JP2006322869A - Microwave detecting device - Google Patents

Microwave detecting device Download PDF

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JP2006322869A
JP2006322869A JP2005147676A JP2005147676A JP2006322869A JP 2006322869 A JP2006322869 A JP 2006322869A JP 2005147676 A JP2005147676 A JP 2005147676A JP 2005147676 A JP2005147676 A JP 2005147676A JP 2006322869 A JP2006322869 A JP 2006322869A
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detection
microwave
detection unit
electric field
antenna
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Shinichi Kobayashi
伸一 小林
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Micro Denshi Co Ltd
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Micro Denshi Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a detecting device capable of detecting visually an electrical field intensity distribution of microwave in a heating chamber, with which a microwave heating device is equipped. <P>SOLUTION: The microwave detecting device is configured by arranging a plurality of parts, both the detectors 10A formed from a long span antenna, a detection diode 13, and LED 14 of green light, and the detectors 10B formed from a short span antenna, a detection diode 15, and a LED 16 of red light on a substrate 11. The microwave detecting device is contained within a heat chamber of a microwave heating device and can detect an electrical field intensity distribution of microwave on the basis of emitting state of the aforementioned detectors 10A and 10B. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

マイクロ波加熱装置の加熱室内に生ずるマイクロ波電界の強度分布を視覚を通して見ることができるマイクロ波の検出装置に関する。   The present invention relates to a microwave detection apparatus that can visually observe the intensity distribution of a microwave electric field generated in a heating chamber of a microwave heating apparatus.

マイクロ波の加熱装置は、加熱室内に収納させた被処理物にマイクロ波を照射し、処理物を加熱処理し、或いは、乾燥処理することができるが、加熱または乾燥するためのエネルギ−となっているマイクロ波の電界強度分布については直接に測定することができなかった。   A microwave heating apparatus can irradiate a processing object stored in a heating chamber with microwaves, heat the processing object, or dry the processing object. However, the microwave heating apparatus is energy for heating or drying. It was not possible to directly measure the electric field strength distribution of microwaves.

従来では、被処理物を加熱、乾燥させた後に、その被処理物の温度分布を測定し、その測定結果から加熱室内のマイクロ波の電界強度分布を推測していた。   Conventionally, after heating and drying an object to be processed, the temperature distribution of the object to be processed is measured, and the electric field strength distribution of the microwave in the heating chamber is estimated from the measurement result.

しかし、加熱、乾燥させた後の被処理物の温度上昇は、加熱時間中に照射されたマイクロ波の蓄積によるものとなるから、被処理物の温度上昇を測定したのでは、瞬時におけるマイクロ波の電界強度分布を知ることができない。   However, since the temperature rise of the object to be processed after heating and drying is due to the accumulation of microwaves irradiated during the heating time, measuring the temperature rise of the object to be processed is an instantaneous microwave. The electric field strength distribution cannot be known.

なお、加熱室内のある一点におけるマイクロ波の電界強度を瞬時値として測定する測定器が知られているが、この測定器は高価である上に、電界強度の分布については検出することができない。
また、マイクロ波電界中で揺動させるアンテナの誘起電圧でネオンランプを点滅させ、ネオンランプの点滅のデュ−テイ比からマイクロ波電界の強さを検出するマイクロ波電界検出装置が知られている。
しかし、この検出装置は、加熱室外に設ける構成のものであるから、加熱室内のマイクロ波電界分布については検出することができない。
Note that a measuring device that measures the electric field strength of a microwave at a certain point in the heating chamber as an instantaneous value is known, but this measuring device is expensive and cannot detect the distribution of the electric field strength.
There is also known a microwave electric field detection device that detects the intensity of a microwave electric field from the duty ratio of the flashing of a neon lamp by blinking a neon lamp with an induced voltage of an antenna that is swung in a microwave electric field. .
However, since this detection device is provided outside the heating chamber, the microwave electric field distribution in the heating chamber cannot be detected.

特開平5−217670号公報JP-A-5-217670

本発明は、上記した実情にかんがみ、マイクロ波加熱装置の加熱室内に照射されるマイクロ波の電界強度分布を視覚を通して検出し、その電界強度分布の調整などを容易にするためのマイクロ波の検出装置を提供することを目的とする。   In view of the above-described circumstances, the present invention detects the microwave field intensity distribution irradiated into the heating chamber of the microwave heating apparatus through vision, and detects the microwave to facilitate the adjustment of the field intensity distribution. An object is to provide an apparatus.

