JP2006228555A - Carbon nanotube paste, display light-emitting device using it, and manufacturing method of display light-emitting device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide carbon nanotube paste capable of preventing the burning down of a carbon nanotube in a heat treatment process. <P>SOLUTION: The carbon nanotube paste 1000 contains a vehicle comprising glass particles 3 containing bismuth, the carbon nanotube 4, and resin. The carbon nanotube paste 1000 is applied onto a cathode, and then heat-treated. The glass particles 3 containing bismuth hardly reacts with the carbon nanotube 4. Therefore, when the carbon nanotube 4 is boded to the cathode with the glass particles 3, the carbon nanotube 4 does not burn down even at the temperature at which the glass particles are melted. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a carbon nanotube paste, a display light emitting device using the same, and a method for manufacturing the display light emitting device.

  In recent years, large-screen thin displays such as plasma displays and liquid crystal displays have been developed. These displays have a larger market share than displays using a cathode ray tube that has been conventionally used. Among these displays, field emission displays (hereinafter referred to as “FEDs”) have been actively developed. The FED has low power consumption and can provide good image quality similar to that of a display using a cathode ray tube.

  During the operation of the aforementioned FED, electrons are emitted from the electron source by the action of field emission. Thereby, electrons collide with the phosphor layer. As a result, the phosphor layer emits light and image display is performed.

  Recently, an electron source using FCNTs has attracted attention as an electron source of FED. Since the carbon nanotube has a diameter of several nanometers and a length of several micrometers to several tens of micrometers, the aspect ratio is high. Carbon nanotubes have high mechanical strength and high electrical conductivity. Therefore, the carbon nanotube is promising as an electron source because electric field concentration tends to occur at the tip thereof.

  The above-mentioned carbon nanotube is manufactured using a CVD (Chemical Vapor Deposition) method or an arc method. As a method of using the carbon nanotube as an electron source, a carbon nanotube paste in which a carbon nanotube and a vehicle containing a resin are mixed is patterned on the cathode electrode by a printing method, and a catalytic metal is scattered on the cathode electrode. There is a method in which carbon nanotubes are directly grown on the cathode electrode.

An example of a method for patterning a cathode film using a paste mixed with carbon nanotube particles is disclosed in Japanese Patent Application Laid-Open No. 2003-303539. In this method, an inorganic material containing SiO ₂ as a main component, for example, colloidal silica, is used to bring the carbon nanotubes into close contact with the cathode electrode on the cathode substrate. A carbon nanotube paste is formed by mixing the colloidal silica, a resin-containing vehicle, and carbon nanotube particles. The carbon nanotube paste is printed on the cathode electrode. After the cathode substrate having the cathode electrode printed with the carbon nanotube paste is baked, the cathode substrate is subjected to surface treatment or polishing so that the carbon nanotubes are raised.

Japanese Patent Application Laid-Open No. 2003-117564 discloses a method of mixing glass particles as an inorganic filler in a carbon nanotube paste.
JP 2003-303539 A JP 2003-331713 A JP 2003-117564 A

  In the above method, an inorganic filler such as low-melting glass, ITO, or metal fine powder such as silver is mixed in the carbon nanopaste in order to bring the carbon nanotube into close contact with the glass substrate.

  In addition, the conductivity of carbon nanotubes varies greatly depending on the surface state. For this reason, if the resin contained in the vehicle remains attached to the surface of the carbon nanotube, the conductivity of the carbon nanotube decreases. Therefore, when using carbon nanotube paste mixed with low melting glass or metal fine powder containing lead oxide that is generally used, cathode electrode coated with carbon nanotube paste is used to burn the resin in the paste. The cathode substrate provided with is heat-treated at a temperature of 400 ° C. or higher in an air atmosphere. However, carbon nanotubes disappear during this heat treatment.

  On the other hand, when a cathode substrate having a cathode electrode coated with the carbon nanotube paste is heat-treated at a temperature of about 350 ° C. in order to prevent the carbon nanotubes from burning out, a resin such as ethyl cellulose does not burn. It remains in the carbon nanotube paste. Therefore, when an FED is formed using the carbon nanotube paste, the electron emission characteristics of the FED are low.

  The present invention has been made in view of the above-mentioned problems, and the object thereof is a carbon nanotube paste in which no carbon nanotubes disappear after heat treatment and no resin remains, a display light emitting device using the same, and It is to provide a method for manufacturing a display light emitting device.

