JP2006226850A - Thermal analysis sensor and thermal analysis system using the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To realize a thermal analysis sensor by forming a temperature sensor and a sample holder on a thin film, having a very small heat capacity and being thermally isolated from a substrate, which uses much less power and makes the temperature distribution of at least the sample holder uniform, by using an external heating means of high response speed, and to provide a thermal analysis system that uses the same. <P>SOLUTION: The head section of the thin film, made of an SOI layer or the like and formed like a cantilever, is used as the sample holder, and a thin-film temperature sensor is formed on this region. The thermal analysis sensor having the heating means is constituted, such that the sample holder can be heated uniformly by forming a thin film heater which is used as the heating means, on a diaphragm being positioned on the upper and the lower sides of the cantilever of the SOI layer and sandwiches the thin film via a gap, or by forming a thin-film heater which surrounds the thin film. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

The present invention relates to a thin film temperature sensor and a sample holder formed on a thin film thermally separated from a substrate, a thermal analysis sensor including a heating means for heating the thin film substantially uniformly, and a thermal analysis apparatus using the same. In the case where the sample in the sample holder is a biological sample, it can be used as a thermal biosensor using an enzyme reaction, and low temperature using changes in the enthalpy of the sample by temperature scanning with a heating means with a small heat capacity. It can be used as a thermal analyzer that can detect a very small amount of sample with power consumption.

  Conventionally, there has been a thermal analyzer as a differential calorimeter. In this apparatus, the sample holder is a container made of a metal plate, and two sample holders are temperature-scanned by a predetermined temperature program in a temperature-controlled electric furnace. On the other side, a standard sample is installed. If the enthalpy changes in the non-detected sample as the temperature rises, a temperature difference occurs between the standard sample and the non-detected sample at this time. Therefore, there is an apparatus for displaying the temperature difference with time and checking the physical properties of the non-detected sample. However, in this conventional thermal analyzer, the heat capacity of the sample holder is large, a large amount of non-detection sample is required, the response time is also slow, and the electric furnace that heats the sample holder has a heat capacity such as covering with a heat insulating material. Since it is large, the power consumption is large and the response time is very slow, and it takes several hours for one measurement.

On the other hand, the present applicant has invented a thermal analysis apparatus that includes at least one sample holder and a thin film heater on a thin film thermally separated from a substrate, and performs temperature scanning according to a predetermined temperature program (Japanese Patent No. 3377162; USP). -63331074), when the thin film thermally separated from the substrate is about 700 μm square and the thickness is about 10 μm, the boiling point detection, which is a change in water enthalpy, can be detected in about several tens of seconds.

The present applicant has disclosed a gas sensing device having a thin film thermally separated from a substrate, one thin film heater, one temperature sensor ThA, and another temperature sensor ThB in a thin film located away from the thin film heater. (Japanese Patent Application No. 2003-076619) and can be used for a flow sensor, a Pirani type vacuum sensor, an absolute humidity sensor, and the like, and further, a specific enzyme is fixed to a thin film at a temperature sensor ThB. It was also shown that it can be used as a sensor.

However, in the thermal analyzer invented by the present applicant (Japanese Patent No. 3377162; USP-63331074), in the detection of a trace amount of liquid, the sample evaporates during the temperature scanning time, and the amount of the liquid sample decreases with time Therefore, it is necessary to devise measures to prevent this, the problem of the method of introducing a very small amount of liquid sample into the sample holder, and further, because the micro heater and the temperature sensor are formed on the same thin film, Since there is an extra heat capacity of the microheater and there is also a temperature distribution during heating in the thin film, it is difficult to achieve high sensitivity and high accuracy.

In addition, in order to use the gas sensing device invented by the present applicant as a biosensor, there is still a problem of introducing a very small amount of liquid, in particular, how a liquid sample having a different temperature is transferred to the enzyme fixing region in the sample holder. There was a problem of introducing only a certain amount.
Japanese Patent No. 3377162 JP 2004-286492 A

  The problem to be solved is to form a temperature sensor and sample holder on a thin film with extremely small heat capacity, and to achieve a high-speed response, high sensitivity and high accuracy with respect to temperature, and a uniform temperature distribution Providing a thermal analysis sensor that prevents heating by forming heating means outside the above thin film with low power consumption and introducing a very small amount of liquid sample into the sample holder. Furthermore, it is to provide an ultra-compact thermal analyzer using the same.

