JP2006308378A - Thickness measuring method and its device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a thickness measuring method and its device capable of utilizing at its maximum a measuring capacity of a versatile laser displacement gage. <P>SOLUTION: Movement of laser displacement gages 121, 122 is started from a position where a measuring object 300 does not exist between the pair of the laser displacement gages 121, 122, and the laser displacement gages 121, 122 are driven after detecting the edge of the measuring object 300 by a laser switch 130 arranged on the moving direction side, and measurement is performed by emitting laser light, and distance data to the front/back surface of the measuring object 300 are measured. Hereby, since the laser light is not emitted from the laser displacement gages on the position where the measuring object 300 does not exist between the pair of the laser displacement gages 121, 122, mutual interference of the laser light does not occur. Since the pair of the laser displacement gages 121, 122 are arranged so that each optical axis agrees mutually, highly accurate measurement becomes possible. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a thickness measuring method and apparatus for measuring the thickness of an object to be measured such as a sheet material.

  Conventionally, this type of thickness measurement method and apparatus generally measure a thickness of a sheet material (including a member having a profile) by scanning a pair of laser displacement meters facing each other. is there. In addition, in order to accurately measure the thickness using a laser displacement meter, it is necessary to accurately match the projection axes of the laser displacement meter.

  However, as a result of this, mutual interference between laser displacement meters occurs when no sheet material is present, and as a countermeasure against this, it is common to use the function of preventing the mutual interference of the laser displacement meter by slightly shifting the optical axis. It is.

  Further, as this type of measuring method or measuring apparatus, for example, a shape measuring method and apparatus disclosed in Japanese Patent Laid-Open No. 01-152306 (Patent Document 1), or Japanese Patent Laid-Open No. 08-136230 (Patent Document 2). And a thickness measuring method using a laser distance meter disclosed in Japanese Patent Application Laid-Open No. 11-295039 (Patent Document 3).

  The shape measuring method and apparatus disclosed in the above-mentioned Patent Document 1 scans the object to be measured in the width direction with a pair of displacement sensors provided with the object to be measured moving in a certain direction, and at each constant pitch. The amount of displacement of the display surface is detected, and the detection result is processed to obtain the cross-sectional shape of the object to be measured.

The apparatus for measuring a cross-sectional shape of a thick body having a steep slope disclosed in Patent Document 2 is perpendicular to the width direction on the measurement cross section of the thick body with respect to the surface of the thick body having a steeply inclined surface on one surface. A laser distance measuring sensor comprising a means for irradiating a laser beam having a maximum light spot diameter of 1.0 mm or more in a direction to be measured and a photoelectric conversion element that receives laser reflected light from the surface and converts it into an electrical signal; A scanning means that keeps the distance between the laser distance sensor and the thick body constant, and scans the laser light over the entire width of the measurement cross section of the thick body, and the light quantity of the laser light in response to the detection limit of the reflected light. The laser power control function increases the signal output from the photoelectric conversion element while the laser beam scans the thick body. Together sequentially sampled every small pitch of less than the diameter of the light spot (L _MIN) (p), calculates the displacement amount of components from an initial reference value along the laser beam central axis from a difference between the sampling signals output adjacent to each other, the And an arithmetic circuit that outputs a distance measurement value for each small pitch as an electric signal based on the calculation result.

The thickness measurement method using the laser distance meter disclosed in Patent Document 3 described above is such that laser distance meters are arranged on both sides of the target material to be measured, and the distances L1 and L2 between each laser distance meter and the target material are determined. In the method of measuring and obtaining the thickness t of the target material by calculation from the distance D between the two laser distance meters and the measured values L1 and L2, the measurement value is corrected according to the surface roughness of the target material. Is what you do.
Japanese Unexamined Patent Publication No. 01-152306 Japanese Patent Laid-Open No. 08-136230 Japanese Patent Laid-Open No. 11-295039

  However, accurate measurement positions and data cannot be obtained when the optical axes of a pair of opposed laser displacement meters are used while being shifted. Usually, in this case, it is handled as a range allowed as a measurement error.

  In addition, when the mutual interference prevention function of the laser displacement meter is used, the data sampling speed of the laser displacement meter is reduced. That is, when two laser displacement meters are used, they are driven alternately to emit laser light, so that the measurement speed at this time is less than or equal to half of the measurement speed at the time of stand alone.

  As a result, there was a problem that the measurement capability of the laser displacement meter could not be utilized to the maximum extent.

  In addition, in order to perform high-precision and high-speed measurement without using the optical axis shifting method and the mutual interference prevention function as described above, a high-speed laser displacement meter is required, so an expensive model is adopted. It was connected to.

  The present invention has been made in view of the above problems, and an object of the present invention is to provide a cross-sectional shape measuring method and apparatus capable of maximizing the measurement capability of a general-purpose laser displacement meter.

  In order to achieve the above object, the present invention is arranged to face each other with a predetermined interval L1 so that the optical axes coincide with each other, and each of them measures the distances La and Lb to the front and back surfaces of the object to be measured. A laser displacement meter and a device under test for detecting the presence of the object to be measured at a position at a distance L2 in the movement direction front side from the optical axis, with a distance L2 being disposed on the front side in the movement direction of the laser displacement meter at the time of measurement. An object detection sensor, a moving means for moving the pair of laser displacement meters in parallel, a position detection means for detecting the position of the pair of laser displacement meters in the moving direction, and drive control and predetermined calculation processing are performed. A measuring device including a computer device, and the computer device moves the pair of laser displacement meters in a width direction of an object to be measured disposed between the pair of laser displacement meters. A thickness measuring method for measuring a thickness of the object to be measured by measuring distances La and Lb to the front and back surfaces of the object to be measured in an axial direction, wherein the computer device is configured to measure the pair of laser displacements at the time of measurement. The movement of the laser displacement meter is started from a position where the measured object does not exist between the meters, and the starting edge of the measured object is detected by the measured object detection sensor arranged on the moving direction side. When the distance L2 is moved, the pair of laser displacement meters are driven to perform the measurement to acquire distance data, and after the end edge of the measurement object is detected by the measurement object detection sensor, the distance A thickness measurement method is proposed in which the driving of the pair of laser displacement meters is stopped when L2 is moved.

  According to the thickness measuring method of the present invention, the movement of the laser displacement meter is started from the position where the measurement object does not exist between the pair of laser displacement meters, and the measurement object is arranged on the moving direction side. After the edge of the object to be measured is detected by the sensor, the pair of laser displacement meters are driven to perform measurement, and distance data is acquired. As a result, the laser displacement meter is not driven at a position where the object to be measured does not exist between the pair of laser displacement meters, so that laser light is not emitted from the laser displacement meter, and mutual interference of the laser light occurs. There is nothing. In addition, since the pair of laser displacement meters are arranged so that their optical axes coincide with each other, measurement with high accuracy is possible.

