JP2006260666A - Probe, probe array, and optical pickup apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a plane type probe and a plane type probe array which never damage an optical recording medium and has no probability of being damaged, and to provide an optical pickup apparatus in which the optical recording medium never be damaged and there is no probability of destruction of the plane type probe. <P>SOLUTION: In the plane type probe 10, a probe main body 14 provided with an optical opening part (minute opening) 16 at a tip is provided protrusively from one plane side of a substrate 11, and is provided with a protection part 15 projected from one plane side of the substrate so as to protect the probe main body. In the plane type probe, a protection film 13 whose surface is projected more than the probe main body is formed at the surface of the protection part. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a probe, a probe array, and an optical pickup device.

  The optical pickup device writes data on an optical recording medium such as a CD (Compact Disc) or a DVD (Digital Versatile Disc), or reads the data written on the optical recording medium.

  Some optical pickup devices include a probe and a lens. The probe includes a substrate and a light shielding film. The substrate is formed in a flat plate shape using a light transmissive material. A probe main body is provided on one side of the substrate so as to protrude from the plate surface.

  The light shielding film is formed using a material having a light shielding property so as to cover one surface side of the substrate excluding the tip of the probe body so as to provide a light opening (a minute opening) at the tip of the probe body.

  In the optical pickup device, a disc-shaped optical recording medium is arranged near the tip of the optical opening so as to be parallel to the substrate, and the laser light squeezed by the lens is irradiated from the optical opening while rotating the optical recording medium. As a result, data is written to the optical recording medium or data written to the optical recording medium is read out.

  In recent years, it has been desired to write data on an optical recording medium at a high density. In order to write data on an optical recording medium at a high density, the wavelength of the laser light formed on the surface of the optical recording medium is reduced by shortening the wavelength of the laser light and increasing the lens NA (Numerical Aperture). This can be realized by reducing the spot size and making the recording pits formed on the optical recording medium minute.

  However, there is a limit to shortening the wavelength of the laser beam, and the spot size of the laser beam focused by the lens cannot be made smaller than the wavelength of the laser beam (so-called diffraction limit). Therefore, there is a limit to writing data on the optical recording medium at a high density. Moreover, when data written with a spot size close to the diffraction limit is read by the probe, there is a possibility that crosstalk may occur for the same reason as described above.

  By the way, when light is incident from one of the two media having different refractive indexes so as to be totally reflected at the boundary surface of the medium, only the non-propagating electric field component leaks into the other medium beyond the boundary surface ( A near field is formed. This near field can also be formed by a probe having an optical aperture smaller than the wavelength of the laser beam. The near field formed by the probe has a lateral extent that is almost the same as the size of the optical aperture, and the intensity decreases exponentially as the distance from the optical aperture increases.

  When a minute scatterer is inserted into this near field, the near field is scattered and near field light is formed. Near-field light, like the near-field, has a lateral extent only about the same as the size of the light aperture. Therefore, the optical aperture is formed smaller than the wavelength of the laser beam and the probe using near-field light can write data to the optical recording medium exceeding the diffraction limit and read data written to the optical recording medium. It becomes possible.

  Near-field light is weaker than propagating light. For this reason, near-field light is utilized by arranging the probe body close to the optical recording medium.

  In the probe using near-field light, the optical aperture is formed smaller than the wavelength of the laser beam in order to enable writing to the optical recording medium exceeding the diffraction limit. Therefore, the tip of the probe main body is very thin (approximately 1 μm).

  When writing or the like on the optical recording medium with such a probe, if the foreign matter adhering to the optical recording medium comes into contact with the probe, the tip of the probe is formed thin, so that the probe main body may be destroyed. In addition, as described above, since the probe main body is arranged close to the optical recording medium, there is a possibility that the foreign substance may come into contact with the probe main body even when a minute foreign substance is attached to the optical recording medium.

  Therefore, some conventional probes are provided with a protection portion for protecting the probe body. The protection part is arranged around the probe main body so as to protrude from one surface of the substrate. The protruding length of the protection part with respect to the substrate is substantially the same as the protruding length of the probe body with respect to the substrate.

  According to this probe, since the foreign substance can be prevented from coming into contact with the probe main body by the protection unit, the probe is not destroyed (see, for example, Patent Document 1).

JP 2003-322603 A

  By the way, when the probe is formed, the protruding length of the probe main body with respect to the substrate may be longer than the protruding length of the protective portion with respect to the substrate due to manufacturing variations. In such a case, it is not possible to prevent foreign matter from coming into contact with the probe main body by the protection unit, and the probe main body may be destroyed. In addition, when the foreign matter breaks the probe main body, the foreign matter is caught between the optical recording medium and the probe, which may cause damage to the optical recording medium.

  In view of the above circumstances, the present invention provides a probe and a probe array that do not damage the optical recording medium and that are not likely to be destroyed, and the probe is destroyed without damaging the optical recording medium. It is an object of the present invention to provide an optical pickup device that does not have a risk of being lost.

