JP2006242823A - Optical measuring device - Google Patents

Optical measuring device Download PDF

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JP2006242823A
JP2006242823A JP2005060503A JP2005060503A JP2006242823A JP 2006242823 A JP2006242823 A JP 2006242823A JP 2005060503 A JP2005060503 A JP 2005060503A JP 2005060503 A JP2005060503 A JP 2005060503A JP 2006242823 A JP2006242823 A JP 2006242823A
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light
slit
measurement
optical
measuring device
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Takao Shimizu
孝雄 清水
Akihito Kimura
彰人 木村
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Chino Corp
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Chino Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an optical measuring device that has a simple constitution and allows accurate measurement. <P>SOLUTION: The optical measuring device projects light of a light source to a measured object and measures properties, such as material, thickness, components, and moisture of a measured object. A slit, having an opening shape corresponding to the shape of the measured object, is disposed on an optical filter of a rotating sector, and is arranged at an image-forming position of the light from the light source. Thus, the space for the slit is not required, the component exclusive for slit installation is not required, by sharing it with the installation components for the rotating sector, and a simple device constitution is obtained. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

この発明は、測定対象の材質、厚さ、成分、水分等の性状を測定する光学的測定装置に関するものである。 The present invention relates to an optical measuring apparatus for measuring properties such as a material to be measured, a thickness, a component, and moisture.

測定対象に光源からの所定の波長の光を投光し、その反射光や、透過光から材質、厚さ、成分、水分等の性状を測定する光学的測定装置が知られている。例えば、水が近赤外線領域において1.2μm、1.43μm、1.94μmなどに吸収波長を持っていることを利用した赤外線成分計がある。この波長の赤外線を測定対象に投光する。薄いシート状の物体なら透過光を測定するが、粉粒体などでは反射光を測定する。物体にあたった光は、物体内へ部分的に侵入し、物体内部で吸収・反射を繰返して拡散反射光として外部に出てくる。従ってこの拡散反射光は物体内部の水分により減衰しているので、この強度を測定して物体の水分量を測定することができる。しかし、水の吸収波長のみの計測では、物質までの測定距離、表面状態、粒子の大きさ、色などの影響を受け、安定した水分測定が困難となる。そこで、水の吸収波長の近くに比較波長を設け、吸収波長と比較波長の比率から水分値に演算する。 There is known an optical measuring device that projects light of a predetermined wavelength from a light source onto a measurement target and measures properties such as material, thickness, component, and moisture from the reflected light and transmitted light. For example, there is an infrared component meter that utilizes the fact that water has an absorption wavelength of 1.2 μm, 1.43 μm, 1.94 μm, etc. in the near infrared region. Infrared light having this wavelength is projected onto the object to be measured. The transmitted light is measured for a thin sheet-like object, but the reflected light is measured for a granular material or the like. The light hitting the object partially penetrates into the object, and is repeatedly absorbed and reflected inside the object and comes out as diffuse reflected light. Therefore, since the diffuse reflected light is attenuated by the moisture inside the object, the amount of moisture of the object can be measured by measuring this intensity. However, in the measurement of only the absorption wavelength of water, it is difficult to perform stable moisture measurement due to the influence of the measurement distance to the substance, the surface state, the particle size, the color, and the like. Therefore, a comparative wavelength is provided near the absorption wavelength of water, and the moisture value is calculated from the ratio between the absorption wavelength and the comparative wavelength.

図4にミラー式の赤外線成分計の構成例を示す。光源1から出た光Lはレンズ1Aで集光された後、モータMで回転している回転セクタ2を通過する。回転セクタ2には複数枚の光学フィルタ31〜3Nが取付けられており、所定の波長の近赤外線を通過させる。これらの光はミラー6を介し、投光窓ないし投光レンズよりなる光学体71より、測定対象8に投光される。測定対象8からの反射ないし透過した光は、受光窓ないし受光レンズよりなる光学体72を介して、凹面鏡91で集光され、凸面鏡92を反射し検出素子10に入射する。 FIG. 4 shows a configuration example of a mirror type infrared component meter. The light L emitted from the light source 1 is collected by the lens 1A and then passes through the rotating sector 2 rotated by the motor M. A plurality of optical filters 31 to 3N are attached to the rotating sector 2 and allow near infrared rays having a predetermined wavelength to pass therethrough. These lights are projected onto the measurement object 8 through the mirror 6 from an optical body 71 including a projection window or a projection lens. The light reflected or transmitted from the measurement object 8 is collected by the concave mirror 91 through the optical body 72 made of a light receiving window or light receiving lens, reflected by the convex mirror 92, and incident on the detection element 10.