  In order to achieve the above object, the present invention includes a pair of laser displacement meters arranged at a predetermined interval L1 so as to sandwich the object to be measured and driven and controlled by a computer device. In the thickness measuring apparatus for measuring the thickness of the object to be measured by measuring the distances La and Lb to the front and back surfaces of the object to be measured, the pair of laser displacement meters are spaced apart so that the optical axes coincide with each other. And a moving means for moving the pair of laser displacement meters in parallel in the width direction of the object to be measured, and a distance L2 on the front side in the movement direction of the laser displacement meter at the time of measurement. A measurement object detection sensor that detects the presence of the measurement object at a position at a distance L2 on the front side in the movement direction from the optical axis, and detects a position in the movement direction of the pair of laser displacement meters. And a position detection means for outputting the detection result to the computer device, and the distance La to the front and back surfaces of the object to be measured in the optical axis direction by moving the pair of laser displacement meters to the computer device. , Lb, distance data acquisition means for acquiring distance data, and movement control means for starting movement of the laser displacement meter from a position where the object to be measured does not exist between the pair of laser displacement meters at the time of measurement And the pair of laser displacement meters when the distance L2 is moved after the start edge of the measurement object is detected by the measurement object detection sensor arranged on the front side in the moving direction of the laser displacement meter. The driving of the pair of laser displacement meters is stopped when the distance L2 is moved after the end edge of the measurement object is detected by the measurement object detection sensor. Suggest thickness measuring device provided with a displacement meter drive control unit.

  According to the thickness measuring apparatus of the present invention, the displacement meter driving means starts the movement of the laser displacement meter from a position where the object to be measured does not exist between the pair of laser displacement meters, and moves toward the moving direction side. After the edge of the object to be measured is detected by the disposed object detection sensor, the pair of laser displacement meters are driven to perform measurement, and distance data is acquired. As a result, the laser displacement meter is not driven at a position where the object to be measured does not exist between the pair of laser displacement meters, so that laser light is not emitted from the laser displacement meter, and mutual interference of the laser light occurs. There is nothing. In addition, since the pair of laser displacement meters are arranged so that their optical axes coincide with each other, measurement with high accuracy is possible.

  According to the thickness measuring method of the present invention, the laser displacement meter is not driven at a position where the object to be measured does not exist between the pair of laser displacement meters, so that the laser light is not emitted from the laser displacement meter, and the laser is not emitted. There is no mutual interference of light. In addition, since the pair of laser displacement meters are arranged so that their optical axes coincide with each other, measurement with high accuracy is possible. As a result, since the performance of the laser displacement meter can be maximized, an optimum displacement meter having the target performance can be selected, and thus the apparatus cost can be reduced.

  Further, according to the thickness measuring apparatus of the present invention, the laser displacement meter is not driven at a position where the object to be measured does not exist between the pair of laser displacement meters, so that laser light is not emitted from the laser displacement meter. No mutual interference of laser light occurs. In addition, since the pair of laser displacement meters are arranged so that their optical axes coincide with each other, measurement with high accuracy is possible. Furthermore, by making the best use of the performance of the laser displacement meter, an appropriate displacement meter can be selected according to the measurement purpose, and an expensive displacement meter is not required, so that the apparatus cost can be reduced.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

  1 to 14 show a thickness measuring apparatus according to the first embodiment of the present invention, FIG. 1 is a plan view showing the thickness measuring apparatus according to the first embodiment of the present invention, and FIG. 2 shows the first embodiment of the present invention. FIG. 3 is a block diagram showing an electric circuit of the thickness measuring device in the first embodiment of the present invention, and FIGS. 4 and 5 show the laser switch in the first embodiment of the present invention. FIG. 6 to FIG. 8 are diagrams for explaining the movement state of the laser displacement meter in the first embodiment of the present invention, and FIG. 9 is a flowchart for explaining the processing operation of the displacement meter controller in the first embodiment of the present invention. FIG. 10 is a flowchart for explaining the processing operation of the thickness calculation unit in the first embodiment of the present invention. FIG. 11 is a flowchart for explaining the processing operation of the central control unit at the time of measurement in the first embodiment of the present invention. FIG. 12 is a flowchart for explaining the measurement result display processing operation of the central processing unit in the first embodiment of the present invention, and FIGS. 13 and 14 are diagrams showing display examples of the measurement result in the first embodiment of the present invention. It is.

  In the figure, reference numeral 1 denotes a thickness measuring device, which includes a measuring mechanism unit 100 and a computer device 200. The measurement mechanism unit 100 includes a pair of support plates 101 and 102 that are vertically provided with a predetermined interval, a pair of horizontally extending ball screws 103 and a pair of guide shafts 104 that are rotatably supported by the support plates 101 and 102. It has.

  Each of the pair of ball screws 103 and the pair of guide shafts 104 is disposed at a predetermined interval in the vertical direction. The laser displacement meters 121 and 122 are supported on the guide shaft 104 while the ball screws 103 are rotated horizontally by the rotation of the ball screw 103. It is mounted to move in the direction. The pair of laser displacement meters 121 and 122 are arranged so as to oppose each other, and are set so that the optical axes of the laser beams 501 and 502 emitted from the respective sensors are vertical and coincide with each other. Further, as shown in FIGS. 6 to 8, the laser displacement meters 121 and 122 are arranged so that the distance between the distance measurement start positions of the laser displacement meters 121 and 122 is L1.

  The upper laser displacement meter 121 is provided with a laser switch 130 on the left side when viewed from the front. 4 and 5, the laser switch 130 includes a laser emitter 131, a half mirror 132, and a light receiver 133. The optical axis of the laser beam 511 emitted from the laser emitter 131 is emitted from the laser displacement meter 121. It is set to be parallel to the optical axis of the laser beam. Further, the horizontal distance between the optical axis of the laser light emitted from the laser displacement meter 121 and the optical axis of the laser light emitted from the laser emitter 131 is set to a distance L 2 in a direction parallel to the ball screw 103. .

  On the other hand, a pedestal 140 is fixed to the left side of the lower laser displacement meter 122 when viewed from the front, and a reflecting mirror 141 is horizontally disposed on the upper surface of the pedestal 140.

