JP2006281008A - Micro-mixer - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a micro-mixer which has a heat-exchanging mechanism and can achieve efficient mixing and dispersion of two or more fluids. <P>SOLUTION: The first plate has a fluid passage for a fluid (A) and a micro-hole for a fluid (B), a mixed fluid passage for the mixed solution of the fluids (A) and (B) and a heat-exchanging medium passage for a heat-exchanging medium (b) for heat exchanging of the fluid (B). The second plate has a fluid passage for the fluid (B), a heat-exchanging medium passage for a heat-exchanging medium (a) for heat exchanging of the fluid (A) and a heat-exchanging medium passage for a heat-exchanging medium (x) for heat exchanging of the mixed fluid. The first and second plates are arranged so that the positions of fluid passage for the fluid (A) and the heat-exchanging medium passage for the heat-exchanging medium (a), the positions of the fluid passage for the fluid (B) and the heat-exchanging medium passage for the heat-exchanging medium (b) and the positions of the mixed fluid passage and the heat-exchanging medium passage for the heat-exchanging medium (x) correspond to one another in the vertical direction. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a micromixer, and more specifically, a heat exchange mechanism that heats or cools two or more kinds of fluids in a micromixer, mixes them after adjusting to a predetermined temperature, and further heats or cools the mixed fluid. The present invention relates to a micromixer having

  Various stationary mixers have been proposed for the purpose of mixing liquid or gas components to carry out chemical reactions and emulsifying and dispersing aqueous and oily substances. Among them, two or more components to be mixed were processed by micromachining technology. A micromixer having a structure to be introduced into a microchannel attracts attention as an efficient mixing and dispersion stationary mixer (see, for example, Patent Document 1).

  Such a micromixer has a mechanism in which a liquid or gaseous substance to be mixed or dispersed is divided into minute fluid elements in a microchannel having a channel width of about 0.01 mm to 3 mm, and then mixed and dispersed. Therefore, since efficient mixing and dispersion can be achieved in a short time compared with the conventional static mixer, application to a wide range of chemical processes is being studied. Examples thereof include a micromixer (Patent Document 2) for performing a chemical reaction, a microreactor (Patent Document 3) for producing fine particles, and a microemulsifier (Patent Document 4).

  However, since these micromixers are mainly premised on mixing at the same temperature, by heating or cooling the entire micromixer, it is not possible to set two or more types of fluids to be mixed at the same temperature. Any temperature that is possible, but is virtually impossible to perform mixing at different temperatures and that may differ from the temperature of each fluid before mixing by heating or cooling the fluid after mixing. It could not be adjusted.

  Even if the two components to be mixed or dispersed before being introduced into the micromixer are adjusted to different predetermined temperatures in advance, heat is transferred within the micromixer and is introduced into the micromixer when the two components merge. The previous temperature may not be maintained. This is because the heat transfer area is large because the micromixer is composed of microchannels, and the components to be mixed or dispersed easily exchange heat.

  Similarly, when the fluid after mixing also generates heat due to mixing, for example, when two types of fluids to be mixed react, the temperature may rise due to reaction heat generated by the reaction after mixing, and the temperature is within a predetermined range. In some cases, the temperature could not be adjusted. When the temperature rises due to mixing or reaction after mixing, and the fluid before mixing that was originally liquid is vaporized due to boiling, or the reaction product generated by the reaction is a thermally unstable substance that easily decomposes above a certain temperature However, even a micromixer that can perform mixing efficiently cannot be used.

  Therefore, based on the circumstances as described above, fluid components having different temperatures are mixed using a micromixer while maintaining the respective temperatures until just before merging, and the fluid after mixing may further differ from that before mixing. It was virtually impossible to adjust to.

As described above, the conventional micromixer cannot cope with mixing of components having different temperatures and temperature adjustment after mixing, for example, a poor solvent that maintains a high temperature solution containing a solid content that dissolves only at a relatively high temperature at a low temperature. In order to suppress the temperature rise due to the heat of mixing due to mixing rapidly, the crystallization process to obtain fine fine particles that require rapid cooling of the mixed solution, and the reaction by mixing, there is a component that is unstable to heat. In some cases, it cannot be applied to an exothermic reaction process or the like that requires rapid cooling of the mixed solution.
JP-T 09-506034 (FIGS. 1 to 3) Japanese National Patent Publication No. 11-514573 (FIGS. 1 to 6) JP2003-164745A (FIGS. 1 to 3) JP 2002-346352 A (FIGS. 1 to 5)

  The problem to be solved by the present invention is to achieve efficient mixing of two or more fluids, each of which may have a different temperature, and to adjust the temperature of the mixed fluid. The present invention provides a micromixer with a heat exchange mechanism that can be applied to various processes that require independent temperature control of the fluid later.