  In order to solve the above-described problems and achieve the object, a probe according to claim 1 is provided with a probe body provided with a minute opening (light opening) at the tip so as to protrude from one surface side of the substrate, In a probe that generates a near-field light in the vicinity of a minute opening, a protective film whose surface protrudes more than the probe body is formed on the surface of the protective part. It is characterized by.

  According to the first aspect of the present invention, since the protective film whose surface protrudes more than the probe body is formed on the surface of the protection portion, the protrusion length of the probe body with respect to the substrate is more protected against the substrate due to manufacturing variations. Even when the protrusion length of the portion becomes longer, the probe body is reliably protected by the protective film.

  According to a second aspect of the present invention, in the probe according to the first aspect, a light shielding film is provided on one surface side of the substrate so as to form a minute opening at the tip of the probe body, and the surface of the light shielding film and the minute opening are formed. A light-transmitting protective film is provided so as to cover the surface.

  According to the probe of the second aspect, the light-shielding film is provided on one surface side of the substrate so as to form the minute opening at the tip of the probe body, and the light-transmitting protective film covers the surface of the light-shielding film and the surface of the minute opening. Thus, the light-shielding film and the minute openings are not exposed to the outside air by the light-transmitting protective film.

  The invention according to claim 3 is characterized in that, in the probe according to claim 1 or 2, the amount of protrusion of the protective film with respect to the probe main body is set to be equal to or less than the wavelength of light irradiated from the minute aperture.

  According to the probe of the third aspect, since the protruding amount of the protective film with respect to the probe main body is set to be equal to or less than the wavelength of the light irradiated from the minute opening, the optical recording medium can be disposed close to the tip side of the probe main body. it can.

  According to a fourth aspect of the present invention, in the probe according to any one of the first to third aspects, the substrate is made of quartz, optical glass, or silicon.

  According to the probe of the fourth aspect, since the substrate is made of quartz, optical glass, or silicon, the attenuation rate of light transmitted through the probe main body can be reduced.

  The invention according to claim 5 is the probe according to any one of claims 1 to 4, wherein the protective film is made of diamond-like carbon, aluminum oxide, silicon carbide, silicon oxide, or silicon nitride. And

  According to the probe of the fifth aspect, since the protective film is made of diamond-like carbon, aluminum oxide, silicon carbide, silicon oxide, or silicon nitride, it has wear resistance.

  The invention according to claim 6 is the probe according to any one of claims 2 to 5, wherein the light-transmitting protective film is made of diamond-like carbon, aluminum oxide, silicon carbide, silicon oxide, or silicon nitride. It is characterized by that.

  According to the probe of the sixth aspect, since the light-transmitting protective film is made of diamond-like carbon, aluminum oxide, silicon carbide, silicon oxide, or silicon nitride, it has wear resistance.

  The invention according to claim 7 is characterized in that, in the probe according to claim 6, a protective film is formed by etching using a material different from the material used for the light-transmitting protective film.

  According to the probe of the seventh aspect, since the protective film is formed by etching using a material different from the material used for the light transmissive protective film, the protective film can be easily formed.

  The invention according to claim 8 is characterized in that, in the probe according to any one of claims 1 to 7, the protective film is formed by a mask sputtering method.

  According to the probe of the eighth aspect, since the protective film is formed by the mask sputtering method, the protective film can be easily formed.

  The invention according to claim 9 is the probe according to any one of claims 1 to 8, wherein the optical recording medium is disposed on the tip side of the probe body, and the protective portion is notched. The optical recording medium is arranged continuously around the probe main body, and the optical recording medium is arranged so that the probe main body is on the upstream side and the notch is on the downstream side with respect to the rotation direction of the optical recording medium. .

  According to the probe of the ninth aspect, the optical recording medium is disposed on the tip side of the probe main body, and the protective portion is continuously provided around the probe main body excluding the notch, and the optical recording medium is provided. Since the optical recording medium is arranged so that the probe main body is upstream and the notch is downstream with respect to the rotation direction of the optical recording medium, when writing to the optical recording medium using the probe, the optical recording medium is rotated. Due to the generated airflow, foreign matter between the probe main body and the protection portion can be discharged from the notch. Therefore, foreign matter does not accumulate between the probe main body and the protection part.

  The invention according to claim 10 is the probe according to any one of claims 1 to 8, wherein the optical recording medium is disposed on the tip side of the probe body, and is opposite to the probe body. A protection portion having a pointed portion that gradually tapers in the direction of the side, so that the pointed portion is on the upstream side and the probe body is on the downstream side with respect to the rotation direction of the optical recording medium. An optical recording medium is arranged.