  4 and 5, the laser light 511 emitted from the laser emitter 131 passes through the half mirror 132 and is irradiated on the reflecting mirror 141 by the laser switch 130 and the reflecting mirror 141. The light is reflected, passes through the same optical path as the forward path, reaches the half mirror 132, is reflected by the half mirror 132, and enters the light receiver 133. Further, when the laser beam 511 is blocked by the object to be measured 300, the laser beam 511 is not irradiated on the reflecting mirror 141, and thus the laser beam is not incident on the light receiver 133. Therefore, the presence of the object to be measured 300 between the laser switch 130 and the reflecting mirror 141 can be detected based on whether or not the laser beam is incident on the light receiver 133.

  Pulleys 105 and 106 are fixed to the upper and lower ball screws 103, respectively, and a belt 108 is stretched between the pulleys 105 and 106, and the rotation of the upper and lower ball screws 103 is interlocked. You can move while matching.

  Further, another pulley 107 is provided on the lower ball screw 103, and a belt 109 is stretched between the pulley 107 and a pulley 112 fixed to the rotating shaft 111 of the motor 114 of the drive unit 110, and the motor The ball screw 103 is rotated by the rotation of 114. In the initial state, the laser displacement meters 121 and 122 are arranged at the initial position of the right end of the ball screw 103 when viewed from the front.

  Further, at the time of measurement, as shown in FIGS. 1 and 2, the object to be measured 300 conveyed by the conveying means 400 such as a conveyor is disposed between the upper and lower laser displacement meters 121 and 122. Here, the device under test 300 is arranged so that the axial direction of the ball screw 103 is the width direction of the device under test 300. In this embodiment, a rubber sheet is used as the object to be measured 300, and the thickness and cross-sectional shape of the rubber sheet are measured.

  The electrical circuit of the thickness measuring apparatus 1 in this embodiment is as shown in FIG. That is, each laser displacement meter 121, 122 is driven based on a control signal from the computer device 200, and emits laser light 501, 502 during driving to measure the distances La, Lb from the distance measurement start position to the object to be measured 300. Then, the distance data of the measurement result is output to the computer device 200 at time intervals designated by the computer device 200. Further, each laser displacement meter 121, 122 stops emitting laser light and outputting distance data when receiving an instruction to stop driving from the computer device 200.

  The laser switch 130 always emits a laser beam 511 when the apparatus 1 is driven, and outputs a switch signal indicating whether or not the laser beam is received by the light receiver 133 to the computer apparatus 200. The laser switch 130 of this embodiment outputs an ON signal as a switch signal when the light receiver 133 is receiving laser light, and outputs an OFF signal when it is not receiving laser light.

  The drive device 110 includes a pulse generator 113 and a motor 114, and the motor 114 is rotated by drive control from the computer device 200. Further, a pulse signal is output from the pulse generator 113 to the computer device 200 in synchronization with the rotation of the motor 114. Thereby, in the computer apparatus 200, the rotation number of the motor 114 can be obtained by counting the number of pulses in the pulse signal output from the pulse generator 113, whereby the rotation number of the ball screw 103 and further the movement of the laser displacement meters 121 and 122 are obtained. The position can be acquired. In the initial state, the laser displacement meters 121 and 122 are arranged at the right end portion of the ball screw 103 when viewed from the front, and the laser displacement meters 121 and 122 are moved from the right end portion of the ball screw 103 toward the left end portion during driving.

  The computer device 200 includes a displacement meter controller 201, a thickness calculator 202, a file generation / storage unit 203, a central control unit 204, an operation unit 205, a display control unit 206, and a display unit 207.

  The displacement meter controller 201 outputs information on the time interval of the distance data output instructed from the central control unit 204 to the laser displacement meters 121 and 122. Further, the displacement meter controller 201 receives the position information of the laser displacement meters 121 and 122 from the central control unit 204, and based on this position information and the switch signal input from the laser switch 130, the switch signal changes from the on state to the off state. When the laser displacement meters 121 and 122 move from the position P1 of the laser displacement meters 121 and 122 (starting position −L2 of the object to be measured 300) by the distance L2, the laser displacement meters 121 and 122 are set in a driving state. Further, the displacement meter controller 201 has moved the laser displacement meters 121 and 122 by a distance L2 from the position P2 of the laser displacement meters 121 and 122 when the switch signal is changed from the OFF state to the ON state (the end position -L2 of the object to be measured 300). Sometimes, the laser displacement meters 121 and 122 are set to the drive stop state. In addition, the displacement meter controller 201 outputs the information of the start position P1 + L2 and the end position P2 + L2 to the thickness calculator 202, and measures the distance data (La, Lb) input from the laser displacement meters 121, 122 and the distance data. The position information of each of the laser displacement meters 121 and 122 is output in correspondence to the thickness calculator 202.

  The thickness calculation unit 202 calculates the width value Lw of the object to be measured 300 based on the information of the start position P1 + L2 and the end position P2 + L2 input from the displacement meter controller 201, and the distance data input from the displacement meter controller 201. Based on the position information, the thickness Lt of the DUT 300 is calculated for each measurement position, and the calculated value of the thickness Lt is associated with the measurement position and the information is output to the file generation / storage unit 203.

  The file generation / storage unit 203 generates a data file in which the value of the thickness Lt of the device under test 300 input from the thickness calculation unit 202 and the information of the measurement position and the width value Lw of the device under test 300 are integrated. Remember this. This data file includes measurement position information from the start position P1 + L2 to the end position P2 + L2 of the object to be measured 300, information on the thickness Lt at each measurement position, and information on the width Lw.

  The central control unit 204 outputs a control instruction of the motor 114 to the motor controller 208 and inputs from the pulse generator 113 during measurement based on an instruction input from the operation unit 205 such as a keyboard and a mouse. The positions of the laser displacement meters 121 and 122 are specified by counting the number of pulses of the pulse signals thus obtained, and this position information is output to the displacement meter controller 201. Further, the central control unit 204 reads a data file stored in the file generation / storage unit 203 when displaying the measurement result based on an instruction input from the operation unit 205, and performs display control based on the data file. The measurement result is displayed on the display unit 207 via the unit 206. At this time, based on an instruction input from the operation unit 205, the measurement result is displayed as a table as shown in FIG. 13 or as a cross-sectional contour image of the object 300 as shown in FIG. At this time, if there is a lack of measurement data due to a delay in the timing of laser light emission in the laser displacement meters 121, 122 at the start or end of the object to be measured 300, the central control unit 204 interpolates this missing part and creates a data file. After rewriting, display the measurement result. In this embodiment, linear interpolation is used as this interpolation method. That is, based on the actually measured distance data La and Lb, the outlines of the missing portions of the front and back surfaces of the DUT 300 are represented by straight lines and interpolated. Note that an interpolation method other than such linear interpolation may be used.

  Next, details of the operation of the displacement meter controller 201 in the present embodiment will be described with reference to the flowchart shown in FIG.