検出素子10で検出されたアナログ出力信号は、図示しない同期検出器で波長毎に分離されAD変換器などを内蔵したμCPU等の処理手段11に入力される。また、周囲温度Tを検出する温度検出器20の出力、およびLCD表示器等の表示手段13を参照してキースイッチ等の設定手段12その他で設定された検量線データなどの設定信号データ等の必要な他の信号が処理手段11に入力される。水分計で求められた値は、試料を加熱乾燥させて水分の減少量を測定する乾燥重量法や、カールフィッシャー試薬を滴定して試料の水分量を測定するカールフィッシャー法などの他の水分測定方法と一定の関係がある。この関係式が検量線であり、測定対象毎に異なった特性を示す。 The analog output signal detected by the detection element 10 is separated for each wavelength by a synchronization detector (not shown) and input to a processing means 11 such as a μCPU incorporating an AD converter or the like. Further, the output of the temperature detector 20 for detecting the ambient temperature T and the setting signal data such as the calibration curve data set by the setting means 12 such as a key switch with reference to the display means 13 such as an LCD display, etc. Other necessary signals are input to the processing means 11. The value obtained with the moisture meter is based on other moisture measurements such as the dry weight method in which the sample is heated and dried to measure the amount of water loss, and the Karl Fischer method is used to titrate the Karl Fischer reagent to measure the moisture content of the sample. There is a certain relationship with the method. This relational expression is a calibration curve, and shows different characteristics for each measurement object.

処理手段11は、内蔵したAD変換器でアナログ信号をデジタル信号に変換し、設定データ等を用いて所定の演算処理を行い、測定対象の所望の水分率、厚み等の性状信号を得ることができる。例えば、水分吸収波長帯の光の信号と非吸収波長帯の光の信号との比を取ることで水分率等が測定できる。 The processing means 11 converts an analog signal into a digital signal with a built-in AD converter, performs predetermined arithmetic processing using setting data or the like, and obtains a property signal such as a desired moisture content and thickness of the measurement target. it can. For example, the moisture content and the like can be measured by taking the ratio of the light signal in the water absorption wavelength band and the light signal in the non-absorption wavelength band.

例えば、測定対象である塗布糊と塗布糊が塗布されたシートの成分の吸収波長域が重複している場合に、塗布糊が塗布されていないシート部分を含んだ領域の測定を行なうと、シート部分の性状信号が影響して測定精度が低下する。 For example, when the measurement target is an area including a sheet portion to which the coating paste is not applied when the absorption wavelength range of the coating paste and the component of the sheet to which the coating paste is applied overlaps, the sheet is measured. The measurement accuracy decreases due to the influence of the part property signal.

このような光学的測定装置の測定精度の向上を目的として、図4に示すように光源からの光の結像位置に測定対象である、例えば塗布糊の塗布形状に応じた任意形状の開口を有する光束を規制する固定スリット5を設けた本件出願人による特開2001−296242号公報がある。固定スリットは、帯状の移動する測定対象の場合は移動方向に沿って長い長方形や、測定対象の形状に対応した凹形状又は二重丸形状などの開口である。このことにより、測定対象の各点につき流れ方向に関してより多くの光量が得て、流れ方向に沿った測定分布精度を向上させたり、静止している測定対象としての塗布糊などのパターンが凹形状あるいは二重丸形状などのとき、これに合わせた形状の光束を規制するスリットを用いて、測定対象の形状に相当する投光パターンとすることで、測定対象の必要部分からの無駄のない大きな測定光量を得て、測定精度の向上を図っている。
特開2001‐296242号公報
For the purpose of improving the measurement accuracy of such an optical measuring device, as shown in FIG. 4, an opening of an arbitrary shape corresponding to the application shape of the application glue, for example, is applied to the imaging position of light from the light source. Japanese Patent Application Laid-Open No. 2001-296242 by the present applicant in which a fixed slit 5 for restricting the luminous flux is provided. In the case of a measurement object that moves in a strip shape, the fixed slit is an opening that is long in the moving direction, a concave shape corresponding to the shape of the measurement object, or a double round shape. As a result, more light is obtained in the flow direction at each point of the measurement target, and the accuracy of measurement distribution along the flow direction is improved. Or, in the case of a double round shape or the like, a projection pattern corresponding to the shape of the measurement object is formed by using a slit that regulates the light beam having a shape matched to this, so that there is no waste from the necessary part of the measurement object. Measurement light quantity is obtained to improve measurement accuracy.
JP 2001-296242 A

