JP2006323173A - Ultraviolet microscope - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To accurately inform that illumination with ultraviolet light is performed. <P>SOLUTION: The first illuminating light being wavelength light in an ultraviolet region which is emitted from a light source 35 and whose wavelength is selected by a wavelength selection element 36 is split in two directions by a light splitting element 40, and one among two of the first illuminating lights is radiated to a screen 46 provided at a position where observation can be performed from the outside of an ultraviolet light illumination part 29, and a fluorescence in a visible region is emitted from the screen 46. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to an ultraviolet microscope capable of observing an enlarged image of a sample by selectively switching between visible light observation and ultraviolet light observation, for example.

In recent years, a new optical system is required for a microscope in response to a demand for higher magnification and a higher resolution. One of the new optical systems is an ultraviolet microscope. This ultraviolet microscope realizes high resolution by using wavelength light in the ultraviolet region.
The illumination system used for visible light observation and ultraviolet light observation has respective dedicated light sources for visible light observation and ultraviolet light observation, and according to switching to these visible light observation or ultraviolet light observation. Each illumination light is switched by turning on or off each light source, or opening or closing each shutter on the optical path of each light source.

  On the other hand, when switching between visible light observation and ultraviolet light observation, an objective lens and an optical system for acquiring a magnified observation image, for example, an imaging optical system, a magnified image observation optical system, etc. Often switched to observation only. That is, the illumination system, the objective lens, the imaging optical system, and the like must be used in a combination dedicated to visible light or ultraviolet light. For this reason, it is necessary to determine whether any one of visible light and ultraviolet light is irradiated. Especially for ultraviolet light, since the ultraviolet light itself is invisible light, an optical system dedicated to ultraviolet light observation is required to detect the state of irradiation with ultraviolet light by some means.

An ultraviolet microscope is disclosed in Patent Document 1, for example. FIG. 6 is a block diagram of a control system of the ultraviolet microscope disclosed in Patent Document 1. The electric revolver 1 is equipped with a visible light objective lens 2 and an ultraviolet light objective lens 3. The electric revolver 1 is rotated by driving a revolver drive motor 4, and either the visible light objective lens 2 or the ultraviolet light objective lens 3 is arranged on the observation optical axis P. A plurality of visible light objective lenses 2 are attached to the electric revolver 1. The objective lens sensor 5 detects whether one of the visible light objective lens 2 and the ultraviolet light objective lens 3 is arranged on the observation optical axis P.
A filter block 6 is provided on the observation optical axis P. The filter block 6 is switched to either the visible light illumination system or the ultraviolet light illumination system by driving the filter drive motor 7. The filter sensor 8 detects a visible light illumination system or an ultraviolet light illumination system currently used depending on the position of the filter block 6, and for example, a photo sensor is used.

The CPU 9 issues drive commands to the revolver drive motor 4 and the filter drive motor 7 and takes in detection signals from the objective lens sensor 5 and the filter sensor 8. An operation unit 10 and a memory 11 are connected to the CPU 9. The operation unit 10 has buttons for instructing switching of illumination systems, switching of objective lenses, and the like. The memory 11 stores information such as the mounting position information of the visible light objective lens 2 and the ultraviolet light objective lens 3 and an appropriate combination of the illumination system with the visible light objective lens 2 and the ultraviolet light objective lens 3. Has been. Therefore, the CPU 9 takes in each detection signal from the filter sensor 8 and the objective lens sensor 5, issues each drive command to the revolver drive motor 4 and the filter drive motor 7 based on the information stored in the memory 11, and makes visible light The objective lens 2 for ultraviolet light or the objective lens 3 for ultraviolet light and the visible light illumination system or the ultraviolet light illumination system are set in an appropriate state.
JP-A-11-52253

  In Patent Document 1, the position of the filter block 6 is detected by the filter sensor 8, or the visible light objective lens 2 or the ultraviolet light objective lens 3 is detected by the objective lens sensor 5, and the CPU 9 detects the filter sensor 8 or objective lens. Since each detection signal from the sensor 5 is processed and a drive command is issued to the revolver drive motor 4 or the filter drive motor 7 to control each of the electric revolver 1 or the filter block 6, the configuration is complicated and expensive. It will be a thing.

