JP2006153282A - Servo control apparatus - Google Patents

Servo control apparatus Download PDF

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JP2006153282A
JP2006153282A JP2006054095A JP2006054095A JP2006153282A JP 2006153282 A JP2006153282 A JP 2006153282A JP 2006054095 A JP2006054095 A JP 2006054095A JP 2006054095 A JP2006054095 A JP 2006054095A JP 2006153282 A JP2006153282 A JP 2006153282A
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control
signal
switching
control signal
load
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JP4241747B2 (en
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Mitsuo Sakai
光雄 坂井
Kazuyuki Harada
和幸 原田
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Toyooki Kogyo Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To suppress the occurrence of a shock caused by changing different feedback signals without releasing the hydraulic pressure applied to a hydraulic actuator. <P>SOLUTION: The servo control apparatus comprises a control means 17 for outputting a control signal by arithmetically comparing the displacement feedback signal output from a displacement sensor 3 and the force feedback signal output from a force sensor 4 with the respective command signals, and a holding means 18 which is arranged between the control means 17 and a driving means 10 for outputting a drive signal for controlling the operation of a hydraulic cylinder 2 by amplifying the control signal, and outputs one of the control signals corresponding to different feedback signals by switching-over them by taking and releasing one of the control signals, output from the control means 17, corresponding to different feedback signals. The holding means 18 holds the control signal before the switching-over when the control signal is switched over, and also releases the holding of the control signal before the switching-over when the switching-over has been completed. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、油圧アクチュエータを制御するサーボ制御装置に関し、特に、油圧アクチュエータからの異なるフィードバック信号を適宜切換えるサーボ制御装置に関する。   The present invention relates to a servo control device that controls a hydraulic actuator, and more particularly, to a servo control device that appropriately switches different feedback signals from the hydraulic actuator.

例えば、図3に示す如き、疲労試験するワークWをクランプする油圧アクチュエータとしての油圧シリンダ2を制御するサーボ制御装置は、油圧シリンダ2のピストンロッド2Aが下降作動してワークWに当接するまでは、下降作動するピストンロッド2Aの変位を変位検出器3からの変位フィードバック信号と変位指令信号とを比較演算して油圧サーボ弁1に作動信号を出力して油圧シリンダ2を位置制御し、下降作動するピストンロッド2AがワークWに当接した後では、油圧シリンダ2のピストンロッド2Aに受ける荷重を荷重検出器4からの荷重フィードバック信号と荷重指令信号とを比較演算して油圧サーボ弁1に作動信号を出力して油圧シリンダ2を荷重制御していた。   For example, as shown in FIG. 3, a servo control device that controls a hydraulic cylinder 2 as a hydraulic actuator that clamps a workpiece W to be subjected to a fatigue test is operated until the piston rod 2A of the hydraulic cylinder 2 is lowered to contact the workpiece W. The displacement of the piston rod 2A that moves down is compared between the displacement feedback signal from the displacement detector 3 and the displacement command signal, and the operation signal is output to the hydraulic servo valve 1 to control the position of the hydraulic cylinder 2 and the lowering operation. After the piston rod 2A to be brought into contact with the workpiece W, the load applied to the piston rod 2A of the hydraulic cylinder 2 is compared with the load feedback signal from the load detector 4 and the load command signal to operate the hydraulic servo valve 1. A signal was output to control the load on the hydraulic cylinder 2.

ところが、かかる従来のサーボ制御装置では、位置制御と荷重制御とを切換える際に、変位フィードバック信号と荷重フィードバック信号との異なる種類のフィードバック信号の切換えに伴い、両方のフィードバック信号に対応する作動信号が共に出力しない状態が瞬時発生することに起因して切換ショックが生じ、このため位置制御と荷重制御とを切換える際に油圧シリンダ2に作用する油圧を解除して切換ショックの発生を抑制しており、切換える都度に油圧シリンダ2に作用する油圧を解除しなければならず作業性が悪かった。   However, in such a conventional servo control device, when switching between position control and load control, an operation signal corresponding to both feedback signals is generated along with switching of different types of feedback signals between the displacement feedback signal and the load feedback signal. The switching shock occurs due to the instantaneous occurrence of a state in which neither is output. For this reason, when switching between position control and load control, the hydraulic pressure acting on the hydraulic cylinder 2 is released to suppress the generation of the switching shock. The hydraulic pressure acting on the hydraulic cylinder 2 has to be released every time it is switched, and the workability is poor.