  When starting the operation, the displacement meter controller 201 performs initial setting (SA1). In this initial setting, the displacement meter controller 201 confirms the stop of laser light emission and stores the measurement pitch input from the central control unit 204.

  Next, it is monitored whether or not the laser switch 130 is turned off from the on state (SA2), and position data input from the central control unit 204 when the laser switch 130 is turned off from the on state is acquired. (SA3), the start position data P1 + L2 of the device under test 300 is stored (SA4), the position data is sequentially acquired from the central control unit 204 (SA5), and it is determined whether or not the current position Pn is P1 + L2 ( SA6).

  As a result of this determination, when the current position Pn becomes P1 + L2, that is, when the current position Pn moves to the position shown in FIG. 6, the displacement meter controller 201 starts emitting laser light to each of the laser displacement meters 121 and 122 (SA7). Then, the measurement of the distances La and Lb is started, and the acquired distance data La and Lb are sequentially output to the thickness calculation unit 202 for each measurement pitch (SA8). Thereby, as shown in FIG. 7, the distances La and Lb between the front and back surfaces of the device under test 300 are measured. In parallel with this, the displacement meter controller 201 monitors whether or not the laser switch 130 has changed from the OFF state to the ON state (SA9), and when the laser switch 130 changes from the OFF state to the ON state, the central control unit The position data input from 204 is acquired (SA10), the terminal position data P2 + L2 of the device under test 300 is stored (SA11), the position data is sequentially acquired from the central control unit 204 (SA12), and the current position Pn is It is determined whether or not P2 + L2 has been reached (SA13).

  As a result of this determination, when the current position Pn becomes P2 + L2, that is, when the current position Pn moves to the position shown in FIG. 8, the displacement meter controller 201 stops acquiring distance data and outputting data to the thickness calculator 202 ( SA14), the laser displacement meter 121, 122 is stopped from emitting laser light, and the process is terminated (SA15).

  Next, details of the operation of the thickness calculator 202 in the present embodiment will be described with reference to the flowchart shown in FIG.

  The thickness calculation unit 202 inputs from the displacement meter controller 201 the width direction start position data P1 + L2, end position data P2 + L2, measurement position data, and measured distance data La and Lb of the object to be measured 300 (SB1). The value of the thickness Lt of the object to be measured 300 is calculated by (1) (SB2), and the value of the width Lw of the object to be measured 300 is calculated by the following equation (2) (SB3) and associated with the measurement position data. The measured distance data La and Lb, the calculated thickness data Lt, and the calculated value of the width Lw are output to the file generation / storage unit 203 (SB4).

Lt = L1− (La + Lb) (1)
Lw = (P2 + L2)-(P1 + L2) (2)
Next, details of the operation of the central control unit 204 during measurement in the present embodiment will be described with reference to the flowchart shown in FIG.

  When a measurement start instruction is input from the operation unit 205, the central control unit 204 performs initial setting (SC1). In this initial setting, the central control unit 204 drives the motor 114 via the motor controller 208 to move the laser displacement meters 121 and 122 to the right end of the ball screw 103 and sets the position data of the laser displacement meters 121 and 122 to an initial value “0”. Set to.

  Next, the central control unit 204 acquires the moving speed and measurement pitch of the laser displacement meters 121 and 122 input from the operation unit 205 (SC2), and outputs a measurement pitch setting instruction to the displacement meter controller 201 ( SC3), the motor 114 is driven via the motor controller 208, and the laser displacement meters 121 and 122 are moved at the set moving speed (SC4).

  Next, the central processing unit 204 acquires the positions of the laser displacement meters 121 and 122 based on the pulse signal input from the pulse generator 113 and outputs this position data to the displacement meter controller 201 (SC5). In parallel with this, the central processing unit 204 monitors whether or not the position of the laser displacement meters 121 and 122 has reached the final position, that is, the left end portion of the ball screw 103 (SC6), and the position of the laser displacement meters 121 and 122 becomes the final position. When it reaches, the drive of the motor 114 is temporarily stopped (SC7), and the initial setting similar to the above is performed (SC8).

  Next, details of the operation of the central control unit 204 when displaying the measurement result in the present embodiment will be described with reference to the flowchart shown in FIG.

  When the measurement result display instruction is input from the operation unit 205, the central control unit 204 reads the data file stored in the file generation / storage unit 203 (SD1), that is, whether or not end data exists, that is, It is determined whether or not there is missing measurement data at the end of the device under test 300 (SD2).

  If the end data is missing as a result of this determination, the central processing unit 204 performs end data interpolation processing (SD3), rewrites the measurement data file including the interpolated data, and generates and stores a file. It is stored in 203 (SD4).

  Next, it is determined whether the display format instructed via the operation unit 205 is a table format or an image format (SD5). When the table format is designated, the contents of the data file are as shown in FIG. A table is displayed on the display unit 207 (SD6), and when the image format is designated, a cross-sectional contour image of the device under test 300 as shown in FIG. 14 is displayed on the display unit 207 based on the contents of the data file. (SD7). Thereafter, it is determined whether or not a display end instruction is input via the operation unit 205 (SD8). When the display end instruction is not input, the process proceeds to SD5, and when the display end instruction is input. The display process ends. In the measurement result display in the tabular form, as shown in FIG. 13, the value of the distance La, the value of the distance Lb, the thickness Lt of the object 300 to be measured corresponds to the value of the width Lw and the measurement position data. Display the value. Further, in the display of the measurement result in the image format, as shown in FIG. 14, the grid is displayed with the position in the width direction of the device under test 300 as the X axis and the vertical direction as the Y axis, and is superimposed thereon. The cross-sectional contour image is displayed, and the value of the width Lw and the actual size per division of the grid on the X axis and the Y axis are numerically displayed.

  As described above, according to the thickness measuring method and apparatus of the first embodiment, the movement of the laser displacement meters 121, 122 is started from the position where the object to be measured 300 does not exist between the pair of laser displacement meters 121, 122, After the position P1 of the starting edge of the object to be measured 300 is detected by the laser switch 130 arranged on the side, the laser light is emitted from the pair of laser displacement meters 121 and 122 to perform measurement, and distance data La and Lb are acquired. Therefore, at the position where the object to be measured 300 does not exist between the pair of laser displacement meters 121 and 122, the laser light is not emitted from the laser displacement meters 121 and 122, so that mutual interference between the laser beams does not occur. Further, since the pair of laser displacement meters 121 and 122 are arranged so that their optical axes coincide with each other, measurement with high accuracy becomes possible.

  In this embodiment, a light receiver 133 is provided in the laser switch 130 adjacent to one laser displacement meter 121, and the laser beam reflected by the reflecting mirror 141 adjacent to the other laser displacement meter 122 is received by the light receiver. Although the light is received at 133, a laser switch that receives the laser light by arranging the light receiver 133 at the position of the reflecting mirror 141 may be configured. In this case, the half mirror 132 is not necessary.

