JP2006283967A - Proportional solenoid valve - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a novel proportional solenoid valve capable of controlling opening of a valve part properly by suppressing change of opening of the valve part due to fluctuation of pressure on a primary side or a secondary side by a simple configuration. <P>SOLUTION: In this valve constituted by arranging a valve mechanism body 30 having a first diaphragm 50 and a second diaphragm 60 integrally and pressurizing the first and second diaphragms 50, 60 in the direction of valve chamber 20 at predetermined pressure by pressurizing means 70, 80, respectively, to control flow rate of fluid circulating in the valve chamber 20, either of the pressurizing means 70, 80 is a spring, the other of them is a driving member operating in proportion to an input signal, and intermediate diameter distances M1, M2 at positions where the maximum diameter of a membrane part L1, L2 and the minimum diameter of the membrane part S1, S2 in respective diaphragm parts in the first and second diaphragms 50, 60 are divided into parts are in a scope of about 0.5 to 2 times diameter 0 of an orifice in the valve chamber. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a proportional solenoid valve that controls a fluid (liquid or gas) in proportion to an input signal from a control unit such as a controller.

  Generally, when controlling a fluid in semiconductor manufacturing or the like, a fluid control device such as a mass flow controller is used. As such a fluid control device, a proportional solenoid valve that controls fluid in proportion to an input signal is known. For example, a working part having a coil to which a voltage or current is passed, a fixed iron core, and a movable iron core. And a valve part that opens and closes the valve seat of the valve chamber, controls the input signal energized to the coil to excite the fixed iron core or the movable iron core, and opens and closes the valve part by moving the movable iron core back and forth. (See, for example, Patent Document 1).

  In such a conventional proportional solenoid valve, when the valve portion is opened and the fluid is circulated, the operating portion that opens and closes the valve portion comes into contact with the fluid, so that a corrosive strong acid or strong alkali fluid or the like There is a problem that it is not suitable for circulating a clogged fluid such as a semiconductor CMP slurry. In order to solve this problem, it is necessary to isolate the working part and the fluid flow path by using a diaphragm so that the fluid does not contact the working part.

By the way, even if a conventional proportional solenoid valve is provided with a single diaphragm, the pressure fluctuation on the primary side (inflow side) or secondary side (outflow side) is adjusted to the suction force of the operating part. The degree control was difficult. In view of this, there is a method of appropriately performing the opening degree control by separately providing a motor or the like and performing position control of the valve portion using the motor when pressure fluctuation on the primary side or the secondary side occurs. However, the opening control of the valve unit by a motor or the like has a complicated control mechanism or a slow response speed of position control when a pressure fluctuation occurs, and the rotary motion of the motor is reciprocated. Since there is a problem such as backlash occurring due to conversion, or shortening the life of the motor due to repeated minute movements at almost the same position, appropriate opening control should be performed with a simpler configuration. Is anxious.
JP 2002-357280 A

  The present invention has been made in view of the above points, and with a simpler structure, the change in the opening degree of the valve part due to the pressure fluctuation on the primary side or the secondary side is suppressed, and the opening degree of the valve part is appropriately adjusted. A novel proportional solenoid valve that can be controlled is provided.

  That is, according to the first aspect of the present invention, in the valve chamber in which the first opening and the second opening for inflow and outflow of the fluid are provided via the valve seat, the valve portion for sealing the valve seat and the first opening side A valve mechanism body integrally including a first diaphragm disposed on the second opening and a second diaphragm disposed on the second opening side is disposed, and the first diaphragm and the second diaphragm are respectively moved toward the valve chamber by a pressurizing unit. In a valve that pressurizes at a predetermined pressure and controls the flow rate of fluid flowing through the valve chamber, one of the pressurizing means of the first and second diaphragms is a spring and the other is proportional to the input signal. And an intermediate diameter at a position obtained by dividing the maximum film part diameter (L1, L2) and the minimum film part diameter (S1, S2) of each diaphragm part in the first and second diaphragms. Away the (M1, M2), according to the proportional solenoid valve, characterized in that it has in the range of about 0.5 to 2 times the orifice diameter of the valve chamber (O).

  According to a second aspect of the present invention, the intermediate diameter distances (M1, M2) of the first and second diaphragms are in the range of about 0.7 to 1.3 times the orifice diameter. Related to proportional solenoid valve.

  The invention according to claim 3 relates to the proportional solenoid valve according to claim 1 or 2, wherein the drive member is a solenoid structure having a movable iron core supported front and back by a leaf spring member.

