JP2006133019A - Method and apparatus for analyzing sample using transmission electron microscope or scanning type transmission electron microscope - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To obtain the state analysis of a sample in a two-dimensional image with an improved S/N ratio by the amount of irradiation of electron rays for restraining damage by irradiating the sample with electron rays. <P>SOLUTION: A method for analyzing a sample using the energy filter of a transmission electron microscope or a scanning type transmission electron microscope comprises a step for irradiating a desired observation region with electrons; a process for obtaining an EELS spectrum by making the spectral diffraction of the energy of electrons through the sample by the energy filter; a step for obtaining the position and intensity of peaks by plasmon loss electrons in the EELS spectrum; and a step for obtaining the two-dimensional image with the position and intensity of peaks in the plasmon loss electrons as color information and luminance information. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a method and an apparatus for analyzing a sample by analyzing the energy of transmitted electrons using a transmission electron microscope (TEM) or a scanning transmission electron microscope (STEM).

  In the analysis using the energy filter in the transmission electron microscope and the scanning transmission electron microscope, the energy of the electrons transmitted through the sample is dispersed by the energy filter, and the electron energy loss spectroscopy spectrum (hereinafter referred to as “EELS spectrum”). Therefore, elemental analysis and state analysis are possible. The EELS spectrum includes zero-loss electrons that have passed through the sample without energy loss, plasmon-loss electrons that have excited plasmons of valence electrons and free electrons, and core-loss electrons that have excited core electrons of atoms in the sample. , Including continuous energy loss electrons excited by continuous X-rays.

  Therefore, in elemental analysis, element identification can be performed by analyzing the core loss electron peak specific to the element. In the state analysis, peaks that have a fine structure due to electrons that have received energy loss of several tens of eV from the core loss absorption edge (Energy Loss Near Edge Structure, hereinafter referred to as “ELNES peak”) It is possible to evaluate the binding state using the reflection of the electronic state. Furthermore, the plasmon loss electron peak can be evaluated mainly by excitation of bulk plasmon and surface plasmon, and physical properties such as valence and free electron density and complex dielectric function related to the bonding state can be evaluated from plasmon excitation. is there.

  In general, in an analysis method using an energy filter in a transmission electron microscope, (1) an electron is irradiated on a desired observation region, an EELS spectrum of the transmitted electron is measured, and the entire irradiation region is analyzed from the spectrum analysis. And (2) a TEM image (hereinafter referred to as “energy”) in which electrons are irradiated to a desired observation region, the transmitted electrons are dispersed with an energy filter, and electrons having an arbitrary loss energy with an arbitrary energy width are imaged. There is a method of acquiring a filter TEM image ") with a highly sensitive two-dimensional detector such as a scintillator and a cooled CCD camera.

  In addition, the analysis method using an energy filter in a scanning transmission electron microscope irradiates and scans a sample with electrons, and acquires an EELS spectrum of the electrons transmitted through each irradiation point by an energy filter. There are spectral analysis of the EELS spectrum and a method of obtaining a line profile and mapping image by electrons having an arbitrary energy width.

Usually, the method for acquiring a two-dimensional image using the EELS spectrum by the above analysis method is a method using an intensity of an arbitrary energy width, and a mapping image of the core loss absorption edge of each element appearing in a specific loss energy is obtained. It is effective to get. However, since the difference in valence state appears as a peak shift in the ELNES peak, the intensity mapping of the ELNES peak at an arbitrary energy does not accurately reflect the difference in valence state. As a method for solving this problem, a method is proposed in which an ELNES peak in the vicinity of the core loss absorption edge of the element of interest is detected, an energy difference from the core loss absorption edge to the ELNES peak is obtained, and a mapping image of the value is obtained. (See Patent Document 1 below).
JP 2001-124709 A

  As described above, elemental analysis and state analysis on the nanometer order are possible from an EELS spectrum obtained by combining a transmission electron microscope and a scanning transmission electron microscope with an energy filter. Furthermore, in recent years, acquisition of a two-dimensional image by intensity mapping of an EELS spectrum has been realized by a high-sensitivity two-dimensional detector and an electron beam scanning function.

