JP2006292864A - Fixture for body to be drawn - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a fixture for body to be drawn, enabling positioning of an accurate and a quick drawing pattern to a mark that is a reference. <P>SOLUTION: The fixture 10 includes an upper plate 12 and a lower plate 14 and is attached to a substrate 40, on which the pattern is drawn. First to fourth alignment marks M<SB>1</SB>-M<SB>4</SB>, that serve as standards, when determining the position of the drawn pattern, are provided on the peripheral part of the upper face 14U of the lower plate. Since the upper plate 12 and the lower plate 14 are transparent, in a state with the fixture 10 holding the substrate 40, the first to the fourth alignment marks M<SB>1</SB>-M<SB>4</SB>can be recognized from both sides of the side of a substrate surface 40U and the side of a substrate rear face 40D. Thus, in a state with the fixture 10 being attached to the substrate 40, mutually corresponding patters are drawn on the substrate surface 40U and the substrate rear face 40D at respective accurate positions, by regarding the first to the fourth alignment marks M<SB>1</SB>-M<SB>4</SB>as positioning standards. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a jig for a drawing object on which a predetermined pattern is drawn, and more particularly to a jig for a drawing object for determining the position of a drawing pattern.

  A typical example of drawing is printing of a circuit pattern on a printed circuit board by a photolithographic technique. In this case, the object to be drawn is a substrate having a photoresist layer formed on the upper surface, and a predetermined circuit pattern is drawn on the photoresist layer on the substrate by the exposure apparatus. After the circuit pattern is drawn, a necessary process is performed to obtain a printed circuit board.

  The circuit pattern needs to be drawn at a predetermined position on the printed circuit board, but the substrate undergoes minute deformation due to heat treatment or the like. Therefore, it is necessary to grasp the correction amount of the circuit pattern position required for minute deformation of the substrate. Further, in an inner layer board, a double-sided board or the like of a printed board that forms patterns corresponding to each other on both sides, it is necessary to accurately correspond the drawing positions on the front and back of the board.

From the above, generally, a hole serving as a reference for positioning is formed on the board, and the actual position of the reference hole is measured by a camera, and the difference between the original position of the reference hole on the board and the actual position is Based on this, the drawing position of the pattern is adjusted (see, for example, Patent Document 1). When this reference hole is provided in the substrate, a drill, a punch or the like is used, or an etching method is used.
JP 2004-85664 A (paragraphs [0023] to [0030], FIG. 2)

  When a reference hole is provided by drilling with a drill, punch or the like, burrs or the like may occur in the peripheral portion, and a hole formed by eccentricity during processing may not be a perfect circle. By providing a hole having an inappropriate shape in this way, there is a possibility that the pattern is not correctly positioned. In the etching process, a plurality of steps such as exposure and development are required, which can hinder a quick positioning operation.

  Accordingly, an object of the present invention is to realize a jig for an object to be drawn that enables accurate and quick positioning of a drawing pattern with respect to a reference mark.

  A jig according to the present invention is a jig for a drawing object that is attached to a drawing object on which a drawing apparatus draws a pattern, and is provided with a positioning mark serving as a reference for determining the position of the pattern. To do.

  The drawing object jig is preferably attached to the drawing object so that the irradiation light from the drawing apparatus is transmitted and the pattern can be drawn on the drawing object. Further, it is preferable that at least a part of the jig for the drawing object is transparent so that the positioning mark can be recognized from the outside in a state where it is attached to the drawing object.

  The drawing object is, for example, a plate shape. In this case, it is preferable that the same positioning mark can be recognized from the front side and the back side of the drawing object in a state where the drawing object is attached to the drawing object.

  The drawing object jig is based on the difference between the mark position data indicating the original position of the positioning mark with respect to the drawing object and the actual position of the positioning mark when the jig is attached to a predetermined position of the drawing object. Thus, it is desirable that the drawing apparatus is attached at a predetermined position in order to correct the position of the pattern.

  The drawing object jig includes, for example, an upper plate that holds the drawing object from above the drawing object and a lower plate that holds the drawing object from below the drawing object. In this case, it is preferable that the drawing object jig further includes a fixing member for fixing the upper plate and the lower plate. More preferably, the fixing member holds the side surfaces of the upper plate and the lower plate. The fixing member preferably has flexibility.