上記した目的を達成するため、本発明では第1の発明として、マイクロ波を受けるアンテナと、前記アンテナによって受けたマイクロ波を検波するダイオ−ドと、前記ダイオ−ドの検波にしたがって給電されて点灯する光源とから形成した検出部を一つの基板に多数個配列し、マイクロ波の電界強度分布を検出部各々が備える光源の点灯状態より検出する構成としたことを特徴とするマイクロ波の検出装置を提案する。   In order to achieve the above object, in the present invention, as a first invention, an antenna that receives microwaves, a diode that detects microwaves received by the antenna, and power that is fed in accordance with detection of the diodes are provided. A number of detection units formed from a light source to be lit are arranged on one substrate, and the microwave electric field intensity distribution is detected from the lighting state of the light source included in each detection unit. Propose the device.

第2の発明としては、上記第1の発明の検出装置において、アンテナの長さを変えてマイクロ波の検出感度を変えた検出部を設けると共に、検出部の検出感度にしたがって発光色の異なる光源を備え、光源の発光色の分布よりマイクロ波の電界強度分布を検出する構成としたことを特徴とするマイクロ波の検出装置を提案する。   As a second invention, in the detection apparatus of the first invention described above, a detection unit in which the length of the antenna is changed to change the detection sensitivity of the microwave is provided, and light sources having different emission colors according to the detection sensitivity of the detection unit And a microwave detection device characterized in that the microwave electric field intensity distribution is detected from the emission color distribution of the light source.

第3の発明としては、上記第1又は第2の発明の検出装置において、基板にはマトリクス状の切取り条溝を設け、マトリクス状のセクション内に前記した各々の検出部を設け、セクションを前記切取り条溝に沿って切取ることによってチップ形の検出部として使用可能としたことを特徴とするマイクロ波の検出装置を提案する。   As a third invention, in the detection device of the first or second invention, the substrate is provided with a matrix-shaped cut groove, each of the detection portions described above is provided in the matrix-shaped section, and the section is We propose a microwave detection device that can be used as a chip-shaped detection unit by cutting along a cut groove.

第4の発明としては、上記第1又は第2の発明の検出装置において、アンテナの向きを変えた各検出部を設け、X、Y、Z方向のマイクロ波の電界強度分布を検出可能に構成したことを特徴とするマイクロ波の検出装置を提案する。   As a fourth invention, in the detection device according to the first or second invention, each detection unit with the antenna direction changed is provided so that the microwave field strength distribution in the X, Y, and Z directions can be detected. We propose a microwave detection device.

第1の発明の検出装置は、一つの基板に多数個の検出部が配列されているので、アンテナによって受けたマイクロ波を検波した検出部のみが光源を点灯させる。
言い換えれば、マイクロ波が伝搬されないか、極めて少ない基板位置に配置された検出部はマイクロ波に応動しなく、光源が消灯のままとなる。
In the detection apparatus of the first invention, since a large number of detection units are arranged on one substrate, only the detection unit that detects the microwaves received by the antenna turns on the light source.
In other words, the microwaves are not propagated or the detection units arranged at very few substrate positions do not respond to the microwaves, and the light source remains off.

したがって、光源が点灯する検出部が多い基板位置がマイクロ波の電界強度が高く、この逆に、光源が消灯のままとなる検出部が多い基板位置がマイクロ波の電界強度が低いことになる。   Therefore, the substrate position where there are many detection units where the light source is turned on has a high microwave field strength, and conversely, the substrate position where there are many detection units where the light source remains off is low in the microwave field strength.

このように、本発明によれば、光源の点灯状態を視覚を通して確認することによって、マイクロ波の電界強度分布を検出することができる。   Thus, according to the present invention, the electric field intensity distribution of the microwave can be detected by visually confirming the lighting state of the light source.

具体的には、本発明の検出装置をマイクロ波加熱室の加熱室に入れ、マイクロ波を照射させるだけで、加熱室内のマイクロ波の電界強度分布を検出することができる。
この結果、各検出部の光源の点灯、消灯状態を見ながら、加熱室内のマイクロ波電界を調整することができる。
Specifically, the electric field intensity distribution of the microwave in the heating chamber can be detected simply by putting the detection device of the present invention into the heating chamber of the microwave heating chamber and irradiating the microwave.
As a result, the microwave electric field in the heating chamber can be adjusted while observing the on / off state of the light source of each detection unit.

