JP2006294122A - Glide head for magnetic disk - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a glide head capable of realizing a stable glide height test even in a magnetic disk whose surface is ultra smooth, being not easily attracted with the disk and accurately measuring a floating amount. <P>SOLUTION: A floating rail composed of an air introduction area, a floating area and a detection area for generating a positive floating pressure is formed on a slider surface, the surface roughness of the detection area in contact with the outflow end of the floating rail is ≤1.2 nm by Ra, and the surface roughness of the floating area is larger than the detection area and is ≤8 nm by Ra. Also, by increasing the surface roughness of the floating area of the floating rail continuously or stepwise from an outflow end side to an inflow end side, it becomes easy to escape from attraction with the magnetic disk. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a glide head used for manufacturing inspection of a magnetic disk.

A magnetic disk used in a hard disk device uses a disk-shaped glass or a non-magnetic material substrate such as aluminum. A protective film made of a magnetic material and mainly carbon is formed on the surface of the nonmagnetic material substrate by sputtering or the like, and a fluorocarbon lubricant is applied. A magnetic disk made in this way is combined with a magnetic head and used as a recording device for recording or reproducing information. A magnetic disk glide head (hereinafter, sometimes simply referred to as a glide head) is a sensor for detecting minute protrusions or foreign matters (hereinafter referred to as protrusions) generated on the surface of the magnetic disk. Used in magnetic disk inspection process. Several types of glide heads have been put into practical use, but those having a piezoelectric element and those having an AE (Acoustic Emission) sensor outside the head are mainly used. The piezoelectric element method and the AE method differ only in the method of converting vibration generated by collision of a minute protrusion generated on the surface of the magnetic disk and the slider of the glide head into a voltage. .

A glide head in which a piezoelectric element is mounted on a slider is described in Patent Document 1. FIG. 7 is a perspective view of a glide head in which a piezoelectric element is mounted on a slider. FIG. 7a) is a rear perspective view of a method in which a piezoelectric element is arranged on the side of the slider, and FIG. 7b) is a floating surface side perspective view. The slider 1 has a pair of levitation rails 3 including an air introduction area 21 and a levitation area 22. A projecting portion 4 is provided on the side surface of the slider 1, and a piezoelectric element 9 is fixed to the slider back surface side of the projecting portion 4. The output voltage of the piezoelectric element 9 is taken out from both ends in the polarization direction of the crystal constituting the piezoelectric element by the lead wire 10 and is provided on the suspension 2 with the insulating tube 1.
1 to the outside. FIG. 7c) is a rear perspective view of a method in which a piezoelectric element is arranged on the outflow side of the slider, and FIG. 7b) is a floating surface side perspective view. Hereinafter, the same reference numerals are used for the same parts and parts for easy understanding of the description.

The operation principle of the glide head will be briefly described with reference to FIG. A flexure 7 provided on the suspension 2 is bonded to the back surface of the slider-1. The suspension 2 applies a load that is a force for pressing the slider 1 against the magnetic disk 55 at the apex of the pivot 8 formed on the flexure 7. With the pivot 8 as a fulcrum, the slider 1 can move up and down, left and right, though slightly. A position where the pivot 8 applies a load to the slider 1 is a load point. In FIG. 8, illustration of the piezoelectric element 9 and the lead wire 10 is omitted. The slider 1 floats by the action of an air flow accompanying the rotation of the magnetic disk 55. The airflow flows from the inflow end 15 of the slider 1 toward the outflow end 16. The flying height hg of the glide head is determined by various factors, but is mainly determined by the speed of the air flow, the rail width of the slider, and the load. Since the rail width and load are determined by the glide head, the flying height is determined by the linear velocity determined by the rotational speed of the magnetic disk 55 and the position of the glide head on the magnetic disk. By changing the rotational speed of the magnetic disk and keeping the linear velocity constant within the magnetic disk surface, the magnetic disk 55 can be levitated with a constant flying height hg.

