JP2006305601A - Laser beam machining method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a laser beam machining method capable of preventing defects from occurring at end parts while maintaining a high productivity and without adversely affecting a substrate or the like. <P>SOLUTION: In the laser beam machining method, a laminated film formed on a substrate and containing at least one layer of metallic film is repeatedly irradiated with a pulsed laser beam 1a, with the laminated film separated into two or more regions. This method is characterized in that it includes: a step in which the machining spot of the laser beam emitted to the surface of the laminated film is shaped nearly rectangular using a mask; a step in which the machining spot of the laser beam is moved relatively to the laminated film at a fixed superposing rate; and a step in which the center 1x of the energy intensity distribution of the laser beam is made eccentric in the moving direction 1v relative to the center 3x of the nearly rectangular opening 3a of the mask. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a laser processing method for separating a laminated film including at least one metal film formed on a substrate into two or more regions for manufacturing a thin film solar cell or the like.

  In general, a solar cell using a non-single-crystal silicon thin film as a semiconductor film can be formed by a vapor phase growth method, so that the area can be easily increased. It has a feature that it can be formed on such a flexible substrate. Further, when an insulating material such as glass or plastic film is used for the substrate, an integrated series connection structure can be adopted, and there is an advantage that a high voltage of several tens to several hundreds V can be taken out with one substrate.

  As a serial connection structure, a transparent insulating substrate such as glass is used, and a plurality of strip-shaped solar cell unit cells are separated and connected on one surface, and a plastic film substrate as disclosed in JP-A-6-342924 In this method, a plurality of strip-shaped solar cell unit cells are arranged on the main surface, and connection electrodes are arranged on the back surface, and these unit cells are connected through holes.

  In order to realize such a series connection structure, a technique for separating and processing a semiconductor film laminated on a large area substrate having a side of about 0.3 to 2 m into a plurality of strips together with a metal electrode film is necessary. is there. Currently, the most commonly used is a laser processing technique for laser scribing the laminated film using a YAG laser or the like.

As a laser processing apparatus, a substrate is vacuum-sucked on an XY stage, and this is moved in the XY direction and processed by a laser beam (Japanese Patent Laid-Open No. 9-266325), or conversely An apparatus is known in which a substrate is fixed to an XY stage, a laser beam is guided to an output optical unit by a fiber optical system, and patterning is performed by emitting the laser beam while moving the output optical unit in the XY direction. . Furthermore, Japanese Patent Application Laid-Open No. 2004-335863 by the present applicant proposes a method in which a galvano mirror is used to directly irradiate a processing surface with a laser beam with an angle without using a condensing Fθ lens. Yes.
JP-A-6-342924 JP-A-9-266325 JP 2004-335863 A

  Since such separation processing using a laser beam requires high energy, a method of intermittently irradiating the processing surface with a pulsed laser beam is generally used. Therefore, as shown in FIG. 3, in the conventional processing, for example, separation processing is performed by moving a processing spot 30 a of φ240 μm by a laser beam with 50% overlapped and moved. However, in order to secure a separation width of 400 μm as the electrical insulation distance, the beam movement 1v is reciprocated for processing, which takes time.

  Further, in order to secure a separation width of 400 μm with one beam movement 1v, the machining spot 30b can be enlarged as shown in FIG. As a result, the moving speed of the machining spot is improved and the number of machining operations is only one, which is effective in increasing the machining speed. However, since the energy intensity distribution of the laser beam is a Gaussian distribution that attenuates in the radial direction, even if the film can be removed at the center part of the beam, the energy necessary for film removal cannot be obtained at the peripheral part. There arises a problem that processing defects occur in the portion. In particular, when the processing spot of the laser beam is increased, the range of processing defects is increased and the performance of the solar cell is affected.

  For this reason, generally, a portion having no energy that can be removed at the peripheral portion is removed by shading with a mask, and in particular, a substantially rectangular processing spot as shown in FIG. 30c is used, and this is moved and processed as described above.

  However, even the processing using the mask as shown in FIG. 5 has the following problems. FIG. 6A is a diagram showing the positional relationship between the opening of the mask and the laser beam incident on the mask when laser processing is performed using a mask having a substantially rectangular opening, and FIGS. These are side views which show the processing state of the metal film by a substantially rectangular processing spot, and (d) is a top view which shows the separation groove formed as a result.