本発明は、異なるフィードバック信号を切換える際に、油圧アクチュエータに作用する油圧の解除を不要にして切換ショックの発生を抑制し得るサーボ制御装置を提供することを課題としている。     An object of the present invention is to provide a servo control device that can suppress the occurrence of a switching shock by eliminating the release of the hydraulic pressure acting on the hydraulic actuator when switching different feedback signals.

かかる課題を達成すべく、本発明は課題を解決するため次の手段をとった。即ち、
油圧アクチュエータからの異なるフィードバック信号をそれぞれの指令信号と比較演算して制御信号を出力する制御手段と、制御手段からの制御信号を増幅して油圧アクチュエータを作動制御する作動信号を出力する駆動手段とを具備し、制御手段と駆動手段との間には制御手段から出力する異なるフィードバック信号に対応する制御信号の一方を取り込んだり取り込みを解除したりすることで異なるフィードバック信号に対応する制御信号を切換えてどちらか一方を出力する保持手段を備え、保持手段は制御信号の切換えに伴い切換前の制御信号を保持すると共に、切換完了後に切換前の制御信号の保持を解除し、制御手段は前記取り込んだ一方のフィードバック信号に対応した制御信号により油圧アクチュエータの制御を行っている際には、他方の制御用のP、I、Dパラメータを他方のフィードバック信号が変化してもこれに対応する制御信号が不変となる値に設定して設けて成るサーボ制御装置がそれである。
In order to achieve this problem, the present invention has taken the following measures in order to solve the problem. That is,
Control means for comparing and calculating different feedback signals from the hydraulic actuator with respective command signals and outputting a control signal; drive means for amplifying the control signal from the control means and outputting an operation signal for controlling the operation of the hydraulic actuator; The control signal corresponding to the different feedback signal is switched between the control means and the driving means by taking in one of the control signals corresponding to the different feedback signals output from the control means or canceling the fetching. Holding means for outputting either one of them, the holding means holds the control signal before switching in accordance with the switching of the control signal, and releases the holding of the control signal before switching after the switching is completed. When the hydraulic actuator is controlled by the control signal corresponding to the other feedback signal , P for other control, I, D parameters servo controller a control signal other feedback signal corresponding thereto be varied comprises providing set to a value that becomes invariant is it.

以上詳述したように、本発明は、油圧アクチュエータからの異なるフィードバック信号に対応する制御信号の一方を保持手段で取り込んだり取り込みを解除したりすることで切換える際に、保持手段は切換前の制御信号を保持し、この保持した制御信号を駆動手段に出力して駆動手段より作動信号を出力しているから、切換前後のフィードバック信号に対応した制御信号を途切れることなく出力できる。このため、異なるフィードバック信号を切換える際に、油圧アクチュエータに作用する油圧の解除を不要にして切換ショックの発生を抑制することができ、作業性を向上できる。また、保持手段で異なるフィードバック信号に対応する制御信号の一方を取り込んだり取り込みを解除したりすることで異なるフィードバック信号に対応する制御信号を切換えているため、異なるフィードバック信号を切換える切換手段を必要とする装置と比べ、構成の簡素化を図ることができる。 As described in detail above, the present invention provides a means for holding the control signal before switching when one of the control signals corresponding to different feedback signals from the hydraulic actuator is switched by fetching or releasing the fetching by the holding means. Since the signal is held and the held control signal is output to the driving means and the operation signal is output from the driving means, the control signal corresponding to the feedback signal before and after switching can be output without interruption. For this reason, when switching between different feedback signals, it is possible to suppress the occurrence of switching shock by eliminating the need to release the hydraulic pressure acting on the hydraulic actuator, thereby improving workability. Further, since the control signal corresponding to the different feedback signal is switched by capturing one of the control signals corresponding to the different feedback signals by the holding unit or canceling the capturing, a switching unit for switching between the different feedback signals is required. The configuration can be simplified as compared with the device that performs this.