In general, the glide head has a constant condition in the surface of the magnetic disk, that is, the flying height hg for detecting the height n of the protrusion 56 is constant in the surface of the magnetic disk, and is generated when the protrusion and the glide head collide. In order to make the energy uniform (the relative velocity between the protrusion and the glide head is constant), the linear velocity is constant within the magnetic disk surface. Also, in order to keep the flying height and flight attitude constant on the magnetic disk surface, the slider of the glide head is tangent to the circumference of the magnetic disk on which the slider and slider fly at any position on the magnetic disk. (YAW angle) is constant, and is normally used at 0 degrees in the glide height test. When the slider 1 comes into contact with or collides with the protrusion 56 on the magnetic disk, vibration generated by the collision propagates through the slider 1 and vibrates and deforms the piezoelectric element 9. Since charges are induced in the electrodes of the piezoelectric element 9, protrusions can be detected by taking out and measuring the voltage between the leads 10. Further, when the slider 1 having a predetermined flying height hg is moved on the surface of the magnetic disk, the slider comes into contact (collision) with a projection higher than the flying height hg. If the voltage of the piezoelectric element generated at this time and the position of the magnetic disk are obtained, a non-standard protrusion on the surface of the magnetic disk can be detected.

In general, the glide head operating on such a principle is formed by protruding two floating rails 3 that generate a positive floating pressure on both sides of the air inflow groove. By using two levitation rails, the posture during flight can be kept stable. In addition, the flying height of the glide head composed of two floating rails can be controlled relatively easily by changing the width of the rail generating the levitation force of the glide head. The required flying height of the glide head can be easily designed according to the height. The protrusion on the surface of the magnetic disk must be lower than the flying height of the slider of the magnetic head. As the flying height of the slider is required to be 12 nm or less, the allowable height of the protrusion of the magnetic disk becomes increasingly lower, and the requirement is 9 nm or less.

Japanese Patent Laid-Open No. 11-16163 FIG.

In recent years, the surface of a magnetic disk has been finished in an ultra-smooth state by lowering the flying height by further increasing the recording density. In particular, in magnetic disks for use in LUL (load / unload) hard disk drives, anti-adhesion texture processing required for conventional CSS (contact start / stop) magnetic disks is applied to the magnetic disk surface. Since there is no need to apply, there are some which are smoothed to 0.5 nm or less by Ra. LUL type magnetic disks are mainly small in size with a diameter of 65 mm or less, and their demand for portable hard disk drives is growing rapidly. When a small magnetic disk smoothed to about 0.5 nm with Ra was subjected to a glide height test, there was often a problem that the test could not be continued stably. For example, during the glide height test, abnormal signals suddenly occur continuously and the test cannot be continued, or the inspection quality fluctuates over time.

The main cause of these problems is thought to be fly stiction, where the glide head and disk adsorb during the glide height test. If fly stiction occurs, an accurate glide height test cannot be performed, and the reliability of the hard disk drive may not be maintained at a high level. Also in the manufacture of magnetic disks, non-defective magnetic disks are mistakenly judged as defective, leading to a decrease in acceptance rate, resulting in wasted consumption of resources. Patent Document 2 discloses an inspection method in which the surface roughness of the air bearing surface of the glide head is made larger than the surface roughness of the magnetic disk to prevent fly stiction and perform a glide height test stably.

JP 2004-303294 A

Although many of the problems of adsorption can be avoided by the method of Patent Document 2, the adsorption has not been completely eliminated. It has also been found that the surface roughness range of the air bearing surface of Patent Document 2 is insufficient to completely eliminate the adsorption. Further, the collision between the protrusion on the disk and the glide head occurs near the outflow edge of the glide head. This is obvious from the flying position of the head, and can also be confirmed from the wear location of the used glide head. Therefore, in order to perform a highly accurate glide height test, it is desirable that the surface shape near the outflow edge of the glide head is uniform. However, when the entire surface of the floating rail is roughened to prevent adsorption, the shape near the outflow edge becomes uneven, and fine protrusions on the disk pass through the uneven gap,
There was a problem with the results of the glide height test.

Glide heads measure and manage their flying height characteristics using optical methods. However, if the entire surface of the flying levitating rail is made rough, the reflection of light is scattered from the roughness, and accurate A new problem has arisen that flying height measurement and stable flying height measurement cannot be performed.

An object of the present invention is to provide a glide head that can realize a stable glide height test even on a magnetic disk having an ultra-smooth surface, is difficult to adsorb to the disk, and can accurately measure the flying height.

The magnetic disk glide head of the present invention is a magnetic disk glide head that detects a collision with a protrusion of a magnetic disk or a foreign object with a piezoelectric element or an AE sensor. The slider surface on the side is formed with an air introduction region for generating a positive levitation pressure, a levitation region, and a detection region. The surface roughness of the detection region in contact with the outflow end of the levitation rail is 1 in Ra. It is preferable that the surface roughness of the flying region is larger (rougher) than the detection region and Ra is 8 nm or less.