  As shown in FIG. 6A, the four corners (hatched portions in the drawing) of the substantially rectangular opening 3a are ranges in which the laser beam has energy necessary for film removal in the cross-sectional shape 1a of the laser beam. Although it is within the maximum processable diameter, it is within the edge defect occurrence region where the film can be removed but the edge defect occurs. The term “end defect” as used herein refers to a state in which the film is peeled off due to the explosive force at the time of film removal, and a state in which the thickness is increased due to thermal melting of the film.

  In this edge defect occurrence region, as shown in FIG. 6B, when the metal film 9 on the substrate 8 is irradiated with the laser beam 1b, an edge defect 9f made of metal is generated. As shown in FIG. 6C, the edge defect 9f cannot be completely removed even when the second laser beam is irradiated so that a part thereof overlaps, resulting in a processing residue 9r. Therefore, as shown in FIG. 6 (d), there is a problem in that the processing residue 9r is continuously generated in the separation groove, which causes electrical insulation failure.

  As a method for preventing this, an opening of the mask may be provided so as to remove the edge defect occurrence region, but there is a problem that the production capacity is lowered because the processing spot is reduced. As another means, the occurrence of edge defects can be eliminated by raising the energy of the laser beam as a whole. However, the energy distribution in the central part becomes higher in the Gaussian distribution of energy distribution. In other words, the plastic substrate has a problem in that it penetrates the substrate and affects the electrode on the back surface, resulting in poor characteristics of the solar cell.

  In view of these problems, an object of the present invention is to provide a laser processing method capable of preventing the occurrence of edge defects while maintaining high productivity and without adversely affecting a substrate or the like. .

  In order to achieve the above object, a laser processing method according to the present invention is directed to repeatedly irradiating a laminated film including at least one metal film formed on a substrate with a pulsed laser beam. In the laser processing method for separating into two or more regions, a step of shaping a shape of the processing spot of the laser beam irradiated on the surface of the laminated film into a substantially rectangular shape using a mask, and a processing spot of the laser beam And moving the center of the energy intensity distribution of the laser beam in the moving direction with respect to the center of the substantially rectangular processing spot. And an eccentric step.

  As described above, the center of the energy intensity distribution of the laser beam is decentered in the relative movement direction of the laser beam with respect to the center of the substantially rectangular machining spot, thereby moving the movement direction of the substantially rectangular machining spot. The energy intensity on the side can be increased. Therefore, it is possible to eliminate the edge defect occurrence region that was on the moving direction side of the laser beam, and to prevent the occurrence of the edge defect. In the present invention, since it is not necessary to reduce the processing spot, it is possible to maintain high productivity, and it is not necessary to increase the output of the laser beam, so that the substrate or the like is not adversely affected.

  The mask has an opening for shaping the processing spot of the laser beam into the substantially rectangular shape, and has four light shielding members that define four sides constituting the opening, and the four light shielding members. The positions of are preferably adjustable individually. The present invention preferably includes a step of adjusting the positions of the four light shielding members in order to control the eccentricity according to the relative movement of the laser beam.

  As the laser beam, it is preferable to use a laser beam having a wavelength of 400 to 650 nm. Further, it is preferable to use a YAG laser, a YVO laser, or a YLF laser as a laser generation source of the laser beam.

  As described above, according to the present invention, it is possible to provide a laser processing method capable of preventing the occurrence of edge defects while maintaining high productivity and without adversely affecting the substrate or the like.

  Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a schematic diagram showing an example of the configuration of a laser processing apparatus used in the laser processing method of the present invention. In addition, the same code | symbol is attached | subjected about the structure similar to FIGS. 3-6 mentioned above.

  As shown in FIG. 1, the laser processing apparatus includes a laser light source 1 that emits a laser beam, an expander 2 that expands the beam diameter of the laser beam and emits it as parallel light, and enters the parallel light. A mask 3 that shapes the cross-sectional shape of the beam into a substantially rectangular shape, a reflection mirror 5 that reflects the shaped laser beam, and a condenser lens 6 that forms an image of the reflected light on a processing surface on the XY stage 7; It has.

  The laser light source 1 is an Nd: YAG laser oscillator including a wavelength conversion unit, and emits a second harmonic (wavelength 532 nm) of a pulsed Nd: YAG laser. The wavelength is preferably in the range of 400 to 650 nm so as not to damage the plastic substrate. Further, laser light such as YAG, YLF, and YVO can be used depending on the type of processing material.

