JP2006134511A - Disk delivery method of magnetic transfer apparatus, and magnetic transfer apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To prevent position deviation when a slave disk (disk to be transferred) to be attractively transported by a supply means provided with an attraction chuck is delivered to the attraction chuck of a holder part. <P>SOLUTION: This apparatus is a magnetic transfer apparatus 10 magnetically transferring a magnetic pattern of a master disk 46 held by a holder unit 22 to a slave disk 40. In a disk delivery method of the magnetic transfer apparatus for attractively transporting the slave disk 40 by a disk supply unit 26 provided with a first attraction chuck 42b and delivering it to a second attraction chuck 23A of a fixed side holder 23, by increasing attracting force of the second attraction chuck 23a more than attracting force for attracting the slave disk 40 by the first chuck 42b, after the slave disk 40 is attracted by the second attraction chuck 23A, attraction of the first attraction chuck 42b is released. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a disk transfer method and a magnetic transfer apparatus of a magnetic transfer apparatus, and more particularly, to a magnetic transfer apparatus for transferring a magnetic information pattern such as format information from a master disk to a magnetic disk used in a hard disk apparatus and the like, and the apparatus. Disc delivery method.

  In recent years, magnetic disks (hard disks) used in hard disk drives, which have been rapidly spreading, are written with format information and address information before being installed in the drive after being delivered to the drive manufacturer by the magnetic disk manufacturer. It is common. This writing can be performed by a magnetic head, but it is efficient to use a magnetic transfer device that batch-transfers from the master disk in which the format information and address information are written to the slave disk (transfer target disk). It is.

  In this magnetic transfer apparatus, the slave disk sucked and transported by the supply means equipped with the suction chuck is transferred to the suction chuck of the holder part, the slave disk is brought into close contact with the master disk, and in this state, a magnetic field is applied to the holder part to apply the master disk. A method of transferring a magnetic pattern of a disk to a slave disk is widely used. Further, when the slave disk and the master disk are brought into close contact with each other, it is necessary that the disk centers coincide with each other. Therefore, when the slave disk is transferred from the suction chuck of the supply means to the suction chuck of the holder, if the slave disk is deformed or misaligned (the disk center does not match), the magnetic pattern of the master disk will be There is a problem that the disc is not correctly transferred.

As a countermeasure, for example, in Patent Document 1, when a disk holder is held by vacuum suction and the master disk and the slave disk are brought into face-to-face contact, a vacuum is applied from the suction suction port of the suction holding section that sucks and holds the slave disk. When the slave disk and the master disk are brought into close contact with each other by vacuum suction from the suction port for preventing deformation formed in the center part of the disk holder, the central part of the master disk is not deformed to the slave disk side. A magnetic transfer apparatus configured as described above is disclosed.
JP 2001-325725 A

  However, in the magnetic transfer device of Patent Document 1, even if the slave disk can be prevented from being deformed when it is delivered to the holder unit, it is not possible to prevent the displacement of the attracting position during delivery. This positional deviation is particularly likely to occur when the suction of the suction chuck of the supply unit is released.

  The present invention has been made in view of such circumstances, and a positional deviation occurs when a slave disk (disk to be transferred) sucked and conveyed by a supply means having a suction chuck is transferred to the suction chuck of the holder portion. DISCLOSURE OF THE INVENTION An object of the present invention is to provide a disk transfer method for a magnetic transfer device and a magnetic transfer device.

  In order to achieve the above object, a first aspect of the present invention is a magnetic transfer apparatus for magnetically transferring a magnetic pattern of a master disk held by a holder portion to a transfer target disk, which is provided with a first suction chuck. In the disk transfer method of the magnetic transfer device for sucking and transporting the transfer target disk to the second suction chuck of the holder unit, the suction force for attracting the transfer target disk by the first suction chuck A method of delivering a disk to a magnetic transfer device, wherein the suction force of the second suction chuck is increased to attract the disk to be transferred to the second suction chuck, and then the suction of the first suction chuck is released. provide.

  According to the first aspect of the present invention, the second attracting force of the second attracting chuck of the holder portion is made higher than the attracting force of attracting the transfer target disc by the first attracting chuck of the supplying means, and the second target disc is moved to the second attracting force. Since the suction of the first suction chuck is released after being attracted to the suction chuck, no positional deviation occurs when the transfer target disk is transferred from the first suction chuck to the second suction chuck. In this case, if the suction force of the first suction chuck is the same as that of the second suction chuck or the suction force of the second suction chuck is smaller, the transfer disk moves by the air pressure when releasing the suction of the first suction chuck. There is a risk that.

