JP2006321121A - Manufacturing method for liquid droplet ejecting head - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a manufacturing method for a highly precise liquid droplet ejecting head at a low cost. <P>SOLUTION: A material to be a passage member 12 is formed in a film on a front surface of an original plate 11 made uneven by a nearly equal pitch. The passage member 12 formed as a thin film is once released from the original plate 11. Next, a beam member 14 and the passage member 12 are tightly joined to each other by an adhesive or pressing, whereby passages 13 are sealed. Moreover, an intermediate holding member is released. Then, the beam member 14 is cut by, for example, a blade 44 in a passage direction. The beam member 14 is thus separated for each nozzle. The operation by an actuator is enabled independently for each passage so that ejection of ink droplets can be carried out for every dot. Furthermore, scanning working is carried out by a laser 42 or the like, whereby the nozzles are formed in the passage member 12 separated for each passage. The passages 13 can be formed at a time, and therefore costs can be reduced because highly precise alignment working is eliminated. Also a passage wall and an adjoining clearance can be made thin, so that the nozzles can be formed by a high density. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a method for manufacturing a droplet discharge head, and more particularly to a droplet discharge head and a manufacturing method in which a large number of nozzles are arranged at the same pitch as the resolution in the scanning width direction.

  Water-based inkjet printers currently on the market generally employ dye inks and pigment inks having a viscosity of about 5 cps and an order of 10 cps at most. Reasons such as prevention of ink bleeding when landing on the medium, increase in optical color density, suppression of swelling / short time drying of the medium due to reduced water content, or greater freedom in total design of such high quality ink Therefore, it is known that the printing performance can be improved by increasing the ink viscosity.

  On the other hand, in order to eject high-viscosity ink, a high-output pressure generation mechanism is required, which causes adverse effects such as an increase in cost and head size. Conventionally, a technique for forcibly lowering the ink viscosity at the time of ejection by separately providing a heater in the ejector is known (see, for example, Patent Document 1). However, the above-described method of heating ink causes ink deterioration and flow path damage. There is a fundamental problem to be accelerated, and the ink that can be used is limited to one that does not deteriorate due to heat.

  In addition, there is disclosed a technique (for example, see Patent Document 2) in which ink flow in the reverse direction when ink is ejected is suppressed by a beam-like valve and ink with higher viscosity is ejected.

  As a method of powering up the pressure generation mechanism itself using a seat bending beam that can obtain a large deformation, a technique using a diaphragm actuator that deforms due to a difference in thermal expansion with the heating element layer (see, for example, Patent Document 3), Further, a technique using a cantilever-like actuator with the same configuration (for example, see Patent Document 4) is disclosed. However, even with the above-described conventional technology, it is extremely difficult to stably eject a high-viscosity ink having a viscosity of 50 to 100 cps, which greatly exceeds 10 cps, at room temperature.

  On the other hand, the inventors of the present application give compression and rotational motion to the beam, and use the steep vertical motion when the seat bending direction is reversed, so that the high-viscosity ink droplet is released from the nozzle in the desired direction. The structure of the inkjet head to be made has already been proposed (for example, Japanese Patent Application No. 2004-322344).

  In the previous application, this head has a structure in which a large number of ink flow paths of an elongated hollow tube having a beam provided with an actuator and a nozzle are arranged. However, in the above configuration, the cost of parts of the elongated hollow tube used for forming the flow path member is high, and as a result, there is a problem that causes an increase in the cost of the entire head. Further, in the method of processing the elongated hollow tubes side by side, it becomes difficult to arrange them accurately as the nozzle interval becomes high in density, which may hinder the high density of the nozzles.

  Therefore, the present inventors have devised a head structure / manufacturing method that does not use an elongated hollow tube as a method for manufacturing the head at a lower cost and higher density.

