JP2006272416A - Laser beam machining apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus that makes its miniaturization possible by improving efficiency of arranging functional components required on the optical path of a laser beam. <P>SOLUTION: Between a light incident lens 17 and an exiting lens 18 constituting a beam expander 13, there are arranged a dichroic mirror 22 by which a guide beam from a visible-light light source 24 is made incident coaxially with the optical axis of the laser beam, and a half-mirror 26 by which a part of the laser beam is derived to a light receiving element 27 that is disposed outside the optical path of the laser beam to detect the laser beam. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a laser processing apparatus for processing a processing object by irradiating the processing object with a laser beam.

  In this type of laser processing apparatus, the beam diameter of the laser light emitted from the laser light source is temporarily expanded by a beam expander, and the laser light is converged by a converging lens at the subsequent stage so as to irradiate the object to be processed. It is configured.

  By the way, since it is common to use laser light that is not visible in the laser beam emitted from the laser processing apparatus, for example, when determining the irradiation position of the laser beam on the workpiece, the operator can visually recognize the laser beam. It is difficult to determine the exact irradiation position of the laser beam. Therefore, such a laser processing apparatus has conventionally been provided with guide light irradiation means for irradiating a processing target with guide light having a wavelength in the visible region at the same position as the laser light (for example, Patent Documents). 1 and 2).

  Specifically, in Patent Document 1, a dichroic mirror is disposed after the beam expander, and guide light is emitted from the direction orthogonal to the optical axis so as to be coaxial with the optical axis of the laser light. The guide light is irradiated to the same position as the irradiation position. Patent Document 2 has the same configuration as that of Patent Document 1 except that a dichroic mirror that irradiates guide light is disposed in front of the beam expander.

Incidentally, it is conceivable to use laser light in the visible region as laser light for processing. However, this laser beam has a high degree of danger and is difficult to handle. In addition, when such laser light in the visible region is used, it is considered that the intensity of the laser light is weakened at the time of guide irradiation, but an apparatus for sufficiently reducing the intensity of the laser light becomes large. Therefore, even if laser light in the visible region is used, the guide light irradiation means as described above is necessary after all.
JP-A-8-323489 JP 2004-66327 A

  By the way, like the above-mentioned patent documents 1 and patent documents 2, in the composition which arranges the dichroic mirror for making guide light enter in series in the front part of a beam expander, or the latter part on the optical path (optical axis) of a laser beam, The laser processing apparatus is enlarged in the direction of the optical axis of the laser beam, which is a major obstacle to downsizing the apparatus. This is a common problem when using not only the above-described dichroic mirror for allowing the guide light to enter but also functional parts that need to be provided on the optical path of the laser light.

  The present invention has been made to solve the above-described problems, and its object is to improve the arrangement efficiency of functional components that need to be provided on the optical path of laser light and to reduce the size of the apparatus. An object of the present invention is to provide a laser processing apparatus that can perform this.

  The invention according to claim 1 includes a beam expander having at least two lenses for expanding the beam width of the laser light emitted from the laser light source, and converges the laser light that has passed through the beam expander with a converging lens. In a laser processing apparatus that irradiates a workpiece with a workpiece and processes the workpiece, a visible light source that is disposed outside the optical path of the laser light and emits guide light in the visible region, and is disposed on the optical path of the laser light Guide light incident means for making the guide light incident so as to be coaxial with the optical axis of the laser light, and the guide light incident means is disposed between the two lenses of the beam expander. This is the gist.

  The invention according to claim 2 includes a beam expander having at least two lenses for expanding the beam width of the laser light emitted from the laser light source, and converges the laser light that has passed through the beam expander with a converging lens. In a laser processing apparatus for irradiating a workpiece with the workpiece and processing the workpiece, a light receiving means disposed outside the optical path of the laser beam and receiving the laser beam to detect the laser beam, and disposed on the optical path of the laser beam And a laser beam deriving unit for deriving at least a part of the laser beam to the light receiving unit arranged outside the optical path of the laser beam, wherein the laser beam deriving unit includes the two beam expanders. The gist is to be placed between the lenses.