  In order to solve the above-mentioned problems, a thermal analysis sensor according to claim 1 of the present invention is provided with at least one thin film temperature sensor 5 and a sample on a thin film 2 thermally separated from a substrate 1 through a first cavity 3. And a heating means for raising the temperature of at least the sample holder 6 of the thin film 2 substantially uniformly. The heating means surrounds the sample holder 6 with a gap 30 therebetween. The thin-film temperature sensor 5 detects a temperature change based on the thermal reaction of the sample introduced into 1.

The thermal analysis sensor according to claim 2 of the present invention is a case where the thin film heater 20 is used as the heating means.

The thermal analysis sensor according to claim 3 of the present invention is a case where the thin film heater 20 is a pair of thin film heaters 21 and 22 configured to sandwich the sample holder 6 formed on the thin film 2 from above and below. is there. One thin film heater 21 is a diaphragm 25 formed directly through the first cavity 3 of the substrate 1 that supports the thin film 2, or another substrate that is in close contact with the thin film 2 on the opposite side of the substrate 1. A diaphragm 25 can be formed. The other thin film heater 22 can be formed in a diaphragm 26 formed through a second cavity 13 formed in another substrate 10 formed in close contact with the substrate 1.

The thermal analysis sensor according to claim 4 of the present invention is a case where a transistor thermistor, a diode thermistor or a thin film thermocouple is used as the thin film temperature sensor 5.

The thermal analysis sensor according to claim 5 of the present invention is a case where the enzyme 7 is fixed to the sample holder 6.

The thermal analysis sensor according to claim 6 of the present invention is a case where a liquid sample is guided to the sample holder 6 by capillary action or electroosmotic flow.

The thermal analysis sensor according to claim 7 of the present invention is a case where the thin film cover 55 is provided on the sample holder 6 so that the liquid sample is difficult to evaporate. Of course, it is better to provide the thin film cover 55 also in the channel portion extending from the sample injection hole to the sample holder 6, and a thin film is made of a material having a high affinity for the liquid sample. It is advantageous to use the cover 55 as a material because it is easy to use the capillary phenomenon.

A thermal analysis apparatus according to an eighth aspect of the present invention includes the thermal analysis sensor according to any one of the first to seventh aspects, and further includes a temperature control unit that controls the temperature of the heating unit. The temperature change based on the thermal reaction of the sample placed in the sample holder 6 of the thermal analysis sensor is detected by the thin film temperature sensor 5 of the thermal analysis sensor.

Further, the thermal analysis apparatus according to claim 9 of the present invention is a case where the temperature control means is held at a constant temperature or temperature scanning can be performed based on a predetermined program.

  The thermal analysis sensor of the present invention is provided with a thin film temperature sensor 5 and a sample holder 6 on a thin film 2 thermally separated from a substrate 1 through a first cavity 3, and the thin film 2 is heated via a gap 30. Since the structure surrounds the thin film 2, the convection can be neglected particularly when the gap 30 is narrowed, and there is an advantage that the sample holder 6 can be easily heated to raise the temperature substantially uniformly. Furthermore, since the thin film temperature sensor 5 and the sample holder 6 are formed in the thin film 2 having the same floating structure, the heat capacity is small, and the temperature can be increased at high speed with low power consumption. There is.

Since the thermal analysis sensor of the present invention is the thin film heater 20 as a heating means, it becomes a heater with a high speed response and low power consumption, and if Joule heating is used, fine temperature control is possible by controlling power supply. There is an advantage of becoming.

The thermal analysis sensor of the present invention is a thin film heater 20 formed as a diaphragm formed through cavities 31 and 32 on substrates 10 and 11 in which the substrate 1 supporting the thin film 2 is formed in close contact with the upper and lower sides, respectively. In particular, if a silicon single crystal is used as a substrate, a semiconductor MEMS technology can be used. Therefore, a control circuit, an arithmetic circuit, a memory circuit, a drive circuit, etc. as an integrated circuit can be easily formed on the same substrate. The thermal analysis sensor chip can be produced, and when this is used in a thermal analysis device, there is an advantage that a handy thermal analysis device can be provided.