しかしながら、特許文献1において、固定スリット用のスペースや、固定スリット設置用の部品などが必要となり、装置の構成が複雑になり、設計の自由度が減少するという問題点があった。 However, in Patent Document 1, there is a problem in that a space for a fixed slit, parts for installing the fixed slit, and the like are required, the configuration of the apparatus becomes complicated, and the degree of freedom in design is reduced.

この発明の目的は以上の点に鑑み、簡易な構成で、高精度の測定が可能な光学的測定装置を提供することである。 In view of the above points, an object of the present invention is to provide an optical measuring device capable of performing highly accurate measurement with a simple configuration.

上記の課題を達成するため、本発明は、光源の光を測定対象に投光して測定対象の性状を測定する光学的測定装置において、前記測定対象の形状に対応した開口形状を有するスリットを回転セクタの光学フィルタ上に設け、前記スリットの位置は前記光源からの光の結像位置であることを特徴とする。 In order to achieve the above object, the present invention provides an optical measuring device that projects the light of a light source onto a measurement object to measure the property of the measurement object, and includes a slit having an opening shape corresponding to the shape of the measurement object. It is provided on the optical filter of the rotating sector, and the position of the slit is an image formation position of light from the light source.

この発明は、光源の光を測定対象に投光して測定対象の性状を測定する光学的測定装置において、前記測定対象の形状に対応した形状の開口を有するスリットを回転セクタの光学フィルタ上に設け、前記スリットを前記光源からの光の結像位置に配置したことを特徴とする光学的測定装置である。このことにより、固定スリット用のスペースが不要となり、回転セクタ用の設置部品と共用することで固定スリット設置専用の部品などが不要となり、簡易な装置構成となる。 The present invention relates to an optical measuring apparatus that projects light of a light source onto a measurement target and measures the property of the measurement target. A slit having an opening corresponding to the shape of the measurement target is provided on the optical filter of the rotating sector. An optical measuring device is provided, wherein the slit is disposed at an imaging position of light from the light source. This eliminates the need for a space for a fixed slit, and eliminates the need for a dedicated part for installing the fixed slit by sharing the rotating sector installation parts, resulting in a simple device configuration.

さらに、測定対象のパターンに合わせた開口を有するスリットを用い、測定対象の形状に対応した投光パターンとすることで、測定対象の必要部分からの無駄のない大きな測定光量が得られ、測定精度の向上が図ることができる。 In addition, by using a slit with an opening that matches the pattern to be measured, and a projection pattern that corresponds to the shape of the measurement object, a large amount of measurement light can be obtained from the necessary part of the measurement object, and measurement accuracy can be obtained. Can be improved.

図1は、この発明の一実施例を示すミラー形の光学的測定装置の構成説明図である。図4と同じ構成部品には同一符号を付している。図1において、投光ランプのような光源1から放射される光Lは、レンズ1Aを介しモータMで回転する回転セクタ2に投光される。この回転セクタ2は、円盤の上に配置された複数の光学フィルタ31〜3Nを有しこれが分光手段を構成し、光源1からの光Lは、測定時に各光学フィルタ31〜3Nのいずれかを順次透過する。 FIG. 1 is an explanatory view of the configuration of a mirror type optical measuring apparatus showing an embodiment of the present invention. The same components as those in FIG. 4 are denoted by the same reference numerals. In FIG. 1, light L emitted from a light source 1 such as a floodlight is projected onto a rotating sector 2 that is rotated by a motor M via a lens 1A. The rotating sector 2 has a plurality of optical filters 31 to 3N arranged on a disk, which constitutes spectroscopic means, and the light L from the light source 1 is one of the optical filters 31 to 3N at the time of measurement. Transmit sequentially.