  As a result of intensive studies to solve the above-mentioned problems, the present inventors have a flow path through which the first fluid flows out of two or more kinds of fluids to be mixed, and a micropore in the flow path. And a first plate having a flow path for passing a heat exchange medium for heating or cooling a fluid other than the first fluid among the fluids to be mixed, and the first fluid among the fluids to be mixed A flow path for flowing a fluid other than the above, a flow path for flowing a heat exchange medium for heating or cooling the first fluid, and a heat exchange for heating or cooling the mixed fluid A flow path for allowing the medium to flow is provided, and a second plate having the same shape as the first plate in plan view is combined into one set, and the set of plates is laminated in at least one stage. 2 or more fluids to be mixed It is found that the temperature of the fluid after mixing can be independently adjusted to a temperature that can be different, and the temperature of the fluid after mixing can be independently adjusted to a temperature that can be different from the temperature of each fluid before mixing. Thus, the present invention has been completed.

That is, the present invention is a micromixer having a structure in which two types of plates having the same shape in plan view are taken as a set, and the set of plates is laminated.
(1) The first plate of the set of plates is a fluid channel that allows the first fluid (A) to flow among the fluids to be mixed, and a fluid other than the first fluid in the fluid channel. (B) having a micropore through which the fluid flows, and having a mixed fluid flow path for allowing a mixed liquid of the first fluid (A) and a fluid (B) other than the first fluid to flow; and A heat exchange medium flow path through which the heat exchange medium (b) for exchanging heat of the fluid (B) other than the first fluid flows,
(2) The other second plate of the set of plates includes a fluid flow path through which a fluid (B) other than the first fluid among the fluids to be mixed flows, and the first fluid (A ) Has a heat exchange medium flow path through which the heat exchange medium (a) flows and a heat exchange medium flow path through which the heat exchange medium (x) flows through the mixed fluid. And
(3) The first plate and the second plate allow the heat exchange medium (a) to exchange heat between the fluid flow path of the first fluid (A) and the first fluid. The position of the heat exchange medium flow path, the fluid flow path through which the fluid (B) other than the first fluid flows and the heat exchange medium (b) for exchanging heat between the fluid other than the first fluid The position of the heat exchange medium flow path through which the heat exchange medium flows and the position of the heat exchange medium flow path through which the heat exchange medium (x) for heat exchange between the mixed fluid flow path and the mixed fluid is respectively Fluids (B) other than the first fluid through the micro holes formed in the fluid flow paths of the first fluid (A) at positions correspondingly arranged in the vertical direction Is provided so as to merge with the first fluid (A).

  The micromixer of the present invention can achieve non-isothermal mixing controlled at different temperatures and independent temperature control after mixing, which is difficult with conventional micromixers, for example, solids that dissolve only at relatively high temperatures. A crystallization process for rapidly mixing a high-temperature solution containing components with a poor solvent maintained at a low temperature, and obtaining fine particles that require rapid cooling of the mixed solution in order to suppress a temperature rise due to mixing heat accompanying the mixing; Since a heat-unstable component is generated by the reaction due to mixing, it is easy to construct an exothermic reaction process or the like that requires rapid cooling of the mixed solution.

  Hereinafter, with respect to a micromixer with a heat exchange mechanism that is an embodiment of the present invention with reference to the drawings, particularly when the fluids to be mixed are two types of a first fluid (A) and a second fluid (B) Will be described as an example.

  FIG. 1 shows a fluid flow path through which a first fluid (A) flows, a micropore through which a second fluid (B) flows, a first fluid (A), and a second fluid (B). And a heat exchange medium flow path for allowing the heat exchange medium (b) for heating or cooling the second fluid (B) to flow. FIG. 2 is a plan view, and FIG. 2 is a perspective view of the first plate.

  FIG. 3 shows a fluid flow path through which the second fluid (B) flows, and a heat exchange medium flow path through which the heat exchange medium (a) for heating or cooling the first fluid (A) flows. FIG. 4 is a plan view of a second plate having a heat exchange medium flow path through which a heat exchange medium (x) for heating or cooling the mixed liquid flows, and FIG. 4 is a perspective view of the second plate.

