JP2006258309A - Fan filter unit - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To realize thin thickness of a fan filter unit body, to enhance fan efficiency of a fan single body to accomplish energy-saving and to make an air speed distribution of air blown from a filter uniform. <P>SOLUTION: The fan filter unit has a box-like chamber 6 for storing two fan motor units 3 at diagonal positions; the filter 7 provided in a downstream side of the chamber 6; a pair of support units 4 for supporting the fan motor units 3 at a center; support erected plates 5 integrally provided on both ends of the support units; and a partition plate 8 standingly provided between the fan motor units 3. The support erected plate 5 of the support unit 4 is arranged in a range clamped by the support unit 4 and an outer periphery of the fan 1 in plan view. Thereby, collision of air in the chamber 6 is prevented and the air speed distribution to the filter 7 can be made uniform. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a fan filter unit that is used in an environment that requires clean air in a manufacturing process of a semiconductor, a liquid crystal, and the like and is equipped with a plurality of fans.

  Conventionally, this type of fan filter unit is known in which a wind speed distribution is made uniform by preventing collision of airflow by a partition plate (see, for example, Patent Document 1).

  The fan filter unit will be described below with reference to FIG.

  As shown in the figure, by arranging a plurality of small fans 102 inside the chamber 101, the size and weight can be reduced and the thickness of the main body of the chamber 101 can be reduced. However, since a plurality of fans 102 are installed inside the chamber 101, the partition plate 103 is arranged between the fans 102 so that the airflows blown out from the individual fans do not collide with each other, so that the wind speed distribution is made uniform. I am doing so.

  In addition, this type of fan filter unit is known in which the inside of the chamber is divided symmetrically with respect to the partition plate so as to make the wind speed distribution uniform (see, for example, Patent Document 2).

  The fan filter unit will be described below with reference to FIG.

As shown in the drawing, when the chamber 110 is not symmetric with respect to the partition plate, the air flow of the fan 112 is different when the chamber 110 is not symmetric with respect to the partition plate 111. Therefore, a balance part 114 having the same shape as that of the existing part 113 is newly added at a symmetrical position so that the airflow is made uniform.
Japanese Patent Application Laid-Open No. 6-226022 Japanese Utility Model Publication No. 7-13417

  In such a conventional fan filter unit, collision of airflow is prevented by the partition plate, but there is a region where the airflow from the fan is unevenly distributed before reaching the partition plate, and the fan and partition plate are separated from each other. Therefore, there is a problem that it is not always possible to obtain a uniform wind speed distribution for the filter, and it is required to first uniform the wind speed distribution in the chamber and finally to uniform the wind speed distribution passing through the filter. ing.

  In addition, in order to make the flow of air flow symmetrical, there is a problem that a balance part having the same shape must be newly added at the symmetrical position, and the flow is symmetrical around the partition plate without adding a balance part. Is required.

  In addition, when the partition plate has a simple flat plate shape, sufficient fan efficiency cannot be obtained, and there is a problem that air cannot reach the filter area located on the back side of the fan, improving fan efficiency. And ventilation to the back side of the fan is required.

  The present invention solves such a conventional problem, and it is possible to make the air velocity distribution in the chamber uniform and to make the air flow inside the chamber symmetric with respect to the center of the partition plate. It is an object to provide a fan filter unit that can improve the fan efficiency by changing the air flow, and can also ventilate between the fan and the filter, and can uniform the distribution of the wind speed supplied to the filter.

  In order to achieve the above object, a fan filter unit of the present invention includes a fan motor unit composed of a fan and a motor, a box-shaped chamber that houses two fan motor units at diagonal positions, and the chamber Between the fan motor unit, a filter for purifying air provided downstream, a pair of support members that support the fan motor unit in the center, a support stand provided integrally at both ends of the support device, and the fan motor unit. The partition plate is provided, and the partition plate is arranged in a range sandwiched between the support and the outer periphery of the fan as viewed from above.

  By this means, a fan filter unit capable of improving the wind speed distribution in the chamber and making the wind speed distribution supplied to the filter uniform can be obtained.

  Another means is that a flat partition plate is provided at the center between the fan motor units, orthogonal to the support upright plate.

  By this means, it is possible to obtain a fan filter unit capable of making the air flow inside the chamber symmetric with respect to the center of the partition plate and uniforming the wind speed distribution supplied to the filter.

  Further, the other means is provided by inclining the partition plate on the plane in the direction of expanding the blowing direction.

  By this means, it is possible to obtain a fan filter unit in which the wind speed distribution in the chamber can be made uniform, the shape of the partition plate can be changed to increase fan efficiency, and the wind speed distribution supplied to the filter can be made uniform.

