JP2006313462A - Carriage system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a carriage system for carrying articles without interruption while efficiently, rapidly updating map data on carrying routes when the map data are altered in the system having a plurality of carriages 1 which hold map data on areas, which they travel, and travel according to the map data to carry articles; and controllers 3 and 7 which control the carriages. <P>SOLUTION: The controllers 3 and 7 are provided with designation means which designate carriages and updating means which update the map data on the designated carriages 1. The controllers update the map data of the carriages 1 in higher preferential order. Carrying trucks 1, to which updating is not made, continue usual carrying operations. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a transport cart system for transporting articles by a cart in a clean room of a manufacturing factory such as a semiconductor or a liquid crystal display device. In particular, the present invention relates to a technique for efficiently and quickly updating map data of a conveyance path stored in a carriage and a controller that manages the carriage when a conveyance path is added or changed.

  In a clean room of a manufacturing plant for semiconductors and liquid crystal display devices, processing objects (semiconductor wafers and glass substrates for liquid crystal display devices) are transported between many stations (places where various processing and processing are performed on the processing objects). A transport cart system for doing this is known. With the progress of the semiconductor and liquid crystal industries, there is a demand for a transport cart system that can transport a processing object to a target station more quickly, efficiently, and quickly.

  For example, in a semiconductor manufacturing factory, a processing object goes through the same process many times and is processed. In such a manufacturing factory, as an aspect for efficiently and quickly transporting a processing object to a target station, an intrabay that is a loop-shaped traveling route for transporting between stations is provided. Patent Document 1 discloses a technique for providing a plurality of interbays that are loop-shaped long-distance travel routes that connect between the intrabay and the intrabay, and performing transportation by running these travel routes on a plurality of carriages. It is disclosed. The cart that travels in the intrabay and interbay stores in advance the map of the bays that can be traveled as map data, and when it receives a transport command, it selects the preferred transport route by itself and travels unattended. Transport.

  The cart in Patent Literature 1 can automatically select a route from a transport path storing map data and efficiently transport the map. However, if the transport route that can be driven is added or changed due to factory expansion or station position change, the map data stored in the cart will be updated and the actual transport route contents will be updated. It is necessary to carry it by matching. Patent Document 2 discloses a technique for efficiently and quickly updating cart map data when a conveyance path is added or changed.

In the technique of Patent Document 2, several zones are assumed on the conveyance path, and a zone controller for managing a carriage traveling in the zone is provided. All the zone controllers are provided with communication means capable of transmitting and receiving data to and from other controllers and managed carts. When the map data of one zone controller is updated, the controller transmits the update data of the map data to the other zone controllers and the cart to be managed by the transmission program. The other zone controllers that have received the update data transmit the update data to the carts that they manage. With the technique of Patent Document 2, the map data stored in all zone controllers and carts is efficiently updated to the latest information.
Japanese Patent No. 3508130 Japanese Patent Laid-Open No. 2004-227058

  The techniques of Patent Document 1 and Patent Document 2 are both excellent techniques as a transport cart system that operates efficiently. The present invention provides a technology for further developing the above-described conventional technology and updating the data of the transport path more quickly and efficiently. With the transport cart system of the present invention, the transport path data can be updated efficiently and quickly, and the transport of the normal processing object can be performed without interruption.

  A first aspect of the present invention relates to a transport cart system that includes map data of a traveling region, a plurality of carts that travel and transport according to the map data, and a controller that manages the cart. The transport cart system of the present invention is characterized in that the controller includes means for designating a transport cart and means for updating map data of the designated transport cart.

  According to the present invention, when the controller side designates a cart and updates the map data, it is possible to perform the update in order from the cart with the highest priority for updating the map data. Further, for carts whose traveling area is not related to the change of the map data, the update of the map data can be omitted. As a result, the map data can be updated efficiently, and the cart that does not perform the update can continue normal conveyance work. As a result, the entire transport cart system can be operated more efficiently than before.

