JP2006200955A - Instrument for measuring magnetic field distribution - Google Patents

Instrument for measuring magnetic field distribution Download PDF

Info

Publication number
JP2006200955A
JP2006200955A JP2005011014A JP2005011014A JP2006200955A JP 2006200955 A JP2006200955 A JP 2006200955A JP 2005011014 A JP2005011014 A JP 2005011014A JP 2005011014 A JP2005011014 A JP 2005011014A JP 2006200955 A JP2006200955 A JP 2006200955A
Authority
JP
Japan
Prior art keywords
magnetic field
probes
probe
field distribution
distribution measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2005011014A
Other languages
Japanese (ja)
Inventor
Yasuki Sato
康喜 佐藤
Tomonori Yamada
智紀 山田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Engineering Ltd
Original Assignee
NEC Engineering Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Engineering Ltd filed Critical NEC Engineering Ltd
Priority to JP2005011014A priority Critical patent/JP2006200955A/en
Publication of JP2006200955A publication Critical patent/JP2006200955A/en
Pending legal-status Critical Current

Links

Images

Landscapes

  • Measuring Magnetic Variables (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide an instrument for measuring magnetic field distribution with satisfactory measurement sensitivity for measuring the noise field intensity emitted from an apparatus under measurement in a short period of time. <P>SOLUTION: This instrument for measuring the magnetic field distribution is equipped with a body 1 and a plurality of magnetic field probes 2 projecting from the body 1 for measuring the noise magnetic fields emitted from the apparatus 6 under measurement. The plurality of magnetic field probes 2 are extensible in the respective axial directions of the field probes 2 and it is suitable to arrange them in two or more ranks and files on an attachment surface of the body 1 for the field probes 2. The plurality of magnetic field probes 2 each comprise a magnetism shut-off means 2a within the body of each magnetic field probe 2 and an end part 2c of each magnetic field probe 2 is extensible. In measuring magnetic field distribution, the effect of magnetism of neighboring magnetic field probes 2 on each other is avoided by causing the end part 2c of each magnetic field probe 2 to be surrounded by the shut-off means 2a within the field probes 2, making it possible to meet magnetic field measurement of narrow pitches. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、磁界分布測定装置に関し、特に、被測定機器から放射される雑音電波の強度を測定するために用いられる磁界分布測定装置に関する。   The present invention relates to a magnetic field distribution measuring apparatus, and more particularly to a magnetic field distribution measuring apparatus used for measuring the intensity of noise radio waves radiated from a device under measurement.

従来、電子機器から放射された雑音電波が他の電子機器の動作に障害を与えることを防止するため、各国において電子機器から放射される雑音電波の強度を規制している。この電子機器から放射される雑音電波の強度を測定するにあたって、例えば、特許文献1に記載の2次元電磁界強度測定装置は、上記雑音電波の電界又は磁界を電磁界プローブによって検出する。
特開平4−230874号公報
Conventionally, in order to prevent noise radio waves radiated from electronic devices from impeding the operation of other electronic devices, the intensity of noise radio waves radiated from electronic devices is regulated in each country. In measuring the intensity of noise radio waves radiated from the electronic device, for example, the two-dimensional electromagnetic field intensity measuring device described in Patent Document 1 detects the electric field or magnetic field of the noise radio waves with an electromagnetic field probe.
JP-A-4-230874

しかし、上記特許文献1に記載の測定装置では、磁界プローブが所定の高さに固定されているため、被測定機器の表面と磁界プローブとが離間し、磁界強度は発生源から測定点までの距離に依存するため、測定感度が悪いという問題があった。また、同測定装置では、1本の磁界プローブを用いて2次元走査をするため、測定に長時間を要するという問題があった。   However, since the magnetic field probe is fixed at a predetermined height in the measurement apparatus described in Patent Document 1, the surface of the device to be measured is separated from the magnetic field probe, and the magnetic field strength is measured from the source to the measurement point. Since it depends on the distance, there is a problem that the measurement sensitivity is poor. In addition, since the measurement apparatus performs two-dimensional scanning using one magnetic field probe, there is a problem that it takes a long time for measurement.