  According to a fourth aspect of the present invention, the valve mechanism body is configured to be separable between a first diaphragm side and a second diaphragm side having the valve portion, and a suck back mechanism is provided on the second diaphragm. It concerns on the proportional solenoid valve of any one of 1-3.

  According to a fifth aspect of the present invention, an auxiliary diaphragm is disposed at one or both of the first diaphragm or the second diaphragm and each pressurizing means, and between the auxiliary diaphragm and the first or second diaphragm. The proportional solenoid valve according to any one of claims 1 to 4, wherein a fluid discharge portion for discharging the fluid to the outside is formed.

  According to the proportional solenoid valve of the first aspect of the present invention, the valve portion that seals the valve seat in the valve chamber in which the first opening and the second opening for inflow and outflow of the fluid are provided via the valve seat; A valve mechanism body integrally including a first diaphragm disposed on the first opening side and a second diaphragm disposed on the second opening side is disposed, and the first diaphragm and the second diaphragm are pressed by a pressurizing unit. In each of the valves that pressurize at a predetermined pressure in the valve chamber direction and control the flow rate of the fluid flowing through the valve chamber, one of the pressurizing means of the first and second diaphragms is a spring, and the other is A driving member that operates in proportion to an input signal, and an intermediate diameter distance at a position obtained by dividing the maximum film diameter and the minimum film diameter of each diaphragm portion in the first and second diaphragms by two. Room Since it is within the range of about 0.5 to 2 times the orifice diameter, the configuration is very simple, and fluid pressure fluctuation occurs on the first opening side (primary side) or the second opening side (secondary side). Even in this case, the first and second diaphragms are less susceptible to pressure fluctuations, and the change in the opening degree of the valve part due to the pressure fluctuations can be suppressed, so that the opening degree of the valve part can be controlled. It can be done properly.

  According to claim 2, in claim 1, since each intermediate diameter distance of the first and second diaphragms is within a range of about 0.7 to 1.3 times the orifice diameter, the first and second diaphragms The influence of fluid pressure fluctuations on the second diaphragm can be further suppressed.

  According to claim 3, in claim 1 or 2, since the drive member has a solenoid structure having a movable iron core supported front and back by a leaf spring member, the pressurizing means by the drive member is operated smoothly. And pressurization can be performed very effectively.

  According to a fourth aspect of the present invention, in the first to third aspects, the valve mechanism body is configured to be separable between a first diaphragm side and a second diaphragm side having the valve portion, and a suck back mechanism is provided on the second diaphragm. Since the pressure in the valve chamber is reduced, the fluid in the pipe (not shown) connected to the second opening can be pulled back, preventing leakage and fluid flow error. Corrections can be made.

  According to a fifth aspect of the present invention, in any one of the first to fourth aspects, an auxiliary diaphragm is disposed on one or both of the first diaphragm or the second diaphragm and each pressurizing means, and the auxiliary diaphragm and the first diaphragm Alternatively, since a fluid discharge part for discharging the fluid to the outside is formed between the second diaphragm and the second diaphragm, even if the fluid permeates or leaks from the first or second diaphragm, the fluid is pressurized. It is possible to prevent problems such as corrosion of the pressurizing means without contact with the means.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.
1 is a longitudinal sectional view of a proportional solenoid valve according to one embodiment of the present invention in a closed state, FIG. 2 is a longitudinal sectional view of the proportional solenoid valve in an opened state, and FIG. 3 is a diagram showing an intermediate diameter distance of a first diaphragm. FIG. 4 shows the relationship between the fluid pressure acting when the intermediate diameter distance of the second diaphragm is formed larger than the orifice diameter. FIG. 5 is a cross-sectional view of the main part showing the relationship of fluid pressure acting when the intermediate diameter distance of the first diaphragm is made smaller than the orifice diameter, and FIG. 6 is a cross-sectional view of the intermediate diameter of the second diaphragm. FIG. 7 is a cross-sectional view of the main part showing the state of the movable core during normal operation, and FIG. 8 is the state of the movable core during energization. The main part sectional view shown, FIG. 9 is an arbitrary FIG. 10 is a graph showing the relationship between the intermediate diameter distance of the first diaphragm and the pressure fluctuation at a degree, FIG. 10 is a graph showing the relation between the intermediate diameter distance of the second diaphragm and the pressure fluctuation at an arbitrary opening degree, and FIG. 12 is a graph showing the relationship between the input signal of the pressurizing means and the flow rate, FIG. 12 is a circuit diagram of a fluid control device in which a flow meter is disposed on the secondary side of the proportional solenoid valve of the present invention, and FIG. FIG. 14 is a circuit diagram of a fluid control device in which two pressure sensors are arranged on the secondary side of the proportional solenoid valve of the present invention, and FIG. 15 is a proportional solenoid valve of the present invention. FIG. 16 is a longitudinal sectional view of a proportional solenoid valve provided with a suck back mechanism, and FIG. 17 is a suck back mechanism of the proportional solenoid valve of FIG. Longitudinal profile showing the state where the FIG, 18 is a longitudinal sectional view of a proportional solenoid valve auxiliary diaphragm is provided.

