JP2006242838A - Inspecting apparatus and inspecting method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an inspecting apparatus and an inspecting method, capable of improving reliability of an inspection, automating a judgment of the existence of a defect, and making the inspection speeded up. <P>SOLUTION: The inspecting apparatus 1 which inspects a circumferential surface in a rotation direction of a cam 7 being an object to be inspected, has a sensor head 19 equipped with a sensor for acquiring three-dimensional information of the surface of the cam 7. The sensor head 19 is made up movably up and down through a Z-axis vertical drive motor 16 such that the sensor is always perpendicular to the surface of the cam 7 while accompanying the rotation of the cam 7. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an inspection apparatus and an inspection method for inspecting a surface defect such as a cam surface of a cam shaft and a difference in shape.

Conventionally, as an inspection apparatus of this kind, as disclosed in Patent Document 1, an apparatus for inspecting a cam surface surface defect by scanning the cam surface of a camshaft with a camera such as a CCD has been proposed. .
In this inspection apparatus, if there is a defect such as a nest or a black skin residue on the cam surface, it can be determined as a defective product from the change in the amount of light received by the optical system of the camera.
Japanese Patent Publication No.6-1182

  However, in such an inspection device, since it is not possible to obtain the surface information including the three-dimensional information of the cam surface, that is, the information in the depth direction, even when oil, chips, dust, etc. are attached to the cam surface, Since the received light amount of the camera optical system is judged as a defective product, there is a problem that the reliability of the inspection result is lacking.

  The present invention has been devised in view of the above-described conventional problems, and is one of the purposes of improving the reliability of inspection, and one of the purposes of automating the determination of the presence / absence of defects. In the inspection apparatus for inspecting the rotation direction circumferential surface of the inspection object formed as a rotating body, the depth direction of the inspection surface on the rotation direction circumferential surface is the claim 1. Information acquisition means for acquiring surface three-dimensional information including the information on the surface, and defect determination means for determining whether or not the inspection object has a defect based on the surface three-dimensional information acquired by the information acquisition means. That is.

  The inspection object may be rotated about a fixed axis, and the information acquisition unit may acquire the surface three-dimensional information of the entire circumference in the rotation direction by rotating the inspection object. That is.

  According to a third aspect of the present invention, the information acquisition unit includes an information acquisition unit that acquires the surface three-dimensional information, and the information acquisition unit is configured to be always perpendicular to the inspection surface. is there.

  According to a fourth aspect of the present invention, the information acquisition unit is configured such that a distance between the information acquisition unit and the inspection surface is always a constant distance.

  According to a fifth aspect of the present invention, the information acquisition means is means for acquiring a depth dimension of a concave portion formed in the inspection surface as information in the depth direction.

  The information acquisition means is means for acquiring the depth dimension by detecting a change in the magnetic field of the inspection surface.

  The defect determination means is a means for determining that the inspection object is free of defects when the depth dimension is a predetermined value or less.

  In addition, claim 8 has an area calculation means for calculating the area of the recess, and the defect determination means, when the value of the area of the recess calculated by the area calculation means is outside the first range, It is means for determining that the inspection object has a defect.

  Further, the present invention includes a rotation direction dimension calculation unit that calculates a rotation direction maximum dimension of the recess, and the defect determination unit has a value of the rotation direction maximum dimension calculated by the rotation direction dimension calculation unit. It is means for determining that the inspection object has a defect at times other than the second range.

  The tenth aspect includes an inclination direction dimension calculating means for calculating a maximum dimension in a direction inclined by a predetermined angle with respect to the rotation direction of the recess, and the defect determining means is calculated by the inclination direction dimension calculating means. When the value of the maximum dimension in the direction inclined by a predetermined angle with respect to the rotation direction is outside the third range, it is means for determining that the inspection object is defective.

  The eleventh aspect includes image processing means for performing image processing on the surface three-dimensional information and display means for displaying the image processed three-dimensional information.

  According to a twelfth aspect of the present invention, the image processing means performs image processing for changing a color tone according to a depth degree of the concave portion, and the display means has a color tone changed according to the depth degree of the concave portion. It is also a means for displaying the surface three-dimensional information.

  Further, the display means is means for displaying a determination result by the defect determination means.

  In addition, the inspection object includes a second inspection object having the same shape and the same phase in a rotation axis direction, and the information acquisition unit includes the inspection object and the surface three-dimensional information of the second inspection object. The defect determination means is a means that can simultaneously determine whether or not the inspection object and the second inspection object are defective.

  An inspection method according to claim 15 is an inspection method for inspecting a rotation-direction circumferential surface of an inspection object formed as a rotating body, and includes (a) information on a depth direction of an inspection surface on the rotation-direction circumferential surface. (B) calculating at least one of the area of the recess formed in the inspection surface and the length of the recess based on the acquired surface 3D information; and (c) ) When the depth of the recess as information in the depth direction is not more than a predetermined value, or when the area of the recess and the length dimension of the recess are not more than a second predetermined value, the inspection object has a defect. If the depth of the recess is greater than a predetermined value and at least one of the area of the recess and the length of the recess is greater than a second predetermined value, the inspection object has a defect. It is determined that there is.

The present invention relates to an information acquisition means for acquiring surface three-dimensional information including information on a depth direction of an inspection surface on a rotation direction peripheral surface in an inspection apparatus for inspecting the rotation direction peripheral surface of an inspection object formed as a rotating body. And a defect determination means for determining whether or not the inspection object has a defect based on the surface three-dimensional information acquired by the information acquisition means, thereby rotating the circumferential surface of the inspection object formed as a rotating body Since the surface three-dimensional information of the upper inspection surface is acquired and it is determined whether there is a defect in the inspection object based on the surface three-dimensional information, an accurate inspection result can be obtained and the inspection reliability can be obtained. The property is improved.
Moreover, the determination of the presence or absence of a defect can be automated.