  The invention described in claim 3 includes a beam expander having at least two lenses for expanding the beam width of the laser light emitted from the laser light source, and converges the laser light that has passed through the beam expander with a converging lens. In a laser processing apparatus that irradiates a workpiece with a workpiece and processes the workpiece, a visible light source that is disposed outside the optical path of the laser beam and emits guide light in the visible region, and is disposed on the optical path of the laser beam A guide light incident means for making the guide light incident so as to be coaxial with the optical axis of the laser light, a light receiving means disposed outside the optical path of the laser light and receiving the laser light to detect the laser light, Laser light deriving means for deriving at least a part of the laser light to the light receiving means arranged on the optical path of the laser light and arranged outside the optical path of the laser light, Mode optical incident means and the laser beam deriving means and its gist to be disposed between the beam expander of the two lenses.

  According to a fourth aspect of the present invention, in the laser processing apparatus according to the first or third aspect, at the time of processing by the laser light, the laser light is emitted from the laser light source and the guide light from the visible light source is emitted. And a switching control means for controlling to stop emission and stop the emission of the laser light from the laser light source and to emit the guide light from the visible light source at the time of projection by the guide light. The gist.

  According to a fifth aspect of the present invention, in the laser processing apparatus according to any one of the first, third, and fourth aspects, the guide light incident means can be switched to be placed on or off the optical path of the laser light. The gist is that the driving means is provided.

  According to a sixth aspect of the present invention, in the laser processing apparatus according to the fifth aspect, during the processing by the laser beam, the advance / retreat driving unit is controlled to retract the guide light incident unit out of the optical path of the laser beam. The gist of the invention is that it includes an advancing / retreating control means for controlling the advancing / retreating driving means to cause the guide light incident means to enter the optical path of the laser light during projection by the guide light.

  A seventh aspect of the present invention is the laser processing apparatus according to the second or third aspect, further comprising an advancing / retreating drive unit capable of switching and arranging the laser beam deriving unit on or off the optical path of the laser beam. The gist.

  According to an eighth aspect of the present invention, in the laser processing apparatus according to the seventh aspect, during the processing by the laser beam, the advance / retreat driving unit is controlled to retract the laser beam deriving unit out of the optical path of the laser beam. The gist of the invention is that it comprises an advancing / retreating control means for controlling the advancing / retreating driving means so that the laser light deriving means enters the optical path of the laser light when detecting the laser light.

  A ninth aspect of the present invention is the laser processing apparatus according to any one of the first to third aspects, wherein the visible light source is between the visible light source and the guide light incident means. The guide lens is provided, and the guide lens is set to have a refractive index such that the guide light emitted from the beam expander becomes parallel light.

  A tenth aspect of the present invention is the laser processing apparatus according to any one of the first, third, sixth, and ninth aspects, wherein the processing object side lens and the converging lens of the beam expander are achromatic. The gist is that it is a lens.

(Function)
According to the first aspect of the present invention, the guide light incident means for making the guide light from the visible light source incident so as to be coaxial with the optical axis of the laser light is provided between at least two lenses constituting the beam expander. Be placed. Here, since the magnification (performance) of the beam expander is determined by the focal lengths of both internal lenses, there is a limit to the distance reduction between these two lenses. As a result, a space is created between these two lenses. By arranging guide light incident means in this space (dead space) to improve the placement efficiency, the optical path length of the laser light is shortened compared to the conventional structure. Therefore, it is possible to contribute to downsizing of the laser processing apparatus.

  According to the second aspect of the present invention, the laser beam deriving unit for deriving at least a part of the laser beam to the light receiving unit disposed outside the optical path of the laser beam and detecting the laser beam includes at least two constituting the beam expander. Between two lenses. As described in claim 1 above, since a space is generated between both internal lenses in order to ensure the magnification (performance) of the beam expander, a laser beam deriving unit is arranged in this space (dead space). By improving the arrangement efficiency, it is possible to shorten the optical path length of the laser light, thereby contributing to downsizing of the laser processing apparatus.