Specifically, a film selected from epoxy resin or polyimide resin is provided on the surface of the master plate having the concave and convex grooves corresponding to the respective ink flow paths to form a concave and convex groove-like film, and this film is used as a beam. Then, the head is manufactured by dividing into each channel. Compared with the method of arranging a large number of tubes, the flow path can be formed in a lump so that the manufacturing cost can be reduced, the thickness of the partition wall of the flow path and the gap between adjacent channels can be reduced, and the nozzle arrangement pitch can be reduced. Therefore, it is possible to increase the density of the head.
JP 2003-220702 A (FIG. 1, pages 4 to 6) Japanese Patent Laid-Open No. 9-327918 (FIG. 1, pages 8 to 9) JP 2003-118114 A (FIG. 3, pages 4 to 5) JP 2003-34710 A (FIG. 13, pages 6 to 8)

  In consideration of the above-described facts, an object of the present invention is to provide a low-cost and highly accurate manufacturing method of a droplet discharge head.

  The method of manufacturing a droplet discharge head according to claim 1 includes a nozzle that discharges a droplet, a liquid flow path member that includes the nozzle, a beam member that is joined to the liquid flow path member or includes a liquid flow path member, and A first drive means provided to be joined to the beam member and deflecting the beam member; and a second drive means for deforming the beam member so as to be convex from a concave in a droplet discharge direction, The second driving means deforms the beam member so as to be convex from the concave in the droplet discharge direction, and the first driving means deflects the beam member, so that the beam member is moved by the second driving means. A method of manufacturing a droplet discharge head, wherein the droplet is discharged as a droplet from the nozzle by buckling and reversing deformation and applying an inertia in a discharge direction to the liquid in the vicinity of the nozzle, wherein the liquid flow path member includes: A film provided with irregularities of substantially equal pitch and the beam member It characterized in that to produce engaged.

  In the invention of the above configuration, the liquid flow path member including the nozzle is manufactured by joining the film provided with the unevenness of substantially equal pitch and the beam member, thereby comparing with the method of arranging the tubes. Since the flow paths can be collectively formed, the cost can be reduced, and the flow path walls and adjacent gaps can be thinned, so that the density of the nozzle can be increased.

  The method for manufacturing a droplet discharge head according to claim 2, wherein the film is provided on the surface of the original plate by spraying a material to be the liquid flow path member onto the surface of the original plate provided with irregularities of substantially equal pitch. It is characterized by being able to.

  In the invention with the above configuration, since a complicated supply hole with a narrowed flow path is unnecessary in structure, it can be simply configured with only a tube-shaped flow path and a common liquid pool part. The flow path can be easily manufactured by the method of jetting the material and transferring the uneven shape of the original. In addition, there is no step in the flow path due to the supply path, etc., and the liquid filling property and bubble discharging property are excellent.

  The method of manufacturing a droplet discharge head according to claim 3 is characterized in that the film is provided on the surface of the original plate by dipping an original plate in which irregularities of substantially equal pitch are provided in a liquid material.

  In the invention with the above configuration, a complicated supply hole with a narrowed flow path is not required because of its structure, so it can be simply configured with a tube-shaped flow path and a common liquid pool part, and can be used for liquid materials such as dip coating and plating. By dipping, the flow path can be easily manufactured by a method of transferring the uneven shape of the original plate. In addition, there is no step in the flow path due to the supply path, etc., and the liquid filling property and bubble discharging property are excellent.

  5. The method of manufacturing a droplet discharge head according to claim 4, wherein the film is formed by pressing a material on a surface of an original plate provided with concave and convex grooves having a substantially equal pitch, and transferring the concave and convex shape of the original plate. It is characterized by that.

  In the invention of the above configuration, since the complicated supply hole with the narrowed flow path is unnecessary in structure, it can be simply configured with only the tube-shaped flow path and the common liquid pool part, and the uneven shape of the original plate such as the molding method or the stamp method can be used. The flow path can be easily manufactured by the method of transferring the slag. In addition, there is no step in the flow path due to the supply path, etc., and the liquid filling property and bubble discharging property are excellent.

  The method for manufacturing a droplet discharge head according to claim 5 is characterized in that the material forming the film is a thermoplastic resin or a thermosetting resin.

