JP2006279456A5 - - Google Patents
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- JP2006279456A5 JP2006279456A5 JP2005094806A JP2005094806A JP2006279456A5 JP 2006279456 A5 JP2006279456 A5 JP 2006279456A5 JP 2005094806 A JP2005094806 A JP 2005094806A JP 2005094806 A JP2005094806 A JP 2005094806A JP 2006279456 A5 JP2006279456 A5 JP 2006279456A5
- Authority
- JP
- Japan
- Prior art keywords
- acoustic wave
- surface acoustic
- idt
- output
- phase shifter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000010897 surface acoustic wave method Methods 0.000 claims 16
- 239000010409 thin film Substances 0.000 claims 3
- 239000004065 semiconductor Substances 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 206010043183 Teething Diseases 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
Claims (7)
前記半導体基板に形成される圧電体薄膜と、
前記圧電体薄膜の表面に形成される櫛歯交差電極からなる入力ＩＤＴと第１の出力ＩＤ
Ｔと第２の出力ＩＤＴと、を備え、
前記第１の出力ＩＤＴが、前記入力ＩＤＴからの入力信号に対して位相差０°の第１の出力信号を出力し、前記第２の出力ＩＤＴが、前記第１の出力信号に対して位相差９０°の第２の出力信号を出力する移相器が、
前記第１の出力信号と前記第２の出力信号の出力電圧を近似させるように、前記櫛歯交差電極の長さと、前記入力ＩＤＴと前記第１の出力ＩＤＴまたは前記第２の出力ＩＤＴとの距離と、をそれぞれ調整して形成されていることを特徴とする弾性表面波素子。 A surface acoustic wave element formed on a semiconductor substrate,
A piezoelectric thin film formed on the semiconductor substrate;
An input IDT and a first output ID comprising comb-teeth intersecting electrodes formed on the surface of the piezoelectric thin film
T and a second output IDT,
The first output IDT outputs a first output signal having a phase difference of 0 ° with respect to the input signal from the input IDT, and the second output IDT has a position relative to the first output signal. A phase shifter that outputs a second output signal having a phase difference of 90 ° ;
In order to approximate the output voltages of the first output signal and the second output signal, the length of the comb-intersecting electrode and the input IDT and the first output IDT or the second output IDT A surface acoustic wave element formed by adjusting a distance and a distance, respectively.
前記入力ＩＤＴと前記第１の出力ＩＤＴと前記第２の出力ＩＤＴとが、弾性表面波の進
行方向の範囲内に順次配置され、
前記入力ＩＤＴの先頭櫛歯電極と前記第１の出力ＩＤＴの先頭櫛歯電極との距離をＬ１
＝ｎλ（ｎは整数、λは弾性表面波の波長）とし、前記入力ＩＤＴの先頭櫛歯電極と前記
第２の出力ＩＤＴの先頭櫛歯電極との距離をＬ２＝ｍλ±（１/４）λ（ｍは整数）とす
る移相器が形成されていることを特徴とする弾性表面波素子。 The surface acoustic wave device according to claim 1,
The input IDT, the first output IDT, and the second output IDT are sequentially arranged within the range of the traveling direction of the surface acoustic wave,
The distance between the leading comb electrode of the input IDT and the leading comb electrode of the first output IDT is L1.
= Nλ (where n is an integer and λ is the surface acoustic wave wavelength), and the distance between the leading comb electrode of the input IDT and the leading comb electrode of the second output IDT is L2 = mλ ± (1/4) A surface acoustic wave device, wherein a phase shifter having λ (m is an integer) is formed.
前記第１の出力ＩＤＴの櫛歯電極の長さをＨ１とし、前記第２の出力ＩＤＴの櫛歯電極
の長さをＨ２としたとき、Ｈ１＜Ｈ２に設定される移相器が形成されていることを特徴と
する弾性表面波素子。 In the surface acoustic wave device according to claim 1 or 2,
When the length of the comb electrode of the first output IDT is H1, and the length of the comb electrode of the second output IDT is H2, a phase shifter that is set to H1 <H2 is formed. A surface acoustic wave device comprising:
前記第１の出力ＩＤＴの櫛歯電極を接続するバス電極が、前記圧電体薄膜の下方の弾性
表面波の進行に影響がない位置に配置される移相器が形成されていることを特徴とする弾
性表面波素子。 The surface acoustic wave device according to any one of claims 1 to 3,
A phase shifter is formed in which the bus electrode connecting the comb electrode of the first output IDT is disposed at a position where the progress of the surface acoustic wave below the piezoelectric thin film is not affected. A surface acoustic wave device.
前記第１の出力ＩＤＴの櫛歯交差電極の対数をｐとし、前記第２の出力ＩＤＴの櫛歯交
差電極の対数をｑとしたときに、ｐ＜ｑとなるように設定される移相器が形成されている
ことを特徴とする弾性表面波素子。 In the surface acoustic wave device according to claim 1 or 2,
The phase shifter is set such that p <q, where p is the number of comb-teeth crossing electrodes of the first output IDT and q is the number of comb-teething crossing electrodes of the second output IDT. A surface acoustic wave device characterized in that is formed.
前記入力ＩＤＴの両側に、前記第１の出力ＩＤＴと前記第２の出力ＩＤＴとが配置され
る移相器が形成されていることを特徴とする弾性表面波素子。 In the surface acoustic wave device according to claim 1 or 2,
A surface acoustic wave element, wherein a phase shifter in which the first output IDT and the second output IDT are arranged is formed on both sides of the input IDT.
デジタル直交変調／復調のための同相成分信号または直交成分信号を生成する移相器を
備え、
前記移相器が、請求項１ないし請求項６のいずれか一項に記載の弾性表面波素子からな
ることを特徴とする無線通信装置。 A wireless communication device using a digital quadrature modulation / demodulation method,
A phase shifter for generating an in-phase component signal or a quadrature component signal for digital quadrature modulation / demodulation,
A wireless communication apparatus, wherein the phase shifter includes the surface acoustic wave element according to any one of claims 1 to 6.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005094806A JP2006279456A (en) | 2005-03-29 | 2005-03-29 | Elastic surface wave device and radio communication equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005094806A JP2006279456A (en) | 2005-03-29 | 2005-03-29 | Elastic surface wave device and radio communication equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2006279456A JP2006279456A (en) | 2006-10-12 |
| JP2006279456A5 true JP2006279456A5 (en) | 2008-05-08 |
Family
ID=37213742
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005094806A Withdrawn JP2006279456A (en) | 2005-03-29 | 2005-03-29 | Elastic surface wave device and radio communication equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2006279456A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008099053A (en) | 2006-10-13 | 2008-04-24 | Sharp Corp | Personal digital assistant device |
| WO2012124648A1 (en) * | 2011-03-14 | 2012-09-20 | 株式会社村田製作所 | Piezoelectric device, and method for manufacturing piezoelectric device |
-
2005
- 2005-03-29 JP JP2005094806A patent/JP2006279456A/en not_active Withdrawn
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