  According to the third aspect of the present invention, the guide light incident means for making the guide light from the visible light source incident so as to be coaxial with the optical axis of the laser light, and the laser light disposed outside the optical path of the laser light are detected. Laser light deriving means for deriving at least part of the laser light to the light receiving means is disposed between at least two lenses constituting the beam expander. As described in the first and second aspects, since a space is generated between the internal lenses for securing the magnification (performance) of the beam expander, the guide light incident means and the laser are formed in this space (dead space). By arranging the light derivation means and improving the arrangement efficiency, the optical path length of the laser light can be shortened, thereby contributing to the downsizing of the laser processing apparatus.

  According to the fourth aspect of the present invention, the switching control unit causes the laser light to be emitted from the laser light source and stop emitting the guide light from the visible light source at the time of processing with the laser light. The emission of the laser light from the laser light source is stopped and the guide light is emitted from the visible light source. In other words, there is no need to project with guide light when processing with laser light, and there is no need to irradiate with laser light when projecting with guide light. In each case, the emission of guide light and laser light can be stopped. , Wasteful power consumption can be reduced.

  According to the fifth aspect of the present invention, the advancing / retreating drive means capable of switching and arranging the guide light incident means on or off the optical path of the laser light is provided. This makes it possible to arrange the guide light incident means on the optical path of the laser light only at least when projection by the guide light is necessary, so that the loss of the laser light at the guide light incident means can be reduced as much as possible. Laser light can be efficiently guided to the workpiece side.

  According to the sixth aspect of the present invention, the advance / retreat control means retracts the guide light incident means outside the optical path of the laser light when processing with the laser light, and causes the guide light incident means to move the laser light when projecting with the guide light. Enter the light path. In other words, since the guide light incident means can be reliably retracted from the laser light optical path during processing with the laser light, the loss of the laser light in the guide light incident means can be more reliably reduced.

  According to the seventh aspect of the present invention, the advancing / retreating driving means capable of switching the laser beam deriving unit on or off the optical path of the laser beam is provided. As a result, the laser beam deriving means can be arranged on the optical path of the laser beam only at least when detecting the laser beam, so that the loss of the laser beam in the laser beam deriving device can be reduced as much as possible. Can be efficiently guided to the workpiece side.

  According to the invention described in claim 8, the advance / retreat control means retracts the laser light deriving means out of the optical path of the laser light when processing with the laser light, and causes the laser light deriving means to move the laser light when detecting the laser light. Enter the light path. That is, since the laser beam deriving unit can be reliably retracted from the optical path of the laser beam when detecting the laser beam, the loss of the laser beam in the laser beam deriving unit can be more reliably reduced.

  According to the ninth aspect of the present invention, the guide lens for converging or diverging the guide light emitted from the visible light source is provided between the visible light source and the guide light incident means, and for the guide The lens is set to a refractive index such that the guide light emitted from the beam expander becomes parallel light. As a result, the guide light emitted from the beam expander becomes parallel light like the laser light, so that the guide light is also converged by the converging lens like the laser light, and the spot of the guide light on the workpiece is It becomes easier to visually recognize.

  According to the invention described in claim 10, since the achromatic lens is used as the lens and the converging lens on the processing object side of the beam expander, the difference between the wavelength of the laser light and the guide light causes the processing on the processing object. Spot deviation can be suppressed, and the processing position can be more accurately recognized by the guide light.

  ADVANTAGE OF THE INVENTION According to this invention, the laser processing apparatus which can improve the arrangement | positioning efficiency of the functional component which needs to be provided on the optical path of a laser beam, and can achieve size reduction of an apparatus can be provided.

DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, an embodiment of the invention will be described with reference to the drawings.
FIG. 1 is a configuration block diagram of a laser processing apparatus 10 according to the present embodiment. The laser processing apparatus 10 according to the present embodiment performs marking processing of characters, symbols, figures, and the like on the surface of the workpiece W.

The laser processing apparatus 10 includes a laser light source 11 that emits laser light for processing. The laser light source 11 is composed of a laser oscillator, and its oscillation is controlled by the control circuit 12.
A beam expander 13 is disposed following the laser light source 11. The beam expander 13 is provided to expand the laser light emitted from the laser light source 11 to a parallel light having a constant magnification, more specifically, a ratio of the emitted beam diameter (width) to the incident beam diameter (width). . Incidentally, since the spot of the laser beam emitted from the converging lens 16 becomes smaller as the beam diameter of the laser beam incident on the subsequent converging lens 16 becomes larger, the beam diameter of the laser beam is temporarily expanded using the beam expander 13. To do.