  However, the two-dimensional image by mapping the intensity of the EELS spectrum is effective when there is a difference in intensity at a specific loss energy, such as elemental analysis by the core loss absorption edge, but the state analysis by the ELNES peak is effective. Thus, when the difference in state appears as a peak shift, it cannot be detected as contrast unless there is a difference in integrated intensity.

  FIG. 8 is a diagram for explaining signal extraction of plasmon loss electrons from an EELS spectrum in a conventional analysis method, and FIG. 9 is a diagram for explaining a two-dimensional image acquired by a conventional analysis method. is there.

Even if there is a difference in the integral intensities (S _α , S _β ), a two-dimensional image that accurately reflects the difference in the state cannot be obtained as shown in FIGS.

  In addition, since the intensity of the EELS spectrum decreases exponentially with respect to the loss energy, when the loss energy is large depending on the element of interest at the core loss absorption edge, the signal is also weak in the peak intensity as well. Become. Furthermore, the S / N is low for detecting the peak of ELNES from there and mapping the energy difference. In addition, a concentration of several percent or more is required to perform element mapping using the core-loss absorption edge.

  Therefore, the method for obtaining a two-dimensional image of the bonded state from the energy difference from the core-loss absorption edge to the ELNES peak proposed in Patent Document 1 may not be suitable depending on the element and its concentration. When the loss energy of the core loss absorption edge of the element of interest is large and requires strength, (1) by increasing the electron beam irradiation amount, a state change may occur due to electron beam damage of the sample, (2) By increasing the measurement time, there is a concern that the energy resolution is lowered due to the system drift of the apparatus, and the fluctuation of the peak position and the detection thereof become difficult. In addition, when trace elements are related to the state, (1) the core loss absorption edge itself is not detected in a short time or with a low electron irradiation amount due to the trace amount, and (2) the core loss absorption edge cannot be obtained because of no strength. In addition, since the ELNES peak is not clearly detected, there is a concern that the state analysis cannot be performed even if there is a difference in the state of the trace element.

  The present invention is to obtain a two-dimensional image of a state analysis of a sample with a good S / N with an electron beam irradiation dose that can suppress electron beam irradiation damage to the sample.

The invention of an analysis method using a transmission electron microscope or a scanning transmission electron microscope according to the present application for solving the above problems is a sample analysis method using an energy filter of a transmission electron microscope or a scanning transmission electron microscope. And
A step of irradiating a desired observation region with electrons, a step of obtaining an EELS spectrum by dispersing the energy of electrons transmitted through the sample with an energy filter, and a position and intensity of a peak due to plasmon loss electrons in the EELS spectrum are obtained. And a step of obtaining a two-dimensional image using the peak position and intensity of the plasmon loss electrons as color information and luminance information.

Further, among the above analysis methods, a sample analysis method using a transmission electron microscope energy filter,
The step of obtaining the EELS spectrum by dispersing the energy of electrons transmitted through the sample with an energy filter, acquiring the energy filter TEM image as a continuous still image or moving image while sweeping the center energy of the energy filter, and the acquisition This is a step of forming an EELS spectrum from the intensity change at each pixel in the continuous still image or moving image.

Further, among the above analysis methods, a sample analysis method using an energy filter of a scanning transmission electron microscope,
A step of irradiating the desired observation region with electrons, a step of obtaining an EELS spectrum by dispersing the energy of electrons transmitted through the sample with an energy filter, a step of irradiating electrons onto a minute region and scanning the observation region; This is a step of acquiring EELS spectra of each irradiation region by using an energy filter for the transmitted electrons.

Further, among the above analysis methods, a sample analysis method using a transmission electron microscope energy filter,
The step of irradiating the desired observation region with electrons and the step of obtaining an EELS spectrum by dispersing the energy of electrons transmitted through the sample with an energy filter irradiate the observation region with a line-shaped electron beam. These are a step of acquiring an EELS spectrum image in which energy is dispersed in a direction perpendicular to the line, and a step of acquiring a EELS spectrum in the observation region of all lines by scanning a line-shaped electron beam in the line vertical direction.