  A proportional solenoid valve 10 according to one embodiment of the present invention shown in FIGS. 1 and 2 includes a valve chamber 20, a valve mechanism 30, and pressurizing means 70 and 80. In the figure, reference numeral 11 denotes a body body made of a resin having high corrosion resistance and chemical resistance such as fluororesin, 12 is a frame body, and 13 is an energizing portion.

  The valve chamber 20 is formed in the body main body 11, and a first opening 21 and a second opening 22 for flowing in and out of the fluid are provided through a valve seat 25. Reference numeral 23 denotes an orifice portion, 26 denotes a first opening side valve chamber, 27 denotes a second opening side valve chamber, and 28 denotes a connection flow path between the first opening side valve chamber 26 and the second opening side valve chamber 27. In the embodiment, the first opening 21 is a fluid inflow side (primary side), and the second opening 22 is a fluid outflow side (secondary side).

  The valve mechanism 30 is disposed in the valve chamber 20 and seals the valve seat 25. The first diaphragm 50 disposed on the first opening 21 side and the second diaphragm disposed on the second opening 22 side. 60 integrally. The valve mechanism body 30 of the embodiment is made of a highly corrosion-resistant and chemical-resistant resin such as a fluororesin similarly to the body main body 11, and the first diaphragm 50 and the second diaphragm 60 are integrated with each other via the connecting portion 31. In addition, the valve portion 40 is formed on the first opening side valve chamber 26 side of the connecting portion 31 to open and close the orifice portion 23. In the figure, reference numeral 32 denotes a transmission member that transmits an operation of a pressurizing means 80 described later to the valve mechanism 30, and 45 denotes a bulging portion formed on the second opening side valve chamber 27 side.

  As shown in FIG. 3, the valve portion 40 of the valve mechanism 30 includes a pressure receiving surface 41 for fluid pressure from the first opening 21 side and a pressure receiving surface 42 for fluid pressure from the second opening 22 side. In the valve portion 40 of the embodiment, the pressure receiving surface 41 is a tapered surface on the front side of the valve portion 40 formed inside the orifice portion 23, and the pressure receiving surface 42 is formed inside the orifice portion 23. They are the taper surface and flat surface of the valve part 40 rear side. In the figure, reference numeral 43 denotes a tapered surface outside the orifice portion 23 formed continuously with the pressure receiving surface 41, and 44 denotes a tapered surface behind the valve portion 40 formed outside the orifice portion 23.

  As shown in FIG. 4, the bulging portion 45 of the valve mechanism 30 includes a pressure receiving surface 46 for fluid pressure from the second opening 22 side and a pressure receiving surface 47 for fluid pressure from the first opening 21 side. Have. In the bulging portion 45 of the embodiment, the pressure receiving surface 46 is a tapered surface on the rear side of the bulging portion 45 formed inside the orifice portion 23, and the pressure receiving surface 47 is located inside the orifice portion 23. These are a tapered surface and a flat surface on the front side of the formed bulging portion 45. In the figure, reference numeral 48 denotes a tapered surface outside the orifice portion 23 formed continuously with the pressure receiving surface 46, and 49 denotes a tapered surface on the front side of the bulging portion 45 formed outside the orifice portion 23.

  As shown in FIGS. 3 and 5, the first diaphragm 50 is integrally formed on the first opening 21 side of the connecting portion 31, and has a thin film portion (movable portion) 51 that is a diaphragm surface, and the body main body 11. It has the outer peripheral part 52 fixed. In the first diaphragm 50, the fluid pressure P <b> 1 from the first opening 21 acting on the pressure receiving surface 51 a of the membrane portion 51 is from the first opening 21 side acting on the pressure receiving surface 41 of the valve portion 40. The intermediate diameter distance M1 at a position where the maximum diameter L1 and the minimum diameter S1 of the film portion 51 are divided into two is approximately 0.5 to 2 times the orifice diameter O so that the fluid pressure P2 is almost offset. More preferably, as defined in the invention of claim 2, the intermediate diameter distance M1 is set within a range of about 0.7 to 1.3 times the orifice diameter O.