  According to the probe of the tenth aspect, the probe has an optical recording medium disposed on the distal end side of the probe body, and includes a pointed portion that gradually tapers in a direction opposite to the probe body. Since the optical recording medium is arranged so that the pointed part is on the upstream side and the probe main body is on the downstream side with respect to the rotation direction of the optical recording medium, writing is performed on the optical recording medium using the probe. When performing the above, foreign matter in the vicinity of the pointed portion can be eliminated by the air flow generated by the rotation of the optical recording medium.

  An optical pickup device according to an eleventh aspect includes the probe according to any one of the first to tenth aspects, and uses the probe to write data to an optical recording medium, and / or Data written on the optical recording medium is read out.

  According to an eleventh aspect of the present invention, the probe according to any one of the first to tenth aspects is provided, and by using the probe, data is written on an optical recording medium and / or optical recording is performed. Since the data written on the medium is read out, an optical pickup device having the effects described in claims 1 to 10 can be provided.

  The invention according to claim 12 is provided with a plurality of probe bodies each having a minute opening at the tip so as to protrude from one surface side of the substrate, and arranges the probe bodies at a predetermined interval and protects the probe bodies. In the probe array that is provided with a protective part that protrudes from one side of the substrate and generates near-field light in the vicinity of the minute aperture, a protective film whose surface protrudes from the probe body is formed on the surface of the protective part It is characterized by.

  According to the probe array of the twelfth aspect, since the protective film whose surface protrudes from the probe main body is formed on the surface of the protective portion, the probe main body is reliably protected by the protective film.

  According to a thirteenth aspect of the present invention, in the probe array according to the twelfth aspect of the present invention, a light shielding film is provided on one side of the substrate so as to form a minute opening at the tip of the probe body, and the surface of the light shielding film and the minute opening are provided. A light-transmitting protective film is provided so as to cover the surface.

  According to the probe array of the thirteenth aspect, the light shielding film is provided on the one surface side of the substrate so as to form the minute opening at the tip of the probe body, and the light transmission protection is provided so as to cover the surface of the light shielding film and the surface of the minute opening. Since the film is provided, the light-shielding film and the minute openings are not exposed to the outside air by the light-transmitting protective film.

  The invention according to claim 14 is characterized in that, in the probe array according to claim 12 or 13, the amount of protrusion of the protective film with respect to the probe main body is set to be equal to or less than the wavelength of light irradiated from the minute aperture.

  According to the probe array of the fourteenth aspect, the amount of protrusion of the protective film with respect to the probe main body is set to be equal to or less than the wavelength of the light irradiated from the minute aperture, so that the optical recording medium is disposed close to the tip end side of the probe main body. Can do.

  The invention according to claim 15 is the probe array according to any one of claims 12 to 14, wherein the substrate is made of quartz, optical glass, or silicon.

  According to the probe array of the fifteenth aspect, since the substrate is made of quartz, optical glass, or silicon, the attenuation rate of light transmitted through the probe main body can be reduced.

  The invention according to claim 16 is the probe array according to any one of claims 12 to 15, wherein the protective film is made of diamond-like carbon, aluminum oxide, silicon carbide, silicon oxide, or silicon nitride. Features.

  According to the probe array of the sixteenth aspect, since the protective film is made of diamond-like carbon, aluminum oxide, silicon carbide, silicon oxide, or silicon nitride, it has wear resistance.

  The invention according to claim 17 is the probe array according to any one of claims 13 to 16, wherein the light-transmitting protective film is made of diamond-like carbon, aluminum oxide, silicon carbide, silicon oxide, or silicon nitride. It is characterized by comprising.

  According to the probe array of the seventeenth aspect, since the protective film is made of diamond-like carbon, aluminum oxide, silicon carbide, silicon oxide, or silicon nitride, it has wear resistance.

  The invention according to claim 18 is the probe array according to claim 17, wherein a protective film is formed by etching using a material different from the material used for the light-transmitting protective film. .

  According to the probe array of the eighteenth aspect, since the protective film is formed by etching using a material different from the material used for the light transmissive protective film, the protective film can be easily formed.

  The invention according to claim 19 is the probe array according to any one of claims 12 to 18, wherein the protective film is formed by a mask sputtering method.

  According to the probe array of the nineteenth aspect, since the protective film is formed by the mask sputtering method, the protective film can be easily formed.

  The invention according to claim 20 is the probe array according to any one of claims 12 to 19, wherein the optical recording medium is arranged on the tip side of the probe body, and the tip of the probe body A probe array in which an optical recording medium is arranged on the side, wherein a protective part is continuously provided around the probe main body except for a notch, and the probe main body is located upstream with respect to the rotation direction of the optical recording medium. In addition, the optical recording medium is arranged so that the cutout is on the downstream side.

  The probe array according to claim 20 is a probe array in which an optical recording medium is disposed on the distal end side of the probe body, wherein the optical recording medium is disposed on the distal end side of the probe body, and the protection portion is provided. Since the optical recording medium is arranged continuously around the probe body excluding the notch, and the probe body is on the upstream side and the notch is on the downstream side with respect to the rotation direction of the optical recording medium, When writing or the like on the optical recording medium using the probe array, foreign matter existing between the probe main body and the protection unit can be discharged from the notch by the air flow generated by the rotation of the optical recording medium. Therefore, foreign matter does not accumulate between the probe main body and the protection part.

