JP2006194991A - Optical element and method of manufacturing optical element - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an optical element which adjusts the spatial phase distribution and the spatial intensity distribution of light, is adaptive to various light sources and performs spatial phase modulation with high accuracy and high resolution, particularly an optical element stably performing spatial phase modulation of high intensity laser and ultraviolet light, and also to provide a method of manufacturing the optical element. <P>SOLUTION: The optical element 1 is constituted in such a way that a plurality of cell structures 3 each being transmissive to incident light and having a hollow part of substantially square form are formed on a transparent substrate 2 while being distributed in the direction of a face opposite to the incident light, and that among the plurality of the cell structures 3, lines of cell structures 3a which are filled with fluid 4 and the lines of cell structures 3b which are not filled with the fluid 4 are alternately arranged. The optical element 1 is thereby adaptable to the various light sources and performs the spatial phase modulation of the incident light with high accuracy and high resolution. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an optical element and a method for manufacturing the optical element, and more particularly to an optical element that adjusts a spatial phase distribution and a spatial intensity distribution of light, and a method for manufacturing the optical element.

  As an optical element that spatially modulates the phase of light, there are generally a surface relief type optical element and an optical element using liquid crystal, which are used as a holographic element or the like.

  The surface relief type optical element includes a reflection type element and a transmission type element, both of which modulate the light phase by spatially varying the optical path length passing through the element.

  In the surface relief type optical element, the step on the surface needs to be formed with an accuracy that is a fraction of one to tenths of the wavelength of the light, and the step on the surface is continuous or multistage. Must be formed.

  However, in order to form multi-steps or continuous steps with such high accuracy, the steps are usually performed by repeatedly performing lithography and etching steps. Therefore, the manufacturing cost is high and the optical element is expensive. In addition, it is difficult to form steps with such high accuracy in multiple steps or continuously.

  In addition, when both the phase and intensity of light are spatially changed, a desired pattern can be formed at a specific position, and an arbitrary light beam can be reproduced. A distribution can also be formed.

  Conventionally, a diffractive optical element that gives a phase distribution calculated by computer-generated holography (CGH) is used to form a desired pattern at a specific position. In this case, an optimization method is used to determine the phase distribution to form a desired pattern by changing only the phase distribution. Optimization methods include the simulated annealing method and the iterative Fourier transform method. However, it is difficult to obtain a phase distribution that completely reproduces a desired pattern using any of the methods, and there is always an error. appear.

  In addition, as a device that spatially changes both the phase and intensity of light, there is a roman hologram. The roman hologram changes the light intensity depending on the size of the opening for each pixel, and depends on the position of the opening. Change the phase.

  Conventionally, there is an optical element using liquid crystal. For example, a technique is disclosed in which liquid crystal is used to provide a twisted alignment region and a parallel alignment region to modulate both the phase and amplitude of light (patent). Reference 1).

  Conventionally, there is a technique for adjusting the amount of attenuation of light by changing the optical path length of a liquid that absorbs laser light (see Patent Document 2).

JP-A-6-265927 Japanese Patent No. 3564845

  However, the above-described conventional technology needs to be improved in order to stably perform high-precision and high-resolution spatial modulation of light that has resistance to light of high intensity and ultraviolet light.

  That is, in the above-mentioned roman hologram, the phase of light is changed at the aperture position, so the pixel size is limited to a large size, and it is difficult to create a high-resolution and high-precision one. There was a problem.

  Further, in the optical element using the liquid crystal, there is a problem that the liquid crystal which is the optical element is damaged by a high intensity laser, and the transmittance is changed due to the quality change due to repeated laser irradiation. In particular, in the short wavelength ultraviolet region, there are limitations on the transmission material, and it is difficult to use liquid crystal as an optical element. For example, in laser processing, high-intensity light, particularly laser lithography, mainly uses high-intensity light in the ultraviolet region, so it is not possible to use high-intensity liquid crystals that are not resistant to ultraviolet light. .