  Here, the suction force of the first and second suction chucks means a force represented by the product of the suction pressure and the suction area. Therefore, when the present invention expresses the relationship between the first and second suction chucks using the suction pressure and the suction area, the suction pressure (P1) of the first suction chuck is changed to the suction area (A2) of the second suction chuck. The suction pressure (P2) of the second suction chuck is higher than the value [P1 × (A1 / A2)] multiplied by the ratio (A1 / A2) of the suction area (A1) of the first suction chuck to [P2>. P1 × (A1 / A2)], and after the disk to be transferred is attracted to the second suction chuck, the suction of the first suction chuck is released.

  According to a second aspect of the present invention, in the first aspect, when the disk to be transferred is transferred from the first suction chuck to the second suction chuck, a misalignment prevention guide provided on the first or second suction chuck is used. It is delivered in a state of being fitted to the center hole or outer peripheral edge of the disk for use.

  As described above, this misalignment of the transfer disk is particularly likely to occur when releasing the suction of the first suction chuck that holds the transfer disk by suction. Since the suction is released in a state of being fitted to the hole or the outer peripheral edge, it is possible to reliably prevent the positional deviation.

  A third aspect of the present invention is an apparatus for magnetically transferring a magnetic pattern of a master disk held by a holder portion to a disk to be transferred, in order to achieve the above object, comprising a supply means having a first suction chuck. In the magnetic transfer device that sucks and conveys the disk to be transferred and delivers it to the second suction chuck of the holder unit, the second suction chuck has a larger suction force than the suction force to suck the disk to be transferred by the first suction chuck. The suction and release means of the first and second suction chucks are controlled so as to release the suction of the first suction chuck after the suction force is increased and the disk to be transferred is sucked to the second suction chuck. Provided is a magnetic transfer apparatus comprising a control means.

  According to the third aspect of the present invention, the control means increases the suction force of the second suction chuck of the holder portion to be higher than the suction force of the first suction chuck of the supply means to suck the disk to be transferred. Since the suction of the first suction chuck is released after the disk is sucked by the second suction chuck, there is no positional deviation when the transfer target disk is transferred to the second suction chuck of the holder portion.

  According to a fourth aspect of the present invention, in the third aspect of the present invention, when the first suction chuck or the second suction chuck is provided at least one of the first suction chuck and the second suction chuck is transferred from the first suction chuck, the position of the suction position is shifted. A misalignment prevention guide for preventing is provided.

  According to a fourth aspect of the present invention, in addition to the control of the first and second suction chucks by the control means described in the third aspect, the misalignment prevention guide provided on the first or second suction chuck is provided in the center hole of the transfer disk or The transferred disk is transferred to the second suction chuck of the holder part while being fitted to the outer peripheral edge. As a result, it is possible to more reliably prevent the positional deviation of the transferred disk.

  A fifth aspect of the present invention is characterized in that, in the fourth aspect, the tip of the misalignment prevention guide is formed so as not to protrude from the suction opposite surface of the transfer target disk.

  Since the tip of the misalignment prevention guide is formed so as not to protrude from the surface opposite to the suction of the transfer target disk, the transfer target disk is moved from the first suction chuck of the supply means to the second suction of the holder portion. When handed over to the chuck, the tip of the misalignment prevention guide does not contact the holder part and interfere with each other.

  A sixth aspect of the present invention is characterized in that, in the fourth or fifth aspect, the misalignment prevention guide is formed so as to be fitted into a center hole formed in the disk to be transferred.

  According to the sixth aspect, when the transfer target disk is transferred from the first suction chuck to the second suction chuck, the misalignment prevention guide is fitted in the center hole formed in the transfer target disk. By this misalignment prevention guide, delivery is performed in a state where the suction chuck and the transfer target disk are correctly positioned. Therefore, it is possible to prevent displacement of the suction position during delivery.

  A seventh aspect of the present invention is characterized in that, in the fourth or fifth aspect, the misalignment prevention guide is formed so as to be fitted to an outer peripheral edge of the transfer target disk.

  According to the seventh aspect, when the transfer target disk is transferred from the first suction chuck to the second suction chuck, the misalignment prevention guide is fitted to the outer peripheral edge of the transfer target disk. By this misalignment prevention guide, delivery is performed in a state where the suction chuck and the transfer target disk are correctly positioned. Therefore, it is possible to prevent displacement of the suction position during delivery.

  As described above, according to the present invention, there is no positional deviation when the slave disk sucked and conveyed by the supply means having the suction chuck is transferred to the suction chuck of the holder portion.

  Hereinafter, preferred embodiments of a magnetic transfer method and apparatus according to the present invention will be described in detail with reference to the accompanying drawings.

  FIG. 1 is a perspective view showing an overall configuration of a magnetic transfer apparatus 10 according to the present invention, and FIG. 2 is a perspective view showing an outline of a disk cassette.

  The apparatus main body 12 of the magnetic transfer apparatus 10 includes a pedestal 58, and a base 60 having a horizontal surface is provided on the pedestal 58. Note that the side indicated by the thick arrow is the front surface of the apparatus main body 12.