  The carbon nanotube paste of the present invention includes a plurality of carbon nanotubes, a plurality of glass particles containing bismuth, and a vehicle having a resin. According to this, when the carbon nanopaste is heat-treated, the glass particles containing bismuth and the carbon nanotubes hardly react. Therefore, when the carbon nanotube and the cathode electrode are bonded by heat treatment, even if the resin is burned out, the carbon nanotube is difficult to burn out. As a result, a decrease in the number of carbon nanotubes in the carbon nanotube paste due to the heat treatment is suppressed.

  The display light emitting device of the present invention includes a cathode electrode, a plurality of glass particles fused and exposed on the cathode electrode, and a plurality of carbon nanotubes existing between the plurality of glass particles. According to this configuration, the number of carbon nanotubes raised so that electrons can be emitted among the plurality of carbon nanotubes is increased. As a result, the emission characteristics of the display light emitting element are improved.

  Moreover, it is desirable that the average particle diameter of the plurality of glass particles is 0.1 μm to 0.6 μm. According to this, since the average particle diameter of the plurality of glass particles is 0.1 μm or more, the plurality of carbon nanotubes are easily raised. In addition, since the average particle diameter of the plurality of glass particles is 0.6 μm or less, the number of carbon nanotubes raised between the plurality of glass particles increases. As a result, the emission characteristics of the display light emitting element can be improved.

  The method for manufacturing a display light emitting device of the present invention uses the carbon nanotube paste described above to form a cathode film on the cathode electrode, and heat-treats the carbon nanotube paste at a first temperature to burn out the resin. And a step of fusing the glass particles and the cathode electrode by heat-treating the cathode film at a second temperature higher than the first temperature in an oxygen-free atmosphere. According to this manufacturing method, since the heat treatment is performed in an oxygen-free atmosphere, the glass particles and the cathode electrode are sufficiently fused in the heat treatment, and the carbon nanotubes are prevented from being burned out.

  Moreover, it is desirable that the first temperature is 420 ° C. to 460 ° C. According to this manufacturing method, since the heat treatment atmosphere is 420 ° C. or higher, it is possible to prevent the number of raised carbon nanotubes from being reduced. In addition, since the atmosphere of the heat treatment is a temperature of 460 ° C. or lower, the carbon nanotubes are prevented from being burned out.

  According to the present invention, even when the carbon nanotube paste is heat-treated, the carbon nanotubes are not lost and the resin is burned out. As a result, the emission characteristics of the display light emitting element are improved.

Embodiment 1 FIG.
As shown in FIG. 1, the carbon nanotube paste 1000 according to the present embodiment includes carbon nanotubes 4, glass particles 3, a vehicle 100 containing a resin, and an organic solvent. The carbon nanotubes 4 are generated by a chemical vapor method, an arc method, or a laser method. The carbon nanotubes 4 are called single wall, double wall, or multi-wall nanotubes depending on the number of layers.

  Further, as the diameter of the carbon nanotube 4 is smaller, electric field concentration is more likely to occur, so that electron emission is more easily performed. Therefore, in the display light emitting element, the carbon nanotube 4 preferably has a diameter of 1 nm to 10 nm and a length of 1 μm to 15 μm. However, single wall carbon nanotubes having a diameter of less than 2 nm tend to be greatly deteriorated by electron emission and have a short life.

  Generally, in order for a carbon nanotube to function as an electronic device, it is necessary to form the carbon nanotube in a film shape in a predetermined region. Therefore, a printing method, a spray method, a spin coating method, or the like is used. In the present embodiment, a method for forming a cathode film containing carbon nanotubes by a printing method is used.

  In order to form a cathode film by a printing method, it is necessary to put carbon nanotubes in a paste state. Therefore, first, carbon nanotube particles of about 30 μm are mixed in an organic solvent and a dispersant. Next, the carbon nanotube particles are pulverized by a bead mill using zirconia beads having a diameter of 0.5 mm to 3.0 mm. For example, a mixture of 10 g double wall carbon nanotube particles, 200 g terpineol, 5 g dispersant, and 3 g diameter and 200 g beads is pulverized by a bead mill for 2 hours. The The diameter of the carbon nanotube particles in the pulverized mixture is 0.52 μm according to measurement using a laser diffraction and scattering type particle size distribution measuring apparatus (Horiba Seisakusho).