  A galvano mirror 14 is disposed at the subsequent stage of the beam expander 13. The galvanometer mirror 14 reflects the laser beam whose beam diameter is enlarged and changes the irradiation direction thereof, and is composed of, for example, a pair of an X-axis mirror and a Y-axis mirror. The galvanometer mirror 14 is angle-controlled by driving of the driving device 15 based on the control of the control circuit 12, and scans the laser beam two-dimensionally based on characters, symbols, figures, etc. to be marked.

  A converging lens (fθ lens) 16 is disposed following the galvanometer mirror 14. The converging lens 16 converges the laser beam whose beam diameter is once expanded by the beam expander 13 until it reaches a predetermined spot diameter on the surface of the workpiece W, and increases the energy density suitable for marking processing.

  Further, the above-described beam expander 13 specifically includes an incident lens 17 and an exit lens 18 for enlarging the laser light to a constant magnification. Here, since the magnification (performance) of the beam expander 13 is determined by the focal lengths of both the entrance lens 17 and the exit lens 18, there is a limit to the distance reduction between the both lenses 17 and 18. In other words, a space of a predetermined distance or more is required between the lenses 17 and 18. In the present embodiment, attention is paid to the space generated between the entrance lens 17 and the exit lens 18 as described above, and a dichroic mirror 22 that constitutes a part of the guide light irradiation device 21 in the space and one of the monitor devices 25. The half mirror 26 constituting the part is accommodated.

  The guide light irradiation device 21 includes the dichroic mirror 22 described above, a guide lens 23, and a visible light source 24. The dichroic mirror 22 is disposed and fixed after the incident lens 17 of the beam expander 13. The dichroic mirror 22 is disposed on the optical path (on the optical axis) of the laser beam so as to be inclined at a predetermined angle (45 ° in the present embodiment) with respect to the optical axis. Such a dichroic mirror 22 is configured to transmit laser light while reflecting guide light.

  The visible light source 24 is disposed on an axis perpendicular to the optical axis of the laser light, and a guide lens 23 is interposed between the visible light source 24 and the dichroic mirror 22. The visible light source 24 is configured by a laser diode (LD) or an LED that emits a guide laser beam, and is turned on / off by the control circuit 12. The visible light source 24 emits guide light having a wavelength in the visible region to the reflecting surface of the dichroic mirror 22 via the guide lens 23, and the guide light reflected by the mirror 22 is combined with the optical axis of the laser light. Oriented to be coaxial.

  The guide lens 23 is provided in cooperation with the exit lens 18 of the beam expander 13 so that the guide light from the visible light source 24 that diffuses becomes parallel light at the subsequent stage of the exit lens 18. That is, the guide lens 23 is set to have a refractive index such that the guide light emitted from the emission lens 18 becomes parallel light.

  The monitor device 25 includes the half mirror 26, the light receiving element 27, and the actuator 28 described above. The half mirror 26 is disposed in front of the exit lens 18 of the beam expander 13 and is provided to swing by driving the actuator 28 based on the control of the control circuit 12. When the half mirror 26 is disposed at one oscillating end position (projecting position) projecting on the optical path of the laser beam, the half mirror 26 is inclined at a predetermined angle (45 ° in the present embodiment) with respect to the optical axis, When it is disposed at the swing end position (storage position) opposite to the protruding position, it is retracted from the optical path of the laser beam. Such a half mirror 26 is composed of a mirror having a laser beam reflectance of 10% (transmittance of 90%).

  The light receiving element 27 is disposed on an axis perpendicular to the optical axis of the laser light. The light receiving element 27 is configured by a photodiode (PD). The light receiving element 27 receives the laser light (in this case, 10% laser light) reflected by the reflecting surface of the half mirror 26 disposed at the protruding position, and controls a detection signal corresponding to the intensity of the laser light. Output to the circuit 12.