  At the front end of the base 60, there are provided a disk supply cassette 38 for accommodating a slave disk 40 as a transfer target disk, and a disk discharge cassette 56 as a cassette for collecting the slave disk 40 to which magnetic information has been transferred and discharged. ing. The disc supply cassette 38 and the disc discharge cassette 56 have the same shape.

  As shown in FIG. 2, a plurality of disk supply cassettes 38 and disk discharge cassettes 56 can be stored with the surfaces of the slave disks 40 facing each other. That is, the slave disk 40 is inserted into each of the plurality of grooves 92, 92... Formed in parallel with the inner surface of the cassette, and the outer periphery of the slave disk 40 is defined by the surface formed by the grooves 92. The plurality of slave disks 40 are arranged so as to be spaced apart from each other.

  An index table 50 is attached to a substantially central portion of the upper surface of the base 60 in FIG. On the index table 50, four holder units 22 as holding means for holding a pair of master disks 46 and one slave disk 40 are arranged at regular intervals (every 90 degrees) in the rotation direction of the index table 50. Has been.

  As shown in a sectional view in FIG. 3, the holder unit 22 includes a fixed side holder 23 and a moving side holder 24 which are a pair of holder portions. The fixed-side holder 23 and the moving-side holder 24 each hold and fix the master disk 46 by adsorbing or adhering by external setup or the like, and adsorbing and holding the slave disk 40 (not shown). The disc 40 can be clamped in a close contact state.

  The fixed-side holder 23 and the moving-side holder 24 have different information recorded on the fixed-side holder 23 and the moving-side holder 24 so as to correspond to the magnetic information recorded on the respective main surfaces of the slave disk 40. The master disks 46 are fixed. The set of these two master disks 46, 46 can be brought into close contact with each main surface of the slave disk 40 and sandwiched.

  The fixed side holder 23 is a circular cup-shaped member, and can fix the master disk 46 in the cup via a cushion material (not shown). The moving side holder 24 is a disk-shaped member, and can fix the master disk 46 to the surface via a cushion material (not shown).

  In addition, shaft members (not shown) are erected at the centers of the back surfaces of the fixed side holder 23 and the moving side holder 24 (the surface opposite to the surface on which the master disk 46 is fixed). One of the shaft members is fixed to the apparatus main body 12. On the other hand, the other shaft member is fixed to the apparatus main body 12 via a driving means (not shown), and can move so as to be able to contact and separate from the fixed side holder 23.

  With the configuration of the holder unit 22 described above, when the slave disk 40 is supplied or removed, the fixed-side holder 23 and the moving-side holder 24 are set at positions separated by a predetermined distance, and a disk described later. The slave disk 40 can be easily handled by the supply unit 26 and the disk discharge unit 34.

  On the other hand, when transferring the slave disk 40 or forming a sealed space inside the holder unit 22, the fixed side holder 23 and the moving side holder 24 are in contact with each other, and the holder unit 22 is placed inside the holder unit 22. A sealed space is formed. As a result, a sufficient degree of cleanliness can be secured inside the holder unit 22 and the life of the master disk 46 can be dramatically improved. Further, inside the holder unit 22, a predetermined clearance is formed between the master disks 46, 46 so that contact between the master disks 46, 46 is avoided. Further, when the slave disk 40 is supplied to the holder unit 22, a gap is formed in the holder unit 22.

  In the apparatus main body 12 of FIG. 1, the index table 50 is intermittently rotated by a drive motor (not shown), and is sequentially sent to each process position and stopped so that each holder unit 22 corresponds to each index position. Multiple work can be done in parallel. The index table 50 is intermittently driven so that the four holder units 22 are always arranged at predetermined four positions. That is, each holder unit 22 stops every 90-degree movement.

  Further, the apparatus main body 12 of FIG. 1 has the disk supply unit 26 on one side of the upper surface of the base 60 (left side of the front in FIG. 1) and the other side of the upper surface of the base 60 (right side of the front in FIG. 1). ) Are each provided with a disc discharge unit 34.

  The disk supply unit 26 can directly transport the slave disk 40 from the disk supply cassette 38 to the holder unit 22 to which the master disks 46 and 46 are attached without transferring the slave disk 40 to another chuck mechanism. Means.

  On the contrary, the disk discharge unit 34 is a disk discharge unit that can directly convey the slave disk 40 that has completed the magnetic transfer operation to the disk discharge cassette 56 without transferring it to another chuck mechanism.

  2, 4, and 5, the disk supply unit 26 mainly includes a chuck mechanism 42 that attracts to the slave disk 40, and each XYZ-axis robot as illustrated in FIG. 1. 27, 28, 29, and a rotary cylinder 44 having a rotation axis in the Y-axis direction for rotating the chuck mechanism 42 so that the slave disk 40 is rotated 180 degrees in the XZ plane.