  In the invention with the above configuration, the cost of the entire droplet discharge head can be reduced by using a thermoplastic resin or a thermosetting resin that is inexpensive and easy to handle.

  The method of manufacturing a droplet discharge head according to claim 6, wherein a film formed of the same material as the material forming the flow path member is previously formed on the surface of the beam member joined to the liquid flow path member. It is provided.

  In the invention having the above-described configuration, it is possible to improve the bondability between the beam member and the flow path member by providing a film of the same material as the material forming the flow path member on the surface of the beam member.

  The manufacturing method of the droplet discharge head according to claim 7, wherein after joining the sheet-like beam member and the film, the beam member is cut and separated for each flow path so that the liquid flow path for each nozzle is provided. It is characterized by forming.

  In the invention of the above configuration, when the beam member is channel-separated for each nozzle in advance, positioning joining is required between the beam member and the flow path member, whereas there is no need for positioning joining. And cost reduction.

  The method for manufacturing a droplet discharge head according to claim 8, wherein after the film provided on the surface of the original plate provided with unevenness of substantially equal pitch and the beam member are joined, the film and the original plate are bonded. It is characterized by peeling and separating.

  In the invention of the above configuration, when the film is peeled first, an intermediate holding member for supporting the film is required, but the beam member serves as a holding member to peel off after being joined to the beam member. Since there is no need for members, the process can be labor-saving, speeded up, and reduced in cost.

  According to a ninth aspect of the present invention, there is provided a method of manufacturing a droplet discharge head, wherein the liquid pool portion communicating with a plurality of the liquid flow path members and the liquid flow path members are integrally formed.

  In the invention with the above configuration, the liquid flow path in the droplet discharge head is a simple structure consisting of only the flow path member and the liquid pool portion, so that the integral formation is easy. This eliminates the need for a pool connection, thus saving labor, speeding up and reducing costs and improving the durability and reliability of the droplet discharge head.

  Since the present invention has the above-described configuration, it was possible to provide a method for manufacturing a liquid droplet ejection head with high accuracy at low cost.

<Whole device>
FIG. 1 shows an ink jet recording head according to a first embodiment of the present invention.

  As shown in FIG. 1, an ink jet recording head 10 has a flow path member 12 having an ink flow path 13 inside and a nozzle 16 at the tip, and a beam member 14 supporting the flow path member 12 joined to each other. The holding member 18 supports the structure.

  A piezo element 30 is joined to the beam member 14, and a signal electrode 32 is formed on the piezo element 30. The beam member 14, the piezo element 30, and the signal electrode 32 constitute an actuator 36. The beam member 14 also serves as a common electrode of the piezo element 30, and has a structure in which the piezo element 30 is sandwiched between the beam member 14 and the signal electrode 32. An electrode pad 33 is provided at one end of the signal electrode 32, and is connected to a switching IC (not shown) by a wiring 34. The piezo element 30 is driven by a signal from the switching IC, and the beam member 14 is controlled to be bent / not bent.

  The flow path member 12 can bend in the ink ejection direction (upper direction in the drawing) and in the reverse direction, and ink supplied from the ink pool 24 to the nozzle 16 through the ink flow path 13 is ink droplets in the ejection direction by inertia. Discharge as

  As described above, the ink used here prevents ink bleeding when landing on the medium, increases the optical color density, suppresses swelling of the medium by reducing the water content / short-time drying, or totals such high-quality ink. The ink viscosity is extremely high, specifically, a high viscosity ink having a viscosity much higher than 10 cps (for example, 50 to 100 cps) due to a large degree of freedom in designing.

  The holding member 18 is fixed to an arm 22 provided in the rotary encoder 20, and is pressed from both sides at a position offset from the rotation center of the rotary encoder 20 by the length of the arm 22, or a force is applied in the bending direction. The flow path member 12 joined to the beam member 14 is bent in the ink discharge direction or in the reverse direction.

  As shown in FIG. 1B, the holding member 18 may have a ladder-like structure in which a plurality of flow path members 12 are provided on the holding member 18.

  The actual operation will be described below.