  Another means is that a bent portion is formed in a flat shape on the partition plate in the direction of expanding the blowing direction.

  By this means, it is possible to obtain a fan filter unit in which the wind speed distribution in the chamber can be made uniform, the shape of the partition plate can be changed to increase fan efficiency, and the wind speed distribution supplied to the filter can be made uniform.

  Another means is that the partition plate is substantially S-shaped.

  By this means, it is possible to obtain a fan filter unit in which the wind speed distribution in the chamber can be made uniform, the shape of the partition plate can be changed to increase fan efficiency, and the wind speed distribution supplied to the filter can be made uniform.

  Another means is to form two inner bent portions bent in opposite directions on the partition plate, and this inner bent portion changes the direction of the airflow to each fan direction.

  By this means, a fan filter unit can be obtained which can ventilate in the direction of the filter covered with the fan and can uniformize the wind speed distribution supplied to the filter.

  Another means is that an inner bent portion provided on the partition plate is positioned relatively below the lower end of the fan.

  By this means, a fan filter unit can be obtained which can also ventilate between the fan and the filter and can uniformize the wind speed distribution supplied to the filter.

  Another means is to provide an opening in the inner bent portion of the partition plate.

  By this means, a fan filter unit can be obtained in which the wind speed distribution in the chamber can be made uniform, the air can be passed between the fan and the filter, and the wind speed distribution supplied to the filter can be made uniform.

  According to the present invention, the flow of the wind blown radially from the two fans is first collected by the support stand and guided in the direction of the partition plate, and further, the flow direction of the wind is regulated by the partition plate. It is possible to provide a fan filter unit that has an effect of suppressing fan interference.

  In addition, since the airflow inside the chamber can be made symmetrical with respect to the partition plate by using the support standing plate of the support that supports the fan motor unit, the air velocity distribution in the chamber can be made uniform without adding another part. .

  Further, by changing the direction and shape of the partition plate to reduce the expansion of the air flow direction and the pressure fluctuation, the fan efficiency can be improved and the fan filter unit capable of realizing energy saving can be provided.

  In addition, the airflow direction can be changed to the direction of the filter covered with the fan by the inner bending part of the partition plate, and the dead space on the filter can be reduced by guiding it directly under the fan rotating in the chamber. It is possible to provide a fan filter unit that can be eliminated and the wind speed distribution can be made uniform.

  The invention according to claim 1 of the present invention is provided with a fan motor unit composed of a fan and a motor, a box-shaped chamber accommodating two fan motor units at diagonal positions, and a downstream side of the chamber. A filter for cleaning air, a pair of support members that support the fan motor unit at the center, a support stand plate provided integrally at both ends of the support device, and a partition plate standing between the fan motor units are provided. The partition plate is arranged in a range sandwiched between the support and the outer periphery of the fan when viewed from the plane, and the support vertical plate of the support is in the direction of air flow blown radially from the individual fans. The air flow distribution in the chamber can be reduced by restricting the air flow and opening it by moving it along the partition plate. An effect that can be made uniform.

  The invention according to claim 2 of the present invention is such that a flat partition plate is provided at the center between the fan motor units perpendicular to the support upright plate. By suppressing the interference of the blown out airflow and separating the inside of the chamber symmetrically, the same wind speed distribution can be formed in each area, and the entire wind speed distribution can be made uniform.

  The invention according to claim 3 of the present invention is such that the partition plate is provided at an angle of 90 degrees or more with respect to the support standing plate when viewed from the lower surface in the direction of expanding the blowing direction. Has an effect of making the wind speed distribution uniform and improving the fan efficiency.

  The invention according to claim 4 of the present invention is such that a bent portion is formed on the partition plate as viewed from the lower side in a direction in which the blowing direction is expanded, and the side wall of the partition plate and the outer peripheral portion of the fan by the support standing plate Has the effect of improving the fan efficiency by guiding the air flow to the closest point, increasing the flow velocity of the air blown from the fan, and then expanding the air flow outward along the partition plate.

  In the invention according to claim 5 of the present invention, the partition plate is substantially S-shaped when viewed from the lower surface, and the air flow radiated from the fan is moved along the partition plate, After increasing the air flow velocity at the location where the side wall of the fan and the outer periphery of the fan are closest to each other, the air flow is expanded again along the partition plate, thereby improving the fan efficiency.

  In the invention according to claim 6 of the present invention, two inner bent portions bent in opposite directions are formed on the partition plate, and the inner bent portions are formed by changing the direction of the air flow in the respective fan directions. Yes, the air direction is changed by the inner bending part so that the air flow guided to the partition plate does not flow into the filter as it is, and the air flow can be guided to a range where the wind is difficult to reach such as a filter surface covered with a fan. It has the action.