  The chuck mechanism 42 is mainly provided at one end (base portion) of a chuck arm 42a supported by the rotary cylinder 44 and the other end portion (tip end portion) of the chuck arm 42a and sucks the slave disk 40. 42b, and a misalignment prevention guide 42c for preventing misalignment of the suction position when the slave disk 40 is transferred from the first suction chuck 42b to the second suction chuck 23A of the fixed side holder 23 described later. That is, the disk supply unit 26 rotates the chuck mechanism 42 that sucks the slave disk 40 by 180 degrees by the rotary cylinder 44, and reverses the directions of the slave disk 40 and the first suction chuck 42b.

  4A and 4B are diagrams for explaining the chuck mechanism 42. FIG. 4A is a side sectional view, and FIG. 4B is an explanatory view for explaining the misalignment prevention guide 42c in a partially enlarged view of a portion surrounded by a circle in FIG. is there.

  As shown in FIG. 4, in the chuck mechanism 42, a main body 42d having a decompression chamber 42h and a suction plate 42e are connected by a screw 93, and a position shift prevention guide 42c is provided on the suction plate 42e. . That is, a position shift prevention guide 42c that fits into the center hole 40a of the slave disk 40 is formed on the suction surface 42f of the suction disk 42e so as to protrude from the suction surface 42f. In this case, the misalignment prevention guide 42c may be formed integrally with the suction plate 42e or may be formed separately. A ring-shaped suction hole 42g is formed outside the position shift prevention guide 42c on the suction surface 42f, and the suction hole 42g communicates with the decompression chamber 42h of the main body 42d. Note that the suction hole 42g does not need to be a single ring-like hole, and a ring shape may be formed intermittently with a plurality of holes.

  The main body 42d is connected to a suction / release means 42v (see FIG. 6) that performs suction (vacuum suction) and suction release via a ventilation path 42j formed inside the chuck arm 42a. 42b can attract or release the slave disk 40.

  Further, as shown in FIG. 4B, a taper 42k is formed on the periphery of the distal end of the position shift prevention guide 42c. Since the tip of the misalignment prevention guide 42c is tapered due to the taper 42k, the misalignment prevention guide 42c smoothly enters the central hole 40a of the slave disk 40 when the slave disk 40 is sucked by the first suction chuck 42b. By being guided, the misalignment prevention guide 42c and the slave disk 40 are brought into a fitted state. In FIG. 4A, the misalignment prevention guide 42c is formed as a columnar protrusion protruding from the suction surface 42f. However, the position shift prevention guide 42c is not limited to the columnar shape, and is cylindrical. Alternatively, any shape may be used as long as a plurality of positions of the misalignment prevention guide 42c come into contact with the inner peripheral edge of the center hole 40a of the slave disk 40 and the misalignment prevention guide 42c is fitted in the center hole 40a. Further, although not shown, the cylindrical shape may be divided into a plurality of divided pieces in the vertical direction. By dividing into the divided pieces in this way, the positional deviation prevention guide 42c is easily elastically deformed, and therefore the positional deviation prevention guide 42c is more easily fitted into the center hole 40a of the slave disk 40. However, if the number of divided pieces is too large, the force for fitting becomes weak and causes positional displacement.

  However, as shown in FIG. 4B, when the slave disk 40 is sucked by the suction chuck 42b so that the thickness L of the fitting portion of the misalignment prevention guide 42c is smaller than the thickness M of the slave disk 40. It is preferable that the tip of the misalignment prevention guide 42c does not protrude from the surface opposite to the suction of the slave disk 40. This is because when the tip of the misalignment prevention guide 42c protrudes from the surface opposite to the suction of the slave disk 40, the position of the slave disk 40 when the slave disk 40 is transferred to the fixed side holder 23 with the slave disk 40 opposed to the master disk 46. This is because the displacement prevention guide 42c contacts and interferes with the fixed-side holder 23.

  Further, it is preferable to form a taper 42p at the peripheral edge of the tip of the suction disk 42e. This is because a taper 42p is formed because there is a servo area to which servo information of the master disk 46 is transferred in the middle peripheral part of the slave disk 40 (the part excluding the inner peripheral part and the outer peripheral part of the slave disk 40). As a result, the ring diameter of the suction hole 42g can be increased so that the suction surface 42f does not contact the servo area, and stable suction can be achieved.

  FIGS. 5A and 5B show another embodiment of the misalignment prevention guide 42c, which is fitted to the outer periphery of the slave disk 40. FIG. 5A is a side sectional view, and FIG. It is explanatory drawing explaining the position shift prevention guide 42c by a partial enlarged view.