第2の発明の検出装置は、アンテナの長さを変えた検出部が配列してある。
例えば、長径(長い)のアンテナを有する検出部と、短径(短い)のアンテナを有する検出部とを多数個配列すると共に、長径アンテナの検出部には緑色光の光源を、短径アンテナの検出部には赤色光の光源を設ける。
In the detection device according to the second aspect of the present invention, detection units having different antenna lengths are arranged.
For example, a plurality of detectors having a long-diameter (long) antenna and a plurality of detectors having a short-diameter (short) antenna are arranged, and a green light source is arranged in the long-diameter antenna. The detection unit is provided with a red light source.

このように構成した検出装置は、短いアンテナの検出部ほど検出感度が低くなるので、赤色光の多い基板位置のマイクロ波電界が強く、緑色光が多くなる基板位置のマイクロ波電界が弱いことが判かる。
すなわち、光源の発光色の分布によってマイクロ波の電界強度分布を検出することができる。
The detection device configured as described above has a lower detection sensitivity as the detection unit of the antenna becomes shorter. Therefore, the microwave electric field at the substrate position with a lot of red light is strong and the microwave electric field at the substrate position with a lot of green light may be weak. I understand.
That is, the electric field intensity distribution of the microwave can be detected from the distribution of the emission color of the light source.

第3の発明の検出装置は、各々の検出部をチップ形の検出部として切り離すことができる。
すなわち、切り離した検出部をマイクロ波を照射する適当な部所、被処理物に接着剤などを使って貼り付け、光源の点灯の有無や光源の発光色などから、その部所のマイクロ波の電界強度を検出する。
In the detection device of the third invention, each detection unit can be separated as a chip-type detection unit.
That is, attach the separated detection part to an appropriate part that irradiates microwaves, an adhesive or the like to the object to be processed, and determine whether the microwaves in that part are based on whether the light source is lit or whether the light source emits light. Detect the electric field strength.

第4の発明の検出装置は、X方向のマイクロ波を検出する検出部と、Y方向のマイクロ波を検出する検出部と、Z方向のマイクロ波を検出する検出部との各々を多数個配列した構成としてある。   According to a fourth aspect of the present invention, there are provided a plurality of detection units for detecting microwaves in the X direction, detection units for detecting microwaves in the Y direction, and detection units for detecting microwaves in the Z direction. It is as a configuration.

この検出装置によれば、X、Y、Zのいずれの方向からのマイクロ波についてもその電界強度分布を検出することができる。
なお、この発明では、例えば、X方向のマイクロ波の検出部には赤色光の光源を、Y方向のマイクロ波の検出部には黄色光の光源を、Z方向のマイクロ波の検出部には緑色光の光源を設けるようにしてX、Y、Z方向のマイクロ波を識別することが可能になる。
According to this detection apparatus, the electric field intensity distribution can be detected for microwaves from any of X, Y, and Z directions.
In the present invention, for example, a red light source is used for the X direction microwave detection unit, a yellow light source is used for the Y direction microwave detection unit, and a Z direction microwave detection unit is used for the Z direction microwave detection unit. It becomes possible to identify microwaves in the X, Y, and Z directions by providing a green light source.

次に、本発明の実施形態について図面に沿って説明する。
図1は第1実施形態として示した検出装置の部分的な拡大正面図、図2は検出部の拡大部分図、図3は図2上のA−A線に沿って切断した拡大部分断面図、図4、図5は検出部の電気回路図である。
Next, embodiments of the present invention will be described with reference to the drawings.
1 is a partially enlarged front view of the detection apparatus shown as the first embodiment, FIG. 2 is an enlarged partial view of a detection unit, and FIG. 3 is an enlarged partial sectional view taken along line AA in FIG. 4 and 5 are electric circuit diagrams of the detection unit.