  The intermediate diameter distance M1 at the position where the maximum diameter L1 and the minimum diameter S1 of the membrane portion 51 of the first diaphragm 50 are divided into two is the fluid pressure from the first opening 21 side with respect to the pressure receiving surface 51a of the membrane portion 51. This can be considered as the effective pressure receiving diameter of the membrane portion 51 of the so-called first diaphragm 50 when P1 acts. Further, in the valve portion 40, when fluid pressure is received from the first opening 21 side, the fluid pressures P3 and P4 acting on the tapered surface 43 and the flat surface 44 outside the orifice portion 23 are canceled out. The fluid pressure P2 from the opening 21 side can be considered as acting on the pressure receiving surface 41 of the valve portion 40.

  Therefore, as shown in FIG. 3, when the intermediate diameter distance M1 of the membrane portion 51 of the first diaphragm 50 is formed within a range of 1 to 2 times the orifice diameter O, the fluid pressures P1 and P2 are substantially canceled. be able to. When the intermediate diameter distance M1 is formed to be larger than twice the orifice diameter O, the fluid pressure P1 acting on the film portion 51 of the first diaphragm 50 becomes too large and is not offset by the fluid pressure P2. That is, as shown in the graph of FIG. 9, when the intermediate diameter distance M1 of the membrane portion 51 is formed to be larger than twice the orifice diameter O (reference A2), the force due to the pressure fluctuation of the fluid on the first opening 21 side is increased. If the intermediate diameter distance M1 of the membrane part 51 is formed to be 1 to 2 times the orifice diameter O (reference numeral A1), it is difficult to properly control the opening degree by acting greatly in the valve opening direction. Even when the pressure fluctuation of the 21 side fluid is large, the force acting in the valve opening direction can be made extremely small, and the influence of the pressure fluctuation can be suppressed. In addition, the code | symbol C in a figure represents the range in which appropriate opening degree control is possible with respect to the force by the pressure fluctuation of a fluid.

  Further, as shown in FIG. 5, even when the intermediate diameter distance M1 of the membrane portion 51 of the first diaphragm 50 is formed within the range of 0.5 to 1 times the orifice diameter O, the fluid pressure P1, When the intermediate diameter distance M1 is smaller than 0.5 times the orifice diameter O, the fluid pressure P1 acting on the membrane portion 51 of the first diaphragm 50 becomes small. Too much is not offset by the fluid pressure P2. That is, as shown in the graph of FIG. 9, when the intermediate diameter distance M1 of the membrane portion 51 is formed to be smaller than 0.5 times the orifice diameter O (symbol B2), it is caused by the pressure fluctuation of the fluid on the first opening 21 side. If the force acts greatly in the valve closing direction and appropriate opening degree control becomes difficult, if the intermediate diameter distance M1 of the membrane part 51 is formed 0.5 to 1 times the orifice diameter O (reference numeral B1). Even if the pressure fluctuation of the first opening 21 side fluid is large, the force acting in the valve closing direction can be made extremely small, and the influence of the pressure fluctuation can be suppressed.

  On the other hand, as shown in FIGS. 4 and 6, the second diaphragm 60 is integrally formed on the second opening 22 side of the connecting portion 31 and has a thin film portion (movable portion) 61 as a diaphragm surface, and a body main body. 11 has an outer periphery 62 fixed to the outer periphery. In the second diaphragm 60, the fluid pressure P5 from the second opening 22 side acting on the pressure receiving surface 61a of the membrane part 61 acts on the pressure receiving surface 46 of the bulging part 45. The intermediate diameter distance M2 at the position where the maximum diameter L2 and the minimum diameter S2 of the film portion 61 are divided into two is approximately 0.5 to 2 times the orifice diameter O so that the fluid pressure P6 from More preferably, the intermediate diameter distance M2 is set within a range of about 0.7 to 1.3 times the orifice diameter O, as defined in the invention of claim 2.