  Thereafter, in order to remove excess terpineol from the pulverized carbon nanotube-containing solution, the mixture is separated by a centrifuge at a rotational speed of 15000 rpm for about 2 hours. Thereafter, the solvent at the top of the container in which the solution containing the pulverized carbon nanotubes is placed is discarded. As a result, a pulverized carbon nanotube is obtained. Next, the pulverized product of the carbon nanotubes, a vehicle containing ethyl cellulose as a resin, and glass particles containing bismuth are mixed at the same ratio.

  The glass particles mixed in the carbon nanotube paste described above are for improving the adhesion between the carbon nanotubes and a cathode electrode described later. However, glass particles containing lead oxide, which is a commonly used low-melting glass, react with carbon nanotubes when melted, and therefore in a pre-baking step (400 ° C .: air atmosphere) in which the resin in the vehicle is burned The carbon nanotubes will burn out. Therefore, in order not to burn off the carbon nanotubes, it is necessary to use glass particles that do not easily react with the carbon nanotubes in the temporary firing step.

  Among glass particles having a relatively low melting point, glass particles containing bismuth hardly react with carbon nanotubes. Therefore, if glass particles containing bismuth are used as the inorganic filler contained in the mixture, the carbon nanotubes are prevented from being burned out.

  On the other hand, glass particles containing bismuth have a higher melting point than glass particles containing lead. For this reason, when the cathode electrode on the glass substrate and the carbon nanotube are bonded, in order to obtain sufficient mutual adhesion, it is necessary to heat treat the carbon nanotube and the cathode electrode at a higher temperature. However, carbon nanotubes disappear when heat-treated at a high temperature.

  Therefore, it is desirable to place the combined body of the carbon nanotube and the glass substrate on which the cathode electrode is formed in an atmosphere without oxygen, for example, an atmosphere in which only nitrogen exists after the preliminary firing step. The reason is that the carbon nanotubes are not burned out even if the heat treatment is performed at a high temperature at which the cathode electrode and the carbon nanotubes are sufficiently bonded in an oxygen-free atmosphere.

  In the present embodiment, the mixture of the pulverized product of the carbon nanotubes 4 described above, the vehicle 100 containing ethyl cellulose as a resin, and the glass particles 3 containing bismuth is stirred for about 2 hours in an automatic mortar. The glass particles 3 contain bismuth oxide, and the weight ratio of bismuth oxide to the entire glass particles 3 is 40% to 80%. Thereafter, the mixture is sufficiently kneaded by a three-roll mill, whereby the carbon nanotube paste 1000 shown in FIG. 1 is formed.

  Next, the above-mentioned carbon nanotube paste 1000 is printed on the cathode electrode 2 using a printing apparatus. That is, as shown in FIG. 2, the cathode film 5 is formed on the cathode electrode 2 of the lower substrate 1. Next, the lower substrate 1 is put into a firing furnace and fired. The purpose of firing the cathode film 5 is to eliminate the resin in the carbon nanotube paste 1000 by burning it, and to fuse the bismuth glass to the cathode electrode 2 to improve the adhesion between the carbon nanotube 4 and the cathode electrode 2. It is to let you. In order to burn the resin in the carbon nanotube paste 1000, it is necessary to hold the carbon nanotube paste 1000 in an air atmosphere at a temperature of 400 ° C. or higher for a certain period of time. The bismuth glass in the carbon nanotube paste 1000 is used as the cathode electrode. In order to fuse it to 2, it is necessary to heat-treat the carbon nanotube paste 1000 at a temperature of 500 ° C. or higher, which is the softening point of glass. Therefore, the cathode film 5 formed on the cathode electrode 2 is baked for one hour at a temperature of 420 ° C. or higher in the air atmosphere. Thereby, the resin in the carbon nanotube paste 1000 is burned out.

  Next, the cathode film 5 fired in the air atmosphere is fired in a nitrogen atmosphere at a temperature of 500 ° C. or higher, which is the melting point of the glass particles 3 containing bismuth. As a result, the adhesion between the carbon nanotube 4 and the cathode electrode 2 is sufficient, and the cathode film 5 having sufficient conductivity can be formed because the resin is burned out. The step of burning the resin in the carbon nanotube paste 1000 and the step of fusing the bismuth glass to the cathode electrode 2 may be performed continuously at a time, but may be performed separately.

  Next, in order to increase the electron emission efficiency, the above-described surface treatment of the cathode film 5 is performed. That is, a surface treatment for raising the carbon nanotubes 4, for example, a polishing treatment, a peeling treatment, or a laser treatment is performed. Here, what is important is the surface state of the cathode film 5.