  The transporting cart system according to claim 2 is characterized in that the controller includes means for designating a position for updating the map data in the designated cart. By updating the map data at the specified position, it is possible to efficiently update the map data without interfering with the traveling of other carts. Even if the map data is being updated, the entire cart system can be updated. Occupancy rate does not decrease.

  The cart system according to claim 3 is characterized in that the controller includes means for confirming a map data version of the designated cart. By checking the version, it is possible to identify the carts that need to be updated and the carts that do not need to be updated, and to rank the carts that need to be updated. By updating the map data only for the cart that needs to be updated, it becomes possible to perform the update operation more quickly. Even if a cart that does not need to be updated is designated, unnecessary update can be stopped by checking the version and map data can be updated more efficiently.

  With the transport cart system of the present invention, the transport route data can be updated quickly and efficiently. The transport cart system of the present invention enables the transport of normal processing objects to be performed without interruption while updating the transport path data efficiently and quickly.

The best mode for carrying out the invention is listed below.
(Embodiment 1) The transport cart system includes map data of a traveling region, and includes a plurality of carts that travel and transport according to the map data, and a controller that manages the carts. Means for designating and means for updating the map data of the designated cart are provided.
(Mode 2) The controller includes means for designating a position for updating the map data on the designated cart.
(Mode 3) The controller includes means for confirming the map data version of the designated carriage.
(Form 4) The conveyance path is divided into several zones, and a zone controller is provided for managing a carriage traveling in the zone for each zone.
(Mode 5) An integrated controller that controls a plurality of zone controllers is provided, and the integrated controller includes means for communicating with all the zone controllers.
(Mode 6) The zone controller and the integrated controller each include a central processing unit (CPU), storage means, input / output means, and communication means.
(Mode 7) A communication line is arranged along the conveyance path. The carriage and the zone controller perform transmission / reception via a communication line.
(Mode 8) The map data is composed of transport path data, teaching data that specifies detailed operations of the carriage when traveling on the transport path, or transport path data including teaching data.

  An embodiment in which the present invention is applied to an overhead traveling type carriage system will be described. Compared with a ground traveling type transport cart system, the overhead traveling type transport cart system can travel at a higher speed without the possibility of a person near the travel route, and can increase the transport speed.

  FIG. 1 is a diagram schematically showing an overall arrangement of a transport cart system 10 of the present embodiment. The transport cart system 10 of this embodiment is a clean room of a manufacturing factory for semiconductors, liquid crystal display devices, and the like, and a processing object (semiconductor wafer or glass substrate of a liquid crystal display device) is transferred to a single station 11 (various processing objects. It is used for automatic transfer in an unattended state from a place where processing and processing are performed to another station 11.

  The transport cart system 10 of the present embodiment includes a plurality of carts 1 that transport an object to be processed, a transport path 2 along which the cart 1 moves, and a plurality of carts 1 that are within a predetermined area of the transport path 2. A zone controller 3, an integrated computer 7 that controls all the zone controllers 3, and a communication line 4 that is a part of communication means between the carriage 1 and the zone controller 3 are provided.

  The zone controller 3 and the integrated controller 7 include a central processing unit (CPU), storage means, input / output means, and communication means.

  The transport path 2 in this embodiment is composed of intrabays 21, 22, 23, 24, 25, and 26 for transporting between stations 11 at relatively short distances, and an interbay 27 that connects the intrabays. Is done. The intrabays 21 to 26 are arranged so that the processing object can be carried out and carried in from the plurality of stations 11, and have a loop shape that can be circulated. The inter bay 27 is arranged so that the carriage 1 can be put in between the intra bays 21 to 26, and has a loop shape that can circulate.

  In FIG. 1, the number of carriages 1, the shape of the carry-out path 2, and the number of stations 11 are limited, but in reality, a great number of elements are installed in a complicated manner.

  Each carriage 1 includes a communication means 5c and a carriage controller 1a capable of various controls and processes independently. The cart controller 1a includes at least a central processing unit (CPU) and storage means capable of storing map data as readable / writable data.

  When the carriage 1 receives a transportation command from one station 11 to another station 11 output from the zone controller 3, the carriage controller 1a can determine the transportation route by itself and travel.