そこで、本発明は、上記従来の測定装置における問題点に鑑みてなされたものであって、測定感度が良好で、かつ、短時間で測定を行うことのできる磁界分布測定装置を提供することを目的とする。   Therefore, the present invention has been made in view of the problems in the above-described conventional measuring apparatus, and provides a magnetic field distribution measuring apparatus having good measurement sensitivity and capable of performing measurement in a short time. Objective.

上記目的を達成するため、本発明は、被測定機器から放射される雑音電波の磁界を測定する磁界分布測定装置であって、本体と、該本体から突出する複数の磁界プローブとを備えることを特徴とする。   In order to achieve the above object, the present invention provides a magnetic field distribution measuring apparatus for measuring a magnetic field of noise radio waves radiated from a device under test, comprising a main body and a plurality of magnetic field probes protruding from the main body. Features.

そして、本発明によれば、本体から突出する複数の磁界プローブによって磁界分布を測定するため、測定時間を短縮することができるとともに、このような磁界分布測定装置を組み合わせることによって、様々な形状の被測定機器に対応することができる。   According to the present invention, since the magnetic field distribution is measured by the plurality of magnetic field probes protruding from the main body, the measurement time can be shortened, and by combining such a magnetic field distribution measuring apparatus, various shapes can be obtained. It can correspond to the device under test.

前記磁界分布測定装置において、前記複数の磁界プローブの各々を、該磁界プローブの各々の軸線方向に伸縮可能とすることができる。これによって、被測定機器の表面と磁界プローブの先端部との間の距離を密着状態で一定に維持することができ、測定感度が向上する。すなわち、被測定機器に磁界分布測定装置を押し当てることにより、各磁界プローブが被測定機器表面の凹凸に沿って伸縮し、磁界強度測定は、磁界の発生源から測定点までの距離に依存するため、測定感度が向上する。   In the magnetic field distribution measuring apparatus, each of the plurality of magnetic field probes can be expanded and contracted in the axial direction of each of the magnetic field probes. As a result, the distance between the surface of the device under test and the tip of the magnetic field probe can be kept constant in a close contact state, and the measurement sensitivity is improved. That is, by pressing the magnetic field distribution measuring device against the device under measurement, each magnetic field probe expands and contracts along the unevenness of the surface of the device under measurement, and the magnetic field strength measurement depends on the distance from the magnetic field source to the measurement point. Therefore, measurement sensitivity is improved.

前記磁界分布測定装置において、前記複数の磁界プローブの各々を、弾性的伸縮手段によって、該磁界プローブの各々の軸線方向に伸縮可能とすることができる。弾性的伸縮手段には、ばね、ダンパー等を用いることができる。   In the magnetic field distribution measuring apparatus, each of the plurality of magnetic field probes can be expanded and contracted in the axial direction of each of the magnetic field probes by elastic expansion and contraction means. A spring, a damper, or the like can be used as the elastic expansion / contraction means.

前記複数の磁界プローブは、前記本体の該磁界プローブの取付面において、縦横に複数配列することができる。これによって、一度に基板等の全体の測定を行うことが可能となり、測定時の2次元走査の動作を省略することができ、測定時間を短縮することができる。   The plurality of magnetic field probes can be arranged vertically and horizontally on the mounting surface of the main body of the magnetic field probe. As a result, it is possible to measure the entire substrate or the like at a time, omitting the two-dimensional scanning operation during measurement, and shortening the measurement time.

前記磁界分布測定装置において、前記複数の磁界プローブの各々は、各々の磁界プローブの本体内部に磁気遮断手段を有するとともに、各々の磁界プローブの先端部が伸縮し、磁界分布測定時に、各々の磁界プローブの先端部が該磁界プローブの本体内部において、前記磁気遮断手段によって囲繞されるように構成することができる。これによって、隣接する磁界プローブ間での磁気の影響を回避することができ、狭ピッチの磁界測定にも対応することができる。   In the magnetic field distribution measuring apparatus, each of the plurality of magnetic field probes has a magnetic shielding means inside the main body of each magnetic field probe, and the tip of each magnetic field probe expands and contracts. The tip of the probe can be configured to be surrounded by the magnetic shielding means inside the main body of the magnetic field probe. As a result, the influence of magnetism between adjacent magnetic field probes can be avoided, and a narrow pitch magnetic field measurement can also be handled.