以下、本発明の実施の形態を図面に基づいて説明する。
図1及び図2は本発明の一実施形態を示し、油圧サーボ弁1、油圧アクチュエータとしての油圧シリンダ2、変位検出器3、荷重検出器4はそれぞれ図3に示したものと同一構成で、油圧サーボ弁1はサーボ制御装置からの作動信号により油圧シリンダ2を作動制御して設け、油圧シリンダ2はワークW(図3参照)をクランプ及びアンクランプ自在に設け、変位検出器3は油圧シリンダ2の変位に応じた変位フィードバック信号(アナログデータ)をサーボ制御装置に出力して設け、荷重検出器4はワークWに作用する油圧シリンダ2の圧力に応じた荷重フィードバック信号(アナログデータ)をサーボ制御装置に出力して設けている。
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
1 and 2 show an embodiment of the present invention. A hydraulic servo valve 1, a hydraulic cylinder 2 as a hydraulic actuator, a displacement detector 3, and a load detector 4 have the same configurations as those shown in FIG. The hydraulic servo valve 1 is provided by controlling the operation of a hydraulic cylinder 2 by an operation signal from a servo control device, the hydraulic cylinder 2 is provided so as to be able to clamp and unclamp a workpiece W (see FIG. 3), and the displacement detector 3 is a hydraulic cylinder. Displacement feedback signal (analog data) corresponding to the displacement of 2 is output to the servo controller, and the load detector 4 servos the load feedback signal (analog data) corresponding to the pressure of the hydraulic cylinder 2 acting on the workpiece W. The output is provided to the control device.

サーボ制御装置は変換手段16、制御手段17、保持手段18、変換手段9、駆動手段10より構成している。変換手段16は変位検出器3からの変位フィードバック信号と荷重検出器4からの荷重フィードバック信号のそれぞれのアナログデータをデジタルデータに変換して制御手段17へ出力して設けている。制御手段17は変位フィードバック信号と変位指令信号とを比較演算して変位フィードバック信号に対応した制御信号を出力すると共に、荷重フィードバック信号と荷重指令信号とを比較演算して荷重フィードバック信号に対応した制御信号を出力して設けている。そして、制御手段17は変位フィードバック信号に対応した制御信号により油圧シリンダ2の位置制御を行っている際には、荷重制御用のP(比例)、I(積分)、D(微分)パラメータを荷重フィードバック信号が変化してもこれに対応する制御信号が不変となる値に設定して設けている。保持手段18は制御手段17からの変位フィードバック信号に対応した制御信号を取り込んだり取り込みを解除(プログラムで行う。)したりして設け、これにより荷重フィードバック信号に対応した制御信号と変位フィードバック信号に対応した制御信号とを切換えて設け、この切換えに伴い制御手段17からの荷重フィードバック信号に対応した制御信号を遮断し切換完了後に遮断を解除する遮断スイッチ18Aを有すると共に、切換えに伴い切換前の制御信号を保持し切換完了後に保持を解除する保持機能18Bを有している。変換手段9はデジタル/アナログコンバータから成り、制御手段17から出力した制御信号のデジタルデータをアナログデータに変換して出力して設けている。駆動手段10は増幅器から成り、変換手段9からの制御信号を増幅して油圧シリンダ2を作動制御する作動信号を油圧サーボ弁1に出力して設けている。 The servo control device includes a conversion means 16, a control means 17, a holding means 18, a conversion means 9, and a drive means 10. The conversion means 16 is provided by converting the analog data of the displacement feedback signal from the displacement detector 3 and the load feedback signal from the load detector 4 into digital data and outputting it to the control means 17. The control means 17 compares and calculates the displacement feedback signal and the displacement command signal, outputs a control signal corresponding to the displacement feedback signal, and compares and calculates the load feedback signal and the load command signal to control corresponding to the load feedback signal. A signal is output and provided. When the control means 17 controls the position of the hydraulic cylinder 2 with a control signal corresponding to the displacement feedback signal, the load control P (proportional), I (integral), and D (differential) parameters are loaded. Even if the feedback signal changes, the corresponding control signal is set to a value that does not change. The holding means 18 is provided by taking in a control signal corresponding to the displacement feedback signal from the control means 17 or releasing (taken by a program) the control signal, thereby generating a control signal corresponding to the load feedback signal and a displacement feedback signal. The control signal corresponding to the load feedback signal from the control means 17 is cut off in accordance with the switching, and the cut-off switch 18A is released after the switching is completed. A holding function 18B for holding the control signal and releasing the holding after the switching is completed is provided. The conversion means 9 comprises a digital / analog converter, and is provided by converting the digital data of the control signal output from the control means 17 into analog data and outputting it. The driving means 10 is composed of an amplifier, and is provided with an operation signal for amplifying the control signal from the conversion means 9 to control the operation of the hydraulic cylinder 2 and outputting it to the hydraulic servo valve 1.