The thermal analysis sensor of the present invention is a photolithography that is generally used in a semiconductor manufacturing process when a transistor thermistor, a diode thermistor, or a current detection type thermocouple that is extremely sensitive and ultra-small is used as the thin film temperature sensor 5. Can be used, and there is an advantage that a low-cost and high-sensitivity thermal analysis sensor can be achieved.

The thermal analysis sensor of the present invention is used as a thermal bio that can analyze a trace amount component from an exothermic reaction with a specific substance component in a non-detected sample by using an enzyme reaction when an enzyme is immobilized on the sample holder 6. can do.

Further, a plurality of thin films 2 thermally separated from the substrate 1 are formed on the substrate 1, and a thin film temperature sensor 5, a sample holder 6, and different enzymes are formed in the thin films on each thin film 2, and a non-detection sample is provided there. By being able to introduce | transduce, there exists an advantage that the substance component corresponding to each can be specified at a stretch.

The thermal analysis sensor of the present invention has an advantage that it is easy to introduce a certain amount of liquid sample because the liquid sample is guided to the sample holder 6 by capillary action or electroosmotic flow. In particular, when the capillary phenomenon is used, there is an advantage that the sample drive unit and electric power are unnecessary, and the advantage that the sample can be introduced easily and at high speed by using the electroosmotic flow. There is.

In the thermal analysis sensor of the present invention, since the thin film cover 55 is provided on the sample holder 6 so that the liquid sample is not easily evaporated, thermal analysis can be performed even for a volatile sample, and this thin film cover having a very small heat capacity is used. Thus, there is an advantage that a predetermined amount of liquid sample can be introduced into the sample holder.

Since the thermal analysis apparatus of the present invention uses the thermal analysis sensor having the above-mentioned advantages, the temperature control means for controlling the temperature of the heating means can also be made extremely small in size and low in power consumption, thereby providing a handy thermal analysis apparatus. There is an advantage that you can.

The thermal analysis apparatus of the present invention uses the thermal analysis sensor having the above-mentioned advantages and can maintain a constant temperature as temperature control means. There is an advantage that the kind and amount of the specific component can be easily analyzed by holding the enzyme at the most active temperature and performing the exothermic enzymatic reaction of the specific component in the liquid sample introduced therein.

The thermal analysis apparatus of the present invention uses the thermal analysis sensor having the above-mentioned advantages and allows temperature scanning based on a predetermined program as temperature control means, so that not only a liquid sample but also a very small amount of solid There is an advantage that a handy thermal analysis apparatus capable of performing thermal analysis on a sample can be provided.

  The SOI layer of the SOI substrate is formed in a cantilever shape, and the tip is formed wide, for example, as a sample holder, and a thin film temperature sensor is formed in this region. Further, a diaphragm is formed on the upper and lower sides of the cantilever of the SOI layer through a gap, and a thin film heater is formed as a heating means here, so that the sample holder of the cantilever can be uniformly heated from the outside. A thermal analysis sensor having means is configured.

Integration of a circuit for amplifying a signal from the thermal analysis sensor having the above heating means, an arithmetic circuit for calculating a desired characteristic from the signal, a temperature control circuit as a temperature control means for controlling the temperature of the thin film heater as the heating means, etc. A circuit is formed on the same SOI substrate on which a cantilever of an SOI layer having a thin film temperature sensor and a sample holder is formed to constitute a thermal analyzer. Thus, by forming the thermal analysis sensor unit and an integrated circuit for driving and calculating the thermal analysis sensor unit on the same SOI substrate, an extremely compact thermal analysis apparatus can be provided.

FIG. 1 is an example in which the thermal analysis sensor of the present invention is a thermal biosensor based on an enzyme reaction, and is a schematic plan view of a portion of a substrate 1 having a thermally separated thin film 2 of the thermal analysis sensor. This is a case where the thin film 2 floating inside for thermal separation from the substrate 1 is implemented as a cantilever 9. FIG. 2 is a schematic cross-sectional view showing an embodiment of the thermal analysis sensor. The lid 12 of the substrate 10 is joined to the substrate 1 shown in FIG. The thin film 2 is uniformly heated.