  Therefore, the present invention is an optical element that can be used for various light sources and that performs high-precision, high-resolution spatial phase modulation, particularly an optical element that can stably perform spatial phase modulation on a high-intensity laser or ultraviolet light. And it aims at providing the manufacturing method of an optical element.

  The optical element according to the first aspect of the present invention is an optical element that spatially modulates and emits incident light, and has a structure that is transparent to the incident light and has a hollow portion having a predetermined shape. A plurality of distributions are arranged in a surface direction facing the incident light, and a predetermined liquid substance is sealed in a hollow portion of at least one structure among the plurality of structures, thereby achieving the above object. ing.

  In this case, for example, as described in claim 2, the optical element includes liquid substances having different refractive indexes as the liquid substances in the hollow portions of two or more structures among the plurality of structures. It may be encapsulated.

  Further, for example, as described in claim 3, the liquid materials having different refractive indexes enclosed in the hollow portions of the two or more structures are mixed with two or more liquid materials having different refractive indexes. It may be produced.

  Further, for example, as described in claim 4, the optical element includes liquid substances having different light transmittances as the liquid substances in the hollow portions of two or more structures among the plurality of structures. May be encapsulated.

  Further, for example, as described in claim 5, in the liquid substances having different light transmittances enclosed in the hollow portions of the two or more structures, predetermined dyes are dispersed in the predetermined liquid substances, respectively. And may be made.

  Further, for example, as described in claim 6, in the liquid materials having different light transmittances enclosed in the hollow portions of the two or more structures, predetermined fine particles are dispersed in the predetermined liquid material, respectively. And may be made.

  For example, as described in claim 7, in the structure, a reflecting plate may be provided on a surface of the hollow portion inner surface facing the incident light.

  Furthermore, for example, as described in claim 8, after the liquid material is injected into the hollow portion of the structure from a liquid material supply device that discharges the liquid material at a predetermined flow rate, the optical element The hollow part may be sealed and produced.

  In addition, for example, as described in claim 9, the liquid material supply device may synthesize a plurality of different liquid materials at an arbitrary ratio and inject them into the hollow portion of the structure.

  According to a tenth aspect of the present invention, there is provided a method for manufacturing an optical element, wherein a plurality of structures having a hollow portion having a predetermined shape and being transmissive to incident light are distributed in a surface direction facing the incident light. A method of manufacturing an optical element that spatially phase-modulates the incident light by enclosing a predetermined liquid substance in a hollow portion of at least one structure among the plurality of structures, wherein the liquid substance After the liquid material is injected into the hollow portion of the structure from the liquid material supply device that discharges the liquid, the above-mentioned object is achieved by sealing the hollow portion.

  In this case, for example, as described in claim 11, in the method of manufacturing the optical element, a plurality of different liquid substances are synthesized from the liquid substance supply apparatus at an arbitrary ratio, and the synthesized liquid substance is added to the structure. You may inject | pour in the hollow part.

  According to the optical element of the present invention, a plurality of structures having a hollow portion having a predetermined shape that is transmissive to incident light are arranged in a state of being distributed in a plane direction facing the incident light. Since a predetermined liquid substance is sealed in the hollow portion of at least one structure of the body, it can be used for various light sources and can perform phase modulation of a space with high accuracy and high resolution. In particular, high-precision and high-resolution spatial phase modulation can be stably performed for high-intensity lasers and ultraviolet light.

  According to the method for manufacturing an optical element of the present invention, a plurality of structures having a hollow portion having a predetermined shape that is transmissive to incident light are arranged in a state of being distributed in a plane direction facing the incident light, A predetermined liquid substance is sealed in the hollow part of at least one of the plurality of structures, so that the liquid substance supply apparatus can enter the hollow part of the optical element structure that spatially modulates the incident light. After injecting the liquid material, the hollow portion is sealed, so that the liquid material can be injected easily, stably, and quickly into the hollow portion of the structure. High accuracy and high resolution for high-intensity lasers and ultraviolet light. It is possible to easily and stably manufacture an optical element that stably performs spatial phase modulation.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In addition, since the Example described below is a suitable Example of this invention, various technically preferable restrictions are attached | subjected, However, The scope of the present invention limits this invention especially in the following description. As long as there is no description of the effect, it is not restricted to these aspects.