  In the case where an optical system for ultraviolet light observation is newly added to a microscope dedicated to visible light to enable visible light observation and ultraviolet light observation, it is disclosed in Patent Document 1 for a microscope dedicated to visible light. Function, that is, the position of the filter block 6 is detected by the filter sensor 8, or the objective lens 2 for visible light or the objective lens 3 for ultraviolet light is detected by the objective lens sensor 5, and the filter sensor 8 is detected by the CPU 9. Alternatively, a function for processing each detection signal from the objective lens sensor 5 and issuing a drive command to the revolver drive motor 4 or filter drive motor 7 to control each of the electric revolver 1 or filter block 6 must be added. The microscope for visible light must be modified.

  Patent Document 1 does not detect an actual illumination state as to whether illumination is performed with illumination light of either a visible light illumination system or an ultraviolet light illumination system. For this reason, for example, even if there is an abnormality such as the illumination light not actually being irradiated on the sample due to the lifetime or failure of each light source in the visible light illumination system or the ultraviolet light illumination system, the state of this abnormality cannot be detected. In particular, in the case of illumination by ultraviolet light, since ultraviolet light itself is invisible light, it is impossible to confirm the ultraviolet light directly visually, and it is possible to accurately detect whether illumination by ultraviolet light is being performed. Can not.

  The present invention provides an ultraviolet microscope that irradiates a sample with first light including light having a wavelength in the ultraviolet region emitted from a light source through an objective lens, and obtains an ultraviolet light observation image of the sample from reflected light from the sample. It is an ultraviolet microscope provided with the ultraviolet light alerting | reporting means which alert | reports that the illumination by the light of the wavelength of an ultraviolet region is performed by irradiating a part of 1st light radiate | emitted from.

  The present invention can provide an ultraviolet microscope capable of accurately reporting that illumination with ultraviolet light is being performed.

  Hereinafter, a first embodiment of the present invention will be described with reference to the drawings.

  FIG. 1 shows an overall configuration diagram of an ultraviolet microscope. The microscope main body 20 is provided with a stage 21. A sample 22 is placed on the stage 21. This stage 21 is movable in a plane orthogonal to the observation optical axis P. As a result, the stage 21 moves in a plane orthogonal to the observation optical axis P in a state where the sample 22 is placed, thereby positioning the sample 22 to the observation location.

  A focusing mechanism M is provided between the microscope body 20 and the stage 21. The focusing mechanism M can move the stage 21 along the observation optical axis P by a driving mechanism (not shown). Thereby, the sample 22 placed on the stage 21 is focused by moving the stage 21 up and down along the observation optical axis P.

  The microscope main body 20 is provided with a revolver 23. One or a plurality of visible light objective lenses 24 and ultraviolet light objective lenses 25 are mounted on the revolver 23. The revolver 23 rotates with respect to the microscope body 20 to arrange the visible light objective lens 24 or the ultraviolet light objective lens 25 on the observation optical axis P.

  A visible light illumination unit 26 is provided on the microscope body 20. The visible light illumination unit 26 irradiates the sample 22 with the second illumination light having a wavelength in the visible region through the visible light objective lens 24. A visible light source 27 is provided on the back surface of the visible light illumination unit 26. The visible light source 27 emits second illumination light having a wavelength in the visible region, and includes, for example, a halogen lamp. The visible light illumination unit 26 is provided with an aperture stop, a lens, and a half mirror 28 (not shown). The half mirror 28 is provided on the observation optical axis P. The half mirror 28 is formed of a material that transmits light having wavelengths in the visible region and the ultraviolet region. The half mirror 28 may be moved outside the observation optical axis P by a mechanism (not shown). The visible light illumination unit 26 and the visible light source 27 form a visible light illumination system.

  On the visible light illumination unit 26, an ultraviolet illumination unit 29 is attached as an additional unit. The ultraviolet light illumination unit 29 can be attached to and detached from the visible light illumination unit 26. The ultraviolet light illumination unit 29 illuminates the sample 22 through the ultraviolet light objective lens 25 with the first illumination light including light having a wavelength in the ultraviolet region. A specific configuration of the ultraviolet light illumination unit 29 will be described later.