  Further, the inspection object is rotated around the fixed axis, and the information acquisition means is a means for acquiring the surface three-dimensional information of the circumferential surface in the rotation direction by rotating the inspection object, so that only the inspection object is rotated. Thus, it is possible to acquire the three-dimensional surface information of the entire circumferential surface in the rotation direction to be inspected.

  Further, the information acquisition means has an information acquisition unit for acquiring the surface three-dimensional information, and the information acquisition unit is configured to be always perpendicular to the inspection surface. There is no difference in the situation, and the surface three-dimensional information on the inspection surface can be acquired with high accuracy.

  In addition, since the information acquisition unit is configured such that the distance between the information acquisition unit and the inspection surface is always a constant distance, the interval between the information acquisition unit and the inspection surface is always a constant distance, and the rotation position of the inspection target Thus, there is no difference in the situation of information acquisition, and the surface three-dimensional information on the inspection surface can be acquired with high accuracy.

  The information acquisition means is means for acquiring the depth dimension of the recess formed on the inspection surface as information in the depth direction, so that the depth dimension of the recess formed on the inspection surface as information in the depth direction. Will be able to get.

  In addition, the information acquisition means is a means for acquiring a depth dimension by detecting a change in the magnetic field on the inspection surface, so that the depth dimension can be acquired by acquiring a change in the magnetic field. Become.

  Further, the defect determining means is a means for determining that there is no defect in the inspection object when the depth dimension is equal to or smaller than a predetermined value. Since it is determined that there is no defect when it is equal to or less than a predetermined value, only a true defect can be determined as a defect.

  In addition, it has an area calculation means for calculating the area of the recess, and the defect determination means determines that the inspection object has a defect when the value of the area of the recess calculated by the area calculation means is outside the first range. Since it is determined that there is a defect when there is a recess having an area other than the first range on the inspection surface to be inspected, only the true defect can be determined as a defect. Become.

  Further, it has a rotation direction dimension calculation means for calculating the rotation direction maximum dimension of the recess, the defect determination means, when the value of the rotation direction maximum dimension calculated by the rotation direction dimension calculation means is outside the second range, Since it is a means for determining that there is a defect in the inspection object, it is determined that there is a defect when the inspection surface to be inspected has a recess having a maximum rotation direction dimension other than the second range. It is possible to determine only as a defect.

  In addition, there is provided an inclination direction dimension calculating means for calculating a maximum dimension in a direction inclined by a predetermined angle with respect to the rotation direction of the recess, and the defect determining means is predetermined with respect to the rotation direction calculated by the inclination direction dimension calculating means. When the value of the maximum dimension in the angle-inclined direction is outside the third range, it is a means for determining that the inspection object has a defect, so that a predetermined angle inclination with respect to the rotation direction of the inspection surface of the inspection object Since it is determined that there is a defect when there is a concave portion having a maximum dimension other than the third range in the direction, the only true defect can be determined as a defect.

  Further, by providing image processing means for image processing the surface three-dimensional information and display means for displaying the image processed surface three-dimensional information, information on the inspection surface to be inspected can be visually recognized. .

  The image processing means performs image processing for changing the color tone according to the depth of the recess, and the display means displays the three-dimensional surface information whose color tone is changed according to the depth of the recess. By being a means, the shape of the concave portion can be visually recognized in three dimensions.

  Further, the display means is a means for displaying the determination result by the defect determination means, so that the determination result can be visually recognized.

  The inspection object includes a second inspection object having the same shape and the same phase in the rotation axis direction, and the information acquisition unit is a unit capable of acquiring the inspection object and the surface three-dimensional information of the second inspection object at the same time. The means is a means capable of simultaneously determining whether or not the inspection object and the second inspection object are defective, so that the presence or absence of the defect of the inspection object formed in the same shape and the same phase can be simultaneously determined. Therefore, the inspection speed can be increased.

  Further, the inspection method is an inspection method for inspecting a rotation direction circumferential surface of an inspection object formed as a rotating body. (A) Acquires surface three-dimensional information including information on a depth direction of an inspection surface on the rotation direction circumferential surface. And (b) calculating at least one of the area of the recess formed on the inspection surface and the length of the recess based on the acquired three-dimensional surface information, and (c) the recess as information in the depth direction. If the depth of the recess is less than a predetermined value, or if the area of the recess and the length dimension of the recess are less than the second predetermined value, it is determined that there is no defect in the inspection object, and the depth of the recess is greater than the predetermined value. And, if at least one of the area of the recess and the length dimension of the recess is larger than the second predetermined value, it is determined that there is a defect in the inspection object, so an accurate inspection result is obtained, The reliability of the inspection is improved.

Embodiments of the present invention will be described below with reference to the drawings.
FIG. 1 is a schematic front view of a cam surface inspection device that inspects the surface state of a cam surface of a camshaft, which is an example of an inspection device of the present embodiment, and FIG. 2 is a side view of FIG. FIG. 3 is a plan view showing an arrangement configuration of main parts.
In the figure, an inspection apparatus 1 includes a camshaft presser 4 provided with a chuck 3 on a machine base 2, and a fixed shaft 5 disposed opposite to the camshaft presser 4. The shaft 6 is configured to be rotatably supported. Cams 7 and 7 having a width of 14 mm and having the same phase are arranged adjacent to each other on the camshaft 6.