  As shown in FIG. 5, in the suction chuck 42b, a main body portion 42d having a decompression chamber 42h and a suction disk 42e are connected by screws 93, and a displacement prevention guide 42c is provided in the main body portion 42d. In this case, the misalignment prevention guide 42c may be formed integrally with the main body portion 42d or may be formed as a separate body. That is, the main body portion 42d is composed of a large-diameter portion 42q substantially equal to the outer diameter of the slave disk 40 and a small-diameter portion 42r substantially equivalent to the suction disk 42e, and the slave disk 40 side at the outer peripheral position of the large-diameter portion 42q. A cylindrical misalignment prevention guide 42c is supported on the cylinder. The inner diameter W1 of the misalignment prevention guide 42c is smaller than the diameter of the slave disk 40, the outer diameter W2 is larger than the diameter of the slave disk 40, and a stepped notch is formed inside the tip of the misalignment prevention guide 42c. 42s is formed. The outer peripheral edge of the slave disk 40 is fitted into the notch 42s. Further, the notch 42s is formed with a taper 42t that widens the tip of the notch 42s into a trumpet shape. Accordingly, when the slave disk 40 is sucked by the first suction chuck 42b, the slave disk 40 is smoothly guided to the notch 42s of the position shift prevention guide 42c, and the position shift prevention guide 42c and the slave disk 40 are fitted. It becomes a joint state. In addition, the edge of the notch 42 s that contacts the surface of the slave disk 40 is cut off to form a taper 42 u. This is to prevent the misalignment prevention guide 42c from coming into contact with the servo area, similarly to the taper 42p shown in FIG.

  The misalignment prevention guide 42c fitted to the outer peripheral edge of the slave disk 40 is not limited to a cylindrical shape, and although not shown, the cylindrical shape is divided into a plurality of divided pieces in the vertical direction, and each divided portion is divided. A cutout 42s and a taper 42u may be formed at one end. By dividing into the divided pieces in this way, the positional deviation prevention guide 42c is easily elastically deformed, so that the positional deviation prevention guide 42c and the slave disk 40 are more easily fitted. However, if the number of divided pieces is too large, the force to be fitted becomes weak, and this may cause a positional shift at the suction position.

  Further, as shown in FIG. 5B, the thickness L of the fitting portion of the misalignment prevention guide 42c is made smaller than the thickness M of the slave disk 40 as in the case of FIG. The main body 42d is also connected to suction / release means 42v (see FIG. 6) that performs suction and suction release through a ventilation path 42j formed inside the chuck arm 42a, as in the case of FIG. As a result, the suction chuck 42b can suck or release the slave disk 40.

  The slave disk 40 taken out from the disk supply cassette 38 by the disk supply unit 26 is sucked and transported to the holder unit 22, and at the same time, with respect to the master disk 46 mounted in advance on the fixed side holder 23 of the holder unit 22. Positioning is performed relatively. Then, the slave disk 40 sucked by the first suction chuck 42 b is sucked by the second suction chuck 23 </ b> A (see FIG. 6) of the fixed side holder 23 that holds the master disk 46. As a result, the slave disk 40 is transferred to the fixed-side holder 23, and the magnetic information recording surface of the master disk 46 and the magnetic information transfer surface of the slave disk 40 are held in close contact.

  FIG. 6 is an explanatory view for explaining a mechanism for delivering the slave disk 40 sucked by the first suction chuck 42 b of the disk supply unit 26 to the second suction chuck of the fixed side holder 23. In addition, about the 1st adsorption | suction chuck | zipper 42b of FIG. 6, description is abbreviate | omitted about the part already demonstrated above.

  A suction hole 23a is formed in a ring shape at the center of the surface of the fixed side holder 23, and the suction hole 23a is adsorbed to the suction hole 23a by a pipe 23c through a decompression chamber 23b formed inside the fixed side holder 23. It is connected to a suction / release means 23d for generating a force or releasing the suction force. Note that the suction hole 23a does not have to be a single ring-like hole, and a ring shape may be formed intermittently with a plurality of holes. The arrow A in FIG. 6 is the air flow in the adsorption operation, and the arrow B is the air flow in the release operation. Thereby, the second suction chuck 23 </ b> A is integrally formed with the fixed side holder 23. Further, a master disk 46 having a central hole 46a having a diameter larger than the ring diameter of the suction hole 23a is fixed and held on the surface (at the suction surface side) of the fixed-side holder 23. As a result, when the suction / release means 23d is suctioned while the slave disk 40 is in close contact with the master disk 46, a suction force is generated in the suction hole 23a, and the inside of the slave disk 40 passes through the center hole 46a of the master disk. The peripheral portion can be adsorbed to the fixed side holder 23.

  Further, the suction / release means 23d of the second suction chuck 23A is connected via a control cable to the control means 16 for controlling ON / OFF of the suction / release means 23d and the suction force (degree of vacuum). In addition, a pressure sensor 23 e is provided in the pipe 23 c, and the measured degree of vacuum is input to the control means 16.