  2 and 3 show the operation of the ink jet recording head according to the first embodiment of the present invention.

  As shown in FIG. 2B, when the flow path member 12 is previously bent in the ink discharge direction (upper side in the figure), the actuator 36 is driven when a signal instructing discharge is not sent from the switching IC. If the rotary encoder 20 is rotated in the direction of the arrow as shown in FIG. 2C, the flow path member 12 only bends in the ink discharge direction as shown in FIGS. 2C and 2D. Therefore, the flow path member 12 always remains convex in the ink discharge direction until the deflection amount reaches the maximum in FIG.

  That is, since sufficient acceleration in the ejection direction is not applied to the ink inside the flow path member 12 until the displacement from FIG. 2B to FIG. 2D, the ink droplets are not ejected from the nozzles 16. No (enlarged view (e)).

  Further, in FIG. 2 (d), after the amount of deflection becomes maximum and the rotary encoder 20 stops, the flow path member 12 is flattened by reverse rotation (FIG. 2 (a)), so that the flow path member 12 is in the initial position. Return to (b).

  On the other hand, as shown in FIG. 3B, a signal instructing ejection is sent from the switching IC, and the actuator 36 is driven so that the flow path member 12 is recessed (lower in the figure) with respect to the ink ejection direction. When the rotary encoder 20 is rotated forward (in the direction of the arrow in the drawing) as shown in FIG. 3C, the flow path member 12 is gradually discharged from the side closer to the rotary encoder 20, that is, from both ends. The direction of deflection changes in a convex direction (upward in the figure).

  When this change approaches the center from both ends, the flow path member 12 (or the beam member 14) undergoes steep buckling reversal at a certain point, and is rapidly deformed in the ink ejection direction (upper in the drawing) (FIG. 3 ( d) Highlighting the deformation in the center.

  Since the nozzle 16 is provided at the tip of the flow path member 12, the ink reaching the nozzle 16 is changed from the nozzle 16 to the ink droplet 2 as the flow path member 12 is deformed in the discharge direction due to the buckling inversion. It is discharged (enlarged view (e)).

  Further, in FIG. 3 (d), after the amount of bending becomes maximum and the rotary encoder 20 stops, the flow channel member 12 returns to the initial position by rotating backward to flatten the flow channel member 12 (FIG. 3 (a)). Then, the state returns to the state having the upward deflection in the ink ejection direction (FIG. 2B).

The deformation speed due to the buckling reversal is very large compared to the displacement caused by a normal actuator or the like, and even the high-viscosity ink employed in the present invention can be sufficiently discharged as the ink droplet 2. is there.
<First Embodiment>
FIG. 4 shows an ink jet recording head according to the first embodiment of the present invention.

  As shown in FIGS. 4A and 4B, the ink jet recording head 10 includes a flow path member 12 having an ink flow path 13 therein and a nozzle 16 at the tip, and a beam member 14 supporting the flow path member 12. And the holding member 18 supports both ends.

  In the vicinity of the nozzle 16 of the flow path member 12, for example, the tip is cut at an angle as shown in FIG. 4C and released toward the ink droplet ejection direction.

  In the present embodiment, as a method of manufacturing the flow path member 12 having the above structure, the flow path member 12 having a tubular structure is formed by resin anti-transfer as shown in FIG.

  As shown in FIG. 5 (a), a fluorine-based release layer is coated on a glass substrate on which concave and convex grooves are formed in advance by an etching method, and a material for forming the flow path member 12 is formed on the surface of the original plate 11. Film. Here, a liquid epoxy resin material diluted with a solvent from a spray type injector 40 is sprayed, dried, and cured in a plurality of times on the surface of the original 11 to form a thin film having a thickness of 10 to 20 μm.