  In the invention according to claim 7 of the present invention, the inwardly bent portion provided in the partition plate is positioned relatively below the lower end of the fan, and the inwardly bent portion is more efficient between the fan and the filter. The airflow can be guided and the dead space of the filter can be eliminated.

  The invention according to claim 8 of the present invention is such that an opening is provided in the inner bent portion of the partition plate, and the inner bent portion of the partition plate has a wind guided between the fan and the filter, and the inner bent portion. It distribute | divides to the wind supplied also below, and it has the effect | action that it can ventilate uniformly with respect to a filter.

(Embodiment 1)
As shown in FIGS. 1 and 2, the fan motor unit 3 includes a small turbo fan 1 and a driving motor 2, and the two fan motor units 3 are fixed to a box-shaped chamber 6 by a support 4. . A pair of support upright plates 5 a and 5 b are integrally provided on the support 4, and a partition plate 8 is vertically suspended on a diagonal line in the chamber 6, and the two fan motor units 3 are symmetrically positioned with respect to the partition plate 8. Is arranged.

  Further, as shown in FIG. 2, a filter 7 for purifying air is attached to the lower part of the chamber 6, and a part of the air blown radially from the two fans 1 is restricted in the wind direction by the support upright plate 5a. Since the air is guided to the partition plate 8, the wind does not collide with each other, and the air is passed through the filter 7 so as not to disturb the wind in the chamber 6.

  Further, as shown in FIG. 1, the partition plate 8 is reduced in size so that the partition plate 8 enters a range sandwiched between the support 4 and the fan 1 when viewed from the lower surface of the chamber 6.

  In the above-described configuration, the airflow blown radially from the individual fans 1 is regulated by the support standing plate 5a of the support 4 and moves toward the partition plate 8. The moved airflow is prevented from being interfered by the partition plate 8. Further, the wind speed can be made uniform by diffusing the wind into the chamber 6 and supplying it to the filter 7.

  In addition, since the fan motor unit 3 is arranged at a symmetrical position with respect to the partition plate 8, the flow of wind is almost the target, and no components that disturb the symmetric flow are provided in the chamber 6, so that the wind speed distribution of both is distributed. Can be kept the same.

(Embodiment 2)
As shown in FIG. 3, the partition plate 8 is linearly formed in the direction in which the blowing direction is expanded, that is, with respect to the support standing plate 5 a that regulates the blowing direction, with an angle of 90 degrees or more when viewed from the lower surface. It is arranged. The partition plate 8 is located at the center between the two fan motor units 3.

  In the above configuration, since the airflow from the fan 1 whose direction is regulated by the support upright plate 5a moves along the side wall of the partition plate 8, the flow path gradually expands, so that it can move with less blowing resistance. The pressure fluctuation is reduced, and the blowing efficiency by the fan 1 can be improved. That is, by arranging the partition plate 8 with less pressure fluctuation with respect to the airflow direction, the fan efficiency can be improved and the turbulence of the wind speed can be reduced, and the wind speed distribution in the chamber 6 can be averaged. The wind speed supplied to the filter 7 can be made uniform.

(Embodiment 3)
As shown in FIG. 4, reverse bent portions 8 a and 8 b are provided on the flat partition plate 8, and the bent portions 8 a and 8 b are oriented to expand the blowing direction. The partition plate 8 is located at the center between the two fan motor units 3.

  In the above configuration, since the airflow from the fan 1 whose direction is regulated by the support standing plate 5a moves along the side wall of the partition plate 8, there are bent portions 8a and 8b. The distance from the outer peripheral portion of 1 is first slightly expanded, then is slightly reduced, and is further greatly expanded. As a result, once the flow velocity from the fan 1 is increased, the airflow can be expanded toward the blowout side, and by energizing the airflow blown out from the fan 1, it can be diffused far and wide in the blowing direction. The air speed can be made uniform as a whole by supplying all the corners of the air.

(Embodiment 4)
As shown in FIG. 5, the partition plate 8 is bent into an S shape.

  In the above configuration, since the airflow from the fan 1 whose direction is regulated by the support standing plate 5a moves along the side wall of the partition plate 8, the partition plate 8 has an S-shape. The distance between the fan 1 and the outer peripheral portion of the fan 1 is smoothly enlarged and reduced slightly, and is finally greatly enlarged. Thus, after the flow velocity from the fan 1 is increased smoothly, the air flow can be expanded on the blow-out side, and the air flow blown out from the fan 1 is smoothly energized to improve the blowing efficiency and diffuse widely. It is possible to supply to every corner of the filter 7 and to uniformize the wind speed as a whole.