  In the conventional cathode film using glass particles containing lead oxide, as shown in FIG. 3, carbon nanotubes 104 existing near the surface of glass particles 103 formed on the cathode electrode 102 of the lower substrate 101 are cathodes. The electrode 102 is completely covered. That is, the glass particles 103 are not exposed. Therefore, even if the surface treatment for raising the carbon nanotubes 104 is performed on the structure shown in FIG. 3, the number of the raised carbon nanotubes 104 is small, and the distribution of the raised carbon nanotubes 104 is large. Therefore, the emission characteristics of the display light emitting element using the electron source having the structure shown in FIG. 1 are not good.

  On the other hand, in the present embodiment, as shown in FIG. 2, a structure in which the carbon nanotubes 4 are exposed between the glass particles 3 formed on the cathode electrode 2 is formed. According to this structure, when the surface treatment for raising the carbon nanotubes 4 is performed, the carbon nanotubes 4 positioned between the glass particles 3 are easily raised, and the distribution of the raised carbon nanotubes 4 varies. Get smaller.

  In order to form the structure shown in FIG. 2, the firing temperature and firing time of the temporary firing step for removing the resin after the cathode electrode 2 is printed on the glass substrate 1 are changed.

  For example, when the cathode film 5 formed to a thickness of 4.2 μm, that is, the layer containing the carbon nanotubes 4 and the glass particles 3 is fired at a temperature of 400 ° C. for 2 hours, as shown in FIG. The 6 μm carbon nanotubes 4 completely cover the surface of the glass particles 3, and a structure in which the glass particles 3 exist below the carbon nanotubes 4 is formed.

  On the other hand, when the cathode film is fired for 2 hours at a firing temperature of 440 ° C., the carbon nanotubes 4 do not completely cover the surface of the glass particles 3 as shown in FIG. A cathode film 5 in which the glass particles 3 are exposed between the four is formed.

  FIG. 6 shows the relationship between the firing temperature of the cathode film 5 after the carbon nanotube paste 1000 is printed on the cathode electrode 2 and the voltage at which electron emission is started after the peeling process. In FIG. 6, the baking temperature is changed by 20 ° C. from 400 ° C. to 480 ° C., which is a temperature that does not affect the electron emission characteristics and burns out the resin.

  When the firing temperature is 400 ° C., the rate at which the carbon nanotubes 4 are raised is low, so the voltage at which electrons start to be emitted from the tip of the carbon nanotube 4 is also high, but when the firing temperature is 440 ° C., As described above, since the rate at which the carbon nanotubes 4 are raised increases, the voltage at which electron emission starts from the tip of the carbon nanotubes 4 is low. Further, when the firing temperature is 480 ° C. or higher, the carbon nanotubes 4 burn in the atmosphere and disappear. Thereby, the number of raised carbon nanotubes 4 is reduced. As a result, the voltage at which electron emission is started increases.

  Further, as can be seen from FIG. 7, the surface state of the cathode film 5 changes according to the particle diameter of the glass particles 3 with respect to the particle diameter of the pulverized product of the carbon nanotubes 4. Change.

  In the above-described experiment, the average particle diameter of the carbon nanotube 4 particles is 0.52 μm, and the weight blending ratio of the carbon nanotubes 4 and the glass particles 3 is 1: 1. Further, the measurement of the electron emission characteristics shown in FIG. 7 is performed in a state in which a spacer of 60 μm is sandwiched between the lower substrate 1 and the anode electrode so that the lower substrate 1 and the anode electrode made of the ITO substrate face each other. The lower substrate 1 on which the 2 mm square cathode film 5 was printed was fired at 440 ° C. in an air atmosphere and then fired at 540 ° C. in a nitrogen atmosphere.

  In the above-described experiment, since the carbon nanotubes 4 between the glass particles 3 are raised, electrons are emitted well. That is, changing the average particle size of the glass particles 3 changes the electron emission characteristics. FIG. 7 is a graph showing the relationship between the average particle diameter of the glass particles 3 and the voltage when the carbon nanotubes 4 start to emit electrons.