  Next, a second embodiment of the present invention will be described.

  15 to 17 are flowcharts for explaining the processing operation of the thickness measuring apparatus according to the second embodiment of the present invention. FIG. 15 is a flowchart for explaining the processing operation of the displacement meter controller according to the second embodiment of the present invention. FIG. 17 is a flowchart for explaining the processing operation of the central processing unit at the time of measurement in the second embodiment of the present invention. The second embodiment and the first embodiment described above are the same as those of the first embodiment described above except that the laser displacement meter, the thickness calculation unit, and the central processing unit are different in processing operation. .

  The difference between the second embodiment and the first embodiment described above is that, in the second embodiment, the laser displacement meters 121 and 122 are reciprocated in the width direction of the object to be measured 300, and distance data La, In addition to acquiring Lb, the average value of the distance data of the forward path and the distance data of the return path at each measurement position is calculated, and the average value is used as the distance data of the measurement result at each measurement position.

  In the second embodiment, the displacement meter controller 201 performs a processing operation as shown in FIG. That is, when the displacement meter controller 201 starts its operation, it performs an initial setting (SE1). In this initial setting, the displacement meter controller 201 instructs the laser displacement meters 121 and 122 to stop emitting laser light and stores the measurement pitch input from the central control unit 204.

  Next, the displacement meter controller 201 monitors whether or not the laser switch 130 has changed from the on-state to the off-state (SE2). When the laser switch 130 has changed from the on-state to the off-state, an input is made from the central control unit 204. The position data is acquired (SE3), the start position data P1 + L2 of the device under test 300 is stored (SE4), the position data is sequentially acquired from the central control unit 204 (SE5), and the current position Pn becomes P1 + L2. It is determined whether or not (SE6).

  As a result of this determination, when the current position Pn becomes P1 + L2, the displacement meter controller 201 starts emitting laser light to each of the laser displacement meters 121 and 122 (SE7) and starts measuring the distances La and Lb. Then, the acquired distance data La and Lb are sequentially output to the thickness calculator 202 for each measurement pitch (SE8). In parallel with this, the displacement meter controller 201 monitors whether or not the laser switch 130 has changed from the off state to the on state (SE9), and when the laser switch 130 changes from the off state to the on state, the central control unit The position data input from 204 is acquired (SE10), the terminal position data P2 + L2 of the device under test 300 is stored (SE11), the position data is sequentially acquired from the central control unit 204 (SE12), and the current position Pn is It is determined whether or not P2 + L2 has been reached (SE13).

  As a result of this determination, when the current position Pn becomes P2 + L2, the displacement meter controller 201 stops the acquisition of distance data and the data output to the thickness calculation unit 202 (SE14), and for each laser displacement meter 121, 122 The laser light emission is stopped (SE15).

  Next, the displacement meter controller 201 sequentially acquires position data from the central control unit 204 (SE16), and determines whether or not the current position Pn has reached P2 + L2 (SE17). As a result of the determination, when the current position Pn becomes P2 + L2, the displacement meter controller 201 starts the laser beam emission to each of the laser displacement meters 121 and 122 (SE18), and starts measuring the distances La and Lb. The distance data La and Lb thus obtained are sequentially output to the thickness calculation unit 202 for each measurement pitch (SE19).

  Further, the displacement meter controller 201 sequentially acquires position data from the central control unit 204 (SE20), and determines whether or not the current position Pn is P1 + L2 (SE21). As a result of this determination, when the current position Pn becomes P1 + L2, the displacement meter controller 201 stops the acquisition of distance data and the data output to the thickness calculator 202 (SE22), and for each laser displacement meter 121, 122 The laser beam emission is stopped and the process is terminated (SE23).

  In the second embodiment, the thickness calculator 202 performs a processing operation as shown in FIG. That is, after the thickness calculation unit 202 inputs the width direction start end position data P1 + L2 and end position position data P2 + L2 of the object to be measured 300 from the displacement meter controller 201 (SF1), each measurement position of the forward path in the movement of the laser displacement meters 121, 122 is obtained. The data and distance data La and Lb at each measurement position are input and stored (SF2), and each measurement position data on the return path and the distance data La and Lb at each measurement position in the movement of the laser displacement gauges 121 and 122 are input and stored. (SF3).

  Next, the thickness calculation unit 202 calculates and stores the average value La-av of the distance data La between the forward path and the return path measured by one laser displacement meter 121 for each measurement position (SF4), and at each measurement position. Every time, the average value Lb-av of the distance data Lb of the forward path and the return path measured by the other laser displacement meter 122 is calculated and stored (SF5).

  Thereafter, the thickness calculation unit 202 calculates the value of the thickness Lt of the object to be measured 300 by the following equation (3) for each measurement position using the average values La-av and Lb-av (SF6). Then, the value of the width Lw of the object to be measured 300 is calculated (SF7), the distance data La-av and Lb-av measured in association with the measurement position data, the calculated thickness data Lt, and the calculated width Lw are calculated. The file is output to the file generation / storage unit 203 (SF8).

Lt = L1- (La-av + Lb-av) (3)
In the second embodiment, the central processing unit 204 at the time of measurement performs a processing operation as shown in FIG. That is, the central control unit 204 performs initial setting when a measurement start instruction is input from the operation unit 205 (SG1). In this initial setting, the central control unit 204 drives the motor 114 via the motor controller 208 to move the laser displacement meters 121 and 122 to the right end of the ball screw 103 and sets the position data of the laser displacement meters 121 and 122 to an initial value “0”. Set to.

  Next, the central control unit 204 acquires the movement speed and measurement pitch of the laser displacement meters 121 and 122 input from the operation unit 205 (SG2), and outputs a measurement pitch setting instruction to the displacement meter controller 201 ( SG3), the motor 114 is driven to rotate forward via the motor controller 208, and the laser displacement meters 121, 122 are moved in the forward direction at the set moving speed (SG4).

  Next, the central processing unit 204 acquires the positions of the laser displacement meters 121 and 122 based on the pulse signal input from the pulse generator 113 and outputs this position data to the displacement meter controller 201 (SG5). In parallel with this, the central processing unit 204 monitors whether or not the position of the laser displacement meters 121 and 122 has reached the final position, that is, the left end portion of the ball screw 103 (SG6), and the position of the laser displacement meters 121 and 122 becomes the final position. When the motor 114 is reached, the forward rotation of the motor 114 is temporarily stopped (SG7), and then the motor 114 is driven to rotate backward, and the laser displacement meters 121, 122 are moved in the backward direction at the set moving speed (SG8).