  The control circuit 12 that controls each of the above devices controls the angle of the galvanometer mirror 14 by driving the driving device 15 when a marking processing command is issued and marking processing is performed on the workpiece W. That is, the control circuit 12 scans the laser beam two-dimensionally based on characters, symbols, figures, etc. to be marked, and performs marking of a predetermined shape on the surface of the workpiece W. Incidentally, when this marking process is performed, the control circuit 12 turns off the visible light source 24 of the guide light irradiation device 21 and controls the actuator 28 to retract the half mirror 26 of the monitor device 25 to the storage position. To do.

  When monitoring the intensity of the laser beam by the monitor device 25 (light receiving element 27) (when a laser beam monitor command is generated), the control circuit 12 drives the actuator 28 of the device 25 to move the half mirror 26 to the protruding position. To be placed. Then, a detection signal corresponding to the intensity of the laser beam is input from the light receiving element 27 to the control circuit 12, and the control circuit 12 detects the intensity of the laser beam in the detection signal. The control circuit 12 controls the oscillation of the laser light source 11 based on the detected intensity of the laser light, and adjusts the intensity of the laser light from the laser light source 11. When the monitoring of the laser beam becomes unnecessary (when a monitoring unnecessary command is generated), the control circuit 12 drives the actuator 28 to place the half mirror 26 at the storage position.

  Further, when the surface of the workpiece W is irradiated with the guide light before the marking process is performed and the irradiation position of the laser beam, the marking shape, and the like are confirmed (when a guide light irradiation command is generated), the control circuit 12 The visible light source 24 is turned on (in this case, the laser light source 11 is turned off). Then, the guide light from the visible light source 24 is reflected by the dichroic mirror 22, travels on the optical path of the laser light, and is irradiated onto the surface of the workpiece W through the galvanometer mirror 14 and the converging lens 16. Thereby, the irradiation position of the laser beam becomes visible. Further, in this case, by driving the galvanometer mirror 14 according to the marking shape as in the case of performing the marking process, the guide light moves on the surface of the workpiece W according to the marking shape, The marking shape becomes visible.

Next, characteristic actions and effects of the present embodiment will be described.
(1) The dichroic mirror 22 that makes the guide light from the visible light source 24 incident so as to be coaxial with the optical axis of the laser light, and the light receiving element 27 that is arranged outside the optical path of the laser light and detects the laser light A half mirror 26 that leads out a part is disposed between the entrance lens 17 and the exit lens 18 that constitute the beam expander 13. That is, since a space is generated between the internal lenses 17 and 18 in securing the magnification (performance) of the beam expander 13, the dichroic mirror 22 and the half mirror 26 are arranged in this space (dead space). By improving the arrangement efficiency, the optical path length of the laser light can be shortened, thereby contributing to the downsizing of the laser processing apparatus 10.

  (2) The control circuit 12 emits the laser light from the laser light source 11 and stops the emission of the guide light from the visible light source 24 at the time of processing by the laser light, and the laser from the laser light source 11 at the time of projection by the guide light. Control is performed so that the emission of light is stopped and the guide light is emitted from the visible light source 24. In other words, there is no need to project with guide light when processing with laser light, and there is no need to irradiate with laser light when projecting with guide light. In each case, the emission of guide light and laser light can be stopped. , Wasteful power consumption can be reduced.

  (3) An actuator 28 is provided that can switch and arrange the half mirror 26 on or off the optical path of the laser beam. Thereby, since the half mirror 26 is disposed on the optical path of the laser beam only when monitoring (detecting) the laser beam, the loss of the laser beam in the half mirror 26 can be reduced as much as possible, and the laser beam is processed efficiently. It can be led to the object side. Moreover, the control circuit 12 retracts the half mirror 26 out of the optical path of the laser light when processing with the laser light, and the half mirror 26 enters the optical path of the laser light when monitoring (detecting) the laser light. That is, since the half mirror 26 can be reliably retracted from the optical path of the laser light when detecting the laser light, the loss of the laser light at the half mirror 26 can be more reliably reduced.

  (4) Between the visible light source 24 and the dichroic mirror 22, a guide lens for converging or diverging the guide light emitted from the visible light source 24 is provided, and the guide lens 23 is a beam expander. The refractive index is set so that the guide light emitted from 13 becomes parallel light. As a result, the guide light emitted from the beam expander 13 becomes parallel light like the laser light, so that the guide light is also converged by the converging lens 16 in the same manner as the laser light, and the guide light on the work W is processed. The spot becomes easier to visually recognize.