  The zone controller 3 transmits only instructions for the position of the start and end points of conveyance to each carriage 1, and each carriage 1 that receives the instruction determines the conveyance path, so that the process for determining the conveyance path is distributed. Thus, the load on the zone controller 3 is reduced. In addition, the degree of freedom and flexibility of control are increased, and the cart 1 can efficiently operate the system by reducing the waiting time for the instruction of the transport route from the zone controller 1 and the waiting time due to the traffic jam between the carts 1. Will be able to.

  The communication line 4 is provided so as to be completely along the transport path 2. The carriage 1 traveling on the transport path 2 can communicate with the communication line 4 in a very close state regardless of whether the carriage 1 is stopped or traveling. The communication control system of the transport cart system 10 of this embodiment will be described in more detail with reference to FIGS. 2 (a) and 2 (b).

  Communication between the cart 1 and the zone controller 3 in this embodiment is performed by feeder radio. The feeder wireless means 5 includes a communication line 4 configured by parallel two-wire feeder lines, a master modem (M) 5a for processing communication between the zone controller 3 and the communication line 4, and the carriage 1. It consists of communication means. The communication means provided in the carriage 1 is a modem (M) 5b and an antenna 5c. The antenna 5 c is disposed on the carriage 1 so as to maintain a certain proximity distance to the communication line 4.

  The length of the communication line 4 of one channel is limited practically. For this reason, although not shown in FIG. 1 and FIG. 2A, in practice, the communication lines 4 of predetermined lengths of different channels that are cut from each other follow the shape of the transport path 2 through a certain gap. Installed. In addition, one zone has a range in which communication can be covered using three communication lines 4 having a predetermined length, and the communication lines 4 of these three channels are controlled by a single zone controller 3. .

  Although the feeder wireless means 5 has the above-mentioned restrictions, when the proximity wireless communication is performed, the communication lines 4 of different channels are installed along the transport path 2 so close to each other that the communication is not interrupted. Even so, there is no interference with the cart 1 passing through the communication line 4 of another channel, and communication is always possible only with the cart 1 passing through the communication line 4 of that channel. The communication cart system 10 is suitable as a communication means between the cart 1 and the zone controller 3.

  The transport cart system 10 in this embodiment includes a non-contact power supply means 6. The non-contact power supply means 6 includes a power supply line 6a for power supply, a control panel (SCSP panel) 6b, and a power receiving coil (not shown) provided on the carriage side. The power supply line 6 a is installed so as to be completely along the transport path 2. When an alternating current is passed through the power supply line 6a, the carriage 1 is supplied with power by electromagnetic induction of a power receiving coil provided so as to be in close contact with the power supply line 6a.

  The non-contact power supply means 6 is suitable for a clean room because there is no contact portion between the power line and the carriage and no dust is generated due to the contact as compared with the conventional trolley power reception. However, the length of one power supply line 6a is limited to a certain length, and the number of carriages 1 that can be fed by one power supply line 6a is limited.

  In consideration of such restrictions, the transport cart system 10 of the present embodiment is constructed. In the present embodiment, a plurality of power supply lines 6a having a predetermined length are arranged along the transport path 2, and power cannot be supplied at the joint between the power supply lines 6a and 6a. There is a case. Therefore, in the present system 10, the power supply line 6a is laid in a pair of left and right along the conveyance path 2, and the corresponding receiving coil of the carriage 1 is also provided on the left and right. The joints between the left and right power supply lines 6a are arranged so as not to come to the same longitudinal position, and the supply of power is prevented from being interrupted.

  In the transport cart system 10 having the above-described configuration, when the transport path 2 is changed or added, the integrated controller 7 creates map data indicating the latest layout of the transport path 2, and the zone controller 3 having old map data. A flow for selectively updating only the map data of the cart 1 will be described with reference to FIG.

  The map data here may include teaching data for designating detailed operations of the carriage 1 when traveling on the transport path 2 in addition to the layout data of the transport path 2. Usually, the teaching data is obtained by actually moving the carriage 1 on the conveyance path 2 and measuring the operating conditions during the most preferable operation in detail, and the teaching data stored once is the carriage having the same shape. 1 is applicable.