  The mask 3 has a substantially rectangular opening 3a, and the opening 3a is composed of four light shielding members that define four sides. The positions of these four light shielding members can be individually adjusted. That is, by moving the positions of these four light shielding members, the four sides constituting the opening 3a move, and the shape of the opening 3a can be changed to a predetermined rectangle such as a square or a rectangle. Although not shown, the mask 3 is provided with a mechanism for controlling the shape of the opening 3a by moving these four light shielding members.

  According to such a configuration, first, the laser beam emitted from the laser light source 1 becomes the laser beam 1 a whose beam diameter is expanded by the expander 2. The peripheral edge of the laser beam 1a is blocked by the opening 3a of the mask 3, and the laser beam 1c has a substantially rectangular cross-sectional shape. The laser beam 1 c is reflected by the reflection mirror 5, passes through the condenser lens 6, and is irradiated on the XY stage 7.

  A substrate 8 is vacuum-adsorbed on the XY stage 7, and a metal film 9 to be processed is formed on the substrate 8. A substantially rectangular processing spot is formed on the surface of the metal film 9. Is imaged. As a result, the metal film in the processed spot portion is removed. Although the dimension of a processing spot is not specifically limited, Length 200-400 micrometers and width 100-400 micrometers are preferable.

  Then, in accordance with the repetitive pulse, the XY stage is set so that the imaging position of the laser beam 1c on the surface of the metal film 9 moves by 50% of the processing length of the processing spot 30c (see FIG. 6D). 7, the substrate 8 is moved. Thereby, the metal film of the processing spot 30c part is intermittently removed, and a separation groove having a processing width of the processing spot 30c is formed. Therefore, the metal film 9 is separated into two regions. The overlay rate is not limited to 50%, and can be moved within a range of 10 to 60%.

  Here, FIG. 2 shows the positional relationship between the opening 3a of the mask 3 and the laser beam 1a. In the conventional laser processing method, as shown in FIG. 2A, the mask 3 is arranged such that the center 1x of the laser beam 1a (that is, the peak of the energy intensity distribution) coincides with the center 3x of the opening 3a of the mask 3. Was located.

  On the other hand, in the laser processing method of the present invention, as shown in FIG. 2B, the center 1x of the laser beam 1a is decentered in the beam moving direction 1v relative to the center 3x of the opening 3a. Next, the position of the mask 3 is arranged.

  As a result, the four corners of the machining spot 30c are the edge defect occurrence areas, but the energy intensity is increased at the two corners in the laser moving direction and the edge defect occurrence area is not reached. By scanning the metal film 9 with the laser beam 1c having such an energy intensity distribution, it is possible to perform separation processing without occurrence of edge defects.

  Although the energy intensity is reduced at the two corners on the opposite side to the laser moving direction, the metal film at the portion irradiated with the two opposite corners has already been removed to some extent by the first irradiation. There is no edge defect that will be left behind. Therefore, it is possible to form a separation groove excellent in electrical insulation without any processing residue without increasing the overall output of the laser light source 1.

  On the contrary, when the center 1x of the laser beam 1a is decentered in the direction opposite to the beam moving direction 1v with respect to the center 3x of the opening 3a, an end defect occurs on the beam moving direction 1v side. Therefore, the desired effect cannot be obtained because the processing remains as in the conventional case.

  Therefore, when the moving direction 1v of the laser beam is changed by changing the moving direction of the substrate 8 on the XY stage 7, the positions of the four sides constituting the substantially rectangular opening 3a are moved. The center 1x of the laser beam 1a is again decentered in the beam moving direction with respect to the center 3x of the opening 3a.

  In FIG. 1, the processing spot 30c is moved by moving the substrate 8 on the XY stage 7, but the present invention is not limited to this, and the substrate is fixed on the XY stage. The processing spot can also be moved by using the fiber optical system and moving the output optical unit. Also in this case, the center of the laser beam is decentered in the direction of beam movement with respect to the center of the aperture, so that, similarly to the above, separation with excellent electrical insulation with no processing defects is not caused. Grooves can be formed.

  Further, instead of moving the substrate on the XY stage, the processing spot can also be moved by fixing the substrate on the XY stage, using a galvano mirror, and driving the galvano mirror. Also in this case, the center of the laser beam is decentered in the direction of beam movement with respect to the center of the aperture, so that, similarly to the above, separation with excellent electrical insulation with no processing defects is not caused. Grooves can be formed.