以上のように、本発明によれば、測定感度が良好で、かつ、短時間で測定を行うことのできる磁界分布測定装置を提供することが可能となる。   As described above, according to the present invention, it is possible to provide a magnetic field distribution measuring apparatus that has good measurement sensitivity and can perform measurement in a short time.

図1は、本発明にかかる磁界分布測定装置の一実施の形態を示し、この磁界分布測定装置は、大別して、本体1と、本体1の内部に縦横に高精度に配列され、各々軸線方向に伸縮可能な複数の磁界プローブ2と、外部接続コネクタ3と、磁界プローブ2と外部接続コネクタ3とを接続するケーブル4とで構成される。   FIG. 1 shows an embodiment of a magnetic field distribution measuring apparatus according to the present invention. This magnetic field distribution measuring apparatus is roughly divided into a main body 1 and a highly accurate arrangement in the vertical and horizontal directions inside the main body 1, and each axis direction. A plurality of magnetic field probes 2 that can be expanded and contracted, an external connection connector 3, and a cable 4 that connects the magnetic field probe 2 and the external connection connector 3.

次に、上記構成を有する磁界分布測定装置による被測定機器から放射される雑音電波の磁界測定時の動作について、図2を参照しながら説明する。   Next, the operation at the time of magnetic field measurement of noise radio waves radiated from the device under test by the magnetic field distribution measuring apparatus having the above configuration will be described with reference to FIG.

図2(a)に示すように、被測定機器6の表面には、種々の実装部品によって凹凸が存在する。そこで、磁界分布測定装置の本体1を被測定機器6へ押し当てると、図2(bに示すように、被測定機器6表面の凹凸に沿って各磁界プローブ2が伸縮する。これによって、被測定機器6の表面と磁界プローブ2の先端部が密着状態になり、被測定機器6から放射される雑音電波の磁界測定時に、被測定機器6の表面と磁界プローブ2の先端部との間の距離を一定に維持することができる。   As shown to Fig.2 (a), the unevenness | corrugation exists in the surface of the to-be-measured apparatus 6 by various mounting components. Therefore, when the main body 1 of the magnetic field distribution measuring apparatus is pressed against the device under measurement 6, each magnetic field probe 2 expands and contracts along the unevenness of the surface of the device under measurement 6 as shown in FIG. 2 (b). The surface of the measuring device 6 and the tip of the magnetic field probe 2 are in close contact with each other, and the noise between the surface of the measuring device 6 and the tip of the magnetic field probe 2 is measured when measuring the magnetic field of the noise radio wave radiated from the device under measurement 6. The distance can be kept constant.

図3は、上記磁界プローブ2の伸縮動作の一実施例を示し、本実施例では、磁界プローブ2をエアダンパー7又はオイルダンパー8によって伸縮させている。すなわち、本体1に設置された磁界プローブ2の上部にエアダンパー7又はオイルダンパー8を設け、被測定機器6に本体1を押し当てると、エアダンパー7(又はオイルダンパー8)の弾性により、磁界プローブ2が伸縮動作する。尚、2点鎖線は、被測定機器6に本体1を押し当てた時の磁界プローブ2及びエアダンパー7(又はオイルダンパー8)を示す。   FIG. 3 shows an embodiment of the expansion and contraction operation of the magnetic field probe 2. In this embodiment, the magnetic field probe 2 is expanded and contracted by the air damper 7 or the oil damper 8. That is, when the air damper 7 or the oil damper 8 is provided on the magnetic field probe 2 installed in the main body 1 and the main body 1 is pressed against the device 6 to be measured, the magnetic field is generated by the elasticity of the air damper 7 (or the oil damper 8). The probe 2 expands and contracts. A two-dot chain line indicates the magnetic field probe 2 and the air damper 7 (or the oil damper 8) when the main body 1 is pressed against the device 6 to be measured.

図4は、上記磁界プローブ2の伸縮動作のもう一つの実施例を示し、本実施例では、板ばね9を用いて磁界プローブ2を伸縮させている。すなわち、本体1に設置された磁界プローブ2の上部に板ばね9を設け、被測定機器6に本体1を押し当てると、板ばね9の弾性により、磁界プローブ2が伸縮動作する。板ばね9の材質は、金属、プラスチック等である。尚、2点鎖線は、被測定機器6に本体1を押し当てた時の磁界プローブ2及び板ばね9を示す。   FIG. 4 shows another embodiment of the expansion and contraction operation of the magnetic field probe 2. In this embodiment, the magnetic field probe 2 is expanded and contracted using a leaf spring 9. That is, when the leaf spring 9 is provided on the magnetic field probe 2 installed in the main body 1 and the main body 1 is pressed against the device 6 to be measured, the magnetic field probe 2 expands and contracts due to the elasticity of the leaf spring 9. The material of the leaf spring 9 is metal, plastic or the like. The two-dot chain line indicates the magnetic field probe 2 and the leaf spring 9 when the main body 1 is pressed against the device under measurement 6.