  As shown in FIG. 7, the smaller the average particle diameter of the glass particles 3 is, the more carbon nanotubes 4 are raised, so that the emission characteristics of the electron source 50 are improved. However, if the average particle diameter of the glass particles 3 is too small, it becomes difficult to maintain the glass particles 3 in a state where the carbon nanotubes 4 are raised, so that the emission characteristics of the electron source 50 are deteriorated. Therefore, it is most desirable that the average glass particle 3 has a particle size in the range of 0.1 μm to 0.6 μm. If the average particle size of the glass particles 3 mixed with the carbon nanotube paste is in the range of 0.1 μm to 0.6 μm, the emission characteristics are stable, so the variation in the average particle size of the glass particles 3 and the particle size distribution are Due to the large size, the performance of the electron source 50 does not vary greatly. Therefore, it is not necessary to classify and arrange the pulverized particle size of the glass particles 3 finely.

  If the carbon nanotube paste 1000 of the present embodiment is used for an electron source such as a display light emitting element, a light source, and an X-ray apparatus, the performance of each element can be improved by exhibiting excellent emission.

Embodiment 2. FIG.
Next, the structure and manufacturing method of the display light emitting element using the carbon nanotube paste 1000 of Embodiment 1 will be described with reference to FIGS.

  As shown in FIGS. 8 and 9, the display light emitting device of the present embodiment includes an upper substrate 10 and a lower substrate 1. The lower substrate 1, the cathode electrode 2, and the cathode film 5 including the carbon nanotubes 4 and the glass particles 3 serve as the electron source 50. As a material of the upper substrate 10, soda glass or white glass suitable for forming a panel is used. The same material as that of the upper substrate 10 is used for the material of the lower substrate 1.

  In the method for manufacturing a display light emitting device of the present embodiment, first, a conductive film to be the cathode electrode 2 is formed on the lower substrate 1. The conductive film is formed by a printing method, a vacuum evaporation method, a sputtering method, or the like using a material such as ITO, silver, or aluminum. Further, on the cathode electrode 2, the carbon nanotube 4 described in the first embodiment, the vehicle 100 containing a resin, the glass particles 3, and the carbon nanotube paste 1000 made of an organic solvent are formed by a printing method, a spin coating method, or It is applied using an inkjet method or the like. Thereafter, a heat treatment is applied to the applied carbon nanotube paste 1000 to form the cathode film 5.

  The thickness of the cathode film 5 may be in the range of 1 μm to 8 μm, but is preferably in the range of 4 μm to 6 μm. When the thickness of the cathode film 5 is less than 1 μm, the thickness of the cathode film 5 is reduced due to damage in an etching process for forming the opening 14 described later. On the other hand, when the thickness of the cathode film 5 exceeds 8 μm, it becomes difficult to form the insulating layer 6 having a uniform thickness in the next step.

  Next, the insulating layer 6 is formed on the cathode film 5 by printing or spin coating using a glass paste or the like. Next, the gate electrode 7 is formed on the insulating layer 6 by vacuum deposition or printing using silver or aluminum. Note that the gate electrode 7 is connected to an external wiring.

  Thereafter, a resist film (for example, AZP4330 manufactured by Clariant) is applied on the gate electrode 7 by a spin coating method. Next, openings of a predetermined pattern are formed in the resist film by mask exposure in photolithography. Thereafter, minute openings 14 of 5 μm to 10 μm are formed in the gate electrode 7 and the insulating layer 6 by dry etching or wet etching using the resist film as a mask. Thereby, in the space below the opening 14, the carbon nanotubes 4 positioned between the glass particles 3 are exposed. In this way, the electron source 50 is formed. The electron source 50 is baked at a temperature of 440 ° C. in the air, and further baked at 500 ° C. in a nitrogen atmosphere. Thereby, the glass particles 3 in the insulating layer 6 and the cathode film 5 are melted. Thereafter, the glass particles 3 in the cathode film 5 are fused to the cathode electrode 2 together with the carbon nanotubes 4. The insulating layer 6 is fused to the lower substrate 1 or the cathode electrode 2.

  Next, in order to raise the carbon nanotubes 4, the surface treatment of the cathode film 5 is performed. As the surface treatment method, a treatment method such as polishing, peeling, or laser irradiation is used. However, when the distance between the gate electrodes 7, that is, the width of the opening 14 is small, the cathode film 5 is irradiated with laser light focused by a lens, or a liquid adhesive material or adhesive layer It is desirable to raise the carbon nanotubes 4 by bringing the thick tape-shaped material into close contact with the cathode film 5 and then peeling off the cathode film 5.