  The intermediate diameter distance M2 at the position where the maximum diameter L2 and the minimum diameter S2 of the membrane portion 61 of the second diaphragm 60 are divided into two is the fluid pressure from the second opening 22 side with respect to the pressure receiving surface 61a of the membrane portion 61. It can be considered as the effective pressure receiving diameter of the film portion 61 of the so-called second diaphragm 60 when P5 acts. Further, in the bulging portion 45, when fluid pressure is received from the second opening 22 side, the fluid pressures P7 and P8 acting on the tapered surfaces 48 and 49 outside the orifice portion 23 are canceled out. The fluid pressure P6 from the 22 side can be considered as acting on the pressure receiving surface 46 of the bulging portion 45. The fluid pressure P10 acting on the pressure receiving surface 47 of the bulging portion 45 is offset by the fluid pressure P9 acting on the pressure receiving surface 42 of the valve portion 40.

  Therefore, as shown in FIG. 4, when the intermediate diameter distance M2 of the membrane portion 61 of the second diaphragm 60 is formed within the range of 1 to 2 times the orifice diameter O, the fluid pressures P5 and P6 are substantially canceled. be able to. When the intermediate diameter distance M2 is formed to be larger than twice the orifice diameter O, the fluid pressure P5 acting on the film portion 61 of the second diaphragm 60 becomes too large to be canceled by the fluid pressure P6. That is, as shown in the graph of FIG. 10, when the intermediate diameter distance M2 of the membrane part 61 is formed to be larger than twice the orifice diameter O (reference numeral D2), the force due to the pressure fluctuation of the fluid on the second opening 22 side is increased. When the intermediate diameter distance M2 of the membrane portion 61 is formed to be 1 to 2 times the orifice diameter O (reference numeral D1), it is difficult to properly control the opening degree by acting greatly in the valve closing direction. Even when the pressure fluctuation of the 22 side fluid is large, the force acting in the valve closing direction can be made extremely small, and the influence of the pressure fluctuation can be suppressed.

  Further, as shown in FIG. 6, even when the intermediate diameter distance M2 of the membrane portion 61 of the second diaphragm 60 is formed within the range of 0.5 to 1 times the orifice diameter O, the fluid pressure P5 When the intermediate diameter distance M2 is formed to be smaller than 0.5 times the orifice diameter O, the fluid pressure P5 acting on the membrane portion 61 of the second diaphragm 60 becomes small. Too much is not offset by the fluid pressure P6. That is, as shown in the graph of FIG. 10, when the intermediate diameter distance M2 of the membrane portion 61 is formed to be smaller than 0.5 times the orifice diameter O (symbol E2), it depends on the pressure variation of the fluid on the second opening 22 side. If the force acts greatly in the valve opening direction and appropriate opening degree control becomes difficult, if the intermediate diameter distance M2 of the membrane portion 61 is 0.5 to 1 times the orifice diameter O (reference numeral E1) Even when the pressure fluctuation of the fluid on the second opening 22 side is large, the force acting in the valve opening direction can be made extremely small, and the influence of the pressure fluctuation can be suppressed.

  The pressurizing means 70 and 80 are configured to pressurize the first diaphragm 50 and the second diaphragm 60 in the direction of the valve chamber 20 with a predetermined pressure, respectively, and control the flow rate of the fluid flowing through the valve chamber 20. In the embodiment, the pressing means 70 on the first opening 21 side is a spring, and the pressing means 80 on the second opening 22 side is a driving member.

  The pressurizing means 70 using a spring constantly biases and holds the first diaphragm 50 toward the valve chamber 20 with a constant spring load. Reference numeral 71 in the drawing is a spring holder for the pressurizing means 70 by a spring, and 72 is a spring holder into which the end of the valve mechanism 30 on the first opening 21 side is fitted.

  The pressurizing means 80 by the drive member operates in proportion to an input signal from a control unit (not shown) such as a controller separately connected to the energization unit 13, thereby causing the valve mechanism 30 to pass through the transmission member 32. The valve unit 40 is configured to open and close by being advanced and retracted. As the drive member, as shown in the figure and defined as the invention of claim 3, it is preferably recommended that the drive member has a solenoid structure having a movable iron core 85 supported front and rear by plate spring members 83 and 84. In the figure, reference numeral 81 denotes a cylindrical member for fixing the leaf spring members 83 and 84, 82 denotes an inner wall thereof, 86 denotes a fixed iron core, 87 denotes a coil, and 88 denotes an auxiliary iron core.

  In the embodiment, the movable iron core 85 is composed of a substantially cylindrical iron core whose both end faces are formed in a circular arc shape, and is formed at substantially the center of each of the both end faces as shown in FIGS. By engaging the engaging protrusions 85a and 85b with the engaging holes 83a and 84a of the leaf spring members 83 and 84, the engaging protrusions 85a and 85b are supported at a substantially central position without contacting the inner wall 82 of the cylindrical member 81. Configured as follows.

