置を含み構成される装置であって、
前記光をビームスプリッタで2つに分割するためのビームスプリッタと、
前記ビームスプリッタが分割した前記光の一方が照射されることによりテラヘルツ波を発生させることのできる発生用光伝導素子と、
被検物を透過あるいは反射したテラヘルツ波を検出するための検出用光伝導素子と、を有し、
前記駆動ステージを制御することにより、前記ビームスプリッタが分割した前記光の他方が前記検出用光伝導素子に到達するまでの遅延時間を変化させることにより、前記透過あるいは反射したテラヘルツ波の時間波形を取得することを特徴とする装置。
An apparatus including the optical path length control apparatus according to any one of claims 1 to 5,
A beam splitter for dividing the light into two by a beam splitter;
A generating photoconductive element capable of generating a terahertz wave by being irradiated with one of the lights divided by the beam splitter;
A photoconductive element for detection for detecting a terahertz wave transmitted or reflected by the test object,
By controlling the driving stage, the time waveform of the transmitted or reflected terahertz wave is changed by changing the delay time until the other of the light divided by the beam splitter reaches the detection photoconductive element. An apparatus characterized by acquiring.
前記時間波形を用いて、被検物の物性を検知あるいは位置や運動をセンシングすることを特徴とする請求項7に記載の装置。 8. The apparatus according to claim 7, wherein the time waveform is used to detect a physical property of the test object or to sense a position and a motion.
JP2005155314A 2005-05-27 2005-05-27 Optical path length control device Expired - Fee Related JP4769490B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005155314A JP4769490B2 (en) 2005-05-27 2005-05-27 Optical path length control device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005155314A JP4769490B2 (en) 2005-05-27 2005-05-27 Optical path length control device

Publications (3)

Publication Number Publication Date
JP2006329857A JP2006329857A (en) 2006-12-07
JP2006329857A5 true JP2006329857A5 (en) 2008-07-31
JP4769490B2 JP4769490B2 (en) 2011-09-07

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JP2005155314A Expired - Fee Related JP4769490B2 (en) 2005-05-27 2005-05-27 Optical path length control device

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Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007327897A (en) * 2006-06-09 2007-12-20 Tochigi Nikon Corp Terahertz spectroscopic device
JP5037929B2 (en) * 2006-12-18 2012-10-03 キヤノン株式会社 Information acquisition apparatus and method for an object using terahertz waves
JP2008209233A (en) * 2007-02-26 2008-09-11 Naohiro Tanno Optical coherence tomographic device for spectral domain
JP5357531B2 (en) * 2008-02-05 2013-12-04 キヤノン株式会社 Information acquisition apparatus and information acquisition method
JP5125858B2 (en) * 2008-08-01 2013-01-23 ソニー株式会社 Optical delay device
JP2016017762A (en) 2014-07-04 2016-02-01 株式会社東芝 Optical delay device and optical coherence tomography device

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5789750A (en) * 1996-09-09 1998-08-04 Lucent Technologies Inc. Optical system employing terahertz radiation
JP4248665B2 (en) * 1999-03-25 2009-04-02 日本分光株式会社 Infrared spectrometer
JP4368082B2 (en) * 1999-06-21 2009-11-18 浜松ホトニクス株式会社 Terahertz wave spectrometer
JP3896532B2 (en) * 1999-07-09 2007-03-22 独立行政法人科学技術振興機構 Terahertz complex permittivity measurement system
JP2003149139A (en) * 2001-11-07 2003-05-21 Mitsubishi Electric Corp Streaming electrification field evaluation system
JP2005069840A (en) * 2003-08-22 2005-03-17 Japan Science & Technology Agency Optical path difference compensation mechanism for obtaining time sequential signal of time sequence conversion pulse spectrum measuring device

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