次に、かかる構成の作動を説明する。
油圧シリンダ2の位置制御は次のとおり行う。変位検出器3からの変位フィードバック信号は変換手段16でデジタルデータに変換されて制御手段17に入力し、制御手段17は変位フィードバック信号と変位指令信号とを比較演算して制御信号を出力し、制御手段17から出力した変位フィードバック信号に対応した制御信号は保持手段18に取り込まれて変換手段9でアナログデータに変換されて駆動手段10に入力し、駆動手段10は変位フィードバック信号に対応した制御信号を増幅して作動信号を油圧サーボ弁1に出力し、油圧サーボ弁1は駆動手段10からの作動信号により油圧シリンダ2を作動する。このとき、荷重検出器4から変換手段16を介して制御手段17に入力する荷重フィードバック信号と荷重指令信号とを比較演算して出力する制御信号は、荷重制御用のP、I、Dパラメータを荷重フィードバック信号が変化しても不変となる値に設定してあり、油圧シリンダ2の位置制御に影響を与えない。
Next, the operation of this configuration will be described.
The position control of the hydraulic cylinder 2 is performed as follows. The displacement feedback signal from the displacement detector 3 is converted into digital data by the conversion means 16 and input to the control means 17. The control means 17 compares the displacement feedback signal and the displacement command signal and outputs a control signal, A control signal corresponding to the displacement feedback signal output from the control means 17 is taken into the holding means 18 and converted into analog data by the conversion means 9 and input to the drive means 10. The drive means 10 performs control corresponding to the displacement feedback signal. The signal is amplified and an operation signal is output to the hydraulic servo valve 1, and the hydraulic servo valve 1 operates the hydraulic cylinder 2 by the operation signal from the driving means 10. At this time, the load feedback signal input to the control means 17 from the load detector 4 via the conversion means 16 and the load command signal are compared and output, and the control signal output is the P, I and D parameters for load control. It is set to a value that does not change even if the load feedback signal changes, and does not affect the position control of the hydraulic cylinder 2.

また、油圧シリンダ2の荷重制御は次のとおり行う。
荷重検出器4からの荷重フィードバック信号は変換手段16でデジタルデータに変換されて制御手段17に入力し、制御手段17は荷重フィードバック信号と荷重指令信号とを比較演算して制御信号(このとき、荷重制御用のP、I、Dパラメータは前述の不変となる値より変更する。)を出力し、制御手段17から出力した荷重フィードバック信号に対応した制御信号は保持手段18を介して変換手段9でアナログデータに変換されて駆動手段10に入力し、駆動手段10は制御手段17からの荷重フィードバック信号に対応した制御信号を増幅して作動信号を油圧サーボ弁1に出力し、油圧サーボ弁1は駆動手段10からの作動信号により油圧シリンダ2を荷重制御で作動する。このとき、変位フィードバック信号と変位指令信号とを比較演算して出力した変位フィードバック信号に対応した制御信号は保持手段18で取り込みを解除し、油圧シリンダ2の圧力制御に影響を与えない。
The load control of the hydraulic cylinder 2 is performed as follows.
The load feedback signal from the load detector 4 is converted into digital data by the conversion means 16 and is input to the control means 17. The control means 17 compares the load feedback signal and the load command signal to calculate a control signal (at this time, The P, I, and D parameters for load control are changed from the above invariable values.) And the control signal corresponding to the load feedback signal output from the control means 17 is converted via the holding means 18 into the conversion means 9. Is converted to analog data and input to the driving means 10. The driving means 10 amplifies the control signal corresponding to the load feedback signal from the control means 17 and outputs an operation signal to the hydraulic servo valve 1. The hydraulic cylinder 2 is operated by load control by an operation signal from the driving means 10. At this time, the control signal corresponding to the displacement feedback signal output by comparing and calculating the displacement feedback signal and the displacement command signal is released by the holding means 18 and does not affect the pressure control of the hydraulic cylinder 2.