  In normal operation (when no power is supplied), as shown in FIGS. 1 and 7, the movable iron core 85 is urged and held behind the drive member by the leaf spring members 83 and 84, so that the valve mechanism 30 has the spring. Due to the urging force of the pressurizing means 70, the reverse state (valve closed state) is established. On the other hand, at the time of energization, as shown in FIGS. 2 and 8, the movable iron core 85 moves forward against the urging force of the leaf spring members 83 and 84 by electromagnetic induction of the coil 87. At this time, since the movable iron core 85 is supported at a substantially central position by the leaf spring members 83 and 84 as described above, the movable iron core 85 operates without contacting the inner wall 82.

  Therefore, the operation of the movable iron core 85 will be described with reference to the graph of FIG. 11. For example, when the movable iron core 85 slides in contact with the inner wall 82, the inner wall is moved forward and backward according to a predetermined input signal. On the other hand, the movable iron core 85 is supported by the leaf spring members 83 and 84 at a substantially central position while the operation becomes unstable such as abruptly acting due to friction with the 82 (reference F2). Since it operates without contacting the inner wall 82, it can be smoothly advanced and retracted according to a predetermined input signal (reference F1). Thus, pressurization can be performed very effectively by using the solenoid structure as the driving member.

  In the proportional solenoid valve 10 configured as described above, an intermediate diameter at a position obtained by dividing the maximum diameters L1 and L2 and the minimum diameters S1 and S2 of the first and second diaphragms 50 and 60 into two. By setting the distances M1 and M2 within the range of about 0.5 to 2 times the orifice diameter O of the valve chamber 20, the influence of the respective fluid pressures on the first and second diaphragms 50 and 60 is suppressed. It becomes possible. Therefore, even if the fluid pressure fluctuation occurs on the first opening side (primary side) or the second opening side (secondary side), the first and second diaphragms 50 and 60 are affected by the pressure fluctuation. The change in the opening degree of the valve unit 40 due to the pressure fluctuation can be suppressed, and the opening degree of the valve unit 40 can be appropriately controlled with a simple configuration.

  Next, a fluid control device using the proportional solenoid valve 10 of the present invention will be described with reference to FIGS. 12 to 15, the same reference numerals represent the same configuration.

  The fluid control device 100 of FIG. 12 arranges a flow meter 101 on the secondary side (second opening 22 side) of the proportional solenoid valve 10, receives a signal from the flow meter 101, and calculates the predetermined value of the valve unit 40. And a controller 102 for transmitting a signal for maintaining the opening degree to the proportional solenoid valve 10. In the figure, reference numeral 103 is a fluid supply section, 104 is a fluid supply flow path, 105 is a chemical tank, and 106 is an on-off valve.

  In the fluid control apparatus 100, based on the actual flow rate detected by the flow meter 101, the controller 102 performs an operation so that the opening degree of the valve unit 40 at a predetermined flow rate is maintained. A corresponding control signal (current in this case) is energized to the coil 37 of the proportional solenoid valve 10 to control the flow rate of the fluid supplied to the chemical tank 105.

  The fluid control device 110 of FIG. 13 connects a plurality (here, three) of fluid control devices 100a, 100b, and 100c configured in the same manner as the fluid control device 100 via the mixing channel 111, Configured to mix fluids. In the fluid control device 110, flow control is performed so that the flow rates of the fluid control devices 100a, 100b, and 100c have a predetermined mixing ratio.

  In the fluid control device 120 of FIG. 14, two pressure sensors 122 and 123 are arranged on the secondary side (second opening 22 side) of the proportional solenoid valve 10 via a throttle 121. In the fluid control device 120, the respective pressures detected by the pressure sensors 122 and 123 are transmitted to the controller 102, and the flow rate on the secondary side of the proportional solenoid valve 10 is calculated from the differential pressure between the pressures. Based on the flow rate, the flow rate of the fluid supplied to the chemical tank 105 is controlled.

  The fluid control device 130 of FIG. 15 has a pressure sensor 122 arranged on the secondary side (second opening 22 side) of the proportional solenoid valve 10. In the fluid control device 130, based on the pressure detected by the pressure sensor 122, calculation is performed by the controller 102 so that the opening degree of the valve unit 40 at a predetermined flow rate is maintained, and according to the calculation result. The flow rate of the fluid supplied to the chemical tank 105 is controlled.