  Note that when the galvanometer mirror is driven, the incident angle of the laser beam to the substrate changes, so that the shape of the processing spot is deformed. That is, even if the shape of the opening 3a is substantially rectangular, the shape of the machining spot is not substantially rectangular except when the incident angle is 90 degrees. Therefore, the shape of the machining spot can be maintained in a substantially rectangular shape by moving the positions of the four sides constituting the substantially rectangular opening 3a in accordance with the driving of the galvanometer mirror.

  As described above, according to the laser processing method of the present invention, the metal film formed on the substrate can be separated and processed without causing edge defects. As the metal film to be processed, Ag, Al, Cu, Ti, Ni or the like is preferable. Further, the object to be processed is not limited to such a metal film, and can be suitably separated and processed for a laminated film of a metal film and a semiconductor film and / or a metal oxide film. Below, an example of the manufacturing method of the thin film solar cell using the laser processing method of this invention is demonstrated.

  First, a first electrode film is laminated on the back surface of a film substrate having through holes for series connection, and a second electrode film is laminated on the surface. These electrode films are preferably made of metal such as Ag, Al, Cu, Ti, and Ni, and the thickness is preferably 100 to 400 nm. In addition, these electrode films are electrically connected through a series connection through hole. Then, the second electrode film is irradiated with a laser beam using the laser processing method of the present invention to separate and process the second electrode film into a plurality of strips. In addition, through holes for collecting current are formed in the portions where these electrode films are formed.

Next, a semiconductor film and a transparent electrode film are sequentially laminated on the second electrode film except for the periphery of the through hole for series connection. As the semiconductor film, α-Si or the like is preferable, and the thickness is preferably 200 to 600 nm. ITO as the transparent electrode film, a metal oxide SnO _2, ZnO and the like are preferable, and its thickness is 50~100nm is preferred. In addition, a fourth electrode film made of metal is stacked on the first electrode film. The thickness of the fourth electrode is preferably 50 to 200 nm. The fourth electrode film is electrically connected to the transparent electrode film through the current collecting through hole.

  Then, again using the laser processing method of the present invention, the substrate is composed of a laminated film composed of the second electrode film, the semiconductor film, and the transparent electrode film on the substrate surface, and the first electrode film and the fourth electrode film on the back surface of the substrate. Each laminated film is separated into strips. Thereby, the some strip-shaped solar cell unit cell formed in the substrate surface is connected in series via the electrode of a substrate back surface.

  As described above, according to the laser processing method according to the present invention, it is possible to separate and process the solar cell unit cells without increasing the laser output, using a large-diameter processing spot, and generating no edge defects. Therefore, a solar cell having a series connection structure having excellent performance can be manufactured with low cost and high productivity.

It is a schematic diagram which shows an example of a structure of the laser processing apparatus used for the laser processing method of this invention. It is a schematic diagram which shows the positional relationship of the opening of a mask and a laser beam, (a) shows the case of the conventional laser processing method, (b) shows the case of the laser processing method of this invention. It is a schematic diagram explaining the reciprocating movement of the conventional process spot. It is a schematic diagram explaining the movement of the conventional large diameter processing spot. It is a schematic diagram explaining the movement of a substantially rectangular processing spot. (A) is a figure which shows the positional relationship of the opening of a mask and a laser beam, (b) and (c) are side views which show the processing state of a metal film, (d) is the top view It is.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Laser light source 1x Center of energy intensity distribution 1v Beam moving direction 2 Expander 3 Mask 3a Aperture 3x Center of aperture 5 Reflection mirror 6 Condensing lens 7 XY table 8 Substrate 9 Metal film

Claims (4)

A laser processing method for repeatedly irradiating a laminated film including at least one metal film formed on a substrate with a pulsed laser beam to separate the laminated film into two or more regions,
Shaping the shape of the processing spot of the laser beam applied to the surface of the laminated film into a substantially rectangular shape using a mask;
Moving the processing spot of the laser beam relative to the laminated film at a constant overlay rate;
Decentering the center of the energy intensity distribution of the laser beam in the moving direction with respect to the center of the substantially rectangular machining spot.   The mask has an opening for shaping the processing spot of the laser beam into the substantially rectangular shape, and has four light shielding members that define four sides constituting the opening, and the four light shielding members. The position of each of the four light-shielding members is adjustable in order to control the eccentricity according to the relative movement of the laser beam. Laser processing method.   The laser processing method according to claim 1 or 2, wherein a laser beam having a wavelength of 400 to 650 nm is used as the laser beam.   The laser processing method according to claim 1, wherein a YAG laser, a YVO laser, or a YLF laser is used as a laser generation source of the laser beam.

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