この回転セクタに、光源1の集光・結像位置に任意形状の開口を有するスリット41が各光学フィルタ31〜3N上に設けられ、光学フィルタを透過した所定波長の光は、ミラー6を介し、投光窓ないし投光レンズよりなる光学体71より、スリット41の任意形状の開口に対応したパターンの光として、測定対象8に投光される。 In this rotating sector, a slit 41 having an aperture of an arbitrary shape at the light condensing / imaging position of the light source 1 is provided on each of the optical filters 31 to 3N, and light having a predetermined wavelength transmitted through the optical filter passes through the mirror 6. The light is projected onto the measurement object 8 as light having a pattern corresponding to the opening of the arbitrary shape of the slit 41 from the optical body 71 including a light projection window or a light projection lens.

測定対象8からの反射ないし透過した光は、受光窓ないし受光レンズよりなる光学体72を介して、凹面鏡91で集光され、凸面鏡92を反射し検出素子10に入射する。 The light reflected or transmitted from the measurement object 8 is collected by the concave mirror 91 through the optical body 72 made of a light receiving window or light receiving lens, reflected by the convex mirror 92, and incident on the detection element 10.

検出素子10で検出されたアナログ出力信号は、図4に示した赤外線成分計と同様に、図示しない同期検出器で波長毎に分離されAD変換器などを内蔵したμCPU等の処理手段11に入力される。また、周囲温度Tを検出する温度検出器20の出力、およびLCD表示器等の表示手段13を参照してキースイッチ等の設定手段12その他で設定された検量線データなどの設定信号データ等の必要な他の信号が処理手段11に入力される。処理手段11は、内蔵したAD変換器でアナログ信号をデジタル信号に変換し、設定データ等を用いて所定の演算処理を行い、測定対象の所望の水分率、厚み等の性状信号を得ることができる。 Similar to the infrared component meter shown in FIG. 4, the analog output signal detected by the detection element 10 is separated for each wavelength by a synchronous detector (not shown) and input to a processing means 11 such as a μCPU incorporating an AD converter. Is done. Further, the output of the temperature detector 20 for detecting the ambient temperature T and the setting signal data such as the calibration curve data set by the setting means 12 such as a key switch with reference to the display means 13 such as an LCD display, etc. Other necessary signals are input to the processing means 11. The processing means 11 converts an analog signal into a digital signal with a built-in AD converter, performs predetermined arithmetic processing using setting data or the like, and obtains a property signal such as a desired moisture content and thickness of the measurement target. it can.

図2(a)は回転セクタの平面図を示している。図2(b)は図2(a)のA−A線断面図である。回転セクタはモータMの取付け孔22を中心に、例えば1秒間に30回転程度の速度で回転する。本例では、同心円上に4つの光学フィルタが設けられているが、測定条件に応じた数の光学フィルタを配置可能である。 FIG. 2A shows a plan view of the rotating sector. FIG. 2B is a cross-sectional view taken along line AA in FIG. The rotating sector rotates around the mounting hole 22 of the motor M at a speed of, for example, about 30 rotations per second. In this example, four optical filters are provided on the concentric circles, but the number of optical filters according to the measurement conditions can be arranged.

各光学フィルタ31、32、33、34(3N)上には、光遮蔽部(斜線部)と測定対象の形状に対応した開口である光透過部からなるスリット41が設けられ、光学フィルタとともに回転する。 On each optical filter 31, 32, 33, 34 (3N), there is provided a slit 41 comprising a light shielding portion (shaded portion) and a light transmitting portion which is an opening corresponding to the shape of the measurement object, and rotates together with the optical filter. To do.

例えば、光学フィルタ31が水分測定の吸収波長の光を透過し、光学フィルタ32が水分測定の比較波長の光を透過する。光学フィルタ31、32には、同一の開口形状のスリット41が配置されている。同様に、光学フィルタ33が高分子測定の吸収波長、光学フィルタ34が高分子測定の比較波長の組み合わせであり、同一の開口形状のスリット41が配置されている。水分の吸収波長信号と水分の比較波長信号の比率、あるいは、高分子の吸収波長信号と高分子の比較波長信号の比率から水分、高分子成分が測定される。本例では、同心円上に4つの光学フィルタが設けられているが、測定条件に応じた数の光学フィルタを、設置スペースが許す限り配置可能である。 For example, the optical filter 31 transmits light having an absorption wavelength for moisture measurement, and the optical filter 32 transmits light having a comparative wavelength for moisture measurement. The optical filters 31 and 32 are provided with slits 41 having the same opening shape. Similarly, the optical filter 33 is a combination of an absorption wavelength for polymer measurement, the optical filter 34 is a combination of a comparison wavelength for polymer measurement, and a slit 41 having the same opening shape is disposed. Moisture and polymer components are measured from the ratio of the absorption wavelength signal of moisture and the comparison wavelength signal of moisture, or the ratio of the absorption wavelength signal of polymer and the comparison wavelength signal of polymer. In this example, four optical filters are provided on concentric circles, but the number of optical filters corresponding to the measurement conditions can be arranged as long as the installation space permits.