The camshaft presser 4 can be moved laterally via the cam retainer slide 9 by the operation of the cam retainer cylinder 8, and the fixed shaft 5 can be moved laterally via the slide 12 by the operation of the cylinder 11. The camshaft 6 can be detachably supported.
In addition, the camshaft presser 4 is provided with a θ-axis rotation motor 10 so that the camshaft 6 can be rotated via the θ-axis rotation motor 10.
On the slide base 13, cam surface measuring mechanisms 14, 14, 14 for measuring the surface state of the cam surface at a predetermined interval are disposed. The slide base 13 is an X-axis moving motor 24. Thus, it can be moved in the X-axis direction via the X-axis slide 15.

  As shown in FIG. 2, cam surface measuring mechanisms 14 for measuring the surface state of each cam surface are arranged on the left and right sides of the cam 7, and a Z-axis vertical drive motor 16 is erected on the upper surface side. When the Z-axis vertical drive motor 16 is rotated, the ball screw 17 is rotated. As the ball screw 17 rotates, the sensor head 19 moves up and down in the Z-axis direction via the Z-axis slide 18. It is configured to be able to move.

FIG. 4 is a schematic view schematically showing the sensor head 19, and FIG. 5 is a detailed view showing details of the sensor 19a.
As shown in FIG. 4, the sensor head 19 is provided with a sensor 19 a on the cam 7 side that can detect the depth direction dimension of the surface of the cam 7 as the surface state of the cam surface of the cam 7.
As shown in FIG. 5, in the embodiment, the sensor 19a is obtained by attaching a 0.1 mm × 0.1 mm Hall element 19c to the approximate center of a 1.3 mm × 1.3 mm housing 19b. Ten pieces were arranged in a horizontal row at intervals.
Therefore, every time the camshaft 6 makes one revolution, 10 depths (1.4 mm intervals) can be acquired as the line direction data of the cam 7 in the depth direction on the surface of the cam 7.
When the cam 7 is formed with a width of 14 mm as in this embodiment, the sensor head 19 is moved 13 times by 0.1 mm in the width direction (X-axis direction) of the cam 7, that is, the camshaft 6 is moved 14 times. By rotating, the depth direction dimension of the surface of the cam 7 can be acquired as surface data.

In consideration of variations in inclination and spacing that occur when the housing 19b is attached to the sensor head 19 and the Hall element 19c is attached to the housing 19b, the sensor head 19 is moved by 0.1 mm in the X-axis direction by 13 mm. It may be moved more than once.
By acquiring data in duplicate in this way, more accurate surface data can be acquired.

A Y-axis scanning mechanism 21 is connected to the side of the cam surface measuring mechanism 14 for measuring the surface state of each cam surface. The Y-axis scanning mechanism 21 is connected via the Y-axis slide base 20. It is fixed on the slide base 13.
The Y-axis copying mechanism 21 abuts on the cam 7 and can be moved in the Y-axis direction via the Y-axis slide base 20 by being pushed by the cam 7 when the cam 7 is rotated together with the rotation of the cam shaft 6. Thus, the distance between the sensor 19a and the cam surface can be always kept constant. In the embodiment, the Y-axis copying mechanism 21 is constituted by a cylindrical roller 21a.

  Thus, by configuring the Y-axis copying mechanism 21 with the cylindrical roller 21a, the contact form with the cam 7 is point contact as shown in an enlarged view in FIG. It can be pressed as much as possible, and when the contact portion with the cam 7 is worn, it can be easily handled by rotating the roller 21a.

8 and 9 are schematic views schematically showing an example of the Y-axis scanning mechanism 21 that uses a sphere 21b instead of the roller 21a.
When the cam 7 having the concave shape as shown in FIG. 7 can be accurately copied, the Y-axis copying mechanism 21 and the sensor head 19 are integrated with the base 25 as shown in FIG. What is necessary is just to comprise so that it can fix and the structure 26 fixed integrally can move to the Y-axis direction via the Y-axis slide base 20. FIG.

  Further, the cam 7 having the concave shape as shown in FIG. 7 cannot be followed, but as shown in FIG. 9, a structure in which the spherical body 21 b is formed integrally with the sensor head 19 can also be adopted. According to this structure, even when the cams 7, 7, 7 having the same phase are not arranged adjacent to each other on the camshaft 6, the distance between the cam surface 7 a and the sensor 19 a can be always kept constant. it can.

  FIG. 10 is a schematic diagram schematically showing a Y-axis copying mechanism using a flat plate. Although the functions described above are somewhat inferior to those of the roller 21a and the sphere 21b, the Y-axis copying mechanism 21 may be configured by a flat plate 21c as shown in FIG.

  As described above, the Z-axis vertical drive motor 16 is provided so that the sensor head 19 can be moved up and down in the Z-axis direction, as shown in FIG. 11 or FIG. When measuring 7a, it is preferable that the sensor 19a is positioned on the normal line of the cam curved surface, and the sensor 19a is moved up and down by the rotational position of the cam 7 so that the sensor 19a is always perpendicular to the inspection surface of the cam surface 7a. It is necessary to move.

In addition, as shown in FIG. 3, the cam for measuring the surface state of the left and right cam surfaces so that the adjacent cams 7 and 7 can be measured with the adjacent cams 7 being used as a copying reference. The surface measuring mechanism 14 and the Y-axis copying mechanism 21 are arranged, and are configured to be able to measure a pair of cams 7 and 7 having the same phase at a time using the adjacent cams 7 and 7 as a copying reference. Yes.
By arranging in this way, it is possible to simultaneously determine the presence or absence of defects and the difference in shape of the cams 7 and 7 formed in the same shape and the same phase, and the speed can be increased.