  FIG. 5 is a perspective view schematically showing a state in which the first plate and the second plate are laminated to form one set, and FIG. 6 is a diagram in which the first plate and the second plate are laminated into two sets. It is a perspective view which shows a state typically.

  FIG. 7 is a perspective view showing a state in which the first plate and the second plate are stacked to form two sets, and the upper cover plate and the lower cover plate are further stacked, and FIG. 8 is a micro view in which a connector portion is further provided. It is a perspective view which shows the external appearance of a mixer.

  FIG. 9 is a plan view of a first plate showing another embodiment, and FIG. 10 is a plan view of a second plate paired with the first plate shown in FIG.

  FIG. 11 is a plan view of a first plate showing another embodiment, and FIG. 12 is a plan view of a second plate paired with the first plate shown in FIG.

  As shown in FIG. 1, a plurality of fluid flow paths 2 through which the first fluid (A) flows are formed in the first plate 1 so as to be divided by a plurality of shielding walls 3. Moreover, in the fluid flow path 2, the micro hole 4 is provided in the middle of the flow direction of the 1st fluid (A), and flows the 2nd fluid (B) supplied from the 2nd plate mentioned later. Are arranged as follows. Then, the first fluid (A) to be passed through the fluid flow path 2 and the second fluid (B) to be passed through the micro hole 4 are mixed, and the mixed liquid (AB) is mixed with the plurality of shielding walls 5. , And flows through the plurality of mixed fluid flow paths 6 and is discharged from the mixed fluid outlet 7.

  Further, the heat exchange medium flow path 8 for allowing the heat exchange medium (b) for heating or cooling the second fluid (B) to flow through the first plate 1 is divided by the shielding wall 9. A plurality of lines are formed.

  Here, the shielding wall 10 is formed at a predetermined interval so as to reduce the thermal influence of the heat exchange medium (b) on the first fluid (A).

  The material of the first plate and the second plate to be described later is not particularly limited. However, when a fluid channel, a medium channel, a micro hole, or the like is formed, it can be easily processed by end milling, etching, electric discharge machining, or the like. Therefore, a metal such as stainless steel is preferable.

  When the micromixer of the present invention is used for a heat exchanger, from the viewpoint of heat exchange efficiency and mixing efficiency, the fluid channel 2, the mixed fluid channel 6, and the heat exchange medium channel 8 have a width of 0.01 mm. It is preferable that the flow path is in the range of ˜20 mm, and the flow path depth is in the range of 0.005 mm to 3 mm. In particular, the flow path width is 0.02 mm to 10 mm, and the flow path depth is 0.01 mm to 1 mm. It is preferable that

  Further, from the viewpoint of heat exchange efficiency, mixing efficiency, etc., the width of each shielding wall 3, 5, 9 is preferably approximately equal to approximately ½ of the width of the fluid flow path 2, etc. Is preferably approximately the same as or approximately twice the width of the fluid flow path 2 or the like (see FIGS. 1 to 4).

  Of course, the shielding wall does not have to have a rectangular parallelepiped shape as shown in the figure, and for example, a projection having a cylindrical shape may be arranged. In this case, the distance between the cylinders may be in the range of 0.01 mm to 20 mm. In short, each fluid, each heat exchange medium, etc. can be made to flow, and if it has a structure that facilitates heat exchange, it can be formed as appropriate in consideration of ease of processing.

  The micro hole 4 formed in the fluid flow path 2 of the first plate 1 is a hole penetrating the first plate 1, and the cross-sectional shape may be rectangular or circular, but is easy to process. Is preferably circular, and the hole diameter is in the range of 0.01 mm to 1 mm, preferably 0.02 mm to 0.5 mm.

  The number of micro holes 4 is not particularly limited, but may be determined in consideration of the flow rate of the second fluid (B), the flow rate ratio when mixing, and the like. Further, the arrangement of the micropores 4 is not particularly limited, and may be arranged in one line in a straight line as shown in FIG. 1, may be arranged in several lines on a plane, or may be arranged irregularly. May be.

  As shown in FIG. 1, the mixed fluid outlet 7 of the first plate is narrowed as the mixed fluid (AB) after the mixing of the first fluid (A) and the second fluid (B) proceeds in the flow direction. It is preferable to have a so-called contracted flow structure. This is because, even when the mixing fluid is high, such as when the mixing through the micropores 4 is not sufficient, the fluid joined as the microfluidic element further shrinks along the flow direction. This is because the mixing time is shortened, so that more efficient mixing can be performed.