  It is desirable that the drawing object jig is capable of adsorbing the drawing object by decompressing a space surrounded by the upper plate, the lower plate, and the fixing member. The positioning mark is preferably provided on the periphery of the drawing object jig.

  It is desirable that the drawing object jig is attached to an area where a pattern on the drawing object is not drawn. And when a to-be-drawn body is plate shape, the jig for to-be-drawn bodies is attached to the side of a to-be-drawn body, for example.

  The drawing apparatus of the present invention draws a pattern on a drawing object to which a drawing object jig provided with positioning marks is attached. The drawing apparatus detects a position of a positioning mark on the drawing object placed on the drawing apparatus, and a drawing for determining a pattern drawing position based on the position of the positioning mark detected by the mark position detecting means. And a position determining means.

  In the drawing apparatus, the mark position detection means detects the same positioning mark of the drawing object jig attached to the plate-like drawing object from the front side and the back side of the drawing object, and the drawing position determination means The drawing position of the pattern is preferably determined based on the position of the same positioning mark on the drawing surfaces on the front and back sides of the drawing object.

  According to the drawing pattern positioning method of the present invention, a drawing object jig provided with positioning marks is attached to a drawing object on which a drawing apparatus draws a pattern, and the drawing object jig is attached. A drawing body is placed on a drawing apparatus, and a drawing position of a pattern drawn by the drawing apparatus is determined with reference to a positioning mark.

  In the drawing pattern positioning method, for example, a drawing object jig is attached to a plate-like drawing object, and the same positioning mark of the drawing object jig is detected from the front side and the back side of the drawing object, A pattern drawing position is determined based on the position of the same positioning mark on the front and back drawing surfaces of the drawing object.

  ADVANTAGE OF THE INVENTION According to this invention, the to-be-drawn object jig | tool which makes it possible to correct the position of a drawing pattern correctly and rapidly is realizable.

  DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, a first embodiment of the invention will be described with reference to the drawings. FIG. 1 is a perspective view showing a substrate and a jig not attached to the substrate. FIG. 2 is a perspective view showing the jig attached to the substrate, and FIG. 3 is a plan view showing the jig attached to the substrate.

The jig 10 is used by being attached to a substrate 40 (object to be drawn) on which a drawing apparatus (not shown) draws a pattern. The jig 10 includes an upper plate 12 that covers the upper surface of the substrate 40 and a lower plate 14 on which the substrate 40 is placed. The peripheral portion of the upper surface 14U of the lower plate 14, first to fourth alignment marks M ₁ ~M ₄ becomes a reference in determining the position of a pattern to be drawn on the substrate 40 (positioning marks) is provided. Predetermined patterns are drawn on the front surface 40U and the back surface 40D of the substrate 40, respectively.

The upper plate 12 and the lower plate 14 are fixed to each other by a screw 16 (fixing member) in a state where the substrate 40 is sandwiched and held at a predetermined position (see FIG. 2). Since the upper plate 12 and the lower plate 14 are both transparent resin or glass, the first to fourth alignment marks M ₁ ~M ₄ includes a substrate 40 on the upper plate 12 is fixed and the lower plate 14 Can be recognized from the outside while is held. That is, when the jig 10 holding the substrate 40 is viewed from the upper side, the first to fourth alignment marks M _{1 to} M ₄ are present on the periphery of the substrate surface 40U (see FIG. 3), and the jig 10 is viewed from the lower side. When viewed, the first to fourth alignment marks M _{1 to} M ₄ can be confirmed in the peripheral portion of the substrate back surface 40D as when viewed from the upper side.

In this way, the first to fourth alignment marks M _{1 to} M ₄ can be recognized from both sides of the substrate front surface 40U side and the substrate back surface 40D side, and light for drawing can pass through the transparent jig 10. With the jig 10 still attached to the substrate 40, a pattern is drawn on the substrate front surface 40U and the substrate back surface 40D while using the first to fourth alignment marks M _{1 to} M ₄ as a positioning reference. 1 and 3, the screw 16 is omitted.

  FIG. 4 is a diagram schematically illustrating a drawing apparatus according to the present embodiment. FIG. 5 is a perspective view showing an appearance of the drawing apparatus.