  The proportional solenoid valve of the present invention is not limited to the configuration described in the above embodiment, and can be implemented with various modifications without departing from the spirit of the invention. For example, in the embodiment, the bulging portion 45 is formed on the second opening side valve chamber 27 side of the valve mechanism 30, but the bulging portion 45 may not be formed on the valve mechanism 30. In this case, the fluid pressure P5 acting on the membrane portion 61 of the second diaphragm 60 is canceled by the fluid pressure P9 acting on the pressure receiving surface 42 of the valve portion 40.

  Further, like the proportional electromagnetic valve 10A shown in FIGS. 16 and 17, the valve mechanism 30A is configured to be separable between the first diaphragm 50 side having the valve portion 40 and the second diaphragm 60 side, and the second diaphragm The suck back mechanism 35 may be provided at 60. In the following embodiment, the same reference numerals as those in the embodiment shown in FIGS. 1 and 2 represent the same configuration, and the description thereof is omitted.

  In the valve mechanism 30A of this embodiment, as is well understood from the illustration, the first mechanism 33 having the valve portion 40 and the first diaphragm 50 and the second mechanism 34 having the second diaphragm 60 are provided. Are loosely coupled so as to be separable. A suck back mechanism 35 is formed integrally with the second diaphragm 60 on the pressure mechanism 80 side of the second mechanism 34.

  The suck back mechanism 35 includes a spring member 36 that urges the second diaphragm 60 in a direction opposite to the valve chamber 20 direction via a spring holder 37 attached to the second diaphragm 60. In the suck back mechanism 35, the spring holder 37 also serves as a transmission member that transmits the operation of the pressurizing means 80 to the valve mechanism 30A.

  By having the suck-back mechanism 35 as described above, the biasing force of the spring member 36 is applied to the pressurizing unit 80 when the pressure applied by the pressurizing unit 80 by the driving member is lowered to a predetermined value or less and the valve is closed. As a result, the second mechanism 34 is separated from the first mechanism 33 and retracted in the direction opposite to the valve chamber 20 direction, and the volume in the second opening side valve chamber 27 is increased. As a result, the pressure in the valve chamber 20 (second opening side valve chamber 27) decreases, and the fluid in a pipe (not shown) connected to the second opening 22 as appropriate can be drawn back. And correction of fluid flow error can be performed.

  Further, as in the proportional solenoid valve 10B shown in FIG. 18, an auxiliary diaphragm 90 is disposed between the second diaphragm 60 and the pressurizing means 80, and a fluid is supplied between the auxiliary diaphragm 90 and the second diaphragm 60. You may form the fluid discharge part 95 for discharging | emitting outside. Reference numeral 30B in the figure denotes a valve mechanism.

  The auxiliary diaphragm 90 is configured to prevent the fluid flowing through the valve chamber 20 from coming into contact with the pressurizing means 80 when the fluid passes through or leaks from the second diaphragm 60. The permeated or leaked fluid is discharged out of the proportional solenoid valve 10B from a fluid discharge portion 95 formed between the auxiliary diaphragm 90 and the second diaphragm 60. Thereby, even when the fluid permeates or leaks from the second diaphragm 60, the fluid does not come into contact with the pressurizing means 80, and problems such as corrosion of the pressurizing means 80 can be prevented. .

  In the proportional solenoid valve 10B, the auxiliary diaphragm 90 and the fluid discharge part 95 are provided on the second diaphragm 60 side. However, the present invention is not limited to this, and the first diaphragm 50, the pressurizing means 70, and the like. An auxiliary diaphragm and a fluid discharge portion may be formed between the first diaphragm 50 and the pressurizing means 70 and between the second diaphragm 60 and the pressurizing means 80. A part may be formed.

  The proportional solenoid valves 10A and 10B can be suitably used for the fluid control devices 100, 110, 120, and 130 as in the case of the proportional solenoid valve 10.