かかる作動で、位置制御から荷重制御に切換える際には、まず制御手段17から出力する変位フィードバック信号に対応した制御信号の保持手段18への取り込みを解除し、保持手段18の遮断スイッチ18Aで荷重フィードバック信号に対応した制御信号を遮断し、取り込み解除前の変位フィードバック信号に対応した制御信号を保持機能18Bで保持し、この保持した制御信号を変換手段9を介して駆動手段10に出力する。そして、制御手段17で荷重制御用のP、I、Dパラメータを不変となる値より変更し、遮断スイッチ18Aでの遮断を解除すると共に、保持機能18Bでの保持を解除し、荷重フィードバック信号に対応した制御信号を出力する。この切換直後においては、荷重フィードバック信号を制御手段17での荷重指令信号とし、荷重フィードバック信号と荷重指令信号との比較演算により出力する制御信号を可及的に零に近づけ切換ショックを低減する。   In this operation, when switching from position control to load control, first, the control signal corresponding to the displacement feedback signal output from the control means 17 is released from the holding means 18 and the load is detected by the cutoff switch 18A of the holding means 18. The control signal corresponding to the feedback signal is cut off, the control signal corresponding to the displacement feedback signal before the release is held is held by the holding function 18B, and the held control signal is output to the driving means 10 via the conversion means 9. Then, the control means 17 changes the P, I, and D parameters for load control from invariable values, releases the shutoff at the shutoff switch 18A, releases the hold at the holding function 18B, and outputs the load feedback signal. Output the corresponding control signal. Immediately after this switching, the load feedback signal is used as a load command signal in the control means 17, and the control signal output by the comparison calculation between the load feedback signal and the load command signal is made as close to zero as possible to reduce the switching shock.

また、荷重制御から位置制御に切換える際には、まず保持手段18の遮断スイッチ18Aで荷重フィードバック信号に対応した制御信号を遮断し、この遮断前の制御信号を保持機能18Bで保持し、この保持した制御信号を変換手段9を介して駆動手段10に出力する。そして、制御手段17で荷重制御用のP、I、Dパラメータを荷重フィードバック信号が変化しても不変となり位置制御に影響を与えない値に変更すると共に、位置制御用のP、I、Dパラメータを設定する。この後、遮断スイッチ18Aでの遮断を解除して保持機能18Bでの保持を解除すると共に、解除していた保持手段18への取り込みを再開し、変位フィードバック信号に対応した制御信号を出力する。この切換直後においては、変位フィードバック信号を制御手段17での変位指令信号とし、変位フィードバック信号と変位指令信号との比較演算により出力する制御信号を可及的に零に近づけ切換ショックを低減する。   When switching from load control to position control, first, the control signal corresponding to the load feedback signal is shut off by the shutoff switch 18A of the holding means 18, and the control signal before the shutoff is held by the holding function 18B. The control signal is output to the drive means 10 via the conversion means 9. The control unit 17 changes the P, I, and D parameters for load control to values that do not change even if the load feedback signal changes and does not affect the position control, and the P, I, and D parameters for position control. Set. Thereafter, the shutoff by the shutoff switch 18A is released to release the holding by the holding function 18B, and the taking-in to the holding means 18 which has been released is resumed, and a control signal corresponding to the displacement feedback signal is output. Immediately after this switching, the displacement feedback signal is used as a displacement command signal in the control means 17, and the control signal output by the comparison calculation of the displacement feedback signal and the displacement command signal is made as close to zero as possible to reduce the switching shock.

このため、位置制御から荷重制御に切換える際、及び荷重制御から位置制御に切換える際に、切換前後のフィードバック信号に対応した制御信号を途切れることなく出力でき、異なるフィードバック信号に対応した制御信号を切換える際に、油圧シリンダ2に作用する油圧の解除を不要にして切換ショックの発生を抑制することができ、切換える都度に油圧シリンダ2に作用する油圧の入切をしなくて作業性を向上できる。また、変位フィードバック信号に対応した制御信号の保持手段18への取り込みと取り込み解除により位置制御と荷重制御とを切換えているため、変位フィードバック信号と圧力フィードバック信号とを切換える切換手段を必要とする装置と比べ、構成の簡素化を図ることができる。   For this reason, when switching from position control to load control and when switching from load control to position control, it is possible to output control signals corresponding to the feedback signals before and after switching without interruption, and to switch control signals corresponding to different feedback signals. In this case, the release of the hydraulic pressure acting on the hydraulic cylinder 2 is not required and the occurrence of the switching shock can be suppressed, and the workability can be improved without turning on / off the hydraulic pressure acting on the hydraulic cylinder 2 each time switching is performed. In addition, since the position control and the load control are switched by taking in and releasing the control signal corresponding to the displacement feedback signal to and from the holding means 18, an apparatus that requires switching means for switching between the displacement feedback signal and the pressure feedback signal is required. As compared with the configuration, the configuration can be simplified.