  FIG. 3 is a plan view showing the second plate 11, and the outer shape thereof is the same as that of the first plate 1. The second plate 11 is provided with a fluid flow path 12 through which the second fluid (B) flows, and is divided by a plurality of shielding walls 13. A fluid channel 121 extending from the fluid channel 12 is formed so that the second fluid (B) can flow through the micro holes 4 provided in the first plate 1.

  Further, the heat exchange medium flow path 14 through which the second plate 11 passes the heat exchange medium (a) for heating or cooling the first fluid (A) is divided by the plurality of shielding walls 15. A plurality of lines are formed.

  Further, the heat exchange medium flow path 16 for flowing the heat exchange medium (x) for cooling or heating the mixed fluid (AB) in the first plate 1 is divided by the plurality of shielding walls 17. A plurality of lines are formed.

  Here, in order that the heat exchange medium (b) for the second fluid (B) and the heat exchange medium (x) for the mixed fluid (AB) do not affect each other thermally, the second plate 11 includes A shielding wall 18 and a shielding wall 19 having a predetermined width are provided.

  Further, the dimensions of the fluid flow path, each heat exchange medium flow path, and each shielding wall in the second plate 11 are the same as those in the first plate 1 described above.

  When the first plate 1 and the second plate 11 having the same outer shape are overlapped in the vertical direction, a part of the fluid flow path 121 of the second plate 11 and the fluid flow of the first plate 1 are viewed from the upper surface of the plate. Since the micro hole 4 formed as a through hole in the middle of the path 2 overlaps, the fluid (B) passes through the micro hole 4 from the fluid flow path 121 and passes through the fluid (A) in the middle of the fluid flow path 2. Come to join. In addition, as described above, since the micropore 4 has a very small pore diameter in the range of 0.01 mm to 1 mm, mixing of the fluid (A) and the fluid (B) can be rapidly advanced.

  As shown in FIG. 5, a heat exchange medium flow path 14 in the second plate 11 is located at a position below the fluid flow path 2 in the first plate 1, and the heat exchange medium in the first plate 1. The fluid flow path 12 in the second plate 11 is located at a position below the flow path 8, and the heat in the second plate 11 is located at a position below the mixed fluid flow path 6 in the first plate 1. The exchange medium flow path 16 is positioned so that each fluid can exchange heat with the respective heat exchange medium positioned in the vertical direction, and the respective fluids can be adjusted to different temperatures. It is of course possible to adjust each fluid to the same temperature.

  In addition, the flow direction of each heat exchange medium may be a parallel flow that is the same direction as the flow direction of the fluid to be heat exchanged, or a counter flow that is in the opposite direction, considering the efficiency of the heating or cooling process. Good.

  Thus, when the micro mixer having the function of heat exchange is configured by laminating the first plate 1 and the second plate 11, the thickness of each plate is 0. It is preferable to set it as the range of 05 mm-5 mm.

  When the first plate 1 and the second plate 11 thus obtained are made of metal such as stainless steel, they can be joined by a publicly known method such as diffusion joining, and leakage of fluid to be processed is prevented. Can be planned. Then, by laminating and joining one or more pairs of these plate pairs, a micromixer with a heat exchange function can be obtained. In addition, what is necessary is just to determine arbitrarily the number of lamination | stacking according to the throughput of the fluid which should be mixed.

  FIG. 6 schematically shows a state in which the first plate 1 and the second plate 11 are stacked in four stages (two pairs of plates). The upper cover plate 20 and the lower cover plate 21 are further joined to the upper and lower sides of the four-layered plates (see FIG. 7), and the first fluid (A) inflow connector 22 and the second fluid (B ) Inflow connector 23, mixed fluid (AB) outflow connector 24, heat exchange medium (a) inflow connector 25 and outflow connector 26, heat exchange medium (b) inflow connector 27 and outflow connector 28. By attaching the inflow connector 29 and the outflow connector 30 for the heat exchange medium (x), a micromixer with a heat exchange mechanism as shown in FIG. 8 can be obtained.

  In the above description, the case where two types of fluids are mixed has been described. However, by changing the shape of the plate to increase the number of fluid flow paths and heat exchange medium flow paths, a heat exchange mechanism for three or more types of fluids is provided. A micromixer can also be obtained.

  For example, when the number of fluids to be mixed is three, as shown in FIG. 9, the first plate 1 has a cross-sectional outer shape and the second plate 11 has a structure as shown in FIG. A micromixer with an exchange mechanism can also be obtained.