  The invention according to claim 21 is the probe array according to any one of claims 12 to 19, wherein an optical recording medium is arranged on the tip side of the probe body, A protective portion having a pointed portion that gradually tapers in the opposite direction, and the pointed portion is on the upstream side and the probe body is on the downstream side with respect to the rotation direction of the optical recording medium. An optical recording medium is arranged so that

  The probe array according to claim 21 is a probe array in which an optical recording medium is arranged on the tip side of the probe body, and the pointed portion that gradually tapers in a direction opposite to the probe body. Since the optical recording medium is arranged so that the pointed portion is on the upstream side and the probe body is on the downstream side with respect to the rotation direction of the optical recording medium, the optical recording medium is arranged using the probe array. When writing or the like on the medium, foreign matter in the vicinity of the pointed portion can be eliminated by the air flow generated by the rotation of the optical recording medium.

  An optical pickup device according to claim 22 is provided with the probe array according to any one of claims 12 to 21, and by using the probe array, data is written to an optical recording medium, or / And reading out data written on the optical recording medium.

  According to the invention of claim 22, the probe array according to any one of claims 12 to 21 is provided, and by using the probe array, data is written to the optical recording medium, and / or Since the data written in the optical recording medium is read out, an optical pickup device having the effects described in claims 12 to 21 can be provided.

  According to the probe of the first aspect, since the protective film whose surface protrudes from the probe main body is formed on the surface of the protection portion, the protrusion length of the probe main body with respect to the substrate is more protected against the substrate due to manufacturing variations. Even when the length of the protrusion is longer than the protruding length of the portion, the probe main body can be reliably protected from coming into contact with the foreign matter by the protective film, and therefore the probe main body is not destroyed. In addition, since no foreign matter is caught between the optical recording medium and the probe body, the optical recording medium is not damaged.

  According to the second aspect of the present invention, the amount of protrusion of the protective film with respect to the probe main body is set to be equal to or less than the wavelength of the light irradiated from the minute aperture, so that the optical recording medium can be disposed close to the distal end side of the probe main body. Therefore, when data is written to the optical recording medium by the probe and when data written to the optical recording medium is read by the probe, it is possible to prevent the near-field light intensity from being lowered.

  According to the third aspect of the present invention, the light-shielding film is provided on the one surface side of the substrate so as to form the minute opening at the tip of the probe body, and the light-transmitting protective film covers the surface of the light-shielding film and the surface of the minute opening. Thus, the light-shielding film and the minute openings are not exposed to the outside air by the light-transmitting protective film. Therefore, there is no possibility that the surface of the light shielding film and the minute opening is corroded. Therefore, a long-life probe can be provided.

  According to the fourth aspect of the present invention, since the substrate is made of quartz, optical glass, or silicon, the attenuation rate of light transmitted through the probe main body can be reduced and the intensity of near-field light can be prevented from being lowered. .

  According to the invention of claim 5, since the protective film is made of diamond-like carbon, aluminum oxide, silicon carbide, silicon oxide, or silicon nitride, it has wear resistance. Therefore, a long-life probe can be provided.

  According to the invention of claim 6, since the light-transmitting protective film is made of diamond-like carbon, aluminum oxide, silicon carbide, silicon oxide, or silicon nitride, it has wear resistance. Therefore, a long-life probe can be provided.

  According to the seventh aspect of the invention, since the protective film is formed by etching using a material different from the material used for the light transmissive protective film, the protective film can be easily formed.

  According to the eighth aspect of the present invention, since the protective film is formed by the mask sputtering method, the protective film can be easily formed. Therefore, a probe that can be easily manufactured can be provided.

  According to the probe of the ninth aspect, the optical recording medium is disposed on the tip side of the probe main body, and the protective portion is continuously provided around the probe main body excluding the notch, and the optical recording medium is provided. Since the optical recording medium is arranged so that the probe main body is upstream and the notch is downstream with respect to the rotation direction of the optical recording medium, when writing to the optical recording medium using the probe, the optical recording medium is rotated. Due to the generated airflow, foreign matter between the probe main body and the protection portion can be discharged from the notch. Therefore, foreign matter does not accumulate between the probe main body and the protection part.

  According to the probe of the tenth aspect, the probe has an optical recording medium disposed on the distal end side of the probe body, and includes a pointed portion that gradually tapers in a direction opposite to the probe body. Since the optical recording medium is arranged so that the pointed part is on the upstream side and the probe main body is on the downstream side with respect to the rotation direction of the optical recording medium, writing is performed on the optical recording medium using the probe. When performing the above, foreign matter in the vicinity of the pointed portion can be eliminated by the air flow generated by the rotation of the optical recording medium. Therefore, foreign matter does not accumulate near the pointed portion.