As the substrate 1, a (100) plane SOI substrate using a silicon single crystal is used, and the first cavity 3 is formed on the SOI substrate leaving at least a part of the SOI layer 8. Then, the SOI layer 8 A thermally separated in the form of the cantilever 9 is used as the thin film 2. A thin film temperature sensor 5 and a sample holder 6 are formed on the thin film 2. The thin film temperature sensor 5 uses a thin film thermocouple (for example, it can be created by forming a highly concentrated n-type layer as the element 5A of the thin film thermocouple and forming a nickel thin film as the element 5B of the thin film thermocouple). In this case, the sample holder 6 is simply an example in which the tip of the cantilever 9 is widened and an enzyme 7 such as glucose oxidase is fixed in a thin film there.

Similar to the substrate 1 on which the thin film 2 of the cantilever 9 is formed, as shown in FIG. 2, a sample of the thin film 2 subjected to thermal separation using a substrate 10 which is an SOI substrate having a (100) plane of silicon single crystal is used. Two diaphragms 25 and 26 are formed on the two substrates 1 and 10 through the first cavity 3 and the second cavity 13 so as to surround the sample holder 6 with a sufficiently larger area than the holder 6. Then, a low resistance layer region is formed in these diaphragms 25 and 26 by impurity diffusion of a semiconductor, and two thin film heaters 21 and 22 made of silicon single crystal thin film and generating surface heat are formed. The regions of these thin film heaters 21 and 22 are formed so as to sandwich the sample holder 6 and are formed sufficiently larger than the area of the sample holder, so that the sample holder 6 is heated almost uniformly and uniformly. So that the temperature distribution is stable.

The first cavity 3 and the second cavity 13 can be easily formed by anisotropic etching of silicon such as a hydrazine aqueous solution, but the diaphragm 25 formed on the substrate 1 is made of a boron-resistant high resistance to anisotropic etching. Conveniently formed by concentration addition. In this case, since the boron-added silicon is p-type, the base substrate of the SOI substrate which is the substrate 1 is preferably n-type.

The temperature change based on the temperature of the sample holder 6 and the thermal reaction between the enzyme 7 immobilized thereon and the introduced sample 60 is measured using the thin film temperature sensor 5 formed in the sample holder 6. In this embodiment, a thin film thermocouple is used as the thin film temperature sensor 5, and the temperature of the sample holder 6 is set as a substrate using a thin film thermocouple as an ordinary thermocouple (voltage detection type using open electromotive force measurement). The temperature difference between 1 and the sample holder 6 may be detected, or the thin film thermocouple invented by the present applicant is short-circuited more equivalently, such as a virtual short circuit of an OP amplifier, and the temperature difference is measured from the current flowing therethrough. The temperature difference between the substrate 1 and the sample holder 6 may be detected as a so-called current detection type thermocouple. In that case, the thermistor 15 provided on the substrate 1 may be used as the temperature of the substrate 1. In the present embodiment, a high-concentration n-type silicon layer and a nickel thin film are used as the thin film thermocouple elements 5A and 5B, respectively, and the case where the thin film thermocouple is used as a current detection type thermocouple is shown.

In the case of glucose oxidase as the enzyme 7, when a glucose aqueous solution is used as the liquid sample, the temperature of the two thin film heaters 21 and 22 may be adjusted so that the temperature of the sample holder 6 is about 37 ° C. A glucose aqueous solution as a liquid sample 60 is introduced from the sample injection hole 16, moves the channel 17 toward the sample holder 6 by capillary action, and is fixed to the sample holder 6 while being heated to about 37 ° C. in the middle. Reacting with the glucose oxidase fixed in the shape, the glucose is oxidized to cause an exothermic reaction, and the calorific value changes according to the concentration of glucose. Therefore, the temperature of the sample holder 6 rises accordingly, so that the thin film temperature sensor From this temperature detection by 5, the concentration of the glucose aqueous solution can be known. When the aqueous glucose solution is calibrated using blood, urine, or body fluid such as saliva, so-called blood glucose level can be measured.