これらの図に示すように、この検出装置は、ユニット化した検出部10A、10Bを基板11の面上に多数個配列した構成となっている。
なお、上記基板11は、基板自体がマイクロ波によって加熱されないように誘電率の低いプリント基板を使用し、また、上記検出装置は四辺形の基板11に検出部10A、10Bを設けた板状のものとなっているが、基板11を円形又は角形などに形成することによって、円形又は角形の板状検出装置として構成することができる。
As shown in these drawings, this detection apparatus has a configuration in which a large number of unitized detection units 10A and 10B are arranged on the surface of the substrate 11.
The substrate 11 is a printed circuit board having a low dielectric constant so that the substrate itself is not heated by microwaves, and the detection device has a plate-like shape in which detection units 10A and 10B are provided on a quadrilateral substrate 11. However, by forming the substrate 11 in a circular or rectangular shape, it can be configured as a circular or rectangular plate-shaped detection device.

検出部10A、10Bは、図2によって詳細に示してある。
すなわち、検出部10Aは、U字形とした長径アンテナ12aと直線アンテナ12bとによって検波ダイオ−ド13とLED14とを直列接続して構成してある。(図4参照)
なお、検波ダイオ−ド13は、マイクロ波周波数f=2450MHz程度の高周波電圧を受けて導通する検波ダイオ−ドであり、また、LED14は、本実施形態では、緑色光の発光ダイオ−ドとなっている。
The detection units 10A and 10B are shown in detail in FIG.
That is, the detection unit 10A is configured by connecting the detection diode 13 and the LED 14 in series by a U-shaped long-diameter antenna 12a and a linear antenna 12b. (See Figure 4)
The detection diode 13 is a detection diode that is turned on by receiving a high-frequency voltage having a microwave frequency of about f = 2450 MHz. In the present embodiment, the LED 14 is a green light emitting diode. ing.

検出部10Bは、検波ダイオ−ド15とLED16とを2つの直線(短径)アンテナ17a、17bによって直列接続した構成としてある。(図5参照)
なお、検波ダイオ−ド15は上記した検波ダイオ−ド13と同様のものであるが、LED16は、本実施形態では、赤色光の発光ダイオ−ドとなっている。
The detection unit 10B has a configuration in which the detection diode 15 and the LED 16 are connected in series by two straight (short diameter) antennas 17a and 17b. (See Figure 5)
The detection diode 15 is the same as the detection diode 13 described above, but the LED 16 is a red light emitting diode in this embodiment.

上記した検出部10A、10Bは、各アンテナ12a、12b、17a、17bをプリント形成した基板11の面上に検波ダイオ−ド13、15、LED14、16を面上半田して取付けてある。   The detection units 10A and 10B described above are mounted by soldering the detection diodes 13 and 15 and the LEDs 14 and 16 on the surface of the substrate 11 on which the antennas 12a, 12b, 17a and 17b are printed.

また、このように構成した検出部10A、10Bは、アンテナを長くするほど検出感度を高くすることができるから、検出部10Bに対して検出部10Aの検出感度が高くなっている。   In addition, the detection units 10A and 10B configured as described above can increase the detection sensitivity as the antenna is lengthened. Therefore, the detection sensitivity of the detection unit 10A is higher than that of the detection unit 10B.

一方、この検出装置は、基板11にマトリクス状に形成した切取り条溝18を設け、この切取り条溝18によって形成されたセレクション内に上記の検出部10A、10Bが設けてある。
すなわち、この切取り条溝18は図3に詳細図として示してある通り、基板11の表裏面に線状に切り込み形成してあり、基板11を切取り条溝18に沿って切り取ることによって、検出部10Aと検出部10Bの一つ一つを分離することが可能になっている。
なお、このように分離した検出部10A、10Bは、被加熱物などに貼り付けて検出装置として使用する。
On the other hand, this detection apparatus is provided with the cut grooves 18 formed in a matrix on the substrate 11, and the detection units 10 </ b> A and 10 </ b> B are provided in the selection formed by the cut grooves 18.
That is, as shown in the detailed view of FIG. 3, the cut groove 18 is formed in a line shape on the front and back surfaces of the substrate 11, and the substrate 11 is cut along the cut groove 18 to thereby detect the detection unit. It is possible to separate each of 10A and detection unit 10B.
The detection units 10A and 10B separated in this way are used as a detection device by being attached to an object to be heated.