  1 and 2 are diagrams showing a first embodiment of an optical element and a method for manufacturing the optical element according to the present invention, and FIG. 1 shows a first embodiment of the optical element and the method for manufacturing the optical element according to the present invention. A perspective view of the applied optical element 1, FIG. 2 is a front sectional view of the optical element 1 of FIG.

  1 and 2, the optical element 1 includes a transparent substrate 2 that is transparent to light, and a plurality of hollow cell structures (structures) 3 formed in a matrix. The upper surface is formed in a rectangular shape with an opening. In the cell structure 3, cell structures 3a in which the liquid material 4 is placed and cell structures 3b in which the liquid material 4 is not placed are arranged in every other row in the column direction. As the liquid material 4, any liquid material can be used as long as it is light transmissive. For example, water, aqueous solution, oil, or the like can be used. An appropriate liquid material can be selected according to the purpose of use of the element 1.

  And after the liquid substance 4 is put in the cell structure 3a, the optical element 1 is covered with the transparent cover substrate 5 which has the transparency with respect to light, and each cell structure 3 is sealed. That is, in the optical element 1, the cell structure 3a that is transmissive to the light encapsulated in the liquid material 4 is partially sandwiched in the present embodiment, and the cell structure 3b that is not encapsulated in the liquid material 4 is sandwiched. Are arranged in a row.

  The processing of the three-dimensional cell structure 3 on the transparent substrate 2 is, for example, processing by photolithography and dry etching, processing by an adhesion method, processing by three-dimensional modeling by laser, direct processing by laser, or by laser. This can be done by techniques such as internal processing.

  Next, the operation of this embodiment will be described. In the optical element 1 of the present embodiment, the cell structure 3a in which the liquid material 4 is sealed is partially disposed, so that the phase of incident light is spatially changed and transmitted.

  That is, light is incident on the optical element 1 from above or below in FIGS. At this time, in the optical element 1, a plurality of cell structures 3 are formed in a matrix on the transparent substrate 2, and a liquid substance 4 is sealed in every other row of the matrix-like cell structures 3 to form a liquid. The cell structures 3a in which the substance 4 is enclosed and the cell structures 3b in which the liquid substance 4 is not enclosed are arranged in every other row.

  In this state, the average refractive index in the cell structure 3a in which the liquid material 4 of light having a wavelength λ incident from above or below in FIG. 1 and FIG. If the distance (depth) in the light transmission direction of the cell structure 3a is L, the phase change amount in the liquid material 4 is expressed by the following equation (1).

Phase change amount = 2π × nλ × L / λ (1)
The refractive index of the liquid material 4 can be selected from about 1.1 to about 1.6, and the refractive index of the liquid material 4 sealed inside the cell structure 3 is changed while the distance L is constant. The phase can be changed for each cell structure 3a in which the liquid material 4 is sealed.

  Therefore, by partially disposing the cell structure 3a in which the liquid material 4 is enclosed, the phase of incident light can be spatially changed and transmitted.

  As described above, the optical element 1 of this example is arranged in a state in which a plurality of cell structures 3 having transparency to incident light and having a substantially rectangular hollow portion are distributed in the surface direction facing the incident light. Among the plurality of cell structures 3, cell structures 3a in which the liquid material 4 is sealed and cell structures 3b in which the liquid material 4 is not sealed are arranged in every other row in the column direction.

  Therefore, it can be used for various light sources and can perform high-precision and high-resolution spatial phase modulation, and in particular, it can stabilize high-precision and high-resolution spatial phase modulation for high-intensity lasers and ultraviolet light. Can be done.

  Further, in the optical element 1, all the cell structures 3 of the transparent substrate 2 are formed with a constant depth, but the depth of the cell structures 3 is not limited to a constant, for example, You may form so that a depth may change in steps according to a place.