  The drawing apparatus 20 includes a laser drawing apparatus 21 that directly draws a circuit pattern on a photosensitive substrate 40 using a laser beam (irradiation light). The laser drawing apparatus 21 includes an optical unit 22 and a drawing table 24 on which a substrate 40 to which the jig 10 is attached is placed. The drawing apparatus 20 includes a carrying-in belt 62 for carrying the substrate 40 onto the drawing table 24, and a sending-out belt 64 for sending the substrate 40 that has been drawn to the next processing apparatus (not shown). A carrying device 60 is provided.

  The optical unit 22 includes a laser light source and an optical system (not shown), and irradiates the laser beam toward the substrate 40 on the drawing table 24 along the main scanning direction. In the following, a two-dimensional drawing coordinate system is defined in which the main scanning direction of the optical unit 22 is the Y-axis direction, the sub-scanning direction is the X-axis direction, and a predetermined position on the drawing table 24 is the origin.

  The drawing device 20 includes a control device 50 that controls the overall operation of the laser drawing device 21, the drawing table 24, and the like. The control device 50 is a microcomputer having a memory such as a ROM or a RAM, and is connected to the CAD system 52. The drawing data, which is the data indicating the position and shape of the circuit pattern created by the CAD system 52, is sent to the control device 50 and stored in the memory of the control device 50. Sent to.

  The drawing table 24 is controlled by the control device 50 between a preparation position (indicated by a solid line) that is a position at which the substrate 40 is placed and a drawing position for drawing by the optical unit 22 (indicated by a broken line). It can be moved in the X-axis direction by a motor (not shown). When the substrate 40 is placed on the drawing table 24 at the preparation position with the substrate surface 40U facing up, the drawing table 24 moves to the drawing position. The substrate 40 is drawn on the drawing table 24 by the optical unit 22 while moving little by little in the negative direction of the X axis from the drawing position toward the preparation position. At this time, the laser beam irradiated onto the substrate 40 is modulated by the optical unit 22 so as to be scanned in the Y-axis direction, and circuit patterns are sequentially drawn.

The drawing apparatus 20 is provided with a housing 18 that houses the optical unit 22 (see FIG. 5). An opening 30 is formed in the side surface 18 a of the housing 18, and the drawing table 24 advances and retreats in the housing 18 through the opening 30. First and second rails 36 and 38 extending along the Y-axis are provided on the side surface 18a, and the first and second CCD cameras 32 and 34 are attached to the first and second rails 36 and 38, respectively. ing. The first and second CCD cameras 32, 34 are moved on the first and second rails 36, 38 by a linear motor (not shown) that is driven based on an instruction from the control device 50, and the first to second of the substrate 40 are moved. In order to detect the positions of the fourth alignment marks M _{1 to} M ₄ , these are photographed prior to drawing.

The position data of the first to fourth alignment marks M _{1 to} M _{4 in} the drawing coordinate system is obtained by the photographing operation of the first and second CCD cameras 32 and 34, and this position data is sent to the control device 50. Further, the drawing data stored in the memory of the control device 50 includes data indicating the drawing position of the circuit pattern with respect to the positions of the _first to fourth alignment marks M _{1 to} M _4. Determines the drawing position of the circuit pattern on the substrate surface 40U based on the transmitted position data and drawing data. Then, under the control of the control device 50, the optical unit 22 draws a circuit pattern at a predetermined position on the substrate surface 40U.

When the drawing of the substrate surface 40U is completed, the substrate 40 is inverted by a known inversion mechanism. Then, the first and second CCD cameras 32 and 34 again photograph the _first to fourth alignment marks M _{1 to} M ₄ . Thus, when the position data of the _first to fourth alignment marks M _{1 to} M ₄ for drawing the substrate back surface 40D is generated, the control device 50, like the data processing for drawing the substrate surface 40U, The drawing position of the circuit pattern on the substrate back surface 40D is determined. Then, the optical unit 22 draws a circuit pattern at a position determined by the control device 50.

Here, since the substrate 40 is held at a predetermined position by the jig 10, there is no displacement of the substrate 40 relative to the jig 10 due to inversion. Therefore, the drawing position of the circuit pattern is determined on the substrate front surface 40U and the substrate back surface 40D with reference to the same first to fourth alignment marks M _{1 to} M ₄ that maintain the positional relationship with the substrate 40. As a result, it is possible to prevent displacement of the circuit pattern between the substrate front surface 40U and the substrate back surface 40D, and circuit patterns corresponding to each other can be drawn accurately on the front and back of the substrate 40. In other words, at locations where the same pattern should be drawn at the same position on the front and back sides of the substrate 40, the substrate surface 40U and the substrate back surface 40D are drawn at positions that exactly match each other when translated in the thickness direction of the substrate 40. .