The levitation rail that generates positive levitation pressure on the slider consists of an air introduction area that guides the air flow to the levitation area and detection area, a levitation area that generates levitation force, and a detection area that detects protrusions on the magnetic disk. Yes. The air introduction region has a surface that is recessed by about 0.2 μm from the flying region or a slope that has a taper of about 0.5 degrees from the flying region. Since the air introduction area is away from the magnetic disk surface and the influence on the adsorption phenomenon is small, it is not necessary to specifically define the surface roughness.
a may be about several nm. In order to prevent adsorption, the flying region is larger than the detection region and has a surface roughness of Ra of 8 nm or less. In order to increase the detection accuracy of protrusions on the magnetic disk, the detection area should have a small (fine) surface roughness, and Ra should preferably be 1.2 nm or less.

In order to prevent adsorption, it is important that the surface roughness of the flying region is larger than the surface roughness of the magnetic disk to be inspected. By increasing the surface roughness of the flying region, the contact area with the magnetic disk can be reduced, and adsorption can be prevented. The relationship between the surface roughness of the air introduction area and the surface roughness of the magnetic disk need not be specified. By setting the surface roughness of the detection area to the same level as the surface roughness of the magnetic disk, the detection accuracy of the protrusion can be increased.

The inflow end width and the outflow end width of the floating rail may be different. When the levitating rail is formed by machining, the inflow end width and the outflow end width are the same, or the shape widens or narrows at a constant angle from the inflow end to the outflow end. When the photolithography technique is used, the shape of the floating rail can be freely formed. The levitation rail may be divided between the inflow end and the outflow end, and may be divided into an air introduction region and a levitation region, and a levitation region and a detection region.

As the area of the detection region with a small Ra increases, an adsorption phenomenon with the magnetic disk is likely to occur. Therefore, the detection region is preferably small. However, since the detection area is also worn by contact with the protrusions of the magnetic disk, the life of the glide head is shortened if the detection area is reduced. From the viewpoint of the lifetime of the glide head, it is preferable that the detection region has a width of the outflow end and a length of 80 μm or more from the outflow end. In order to stably measure the flying height of the glide head in the detection region, the length is preferably at least twice the diameter of the laser spot for measurement, and is preferably 180 μm or less from the flying height measurement and adsorption.

The surface roughness can be measured using a measuring instrument such as a non-contact type surface roughness meter using laser or an atomic force microscope (AFM). It is preferable to obtain Ra according to JIS.

The flying height of the glide head is preferably measured in the detection area. Since the detection area has a small surface roughness, measurement accuracy can be ensured. What is important in the flying height of the glide head is the flying height hg of the left and right flying rails and the difference in flying height Δhg between the left and right. Measure these values accurately,
By inspecting the magnetic disk, the projection can be inspected with high accuracy. The flying pitch angle of the glide head is unavoidably low in measurement accuracy because the surface roughness of the floating region on the inflow end side is large. If the flying height hg of the detection region is a desired value, the flying pitch angle has little influence on the projection detection accuracy, and therefore the inflow-side flying height measurement accuracy may be low.

In the magnetic disk glide head according to the present invention, it is preferable that the surface roughness of the floating region of the floating rail increases continuously or stepwise from the outflow end side to the inflow end side.

It is preferable that the surface roughness of the flying region is larger from the outflow end side toward the inflow end side. In order to increase, the surface roughness only needs to change continuously, and the rate of change need not be constant. Further, the surface roughness is substantially the same within a predetermined range, and the surface roughness may be changed stepwise.

By increasing the surface roughness of the floating region from the outflow end side toward the inflow end side, the following effects can be obtained. By increasing the surface roughness on the inflow end side, air can easily enter from the air introduction area,
Since the outflow end side has a small surface roughness and is more likely to float, it is easy to escape from the attraction with the magnetic disk.

Fine dust that has flowed in from the air introduction region is captured at a portion having a large surface roughness on the inflow end side of the floating region, and dust can be prevented from flowing to the outflow end side. This is because if dust accumulates on the outflow end side and the surface roughness is substantially reduced, adsorption is likely to occur. Further, the large dust flowing in from the air introduction area is crushed in the magnetic disk, the floating area, and the detection area. Since the surface roughness on the outflow end side is small, most of the pulverized dust is discharged from the outflow end, and is less likely to accumulate in the floating area and detection area on the outflow end side, thus making it difficult to cause adsorption.