As shown in FIG. 1, the control device 22 is configured as a microprocessor centered on a CPU. In addition to the CPU, a ROM that stores a processing program, a RAM that temporarily stores data, I / O port not provided.
From the control device 22, drive control signals to the X-axis movement motor 24, Z-axis vertical drive motor 16, θ-axis rotation motor 10, drive control signals to the chuck 3 and cylinder 11, image display signal to the display 23, etc. Is output.

Next, the operation of the cam surface inspection apparatus according to the embodiment thus configured will be described.
FIG. 13 is a flowchart illustrating an example of the surface depth dimension measurement process of the cam surface 7a executed by the control device 22 of the embodiment. This process is repeatedly executed at predetermined time intervals when the rotation of the camshaft 6 is started in order to measure the surface state of the cam surface 7a.

When the surface depth dimension measurement process is executed, the CPU of the control device 22 first reads the cam rotation angle θ and the cam rotation number N (step S20), and determines whether the cam rotation number N is a value of 14 or not. A process for performing the determination is executed (step S21). This is for determining whether or not the surface depth direction dimension D of the cam 7 has been acquired as surface data, and as described above, the surface depth direction dimension D of the cam 7 by rotating the cam 7 14 times. This is because it can be acquired as surface data.
When the cam rotation speed N is not 14, the determination is made as to whether or not the cam rotation angle θ is 360 ° (step S22). When it is determined that the cam rotation angle θ is not 360 °, the coordinate Zs is set as the movement position of the sensor head 19 in the Z-axis direction (step S23), and the motor is controlled so that the position of the sensor head 19 becomes the coordinate Zs ( Step S24).

In the embodiment, the setting of the coordinate Zs as the Z-axis direction moving position is obtained by previously obtaining the relationship between the rotation angle θ of the cam 7 and the Z-axis coordinate and storing it in the ROM as a Z-axis direction moving position setting map. When a rotation angle θ of 7 is given, the corresponding Z-axis coordinates are set from the Z-axis direction movement position setting map. And the surface depth direction dimension D of the cam 7 in the coordinate Zs is measured (step S25), and this process is complete | finished. In the embodiment, the measurement of the surface depth direction dimension D of the cam 7 is performed by reading the voltage value from the Hall element 19c.
In the embodiment, the coordinate Xs is incremented by the value 0.1 in accordance with the size (0.1 mm × 0.1 mm) of the Hall element 19c. The value for incrementing the coordinate Xs may be changed in accordance with the accuracy.

  When it is determined in step S21 that the cam rotation speed N is 14, that is, when the surface depth direction dimension D of the cam 7 can be acquired as surface data, the cam rotation speed N is set to 0 (step S21). S26) The coordinate Xs that is the movement position of the sensor head 19 in the X-axis direction is set to 0 (step S27), and the coordinate Zs is set as the movement position of the sensor head 19 in the Z-axis direction (step S23). The motor is controlled so that the position of the head 19 becomes the coordinates Xs and the coordinates Zs (step S24). And the surface depth direction dimension D of the cam 7 in the coordinate Xs and the coordinate Zs is measured (step S25), and this process is complete | finished.

  On the other hand, when it is determined in step S22 that the cam rotation angle θ is 360 °, that is, when it is determined that the camshaft 6 has made one rotation, the cam rotation number N is incremented by 1 (step S28). The coordinate Xs that is the movement position of the sensor head 19 in the X-axis direction is incremented by 0.1 (step S29), and the coordinate Zs is set to the movement position of the sensor head 19 in the Z-axis direction (step S23). The motor is controlled so that the position 19 becomes the coordinates Xs and the coordinates Zs (step S24). And the surface depth direction dimension D of the cam 7 in the coordinate Xs and the coordinate Zs is measured (step S25), and this process is complete | finished.

  Then, the CPU of the control device converts the surface depth direction dimension D of the cam 7 measured in this way into a digital value, further adds a corresponding gradation, and stores it as a cam surface data in a predetermined area of the RAM. Store in the set cam surface data storage area. Here, in the embodiment, the gradation is given by setting the value on a flat surface having no irregularities on the surface of the cam 7 (more precisely, the digital value after AD conversion) to the gradation 0, and setting the upper limit value of the Hall voltage measurement amplifier as the upper limit value. The gradation is 255, and the voltage difference between the upper limit value and the planar value is divided by 256.

  When the cam surface depth dimension processing is thus performed and the cam surface data representing the surface state of the cam 7 is acquired, the control device determines whether or not the cam 7 is defective. . Whether or not the surface of the cam 7 is defective is determined by a defect determination process illustrated in FIG.

Hereinafter, the defect determination process of FIG. 14 will be described.
When the defect determination process is executed, the CPU of the control device first reads the cam surface data (step S30), and the surface depth direction dimension D of the cam 7 in the read cam surface data is greater than or equal to a threshold value Dref (for example, 1 mm). (Step S31), and processing for determining whether there is a portion where the surface depth direction dimension D of the cam 7 is equal to or greater than the threshold value Dref is executed (step S32). Here, the threshold value Dref is set as a dimension value in the surface depth direction managed as a surface defect of the cam 7, and is determined by the usage application of the cam 7 or the like.
The determination as to whether or not there is a portion where the surface depth direction dimension D of the cam 7 is equal to or greater than the threshold value Dref is performed by determining whether or not there is a gradation corresponding to the threshold value Dref or higher in the cam surface data. In the embodiment, a so-called filtering process performed by a well-known image processing is performed, in which all the gradations of the places equal to or higher than the threshold value Dref are replaced with the value 256, and all the gradations of the places less than the threshold value Dref are replaced with the value 0. The determination is made by determining whether or not there is a place where the gradation is 256.