図3(a)〜(d)は、スリット41の例を示しており、図の斜線部が光遮蔽部である。スリット41は光遮蔽部と、測定対象の形状に対応した開口である光透過部からなる。 3A to 3D show an example of the slit 41, and the hatched portion in the figure is a light shielding portion. The slit 41 includes a light shielding part and a light transmission part that is an opening corresponding to the shape of the measurement target.

なお、以上で述べたスリット41の開口形状は、どのようなものでもよく、測定対象に合わせた最適な形状となるようにすればよい。 It should be noted that the opening shape of the slit 41 described above may be any shape, and may be an optimum shape according to the measurement object.

この発明の光学的測定装置の一実施形態を示す構成説明図である。BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a configuration explanatory view showing an embodiment of an optical measuring device according to the present invention. 回転セクタの平面図および断面図である。It is the top view and sectional drawing of a rotation sector. スリットの例を示す図である。It is a figure which shows the example of a slit. 従来の光学的測定装置の一例を示す構成説明図である。It is composition explanatory drawing which shows an example of the conventional optical measuring device.

符号の説明Explanation of symbols

1 光源
2 回転セクタ
31〜3N 光学フィルタ
41 スリット
6 ミラー
71、72 光学体
8 測定対象
91 凹面鏡
92 凸面鏡
10 検出素子
11 処理手段
12 設定手段
13 表示手段
20 温度検出器
DESCRIPTION OF SYMBOLS 1 Light source 2 Rotating sectors 31-3N Optical filter 41 Slit 6 Mirror 71, 72 Optical body 8 Measuring object 91 Concave mirror 92 Convex mirror 10 Detection element 11 Processing means 12 Setting means 13 Display means 20 Temperature detector

Claims (1)

光源の光を測定対象に投光して測定対象の性状を測定する光学的測定装置において、前記測定対象の形状に対応した開口形状を有するスリットを回転セクタの光学フィルタ上に設け、前記スリットの位置は前記光源からの光の結像位置であることを特徴とする光学的測定装置。 In an optical measurement device that projects the light of a light source onto a measurement object and measures the property of the measurement object, a slit having an opening shape corresponding to the shape of the measurement object is provided on the optical filter of the rotating sector, The position is an image formation position of light from the light source.
JP2005060503A 2005-03-04 2005-03-04 Optical measuring device Pending JP2006242823A (en)

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59180449A (en) * 1983-03-31 1984-10-13 Ngk Insulators Ltd Measuring apparatus of water content
JPS61153546A (en) * 1984-12-26 1986-07-12 Canon Inc Particle analyzer
JPH03235910A (en) * 1990-02-13 1991-10-21 Hitachi Ltd Infrared microscope
JPH07107346A (en) * 1993-09-29 1995-04-21 New Kurieishiyon:Kk Inspection device
JPH07243958A (en) * 1994-03-04 1995-09-19 Chino Corp Grain size/moisture measuring device
JP2001296242A (en) * 2000-04-18 2001-10-26 Chino Corp Optical measurement device

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59180449A (en) * 1983-03-31 1984-10-13 Ngk Insulators Ltd Measuring apparatus of water content
JPS61153546A (en) * 1984-12-26 1986-07-12 Canon Inc Particle analyzer
JPH03235910A (en) * 1990-02-13 1991-10-21 Hitachi Ltd Infrared microscope
JPH07107346A (en) * 1993-09-29 1995-04-21 New Kurieishiyon:Kk Inspection device
JPH07243958A (en) * 1994-03-04 1995-09-19 Chino Corp Grain size/moisture measuring device
JP2001296242A (en) * 2000-04-18 2001-10-26 Chino Corp Optical measurement device

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