  In addition to this method, a liquid resin material is used in the same manner as in the sputtering method or vapor deposition method for forming a film in the form of fine particles without diluting the material for the flow path member 12, as in the present embodiment. In addition to the dip coating method or plating method that forms a film on the surface by dipping in a liquid, the stamp molding method that presses a member previously formed into a thin film shape into a mold to process it into a concave and convex shape, and processing by a molding method such as a mold May be. In this embodiment, it is processed into a square shape having an outer width of about 65 μm and a height (the height of the unevenness in FIG. 5) of about 60 μm. However, the cross-sectional shape of the flow path 13 is not a square as shown in FIG. Various shapes such as triangles can be applied.

  Next, as shown in FIG. 5B, the flow path member 12 formed as a thin film is once peeled from the original plate 11. At this time, an intermediate holding member (not shown) is joined and peeled off together with the intermediate holding member, so that the thin-film channel member 12 can be reliably peeled and held. Further, the beam member 14 may be directly joined instead of the intermediate holding member.

  Next, the beam member 14 and the flow path member 12 are joined as shown in FIG. The flow path member 12 is tightly bonded to the beam member 14 by bonding with an adhesive or pressure bonding, and the flow path 13 is sealed. Here, an epoxy adhesive is applied to the surface of the beam member 14 in advance, the flow path member 12 is brought into close contact, and then the intermediate holding member is pressurized and heated to be joined. Further, an intermediate holding member (not shown) is peeled off.

  Next, as shown in FIG. 5D, the beam member 14 is separated for each nozzle 16 so that ink droplets can be ejected for each dot. For example, the beam member 14 is cut in the direction of the flow path by the blade 44, and the operation by the actuator 36 is enabled independently for each flow path. Here, a beam member 14 is cut at a pitch of about 85 μm by using a dicing blade having a thickness of 20 μm and cutting from the lower side in FIG. 5 so as not to damage an ink pool (not shown).

  Further, the flow path member is formed by performing scanning with a laser 42 or the like and forming the nozzle 16 in the flow path member 12 separated for each flow path.

  In the present embodiment, the flow path member 12 including the nozzle 16 is manufactured by joining the film provided with the unevenness of substantially equal pitch and the beam member 14 to arrange the tubes. Compared to the forming method, the flow path 13 can be formed in a lump, so that high-precision alignment work is not required and the cost can be reduced, and the flow path wall and the adjacent gap can be thinned. High density can be achieved.

In addition, since a complicated supply hole with a narrowed flow path is unnecessary in structure, it can be simply configured with only the tube-shaped flow path 13 and the common ink pool 24, and the flow path 13 can be easily manufactured by transfer molding. Further, there is no step in the flow path 13 due to a supply path or the like, and the liquid filling property and bubble discharging property are excellent.
Second Embodiment
FIG. 6 shows a method of manufacturing an ink jet recording head according to the second embodiment of the present invention.

  As shown in FIG. 6B, the vicinity of the nozzle 16 of the flow path member 12 has a tapered shape that becomes narrower as it approaches the tip, for example, and the opening diameter of the nozzle 16 is also smaller than the flow path 13. By reducing the diameter of the nozzle 16 to a small value, the diameter of the ejected ink droplet can be reduced to a minute dot, and blurring at the ejection / landing position can be reduced.

  In this embodiment, as a method of manufacturing the flow path member 12 having the above structure, the flow path member 12 having a taper structure is formed by resin anti-transfer as shown in FIG. 6 under the same conditions as in the first embodiment. Form.

  As shown in FIG. 6A, a material to be the flow path member 12 is formed on the surface of the original plate 11 in which a release layer is coated on a substrate on which uneven grooves are formed in advance by an etching method. Here, a liquid resin material is sprayed onto the surface of the original plate 11 from an unillustrated injector to form a thin film. Further, the film may be formed by a method such as dip, press stamp, plating, vapor deposition, sputtering, etc. The cross-sectional shape of the flow path 13 is not limited to a square as shown in FIG. The points that can be applied are the same as in the first embodiment.

  Next, as shown in FIG. 6B, the flow path member 12 formed as a thin film is once peeled from the original plate 11. At this time, an intermediate holding member (not shown) may be joined, and the thin film-like flow path member 12 may be reliably peeled and held by peeling the intermediate holding member together. Further, the beam member 14 may be directly joined instead of the intermediate holding member.