上記のように構成した検出装置はマイクロ波加熱装置の加熱室内に収納し、その正面側からマイクロ波を照射するように配置する。
この結果、検出部10A、10B各々のアンテナによってマイクロ波電力が受電されるが、マイクロ波電界が強い部所では、検出部10A、10Bが共に検出動作する。
The detection device configured as described above is housed in the heating chamber of the microwave heating device, and is arranged so as to irradiate microwaves from the front side.
As a result, the microwave power is received by the antennas of the detection units 10A and 10B, but the detection units 10A and 10B both perform detection operations in a portion where the microwave electric field is strong.

つまり、マイクロ波電界によって各アンテナに誘起する起電力によって検出部10A、10Bの検波ダイオ−ド13、15が共に導通し、緑色LED14と赤色LED16とが発光する。   That is, the detection diodes 13 and 15 of the detection units 10A and 10B are both conducted by the electromotive force induced in each antenna by the microwave electric field, and the green LED 14 and the red LED 16 emit light.

マイクロ波電界が弱い部所では、検出感度の低い検出部10Bが非検出状態となるため、検出部10Aのみが検出動作し、緑色LED14が発光する。   In a portion where the microwave electric field is weak, the detection unit 10B having a low detection sensitivity is in a non-detection state, so that only the detection unit 10A performs a detection operation, and the green LED 14 emits light.

このように、マイクロ波電界が強い部所では、緑色、赤色のLED14、16が発光し、マイクロ波電界が弱い部所では緑色のLED14のみが発光するから、検出部各々が有するLEDの発光色の色分布によってマイクロ波の電界強度分布を知ることができる。   In this way, the green and red LEDs 14 and 16 emit light in a portion where the microwave electric field is strong, and only the green LED 14 emits light in a portion where the microwave electric field is weak. The distribution of the electric field strength of the microwave can be known from the color distribution.

なお、上記のようにマイクロ波の電界強度分布を検出する場合は、検出装置の大きさ(基板11の大きさ)を加熱室内の広さに合わせるように構成してもよく、また、検出装置を加熱室内で検出毎に移動させるようにしてもよい。   When the microwave electric field strength distribution is detected as described above, the size of the detection device (the size of the substrate 11) may be adjusted to the size of the heating chamber. May be moved for each detection in the heating chamber.

図6は第2実施形態の検出装置を示し、同図はその検出部を示した拡大部分図である。
この第2実施形態の検出装置は、上記した検出部10Bのみを基板11に多数個配列した構成としてある。
FIG. 6 shows a detection apparatus according to the second embodiment, and FIG. 6 is an enlarged partial view showing the detection unit.
The detection apparatus according to the second embodiment has a configuration in which a large number of the detection units 10B described above are arranged on the substrate 11.

検出部10Bは、既に述べたように、検出感度が低いから、この検出装置を第1実施形態の検出装置と同様に使用すれば、マイクロ波電界の強い部所の検出部10Bが検出動作し、電界強度の弱い部所の検出部10Bは検出動作しない。
したがって、赤色のLEDが発光した部所がマイクロ波電界の強い部所であることが分かる。
As described above, since the detection unit 10B has low detection sensitivity, if this detection device is used in the same manner as the detection device of the first embodiment, the detection unit 10B at a portion where the microwave electric field is strong performs a detection operation. The detection unit 10B at the portion where the electric field strength is weak does not perform the detection operation.
Therefore, it can be seen that the portion where the red LED emits light is the portion where the microwave electric field is strong.

なお、この第2実施形態のように構成する場合には、検出部10Aのみを基板11に多数個配列させても同様の検出装置となる。   In the case of the configuration as in the second embodiment, the same detection device can be obtained by arranging a large number of detection units 10A alone on the substrate 11.

図7は第3実施形態の検出装置を示し、同図はその検出部を示した拡大部分図である。
この第3実施形態の検出装置は、長径のアンテナ12aと直線アンテナ12bとを有する検出部10Aと、短径の直線アンテナ17a、17bを有する検出部10Bの他に、中径のアンテナ19aと直線アンテナ19bとを設けた検出部10Cを設け、これらの検出部10A、10b、10Cを基板11に多数個配列した構成としてある。
FIG. 7 shows a detection apparatus according to the third embodiment, and FIG. 7 is an enlarged partial view showing the detection unit.
The detection apparatus according to the third embodiment includes a detection unit 10A having a long-diameter antenna 12a and a linear antenna 12b, and a detection unit 10B having short-diameter linear antennas 17a and 17b, as well as a medium-diameter antenna 19a and a straight line. A detection unit 10C provided with an antenna 19b is provided, and a large number of these detection units 10A, 10b, and 10C are arranged on the substrate 11.