  Further, the invention of a transmission electron microscope apparatus or a scanning transmission electron microscope apparatus according to the present application for solving the above-mentioned problems is a spectroscope for dispersing the energy of electrons transmitted through a sample, and a two-dimensional detection for detecting the spectroscopic electrons. And an energy filter device having an electromagnetic lens system for imaging the spectral electrons on the surface of the two-dimensional detector, obtaining an energy filter TEM image or an EELS spectrum, a spectrometer of the energy filter device, an electromagnetic lens system, and A controller for driving a two-dimensional detector to obtain the peak position and intensity of plasmon loss electrons from the EELS spectrum obtained from the EELS spectrum or the TEM image, and the peak position and intensity of the plasmon loss electron as color information. And a computer that converts to luminance information and forms and displays it as a two-dimensional image Characterized in that was.

  By measuring the peak position and intensity of plasmon loss electrons related to physical properties such as the density and complex dielectric function of valence electrons and free electrons related to the bonded state by the analysis method and analyzer of the present invention, A state analysis related to plasmon excitation of a sample can be obtained as a two-dimensional image with a good S / N with an electron beam irradiation dose suppressed by a beam irradiation damage.

  Embodiments of the present invention will be described below with reference to the drawings.

  The analysis method of the present invention is a method for obtaining the peak position and intensity of plasmon loss electrons in the EELS spectrum as color information and luminance information and obtaining them as a two-dimensional image.

  FIG. 1 is a diagram for explaining signal extraction of plasmon loss electrons from an EELS spectrum in the analysis method of the present invention.

In FIG. 1, EELS spectra in two regions (A, B) in different states are shown together. In the EELS spectrum, peaks mainly due to zero-loss electrons, plasmon-loss electrons, and core-loss electrons appear. In the present invention, as shown in FIG. 1, plasmons for use in state analysis as shown in FIG. • Loss electron peaks (positions δE _A , δE _B , intensities I _A , I _B ) are used. The peak position of plasmon loss electrons is at an energy level lower than that of the core loss absorption edge. The plasmon-loss electron has a peak due to excitation of bulk plasmon or surface plasmon, and is related to a physical property value such as a density of valence electrons or free electrons in the bulk or surface or a complex dielectric function. Plasmon excitation is observed not only in metals having free electrons but also in semiconductors and insulators, and this is because plasmons are excited by oscillation of the entire valence electrons like free electrons. The excitation energy Ep is expressed by the following equation using the density n of valence electrons and free electrons, the elementary charge e, the dielectric constant ε _{0 of} vacuum, the mass m of electrons, and the Planck constant h, and is expressed as the square root of the electron density. Proportional.

Ep = h / 2π · (ne ² / ε ₀ m) ^1/2
Therefore, the density of valence electrons and free electrons related to the bonding state can be evaluated by obtaining the loss energy from the peak position of plasmon loss electrons. Furthermore, since the peak of plasmon loss electrons has high excitation efficiency and is observed within an electron loss energy of several tens of eV, it is possible to measure with a good S / N, as in the measurement of the core loss absorption edge. There is an advantage that it is not necessary to change the spectral range of the energy filter depending on the element. It is also possible to evaluate differences reflecting the intrinsic electronic bands and quantum size effects due to the surface and interface regions and nanostructures.

  FIG. 3 is a diagram for explaining an analysis apparatus for performing the analysis method of the present invention.

  First, in the analysis method of the present invention, by using a transmission electron microscope or a scanning transmission electron microscope 01 having an energy filter device 10 as shown in FIG. 3, zero loss electrons and plasmon loss as shown in FIG. An EELS spectrum having an electron peak is measured.

FIG. 4 is a conceptual diagram illustrating a two-dimensional image and three-dimensional data of an EELS spectrum.
FIG. 5 is a conceptual diagram illustrating an energy filter TEM image by a transmission electron microscope.
FIG. 6 is a conceptual diagram illustrating STEM-EELS using a scanning transmission electron microscope.
FIG. 7 is a conceptual diagram illustrating the position-resolved EELS method.