次に、上記磁界分布測定装置を用いた磁界分布の測定要領について、図5を参照しながらより具体的に説明する。   Next, the magnetic field distribution measuring procedure using the magnetic field distribution measuring apparatus will be described more specifically with reference to FIG.

図5(a)に示すように1台の磁界分布測定装置の本体1によって被測定機器6の狭い範囲への磁界測定を基本形とし、図5(b)に示すように、n台の本体1を平面状に接続して広範囲の磁界測定へも対応することができる。また、図5(c)に示すように、n個の本体1を磁界測定の対象とする所望の範囲に合わせて、様々な形状に組み合わせることもできる。   As shown in FIG. 5 (a), the main body 1 of one magnetic field distribution measuring device is used to measure the magnetic field in a narrow range of the device 6 to be measured. As shown in FIG. 5 (b), n main bodies 1 are used. Can be connected to a plane to support a wide range of magnetic field measurements. Moreover, as shown in FIG.5 (c), it can also be combined with various shapes according to the desired range which makes the n main bodies 1 the object of magnetic field measurement.

上記磁界プローブ2は、図6に示すように、本体内側にシールド(磁気遮断手段)2aが形成され、本体内部のばね2bにより先端部2cが伸縮する。このように構成することにより、被測定機器6に磁界分布測定装置の本体1を押し当てると、図6(b)に示すように、磁界プローブ2の先端部2cがばね2bにより収縮して上方に移動し、磁界プローブ2の本体内部へ収納される。これにより、磁界プローブ2を狭ピッチに設置しても、各測定ポイントにおいて、隣接するポイントからの磁界の影響を受けることがない。   As shown in FIG. 6, the magnetic field probe 2 has a shield (magnetic shielding means) 2a formed on the inner side of the main body, and the tip 2c expands and contracts by a spring 2b inside the main body. With this configuration, when the main body 1 of the magnetic field distribution measuring device is pressed against the device under measurement 6, the tip 2c of the magnetic field probe 2 is contracted by the spring 2b as shown in FIG. And is housed inside the main body of the magnetic field probe 2. Thereby, even if the magnetic field probes 2 are installed at a narrow pitch, each measurement point is not affected by the magnetic field from adjacent points.

本発明にかかる磁界分布測定装置の一実施の形態を示す透視斜視図である。It is a see-through | perspective perspective view which shows one Embodiment of the magnetic field distribution measuring apparatus concerning this invention. 図1の磁界分布測定装置の動作説明図であって、(a)は、磁界分布測定装置を被測定機器に押し当てる前の状態を、(b)は、磁界分布測定装置を被測定機器に押し当てた状態を示す。FIGS. 2A and 2B are operation explanatory views of the magnetic field distribution measuring apparatus of FIG. 1, in which FIG. 1A shows a state before the magnetic field distribution measuring apparatus is pressed against the device to be measured, and FIG. Indicates pressed state. 本発明にかかる磁界分布測定装置におけるエアダンパー又はオイルダンパーによる磁界プローブの伸縮動作を示す図である。It is a figure which shows the expansion-contraction operation | movement of the magnetic field probe by an air damper or an oil damper in the magnetic field distribution measuring apparatus concerning this invention. 本発明にかかる磁界分布測定装置における板ばねによる磁界プローブの伸縮動作を示す図である。It is a figure which shows the expansion-contraction operation | movement of the magnetic field probe by the leaf | plate spring in the magnetic field distribution measuring apparatus concerning this invention. 本発明にかかる磁界分布測定装置による測定要領を説明するための平面図である。It is a top view for demonstrating the measuring point by the magnetic field distribution measuring apparatus concerning this invention. 本発明にかかる磁界分布測定装置の磁界プローブの動作説明図であって、(a)はプローブを被測定機器に押し当てる前の状態を、(b)はプローブを被測定機器に押し当てた状態を示す。It is operation | movement explanatory drawing of the magnetic field probe of the magnetic field distribution measuring apparatus concerning this invention, Comprising: (a) is the state before pressing a probe to a to-be-measured apparatus, (b) is the state which pressed the probe to to-be-measured apparatus. Indicates.