The embodiment of the present invention may be modified as follows.
In the above embodiment, the dichroic mirror 22 and the half mirror 26 are both arranged between the incident lens 17 and the outgoing lens 18 constituting the beam expander 13. Either one may be used. That is, the dichroic mirror 22 is omitted when the laser beam irradiation apparatus 21 is not required for the laser processing apparatus 10, and the half mirror 26 is omitted when the monitor apparatus 25 is not required. Further, the guide light may be incident and the laser light may be derived by a member other than the mirror such as the dichroic mirror 22 and the half mirror 26. In addition to these, a function improving means for improving the function of the laser processing apparatus 10 by being arranged on the optical path of the laser light may be arranged between the incident lens 17 and the emission lens 18 in the beam expander 13. .

  In the above embodiment, the beam expander 13 is configured in a straight line, and the beam expander 13 and the laser light source 11 and the galvanometer mirror 14 before and after the beam expander 13 are arranged in the same straight line. May be.

  For example, as shown in FIG. 2, the beam expander 13a may be configured in an L shape. That is, the beam expander 13a is configured such that the optical axis of the laser beam passing through the incident lens 17 and the optical axis passing through the exit lens 18 are orthogonal to each other by the dichroic mirror 22a between the lenses 17 and 18. Yes. In this embodiment, the guide lens 23 and the visible light source 24 are disposed on the opposite side of the lens 18 on the optical axis passing through the output lens 18 with the dichroic mirror 22a interposed therebetween. Incidentally, the dichroic mirror 22a used in this embodiment transmits guide light from the visible light source 24, and reflects laser light from the laser light source 11 to guide it to the exit lens 18. Even if such a beam expander 13a is used, the optical path length of the laser beam can be shortened, and thus the laser processing apparatus 10 can be reduced in size.

  In the above embodiment, the half mirror 26 is swung by using the actuator 28 so as to be able to advance and retreat in the optical path of the laser light. However, for example, the half mirror 26 is slid and moved in the optical path of the laser light. May be. Further, the half mirror 26 may be operated manually without using the actuator 28. Further, the actuator 28 may be omitted as a configuration in which the half mirror 26 is not operated.

  In the above embodiment, the half mirror 26 having a laser beam reflectivity of 10% (transmittance of 90%) is used. However, the reflectivity (transmittance) is not limited to this value, and can be changed as appropriate. May be. A total reflection mirror can also be used.

  In the above embodiment, the dichroic mirror 22 is fixed in the beam expander 13, but the dichroic mirror 22, which is a guide light incident means, is driven forward and backward so that the half mirror 26 is actuated by the actuator 28. You may comprise so that it can advance / retreat to the optical path of a laser beam using a means. In this case, a half mirror or a total reflection mirror can be used instead of the dichroic mirror 22.

  Incidentally, under the control of the control circuit 12, the guide light incident means such as the dichroic mirror 22 is retracted out of the laser light path during processing with the laser light, and the guide light incident means enters the laser light optical path during the projection with the guide light. You may control to make it. In this way, the guide light incident means can be reliably retracted from the optical path of the laser light during processing with the laser light, so that the loss of the laser light at the guide light incident means can be more reliably reduced. it can.

  An achromatic lens may be used for the exit lens 18 and the converging lens 16 of the beam expander 13 in the above embodiment. That is, since the achromatic lens can suppress the spot deviation on the workpiece W due to the difference in wavelength between the laser beam and the guide beam, the processing position can be recognized more accurately by the guide beam.

  In the above embodiment, the present invention is applied to the laser processing apparatus 10 for marking characters, symbols, figures, etc. on the surface of the workpiece W. However, other processing such as cutting and welding of the workpiece W by irradiation with laser light. The present invention can also be applied to a laser processing apparatus that performs processing.

It is a block diagram of the laser processing apparatus in the present embodiment. It is a block diagram which shows the beam expander part of another example.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 11 ... Laser light source, 12 ... Control circuit as switching control means and advance / retreat control means, 13, 13a ... Beam expander, 16 ... Converging lens, 17 ... Incident lens as lens, 18 ... Outgoing lens as lens, 22 ... Dichroic mirror constituting guide light incident means and function improving means, 23 ... guide lens, 24 ... visible light source, 26 ... half mirror constituting laser light deriving means and function improving means, 27 ... light receiving element as light receiving means 28: Actuator as advance / retreat driving means, W: Work object.