  The cart 1 in this embodiment can store the operating conditions during operation as teaching data in the storage means of the cart controller 1 a, and the stored teaching data is transmitted to the zone controller 3 via the communication line 4. Or can be removed from the carriage 1 using various storage media. The teaching data obtained in this way is incorporated into the map data as an operation command and is used as the operation condition of the carriage 1 during traveling.

  When the transport path 2 is changed or added, map data of the new transport path 2 is provided and stored in the integrated controller 7 (step S2). The map data of the new transport path 2 is given a version different from that before the change or addition (step S4). When the download setting is completed, the integrated controller 7 inquires the zone controller 3 about the version of the map data stored in the zone controller 3 (step S6), and the zone controller 3 that has received the inquiry returns the version. (Step S8).

  Here, when the version answered by the zone controller 3 matches the version of the map data for which the download setting of the integrated controller 7 has been performed, the map data of the zone controller 3 has already been updated, and therefore no update is performed. . If the version answered by the zone controller 3 is different from the version of the map data for which the download setting of the integrated controller 7 is performed, the process proceeds to step S10, the map data is transmitted from the integrated controller 7, and the zone controller 3 receives the map data. Receive and store (step S12).

  The integrated controller 7 that has transmitted the map data determines whether or not to issue an instruction to move the cart 1 for updating the map data in step S14. This determination is made by an operator giving an instruction to the integrated controller 7, or by considering the number of carriages moved by the integrated controller 7 and the operation status of the transport carriage system.

  If a movement instruction is to be given to the carriage 1, step S14 is YES and the process proceeds to step S16. In step S16, the integrated controller 3 designates a specific carriage 1 and issues a movement instruction. In step S18, the zone controller 3 that has received the movement instruction checks whether or not the designated carriage 1 exists in the zone in charge, and if there is, the instruction to move the designated carriage 1 to the designated location. give. The specific cart 1 that has received the designation moves to the designated location (step S20).

  In the update of the map data in the present embodiment, when the movement instruction is received, the carriage 1 is temporarily stopped at the movement destination. By temporarily stopping and updating the map data, it is possible to prevent the cart from accidentally accessing a new route or station that is changed or added after the update, and it is possible to prevent troubles due to layout changes.

  The destination to which the trolley 1 is designated can be designated by a worker to designate the position used for the maintenance of the trolley, and any position that does not interfere with the traveling of the other trolley 1 can be designated, paused, and updated. Processing can also be performed. An arbitrary position that does not interfere with the traveling of the other cart 1 means that there is a detour and the other cart 1 can reach all the target stations 11 by selecting the detour, and the bogie 1 travels. It is a position where there is not much.

  If the movement instruction of the carriage 1 is not issued, the process of the integrated controller 7 is NO in step S14 and proceeds to the process of step S22. When issuing the movement instruction | indication of the trolley | bogie 1, the process of the download start instruction | indication of step S22 is performed after the process of step S16 is complete | finished. In step S <b> 22, the integrated controller 7 instructs the zone controller 3 to start downloading the map data of the carriage 1.

  In step S24, the zone controller 3 that has received the download start instruction inquires about the version of the map data of the carriage 1 (step S24), and the carriage 1 that has received the inquiry returns the version (step S26). Here, when the version answered by the carriage 1 matches the version of the map data for which the download setting of the integrated controller 7 has been performed, the map data of the carriage 1 has already been updated, so the update is not performed.

  If the version answered by the cart 1 is different from the version of the map data for which the download setting of the integrated controller 7 is performed, the process proceeds to step S28, and the map data is transmitted from the zone controller 3 to the cart 1. The carriage 1 receives the map data and stores it in the storage means of the carriage controller 1a (step S30).

  The zone controller 3 that has transmitted the map data to the carriage 1 transmits a map data download completion report to the integrated controller 7 (step S32). The integrated controller 7 recognizes the completion of downloading the map data (step S34).

  In step S36, the integrated controller 7 inquires of the zone controller 3 about the version of the map data, and in step S38, the zone controller 3 reports the version. Upon receiving the report, the integrated controller 7 securely confirms the version of the map data.