符号の説明Explanation of symbols

1 (磁界分布測定装置)本体
2 磁界プローブ
2a シールド
2b ばね
2c 先端部
3 外部接続コネクタ
4 ケーブル
5 コイルばね
6 被測定機器
7 エアダンパー
8 オイルダンパー
9 板ばね
DESCRIPTION OF SYMBOLS 1 (Magnetic field distribution measuring apparatus) Main body 2 Magnetic field probe 2a Shield 2b Spring 2c Tip part 3 External connection connector 4 Cable 5 Coil spring 6 Device to be measured 7 Air damper 8 Oil damper 9 Leaf spring

Claims (5)

被測定機器から放射される雑音電波の磁界を測定する磁界分布測定装置であって、
本体と、
該本体から突出する複数の磁界プローブとを備えることを特徴とする磁界分布測定装置。
A magnetic field distribution measuring device for measuring a magnetic field of noise radio waves radiated from a device under test,
The body,
A magnetic field distribution measuring apparatus comprising: a plurality of magnetic field probes protruding from the main body.
前記複数の磁界プローブの各々は、該磁界プローブの各々の軸線方向に伸縮可能であることを特徴とする請求項1に記載の磁界分布測定装置。   2. The magnetic field distribution measuring apparatus according to claim 1, wherein each of the plurality of magnetic field probes can be expanded and contracted in an axial direction of each of the magnetic field probes. 前記複数の磁界プローブの各々は、該磁界プローブの各々の軸線方向に、弾性的伸縮手段によって伸縮可能であることを特徴とする請求項2に記載の磁界分布測定装置。   The magnetic field distribution measuring apparatus according to claim 2, wherein each of the plurality of magnetic field probes can be expanded and contracted by an elastic expansion / contraction means in the axial direction of each of the magnetic field probes. 前記複数の磁界プローブは、前記本体の該磁界プローブの取付面において、縦横に複数配列されることを特徴とする請求項1、2又は3に記載の磁界分布測定装置。   4. The magnetic field distribution measuring apparatus according to claim 1, wherein a plurality of the plurality of magnetic field probes are arranged vertically and horizontally on a mounting surface of the magnetic field probe of the main body. 前記複数の磁界プローブの各々は、各々の磁界プローブの本体内部に磁気遮断手段を有するとともに、各々の磁界プローブの先端部が伸縮し、磁界分布測定時に、各々の磁界プローブの先端部が該磁界プローブの本体内部において、前記磁気遮断手段によって囲繞されることを特徴とする請求項1乃至4のいずれかに記載の磁界分布測定装置。   Each of the plurality of magnetic field probes has a magnetic shielding means inside the main body of each magnetic field probe, and the distal end portion of each magnetic field probe expands and contracts. 5. The magnetic field distribution measuring apparatus according to claim 1, wherein the magnetic field distribution measuring apparatus is surrounded by the magnetic shielding means inside a probe main body.
JP2005011014A 2005-01-19 2005-01-19 Instrument for measuring magnetic field distribution Pending JP2006200955A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005011014A JP2006200955A (en) 2005-01-19 2005-01-19 Instrument for measuring magnetic field distribution

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005011014A JP2006200955A (en) 2005-01-19 2005-01-19 Instrument for measuring magnetic field distribution

Publications (1)

Publication Number Publication Date
JP2006200955A true JP2006200955A (en) 2006-08-03

Family

ID=36959103

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005011014A Pending JP2006200955A (en) 2005-01-19 2005-01-19 Instrument for measuring magnetic field distribution

Country Status (1)

Country Link
JP (1) JP2006200955A (en)