なお、本発明の一実施形態では、異なるフィードバック信号として変位フィードバック信号と荷重フィードバック信号としたが、これに限定されるものではなく、例えば油温、速度、回転数等をフィードバック信号とできることは勿論である。また、アナログデータのフィードバック信号をデジタルデータに変換する変換手段16及びデジタルデータの制御信号をアナログデータに変換する変換手段9を設けたが、デジタルデータのフィードバック信号とすることで変換手段16、9を不要にできることは勿論である。   In the embodiment of the present invention, the displacement feedback signal and the load feedback signal are used as different feedback signals. However, the present invention is not limited to this. For example, oil temperature, speed, rotation speed, etc. can be used as feedback signals. It is. Further, the converter 16 for converting the feedback signal of analog data into digital data and the converter 9 for converting the control signal of digital data into analog data are provided. Of course, it can be made unnecessary.

本発明の一実施形態を示したサーボ制御装置のブロック図である。It is a block diagram of a servo control device showing an embodiment of the present invention. 図1の要部を詳細に示したブロック図である。It is the block diagram which showed the principal part of FIG. 1 in detail. 従来例を示した概略図である。It is the schematic which showed the prior art example.

符号の説明Explanation of symbols

2:油圧シリンダ(油圧アクチュエータ)
10:駆動手段
17:制御手段
18:保持手段
2: Hydraulic cylinder (hydraulic actuator)
10: Driving means 17: Control means 18: Holding means

Claims (1)

油圧アクチュエータからの異なるフィードバック信号をそれぞれの指令信号と比較演算して制御信号を出力する制御手段と、制御手段からの制御信号を増幅して油圧アクチュエータを作動制御する作動信号を出力する駆動手段とを具備し、制御手段と駆動手段との間には制御手段から出力する異なるフィードバック信号に対応する制御信号の一方を取り込んだり取り込みを解除したりすることで異なるフィードバック信号に対応する制御信号を切換えてどちらか一方を出力する保持手段を備え、保持手段は制御信号の切換えに伴い切換前の制御信号を保持すると共に、切換完了後に切換前の制御信号の保持を解除し、制御手段は前記取り込んだ一方のフィードバック信号に対応した制御信号により油圧アクチュエータの制御を行っている際には、他方の制御用のP、I、Dパラメータを他方のフィードバック信号が変化してもこれに対応する制御信号が不変となる値に設定して設けて成るサーボ制御装置。   Control means for comparing and calculating different feedback signals from the hydraulic actuator with respective command signals and outputting a control signal; drive means for amplifying the control signal from the control means and outputting an operation signal for controlling the operation of the hydraulic actuator; The control signal corresponding to the different feedback signal is switched between the control means and the driving means by taking in one of the control signals corresponding to the different feedback signals output from the control means or canceling the fetching. Holding means for outputting either one of them, the holding means holds the control signal before switching in accordance with the switching of the control signal, and releases the holding of the control signal before switching after the switching is completed. When the hydraulic actuator is controlled by the control signal corresponding to the other feedback signal The other P for control, I, servo controller comprising providing set to a value which the control signal is invariable corresponding thereto even when the D parameter changes the other of the feedback signal.
JP2006054095A 2006-02-28 2006-02-28 Servo control device Expired - Fee Related JP4241747B2 (en)

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JP18877296A Division JP3810140B2 (en) 1996-06-28 1996-06-28 Servo control device

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014141961A1 (en) * 2013-03-14 2014-09-18 株式会社Ihi Actuator controller

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014141961A1 (en) * 2013-03-14 2014-09-18 株式会社Ihi Actuator controller
JP2014177983A (en) * 2013-03-14 2014-09-25 Ihi Corp Actuator control device
US9752512B2 (en) 2013-03-14 2017-09-05 Ihi Corporation Actuator control device

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