  An eyepiece tube 30 is held on the ultraviolet illumination unit 29. The eyepiece tube 30 is held on the observation optical axis P on the upper surface of the ultraviolet illumination unit 29. The eyepiece tube 30 is provided with an eyepiece lens 31.

  2 and 3 are configuration diagrams of the ultraviolet light illumination unit 29, in which FIG. 2 is a cross-sectional view and FIG. 3 is a plan view. The ultraviolet light illumination unit 29 has a unit housing 32. Unit attachment portions 33 and 34 are provided on the upper and lower surfaces of the unit casing 32, respectively. Among these, the unit attachment part 33 connects and fixes the eyepiece tube 30, and the unit attachment part 34 connects and fixes the visible light illumination part 26.

  An ultraviolet light source 35 is provided on the back surface of the unit housing 32. The ultraviolet light source 35 emits first illumination light including light having a wavelength in the ultraviolet region, and includes a discharge lamp 35a such as a mercury xenon lamp that emits light having a wavelength in the ultraviolet region necessary for ultraviolet light observation. . On the optical path of the first illumination light emitted from the ultraviolet light source 35, for example, a wavelength selection element 36 combining an interference filter, a dichroic mirror, a band pass filter, and the like is provided. The wavelength selection element 36 transmits only light having a wavelength necessary for ultraviolet light observation. A shutter 37 is provided between the wavelength selection element 36 and the unit housing 32. For example, the shutter 37 is opened when the sample 22 is observed with ultraviolet light, and is closed when the sample 22 is observed with visible light. Since the discharge lamp 35a such as a mercury xenon lamp used as the ultraviolet light source 35 takes a long time until the lighting state is stabilized in principle, the discharge lamp 35a is not repeatedly turned on and off. When the shutter 37 is opened and closed while the 35a is kept in a stable lighting state, it is more efficient to observe the ultraviolet light by restricting the incident light into the ultraviolet light illumination unit 29.

  An illumination lens 38 and a mirror 39 are provided on the optical path of the first illumination light emitted from the ultraviolet light source 35 in the unit housing 32. On the reflected light path of the mirror 39, a light splitting element 40 is provided. The light splitting element 40 is, for example, a half mirror, and reflects and transmits illumination light incident from the mirror 39 side and splits it in two directions. A dichroic mirror 41 is provided on the reflected light path of the light splitting element 40. The dichroic mirror 41 is provided on the observation optical axis P. The dichroic mirror 41 has a characteristic of reflecting light in the ultraviolet region and transmitting light in the visible region.

  An imaging lens 42 and a mirror 43 are provided on the optical path of incident light from the dichroic mirror 41 side in the light splitting element 40. An ultraviolet camera 44 is provided on the reflection light path of the mirror 43 and on the outer surface of the unit housing 32. The ultraviolet camera 44 is disposed so that the imaging surface 45 is flush with the imaging surface of the imaging lens 42.

On the other hand, a screen 46 as an ultraviolet light notification member is provided on the optical path of incident light from the mirror 39 side in the light splitting element 40. The screen 46 is provided in a mounting hole 47 provided in the unit housing 32. The screen 46 visually notifies that the sample 22 is illuminated with ultraviolet light by being irradiated with a part of the first illumination light emitted from the ultraviolet light source 35. The screen 46 is made of a fluorescent plate in which a fluorescent material that emits fluorescence in the visible region by being irradiated with ultraviolet light is mixed or applied to a light-transmitting member formed of glass or resin that does not transmit ultraviolet light, for example.
Next, the operation of the microscope configured as described above will be described.
When performing visible light observation, the objective lens 24 for visible light is arranged on the observation optical axis P by the rotation of the revolver 23. At the same time, the visible light source 27 emits second illumination light having a wavelength in the visible region. At this time, the shutter 37 is closed, and the incidence of the first illumination light including the wavelength light in the ultraviolet region from the ultraviolet light source 35 into the ultraviolet illumination unit 29 is shielded.

The second illumination light having a wavelength in the visible region emitted from the visible light source 27 enters the visible light illumination unit 26, passes through an illumination lens (not shown) in the visible light illumination unit, and is observed by the half mirror 28. The sample 22 is reflected downward along P and passes through the revolver 23 and the visible light objective lens 24 to be irradiated onto the sample 22.
The reflected light reflected by the sample 22 passes through the visible light objective lens 24 and the revolver 23, passes through the half mirror 28 in the visible light illumination unit 26, and then passes through the dichroic mirror 41 in the ultraviolet light illumination unit 29. Then, the light enters the eyepiece tube 30 and is imaged by the eyepiece lens 31. Thereby, the visible light observation image of the sample 22 is observed.