  On the other hand, the first suction chuck 42b of the disk supply unit 26 generates suction force in the suction hole 42g via the chuck arm 42a having the air passage 42j, and suction / release of the first suction chuck 42b that releases the suction force. Connected to means 42v. Further, the suction / release means 42v of the first suction chuck 42b is connected to the control means 16 via a control cable, and the chuck arm 42a is provided with a pressure sensor 42w, and the measured degree of vacuum is controlled by the control means. 16 is input.

  The disc ejection unit 34 is a disc ejecting unit that receives the slave disc 40 after magnetic transfer after the holder unit 22 is opened, and directly conveys and stores the slave disc 40 to the disc ejection cassette 56.

  The disk discharge unit 34 chucks the chuck mechanism 52 for sucking the slave disk 40, the robots 35, 36, and 37 of the XYZ axes, and the slave disk 40 so as to rotate 180 degrees in the YZ plane. A rotary cylinder 54 that rotates the mechanism 52 and has a rotation axis in the X-axis direction is configured. Further, the chuck mechanism 52 is formed in the same structure as shown in FIGS. In other words, the disk ejection unit 34 rotates the chuck mechanism 52 that has attracted the slave disk 40 by 180 degrees by the rotary cylinder 54 to reverse the orientation of the slave disk 40 and the chuck mechanism 52.

  As shown in FIG. 7, the reference mark 21 </ b> A is attached in advance to the lower surface portion of the fixed holder 23 of the holder unit 22, and the recognition marks 21 </ b> B and 21 </ b> B are attached in advance to the chuck mechanism 42 of the disk supply unit 26. It has been. The reference mark 21A and the recognition marks 21B and 21B are visually recognized by the recognition unit 30.

  The recognition unit 30 is disposed on the upper surface of the base 60 at a position close to the side surface opposite to the side surface on which the disk supply cassette 38 is provided. When the recognition unit 30 positions the slave disk 40 conveyed by the disk supply unit 26 on the master disk 46, the reference mark 21A and the recognition marks 21B and 21B attached in advance to the holder unit 22 and the disk supply unit 26, respectively. Is visually recognized by a CCD camera or the like.

  The recognition unit 30 is connected to control means 30A as positioning means. The control means 30A calculates the center of the master disk 46 from the recognized reference mark 21A, and from the recognized recognition marks 21B and 21B to the slave disk 40. The center of is calculated. The Y-axis robots 28 and 29 of the disk supply unit 26 are driven and controlled so that the centers of the master disk 46 and the slave disk 40 coincide.

  The positioned slave disk 40 is moved by the X-axis robot 27 of the disk supply unit 26 to a position in close contact with the master disk 46 held inside the fixed-side holder 23, and is sucked and held inside the fixed-side holder 23. Is done.

  At this time, the positional relationship between the reference mark 21A provided on the fixed-side holder 23 and the center position of the master disk 46 held on the fixed-side holder 23 is previously taught by the control means 30A.

  On the other hand, the relationship between the recognition marks 21B, 21B provided on the disk supply unit 26 and the center position of the slave disk 40 is such that the position of the slave disk 40 is on a straight line connecting the portions where the chuck chuck 42b comes into contact with the chuck mechanism 42. When it is assumed that there is a center, the relationship between the center position and the recognition marks 21B and 21B is taught in advance to the control means 30A.

  Based on these taught positional relationships, the positional relationship between the slave disk 40 and the master disk 46 is calculated indirectly.

  1 closes the holder unit 22 and sandwiches the slave disk 40 between master disks 46 and 46 fixed to the fixed side holder 23 and the moving side holder 24 of the holder unit 22, respectively. In contrast to the state disk, coils are arranged on both sides of the master disks 46 and 46 and the slave disk 40 as viewed from the stacking direction. The coil units 32 and 32 apply a magnetic field having a predetermined strength for promoting the magnetic transfer action to the master disks 46 and 46 and the slave disk 40.

  Next, a magnetic transfer method using the magnetic transfer apparatus 10 configured as described above will be described.

  When the operation is started, the chuck mechanism 42 of the disk supply unit 26 sucks the slave disks 40 in the disk supply cassette 38 and sequentially takes them out one by one. When the slave disk 40 is taken out, the slave disk 40 is sucked by the suction chuck 42b while the position shift prevention guide 42c is fitted to the center hole 40a of the slave disk 40 or the outer peripheral edge of the slave disk 40. Thereby, the slave disk 40 can be taken out by the chuck mechanism 42 without causing a displacement of the suction position.

  The taken-out slave disk 40 is reversed in the YZ plane by the rotation of the rotary cylinder 44, and then is mastered by the X-axis robot 27 formed by the opened holder unit 22 arranged at the disk supply process position 82. The gap between the disks 46, 46 is moved to a direction perpendicular to the opening / closing direction of the holder unit 22, and is inserted into the gap between the master disks 46, 46 by the Y-axis robot 28.