Further, after the substrate 40 is inverted, the first and second CCD cameras 32 and 34 detect the positions of the _first to fourth alignment marks M _{1 to} M ₄ again, and the control circuit 50 detects the first to fourth alignment marks M _1. Since the drawing position is determined based on the position of M ₄ and the drawing data, a slight positional deviation of the substrate 40 relative to the drawing table 24 before and after inversion is also corrected.

As described above, according to the present embodiment, by using the jig 10 provided with the _first to fourth alignment marks M _{1 to} M ₄ that can be recognized from both the front and back sides of the substrate 40 when attached to the substrate 40. It is possible to accurately correspond the drawing position between the substrate front surface 40U and the substrate back surface 40D without providing a reference hole, a mark or the like in the substrate 40.

  The fixing member for fixing the upper plate 12 and the lower plate 14 to each other is not limited to the screw 16 and may be a clip, for example. Moreover, you may fix with a screw and a nut.

  FIG. 6 is a perspective view showing the jig 10 attached to the substrate 40 in the second embodiment.

  The present embodiment is different from the first embodiment in that the upper plate 12 and the lower plate 14 are not directly fixed, and a fixture 26 that holds the side surfaces of the upper plate 12 and the lower plate 14 is provided. . Then, the upper member 12 and the lower member 28 included in the fixture 26 are fixed by the fixing screw 29, whereby the upper plate 12 and the lower plate 14 are fixed to each other.

  Thus, by surrounding the periphery of the jig 10 made of transparent resin or glass with the fixture 26, the peripheral portion of the jig 10 is protected, and damage due to external impact can be prevented. Furthermore, since the fixture 26 holds only the side surface of the jig 10, it does not block the optical path of the laser beam irradiated on the substrate 40 and does not adversely affect the drawing. Instead of the fixing screw 29, the fixing tool 26 may be fixed using a clip or the like. Moreover, in order to fix the upper board 12 and the lower board 14 more firmly, you may use the screw 16 together.

  FIG. 7 is a perspective view showing the substrate 40 and the jig 10 not attached to the substrate 40 in the third embodiment.

In this embodiment, the lower plate upper surface 14U is provided with a flexible member 15 extending vertically from the lower plate upper surface 14U, and the upper plate 12 is provided with air holes 13 penetrating the upper plate 12 up and down. Yes. The jig 10 holds the substrate 40 at a predetermined position by discharging air from the air holes 13 and reducing the pressure in the space surrounded by the upper plate 12, the lower plate 14, and the flexible member 15. The flexible member 15 is flexible because it is made of, for example, silicon rubber or synthetic rubber. The flexible member 15 is formed so as to be in contact with two side surfaces of the substrate 40 facing each other, determines the position of the substrate 40, and more closely fixes the upper plate 12 and the lower plate 14. Further, the upper plate 12 and the lower plate 14 are transparent, and the first to fourth alignment marks M _{1 to} M ₄ can be recognized from both the front and back sides of the substrate 40.

  As described above, according to the present embodiment, the position of the circuit pattern can be accurately determined by using the jig 10 that firmly holds the substrate 40 so that the substrate 40 is in a predetermined position.

  FIG. 8 is a perspective view showing the jig 10 attached to the substrate 40 in the fourth embodiment.

In this embodiment, the jig | tool 10 is a single member which does not have the upper board 12 and the lower board 14, and the point which is a frame shape by which the center part was cut out differs from the previous embodiment. That is, the jig 10 is attached to the side surface of the substrate 40 on which a circuit pattern is not drawn, and holds the substrate 40. And since the jig | tool 10 is a single member, fixing members, such as a screw, are unnecessary. Further, since the jig 10 has transparency, the first to fourth alignment marks M _{1 to} M ₄ are recognized not only from the substrate surface 40U side but also from the substrate back surface 40D side.

  As described above, according to the present embodiment, the position of the circuit pattern can be accurately determined by using the jig 10 which is a single plate member having a simple structure.