  Thereafter, the support 8 and the focusing electrode 9 are formed on the gate electrode 7 to complete the electron source of the display light emitting element.

  On the other hand, a phosphor layer 11 containing red, blue, and green phosphors at a position facing the cathode electrode 2 on the upper substrate 10 on the light emitting element facing the electron source obtained by the above-described manufacturing method, It is formed by a printing method or a spin coating method. Thereafter, an aluminum film layer to be the anode electrode 12 is formed so as to cover the entire surface of the phosphor layer 11.

  Since the phosphor layer 11 of the light emitting element of the present embodiment has a structure similar to that of the phosphor layer 11 used in an existing cathode ray tube, it can emit high-luminance light. Moreover, the phosphor layer 11 of the present embodiment may have a structure in which a phosphor is applied on a transparent electrode such as ITO or SnO on the upper substrate 10 by a printing method or the like.

  Through the spacer glass coated with the low melting point glass, the phosphor layer 11 coated with the red, blue, and green phosphors is adjusted so that the pixel positions of the cathode film 5 and the focusing electrode 9 are aligned. The light emitting device 60 including the upper substrate 10 and the electron source 50 including the lower substrate 1 are assembled. The assembled structure becomes the display light emitting element 70. Next, the display light emitting element 70 is baked at 450 ° C. Thereafter, the air in the internal space of the display light emitting element 70 is exhausted and the internal space is evacuated, whereby the display light emitting element 70 is completed.

  Next, a voltage of 5 kV to 10 kV is applied to the anode electrode 12 of the display light emitting element. A voltage of about 10 V to 100 V is applied between the cathode electrode 2 and the gate electrode 7 of the electron source. Thereby, electric field concentration occurs at the tip of the carbon nanotube 4 constituting the cathode film 5. When the strength of the electric field is about 1.0 V / μm, electrons are emitted from the tip of the carbon nanotube 4. The emitted electrons are attracted to the anode electrode 12 by the high voltage applied to the anode electrode 12 (aluminum electrode) and collide with the phosphor layer 11. As a result, the phosphor layer 11 emits light. At this time, the display light emitting element emits light with higher brightness than the display light emitting element using the conventional FED.

  According to the display light emitting element of the present embodiment, effects such as low driving voltage, low power consumption, high luminance, and high-definition images can be obtained. Therefore, the display issuing element of the present embodiment can be used, for example, for a display or information display of a home-use large screen television.

  The embodiment disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

It is a figure for demonstrating the carbon nanotube paste of embodiment. It is a figure for demonstrating the structure of the electron source of embodiment. It is a figure for demonstrating the structure of the electron source formed using the glass particle containing lead oxide. It is a SEM (Scanning Electron Microscope) photograph which shows the state of a carbon nanotube and glass when the electron source of embodiment is baked at 400 degreeC. It is a SEM photograph which shows the state of a carbon nanotube and glass particle when the electron source of embodiment is baked at 440 degreeC. It is a graph which shows the relationship between the baking temperature of a cathode film | membrane, and the electron emission start voltage of an electron source. It is a graph which shows the relationship between a glass particle size and the electron emission start electric field of an electron source. It is sectional drawing which shows the VIII-VIII line of FIG. It is a partially cutaway top view of a display light emitting element.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 Lower substrate, 2 Cathode electrode, 3 Glass particle, 4 Carbon nanotube, 5 Cathode film, 6 Insulating layer, 7 Gate electrode, 8 support | pillar, 9 Focusing electrode, 10 Upper substrate, 11 Phosphor layer, 12 Anode electrode.

Claims (5)

A plurality of carbon nanotubes,
A plurality of glass particles containing bismuth;
A carbon nanotube paste comprising a vehicle having a resin. A cathode electrode;
A plurality of glass particles fused and exposed on the cathode electrode;
A display light emitting element comprising a plurality of carbon nanotubes present between the plurality of glass particles.   The display light emitting element of Claim 2 whose average particle diameter of these glass particles is 0.1 micrometer-0.6 micrometer. Using the carbon nanotube paste according to claim 1 to form a cathode film on the cathode electrode;
Burning the resin by heat treating the carbon nanotube paste at a first temperature;
And a step of fusing the glass particles and the cathode electrode by heat-treating the cathode film at a second temperature higher than the first temperature in an oxygen-free atmosphere. Manufacturing method.   The manufacturing method of the display light emitting element of Claim 4 whose said 1st temperature is 420 to 460 degreeC.

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