  At this time, a restriction is formed on the flow path member 12 in a tapered shape that becomes narrower toward the nozzle 16. In addition to embossing or stretching, etc., a taper-shaped drawing shape may be provided on the original 11 from the beginning as in the present embodiment, and may be peeled off.

  Next, the beam member 14 and the flow path member 12 are joined as shown in FIG. The flow path member 12 is tightly bonded to the beam member 14 by bonding with an adhesive or pressure bonding, and the flow path 13 is sealed. Further, an intermediate holding member (not shown) is peeled off.

  Next, as shown in FIG. 6D, the beam member 14 is separated for each nozzle 16 so that ink droplets can be ejected for each dot. For example, the beam member 14 is cut in the direction of the flow path by the blade 44, and the operation by the actuator 36 is enabled independently for each flow path.

  Further, the flow path member is formed by performing the scanning process with the laser 42 or the like and forming the nozzle 16 in the flow path member 12 separated for each flow path, as in the first embodiment.

  As the shape of the flow path member 12 in the vicinity of the nozzle 16, the shapes as shown in FIGS. That is, the nozzle 16 may be simply squeezed toward the nozzle 16 as shown in FIG. 6E, or a straight portion is provided near the nozzle 16 as shown in FIG. 6F, and the diameter of the nozzle 16 is related to the nozzle cut position accuracy. It may be possible to keep it constant. Alternatively, as shown in FIG. 6G, the landing position may be controlled by making the cross section in which the nozzle 16 is provided an inclined surface that is not perpendicular to the ejection direction but inclined at an angle θ.

Since the present embodiment is configured as described above, the processing position accuracy of the tapered portion is higher than that in the method of tapering the tubular channel member and joining the beam member 14, and the processing is performed for each channel. Since there is no need, it can be a manufacturing method with low man-hours, low cost and high productivity.
<Third Embodiment>
FIG. 7 shows a method of manufacturing an ink jet recording head according to the third embodiment of the present invention.

  In the present embodiment, as a method of manufacturing the flow path member 12, the flow path member 12 and the ink pool 24 are integrally formed by processing a sheet-shaped flow path member material 12 'as shown in FIG.

  As shown in FIG. 7, the flow path member 12 and the ink pool 24 can be integrally formed at the same time by pressing and molding the sheet-shaped flow path member material 12 ′ from both sides with the original plates 15 </ b> A and 15 </ b> B. .

  At this time, the flow path member material 12 ′ is in close contact with the original plate 15 </ b> A (not peeled), and the original plate 15 </ b> B is first peeled and joined to the beam member 14 to join the beam member 14 without using an intermediate support member. can do.

  Further, a thin film is formed of the same material as the flow channel member material 12 'on the surface of the beam member 14, that is, the surface to be bonded to the flow channel member 12, so as to improve the bondability and adhesion at the time of bonding and sealing. Also good.

  Further, the cross-sectional shape of the flow path 13 is the same as that of each of the above embodiments in that various shapes such as a square shape, a trapezoidal shape, and a triangular shape can be applied in addition to the square shape as shown in FIG.

Since the present embodiment is configured as described above, it is not necessary to join the flow path member 12 and the ink pool 24, so that the manufacturing method is high in reliability, low in man-hours, low in cost, and high in productivity. Can do.
<Fourth embodiment>
FIG. 8 shows a method of manufacturing an ink jet recording head according to the fourth embodiment of the present invention.

  In the present embodiment, as a method of manufacturing the flow path member 12, the flow path member 12 is formed by processing a sheet-shaped flow path member material 12 'as shown in FIG. As shown in FIG. 8, the flow path member 12 can be formed by pressing and molding the sheet-shaped flow path member material 12 ′ with the pressing tool 17.

  As shown in FIG. 8A, the sheet-like channel member material 12 ′ is pressed against the beam member 14 with the pressing tool 17 and joined. In order to form the channel 13 as shown in FIG. 8B, the channel 13 may be formed in advance by pressing toward the flexible intermediate support member (not shown) before pressing the beam member 14. Alternatively, various methods such as bonding to the beam member 14 with a resin sheet having a low melting point interposed therebetween and heating to elute after processing can be applied.