On the other hand, when performing ultraviolet light observation, the ultraviolet light objective lens 25 is arranged on the observation optical axis P by the rotation of the revolver 23. Energization of the visible light source 27 is stopped, and the visible light source 27 is turned off. When the shutter 37 is opened, the first illumination light including the wavelength light in the ultraviolet region emitted from the ultraviolet light source 35 passes through the wavelength selection element 36 and becomes only the wavelength light necessary for ultraviolet light observation. The light enters the light illumination unit 29.
The first illumination light that has entered the ultraviolet light illumination unit 29 passes through the illumination lens 38, is reflected by the mirror 39, and enters the light splitting element 40. The first illumination light incident on the light splitting element 40 is split in two directions, one reflected toward the dichroic mirror 41 and the other transmitted toward the screen 46. One of the first illumination lights reflected by the light splitting element 40 is reflected by the dichroic mirror 41 toward the objective lens 25 along the observation optical axis P, passes through the half mirror 28, the revolver 23, and ultraviolet light The sample 22 is irradiated through the objective lens 25.

  The reflected light reflected by the sample 22 passes through the ultraviolet objective lens 25 and the revolver 23, passes through the half mirror 28 in the visible light illumination unit 26, and is reflected by the dichroic mirror 41 in the ultraviolet light illumination unit 29. The light passes through the dividing element 40, passes through the imaging lens 42, is reflected by the mirror 43, enters the ultraviolet camera 44, and forms an image on the imaging surface 45 of the ultraviolet camera 44. The ultraviolet camera 44 takes an ultraviolet light observation image of the sample 22 and outputs the image signal. This image signal is subjected to necessary image processing by an image processing device (not shown), and is displayed, for example, as an ultraviolet light observation image on the screen of a television monitor.

The half mirror 28 in the visible light illumination unit 26 is formed of a material that transmits light in the visible region and ultraviolet region, or can be moved outside the observation optical axis P by a mechanism (not shown). The transmission of reflected light having a wavelength in the ultraviolet region is not hindered.
The dichroic mirror 41 in the ultraviolet light illumination unit 29 has a characteristic of reflecting the wavelength light in the ultraviolet region and transmitting the wavelength light in the visible region. Therefore, the reflected light of the wavelength in the ultraviolet region from the sample 22 is the eyepiece. It does not enter the tube 30 and the eyepiece 31.

On the other hand, the other first illumination light split by the light splitting element 40 travels toward the screen 46 and is irradiated on the screen 46. The screen 46 absorbs light having a wavelength in the ultraviolet region of the other first illumination light, and the fluorescent material mixed or applied in the light transmissive member formed of glass or resin is the other first illumination light. Excited by illumination light, emits fluorescence in the visible region.
Since the screen 46 is provided at a position where it can be observed from the outside of the ultraviolet light illumination unit 29, the fluorescence in the visible region emitted from the screen 46 can be visually confirmed. Thereby, it can be seen that illumination by ultraviolet light is performed by irradiating a part of the first illumination light including the wavelength light in the ultraviolet region emitted from the ultraviolet light source 35.

  However, when performing visible light observation, the screen 46 confirms whether or not visible region fluorescence is emitted, and if visible region fluorescence is emitted, informs that illumination with ultraviolet light is being performed. Therefore, in such a case, the shutter 37 is closed, and the incidence of the first illumination light including the wavelength light in the ultraviolet region emitted from the ultraviolet light source 35 into the ultraviolet illumination unit 29 can be shielded.