When it is determined that there is a portion where the surface depth direction dimension D of the cam 7 is greater than or equal to the threshold value Dref, the area S of the portion greater than or equal to the threshold value Dref, the maximum length Lc in the rotational direction, and the maximum length perpendicular to the rotational direction. The length Lr is calculated (step S33), and the area S, the maximum length Lc, and the maximum length Lr are compared with the threshold value Sref, the threshold value Lcref, and the threshold value Lrref (steps S34 to S36). Here, the threshold value Sref, the threshold value Lcref, and the threshold value Lrref are set as an area managed as a surface defect, a length in the rotation direction, and a length perpendicular to the rotation direction. It is done.
Therefore, the comparison of the area S, the maximum length Lc and the maximum length Lr with the threshold value Sref, the threshold value Lcref and the threshold value Lrref is when the area S is equal to or greater than the threshold value Sref, or when the length Lc is equal to or greater than the threshold value Lcref, or When the length Lr is equal to or greater than the threshold value Lrref, it means that the surface of the cam 7 has a defect, the area S is less than the threshold value Spef, the maximum length Lc is less than the threshold value Lcref, and the maximum length Lr is the threshold value Lrref. If it is less than that, it means that the surface of the cam 7 is not defective.

If there are a plurality of defects on the surface of the cam 7 as shown in the display state diagram of the defect portion displayed on the display unit illustrated in FIG. 15, the area S and the maximum length Lc are set as separate defects. And the maximum length Lr is calculated.
The determination of whether or not each is a different defect can be made, for example, by determining whether or not the pixel P (black portion in the figure) to which the value 256 is assigned as a gradation is connected. That is, if there is a pixel P to which the value 256 is assigned to any of the eight pixels P around the pixel P to which the value 256 is assigned as the gradation, the pixel P to which the value 256 is assigned is connected. If it is determined that the defect is not another defect and there is no pixel P to which the value 256 is assigned in any of the surrounding eight pixels P, it is determined that the pixel P to which the value 256 is not connected is not connected. To do.

  Thus, when it is determined that the surface of the cam 7 is defective based on the area S, the maximum length Lc, and the maximum length Lr, “defect” is displayed on the display 23 (step S38). The process ends.

  On the other hand, when it is determined that there is no defect on the surface of the cam 7 based on the area S, the maximum length Lc, and the maximum length Lr, “no defect” is displayed on the display 23 (step S37). The process ends.

According to the cam surface inspection apparatus of the embodiment described above, the surface depth direction dimension D of the cam surface is measured, the area S of the portion where the measured surface depth direction dimension D is equal to or greater than the threshold value Dref, and the rotation of the cam 7. Since it is determined whether or not there is a defect based on the maximum length Lc in the direction and the maximum length Lr in the direction perpendicular to the rotation direction, it is possible to automatically determine whether or not there is a defect and adhere to the cam surface. Since oil, chips, dust and the like are not judged as defects, the reliability of inspection can be improved.
In addition, the distance between the sensor 19a and the inspection surface of the cam 7 is always kept constant by the Y-axis scanning post 21, and the sensor head 19 is cammed by moving the sensor head 19 in the Z-axis direction by the Z-axis vertical drive motor 16. Since it is configured to be always perpendicular to the surface, the surface depth direction dimension D of the cam surface can be measured more accurately.
In addition, since the display 23 displays whether there is a defect or not, the operator can check the determination result.

  In the cam surface inspection device of the embodiment, the cam shaft 6 is rotated and the cam 7 is rotated to measure the surface depth direction dimension D of the entire circumference of the cam 7. It is possible to measure the surface depth direction dimension D of the entire circumference of the cam 7 by rotating it around.

  In the cam surface inspection apparatus of the embodiment, the distance between the sensor 19a and the cam surface is always kept constant, and the sensor 19a is configured to be perpendicular to the cam surface. As long as the directional dimension D can be measured accurately, the distance between the sensor 19a and the cam surface may not always be kept constant, and the sensor 19a may not be configured to be perpendicular to the inspection surface of the cam 7. Absent.

In the cam surface inspection apparatus of the embodiment, the Hall element 19c capable of detecting a change in magnetic flux density is used as the sensor 19a. However, a magnetoresistive element or an eddy current may be used.
Moreover, it is not limited to what detects the change of a magnetic field, For example, you may use a laser etc., if the surface depth direction dimension D of the cam 7 can be measured.

  In the cam surface inspection apparatus of the embodiment, a sensor 19a having a 1.3 mm × 1.3 mm housing 19b with a 0.1 mm × 0.1 mm Hall element 19c attached to the approximate center is laterally spaced at 0.1 mm intervals. Although ten pieces are arranged in one row, one housing 19b with a Hall element 19c attached thereto as shown in FIG. 16 is arranged on the sensor head 19, or the housing 19b is not used as shown in FIG. In addition, the dimensions, intervals, the number of arrangement, and the arrangement location of the housing 19b and the hall element 19c may be in any form, such as one in which a row of hall elements 19c cut out from the wafer is directly attached to the sensor head 19.

  In the cam surface inspection apparatus of the embodiment, the maximum length Lr in the direction perpendicular to the rotation direction of the cam 7 is calculated, but a predetermined angle (for example, 30 °, 45 °, etc.) with respect to the rotation direction of the cam 7. The maximum length in the inclined direction may be calculated, or a plurality of maximum lengths may be calculated by a combination thereof.