検出部10Cは、他の検出部10A、10Bと同様の構成であり、検波ダイオ−ド20と黄色光のLED21を備えている。
したがって、この第3実施形態の検出装置は、高いレベルの検出感度を有する検出部10A、低いレベルの検出感度を有する検出部10B、中レベルの検出感度を有する検出部10Cとを備えている。
The detection unit 10C has the same configuration as the other detection units 10A and 10B, and includes a detection diode 20 and a yellow light LED 21.
Therefore, the detection device of the third embodiment includes a detection unit 10A having a high level of detection sensitivity, a detection unit 10B having a low level of detection sensitivity, and a detection unit 10C having a medium level of detection sensitivity.

このように構成した第3実施形態の検出装置は、マイクロ波電界が強い部所では全ての検出部10A、10B、10CのLEDが発光し、マイクロ波電界が中程度の強さの部所では検出部10B、10CのLEDが発光し、マイクロ波電界が弱い部所では検出部10BのLEDのみが発光することから、マイクロ波の電界強度分布がLEDの発光色の分布によって検出することができる。   In the detection apparatus according to the third embodiment configured as described above, the LEDs of all the detection units 10A, 10B, and 10C emit light in the portion where the microwave electric field is strong, and the portion where the microwave electric field is moderate intensity. Since the LEDs of the detection units 10B and 10C emit light and only the LED of the detection unit 10B emits light in a portion where the microwave electric field is weak, the electric field intensity distribution of the microwave can be detected by the distribution of the emission color of the LED. .

図8は第4実施形態の検出装置で、同図はその検出部を示す部分的な斜視図である。
この第4実施形態の検出装置は、X方向のマイクロ波Pxを検出する検出部10xと、Y方向のマイクロ波Pyを検出する検出部10yと、Z方向のマイクロ波Pzを検出する検出部10zとを誘電率の低い資材で形成した基板22に多数個配列してある。
FIG. 8 shows a detection apparatus according to the fourth embodiment. FIG. 8 is a partial perspective view showing the detection unit.
The detection device according to the fourth embodiment includes a detection unit 10x that detects a microwave Px in the X direction, a detection unit 10y that detects a microwave Py in the Y direction, and a detection unit 10z that detects a microwave Pz in the Z direction. Are arranged on a substrate 22 made of a material having a low dielectric constant.

検出部10yは既に説明した検出部10Bと同様の構成であり、検波ダイオ−ド23と赤色光のLED24とをアンテナ25a、25bによって直列接続した構成となっている。   The detection unit 10y has the same configuration as that of the detection unit 10B already described, and has a configuration in which the detection diode 23 and the red light LED 24 are connected in series by antennas 25a and 25b.

検出部10xは、図示するように、基板22の表面に緑色光のLED26を、その裏面に検波ダイオ−ド27を各々設け、それらLED26と検波ダイオ−ド27とを基板22に形成したスル−ホ−ルを通したアンテナ28a、28bによって電気接続してある。
なお、この検出部10xは、アンテナ28a、28bがマイクロ波Pxに対して鎖交する向きに形成してある。
As shown in the figure, the detection unit 10x is provided with a green LED 26 on the surface of the substrate 22 and a detection diode 27 on the back surface thereof, and the LED 26 and the detection diode 27 are formed on the substrate 22. The antennas 28a and 28b through the holes are electrically connected.
The detection unit 10x is formed so that the antennas 28a and 28b are linked to the microwave Px.

検出部10zは、基板22の表面に黄色光のLED29を、その裏面に検波ダイオ−ド30を各々設け、これらLED29と検波ダイオ−ド30とを基板22に形成したスル−ホ−ルを通したアンテナ31a、31bによって電気接続してある。
なお、この検出部10zは、アンテナ31a、31bがマイクロ波Pzに対して鎖交する向きに形成してある。
The detection unit 10z is provided with a yellow LED 29 on the front surface of the substrate 22 and a detection diode 30 on the back surface thereof, and passes through a through hole in which the LED 29 and the detection diode 30 are formed on the substrate 22. The antennas 31a and 31b are electrically connected.
In addition, this detection part 10z is formed in the direction where the antennas 31a and 31b are interlinked with the microwave Pz.