In the magnetic disk glide head of the present invention, it is preferable that the apex positions of the surface roughness peaks of the floating area and the detection area of the floating rail are on the same line. If they are not on the same line, the flying height hg of the detection area cannot be controlled, and an adsorption problem due to a decrease in the dust discharge capability occurs.

Combining machining and photolithography technology to obtain floating rails whose surface roughness peaks in the floating area of the floating rail and the surface roughness of the detection area are collinear and the surface roughness differs between the detection area and the floating area. Is preferred. Polishing is performed so that the floating region and the detection region have the same surface and the surface roughness required by the detection region. After polishing, the floating rail width and shape are formed by machining or photolithography. The surface roughness of the floating region and the detection region can be changed by forming a photoresist pattern on the floating rail surface and roughening the surface of the floating region using ion milling or the like. The surface roughness peak-to-peak distance, peak shape, and the like can be realized by changing the photoresist pattern.

According to the present invention, a glide head having a surface roughness larger than the surface roughness of the magnetic disk can avoid adsorption and perform a stable glide height test with high accuracy.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. To make the explanation easier to understand,
The same reference numerals are used for the same parts and parts.

FIG. 1 is a perspective view of a glide head according to the present invention. Since the basic structure is the same as that of the conventional glide head shown in FIG. 7, the floating rail is shown as an upper surface. The main difference from the slider of the conventional glide head is that the floating rail is divided into a floating region 22 and a detection region 23 having different surface roughness from the air introduction region 21. The name of each part of the slider and the dimensional relationship used in the example will be described in detail with reference to FIG. The slider length L11, which is the size of the entire slider, is 1.25 mm, the slider width L9 is 0.95 mm, the slider total width L10 is 1.90 mm, and the slider height L12 shown in FIG. 1 is 0.43 mm.
The material of the slider is aluminum titanium carbide (ATC). The length L2 of the levitating rail 3 giving the levitating force is 1.20 mm, and the rail width L8 is 0.16 mm. Levitation rail 3
The length L2 of the air introduction region 21 is 0.2 mm of the length L3 and the length L4 of the flying region 22 is 0.
. 88 mm and the length L5 of the detection region 23 is 0.12 mm. Air introduction area 21
Is a slope of 0.5 degrees. The outflow end corner portion length L6 provided at the outflow end 16 is 0.05 m.
m. Since the chamfer angle of the outflow end corner portion is 20 degrees, the outflow end corner portion length L6 does not generate a levitation force. The distance between the outer ends of the left and right rails is 0.95 mm, which is the slider width L9.
A length of 0.95 mm obtained by subtracting the slider width L9 from the total slider width L10 is the length L13 of the width of the overhang portion 4.

A method for manufacturing the slider 1 will be briefly described. The machining of the aluminum titanium carbide material into the shape of FIG. 2 is the same as in the conventional glide head. What is different from the prior art is that the surface roughness of the levitation rail 3 is changed between the air introduction region, the levitation region, and the detection region, and in particular, the surface roughness of the levitation region is increased. The photolithographic technique and ion milling were used as methods for increasing the surface of the flying region. A photoresist pattern was formed on the floating rail surface, and the surface of the floating region was roughened by ion milling. The surface roughness was changed by changing the ion concentration gradient of ion milling, the speed at which the slider was rotated, the angle between the ion milling and the slider, etc., and sliders having different surface roughness and surface roughness distributions were obtained.

FIG. 3 shows a shape pattern of the surface roughness of the flying region. 3A to 3C schematically show the surface roughness Rat of the detection region 23 and the surface roughness Raf of the flying region 22. In the a type of FIG. 3a), the surface roughness Raf of the flying region increases substantially continuously from the outflow end side to the inflow end side. The surface roughness Raf of the part in contact with the detection region on the outflow end side of the floating region is the same as the surface roughness Rat of the detection region. The b type in FIG. 3b) changes so that the surface roughness Raf of the flying region increases stepwise from the outflow end side to the inflow end side. In this embodiment, the number of steps is 3 to 10. The surface roughness Raf of the part in contact with the detection area on the outflow end side of the floating area is set to be larger than the surface roughness Rat of the detection area, and a step is provided. The c type in FIG.
The surface roughness Raf has substantially the same value throughout the flying region, and the boundary between the detection region and the flying region changes the surface roughness stepwise. The surface roughness Rat, Raf is shown as a value measured in the range of 10 to 100 μm. Raf is expressed with a value measured in a range of 100 μm from the inflow end side 10 of the floating region.