Claims (10)

A beam expander having at least two lenses for expanding the beam width of laser light emitted from a laser light source is provided, and the laser light that has passed through the beam expander is converged by a converging lens to irradiate an object to be processed. In a laser processing apparatus that processes an object,
A visible light source disposed outside the optical path of the laser light and emitting guide light in the visible region;
A guide light incident means disposed on the optical path of the laser light and configured to make the guide light incident so as to be coaxial with the optical axis of the laser light,
The laser processing apparatus, wherein the guide light incident means is disposed between the two lenses of the beam expander. A beam expander having at least two lenses for expanding the beam width of laser light emitted from a laser light source is provided, and the laser light that has passed through the beam expander is converged by a converging lens to irradiate an object to be processed. In a laser processing apparatus that processes an object,
A light receiving means disposed outside the optical path of the laser beam and receiving the laser beam to detect the laser beam;
Laser light deriving means arranged on the optical path of the laser light and deriving at least a part of the laser light to the light receiving means arranged outside the optical path of the laser light,
The laser processing apparatus, wherein the laser beam deriving unit is disposed between the two lenses of the beam expander. A beam expander having at least two lenses for expanding the beam width of laser light emitted from a laser light source is provided, and the laser light that has passed through the beam expander is converged by a converging lens to irradiate an object to be processed. In a laser processing apparatus that processes an object,
A visible light source disposed outside the optical path of the laser light and emitting guide light in the visible region;
A guide light incident means arranged on the optical path of the laser light and for making the guide light incident so as to be coaxial with the optical axis of the laser light;
A light receiving means disposed outside the optical path of the laser beam and receiving the laser beam to detect the laser beam;
Laser light deriving means arranged on the optical path of the laser light and deriving at least a part of the laser light to the light receiving means arranged outside the optical path of the laser light,
The laser processing apparatus, wherein the guide light incident means and the laser light deriving means are disposed between the two lenses of the beam expander. In the laser processing apparatus according to claim 1 or 3,
At the time of processing by the laser light, the laser light is emitted from the laser light source and the emission of the guide light from the visible light source is stopped. At the time of projection by the guide light, the laser light is emitted from the laser light source. And a switching control means for controlling the guide light to be emitted from the visible light source. In the laser processing apparatus of any one of Claim 1, 3, 4,
A laser processing apparatus, comprising: an advancing / retreating drive means capable of switching and arranging the guide light incident means on or off the optical path of the laser light. In the laser processing apparatus of Claim 5,
At the time of processing by the laser light, the advance / retreat driving means is controlled to retract the guide light incident means out of the optical path of the laser light, and at the time of projection by the guide light, the guide light incident means is placed on the optical path of the laser light. A laser processing apparatus comprising an advancing / retreating control means for controlling the advancing / retreating driving means so as to enter into the apparatus. In the laser processing apparatus according to claim 2 or 3,
A laser processing apparatus, comprising: an advancing / retreating drive unit capable of switching the laser beam deriving unit on or off the optical path of the laser beam. In the laser processing apparatus of Claim 7,
When processing with the laser beam, the advance / retreat driving unit is controlled to retract the laser beam deriving unit out of the optical path of the laser beam, and when detecting the laser beam, the laser beam deriving unit is placed on the optical path of the laser beam. A laser processing apparatus comprising an advancing / retreating control means for controlling the advancing / retreating driving means so as to enter into the apparatus. In the laser processing apparatus of any one of Claims 1, 3-6,
Between the visible light source and the guide light incident means, a guide lens for converging or diverging the guide light emitted from the visible light source is provided,
The laser processing apparatus, wherein the guide lens is set to have a refractive index such that the guide light emitted from the beam expander becomes parallel light. In the laser processing apparatus according to any one of claims 1, 3 to 6, 9,
The laser processing apparatus, wherein the processing object side lens and the converging lens of the beam expander are achromatic lenses.

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