  In this way, the distance L in the above equation (1) is different, and modulation in which the phase changes in multiple stages spatially can be performed depending on the change in the depth of the cell structure 3 and the presence or absence of the liquid material 4.

  Therefore, the optical element 1 of the present embodiment can be used as a diffractive optical element or a holographic element that branches a light beam or forms a desired intensity distribution at a predetermined position, and does not use liquid crystal. It is highly permeable to light intensity laser light and ultraviolet light, is not easily damaged, and can be operated stably.

  In the optical element 1, the cell structures 3 are arranged in a matrix. However, the arrangement of the cell structures 3 is not limited to a matrix, and may be arranged in a concentric circle, for example.

  Thus, by changing the arrangement of the cell structures 3, the intended pattern can be appropriately formed.

  FIG. 3 is a front cross-sectional view of an optical element 10 to which a second embodiment of the optical element and the optical element manufacturing method of the present invention is applied.

  This embodiment is applied to an optical element similar to the optical element 1 of the first embodiment. In the description of the present embodiment, the same as the optical element 1 of the first embodiment is used. Constituent parts are denoted by the same reference numerals, and detailed description thereof is omitted.

  In FIG. 3, the optical element 10 of the present embodiment has a plurality of hollow cell structures 3 formed in a matrix on a transparent substrate 2 that is transparent to light. Is formed in an open quadrangular shape.

  Each cell structure 3 is formed with a metal film (reflective film) 11 that reflects light on the bottom surface (the lower surface in FIG. 3). The metal film 11 is formed by a method such as sputtering or vapor deposition. Is done. That is, the cell structure 3 has the metal film 11 formed on the inner surface of the cell structure 3 that faces the incident light.

  Further, the cell structure 3 includes a cell structure 3a in which a liquid material 4 having light permeability is placed in a row direction and a cell structure 3b in which no liquid material 4 is placed in one row. It is arranged every other.

  And after the liquid substance 4 is put in the cell structure 3a, the optical element 10 is covered with the transparent cover substrate 5 which has the transparency with respect to light, and each cell structure 3 is sealed. In other words, the optical element 10 is partially transparent to the light encapsulated in the liquid material 4 and has a cell structure 3a in which the metal film 11 is formed on the bottom surface. 4 are arranged in a row with cell structures 3b not encapsulated in between.

  Next, the operation of this embodiment will be described. The optical element 10 of this embodiment includes a cell structure 3a in which a liquid material 4 is encapsulated and a metal film 11 is formed on the bottom surface as a reflector, and the liquid material 4 is not encapsulated in the metal film 11 The cell structure 3b on which the light is formed is partially disposed, and the phase of incident light is spatially changed and reflected.

  That is, in the optical element 10, light is incident from above in FIG. 3, the light incident on each cell structure 3 is reflected by the metal film 11, and the cell structure 3 a in which the liquid material 4 is enclosed As described above, a phase change occurs when passing through the liquid material 4 both at the time of incidence and at the time of reflection, and spatial phase modulation can be performed.

  Since the optical element 10 of the present embodiment reflects incident light by using the metal film 11 and emits it, the thickness may be half that of the transmission type, and the structure has a lower aspect. Thus, the phase of light can be spatially modulated.

  4 to 6 are views showing a third embodiment of the optical element and the optical element manufacturing method of the present invention, and FIG. 4 is a third embodiment of the optical element and the optical element manufacturing method of the present invention. It is front sectional drawing of the applied optical element 20. FIG.

  This embodiment is applied to an optical element similar to the optical element 1 of the first embodiment. In the description of the present embodiment, the same as the optical element 1 of the first embodiment is used. Constituent parts are denoted by the same reference numerals, and detailed description thereof is omitted.

  In FIG. 3, the optical element 20 of the present embodiment has a plurality of hollow cell structures 3 formed in a matrix on a transparent substrate 2 that is transparent to light, and the cell structure 3 has an upper surface. Is formed in an open quadrangular shape.