  The number of alignment marks provided on the jig 10, the number of CCD cameras, and the like are not limited to any of the embodiments. For example, it is sufficient that there are at least two alignment marks, and the same number of CCD cameras as the alignment marks may be provided so as to eliminate the movement time and enable a quick measurement operation.

It is a perspective view which shows the board | substrate and the jig | tool of the state which is not attached to the board | substrate in 1st Embodiment. It is a perspective view which shows the jig | tool attached to the board | substrate. It is a top view which shows the jig | tool attached to the board | substrate. It is a figure which shows a drawing apparatus roughly. It is a perspective view which shows the external appearance of a drawing apparatus. It is a perspective view which shows the jig | tool of the state attached to the board | substrate in 2nd Embodiment. It is a perspective view which shows the board | substrate and the jig | tool of the state which is not attached to the board | substrate in 3rd Embodiment. It is a perspective view which shows the jig | tool of the state attached to the board | substrate in 4th Embodiment.

Explanation of symbols

10 Jig (Jig for drawing object)
12 Upper plate 14 Lower plate 16 Screw (fixing member)
20 Drawing device 26 Fixing tool (fixing member)
32 1st CCD camera (mark position detection means)
34 Second CCD camera (mark position detection means)
40 Substrate (object to be drawn)
50 Control device (drawing position determining means)
M _{1 to} M ₄ first to fourth alignment marks (positioning marks)

Claims (16)

  A jig for a drawing object, characterized in that a drawing device is attached to a drawing object for drawing a pattern, and a positioning mark serving as a reference for determining the position of the pattern is provided.   2. The jig for a drawing object according to claim 1, wherein the irradiation light from the drawing device is transmitted and the pattern can be drawn on the drawing object while being attached to the drawing object.   The jig for a drawing object according to claim 1, wherein at least a part of the jig is transparent so that the positioning mark can be recognized from the outside in a state of being attached to the drawing object.   4. The drawing object according to claim 3, wherein the drawing object has a plate shape, and the same positioning mark can be recognized from a front side and a back side of the drawing object in a state where the drawing object is attached to the drawing object. Drawing tool.   2. The object according to claim 1, comprising: an upper plate that holds the drawing object from above the drawing object; and a lower plate that holds the drawing object from below the drawing object. Jig for drawing body.   6. The jig for a drawing object according to claim 5, further comprising a fixing member for fixing the upper plate and the lower plate.   The jig for a drawing object according to claim 6, wherein the fixing member holds side surfaces of the upper plate and the lower plate.   The drawing object jig according to claim 6, wherein the fixing member has flexibility.   The jig for a drawing object according to claim 6, wherein the drawing object can be adsorbed by decompressing a space surrounded by the upper plate, the lower plate, and the fixing member.   The drawing object jig according to claim 1, wherein the positioning mark is provided in a peripheral portion.   The jig for a drawing object according to claim 1, wherein the drawing object is attached to a region where the pattern is not drawn on the drawing object.   The drawing object jig according to claim 11, wherein the drawing object is plate-shaped, and the drawing object jig is attached to a side surface of the drawing object. A drawing apparatus for drawing a pattern on a drawing object to which a drawing object jig provided with a positioning mark is attached,
Mark position detecting means for detecting the position of the positioning mark of the drawing object placed on the drawing apparatus;
A drawing apparatus comprising: a drawing position determining means for determining a drawing position of the pattern based on the position of the positioning mark detected by the mark position detecting means. The mark position detection means detects the same positioning mark of the drawing object jig attached to the plate-like drawing object from the front side and the back side of the drawing object,
The drawing apparatus according to claim 13, wherein the drawing position determining unit determines the drawing position of the pattern based on the position of the same positioning mark on the drawing surfaces on the front and back of the drawing object. Attach a tool for drawing with a positioning mark to the drawing object on which the drawing device draws the pattern,
Place the drawing object with the drawing object jig attached thereto on the drawing apparatus;
A drawing pattern positioning method, wherein a drawing position of the pattern drawn by the drawing apparatus is determined with reference to the positioning mark. Attaching the drawing object jig to the plate-like drawing object,
Detecting the same positioning mark of the drawing object jig from the front side and the back side of the drawing object,
The drawing pattern positioning method according to claim 15, wherein the drawing position of the pattern is determined based on the same position of the positioning mark on the front and back drawing surfaces of the drawing object.

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