  The EELS spectrum acquisition method is not particularly limited as long as the three-dimensional data represented by the observation region XY plane and the loss energy direction E can be acquired as shown in FIG. 4, and the EELS of each region is obtained from the three-dimensional data. It is possible to form a spectrum. For example, as shown in FIG. 5, an energy filter TEM image of an arbitrary loss energy with an arbitrary energy width (δE) is obtained by continuously capturing three-dimensional data in the loss energy direction. As shown in FIG. 7, the EELS spectrum at an arbitrary position (δX, δY) on the observation region is obtained by scanning the electron in the observation region and obtaining it at each irradiation point. Furthermore, for an EELS spectrum image obtained by irradiation of an electron line beam (δX) in a direction 90 ° (Y direction) with respect to the energy dispersion direction, the electron line beam is placed on the observation region in the energy dispersion direction (X direction). There is a method of obtaining three-dimensional data by scanning.

  Next, as shown in FIG. 1, the energy difference from the peak position of the zero-loss electron to the peak position of the plasmon-loss electron and the peak intensity of the plasmon-loss electron are obtained from the acquired EELS spectrum. There is no limitation on the method for obtaining the peak position and intensity of plasmon / loss electrons, and a known numerical calculation method such as arithmetic processing for obtaining a maximum value, differentiation processing or smoothing processing may be used. In addition, when a physical property value such as a complex dielectric function is obtained in detail, EELS spectrum deconvolution or fitting may be performed.

  FIG. 2 is a diagram for explaining a two-dimensional image acquired by the analysis method of the present invention.

  The peak position and intensity due to plasmon loss electrons determined as described above are converted into color information and luminance information, respectively, and a two-dimensional image is formed as shown in FIG.

  At this time, the color information reflects the plasmon excitation energy, that is, the information of valence electron density, and the luminance information reflects the amount of atoms and molecules having the same valence electron density.

  Therefore, a two-dimensional image of state analysis can be obtained by the analysis method of the present invention.

  Furthermore, an analyzer for performing the analysis method of the present invention will be described. FIG. 3 shows an embodiment of an analyzer equipped with a post-column type energy filter device 10 as an example, and can be used as a transmission electron microscope and a scanning transmission electron microscope.

  The electron microscope barrel 01 includes an electron gun for generating electrons, an acceleration tube 02 for accelerating, a focusing lens 03 for focusing the electrons, and electrons used for a scanning transmission electron microscope as a sample 05. A deflection coil 04 for scanning above, an objective lens 06 for imaging the electron irradiated to the sample 05, an intermediate lens 07 and a projection lens for imaging the electron transmitted through the sample on the fluorescent screen 09 08, a fluorescent screen 09 for observing the sample 05 with a transmission electron microscope image, and a HAADF (High-angle annular dark-field) detector 18 for acquiring a scanning transmission electron microscope image It consists of

  The energy filter device 10 for energy spectroscopy of the transmitted electrons is a post column type energy filter attached under the electron microscope barrel 01. The incident aperture 11 for limiting the incident electrons and the energy of the transmitted electrons. A spectroscope 12 using a magnetic prism for performing spectroscopy, an energy slit 13 for selecting the energy of the dispersed electrons, and an electromagnetic lens system for forming an image of the dispersed electrons on the two-dimensional detector 15. A multipole lens system 14 and a two-dimensional detector 15 for detecting a dispersed transmission electron microscope image and an EELS spectrum are included. Further, an energy filter control device 16 for driving the energy filter device 10 and an image processing computer 17 for processing an image obtained by the two-dimensional detector 15 are connected to the energy filter device 10. An in-column type energy filter device in which the energy filter device is incorporated in the electron microscope barrel 01 may be used.

  Hereinafter, the present invention will be described by way of examples. However, the present invention is not limited to the examples, and the EELS spectrum measurement method, the plasmon loss electron peak position and intensity measurement method, and the present invention. It is possible to freely change the configuration of the analysis apparatus for performing the analysis method.

(First embodiment)
In this example, an energy filter of a transmission electron microscope is used, and an amorphous carbon film containing metal fine particles and partially diamond-like carbon (hereinafter referred to as DLC) is analyzed in two dimensions from the peak position and intensity of plasmon loss electrons. It is an example obtained as an image.