  In this case, the difference from the two-fluid (A, B) mixing described above is that the micro holes 41 and the micro holes 42 are provided so that the micro holes formed in the first plate 1 have two systems.

  That is, the first plate 1 includes a fluid flow path 2 through which the fluid (A) flows, a micro hole 41 and a micro hole 42, a mixed fluid flow path 6 through which the mixed fluid (ABC) flows, and a fluid (B). A heat exchange medium flow path 8 for flowing heat exchange medium (b) for heat exchange and a heat exchange medium flow path 31 for flowing heat exchange medium (c) for heat exchange of fluid (C) are provided. It has been.

  In addition, the second plate 11 that forms a pair with the first plate 1 includes a fluid channel 12 through which the fluid (B) flows, a fluid channel 121 extending from the fluid channel 121, and a fluid channel 51 through which the fluid (C) flows. A fluid flow path 511 extending therefrom, a heat exchange medium flow path 52 through which the heat exchange medium (a) for heat exchange of the fluid (A), and a heat exchange medium (for exchanging heat of the mixed fluid (ABC)) ( y) A heat exchange medium flow path 53 through which the gas flows is provided.

  Then, the fluid (A), the fluid (B), and the fluid (C) can be mixed by the two micro-holes 41 and 42 provided in the middle of the fluid flow path 2 of the first plate 1.

  Similarly, when there are five types of fluids to be mixed (A, B, C, D, E), as shown in FIGS. 11 and 12, the heat exchange media (a, b, c, d, e) are used. , Z), the first plate 1 and the second plate 11 having a heat exchange medium flow path can be used.

  According to the micromixer of the present invention, a plurality of types of fluids can be controlled independently at different temperatures, so that non-isothermal mixing can be achieved, and the mixed fluid can be different from that before mixing. Because it can be controlled at a good temperature, for example, a high-temperature solution containing a solid content that dissolves only at a relatively high temperature is rapidly mixed with a poor solvent maintained at a low temperature, and the temperature rise due to the heat of mixing accompanying the mixing is suppressed. For this reason, a heat-unstable component is generated by a crystallization process for obtaining fine fine particles that require rapid cooling of the liquid mixture and a reaction by mixing, and thus the heat generation such that the liquid mixture needs to be rapidly cooled. It becomes easy to construct a reaction process.

  Here, as a use example of the micromixer with a heat exchange mechanism of the present invention, a process for producing fine particles of a phthalocyanine compound by a crystallization method will be taken and its usefulness will be described.

  In general, copper phthalocyanine is almost insoluble in organic solvents and acidic or alkaline solutions at room temperature, but dissolves to some extent in concentrated sulfuric acid. Processes for obtaining fine particles are known.

  At this time, it is known that the liquid temperature rises due to the heat of mixing due to the mixing of concentrated sulfuric acid and water, and in some cases, the liquid may boil. At this time, when water dissolves in concentrated sulfuric acid in which copper phthalocyanine is dissolved, the sulfuric acid concentration decreases and copper phthalocyanine crystals are precipitated. May be agglomerated, or crystal growth may be promoted, leading to particle coarsening, which may be undesirable in terms of quality.

  Also, this temperature rise results in hot sulfuric acid, so even materials used in common chemical processes, such as stainless steel, are subject to corrosive action, shortening the life of the equipment, or In some cases, it may be necessary to use a high-grade corrosion resistant material such as Hastelloy or titanium.

  Here, there is also a measure of precooling concentrated sulfuric acid in which copper phthalocyanine is dissolved before mixing and water used as a poor solvent to keep the temperature rise after mixing below a predetermined temperature, but low-temperature concentrated sulfuric acid is extremely There is also a problem that even when mixed with water having a low viscosity and a low fluidity, it is not mixed uniformly and crystals of copper phthalocyanine having a non-uniform particle diameter and shape are generated.

  In the crystallization process as described above, concentrated sulfuric acid in which copper phthalocyanine is dissolved is maintained at a temperature having a suitable fluidity, water as a poor solvent is mixed after being adjusted to a low temperature, and further, the mixing heat accompanying the mixing is mixed. In order to suppress the temperature rise caused by the above, it is preferable to cool the mixed solution simultaneously with mixing, and in such a rapid crystallization process, by using the micromixer with a heat exchange mechanism according to the present invention, it is preferable in terms of product quality. Finer and more uniform fine particles can be obtained.