  In this way, the map data of the zone controller 3 and the cart 1 is reliably updated, and after the integrated controller 7 confirms the version of the map data of the zone controller 3 and the cart 1, the integrated controller 7 An instruction to switch to the latest version of the map data is output (step S40).

  When the zone controller 3 inputs the switching instruction from the integrated controller 7, the zone controller 3 outputs the map data switching instruction to the carriage 1 and switches the map data used by itself to the latest version (step S42). ). The cart 1 that has received the instruction switches the map data to be used to the latest version (step S44), and the processing is completed (step S46).

  In the map data to be transmitted in the above embodiment, the entire map data can be transmitted to update all the data, and the difference data of only the changed or added part is sent to the zone controller 3 and the carriage 1. It is possible to transmit and rewrite and store only changes or additions from previous map data.

  When the difference data is transmitted and the map data is partially updated, the map data can be updated smoothly by making the version management hierarchical. That is, when all the map data is updated, the version of the data is greatly changed, and when the update is performed with the difference data, the version given to the map data is set as the minor version. Management and updating can be facilitated. Similarly, it is possible to easily update only the teaching data included in the map data.

  The designation of which cart 1 is to be used for updating the map data can be designated in units of the intrabays 21 to 26 and the interbay 27 or in addition to designation for each cart 1. is there. When updating the map data for all the trolleys 1, since all the trolleys 1 are temporarily stopped, there is no need to designate the movement position of the trolleys 1, and all the trolleys 1 are surely received. The map data can be updated.

  In the transport cart system of this embodiment, when the integrated controller 7 designates the cart 1 and updates the map data, it is possible to perform the update in order from the cart 1 with the highest priority for updating the map data. . As a result, the map data can be updated efficiently, and the cart 1 that does not perform the update can continue normal conveyance work.

  Moreover, since the cart 1 that has designated the updating of the map data updates the map data at a position that does not interfere with the traveling of the other carts 1, the operating rate of the entire cart system does not decrease even during the updating of the map data. .

  Further, by checking the version of the map data between the integrated controller 7 and the zone controller 3, the zone controller 3 that needs to update the map data and the zone controller 3 that does not need to be identified are identified. By checking the version of the map data, the cart 1 that needs to be updated and the cart 1 that does not need to be updated are identified. As a result, the update operation can be performed more quickly by updating the map data only for the necessary carriage 1 of the necessary zone controller 3.

  As mentioned above, although the specific example of this invention was described in detail in the Example, these are only illustrations and do not limit a claim. The technology described in the claims includes various modifications and changes of the specific examples illustrated above. For example, in the intrabay in the embodiment, only a configuration having almost no branch is disclosed, but if the conveyance path is in a loop shape, it does not go through a branch path and an interbay that pass through various paths. It is possible to provide a detour that connects the intrabays. In addition, it is obvious that the present invention can be easily applied to carts other than the overhead traveling type.

It is a figure which shows typically the whole arrangement | positioning of the conveyance trolley system 10 of an Example. It is a figure explaining the communication control system of the conveyance trolley system 10 of an Example. It is a figure explaining the communication control system of the conveyance trolley system 10 of an Example. It is a figure which shows the flow in which the integrated controller of an Example updates the map data of a zone controller and a trolley | bogie.

Explanation of symbols

1: Cart 2: Transport path 3: Zone controller 4: Communication line 5: Feeder radio means 6: Non-contact power supply means 6
7: Integrated controller 10: Carriage cart system 21, 22, 23, 24, 25, 26: Intrabay 27: Interbay

Claims (3)

A cart system that includes a plurality of carts that hold map data of a traveling region, travel according to the map data, and transport and a controller that manages the carts,
A transport cart system, wherein the controller comprises means for designating a cart and means for updating map data of the designated cart.   2. The transport cart system according to claim 1, wherein the controller includes means for designating a position for updating the map data in the designated cart.   The transport cart system according to claim 1 or 2, wherein the controller includes means for confirming a map data version of the designated cart.

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