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62237363A (en) * 1986-03-27 1987-10-17 ノーザン・テレコム・リミテッド Electromagnetic radiation inspection method and device
JPH0798369A (en) * 1993-09-29 1995-04-11 Shimadzu Corp Measuring device for magnetism of living body
JPH11202009A (en) * 1998-01-14 1999-07-30 Ricoh Co Ltd Near-by magnetic field probe, near-by magnetic field probe unit, near-by magnetic field probe array, and magnetic field measuring system
JP2000147034A (en) * 1998-11-12 2000-05-26 Ricoh Co Ltd Tightly fixed near-magnetic field probe
JP2000230954A (en) * 1999-02-12 2000-08-22 Canon Inc Apparatus for measuring electromagnetic field and method for measuring electromagnetic-field distribution
JP2001238859A (en) * 2000-02-28 2001-09-04 Hitachi Ltd Instrumentation unit for magnetism in vivo
JP2001281312A (en) * 2000-03-28 2001-10-10 Koji Yamada Hall sensor probe
JP2004012468A (en) * 2003-08-29 2004-01-15 Nippon Telegr & Teleph Corp <Ntt> Electric field sensor
JP2004150907A (en) * 2002-10-30 2004-05-27 Hitachi Ltd Narrow directivity electromagnetic field antenna probe, electromagnetic field measuring apparatus using the same, and current distribution exploration apparatusor or electrical wiring diagnostic device

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62237363A (en) * 1986-03-27 1987-10-17 ノーザン・テレコム・リミテッド Electromagnetic radiation inspection method and device
JPH0798369A (en) * 1993-09-29 1995-04-11 Shimadzu Corp Measuring device for magnetism of living body
JPH11202009A (en) * 1998-01-14 1999-07-30 Ricoh Co Ltd Near-by magnetic field probe, near-by magnetic field probe unit, near-by magnetic field probe array, and magnetic field measuring system
JP2000147034A (en) * 1998-11-12 2000-05-26 Ricoh Co Ltd Tightly fixed near-magnetic field probe
JP2000230954A (en) * 1999-02-12 2000-08-22 Canon Inc Apparatus for measuring electromagnetic field and method for measuring electromagnetic-field distribution
JP2001238859A (en) * 2000-02-28 2001-09-04 Hitachi Ltd Instrumentation unit for magnetism in vivo
JP2001281312A (en) * 2000-03-28 2001-10-10 Koji Yamada Hall sensor probe
JP2004150907A (en) * 2002-10-30 2004-05-27 Hitachi Ltd Narrow directivity electromagnetic field antenna probe, electromagnetic field measuring apparatus using the same, and current distribution exploration apparatusor or electrical wiring diagnostic device
JP2004012468A (en) * 2003-08-29 2004-01-15 Nippon Telegr & Teleph Corp <Ntt> Electric field sensor

Similar Documents

Publication Publication Date Title
JP6255914B2 (en) Inspection jig
JP3849948B1 (en) Substrate inspection jig and inspection probe
JP5289771B2 (en) Probe card
TW200706888A (en) Apparatus and method for managing thermally induced motion of a probe card assembly
KR101255103B1 (en) Apparatus for measuring sound power of noise source
US9880210B2 (en) Scanner system and method for high-resolution spatial scanning of an electromagnetic field radiated by an electronic device under test
JP2020106296A (en) Electrical connection device
JP2006200955A (en) Instrument for measuring magnetic field distribution
JP2008185570A (en) Probe unit and inspection device
JP6842985B2 (en) Electrical connection device and its manufacturing method
US8904659B2 (en) Signal generator for electromagnetic measurement and electromagnetic measuring system using same
JP2003270267A (en) Probe unit, probe card, measuring device and production method for probe card
JP2010175378A (en) Probe for antenna measurement and measuring method using the same
US20170146568A1 (en) Electronic test equipment
JP4735075B2 (en) Sensor for crack depth measuring instrument and crack depth measuring instrument
JP2021085725A (en) probe
JP2006208276A (en) Table for test of high-frequency circuit board or the like
JP2008298678A (en) Electrical connection device
JPWO2007116963A1 (en) Contact for board inspection and method for manufacturing the same
US7721347B2 (en) Scanning nanotube probe device and associated method
JP6052355B1 (en) Test equipment
US8854072B2 (en) High temperature-low leakage probe apparatus and method of manufacturing same
CN211180035U (en) Testing device for electronic assembly
JP2011017535A (en) Distant electromagnetic field noise measuring method and device
JP2008190976A (en) Pogo pin block of semiconductor tester

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20071012

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20100210

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20100222

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20100630