In this embodiment, since a liquid sample is used, a thin film cover 55 is placed on the channel 17 so that the liquid sample passing through the channel 17 does not evaporate, and capillary action is also likely to occur. The thin film cover 55 can also suppress evaporation from the sample holder 6 by extending the thin film cover 55 onto the sample holder 6 by dividing the thin film cover 55 on the enzyme 7 fixed in a thin film state.

FIG. 3 shows an embodiment in which the thermal analysis sensor having the heating means of the apparatus of the present invention is implemented as a thermal biosensor based on an enzyme reaction, and the thermal analysis sensor shown in FIGS. 1 and 2 described in the first embodiment. Of these, a plurality of sensing portions (S1 to S14) excluding the sample injection hole 16 and the channel 17 are provided (14 in this embodiment). Different enzymes 7 are fixed to the sensing part, and each enzyme 7 is set to a temperature at which it easily reacts with a specific substance. A liquid sample 60 injected from the sample injection hole 16 flows through the channel 17 into each sensing portion (S1-S14). Since only the sensing portion of S1 to S14, for example, S3, where the enzyme 7 that reacts with the sample 60 is fixed rises in temperature, the component of the sample 60 that reacts with this specific enzyme can be identified, and its heat generation It is also possible to measure the amount of the reacting component of the sample 60 from the amount.

FIG. 4 is a schematic diagram showing an embodiment of the thermal analysis sensor of the present invention for thermal analysis of a very small amount of sample 60, and FIG. 4A is a sectional structural view thereof. ) Is a cross-sectional structure diagram showing only the removable sensor chip 300 portion of the thermal analysis sensor. This sensor chip 300 can be made inexpensively, for example, as a disposable type (desposable type).

Referring to the sensor chip 300 in FIG. 4B, the thin film 2 is formed by thermally separating the cantilever type substrate 1 by forming the cavity 3 from the single crystal silicon substrate 1 by, for example, an anisotropic etching technique. The thin film 2 is formed by extending the sample holder 6, a thin film thermocouple as the thin film temperature sensor 5, and elements 5 A and 5 B of this thin film thermocouple to the cantilever type thin film 2, and conducting thermal analysis. The sample 60 is placed on the sample holder 6 at the tip. On the substrate 1 side, thick thin film temperature sensor electrodes 41A and 41B are formed as electrodes from the thin film extending thin film thermocouple elements 5A and 5B. The thin film temperature sensor contacts 41C and 41D, which are electrodes on the case 200 side, can be electrically connected. Further, a thermistor 15 which is a temperature sensor formed on the substrate 1 is formed on the substrate 1 side, and the temperature of the substrate 1 is detected, and a minute temperature change of the sample holder 6 is detected on the basis of the detected temperature. Measurement is possible from the output of the thin film temperature sensor 5 which is a thermocouple. The thin film thermocouple can also be used as the above-described current detection type thermocouple. Since the sensor chip 300 is detachable, the sensor chip 300 is provided with a chip cover 310 made of plastic or the like so that it can be easily handled, and the position thereof is determined when the sensor chip 300 is inserted into the case 200. A stopper 350 is attached. In the figure, the chip cover 310 is drawn only on the surface side of the substrate 1, but the substrate 1 may be wrapped with the chip cover 310, rather, it is more convenient for handling. It is.

4A is a diagram when the sensor chip 300 illustrated in FIG. 4B is attached to the case 200. In the case 200 made of a heat insulating material, the thin film heater 20 includes the case 200. FIG. The thin film heater 20 is spatially separated from the thin film 2 on which the sample 60 of the inserted sensor chip 300 is mounted by the air gap 30. The thin film 2 is formed so as to be surrounded by a substantially sealed structure so that the sample 60 is heated uniformly. Terminals from the thin film heater 20 and the thin film temperature sensor 5 which is a thin film thermocouple are connected to the outside of the case 200 via the wiring 101 as thin film heater terminals 45A ′ and 45B ′ and thin film temperature sensor terminals 41A ′ and 41B ′, respectively. It is formed.