このように構成した検出装置は、緑色光のLED26の発光が多い部所ではX方向のマイクロ波の電界が強く、同様に赤色光のLED24の発光が多い部所ではY方向のマイクロ波の電界が強く、黄色光のLED29の発光が多い部所ではZ方向のマイクロ波の電界が強いことが分かる。
この結果、X、Y、Z方向のマイクロ波について電界強度の分布状態を検出することができる。
The detection apparatus configured as described above has a strong microwave electric field in the X direction in a portion where the green LED 26 emits a lot of light, and similarly a microwave electric field in the Y direction in a portion where the red LED 24 emits a lot of light. It can be seen that the electric field of the microwave in the Z direction is strong in the portion where the yellow LED 29 emits a lot of light.
As a result, the electric field intensity distribution state can be detected for the microwaves in the X, Y, and Z directions.

図9は第5実施形態として示した簡略斜視図である。
この第5実施形態は、立方体や直方体などの6面体50の各面に検出部51を設けた構成としてある。
なお、この6面体50は誘電率の低い資材で形成してある。
FIG. 9 is a simplified perspective view shown as the fifth embodiment.
In the fifth embodiment, a detection unit 51 is provided on each surface of a hexahedron 50 such as a cube or a rectangular parallelepiped.
The hexahedron 50 is made of a material having a low dielectric constant.

検出部51は、上記同様のもので、検波ダイオ−ド52とLED53とをアンテナ54a、54bによって直列接続した構成となっている。
また、6面体50はプリント基板によって形成し、各面に設けた検出部51は同じ構成のものとしてある。
なお、図面では各面に一つの検出部51を設けた6面体50を示したが、実際には各面に多数個の検出部51を設ける。
The detection unit 51 is the same as described above, and has a configuration in which a detection diode 52 and an LED 53 are connected in series by antennas 54a and 54b.
The hexahedron 50 is formed of a printed circuit board, and the detection units 51 provided on each surface have the same configuration.
In addition, although the hexahedron 50 which provided the one detection part 51 in each surface was shown in drawing, many detection parts 51 are actually provided in each surface.

このように構成した6面体50の検出装置は、マイクロ波加熱装置の加熱室内に一個の6面体50を収納して検出してもよいが、複数の6面体50を用意し、加熱室内の複数位置に配置するようにして、各面のLED53の発光状態を確認すれば、加熱室内全体のX、Y、Z方向のマイクロ波Px、Py、Pzの電界強度の状態を検出することができて有利である。 The detection device for the hexahedron 50 configured as described above may be detected by storing a single hexahedron 50 in the heating chamber of the microwave heating apparatus. If the light emission state of the LED 53 on each surface is confirmed so as to be arranged at the position, the state of the electric field strength of the microwaves Px, Py, Pz in the X, Y, and Z directions in the entire heating chamber can be detected. It is advantageous.

以上、本発明の各実施形態について説明したが、基板11に設けたマトリクス状の切取り条溝18は必要に応じて形成するもので、本発明の実施に際して必ずしも必要となるものではない。   Although the embodiments of the present invention have been described above, the matrix-shaped cut grooves 18 provided on the substrate 11 are formed as necessary, and are not necessarily required when implementing the present invention.

また、本発明の検出装置は、検波ダイオ−ドとLEDとを含めるようにして基板面をコ−ティングすることが好ましい。
コ−ティングには、例えば、エポキシ樹脂やシリコン樹脂などを使用する。
このコ−ティングは、加熱室内が水蒸気環境であるとか、腐食性空気となっている場合であっても使用できるようにするためである。
また、このコ−ティングをすれば、水中のマイクロ波電界の強度分布についても検出が可能になる。
Moreover, it is preferable that the detection apparatus of this invention coats a substrate surface so that a detection diode and LED may be included.
For the coating, for example, an epoxy resin or a silicon resin is used.
This coating is so that the heating chamber can be used even in a steam environment or corrosive air.
In addition, if this coating is performed, the intensity distribution of the microwave electric field in water can be detected.

マイクロ波を利用した加熱装置や乾燥装置において、加熱室内のマイクロ波の電界強度分布を視覚を通して検出する検出装置として利用する。     In a heating device and a drying device using microwaves, the detection device is used as a detection device that visually detects the electric field strength distribution of microwaves in the heating chamber.