  At this time, the master discs 46 and 46 are respectively arranged in advance inside the fixed side holder 23 and the moving side holder 24 of the holder unit 22 by external setup or the like so that the center of the holder unit 22 and the center of the master disc 46 coincide. It is fixed to the position with high accuracy by suction or adhesion.

  The center of the slave disk 40 supplied between the fixed-side holder 23 and the moving-side holder 24 of the holder unit 22 is fixed to the inside of the fixed-side holder 23 by the XYZ axis robot of the disk supply unit 26. It is moved to a recognition position that substantially coincides with the center of the master disk 46 and that the gap with the master disk 46 is about 0.5 mm.

  Next, the reference mark 21 </ b> A attached in advance to the lower surface of the fixed side holder 23 and the recognition marks 21 </ b> B and 21 </ b> B attached in advance to the chuck mechanism 42 of the disk supply unit 26 are recognized by the recognition unit 30.

  Due to this recognition, the Y− of the disk supply unit 26 is adjusted so that the center of the master disk 46 calculated from the reference mark 21A and the center of the slave disk 40 calculated from the recognition marks 21B and 21B of the chuck mechanism 42 coincide. The slave disk 40 is positioned by the Z-axis robots 28 and 29.

  Next, the slave disk 40 is moved by the X-axis robot 27 of the disk supply unit 26 to a position where the slave disk 40 comes into close contact with the master disk 46 fixed inside the fixed side holder 23, and the suction chuck that sucks the slave disk 40. The suction of 42 b is released, and the suction is fixed inside the fixed side holder 23. When the slave disk 40 is transferred from the suction chuck 42b to the fixed holder 23, the control means 16 sucks the slave disk 40 with the first suction chuck 42b based on the measured values of the two pressure sensors 42w and 23e. After the suction force of the second suction chuck 23A is made higher than the suction force and the slave disk 40 is sucked to the second suction chuck 23A, the suction of the first suction chuck 42b is released so that the suction of the first suction chuck 42b is released. Control the release means 42v and the suction / release means 23dON-OFF of the second suction chuck 23A and the degree of vacuum. Accordingly, there is no positional deviation when the slave disk 40 is transferred from the first suction chuck 42b of the disk supply unit 26 to the second suction chuck 23A of the fixed side holder 23. Furthermore, in this delivery, the suction of the suction chuck 42b is released in a state where the position shift prevention guide 42c is fitted to the center hole 40a of the slave disk 40 or the outer peripheral edge of the slave disk 40. Thereby, position shift can be prevented more reliably.

  In this embodiment, the misalignment prevention guide 42c is provided in the first suction chuck 42b, but is inserted into the center hole 40a of the slave disk 40 at the center of the surface (suction surface) of the second suction chuck 23A. When the slave disk 40 is transferred from the first suction chuck 42b to the second suction chuck 23A, the position shift prevention guide is inserted into the center hole 40a of the slave disk 40. You may do it.

  Next, the moving side holder 24 is moved toward the fixed side holder 23 by the robot 70, and both sides of the slave disk 40 are sandwiched between the two master disks 46 and 46. In this way, the both sides of the slave disk 40 are sandwiched between the two master disks 46 and 46.

  Next, the index table 50 is rotated 90 degrees, and the holder unit 22 is positioned at the magnetic transfer process position 84 of the next process. Then, the coil units 32 and 32 are moved to both sides of the holder unit 22, and a magnetic field is applied from both sides while rotating the holder unit 22. As a result, the magnetic information patterns of the master disks 46 and 46 are magnetically transferred onto both sides of the slave disk 40.

  After the magnetic transfer, the coil units 32 and 32 are retracted to the initial positions, the index table 50 is rotated 90 degrees, and the holder unit 22 is positioned at the disk ejection process position 86 of the next process.

  Next, the moving side holder 24 is moved away from the fixed side holder 23. At this time, the magnetically transferred slave disk 40 is attracted to the inside of the fixed side holder 23 as in the supply.

  Next, the chuck mechanism 52 of the disk ejection unit 34 enters between the fixed side holder 23 and the moving side holder 24 and sucks the slave disk 40. Then, the suction of the slave disk 40 of the fixed side holder 23 is released and the chuck mechanism 52 of the disk discharge unit 34 is moved by the X-axis robot 35 of the disk discharge unit 34, whereby the slave disk 40 is moved to the master disk of the fixed side holder 23. Peel from 46. In receiving the slave disk 40 from the fixed side holder 23 to the chuck mechanism 52 of the disk ejection unit 34, the chucking chuck 52c is fitted to the center hole 40a of the slave disk 40 or the outer peripheral edge of the slave disk 40. The slave disk 40 is sucked at 52b. As a result, the slave disk 40 can be received by the chuck mechanism 52 without causing a displacement of the suction position.