When performing ultraviolet light observation, for example, when the discharge lamp 35a such as a mercury xenon lamp used for the ultraviolet light source 35 approaches the life or breaks down, the amount of light decreases or blinks. In such a case, the light quantity of the 1st illumination light irradiated to the screen 46 reduces, or the 1st illumination light is irradiated discontinuously.
When the amount of the first illumination light applied to the screen 46 decreases, the amount of fluorescence in the visible region emitted from the screen 46 also decreases according to the amount of light received by the first illumination light. If the first illumination light irradiated on the screen 46 is discontinuous, the amount of fluorescent light emitted from the screen 46 blinks discontinuously.
Therefore, if the amount of fluorescent light in the visible region emitted from the screen 46 decreases, it can be confirmed that the discharge lamp 35a used for the ultraviolet light source 35 has approached the end of its life, for example. Further, if the amount of fluorescent light in the visible region emitted from the screen 46 is blinking, it can be confirmed that the discharge lamp 35a used for the ultraviolet light source 35 has failed, for example.

  As described above, according to the first embodiment, the first illumination light having the wavelength in the ultraviolet region, which is emitted from the ultraviolet light source 35 and is wavelength-selected by the wavelength selection element 36, is divided into two directions by the light dividing element 40. The screen is divided, and the other first illumination light (light that is not used for illumination / observation of the sample 22) is irradiated to a screen 46 provided at a position where it can be observed from the outside of the ultraviolet light illumination unit 29. Since the fluorescent light in the visible region is emitted from 46, a very simple configuration in which the ultraviolet light illumination unit 29 is provided with a screen 46 in which a fluorescent material is mixed or applied to a light transmitting member formed of glass or resin, By observing the fluorescence in the visible region emitted from the screen 46, the first illumination light including the wavelength light in the ultraviolet region is emitted from the ultraviolet light source 35, and the sample 22 is illuminated with ultraviolet light. It can visually confirm that the have been made. At this time, since the fluorescence from the screen 46 is emitted when the first illumination light emitted from the ultraviolet light source 35 is directly irradiated, it can be directly confirmed that the ultraviolet illumination is performed.

  Further, the other first illumination light, that is, light that is not used for illumination / observation of the sample 22 generated by the optical path dividing element 40 can be effectively used.

  The illumination lens 38, the mirror 39, the light splitting element 40, the dichroic mirror 41, and the imaging lens 42 provided in the ultraviolet light illumination unit 29 are existing optical elements, and are on the other optical path of the light splitting element 40. Since only the screen 46 is provided, the screen 46 can be easily attached to an existing ultraviolet microscope.

  When performing visible light observation, if visible region fluorescence is emitted from the screen 46, it indicates that illumination by ultraviolet light is being performed. In such a case, the shutter 37 is closed and illumination by ultraviolet light is performed. It can be surely shielded and switched to visible light observation.

  When the ultraviolet light observation is performed, if the discharge lamp 35a such as a mercury xenon lamp used for the ultraviolet light source 35 approaches the life, or is broken down, and its light quantity decreases or blinks, the screen 46 is accordingly responded. The amount of fluorescent light in the visible region emitted from the screen 46 emitted from the light source is also reduced or flashes discontinuously, so that it is confirmed that the discharge lamp 35a used for the ultraviolet light source 35 is nearing the end of its life, for example, It can be confirmed, for example, that the discharge lamp 35a used for 35 is out of order.

  Next, a second embodiment of the present invention will be described with reference to the drawings. The same parts as those in FIGS. 1 to 3 are denoted by the same reference numerals, and detailed description thereof is omitted.

  4 and 5 are configuration diagrams of the ultraviolet light illumination unit 29. FIG. 4 is a cross-sectional view, and FIG. 5 is a plan view. The wavelength selection element 36 is provided on the optical path between the light splitting element 40 and the dichroic mirror 41.

  The screen 48 as an ultraviolet light notification member is provided on the optical path of incident light from the mirror 39 side in the light splitting element 40. The screen 48 is provided in a mounting hole 47 provided in the unit housing 32. The screen 48 is formed of a light transmissive member such as glass or resin that does not transmit ultraviolet light. The screen 48 is not mixed or coated with a fluorescent material that emits fluorescence in the visible region when irradiated with ultraviolet light, and has no fluorescence characteristics.