(Embodiment 5)
As shown in FIGS. 6 and 7, two inner bent portions 9A and 9B bent in a substantially horizontal direction are formed on a partition plate 8 that receives airflows blown from two fans 1A and 1B, and the inner bent portions 9A and 9B are Each is bent in the opposite direction and protrudes toward each fan 1A, 1B. Moreover, the front ends of the inner bent portions 9A and 9B are relatively positioned below the lower end portions of the fans 1A and 1B.

  In the above configuration, the airflow from the fans 1A and 1B flows along the partition plate 8 with the direction restricted by the support standing plate 5a, and is further bent by the inner bent portions 9A and 9B in a substantially horizontal direction. The wind direction is changed to the direction. This prevents the airflow from flowing straight into the filter 7 and guides it to a range where the wind covered by the fans 1A and 1B is difficult to reach.

  In addition, by positioning the inner bent portions 9A and 9B relatively below the lower ends of the fans 1A and 1B, the air flow can be efficiently guided between the fans 1A and 1B and the filter 7, and the dead of the filter 7 The space can be eliminated and a uniform wind speed distribution can be obtained for the filter 7.

(Embodiment 6)
As shown in FIG. 8, openings 9c are provided in the inner bent portions 9A and 9B of the partition plate 8, so that airflow can be supplied to the side of the filter 7 directly below the inner bent portions 9A and 9B through the openings 9c. ing.

  In the above configuration, the airflow from the fans 1A and 1B flows along the partition plate 8 with the direction restricted by the support standing plate 5a, and is further bent by the inner bent portions 9A and 9B in a substantially horizontal direction. The wind direction changes in the direction and the air flows in the direction of the filter 7 by the openings 9c provided in the inner bent portions 9A and 9B. By distributing the air flow in this way, the air is supplied to the range covered with the fans 1A and 1B and difficult to reach the wind, and is also supplied directly below the inner bent portions 9A and 9B. A good wind speed distribution can be formed.

  This fan filter unit has the effect of uniforming the air velocity distribution on the blowout surface while securing the blowout air volume and thinning the fan filter unit body, saving space in places that require clean spaces such as semiconductor manufacturing plants. In addition, it can be installed in multiple fan filter units and can be used for applications where the wind speed distribution is uniform.

1 is a bottom perspective view of Embodiment 1 of a fan filter unit of the present invention. (A) AA side sectional view of FIG. 1 (b) BB side sectional view of FIG. Bottom perspective view of the second embodiment Bottom perspective view of the third embodiment Bottom perspective view of the fourth embodiment Bottom perspective view of the fifth embodiment AA side sectional view of FIG. Bottom perspective view of the sixth embodiment Bottom perspective view of a conventional fan filter unit Bottom perspective view of another conventional fan filter unit

Explanation of symbols

1 Fan 1A Fan 1B Fan 2 Motor 3 Fan Motor Unit 4 Support 5a Support Standing Plate 5b Support Standing Plate 6 Chamber 7 Filter 8 Partition Plate 9A Inner Bend 9B Inner Bend 9c Opening

Claims (8)

A fan motor unit composed of a fan and a motor, a box-shaped chamber for storing two fan motor units at diagonal positions, a filter for purifying air provided downstream of the chamber, and the fan motor A pair of supporting tools that support the unit at the center, a support standing plate that is integrally provided at both ends of the supporting tool, and a partition plate that stands between the fan motor units; A fan filter unit arranged in a range sandwiched between a support and the outer periphery of the fan. The fan filter unit according to claim 1, wherein a flat partition plate is provided at a center between the fan motor units so as to be orthogonal to the support upright plate. 3. The fan filter unit according to claim 1, wherein the partition plate is provided at an angle of 90 degrees or more with respect to the support standing plate when viewed from the lower surface in a direction in which the blowing direction is enlarged. The fan filter unit according to claim 1 or 2, wherein a bent portion is formed on the partition plate as viewed from the lower surface in a direction in which the blowing direction is enlarged. The fan filter unit according to claim 1 or 2, wherein the partition plate is substantially S-shaped when viewed from the lower surface. The fan filter unit according to claim 1 or 2, wherein two inner bent portions bent in opposite directions are formed on the partition plate, and the inner bent portions are formed by changing the direction of the air flow in the respective fan directions. The fan filter unit according to claim 6, wherein an inner bent portion provided on the partition plate is positioned relatively below the lower end of the fan. The fan filter unit according to claim 6 or 7, wherein an opening is provided in the inner bent portion of the partition plate.

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