  According to an eleventh aspect of the invention, the probe according to any one of the first to tenth aspects is provided, and data is written to the optical recording medium and / or written to the optical recording medium with the probe. Since the data is read, it is possible to provide an optical pickup device that exhibits the effects described in the first to tenth aspects.

  According to the probe array of the twelfth aspect, since the protective film whose surface protrudes from the probe main body is formed on the surface of the protective portion, the protrusion length of the probe main body relative to the substrate is longer than the substrate due to manufacturing variations. Even when the protruding length of the protective portion is longer, the probe main body can be reliably protected from coming into contact with the foreign matter by the protective film, so that the probe main body is not destroyed. In addition, since no foreign matter is caught between the optical recording medium and the probe body, the optical recording medium is not damaged. Furthermore, by using the relationship that (actual scanning speed) × (number of microscopic apertures) becomes (apparent scanning speed), writing data to the optical recording medium while reducing the scanning speed, Data written on the recording medium can be read.

  According to the probe array of the thirteenth aspect, the amount of protrusion of the protective film with respect to the probe main body is set to be equal to or less than the wavelength of the light irradiated from the minute aperture, so that the optical recording medium is disposed close to the tip end side of the probe main body. Therefore, when data is written to the optical recording medium by the probe array and when data written to the optical recording medium is read by the probe array, it is possible to prevent the near-field light intensity from being lowered. .

  According to the probe array of the fourteenth aspect, the light-shielding film is provided on the one surface side of the substrate so as to form the minute opening at the tip of the probe main body, and the light transmission protection is provided so as to cover the surface of the light-shielding film and the surface of the minute opening. Since the film is provided, the light-shielding film and the minute openings are not exposed to the outside air by the light-transmitting protective film. Therefore, there is no possibility that the surface of the light shielding film and the minute opening is corroded. Therefore, a long-life probe array can be provided.

  According to the probe array of the fifteenth aspect, since the substrate is made of quartz, optical glass, or silicon, the attenuation rate of light transmitted through the probe body can be reduced, and the intensity of near-field light can be prevented from being lowered. it can.

  According to the probe array of the sixteenth aspect, since the protective film is made of diamond-like carbon, aluminum oxide, silicon carbide, silicon oxide, or silicon nitride, it has wear resistance. Therefore, a long-life probe array can be provided.

  According to the probe array of the seventeenth aspect, since the light-transmitting protective film is made of diamond-like carbon, aluminum oxide, silicon carbide, silicon oxide, or silicon nitride, it has wear resistance. Therefore, a long-life probe array can be provided.

  According to the probe array of the eighteenth aspect, since the protective film is formed by etching using a material different from the material used for the light transmissive protective film, the protective film can be easily formed. Therefore, a probe array that can be easily manufactured can be provided.

  According to the probe array of the nineteenth aspect, since the protective film is formed by the mask sputtering method, the protective film can be easily formed. Therefore, a probe array that can be easily manufactured can be provided.

  The probe array according to claim 20 is a probe array in which an optical recording medium is arranged on the distal end side of the probe body, wherein the protection portion is continuously provided around the probe body except for the cutout, Since the optical recording medium is arranged so that the probe main body is on the upstream side and the notch is on the downstream side with respect to the rotation direction of the recording medium, the optical recording medium is used when writing to the optical recording medium using the probe array. Due to the airflow generated by the rotation of, foreign matter between the probe main body and the protection part can be discharged from the notch. Therefore, foreign matter does not accumulate between the probe main body and the protection part.

  The probe array according to claim 21 is a probe array in which an optical recording medium is arranged on the tip side of the probe body, and the pointed portion that gradually tapers in a direction opposite to the probe body. Since the optical recording medium is arranged so that the pointed portion is on the upstream side and the probe body is on the downstream side with respect to the rotation direction of the optical recording medium, the optical recording medium is arranged using the probe array. When writing or the like on the medium, foreign matter in the vicinity of the pointed portion can be eliminated by the air flow generated by the rotation of the optical recording medium. Therefore, foreign matter does not accumulate near the pointed portion.

  According to the invention of claim 22, the probe array according to any one of claims 12 to 21 is provided, and by using the probe array, data is written to the optical recording medium, and / or Since the data written in the optical recording medium is read out, an optical pickup device having the effects described in claims 12 to 21 can be provided.

  Exemplary embodiments of an optical pickup device, a planar probe array, and a planar probe according to the present invention will be described below in detail with reference to the accompanying drawings. In the following, for convenience of explanation, an optical pickup device including a planar probe will be described.

  FIGS. 1-1 and 1-2 show a planar probe (probe) 10. The planar probe 10 includes a substrate 11, a light shielding film 12, and a protective film 13.

  The substrate 11 is formed in a flat plate shape using a light transmissive material such as quartz, optical glass, or silicon. One surface of the substrate 11 is provided with a probe main body 14 and a protection portion 15 one by one so as to protrude from the plate surface.