It is a longitudinal cross-sectional view of the valve closing state of the proportional solenoid valve according to one embodiment of the present invention. It is a longitudinal cross-sectional view of the valve opening state of the proportional solenoid valve. It is principal part sectional drawing which showed the relationship of the fluid pressure which acts when the intermediate diameter distance of a 1st diaphragm is formed larger than an orifice diameter. It is principal part sectional drawing which showed the relationship of the fluid pressure which acts when the intermediate diameter distance of a 2nd diaphragm is formed larger than an orifice diameter. It is principal part sectional drawing which showed the relationship of the fluid pressure which acts when the intermediate diameter distance of a 1st diaphragm is formed smaller than an orifice diameter. It is principal part sectional drawing which showed the relationship of the fluid pressure which acts when the intermediate diameter distance of a 2nd diaphragm was formed smaller than an orifice diameter. It is principal part sectional drawing showing the state of the movable iron core at the normal time. It is principal part sectional drawing showing the state of the movable iron core at the time of electricity supply. It is a graph showing the relationship between the intermediate diameter distance of the 1st diaphragm in arbitrary opening, and a pressure fluctuation. It is a graph showing the relationship between the intermediate diameter distance of the 2nd diaphragm in arbitrary opening, and a pressure fluctuation. It is the graph showing the relationship between the input signal of the pressurization means by a drive member, and flow volume. It is a circuit diagram of the fluid control apparatus which has arrange | positioned the flowmeter in the secondary side of the proportional solenoid valve of this invention. FIG. 10 is a circuit diagram of a fluid control device in which a plurality of fluid control devices in FIG. 9 are connected. It is a circuit diagram of the fluid control apparatus which has arrange | positioned two pressure sensors in the secondary side of the proportional solenoid valve of this invention. It is a circuit diagram of the fluid control apparatus which has arrange | positioned one pressure sensor to the secondary side of the proportional solenoid valve of this invention. It is a longitudinal cross-sectional view of the proportional solenoid valve provided with the suck back mechanism. It is the longitudinal cross-sectional view showing the state which the suck back mechanism of the proportional solenoid valve of FIG. 16 act | operated. It is a longitudinal cross-sectional view of the proportional solenoid valve provided with the auxiliary diaphragm.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Proportional solenoid valve 11 Body main body 12 Frame 13 Current supply part 20 Valve chamber 21 1st opening 22 2nd opening 23 Orifice part 25 Valve seat 26 1st opening side valve chamber 27 2nd opening side valve chamber 28 Connection flow path 30 Valve Mechanism 31 Connecting portion 32 Transmission member 40 Valve portion 45 Swelling portion 50 First diaphragm 51 First diaphragm membrane portion 52 First diaphragm outer periphery portion 60 Second diaphragm 61 Second diaphragm membrane portion 62 Second diaphragm outer periphery portion Part 70 Pressurizing means by spring 80 Pressurizing means by driving member 81 Cylindrical member 82 Inner wall 83 of cylindrical member 83, 84 Leaf spring member 85 Movable iron core 86 Fixed iron core 87 Coil 88 Annular auxiliary member L1, L2 Maximum diameter of membrane part M1 , M2 Intermediate diameter distance O Orifice diameter S1, S2 Membrane minimum diameter

Claims (5)

A valve chamber in which a first opening and a second opening for inflow and outflow of fluid are provided via a valve seat, a valve portion for sealing the valve seat, a first diaphragm disposed on the first opening side, and the A valve mechanism body integrally including a second diaphragm disposed on the second opening side is disposed, and the first diaphragm and the second diaphragm are respectively pressurized with a predetermined pressure in a valve chamber direction by a pressurizing unit, and the valve chamber is In a valve designed to control the flow rate of fluid flowing through
One of the pressurizing means of the first and second diaphragms is a spring, and the other is a drive member that operates in proportion to an input signal.
An intermediate diameter distance (M1, M2) at a position obtained by dividing the maximum film part diameter (L1, L2) and the minimum film part diameter (S1, S2) of each diaphragm part in the first and second diaphragms, A proportional solenoid valve characterized by being within a range of about 0.5 to 2 times the orifice diameter (O) of the valve chamber.   The proportional solenoid valve according to claim 1, wherein each intermediate diameter distance (M1, M2) of the first and second diaphragms is within a range of about 0.7 to 1.3 times the orifice diameter.   The proportional solenoid valve according to claim 1 or 2, wherein the drive member has a solenoid structure having a movable iron core supported front and rear by a leaf spring member.   The said valve mechanism body is comprised so that isolation | separation is possible in the 1st diaphragm side and the 2nd diaphragm side which have the said valve part, The suck back mechanism is provided in the said 2nd diaphragm. The proportional solenoid valve described in the section.   An auxiliary diaphragm is disposed between one or both of the first diaphragm or the second diaphragm and each pressurizing means, and fluid is discharged to the outside between the auxiliary diaphragm and the first or second diaphragm. The proportional solenoid valve according to any one of claims 1 to 4, wherein a fluid discharge part is formed.

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