At this time, a thin film is formed of the same material as the flow channel member material 12 'on the surface of the beam member 14, that is, the surface to be bonded to the flow channel member 12, so as to improve the bondability and adhesion at the time of bonding and sealing. May be.
<Other forms>
As described above, each embodiment has a configuration in which ink droplets are selectively ejected based on image data and an image is recorded, but the ejected liquid is not limited to ink. For example, industrially used liquids such as creating color filters for displays by discharging ink onto polymer films or glass, or forming bumps for component mounting by discharging welded solder onto a substrate The droplet discharge head according to the present invention can be applied to all droplet discharge (ejection) apparatuses.

It is a figure which shows the inkjet recording head which concerns on this invention. It is a figure which shows operation | movement of the inkjet recording head which concerns on this invention. It is a figure which shows operation | movement of the inkjet recording head which concerns on this invention. It is a figure which shows the inkjet recording head which concerns on this invention. It is a figure which shows the manufacturing method of the inkjet recording head which concerns on the 1st form of this invention. It is a figure which shows the manufacturing method of the inkjet recording head which concerns on the 2nd form of this invention. It is a figure which shows the manufacturing method of the inkjet recording head which concerns on the 3rd form of this invention. It is a figure which shows the manufacturing method of the inkjet recording head which concerns on the 4th form of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Inkjet recording head 11 Original 12 Flow path member 13 Flow path 14 Beam member 16 Nozzle 18 Holding member 20 Rotary encoder 24 Ink pool

Claims (9)

A nozzle for discharging droplets;
A liquid flow path member including the nozzle;
A beam member including the liquid flow path member and the liquid flow path member;
A first driving means provided to be joined to the beam member and deflecting the beam member;
Second driving means for deforming the beam member so as to be convex from the concave in the droplet discharge direction;
With
The second driving means deforms the beam member so as to be convex from the concave in the droplet discharge direction,
The first driving means bends the beam member, so that the beam member is buckled and inverted by the second driving means,
A method for manufacturing a droplet discharge head, wherein the liquid in the vicinity of the nozzle is discharged as a droplet from the nozzle by giving inertia in a discharge direction,
The method of manufacturing a droplet discharge head, wherein the liquid flow path member is manufactured by joining a film provided with unevenness of substantially equal pitch and the beam member.
2. The droplet discharge according to claim 1, wherein the film is provided on the surface of the original plate by spraying a material to be the liquid flow path member onto the surface of the original plate provided with unevenness of substantially equal pitch. Manufacturing method of the head.
2. The method of manufacturing a droplet discharge head according to claim 1, wherein the film is provided on a surface of the original plate by dipping an original plate in which irregularities of substantially equal pitch are provided in a liquid material.
2. The droplet discharge head according to claim 1, wherein the film is formed by pressing a material onto a surface of an original plate provided with uneven grooves having a substantially equal pitch, and transferring the uneven shape of the original plate. Manufacturing method.
5. The method of manufacturing a droplet discharge head according to claim 1, wherein the material forming the film is a thermoplastic resin or a thermosetting resin.
6. The film formed of the same material as the material forming the flow path member is provided in advance on the surface of the beam member to be joined to the liquid flow path member. A method for manufacturing a droplet discharge head according to any one of the above.
7. The sheet-shaped beam member and the membrane are joined, and then the beam member is cut and separated for each flow path to form a liquid flow path for each nozzle. A method for manufacturing a droplet discharge head according to any one of the above.
The film and the original plate are peeled and separated after the film provided on the surface of the original plate provided with unevenness of substantially equal pitch and the beam member are joined. 8. A method for manufacturing a droplet discharge head according to any one of items 7 to 9.
9. The liquid droplet ejection head according to claim 1, wherein the liquid pool portion communicating with the plurality of liquid flow path members and the liquid flow path member are integrally formed. Manufacturing method.

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