  Next, the central processing unit 204 acquires the positions of the laser displacement meters 121 and 122 based on the pulse signal input from the pulse generator 113 and outputs this position data to the displacement meter controller 201 (SG9). In parallel with this, the central processing unit 204 monitors whether or not the position of the laser displacement meters 121 and 122 has reached the initial position, that is, the right end of the ball screw 103 (SG10), and the position of the laser displacement meters 121 and 122 is set to the initial position. When reaching, the forward rotation drive of the motor 114 is stopped (SG11), and the same initial setting as described above is performed (SG12).

  According to the second embodiment described above, in addition to the effects of the first embodiment, the average values La-av, Lb- of the measurement results of the distance data La, Lb on the forward path and the measurement results of the distance data La, Lb on the return path Since the av is calculated to calculate the thickness Lt of the object to be measured 300, the measurement error can be reduced and the error in the interpolation region can be reduced.

  Next, a third embodiment of the present invention will be described.

  18 to 23 show a thickness measuring apparatus according to the third embodiment of the present invention, FIG. 18 is a plan view showing the thickness measuring apparatus according to the third embodiment of the present invention, and FIG. 19 is a third embodiment of the present invention. FIG. 20 is a block diagram showing an electric circuit of the thickness measuring apparatus according to the third embodiment of the present invention, and FIGS. 21 and 22 are laser displacement meters according to the third embodiment of the present invention. FIG. 23 is a flowchart for explaining the processing operation of the displacement meter controller according to the third embodiment of the present invention. In these drawings, the same components as those in the first embodiment and the second embodiment described above are denoted by the same reference numerals, and the description thereof is omitted.

  Also, the difference between the third embodiment and the first and second embodiments is that the thickness measurement apparatus 1A of the third embodiment has a second on the right side of the upper laser displacement meter 121 as shown in FIG. A laser switch 150 is provided, a pedestal 160 is fixed to the right side of the lower laser displacement meter 122, a reflecting mirror 161 is horizontally disposed on the upper surface of the pedestal 160, and a switch signal from the second laser switch 150 is received. The computer apparatus 200A including the displacement meter controller 201A operating in consideration is provided. The configuration of the second laser switch 150 and the operation using the reflecting mirror 161 are the same as those of the first laser switch 130. Further, the optical axis of the laser light emitted from the laser displacement meter 121 and the optical axis of the laser light emitted from the laser emitter 131 of the second laser switch 150 are set to be parallel to each other. The horizontal distance between the optical axis of the laser light emitted from 121 and the optical axis of the laser light emitted from the laser emitter 131 of the second laser switch 150 is set to a distance L2 in a direction parallel to the ball screw 103. Yes.

  The second laser switch 150 always emits a laser beam 512 when the device 1A is driven, and outputs a switch signal indicating whether or not the laser beam is received by the light receiver 133 to the computer device 200A. The second laser switch 150 outputs an ON signal as a switch signal when the light receiver 133 is receiving laser light, and outputs an OFF signal when it is not receiving laser light.

  The displacement meter controller 201A outputs information on the time interval of the distance data output instructed from the central control unit 204 to the laser displacement meters 121 and 122. Further, the displacement meter controller 201A inputs the position information of the laser displacement meters 121 and 122 from the central control unit 204, and in the forward path, based on this position information and the switch signal input from the first laser switch 130, the switch signal When the laser displacement gauges 121 and 122 are moved by a distance L2 from the position P1 of the laser displacement gauges 121 and 122 (starting position -L2 of the object to be measured 300) when is changed from the on state to the off state, the laser displacement meters 121 and 122 are driven. Set. Further, the displacement meter controller 201A lasers a distance L2 from the position P2 of the laser displacement meters 121 and 122 (the end position -L2 of the object to be measured 300) when the switch signal of the first laser switch 130 changes from the off state to the on state. When the displacement gauges 121 and 122 move, the laser displacement gauges 121 and 122 are set to a drive stop state.

  Further, in the return path, the displacement meter controller 201A inputs the position information of the laser displacement meters 121 and 122 from the central control unit 204, and based on the position information and the switch signal input from the second laser switch 150, the switch signal When the laser displacement meters 121, 122 are moved by a distance L2 from the position P3 of the laser displacement meters 121, 122 (the terminal position + L2 of the object to be measured 300) when is changed from the on state to the off state, the laser displacement meters 121, 122 are set to the drive state To do. Further, the displacement meter controller 201A performs laser displacement by a distance L2 from the position P4 of the laser displacement meters 121 and 122 (start position + L2 of the object to be measured 300) when the switch signal of the second laser switch 150 changes from the off state to the on state. When the meters 121 and 122 move, the laser displacement meters 121 and 122 are set to a drive stop state.

  Further, the displacement meter controller 201A outputs the information of the start position P1 + L2 and the end position P2 + L2 to the thickness calculator 202, and the distance data (La, Lb) in the forward path and the return path input from the laser displacement meters 121, 122 and the distance data. The positional information of the laser displacement meters 121 and 122 when measuring is output to the thickness calculation unit 202 in association with each other.

  As described above, in the present embodiment, the end of the device under test 300 is detected by the first laser switch 130 in the forward path, and the end of the device under test 300 is detected by the second laser switch 150 in the return path. did.

  In the third embodiment, the displacement meter controller 201A performs a processing operation as shown in FIG. In other words, the displacement meter controller 201A performs initial setting when the operation is started (SH1). In this initial setting, the displacement meter controller 201A instructs each laser displacement meter 121, 122 to stop emitting laser light, and stores the measurement pitch input from the central control unit 204.

  Next, the displacement meter controller 201A monitors whether or not the laser switch 130 has changed from the on state to the off state (SH2). When the first laser switch 130 changes from the on state to the off state, the central controller 204 The input position data is acquired (SH3), the start position data P1 + L2 of the device under test 300 is stored (SH4), the position data is sequentially acquired from the central control unit 204 (SH5), and the current position Pn is set to P1 + L2. It is determined whether or not (SH6).

  As a result of this determination, when the current position Pn becomes P1 + L2, that is, when the laser displacement meters 121 and 122 move to the positions shown in FIG. 21, the displacement meter controller 201A emits laser light to the laser displacement meters 121 and 122, respectively. (SH7), the measurement of the distances La and Lb is started, and the obtained distance data La and Lb are sequentially output to the thickness calculation unit 202 for each measurement pitch (SH8). In parallel with this, the displacement meter controller 201A monitors whether or not the first laser switch 130 has changed from the OFF state to the ON state (SH9), and when the first laser switch 130 changes from the OFF state to the ON state. The position data input from the central control unit 204 is acquired (SH10), the terminal position data P2 + L2 of the device under test 300 is stored (SH11), and the position data is sequentially acquired from the central control unit 204 (SH12). It is determined whether or not the current position Pn is P2 + L2 (SH13).