  In the cam surface inspection apparatus of the embodiment, the area S of the portion where the surface depth direction dimension D of the cam 7 is equal to or greater than the threshold value Dref, the maximum length Lc in the rotation direction, and the maximum length Lr in the direction perpendicular to the rotation direction are calculated. However, it is possible to calculate only one of these or only two of them.

  In the cam surface inspection apparatus of the embodiment, any one of the area S where the surface depth dimension D of the cam 7 is equal to or greater than the threshold value Dref, the maximum length Lc in the rotation direction, and the maximum length Lr in the direction perpendicular to the rotation direction. Is determined to be defective if it is equal to or greater than threshold value Sref, threshold value Lcref, threshold value Lrref, but if all are equal to or greater than threshold value Sref, threshold value Lcref, threshold value Lrref, it is determined that there is a defect. If the two are equal to or greater than the threshold value Sref, the threshold value Lcref, and the threshold value Lrref, it may be determined that there is a defect.

  In the cam surface inspection apparatus of the embodiment, only the presence / absence of a defect is displayed on the display unit 23, but in addition to this, the cam surface data of the cam 7 as shown in FIG. 15 may be displayed.

In the cam surface inspection device according to the embodiment, the cam surfaces of the pair of cams 7 and 7 in which the adjacent cams 7 and 7 are formed in the same shape and the same phase have been described, but the adjacent cams 7 and 7 are different. You may inspect the cam surface of the cams 7 and 7 formed in the shape different phase.
In this case, as shown in FIG. 18 showing an example of a modification of the cam surface inspection device, the cam shaft 6 having the cams 7 and 7 formed in the same shape and the same phase as the cams 7 and 7 to be inspected (may be a master work) Are arranged in parallel to the camshaft 6 on which the cams 7 and 7 to be inspected are formed, the sensor head 19 is located on the side of the cams 7 and 7 to be inspected, and the Y-axis is imprinted on the side of the camshaft 6 (master work) arranged in parallel The mechanism 21 may be disposed.

In the cam surface inspection apparatus of the embodiment, the Y-axis scanning mechanism 21 is configured to always keep the distance between the sensor 19a and the cam surface constant, but the distance between the sensor 19a and the cam surface is always kept constant. If possible, the Y-axis copying mechanism 21 may be omitted.
In this case, the surface depth dimension measurement process illustrated in FIG. 19 is executed instead of the surface depth dimension measurement process illustrated in FIG.

The surface depth dimension measurement process of FIG. 19 differs from the surface depth dimension measurement process illustrated in FIG. 13 only in steps S23 and S24, and is otherwise the same as the surface depth dimension measurement process of FIG. Therefore, here, only a description of different parts will be given.
In the surface depth dimension measurement process of FIG. 19, in addition to the coordinate Zs as the Z-axis direction movement position of the sensor head 19, the coordinate Ys as the Y-axis direction movement position of the sensor head 19 is set (step S43). A process of controlling the motor is performed so that the position 19 becomes the coordinates Xs, the coordinates Ys, and the coordinates Zs (step S44).
The setting of the coordinate Ys as the Y-axis direction movement position and the coordinate Zs as the Z-axis direction movement position is performed, for example, by previously obtaining the relationship between the rotation angle θ of the cam 7 and the Y-axis coordinates and the Z-axis coordinates. Is stored in the ROM, and the corresponding Y-axis coordinates and Z-axis coordinates may be set from the movement position setting map when the rotation angle θ of the cam 7 is given.

In the cam surface inspection apparatus according to the embodiment, the relationship between the rotation angle θ of the cam 7 and the Z-axis coordinates is obtained in advance so that the sensor 19a is always perpendicular to the inspection surface of the cam surface 7a, and the Z-axis direction moving position is set. Although the map is stored in the ROM, when measuring the surface state of the cam surface 7a, first, the Z-axis coordinate is measured so that the sensor 19a and the inspection surface of the cam surface 7a are always vertical. It is also good.
In this case, the pre-measurement setting process illustrated in FIG. 20 is executed. This process is performed before the surface state of the cam surface 7a is measured, that is, before the surface depth dimension measurement process of FIG. 13 is performed.

  When the pre-measurement setting process of FIG. 20 is executed, the CPU of the control device performs the cam rotation process (step S100) exemplified in FIG. 21, the sensor head movement process (step S102) exemplified in FIG. 22, and the example shown in FIG. Data storage processing (step S104) is executed, and then it is determined whether or not the cam rotation angle θ is 360 ° (step S106), and if it is determined that the cam rotation angle θ is 360 °, the cam rotation is performed. The angle θ is set to 0 ° (step S108), and this process ends.

As described above, the cam rotation process (step S100), the sensor head movement process (step S102), and the data storage process (step S104) are repeatedly executed until the cam rotation angle θ reaches 360 °, whereby the sensor 19a and the cam 19 The Z-axis coordinate where the inspection surface of the surface 7a is always vertical can be measured over the entire circumference of the cam 7. In the present modification, the pre-measurement setting process is performed by moving the sensor head 19 from the initial position Z ₀ (the lowermost position of the cam 7) to the upper limit value Zmax as illustrated in FIG.

[Cam rotation processing]
In the cam rotation process, as shown in FIG. 21, the CPU of the control device executes a process of reading the flag f1 (step S200), and determines whether or not the flag f1 is 1 (step S202). Here, the flag f1 indicates whether or not the cam rotation angle θ and the coordinate Zs as the Z-axis movement position of the sensor 19a are stored in the storage area in the data storage process described in detail later. The value 1 is set when the angle θ and the coordinate Zs are stored in the storage area, and the value 0 is set when they are not stored.