FIG. 4 shows the surface roughness shape pattern of the floating region from type a to type c and the inspection result of the magnetic disk. For comparison, a conventional product having the same surface roughness of the floating region and the detection region was also tested at the same time while changing the surface roughness. Raf is changed in the range of 4.9 to 7.8 nm as shown in FIG. The surface roughness Rat of the detection region is changed in the range of 0.6 to 1.2 nm. The glide head is evaluated by re-inspecting the number of magnetic disks that have been inspected due to errors due to adsorption or protrusions, etc., and the magnetic disk that has been inspected, using a c-type # 10 head, and again defective products It is the number of magnetic disks determined to be. With each glide head whose flying height hg was adjusted to 9 nm, 1000 magnetic disks having a surface roughness of 0.5 to 0.7 nm were continuously measured.

From the result of FIG. 4, the magnetic disk judged to be inspected significantly decreased by increasing the surface roughness of the flying region. In the glide heads of # 1 to # 12, # 14, and # 15, there was no inspection failure due to suction. This is considered to be caused by the protrusions of the magnetic disk because the magnetic disk determined to be defective was determined to be defective in the same manner even when re-inspected with another glide head. It is clear from the results of the conventional product that increasing the surface roughness of the floating area can prevent inspection defects due to suction, and providing a detection area with small surface roughness can improve the protrusion detection accuracy. It can be said. # 13 is 0 for both floating and detection areas
. The surface roughness is as small as 8 nm, and the number of magnetic disks determined to be defective is 62. When the # 10 glide head was used and 62 sheets were re-inspected, only 5 sheets were determined to be defective again. It was due to the protrusion that it was judged as defective in the reexamination. The magnetic disk judged to be non-defective by the re-inspection was caused by the failure phenomenon due to the # 13 glide head adsorption phenomenon. In the glide head in which the floating areas of # 14 and 15 and the surface roughness of the detection area are large, the number of magnetic disks determined to be defective is about one digit less than that of # 13. This is presumably because the adsorption phenomenon did not occur because the surface roughness of the floating region was large. From the result of the re-examination, it was caused by the protrusion that was judged to be defective.

From the results of # 14 and # 15, it may be considered that the detection areas of # 1 to # 12 are not necessary. Therefore, 100 magnetic disks determined as non-defective products in # 14 and # 15, and # 10 glide Measurement was performed using a head. Two magnetic disks were determined to be defective at # 14 and three at # 15. All of these were defective due to the high protrusion height. This is probably because the surface roughness of the portion that hits the detection area was not in contact with the protrusion to be detected, or even if contacted, the impact force was weak and no voltage exceeding the threshold was generated from the piezoelectric element. For confirmation, the magnetic disk determined to be non-defective in # 13 was also re-inspected, and there was no defect due to the height of the protrusion. From the above results, it was confirmed that the adsorption phenomenon can be prevented by increasing the surface roughness Raf of the floating region, and that the protrusion detection accuracy can be improved by decreasing the surface roughness Rat of the detection region.

FIG. 5 shows the relationship between the length L5 of the detection area, the number of magnetic disks in which an error occurs due to adsorption or protrusion, and the number of lifespans of the glide head. L5 was changed in the range of 30 to 500 μm. The surface roughness shape of the flying region is b pattern, and the surface roughness Raf of the flying region is 6.6 nm.
The surface roughness Rat of the detection region was 1.0 nm. A magnetic disk having a surface roughness of 0.5 to 0.7 nm was measured with each glide head having a flying height hg adjusted to 9 nm. When 1000 sheets were measured continuously, an evaluation was made based on the number of magnetic disks that were inferior in inspection due to errors due to adsorption or protrusions. The life of the glide head was determined by the number of magnetic disks measured up to the time when the glide head was worn and replaced.

