JP2006162631A5 - - Google Patents

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Publication number
JP2006162631A5
JP2006162631A5 JP2006002535A JP2006002535A JP2006162631A5 JP 2006162631 A5 JP2006162631 A5 JP 2006162631A5 JP 2006002535 A JP2006002535 A JP 2006002535A JP 2006002535 A JP2006002535 A JP 2006002535A JP 2006162631 A5 JP2006162631 A5 JP 2006162631A5
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JP
Japan
Prior art keywords
flow rate
passage
rate measuring
sub
measuring device
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JP2006002535A
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Japanese (ja)
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JP4659623B2 (en
JP2006162631A (en
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Priority to JP2006002535A priority Critical patent/JP4659623B2/en
Priority claimed from JP2006002535A external-priority patent/JP4659623B2/en
Publication of JP2006162631A publication Critical patent/JP2006162631A/en
Publication of JP2006162631A5 publication Critical patent/JP2006162631A5/ja
Application granted granted Critical
Publication of JP4659623B2 publication Critical patent/JP4659623B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Claims (6)

主通路を流れる流体の一部が流入するように主通路中に配置される副通路と、流体の流量を検知するために前記副通路内に配置される流量計測用センサ素子とを有し、前記副通路が前記流量計測用センサ素子よりも上流側の通路内壁が外回り側と内回り側とを有するように曲がりを備えた熱式流量計測装置において、A sub-passage arranged in the main passage so that a part of the fluid flowing through the main passage flows in, and a sensor element for measuring the flow rate arranged in the sub-passage for detecting the flow rate of the fluid, In the thermal flow rate measuring device provided with a bend so that the passage inner wall on the upstream side of the flow rate measuring sensor element has an outer side and an inner side, the sub-passage,
前記副通路の前記流量計測用センサ素子よりも上流側の内壁面に溝又ははり状の突部を備え、前記溝又ははり状の突部は前記通路内壁の外回り側の方に位置する部分が内回り側の方に位置する部分よりも流体の流れ方向において下流側に位置するように傾斜していることを特徴とする熱式流量計測装置。A groove or a beam-like protrusion is provided on the inner wall surface upstream of the flow rate measuring sensor element of the sub-passage, and the groove or the beam-like protrusion is located on the outer periphery side of the passage inner wall. A thermal flow rate measuring apparatus, wherein the thermal flow rate measuring apparatus is inclined so as to be positioned downstream in the fluid flow direction from a portion positioned on the inner side. 請求項1に記載の熱式流量計測装置において、前記通路内壁の外回り側に前記溝又ははり状の突部によって捕獲された液状体が移動する経路が構成され、前記流量計測用センサ素子は前記経路から離隔した位置に設けられていることを特徴とする熱式流量計測装置。The thermal flow rate measuring device according to claim 1, wherein a path through which the liquid material captured by the groove or beam-like protrusion moves is formed on an outer periphery side of the passage inner wall, and the flow rate measuring sensor element is A thermal flow rate measuring device provided at a position separated from a path. 請求項1に記載の熱式流量計測装置において、前記副通路の内壁面に親水性を有する親水膜を形成したことを特徴とする熱式流量計測装置。2. The thermal flow rate measuring device according to claim 1, wherein a hydrophilic film having hydrophilicity is formed on an inner wall surface of the sub-passage. 請求項1に記載の熱式流量計測装置において、前記副通路の前記流量計測用センサ素子よりも上流側の内壁面に溝を備え、前記溝が形成された部分以外の副通路内壁面に撥水性を有する撥水膜を形成したことを特徴とする熱式流量計測装置。2. The thermal flow rate measuring device according to claim 1, wherein a groove is provided on an inner wall surface of the sub-passage upstream of the sensor element for flow rate measurement, and the inner wall surface of the sub-passage other than a portion where the groove is formed is repelled. A thermal type flow rate measuring device characterized by forming a water-repellent water-repellent film. 請求項1乃至３のうちのいずれか一項に記載の熱式流量測定装置において、前記溝又ははり状の突部によって捕獲された液状体を前記副通路の外に排出する排出手段を備えたことを特徴とする熱式流量計測装置。The thermal flow rate measuring device according to any one of claims 1 to 3, further comprising discharge means for discharging the liquid material captured by the groove or beam-shaped protrusion to the outside of the sub-passage. A thermal flow rate measuring device characterized by that. 請求項４に記載の熱式流量計測装置において、前記溝の下流側に前記溝と接続されると共に前記副通路の外側と連通する貫通穴を備えたことを特徴とする熱式流量計測装置。5. The thermal flow rate measuring device according to claim 4, further comprising a through hole that is connected to the groove and communicates with the outside of the sub-passage on the downstream side of the groove.
JP2006002535A 2006-01-10 2006-01-10 Thermal flow meter Expired - Fee Related JP4659623B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006002535A JP4659623B2 (en) 2006-01-10 2006-01-10 Thermal flow meter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006002535A JP4659623B2 (en) 2006-01-10 2006-01-10 Thermal flow meter

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2001054106A Division JP3782669B2 (en) 2001-02-28 2001-02-28 Thermal flow meter

Publications (3)

Publication Number Publication Date
JP2006162631A JP2006162631A (en) 2006-06-22
JP2006162631A5 true JP2006162631A5 (en) 2008-01-24
JP4659623B2 JP4659623B2 (en) 2011-03-30

Family

ID=36664774

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006002535A Expired - Fee Related JP4659623B2 (en) 2006-01-10 2006-01-10 Thermal flow meter

Country Status (1)

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JP (1) JP4659623B2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5178148B2 (en) * 2007-10-31 2013-04-10 日立オートモティブシステムズ株式会社 Heating resistor type air flow measuring device
JP5501302B2 (en) * 2011-08-01 2014-05-21 日立オートモティブシステムズ株式会社 Air flow measurement device
DE112012005695B4 (en) 2012-01-18 2021-10-07 Hitachi Automotive Systems, Ltd. Thermal flow meter
JP5675707B2 (en) 2012-06-15 2015-02-25 日立オートモティブシステムズ株式会社 Thermal flow meter
JP6129601B2 (en) * 2013-03-21 2017-05-17 日立オートモティブシステムズ株式会社 Thermal flow meter

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0749979B2 (en) * 1990-04-10 1995-05-31 株式会社日立製作所 Hot wire air flow meter

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