  Each cell structure 3 is filled with liquid substances 4c to 4h having different refractive indexes depending on the location. For example, cell structures 3c to 3h into which liquid substances 4c to 4h having different refractive indexes are placed in the column direction. Are arranged.

  The optical element 20 is covered with a transparent lid substrate 5 that is transparent to light after the liquid substances 4c to 4h are placed in the cell structures 3c to 3h, and the cell structures 3c to 3h. Is sealed. That is, the optical element 20 is in a state in which the cell structures 3c to 3h that are transparent to the light encapsulated in the liquid substances 4c to 4h having different refractive indexes are arranged in a line.

  For example, a liquid material supply device 30 as shown in FIG. 5 can be used to inject the liquid materials 4c to 4h into the cell structures 3c to 3h of the optical element 20.

  5, the liquid substance supply device 30 includes a plurality of liquid reservoirs 31a to 31c, valves 32a to 32c, a flow path 33, a valve 34, and a synthetic liquid reservoir 35 in FIG. Different liquid substances 36a to 36c are stored in the liquid reservoirs 31a to 31c, respectively. For example, the liquid reservoir 31a has a transparent liquid material 36a having a refractive index n1, the liquid reservoir 31b has a liquid material 36b having a refractive index n1 and a light transmittance α1, and the liquid reservoir 31c is refracted. Transparent liquid substances 36c having a rate n2 are respectively stored. A flow path 33 is connected to each of the liquid reservoirs 31a to 31c, and valves 32a to 32c are provided in the flow paths 33 at the outlets of the liquid reservoirs 31a to 31c, respectively. The flow path 33 connected to each of the liquid reservoirs 31 a to 31 c is connected to the synthetic liquid reservoir 35, and a valve 34 is provided in the flow path 33 at the inlet to the synthetic liquid reservoir 35.

  The liquid substance supply device 30 can utilize a dispenser, an ink ejection mechanism of an ink ejection type printer, or the like. In particular, the ink ejecting mechanism of an ink ejecting printer uses a mechanism that pushes a liquid material from a flow path by driving a piezo element at high speed, high accuracy, and is widely used. It can be applied in good condition.

  And this liquid substance supply apparatus 30 adjusts each valve | bulb 32a-32c, adjusts the flow volume of the liquid substances 36a-36c from each liquid reservoir part 31a-31c, and each cell structure 3c of the optical element 20 The liquid substances 4c to 4h to be injected into -3h are synthesized and sent to the synthetic liquid reservoir 35 through the flow path 33 and the valve 34, and the liquid substances are transferred from the synthetic liquid reservoir 35 to the target cell structures 3c to 3h. Inject 4c-4h. In this case, by adjusting the valves 32a to 32c, the ratio of the synthesis of the liquid substance 36a and the liquid substance 36b is adjusted to adjust the light transmittance of the injected liquid substances 4c to 4h. The refractive index is adjusted by adjusting the ratio of synthesis with the substance 36c.

  In injecting the liquid substances 4c to 4h into the cell structures 3c to 3h of the actual optical element 20, if a plurality of such liquid substance supply devices 30 are arranged in parallel, the liquid substances 4c to 4h are rapidly introduced. The cell structures 3c to 3h can be injected.

  Next, the operation of this embodiment will be described. The optical element 20 of the present embodiment spatially changes the phase of incident light by arranging cell structures 3c to 3h in which liquid substances 4c to 4h having different refractive indexes are encapsulated in rows. Make it transparent.

  That is, in the optical element 20, light is incident from above or below in FIG. 4, and the liquid substances 4c to 4h in which the light incident on the cell structures 3c to 3h is sealed in the cell structures 3c to 3h. The light is refracted according to the refractive index of the light and transmitted, and when passing through the liquid substances 4c to 4h, the light passing through the cell structures 3c to 3h is caused to undergo different phase changes to spatially modulate the phase. be able to.