As the detection area increases, the number of magnetic disks determined to be defective increases. Considering that the cause of the glide head having a detection area length L5 of less than 180 μm that is determined to be defective is due to the height of the protrusions, the detection area length L5 is determined to be increased by a glide head having a length of 200 μm or more. Is considered to be caused by the adsorption of the glide head and the magnetic disk. When the length L5 of the detection region was 80 μm or less, the life of the glide head increased as L5 became longer, and when L5 was 100 μm or more, the life was substantially the same. If the length L5 of the detection area is too small, the predetermined flying height hg may not be obtained due to wear or scratching of the detection area near the outflow end where the number of collisions with the protrusion is the largest, or scratches on the magnetic disk may occur. Started to give
It is thought that it became short life. Adsorption is the product of the length L5 of the detection area and the slider width L8, and the life is determined by the length L5 of the detection area. Therefore, the optimum length L5 of the detection area is determined from the flying height hg, the diameter of the magnetic disk, the rotational speed, and the like. Can be sought. As for the life of the glide head,
If at least 1000 sheets or more can be measured, it can be judged empirically sufficient. From this, L5
Is 80 μm or more, it can be determined that the lifetime is satisfactory.

FIG. 6 shows a glide head having a different floating rail shape. 6A) and FIG. 6B), the floating area is divided and the floating rail is divided into the air introduction area 21 and the floating area 22, and the floating area 22 and the detection area 23. In order to reduce the flying height hg, the slider width L8 may be reduced. However, the protrusion detection width is also reduced and the inspection time of the magnetic disk is increased. In order to reduce the flying height hg without reducing the protrusion detection width, the flying area is divided into two.
FIG. 6 a) shows a case where a slit 24 is additionally formed in the flying region of the slider of the first embodiment. As the surface roughness shape pattern of the flying region, the a type to the c type in FIG. 3 were applied. FIG.
b) shows a case where a floating rail is formed by using a photolithography technique. Unlike machining, the degree of freedom of the floating rail shape is high, and it is easy to make the detection area width larger than the floating area width, which is effective in reducing the inspection time. The air introduction area 21 is 0.2 μm from the floating area.
m The surface was recessed.

In order to confirm the same effect as in Example 1 with the floating rail shape of FIGS. 6a) and 6b), the surface roughness shape pattern of the floating region, the surface roughness Raf of the floating region, and the surface roughness Rat of the detection region are Changed and examined the magnetic disk. The results are substantially the same as in FIG. 3 and will be omitted. However, increasing the surface roughness Raf of the floating region can prevent the adsorption phenomenon, and reducing the surface roughness Rat of the detection region increases the protrusion detection accuracy. I was able to confirm.

It is a perspective view of the glide head of Example 1 of the present invention. It is a figure explaining each part name and dimensional relationship of the slider of this invention. It is a figure explaining the shape pattern of the surface roughness of the floating area | region of this invention Example 1. FIG. It is a figure explaining the test result of the magnetic disk of Example 1 of this invention. It is a figure explaining the test result of the magnetic disk of Example 2 of this invention. It is a figure which shows the floating rail shape of this invention Example 3. FIG. It is a perspective view of the conventional glide head. It is a figure explaining the principle of operation of a glide head.

Explanation of symbols

1 Slider, 2 Suspension, 3 Lifting rail, 4 Overhang,
7 flexure, 8 pivot, 9 piezoelectric element, 10 lead wire,
11 Insulating tube, 15 Inlet end, 16 Outlet end, 21 Air introduction area,
22 floating area, 23 detection area, 24 slits, 55 magnetic disk,
56 Projection.

Claims (3)

A slider that floats from a magnetic disk by a predetermined amount, and a magnetic disk glide head that detects collisions with magnetic disk protrusions and foreign objects using a piezoelectric element or an AE sensor. The slider surface on the side facing the magnetic disk has a positive Air introduction area and levitation area that generate levitation pressure,
A floating rail composed of a detection region is formed, the surface roughness of the detection region in contact with the outflow end of the floating rail is 1.2 nm or less in Ra, and the surface roughness of the floating region is larger than that of the detection region and is 8 in Ra.
A glide head for a magnetic disk, characterized in that it is equal to or less than nm. 2. The glide head for a magnetic disk according to claim 1, wherein the surface roughness of the floating region of the floating rail increases continuously or stepwise from the outflow end side toward the inflow end side. 3. The magnetic disk glide head according to claim 1, wherein the top positions of the surface roughness peaks of the floating area and the detection area of the floating rail are on the same line.

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