Next, the operation of the microscope configured as described above will be described.
When performing the ultraviolet light observation, the ultraviolet light objective lens 25 is disposed on the observation optical axis P by the rotation of the revolver 23. The first illumination light including wavelength light in the ultraviolet region emitted from the ultraviolet light source 35 enters the ultraviolet light illumination unit 29. The first illumination light that has entered the ultraviolet light illumination unit 29 passes through the illumination lens 38, is reflected by the mirror 39, and enters the light splitting element 40. The first illumination light incident on the light splitting element 40 is split in two directions, one of which is reflected toward the wavelength selection element 36 and the other is transmitted toward the screen 48. One of the first illumination lights passes through the wavelength selection element 36 and becomes only the wavelength light necessary for ultraviolet light observation, and is reflected downward along the observation optical axis P by the dichroic mirror 41, and passes through the half mirror 28. The sample 22 passes through and passes through the revolver 23 and the ultraviolet light objective lens 25 and is irradiated onto the sample 22. Subsequent operations for ultraviolet light observation are the same as those in the first embodiment, and a description thereof will be omitted.

  On the other hand, the other first illumination light split by the light splitting element 40 travels toward the screen 48 and is irradiated on the screen 48. The other first illumination light includes wavelength light from the ultraviolet region to the visible region. Thereby, the wavelength light in the visible region of the first illumination light including the wavelength light in the ultraviolet region to the visible region is projected onto the screen 48, and the projection light can be visually observed. Note that since the screen 48 is formed of a light transmissive member such as glass or resin that does not transmit ultraviolet light, for example, wavelength light in the ultraviolet region does not transmit through the screen 48, and the unit housing of the ultraviolet light illuminating unit 29. It is not released outside the body 32.

  As described above, according to the second embodiment, the first illumination light having the wavelength in the ultraviolet region emitted from the ultraviolet light source 35 is divided into two directions by the light splitting element 40, and the other first one of them is divided. The projection light is projected onto a screen 48 formed of a light transmissive member such as glass or resin that does not mix or apply a fluorescent material and does not transmit ultraviolet light, for example. The first illumination light including the wavelength light in the ultraviolet region is emitted from the ultraviolet light source 35 by visually observing the light in the visible region projected on the screen 48 with a very simple configuration that is provided on the sample 48. Thus, it can be confirmed that the ultraviolet illumination is performed.

  Since the screen 48 does not need to be mixed or coated with a fluorescent material unlike the screen 46 used in the first embodiment, the material required for the screen 48 can be reduced accordingly.

  As in the first embodiment, the screen 48 can be easily attached to an existing ultraviolet microscope. Further, when performing visible light observation, if light in the visible region is projected onto the screen 48, it is displayed that illumination with ultraviolet light is being performed. In such a case, the shutter 37 is closed and the ultraviolet light is displayed. The illumination by can be reliably shielded and switched to visible light observation. When the ultraviolet light observation is performed, if the discharge lamp 35a such as a mercury xenon lamp used for the ultraviolet light source 35 approaches the life or fails, and the light quantity decreases or blinks, the screen 48 is responded accordingly. The amount of light in the visible region projected onto the light source is also reduced or flashes discontinuously, so that it is confirmed that the discharge lamp 35a used for the ultraviolet light source 35 is near the end of its life, for example, or the discharge lamp used for the ultraviolet light source 35 is used. It can be confirmed that 35a is broken, for example.

In addition, this invention is not limited to said each embodiment, You may deform | transform as follows.
For example, the wavelength selection element 36 in the second embodiment is not limited to being provided on the optical path between the light splitting element 40 and the dichroic mirror 41, and may be configured by a plurality of elements. For example, the wavelength selection element 36 may be provided at two locations on the optical path between the light splitting element 40 and the dichroic mirror 41 and on the optical path between the ultraviolet light source 35 and the light splitting element 40.

When the wavelength selection elements 36 are provided in two places as described above, the first illumination light emitted from the ultraviolet light source 35 is provided on the optical path between the ultraviolet light source 35 and the light splitting element 40. Thus, the light component in the visible region is removed. Next, the light component in the visible region is removed by the wavelength selection element provided on the optical path between the light splitting device 40 and the dichroic mirror 41. As a result, the first illumination light emitted from the ultraviolet light source 35 has its light components in the visible region removed in stages. As a result, only light having a wavelength necessary for ultraviolet light observation is finally obtained, and the sample 22 is irradiated with this light.