  For example, the optical element 20 is manufactured by adjusting the refractive indexes of the liquid substances 4c to 4h of the cell structures 3c to 3h so that, for example, a phase distribution as shown in FIG. When light that has been transmitted through the optical element 20 and phase-modulated is condensed by a lens, an intensity distribution as shown in FIG. 6B can be obtained by reproducing a hologram image.

  That is, the optical element 20 of the present embodiment can modulate the refractive index in multiple stages by enclosing a plurality of liquid substances 4c to 4h having different refractive indexes in the cell structures 3c to 3h, and can perform multi-level modulation. It can be used as a diffractive optical element or a holographic element.

  In the optical element 20 of the present embodiment, the liquid material supply device 30 is used to mix two or more liquid materials 4c to 4h to generate and inject a liquid material having an intended refractive index and transmittance. Therefore, it is possible to easily adjust the refractive index and transmittance of the liquid substances 4c to 4h.

  Furthermore, when the liquid material supply device 30 is used, the liquid materials 4c to 4h can be accurately and quickly injected into the fine cell structures 3c to 3h, and productivity can be improved.

  Further, the liquid material supply device 30 can inject the liquid materials 4c to 4h into the cell structures 3c to 3h, and the liquid materials 36a to 36c having different refractive indexes and light transmittances of the liquid reservoirs 31a to 31c. Since the liquid materials 4c to 4h having an arbitrary refractive index and light transmittance can be freely generated and injected, the optical element 20 that spatially modulates both the phase and the intensity can be quickly obtained. And can be easily manufactured.

  Furthermore, the optical element 20 of the present embodiment can modulate the refractive index in multiple steps without creating the surface shape in multiple steps as in the prior art. It can be used as a diffractive optical element. In addition, when a large number of optical elements 20 having the same shape are prepared and various liquid materials having different refractive indexes are used as the liquid materials 4c to 4h sealed in the cell structures 3c to 3h, various diffractive optical elements can be made inexpensive. In particular, in the case of high-mix low-volume production, it can be manufactured at a lower cost than the conventional case.

  In each of the above-described embodiments, when a light-absorbing material is added to the liquid substance 4, the light transmittance of the light-absorbing material is α, and the transmission distance is L. T is expressed by the following equation (2).

Transmittance T = exp (−αL) (2)
That is, the light transmittance of the liquid substance 4 can be controlled by using light absorbing materials having different absorption coefficients α. In this case, the phase of the transmitted light of the cell structure 3 into which the liquid substance 4 is injected. The transmittance change can be simultaneously controlled by adjusting the mixing ratio of the liquid substances having different refractive indexes and the mixing ratio of the light absorbing materials having different absorption coefficients α.

  Therefore, the phase and intensity of light can be adjusted simultaneously.

  Moreover, the liquid substance 4 can change an absorptivity simultaneously with the refractive index of light by adding as a light-absorbing material using the material which has an absorptivity with respect to the wavelength of transmitted light.

  In this way, by adding the light absorbing material to the liquid substance 4, in addition to the phase of the light, the spatial intensity of the light can be adjusted simultaneously, and a three-dimensional hologram image can be easily created. Further, it is possible to easily reduce the noise of the hologram and simplify the design of the hologram pattern.

  Furthermore, the liquid substance 4 may change the light transmittance by mixing a pigment into the solution.

  In this case, by adjusting the amount of the dye to be mixed, the light transmittance can be easily adjusted, and a plurality of liquid substances 4 having different light transmittances can be easily and easily adjusted. .

  Further, light scattering fine particles may be added to the liquid material 4. That is, when a light-absorbing material is used to adjust the light transmittance, heat is generated by absorbing the light, and resistance to laser light having a light intensity is low. However, when light scattering fine particles are added to the liquid substance 4, incident light is scattered by the light scattering fine particles, and the intensity of transmitted light or reflected light can be changed without generating heat. In addition, an optical element having sufficient resistance can be produced.

  The invention made by the present inventor has been specifically described based on the preferred embodiments. However, the present invention is not limited to the above, and various modifications can be made without departing from the scope of the invention. Needless to say.