本発明の第1実施形態である検出装置の部分的な拡大正面図である。It is a partial expanded front view of the detection apparatus which is 1st Embodiment of this invention. 第1実施形態の検出装置に設けた検出部を示した拡大部分図である。It is the expanded partial view which showed the detection part provided in the detection apparatus of 1st Embodiment. 図2上のA−A線に沿って切断した拡大断面図である。It is the expanded sectional view cut | disconnected along the AA line | wire on FIG. 図2に示す検出部10Aの電気回路図である。FIG. 3 is an electric circuit diagram of a detection unit 10A shown in FIG. 図2に示す検出部10Bの電気回路図である。FIG. 3 is an electric circuit diagram of a detection unit 10B shown in FIG. 本発明の第2実施形態である検出装置の検出部を示す拡大部分図である。It is an expanded partial view which shows the detection part of the detection apparatus which is 2nd Embodiment of this invention. 本発明の第3実施形態である検出装置の検出部を示す拡大部分図である。It is an expanded partial view which shows the detection part of the detection apparatus which is 3rd Embodiment of this invention. 本発明の第4実施形態である検出装置の部分的な拡大斜視図である。It is a partial expansion perspective view of the detection apparatus which is 4th Embodiment of this invention. 本発明の第5実施形態である検出装置の簡略斜視図である。It is a simplified perspective view of the detection apparatus which is 5th Embodiment of this invention.

符号の説明Explanation of symbols

10A、10B 検出部
11 基板
12a ル−プアンテナ
12b 直線アンテナ
13 検波ダイオ−ド
14 LED
15 検波ダイオ−ド
16 LED
17a、17b 直線アンテナ
18 切取り条溝
10A, 10B Detection unit 11 Substrate 12a Loop antenna 12b Linear antenna 13 Detection diode 14 LED
15 Detection diode 16 LED
17a, 17b Linear antenna 18 Cut groove

Claims (4)

マイクロ波を受けるアンテナと、前記アンテナによって受けたマイクロ波を検波するダイオ−ドと、前記ダイオ−ドの検波にしたがって給電されて点灯する光源とから形成した検出部を一つの基板に多数個配列し、マイクロ波の電界強度分布を検出部各々が備える光源の点灯状態より検出する構成としたことを特徴とするマイクロ波の検出装置。   A large number of detectors formed on one substrate are formed from an antenna that receives microwaves, a diode that detects microwaves received by the antenna, and a light source that is powered and lit according to the detection of the diodes. A microwave detection apparatus, wherein the microwave electric field intensity distribution is detected from a lighting state of a light source provided in each detection unit. 請求項1に記載した検出装置において、
アンテナの長さを変えてマイクロ波の検出感度を変えた検出部を設けると共に、検出部の検出感度にしたがって発光色の異なる光源を備え、光源の発光色の分布よりマイクロ波の電界強度分布を検出する構成としたことを特徴とするマイクロ波の検出装置。
The detection device according to claim 1,
In addition to providing a detection unit that changes the detection sensitivity of the microwave by changing the length of the antenna, it is equipped with a light source with different emission colors according to the detection sensitivity of the detection unit. A microwave detection apparatus characterized by being configured to detect.
請求項1又は2に記載した検出装置において、
基板にはマトリクス状の切取り条溝を設け、マトリクス状のセクション内に前記した各々の検出部を設け、
セクションを前記切取り条溝に沿って切取ることによってチップ形の検出部として使用可能としたことを特徴とするマイクロ波の検出装置。
In the detection device according to claim 1 or 2,
The substrate is provided with a matrix-shaped cut groove, and each detection unit described above is provided in the matrix-shaped section.
A microwave detection apparatus characterized in that it can be used as a chip-shaped detection unit by cutting a section along the cut groove.
請求項1又は2に記載した検出装置において、
アンテナの向きを変えた各検出部を設け、X、Y、Z方向のマイクロ波の電界強度分布を検出可能に構成したことを特徴とするマイクロ波の検出装置。




In the detection device according to claim 1 or 2,
A microwave detection apparatus comprising: each detection unit in which an antenna direction is changed; and a microwave electric field intensity distribution in X, Y, and Z directions can be detected.




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