  In each of the above-described embodiments, the ultraviolet light microscope 29 has been described as an additional unit attached to the visible light illumination unit 26 to enable switching between visible light observation and ultraviolet light observation. It is also possible to apply to an ultraviolet microscope dedicated to ultraviolet light observation that does not include

  The ultraviolet light notification member is a light transmissive member attached with a fluorescent material that does not transmit light in the ultraviolet region and emits fluorescence in the visible region when irradiated with light in the ultraviolet region, or light in the ultraviolet region. Therefore, the light transmitting member or the projection member that does not transmit light may be used. Therefore, the light transmitting member or the projection member is not limited to the screen 48 and may be a thin plate or sheet that transmits fluorescence.

  The ultraviolet light notification member receives ultraviolet light by a photoelectric conversion means, detects this, and performs photoelectric conversion to turn on a light emitting means such as an LED or sound a buzzer or the like to perform ultraviolet light illumination. You may let them know.

BRIEF DESCRIPTION OF THE DRAWINGS The whole block diagram which shows 1st Embodiment of the ultraviolet microscope which concerns on this invention. The cross-sectional block diagram of the ultraviolet light illumination part in the same microscope. The plane block diagram of the ultraviolet light illumination part in the microscope. The cross-sectional block diagram of the ultraviolet-light illumination part in 2nd Embodiment of the ultraviolet microscope which concerns on this invention. The plane block diagram of the ultraviolet light illumination part in the microscope. The block diagram of the control system of the conventional ultraviolet microscope.

Explanation of symbols

  20: microscope main body, 21: stage, 22: sample, 23: revolver, 24: objective lens for visible light, 25: objective lens for ultraviolet light, 26: visible light illumination unit, 27: visible light source, 28: half mirror, 29: Ultraviolet light illumination part, 30: Eyepiece tube, 31: Eyepiece lens, 32: Unit housing, 33, 34: Unit mounting part, 35: Ultraviolet light source, 36: Wavelength selection element, 37: Shutter, 38: Illumination Lens: 39: Mirror, 40: Light splitting element, 41: Dichroic mirror, 42: Imaging lens, 43: Mirror, 44: Ultraviolet camera, 45: Imaging surface, 46: Screen, 47: Mounting hole, 48: Screen , M: focusing mechanism.

Claims (8)

In an ultraviolet microscope that irradiates a sample with first light including light having a wavelength in the ultraviolet region emitted from a light source through an objective lens, and obtains an ultraviolet light observation image of the sample from reflected light from the sample.
Ultraviolet light notification means for notifying that illumination with light having a wavelength in the ultraviolet region is performed by irradiating a part of the first light emitted from the light source;
An ultraviolet microscope characterized by comprising: A light source that emits a light beam including light having a wavelength in the ultraviolet region;
A light splitting means for splitting the light beam emitted from the light source into two;
Ultraviolet light notifying means for notifying that the light beam containing light having a wavelength in the ultraviolet region is emitted from the light source by being irradiated with one light flux split by the light splitting means;
An ultraviolet microscope characterized by comprising: An optical system for irradiating the sample with the other light beam divided by the light dividing means through an objective lens;
An image sensor that receives reflected light from the sample via the light splitting means;
The ultraviolet microscope according to claim 2, wherein an ultraviolet light observation image of the sample is acquired from the reflected light.   4. The ultraviolet microscope according to claim 1, wherein the ultraviolet light notification means visually notifies that illumination by the ultraviolet light is performed.   5. The ultraviolet microscope according to claim 4, wherein the ultraviolet light notification means emits fluorescence having a wavelength in the visible region when irradiated with light in the ultraviolet region.   The ultraviolet light notification means includes a light-transmitting member attached with a fluorescent material that does not transmit light in the ultraviolet region and emits fluorescence having a wavelength in the visible region when irradiated with light in the ultraviolet region. The ultraviolet microscope according to claim 5.   5. The ultraviolet microscope according to claim 4, wherein the ultraviolet light notification means includes a projection member that blocks light in the ultraviolet region and projects light in the visible region. A visible light illumination system that illuminates the sample through the objective lens with the second illumination light having a wavelength in the visible region emitted from the visible light source;
The visible light observation image of the sample is acquired from the reflected light from the sample, and the acquisition of the visible observation image and the acquisition of the ultraviolet light observation image can be switched. UV microscope.

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