  When the cam rotation process is executed for the first time, since the flag f1 is set to the value 0, no process is performed and this process is terminated as it is. When the cam rotation angle θ and the coordinate Zs are stored in the storage area, the value 1 is set in the flag f1, so the cam rotation angle θ is incremented by 1 ° (step S204) and the flag f1 is set to the value 0. Then (step S206), the motor 10 is controlled so that the cam rotation angle θ is obtained (step S208), and this process is terminated. In this modification, the cam rotation angle θ is incremented by 1 °. However, when the measurement is more precise, the cam rotation angle θ may be less than 1 °, and a reduction in measurement time is required. For example, the value may be larger than 1 °.

[Sensor head movement processing]
In the sensor head moving process, as shown in FIG. 22, the CPU of the control device reads the flag f2 (step S300) and executes a process of determining whether or not the flag f2 is 1 (step S302). Here, the flag f2 indicates whether or not the coordinate Zs as the movement position of the sensor head 19 in the Z-axis direction has reached the upper limit value Zmax. When the coordinate Zs has reached the upper limit value Zmax, the flag f2 has a value. When the flag f2 is set to 1 and not reached, the flag f2 is set to 0.

  When it is determined that the flag f2 has the value 1, the coordinate Zs is incremented by the value 0.1 (step S304), and the motor M1 is controlled so that the movement position of the sensor head 19 in the Z-axis direction becomes the coordinate Zs ( Step S306), this process is terminated. In this modification, the coordinate Zs is incremented by 0.1, but may be smaller than 0.1 if more precise measurement is required, and a reduction in measurement time is required. In such a case, the value may be larger than 0.1.

  When it is determined that the flag f2 is the value 1, the coordinate Zs is set to 0 (step S308), the flag f2 is set to 0 (step S310), and the movement position of the sensor head 19 in the Z-axis direction is set. The motor M1 is controlled so that becomes the coordinate Zs (value 0) (step S306), and this process is terminated.

[Data storage processing]
In the data storage process, as shown in FIG. 23, the CPU of the control device executes a process of reading the cam rotation angle θ, the coordinate Zs as the movement position of the sensor head 19 in the Z-axis direction, and the Hall voltage Eh at the coordinate Zs ( Step S400). Next, the read Hall voltage Eh is compared with the previously stored Hall voltage Eh * (step S402), and it is determined whether or not the currently read Hall voltage Eh is greater than the previously stored Hall voltage Eh *. Is performed (step S404).

  When it is determined that the voltage is larger, the hall voltage Eh * and the coordinate Zs at which the hall voltage Eh is measured are stored instead of the hall voltage Eh * stored at the previous time and the coordinate Zs * at which the hall voltage Eh * is measured ( Step S406). Here, in the present modification, the Hall voltage Eh and the coordinate Zs are stored in a temporary storage area set in a predetermined area of the RAM.

  Subsequently, processing for determining whether or not the value of the read coordinate Zs is the upper limit value Zmax is executed (step S408). When it is determined that the coordinate Zs is the upper limit value Zmax, the read cam rotation angle θ and the coordinate Zs stored in the temporary storage area are stored in the Z-axis direction moving position storage area set in a predetermined area of the RAM. (Step S410), the flag f1 and the flag f2 are set to the value 1 (Step S412), and this process is terminated.

  In the cam surface inspection apparatus of this modification, before measuring the surface state of the cam 7, the coordinate Zs of the sensor head 19 in which the sensor 19a and the inspection surface of the cam surface 7a are always perpendicular is measured for each cam rotation angle θ. Therefore, the surface state can be measured even with the cam 7 in which the Z-axis direction movement position setting map is not set in advance.

  In the cam surface inspection device according to the modification, before measuring the surface state of the cam 7, the coordinate Zs of the sensor head 19 in which the sensor 19a and the inspection surface of the cam surface 7a are always perpendicular is measured for each cam rotation angle θ. However, in addition to the coordinate Zs, the coordinate Ys of the sensor head 19 may be measured for each cam rotation angle θ so that the sensor 19a and the inspection surface of the cam surface 7a always maintain a constant distance.

In the cam surface inspection system modification, as shown in FIG. 24, but the sensor head 19 is assumed to move from the initial position Z ₀ is a lowest position of the cam 7 to the upper limit value Zmax, the upper limit of the sensor head 19 and for moving to the initial position Z ₀ from zmax, such as those for a central position Zcent cam 7 and the initial position of the sensor head 19, the moving form of the sensor head 19, may be any one.

  The embodiments of the present invention have been described using the embodiments. However, the present invention is not limited to these embodiments, and can be implemented in various forms without departing from the gist of the present invention. Of course you get.