  As a result of this determination, when the current position Pn becomes P2 + L2, the displacement meter controller 201A stops the acquisition of distance data and the data output to the thickness calculator 202 (SH14), and for each laser displacement meter 121, 122 The laser light emission is stopped (SH15).

  Next, the displacement meter controller 201 monitors whether or not the second laser switch 150 is in the off state (SH16), and the position data input from the central control unit 204 when the second laser switch 150 is in the on state. P3 is acquired (SH17), the start position data P3-L2 of the device under test 300 is stored (SH18), the position data is sequentially acquired from the central control unit 204 (SH19), and the current position Pn is P3-L2. It is determined whether or not (SH20).

  As a result of this determination, when the current position Pn becomes P3-L2, that is, when the laser displacement meters 121 and 122 move to the positions shown in FIG. 22, the displacement meter controller 201A applies laser light to the laser displacement meters 121 and 122, respectively. Is started (SH21), the measurement of the distances La and Lb is started, and the obtained distance data La and Lb are sequentially output to the thickness calculation unit 202 for each measurement pitch (SH22). In parallel with this, the displacement meter controller 201A monitors whether or not the second laser switch 150 has changed from the OFF state to the ON state (SH23), and when the second laser switch 150 changes from the OFF state to the ON state. The position data P4 input from the central control unit 204 is acquired (SH24), the terminal position data P4-L2 of the device under test 300 is stored (SH25), and the position data is sequentially acquired from the central control unit 204 ( SH26), it is determined whether or not the current position Pn has become P4-L2 (SH27).

  As a result of this determination, when the current position Pn becomes P4-L2, the displacement meter controller 201A stops the distance data acquisition and the data output to the thickness calculation unit 202 (SH28), and the laser displacement meters 121 and 122 On the other hand, the emission of the laser beam is stopped and the process is terminated (SH29).

  Further, the processing operations of the thickness calculation unit 202 and the central processing unit 204 in the present embodiment are the same as those in the second embodiment described above.

  Even if the two laser switches 130 and 150 are provided as described above, and the laser switches 130 and 150 are selectively used in the forward path and the return path, the same effects as in the second embodiment can be obtained.

  In the above embodiment, the laser switches 130 and 150 are used to detect the positions of the start and end of the DUT 300, but the present invention is not limited to this. For example, a known optical fiber switch that emits laser light from an optical fiber may be used. In this case, if the detection spot diameter is reduced by attaching a lens to the laser light emission port of the optical fiber, the position of the start end and the end of the object to be measured 300 can be detected with higher accuracy. In addition, when the device under test 300 is an individual, a micro switch is used to set the micro switch to be switched between an on state and an off state by the contact of the micro switch with the device under test 300. The position of the end may be detected.

  In the above embodiment, the object to be measured 300 is stopped and the thickness and the cross-sectional shape of the object to be measured 300 are measured. However, the object to be measured 300 is orthogonal to the width direction of the object to be measured 300 by the conveyor 400. The thickness and cross-sectional shape of the measurement object 300 may be measured in three dimensions while moving in the length direction.

The top view which shows the thickness measuring apparatus in 1st Embodiment of this invention. The front view which shows the thickness measuring apparatus in 1st Embodiment of this invention. The block diagram which shows the electric system circuit of the thickness measuring apparatus in 1st Embodiment of this invention. The block diagram which shows the laser switch in 1st Embodiment of this invention The block diagram which shows the laser switch in 1st Embodiment of this invention The figure explaining the movement state of the laser displacement meter in 1st Embodiment of this invention. The figure explaining the movement state of the laser displacement meter in 1st Embodiment of this invention. The figure explaining the movement state of the laser displacement meter in 1st Embodiment of this invention. The flowchart explaining the processing operation of the displacement meter controller in 1st Embodiment of this invention. The flowchart explaining the processing operation of the thickness calculation part in 1st Embodiment of this invention. The flowchart explaining the processing operation of the central control part at the time of the measurement in 1st Embodiment of this invention. The flowchart explaining the measurement result display processing operation of the central processing unit in the first embodiment of the present invention. The figure which shows the example of a display of the measurement result in 1st Embodiment of this invention. The figure which shows the example of a display of the measurement result in 1st Embodiment of this invention. The flowchart explaining the processing operation of the displacement meter controller in 2nd Embodiment of this invention. The flowchart explaining the processing operation of the thickness calculation part in 2nd Embodiment of this invention. The flowchart explaining the processing operation of the central processing part at the time of measurement in 2nd Embodiment of this invention. The top view which shows the thickness measuring apparatus in 3rd Embodiment of this invention. The front view which shows the thickness measuring apparatus in 3rd Embodiment of this invention. The block diagram which shows the electric system circuit of the thickness measuring apparatus in 3rd Embodiment of this invention. The figure explaining the movement state of the laser displacement meter in 3rd Embodiment of this invention. The figure explaining the movement state of the laser displacement meter in 3rd Embodiment of this invention. The flowchart explaining the processing operation of the displacement meter controller in 3rd Embodiment of this invention.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1,1A ... Thickness measuring apparatus, 100 ... Measuring mechanism part, 101,102 ... Support plate, 103 ... Ball screw, 104 ... Guide shaft, 105, 106, 107, 112 ... Pulley, 108, 109 ... Belt, 110 ... Drive part, 111 ... Rotating shaft, 113 ... Pulse generator , 114: Motor, 121, 122 ... Laser displacement meter, 130 ... Laser switch, 131 ... Laser emitter, 132 ... Half mirror, 133 ... Receiver, 140 ... Base, 141 ... Reflector, 150 ... Laser switch, 160 ... Base, 161 ... Reflector, 200 ... Computer device, 201 ... Displacement meter controller, 202 ... Thickness calculation unit, 203 ... File generation / storage unit, 204 ... Central control unit, 205 ... Operation unit, 206 ... Display control unit, 207 ... Display 300, object to be measured, 400, conveyor, 501, 502, 511, 512 ... laser light.