The outline of the operation of the thermal analysis sensor of this embodiment will be described as follows. A solid or liquid sample 60 is mounted, for example, only in a fixed amount on the sample holder 6 near the tip of the sensor chip 300 and mounted in the case 200. A current is passed through the thin film heater 20 through the thin film heater terminals 45A 'and 45B' to raise or lower the temperature of the thin film heater 20, and to perform temperature scanning such as raising or lowering the temperature of the thin film 2 on which the sample 60 is mounted. In this temperature control, the temperature of the thin film heater 20 is scanned with a predetermined program, such as increasing or decreasing the temperature linearly with time. The predetermined program is an empty sensor chip 300 on which the sample 60 is not mounted, or a standard sample is mounted instead of the sample 60, and a temperature rise test is performed using the thin film temperature sensor 5 at the sample holder 6. It is better to set it based on this. When the temperature of the sample 60 is increased with time, heat generation or endothermic reaction is accompanied by changes in the melting point, boiling point and other states of the sample 60, and enthalpy changes based on chemical reactions. A temperature change occurs when the temperature is reached. When the sample 60 is not present or when it is a standard sample, nothing happens at that temperature. Therefore, by obtaining the difference in temperature change over time with or without the sample 60 or with the standard sample, 60 thermal properties are required. In this way, thermal analysis of the sample 60 becomes possible.

In the embodiment of thermal analysis using the thermal analysis sensor of the present invention described above, the predetermined program for temperature scanning uses an empty sensor chip 300 that does not have the sample 60 mounted thereon, or a standard sample instead of the sample 60. Although the case where it mounts was shown, from the beginning, two equivalent cantilever type thin films 2 having a thin film temperature sensor 5 and a sample holder 6 are formed on one substrate 1, and a sample 60 is mounted on one side. On the other hand, a standard sample or an empty sample state (with no sample 60) can be simultaneously scanned for temperature, and the differential temperature can be output over time by these differential operations for thermal analysis. I can do it.

Further, in the above-described thermal analysis embodiment, the temperature measurement of the thin film heater 20 itself is not mentioned, but if the resistance temperature coefficient of the thin film heater 20 is large, the thin film heater 20 itself is determined from the magnitude of the resistance value of the thin film heater 20. The other temperature sensors can be formed in the thin film heater 20 and can be used as the representative temperature of the thin film heater 20 from the temperature measurement.

The temperature scanning of the thin film heater 20 may be programmed based on the temperature of the thin film heater 20 itself, or may be based on the thin film temperature sensor 5 mounted on the thin film 2.

In the embodiment described above, the cantilever type is used as the thin film 2, but this may be the thin film 2 supported at both ends, or a slit can be formed in the diaphragm to reduce the heat conduction to the substrate 1 to easily raise the temperature. You may do it.

FIG. 5 shows a schematic block diagram of an embodiment of the configuration of the thermal analyzer of the present invention. In the present embodiment, for example, by using an empty sensor chip 300 on which the sample 60 is not mounted, the temperature is increased at a constant rate with time with reference to the thin film temperature sensor 5 mounted on the thin film 2. This is a case where the temperature scanning of the thin film heater 20 as the temperature control means is programmed. First, using the empty sensor chip 300, the output corresponding to the time-varying temperature of the thin film temperature sensor 5 according to the temperature scan is amplified using the output amplifier circuit unit and calculated by the arithmetic circuit unit. Electric power is supplied from time to time to the thin film heater 20 as the heating means via the temperature control means so that the temperature of the thin film temperature sensor 5 rises at a constant rate. Further, the output of the thin film temperature sensor 5 corresponding to the momentary temperature at this time is recorded in a memory in the arithmetic circuit section. Next, the same temperature scan is performed by using the sensor chip 300 on which the sample 60 is mounted, and the recorded momentary output when empty and the corresponding momentary output when the sample 60 is loaded are obtained. Based on the start of temperature scanning, output corresponding to each temperature difference is output in correspondence with the temperature difference over time in the arithmetic circuit part, and this is graphed on the display circuit part, or the data is displayed every moment I will let you. If there is enthalpy change in the sample 60 within this temperature scanning range, a stagnation of temperature or the like occurs. Therefore, the temperature difference between when the sample 60 is present and when there is no sample 60 is the temperature at which the enthalpy change occurs in the sample 60. It can be operated as a so-called conventional thermal analyzer.