  The probe body 14 is formed in a truncated cone shape. The protection part 15 is formed in an annular shape around the probe body 14. The protruding length of the protection unit 15 with respect to the substrate 11 is the same as the protruding length of the probe body 14 with respect to the substrate 11.

  The light shielding film 12 is made of a light-shielding material, and is provided on one side of the substrate 11 except for the distal end of the probe main body 14 and the upper surface of the protection portion 15 so as to provide an optical opening (micro opening) 16 at the distal end of the probe main body 14. It is formed in a manner that covers. The light aperture 16 has, for example, a circular shape. The diameter of the light aperture 16 is smaller than the wavelength of laser light described later.

  The substrate 11 and the light shielding film 12 described above can be formed by using a conventional method (for example, Japanese Patent Application Laid-Open Nos. 2003-317031, 2003-322603, and 2004-5905).

The protective film 13 is a 100 nm thick film made of silicon oxide (SiO ₂ ) by sputtering after a stainless steel mask having an opening is disposed on one surface side of the substrate 11 so that the opening is above the probe body 14. It is formed by providing (using a so-called mask sputtering method). If the protective film 13 is formed in this way, the protective part 15 whose surface protrudes 100 nm from the probe main body 14 can be formed. The amount of protrusion is equal to or less than the wavelength of laser light described later.

  As shown in FIG. 2, the optical pickup device has an optical recording medium 20 that rotates at a predetermined interval on the distal end side of the probe main body 14, and a laser (light collecting means) ) The probe main body 14 is transmitted while being squeezed at 18 to generate near-field light 19 having a spot diameter smaller than the wavelength of the laser light at the tip of the probe main body 14, and the near-field light 19 causes the optical recording medium 20 to store data Writing or reading of data written on the optical recording medium 20 is performed.

  According to the flat probe 10, the protective film 13 whose surface protrudes from the probe main body 14 is formed on the surface of the protective portion 15, so that the protruding length of the probe main body 14 with respect to the substrate 11 is longer due to manufacturing variations. Even when the protruding length of the protection portion 15 with respect to the substrate 11 is longer, the probe main body 14 can be reliably protected from coming into contact with the foreign matter by the protective film 13, so that the probe main body 14 is not destroyed. In addition, since no foreign matter is caught between the optical recording medium 20 and the probe main body 14, the optical recording medium 20 is not damaged.

  In addition, since the protruding amount of the protective film 13 with respect to the probe main body 14 is set to be equal to or less than the wavelength of the laser light irradiated from the optical opening 16, the optical recording medium 20 can be disposed close to the distal end side of the probe main body 14. When writing data to the optical recording medium 20 by the flat probe 10 and reading data written to the optical recording medium 20 by the flat probe 10, it is possible to prevent the near-field light 19 from being reduced in intensity. .

  In addition, since the substrate 11 is made of quartz, optical glass, or silicon, the attenuation rate of light transmitted through the probe main body 14 can be reduced, and the intensity of the near-field light 19 can be prevented from being lowered.

  Furthermore, since the protective film 13 is formed by the mask sputtering method, the protective film 13 can be easily formed. Therefore, it is possible to provide the planar probe 10 that can be easily manufactured.

  In the above-described embodiments, the protective film 13 is formed using the mask sputtering method. However, the present invention is not limited to this, and may be formed using a mask vapor deposition method or a lift-off method. Of course, the protective film 13 is not limited to the mask sputtering method, the mask vapor deposition method, and the lift-off method. For example, a silicon oxide film is provided on the entire surface of one surface of the substrate 11, and then the tip side of the probe body 14 The protective film 13 may be formed by etching silicon oxide.

Furthermore, in the above-described embodiments, the protective film 13 is formed by a single layer made of silicon oxide. However, the present invention is not limited thereto, and the material of the protective film 13 is diamond-like carbon (DLC), aluminum oxide (Al ₂ O ₃ ), silicon carbide (SiC), or silicon nitride (Si ₃ ) instead of silicon oxide. N ₄ ) may be used to form any one of the materials, or may be formed by mixing a plurality of these materials and silicon oxide. The number of layers forming the protective film is not limited to a single layer, and a plurality of layers may be stacked.

  Therefore, since the protective film 13 is made of diamond-like carbon, aluminum oxide, silicon carbide, silicon oxide, or silicon nitride, it has wear resistance. Accordingly, it is possible to provide a long-life planar probe 10.

  FIG. 3 is a plan view showing a first modification of the planar probe according to the embodiment of the present invention. 3, components having the same configurations as those in FIGS. 1-1, 1-2, and 2 are given the same reference numerals, and descriptions thereof are omitted. The planar probe 10a shown in the figure is provided with a protective portion 15 continuous above and on both sides of the probe main body 14 in FIG. 3 instead of providing the annular protective portion 15. In other words, the protective portion 15a is provided continuously around the probe body 14 except for the lower notch 17 in FIG. In the planar probe 10 a, the optical recording medium 20 is arranged so that the probe main body 14 is on the upstream side and the notch 17 is on the downstream side with respect to the rotation direction of the optical recording medium 20.