Claims (17)

A pair of laser displacement meters arranged to face each other with a predetermined interval L1 so that the optical axes coincide with each other, each measuring the distances La and Lb to the front and back surfaces of the object to be measured, and the laser displacement at the time of measurement A measurement object detecting sensor which is disposed at a distance L2 on the front side in the movement direction of the meter and detects the existence of the measurement object at a position of the distance L2 on the front side in the movement direction from the optical axis; and the pair of laser displacement meters Using a measuring device comprising a moving means for moving the parallel movement, a position detecting means for detecting the position of the pair of laser displacement meters in the moving direction, and a computer device for performing drive control and predetermined arithmetic processing thereof, The computer device moves the pair of laser displacement meters in the width direction of the object to be measured arranged between the pair of laser displacement meters, and the front and back of the object to be measured in the optical axis direction. Distance to La, a thickness measuring method of measuring the thickness of the object to be measured by measuring the Lb,
The computer device starts the movement of the laser displacement meter from a position where the measurement object does not exist between the pair of laser displacement meters at the time of measurement, and the measurement object detection sensor arranged on the moving direction side When the distance L2 is moved after detecting the starting edge of the object to be measured by the above, the pair of laser displacement meters are driven to perform the measurement to acquire distance data, and the object detecting sensor detects the distance. A method for measuring a thickness, comprising: stopping driving of the pair of laser displacement meters when the distance L2 is moved after detecting the end edge of the object to be measured. The computer device calculates a thickness between the front surface and the back surface of the object to be measured from a measurement result of each laser displacement meter, and presents the measurement position data and a thickness value corresponding to the measurement position data. The thickness measuring method according to claim 1, wherein The computer device starts the movement of the laser displacement meter from a position where the object to be measured does not exist between the pair of laser displacement meters, and detects the start edge of the object to be measured by the object detection sensor. The thickness measurement method according to claim 1 or 2, wherein a length from a position to a position at which a terminal edge is detected is calculated and presented as a width value of the object to be measured. The computer device measures the distance to the front and back surfaces of the object to be measured while moving the laser displacement meter, and obtains a cross-sectional contour image of the object to be measured based on the distance to the front and back surfaces obtained by the measurement. It displays. The thickness measuring method of Claim 1 characterized by the above-mentioned. The computer device measures the distance to the front and back surfaces of the object to be measured while moving the laser displacement meter, and detects the edge of the object to be measured and then starts driving the laser displacement meter. This method is characterized in that the distance data of the missing portion generated during the period is interpolated based on the distance data obtained by measurement, and the distance data obtained by actual measurement and the interpolated distance data are used as the distance data of the measurement result. The thickness measuring method according to claim 1 or 4. The computer apparatus linearly interpolates the distance data of the missing portion based on the distance data acquired by measurement, and uses the distance data obtained by actual measurement and the interpolated distance data as distance data of a measurement result. The thickness measuring method according to claim 5, characterized in that: The computer device reciprocates the laser displacement meter in the width direction of the measurement object to acquire distance data in each of the forward path and the return path, and calculates an average value of the distance data of the forward path and the distance data of the return path The thickness measurement method according to claim 4, wherein the average value is used as distance data of a measurement result. A pair of laser displacement meters arranged at a predetermined interval L1 so as to sandwich the object to be measured and controlled by a computer device are provided, and distances La and Lb from the respective laser displacement meters to the front and back surfaces of the object to be measured In a thickness measuring device that measures the thickness of the object to be measured by measuring
The pair of laser displacement meters are arranged to face each other at a predetermined interval so that the optical axes coincide with each other,
Moving means for moving the pair of laser displacement meters in parallel in the width direction of the object to be measured;
A measurement object detection sensor which is disposed at a distance L2 forward of the laser displacement meter during measurement and detects the presence of the measurement object at a position of the distance L2 in the movement direction from the optical axis;
A position detecting means for detecting the position of the pair of laser displacement meters in the moving direction and outputting the detection result to the computer device;
In the computer device,
Distance data obtaining means for obtaining distance data by moving the pair of laser displacement meters to measure distances La and Lb to the front and back surfaces of the object to be measured in the optical axis direction;
Movement control means for starting movement of the laser displacement meter from a position where the object to be measured does not exist between the pair of laser displacement meters at the time of measurement;
The pair of laser displacement meters is driven when the distance L2 is moved after the start edge of the measurement object is detected by the measurement object detection sensor disposed on the front side in the moving direction of the laser displacement meter. And a displacement meter drive control means for stopping the driving of the pair of laser displacement meters when the distance L2 is moved after the end edge of the device to be measured is detected by the device to be measured sensor. A characteristic thickness measuring device. The computer device calculates a thickness between the front surface and the back surface of the object to be measured from a measurement result of each laser displacement meter, and presents the measurement position data and a thickness value corresponding to the measurement position data. The thickness measuring device according to claim 8, wherein the thickness measuring device is provided. The computer device starts the movement of the laser displacement meter from a position where the object to be measured does not exist between the pair of laser displacement meters, and detects the start edge of the object to be measured by the object detection sensor. The thickness measuring apparatus according to claim 8 or 9, further comprising means for calculating a length from a position to a position where the terminal edge is detected and presenting the length as a value of the object to be measured. . Providing a display device;
The computer device includes:
Means for measuring distances La and Lb to the front and back surfaces of the object to be measured while moving the laser displacement meter;
The thickness measurement according to claim 8, further comprising means for displaying a cross-sectional contour image of the object to be measured on the display device based on distances La and Lb to the front and back surfaces obtained by the measurement. apparatus. The computer device includes means for measuring distances La and Lb to the front and back surfaces of the object to be measured while moving the laser displacement meter;
The distance data of the missing portion that occurs between the detection of the edge of the object to be measured and the start of driving of the laser displacement meter is interpolated based on the distance data obtained by measurement, and the actual measurement The thickness measuring apparatus according to claim 8 or 11, further comprising means for using the obtained distance data and the interpolated distance data as distance data of a measurement result. The computer apparatus linearly interpolates the displacement data of the missing portion based on distance data acquired by measurement, and uses the distance data obtained by actual measurement and the interpolated distance data as distance data of a measurement result. The thickness measuring device according to claim 12, wherein the thickness measuring device is provided. The computer device is configured to reciprocate the laser displacement meter in the width direction of the object to be measured to acquire distance data in each of the forward path and the return path;
The thickness measuring apparatus according to claim 11, further comprising means for calculating an average value of the distance data of the forward path and the distance data of the return path and using the average value as distance data of a measurement result. The object to be measured detection sensor includes a laser emitter and a light receiver, and the presence of the object to be measured is caused by the laser light emitted from the laser emitter and incident on the light receiver being shielded by the object to be measured. The thickness measurement apparatus according to claim 8, further comprising: a laser switch that detects the above. The thickness of claim 15, wherein the object to be measured detection sensor includes an optical fiber that emits a laser beam, and a lens that is provided at a light emission port of the optical fiber and reduces a detection spot diameter. measuring device. 15. The measurement object detection sensor includes a micro switch that is disposed so as to contact the measurement object and that becomes a closed circuit upon contact with the measurement object. The thickness measuring device described in 1.

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