  Next, in a state where the slave disk 40 is gripped by the chuck mechanism 52 of the disk ejection unit 34, the Y-axis robot 36 is retracted from the opened gap of the holder unit 22 in the Y-axis direction. Then, the rotary cylinder 54 is rotated 180 degrees along a circular path passing through the YZ plane and outside the apparatus, and the vertical direction including the chuck mechanism 52 is reversed.

  Next, the slave disk 40 and the chuck mechanism 52 are moved onto the disk discharge cassette 56 by the XYZ robots 35, 36, and 37 of the disk discharge unit 34, and the slave disks 40 are sequentially placed in the disk discharge cassette 56 one by one. Store.

  The series of operations described above can process each process in parallel by positioning the holder unit 22 at each process position while intermittently rotating the index table 50 sequentially.

  In addition, the code | symbol 14 in FIG. 1 is a clean unit, and 64 is a suction port which draws in the clean air downflowed from the clean unit.

The perspective view which fractures | ruptures and shows a part of magnetic transfer apparatus based on this invention A perspective view showing a state in which a slave disk is put in and out of a disk cassette. Sectional view showing the configuration of the holder unit Explanatory drawing explaining the chuck mechanism Explanatory drawing explaining another aspect of the position shift prevention guide provided in the chuck mechanism. Explanatory drawing of the mechanism which delivers the slave disk attracted | sucked to the 1st adsorption chuck of a disk supply unit to the stationary side holder holding a master disk. The perspective view which shows the alignment state of a master disk and a slave disk

Explanation of symbols

  DESCRIPTION OF SYMBOLS 10 ... Magnetic transfer apparatus, 12 ... Apparatus main body, 14 ... Clean unit, 16 ... Control means, 22 ... Holder unit (holding means), 23 ... Fixed side holder, 23a ... Suction hole, 23b ... Decompression chamber, 23c ... Piping, 23d ... Adsorption / release means, 23e ... Pressure sensor, 24 ... Movement side holder, 26 ... Disc supply unit (supply means), 30 ... Recognition unit, 32 ... Coil unit, 34 ... Disc discharge unit, 38 ... Disc supply cassette, 40 ... Slave disk (disk to be transferred), 40a ... Central hole of slave disk, 42 ... Chuck mechanism, 42a ... Chuck arm, 42b ... Adsorption chuck, 42c ... Position misalignment prevention guide, 42d ... Main body, 42e ... Adsorption disk , 42f ... suction surface, 42g ... suction hole, 42h ... decompression chamber, 42j ... vent, 42k ... taper, 42 ... taper, 42q ... larger diameter portion, 42r ... smaller diameter portion, 42s ... notch, 42t ... taper, 42u ... taper, 42v ... suction and release means, 42w ... pressure Sansa, 46 ... master disk, 46a ... center hole

Claims (7)

A magnetic transfer apparatus for magnetically transferring a magnetic pattern of a master disk held on a holder part to a transfer target disk, wherein the holder part is sucked and conveyed by the supply means having a first suction chuck. In the disk transfer method of the magnetic transfer device to be transferred to the second suction chuck,
After the suction force of the second suction chuck is made higher than the suction force for sucking the transfer target disk by the first suction chuck, the transfer target disk is sucked to the second suction chuck, and then the first suction chuck is used. A disk transfer method for a magnetic transfer apparatus, wherein the adsorption of the disk is released.   When the transfer target disk is transferred from the first suction chuck to the second suction chuck, a misalignment prevention guide provided on the first or second suction chuck is placed at the center hole or the outer periphery of the transfer target disk. 2. The disk transfer method for a magnetic transfer apparatus according to claim 1, wherein the disk is transferred in a fitted state. An apparatus for magnetically transferring a magnetic pattern of a master disk held in a holder part to a transfer target disk, wherein the transfer target disk is sucked and conveyed by a supply means having a first suction chuck. 2 In the magnetic transfer device delivered to the chuck
The suction force of the second suction chuck is made higher than the suction force of sucking the transfer target disk by the first suction chuck, and the transfer target disk is sucked to the second suction chuck, and then the first suction chuck A magnetic transfer apparatus comprising control means for controlling the suction / release means of the first and second suction chucks so as to release chuck chucking.   Provided with at least one of the first suction chuck and the second suction chuck, and provided with a position shift prevention guide for preventing the position shift of the suction position when passing from the first suction chuck to the second suction chuck. The magnetic transfer device according to claim 3.   5. The magnetic transfer apparatus according to claim 4, wherein the tip of the misalignment prevention guide is formed so as not to protrude from the opposite surface of the disk to be transferred.   6. The magnetic transfer device according to claim 4, wherein the misalignment prevention guide is formed so as to be fitted into a center hole formed in the transfer target disk. 6. The magnetic transfer apparatus according to claim 4, wherein the misalignment prevention guide is formed so as to be fitted to an outer peripheral edge of the transfer target disk.

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