  The optical element and the optical element manufacturing method according to the present invention include a beam homogenizer, a beam branching element, and a beam pattern shaping element for lithography, laser processing, an image display device, and the like that adjust the spatial phase distribution and spatial intensity distribution of light. Etc. can be used.

The perspective view of the optical element to which the 1st Example of the optical element of this invention and the manufacturing method of an optical element is applied. FIG. 2 is a front sectional view of the optical element in FIG. 1. Front sectional drawing of the optical element to which 2nd Example of the optical element of this invention and the manufacturing method of an optical element is applied. Front sectional drawing of the optical element to which 3rd Example of the optical element of this invention and the manufacturing method of an optical element is applied. The schematic block diagram of the liquid substance supply apparatus used with the optical element of this invention, and the manufacturing method of an optical element. FIG. 5A is a diagram illustrating an example of the phase distribution of the refractive index of the liquid substance in each cell structure in FIG. 4, and FIG. 5B is a diagram illustrating an example of a hologram image formed by collecting the light that has passed through the cell structure.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Optical element 2 Transparent substrate 3, 3a, 3b, 3c-3h Cell structure 4, 4c-4h Liquid substance 5 Transparent cover board | substrate 10 Optical element 11 Metal film 20 Optical element 30 Liquid substance supply apparatus 31a-31c Liquid reservoir part 32a To 32c Valve 33 Flow path 34 Valve 35 Synthetic liquid reservoir 36a to 36c Liquid substance

Claims (11)

  An optical element that spatially modulates and emits incident light, and has a plurality of structures that are transparent to the incident light and have hollow portions of a predetermined shape in a plane direction facing the incident light. An optical element, wherein a predetermined liquid substance is sealed in a hollow portion of at least one of the plurality of structures.   2. The optical element according to claim 1, wherein liquid substances having different refractive indexes are sealed as the liquid substances in the hollow portions of two or more structures among the plurality of structures. Optical element.   3. The liquid material having different refractive indexes enclosed in the hollow portions of the two or more structures is prepared by mixing two or more types of liquid materials having different refractive indexes. The optical element described.   2. The optical element according to claim 1, wherein liquid substances having different light transmittances are sealed as the liquid substances in the hollow portions of two or more structures among the plurality of structures. The optical element described.   2. The liquid substances having different light transmittances enclosed in the hollow portions of the two or more structures are prepared by dispersing predetermined dyes in predetermined liquid substances, respectively. 4. The optical element according to 4.   The liquid material having different light transmittances enclosed in the hollow portions of the two or more structures is prepared by dispersing predetermined fine particles in a predetermined liquid material, respectively. 4. The optical element according to 4.   The optical element according to any one of claims 1 to 6, wherein a reflection plate is provided on a surface of the inner surface of the hollow portion that faces the incident light.   The optical element is manufactured by injecting the liquid material from a liquid material supply device that discharges the liquid material at a predetermined flow rate into the hollow portion of the structure, and then sealing the hollow portion. The optical element according to any one of claims 1 to 7.   9. The optical element according to claim 8, wherein the liquid substance supply device synthesizes a plurality of different liquid substances at an arbitrary ratio and injects them into the hollow portion of the structure.   A plurality of structures that are transparent to incident light and have a hollow portion having a predetermined shape are arranged in a state of being distributed in a plane direction facing the incident light, and at least one of the plurality of structures is arranged. A method of manufacturing an optical element that spatially phase-modulates the incident light by enclosing a predetermined liquid substance in a hollow part, wherein the liquid substance is discharged from the liquid substance supply device that discharges the liquid substance in the hollow part of the structure. After injecting the liquid material into the hollow portion, the hollow portion is sealed. 11. The method of manufacturing an optical element according to claim 10, wherein a plurality of different liquid substances are synthesized from the liquid substance supply apparatus at an arbitrary ratio, and the synthesized liquid substance is injected into the hollow portion of the structure. The manufacturing method of the optical element of description.

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