  In addition, examples of the use of the micromixer with a heat exchange mechanism according to the present invention in a reaction process include application to a fast exothermic reaction process with a high reaction rate and reaction heat generation, such as a reaction using an organometallic reagent. An example can be given.

  In general, reactions using organometallic reagents have a very high reaction rate and large heat of reaction, so the temperature rises greatly due to exotherm, and the temperature rise is usually suppressed by a batch-wise batch reaction. A method of operating while suppressing is used.

  However, since it is a synthesis method that suppresses the progress of the reaction, the reaction process takes a long time, and there is a problem that the production cost tends to increase. In this synthesis method, a stirring tank or the like is usually used. However, since the reaction rate is high, the raw materials may not be mixed uniformly in the entire stirring tank. As a result, a local reaction occurs and a local reaction occurs. May result in problematic product quality such as excessive temperature rise and associated yield and selectivity reduction.

  A micromixer is considered to be effective for mixing raw materials in a reaction process with a high reaction rate and heat generation as described above, but conventional micromixers cannot perform independent temperature control of raw materials and reaction liquids. In some cases, it is difficult to suppress a temperature rise due to heat generation. On the other hand, the micromixer with a heat exchange mechanism of the present invention can improve the yield by cooling the reaction liquid after mixing while controlling the raw material before mixing to an appropriate temperature and suppressing the temperature rise due to heat generation. And can contribute to improvement of selectivity, which is preferable in terms of product quality.

The top view of the 1st plate of the micromixer by this invention. The perspective view of the 1st plate shown in FIG. The top view of the 2nd plate which makes a pair with the 1st plate shown in FIG. The perspective view of the 2nd plate shown in FIG. The perspective view which shows typically the state which laminates | stacks a 1st plate and a 2nd plate. The perspective view which shows typically the state which laminates | stacks four steps of 1st plates and 2nd plates. The perspective view which shows typically the state which laminated | stacked 4 steps | paragraphs of the 1st plate and the 2nd plate, and also laminated | stacked the upper cover plate and the lower cover plate. The top view which shows the external appearance of a micro mixer. The top view (3 fluid mixing) of the 1st plate in other embodiments. The top view (3 fluid mixing) of the 2nd plate in other embodiments. The top view (5 fluid mixing) of the 1st plate in other embodiments. The top view (5 fluid mixing) of the 2nd plate in other embodiments.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 1st plate 2 Fluid flow path 3 Shielding wall 4 Micro hole 5 Shielding wall 6 Mixed fluid flow path 7 Mixed fluid outlet 8 Heat exchange medium flow path 9 Shielding wall 10 Shielding wall 11 Second plate 12 Fluid flow path 13 Shielding wall 14 Heat exchange medium flow path 15 Shielding wall 16 Heat exchange medium flow path 17 Shielding wall 18 Shielding wall 19 Shielding wall 20 Upper cover plate 21 Lower cover plate

Claims (3)

In a micromixer having a structure in which two types of plates having the same shape in plan view are taken as a set, and the set of plates is laminated,
(1) The first plate of the set of plates is a fluid channel that allows the first fluid to flow among the fluids to be mixed, and a fluid other than the first fluid that flows in the fluid channel. A mixed fluid flow path for allowing a mixed liquid of the first fluid and a fluid other than the first fluid to flow, and heat exchange of the fluid other than the first fluid A heat exchange medium flow path for allowing the heat exchange medium to flow through,
(2) The other second plate of the set of plates exchanges heat between the fluid flow path for allowing fluid other than the first fluid to flow through the fluid to be mixed. A heat exchange medium flow path through which the heat exchange medium flows, and a heat exchange medium flow path through which the heat exchange medium for heat exchange of the mixed fluid flows,
(3) The heat exchange medium flow path through which the first plate and the second plate flow the heat exchange medium for heat exchange between the fluid flow path of the first fluid and the first fluid. A position of the heat exchange medium flow path through which the fluid flow path for allowing fluid other than the first fluid to flow and the heat exchange medium for heat exchange between the fluid other than the first fluid are provided. The position of the heat exchange medium flow path through which the heat exchange medium for exchanging heat between the mixed fluid flow path and the mixed fluid is disposed so as to correspond to each other in the vertical direction, and The micromixer is arranged such that fluids other than the first fluid merge with the first fluid through the micropores formed in the fluid flow path of the first fluid. . The micromixer according to claim 1, wherein two or more sets of the one set of plates are laminated. The micromixer according to claim 1 or 2, wherein an outlet of the mixed fluid channel has a contracted flow structure according to a flow direction.

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