It is a front schematic block diagram of the test | inspection apparatus which test | inspects the cam surface of a cam shaft. It is a side block diagram of FIG. It is a plane schematic block diagram which shows the arrangement | positioning state of the sensor head with respect to a cam shaft, and a Y-axis copying mechanism. It is a perspective view of a sensor head in which a plurality of sensors are arranged in a lateral direction at a predetermined interval. It is detail drawing showing the detail of the sensor of FIG. It is an enlarged view at the time of comprising a Y-axis copying mechanism with a cylindrical roller. It is a block diagram of the cam which has a concave shape. It is a principal part expanded block diagram when providing a roller in a Y-axis copying mechanism and making it contact with a cam. It is a block diagram of the structure which forms a spherical body integrally with a sensor head. It is a principal part expanded block diagram in the case of making a cam contact a planar Y-axis copying mechanism. It is operation | movement explanatory drawing which shows the rotation angle of a cam, and the optimal measurement position of a sensor. It is operation | movement explanatory drawing which shows the rotation angle of a cam, and the optimal measurement position of a sensor. It is a flowchart figure which shows an example of the surface depth dimension measurement process of the cam surface performed by the control apparatus. It is a flowchart figure about a defect determination process. It is a display state figure of the defective part displayed on the indicator. It is a perspective block diagram of the sensor head which has arrange | positioned one sensor. It is a perspective view of a sensor head when a row of Hall elements cut out from a wafer is directly attached to the sensor head. FIG. 4 is a schematic plan view showing a modification of FIG. 3 in the case where two camshafts are arranged in parallel and the cams of adjacent camshafts in parallel are used as a copying reference. It is a flowchart figure of the surface depth dimension measurement process when there is no Y-axis copying mechanism. It is a flowchart figure of the pre-measurement setting process performed before the surface depth dimension measurement process of FIG. 13 is performed. It is a flowchart figure of the cam rotation process in the setting process before a measurement of FIG. It is a flowchart figure of the sensor head movement process in the setting process before a measurement of FIG. It is a flowchart figure of the data storage process in the setting process before a measurement of FIG. It is explanatory drawing of the movement form of a sensor head.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Inspection apparatus 2 Machine stand 3 Chuck 4 Camshaft presser 5 Fixed shaft 6 Camshaft 7 Cam 7a Cam surface 8 Cam press cylinder 9 Cam press slide 10 θ-axis rotation motor 11 Cylinder 12 Slide 13 Slide base 14 Cam surface measuring mechanism 15 X Axis slide 16 Z-axis vertical drive motor 17 Ball screw 18 Z-axis slide 19 Sensor head 19a Sensor 19c Hall element 20 Y-axis slide base 21 Y-axis scanning mechanism 21a Roller 21b Sphere 21c Flat plate 22 Control device 23 Display 24 X-axis movement motor 25 base

Claims (15)

  In an inspection apparatus for inspecting a rotation direction circumferential surface of an inspection object formed as a rotating body, information acquisition means for acquiring surface three-dimensional information including information on a depth direction of an inspection surface on the rotation direction circumferential surface; An inspection apparatus comprising defect determination means for determining whether or not the inspection object has a defect based on the three-dimensional surface information acquired by the information acquisition means.   The inspection object rotates around a fixed axis, and the information acquisition unit is a unit that acquires the surface three-dimensional information of the entire circumferential surface in the rotation direction by rotating the inspection object. Inspection device.   The said information acquisition means has an information acquisition part which acquires the said surface three-dimensional information, and this information acquisition part is comprised so that it may become always perpendicular | vertical with respect to the said test | inspection surface. Inspection equipment.   The inspection apparatus according to claim 1, wherein the information acquisition unit is configured such that a distance between the information acquisition unit and the inspection surface is always a constant distance.   The inspection apparatus according to claim 1, wherein the information acquisition unit is a unit that acquires a depth dimension of a recess formed in the inspection surface as information in the depth direction.   The inspection apparatus according to claim 5, wherein the information acquisition unit is a unit that acquires the depth dimension by detecting a change in the magnetic field of the inspection surface.   The inspection means according to claim 5 or 6, wherein the defect determination means is means for determining that the inspection object has no defect when the depth dimension is equal to or less than a predetermined value.   And an area calculating means for calculating the area of the recess, wherein the defect determining means has a defect in the inspection object when the area value of the recess calculated by the area calculating means is outside the first range. The inspection apparatus according to any one of claims 5 to 7, which is means for determining that   A rotation direction dimension calculating unit that calculates a rotation direction maximum dimension of the concave portion, and the defect determination unit is configured such that the value of the rotation direction maximum dimension calculated by the rotation direction dimension calculation unit is outside the second range. 9. The inspection apparatus according to claim 5, which is means for determining that the inspection object is defective.   Inclination direction dimension calculation means for calculating a maximum dimension in a direction inclined by a predetermined angle with respect to the rotation direction of the concave portion, and the defect determination means is relative to the rotation direction calculated by the inclination direction dimension calculation means. The inspection apparatus according to any one of claims 5 to 9, which is means for determining that the inspection object has a defect when a value of a maximum dimension in a direction inclined by a predetermined angle is outside the third range.   The inspection apparatus according to claim 1, further comprising: an image processing unit that performs image processing on the surface three-dimensional information; and a display unit that displays the surface processed three-dimensional information.   The image processing means performs image processing that changes a color tone according to the degree of the depth of the concave portion, and the display means uses the surface three-dimensional information whose color tone is changed according to the degree of the depth of the concave portion. The inspection apparatus according to claim 11, which is means for displaying.   The inspection apparatus according to claim 11, wherein the display unit is a unit that displays a determination result by the defect determination unit.   The inspection object includes a second inspection object having the same shape and the same phase in the rotation axis direction, and the information acquisition unit is a unit capable of simultaneously acquiring the inspection object and the surface three-dimensional information of the second inspection object. The inspection apparatus according to claim 1, wherein the defect determination unit is a unit capable of simultaneously determining whether or not the inspection object and the second inspection object are defective. In the inspection method for inspecting the circumferential surface of the inspection object formed as a rotating body,
(A) obtaining surface three-dimensional information including information on a depth direction of the inspection surface on the circumferential surface in the rotational direction;
(B) Based on the acquired three-dimensional surface information, calculate at least one of the area of the recess formed on the inspection surface and the length of the recess,
(C) When the depth of the concave portion as information in the depth direction is equal to or smaller than a predetermined value, or when the area of the concave portion and the length dimension of the concave portion are equal to or smaller than a second predetermined value, When it is determined that there is no defect, and the depth of the recess is greater than a predetermined value and at least one of the area of the recess and the length dimension of the recess is greater than a second predetermined value, Inspection method to determine that there is a defect.

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