In the above-described embodiment, the temperature scanning is performed, but before the sample 60 is mounted, the temperature of the thin film heater 20 as the heating means is set so that the temperature of the sample holder 6 is kept constant at a constant temperature. Then, after that, the sample 60 can be mounted and, for example, the temperature change due to the oxidation reaction heat of the sample 60 using the enzyme 7 can be detected to know the amount of the specific component in the sample 60.

Each of the above-described embodiments is merely one embodiment, and it is natural that there are various modifications while the gist, operation, and effect of the present invention are the same.

It is the plane schematic diagram of the part of the board | substrate 1 which has the heat-separated thin film 2 among the thermal analysis sensors of this invention. Example 1 It is a cross-sectional schematic diagram of the thermal analysis sensor of this invention. Example 1 It is the plane schematic diagram of a board | substrate at the time of providing the sensing part of the thermal analysis sensor of this invention with two or more on the same board | substrate. (Example 2) BRIEF DESCRIPTION OF THE DRAWINGS It is a schematic diagram which shows one Example of the thermal analysis sensor of this invention, The same figure (A) is the cross-sectional structure schematic diagram, The same figure (B) is a detachable sensor chip among thermal analysis sensors. It is the cross-section figure which extracted and displayed only 300 parts. Example 3 It is a schematic block diagram of one Example of a structure of the thermal analyzer of this invention. Example 4

Explanation of symbols

1, 10, 11 Substrate 2 Thin film 3, 13 Cavity 5 Thin film temperature sensor 5A, 5B Thin film thermocouple element 6 Sample holder 7 Enzyme 8, 8A, 8B SOI layer 9 Cantilever 12 Lid 15 Thermistor 16 Sample injection hole 17 Channel 20, 21, 22 Thin film heaters 25, 26 Diaphragm 30, 31 Air gap 41A, 41B Thin film temperature sensor electrode 41A ', 41B' Thin film temperature sensor terminal 41C, 41D Thin film temperature sensor contact 42A, 42B Thermistor electrode 43A, 43B Upper thin film Heater electrodes 44A, 44B Lower thin film heater electrodes 45A, 45B Thin film heater electrodes 45A ', 45B' Thin film heater terminals 50 Embedded insulating film (BOX layer)
51 Insulating film 55 Thin film cover 60 Sample 101 Wiring 120 Spacer 200 Case 300 Sensor chip 310 Chip cover 350 Stopper

Claims (9)

The thin film (2) thermally separated from the substrate (1) via the first cavity (3) is provided with at least one thin film temperature sensor (5) and a sample holder (6), and the thin film (2) And heating means for raising the temperature of at least the sample holder (6) substantially uniformly. The heating means surrounds the sample holder (6) through the gap (30) and is introduced into the sample holder (6). A thermal analysis sensor characterized in that a temperature change based on a thermal reaction of a sample is detected by the thin film temperature sensor (5). The thermal analysis sensor according to claim 1, wherein the heating means is a thin film heater (20). The first cavity (3) of the substrate (1) that supports the thin film (2) and the second cavity (13) provided in a different substrate (10) each have a diaphragm (25, 26). The thermal analysis sensor according to claim 2, wherein the thin film heater (20) is a pair of thin film heaters (21, 22) respectively formed on the diaphragms (25, 26). The thermal analysis sensor according to any one of claims 1 to 3, wherein a transistor thermistor, a diode thermistor, or a current detection type thermocouple is used as the thin film temperature sensor (5). The thermal analysis sensor according to any one of claims 1 to 4, wherein the enzyme (7) is fixed to the sample holder (6). The thermal analysis sensor according to claim 5, wherein the liquid sample is guided to the sample holder (6) by capillary action or electroosmotic flow. The thermal analysis sensor according to claim 6, wherein a thin film cover (55) is provided on the sample holder (6) to prevent evaporation of the liquid sample. A thermal analysis sensor according to any one of claims 1 to 7, further comprising temperature control means for controlling the temperature of the heating means, and a sample installed in a sample holder (6) of the thermal analysis sensor. A thermal analysis apparatus characterized in that a temperature change based on a thermal reaction is detected by a thin film temperature sensor (5) of the thermal analysis sensor. 9. The thermal analyzer according to claim 8, wherein the temperature control means is configured to maintain a constant temperature or perform temperature scanning based on a predetermined program.