  When writing in the optical recording medium 20 with the flat probe 10 arranged in this way, foreign matter between the probe main body 14 and the protection unit 15a is caused by the air flow generated by the rotation of the optical recording medium 20. It can be discharged from the notch 17. Therefore, foreign matter does not accumulate between the probe main body 14 and the protection part 15a.

  FIG. 4 is a plan view showing a second modification of the planar probe according to the embodiment of the present invention. 4, components having the same configurations as those in FIGS. The illustrated flat probe 10b is provided with a protective portion 15b having a pointed portion 21 that gradually tapers in a direction opposite to the probe main body 14 instead of providing the annular protective portion 15. In the planar probe 10b, the optical recording medium 20 is arranged such that the pointed portion 21 is on the upstream side and the probe main body 14 is on the downstream side with respect to the rotation direction of the optical recording medium 20.

  In the case where writing is performed on the optical recording medium 20 with the flat probe 10b arranged in this way, foreign matter in the vicinity of the pointed portion 21 can be eliminated by the air flow generated by the rotation of the optical recording medium 20. it can. Therefore, no foreign matter is deposited near the pointed portion 21.

  FIG. 5 is a sectional side view showing a third modification of the planar probe according to the embodiment of the present invention. In FIG. 5, the same components as those in FIGS. The illustrated planar probe 10 c includes a light transmissive protective film 26 in addition to the configuration including the substrate 11, the light shielding film 12, and the protective film 13.

The planar probe 10c can be obtained as follows, for example. First, the substrate 11 and the light shielding film 12 are formed using a conventional method (for example, Japanese Patent Application Laid-Open No. 2004-5905). Next, a 100-nm-thick silicon oxide (SiO ₂ ) film (light-transmitting protective film) is formed on the entire surface of one surface of the substrate 11. Next, a silicon nitride (Si ₃ N ₄ ) film (protective film 13) having a thickness of 100 nm is formed on the entire surface of the silicon oxide. Next, a resist pattern having a photoresist covering the protective portion 15 is formed on the surface of silicon nitride. Next, the silicon nitride is removed by dry etching that does not remove the silicon oxide and removes the silicon nitride. Finally, the planar probe 10c can be obtained by removing the resist pattern.

  The light-transmitting protective film 26 thus provided covers the surface of the light shielding film 12 and the surface of the light opening 16.

  According to the flat probe 10c, since the light-transmitting protective film 26 is provided so as to cover the surface of the light-shielding film 12 and the surface of the light opening 16, the light-transmitting protective film 26 and the light-shielding film 12 and the light opening 16 is not exposed to the open air. Therefore, there is no possibility that the surfaces of the light shielding film 12 and the light opening 16 are corroded. Accordingly, it is possible to provide a long-life planar probe 10c. In addition, since the protective film 13 is formed by dry etching using a material different from the material used for the light transmissive protective film 26, the protective film 13 can be easily formed.

  In the above-described embodiment, the light transmissive protective film 26 is formed by a single layer made of silicon nitride. However, the present invention is not limited to this, and the material of the light-transmitting protective film 26 may be formed using any one of diamond-like carbon, aluminum oxide, and silicon carbide instead of silicon nitride. Alternatively, a mixture of a plurality of these materials and silicon nitride may be used. The number of layers for forming the light-transmitting protective film 26 is not limited to a single layer, and a plurality of layers may be stacked.

  Therefore, since the light-transmitting protective film 26 is made of diamond-like carbon, aluminum oxide, silicon carbide, silicon oxide, or silicon nitride, it has wear resistance.

  In the embodiment described above, the planar probe 10 having one probe body 14 on one surface side of the substrate 11 has been described. However, the present invention is not limited thereto, and the present invention is also applicable to a planar probe array that includes a plurality of probe bodies 14 on one surface side of the substrate 11 and arranges the probe bodies 14 in a predetermined interval, for example, a grid pattern. Can do.

  According to the planar probe array, by utilizing the relationship that (actual scanning speed) × (number of light apertures 16) becomes (apparent scanning speed), optical recording is performed while reducing the scanning speed. Data can be written on the medium 20 and data written on the optical recording medium 20 can be read.

It is a top view of the planar probe which concerns on this invention. It is a cross-sectional side view of the planar probe which concerns on this invention. It is explanatory drawing which shows the case where data is written in the optical recording medium using the planar probe. It is the top view which showed the 1st modification of the planar probe which concerns on this invention. It is the top view which showed the 2nd modification of the planar probe which concerns on this invention. It is the cross-sectional side view which showed the 3rd modification of the planar probe which concerns on this invention.

Explanation of symbols

10 flat probe (Probe)
10a plane probe (Probe)
10b flat probe (Probe)
10c plane probe (Probe)
DESCRIPTION OF SYMBOLS 11 Board | substrate 12 Light shielding film 13 Protective film 14 Probe main body 15 Protection part 15a Protection part 15b Protection part 16 Optical opening part (micro opening)
17 Notch 19 Near-field light 20 Optical recording medium 21 Pointed portion 26 Light transmissive protective film

Claims (22)

Providing a probe body with a minute opening at the tip so as to protrude from one side of the substrate, and providing a protection portion protruding from one side of the substrate to protect the probe body,
In a probe that generates near-field light in the vicinity of a minute aperture,
A probe characterized in that a protective film whose surface protrudes from the probe body is formed on the surface of the protective part.   The light-shielding film is provided on one side of the substrate so as to form a minute opening at the tip of the probe body, and a light-transmitting protective film is provided so as to cover the surface of the light-shielding film and the surface of the minute opening. The probe according to 1.   The probe according to claim 1 or 2, wherein an amount of protrusion of the protective film with respect to the probe main body is set to be equal to or less than a wavelength of light emitted from the minute aperture.   The probe according to any one of claims 1 to 3, wherein the substrate is made of quartz, optical glass, or silicon.   The probe according to any one of claims 1 to 4, wherein the protective film is made of diamond-like carbon, aluminum oxide, silicon carbide, silicon oxide, or silicon nitride.   6. The probe according to claim 2, wherein the light-transmitting protective film is made of diamond-like carbon, aluminum oxide, silicon carbide, silicon oxide, or silicon nitride.   7. The probe according to claim 6, wherein a protective film is formed by etching using a material different from that used for the light-transmitting protective film.   The probe according to any one of claims 1 to 7, wherein the protective film is formed by a mask sputtering method. A probe that arranges an optical recording medium on the tip side of the probe body,
A protective part is provided continuously around the probe body except for the notch,
9. The probe according to claim 1, wherein the optical recording medium is arranged such that the probe main body is on the upstream side and the notch is on the downstream side with respect to the rotation direction of the optical recording medium. . A probe that arranges an optical recording medium on the tip side of the probe body,
Provided with a protective part with a pointed part that gradually tapers in the direction opposite to the probe body,
The optical recording medium is arranged such that the pointed portion is on the upstream side and the probe main body is on the downstream side with respect to the rotation direction of the optical recording medium. probe. Comprising the probe according to any one of claims 1 to 10,
An optical pickup device that writes data to an optical recording medium and / or reads data written to the optical recording medium by using the probe. A plurality of probe main bodies each having a minute opening at the tip are provided so as to protrude from one surface side of the substrate, and the probe main bodies are arranged at a predetermined interval, and the protective portion protrudes from the one surface side of the substrate so as to protect the probe main bodies. the provided made,
In each probe array that generates near-field light in the vicinity of a minute aperture,
A probe array characterized in that a protective film whose surface protrudes from the probe body is formed on the surface of the protective part.   The light-shielding film is provided on one surface side of the substrate so as to form a minute opening at the tip of the probe body, and a light-transmitting protective film is provided so as to cover the surface of the light-shielding film and the surface of the minute opening. 13. The probe array according to 12.   14. The probe array according to claim 12, wherein an amount of protrusion of the protective film with respect to the probe main body is set to be equal to or less than a wavelength of light emitted from the minute aperture.   The probe array according to any one of claims 12 to 14, wherein the substrate is made of quartz, optical glass, or silicon.   The probe array according to any one of claims 12 to 15, wherein the protective film is made of diamond-like carbon, aluminum oxide, silicon carbide, silicon oxide, or silicon nitride.   The probe array according to any one of claims 13 to 16, wherein the light-transmitting protective film is made of diamond-like carbon, aluminum oxide, silicon carbide, silicon oxide, or silicon nitride.   18. The probe array according to claim 17, wherein a protective film is formed by etching using a material different from that used for the light-transmitting protective film.   The probe array according to any one of claims 12 to 18, wherein the protective film is formed by a mask sputtering method. A probe array in which an optical recording medium is arranged on the tip side of the probe body,
A protective part is provided continuously around the probe body except for the notch,
The probe according to any one of claims 12 to 19, wherein the optical recording medium is arranged so that the probe main body is on the upstream side and the notch is on the downstream side with respect to the rotation direction of the optical recording medium. array. A probe array in which an optical recording medium is arranged on the tip side of the probe body,
Provided with a protective part with a pointed part that gradually tapers in the direction opposite to the probe body,
21. The optical recording medium according to claim 12, wherein the optical recording medium is arranged such that the pointed portion is on the upstream side and the probe main body is on the downstream side with respect to the rotation direction of the optical recording medium. of the probe array. Comprising the probe array according to any one of claims 12 to 21,
An optical pickup device that writes data to an optical recording medium and / or reads data written to the optical recording medium by using the probe array.

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