  In order to carry out the analysis method of the present invention in the examples, the same transmission electron microscope as in FIG. 3 was used. The transmission electron microscope used in the present embodiment includes a field emission electron gun for generating electrons, an acceleration tube 02 for accelerating to 300 keV, and a focusing lens for focusing electrons in an electron microscope barrel 01. 03, a deflection coil 04 for scanning electrons on the sample 05 when used as a scanning electron microscope, an objective lens 06 for imaging the electrons irradiated on the sample 05, and electrons transmitted through the sample It comprises an intermediate lens 07 and a projection lens 08 for forming an image on the fluorescent screen 09, and a fluorescent screen 09 for observing the sample 05 with a transmission electron microscope image.

  The energy filter device 10 used in this embodiment is a post-column type energy filter attached under the electron microscope barrel 01, and includes an entrance diaphragm 11 for limiting incident electrons and energy spectroscopy of transmitted electrons. A spectroscope 12 by a magnetic prism for performing, an energy slit 13 for selecting the energy of the dispersed electrons, a multipole lens system 14 for forming an image of the dispersed electrons on the two-dimensional detector 15, and The two-dimensional detector 15 includes a scintillator, an optical fiber plate, and a cooled CCD camera (2048 × 2048).

  Further, in addition to a control device (not shown) for driving the transmission electron microscope, an image for processing an image obtained by the energy filter control device 16 for driving the energy filter device 10 and the two-dimensional detector 15. A processing computer 17 is connected.

  Below, the analysis implemented using the said transmission electron microscope is demonstrated. In the present embodiment, as shown in FIG. 5, an energy filter TEM image of an arbitrary loss energy with an arbitrary energy width (δE) is acquired by continuously capturing three-dimensional data in the loss energy direction. is there.

  First, a desired observation region is selected by TEM observation on a normal fluorescent screen 09, the fluorescent screen 09 is retracted from the electron optical path, transmitted electrons are introduced into the energy filter device 10, and the spectrometer 12 performs energy spectroscopy of the electrons. The zero-loss image was observed to confirm that the energy filter TEM image was observed.

  Next, on the condition that the energy filter TEM image is acquired with an energy width of 1 eV by the energy slit 13 and one imaging time in 5 seconds, the loss energy is swept from -2 eV to 98 eV in 1 eV step, and the center energy of the energy slit 13 is swept. A continuous still image (2 × 2 binning) was acquired while (sweep).

  Then, all images were stored in the image processing computer 17, and intensity changes at each pixel with respect to loss energy were extracted from all images to form an EELS spectrum at each pixel. Further, the peak of zero-loss electron and the peak position of plasmon-loss electron were obtained from each EELS spectrum by differentiation, and the intensity of plasmon-loss electron was obtained therefrom.

  Finally, the peak position of plasmon-loss electrons is converted into color information, and the peak intensity is converted into luminance information of the color, thereby obtaining a two-dimensional image reflecting the density of valence electrons and free electrons of the sample. I was able to.

  According to the above analysis, the metal fine particles in the amorphous carbon film and the DLC partially existing in the amorphous carbon film could be observed as a two-dimensional image as a difference in state.

(Second embodiment)
In this example, an energy filter of a scanning transmission electron microscope is used to analyze the state of the same metal fine particle as in the first example and an amorphous carbon film partially containing DLC from the peak position and intensity of plasmon loss electrons. It is an example obtained as a two-dimensional image.

  Also in this example, the same transmission electron microscope as in the first example was used, and the deflection coil 04 and the HAADF detector 18 were driven and used as a scanning transmission electron microscope.

  Below, the analysis performed using the scanning transmission electron microscope is demonstrated. In this example, as shown in FIG. 6, an EELS spectrum of a minute region at an arbitrary position (δX, δY) on the observation region is obtained by scanning electrons in the observation region and obtaining each irradiation point in the minute region. This is a method for acquiring three-dimensional data.

  First, finely focused electrons on the surface of the sample 05 are irradiated and scanned by the deflection coil 04, and electrons scattered and transmitted at a high angle are detected by the HAADF detector 18, and a desired scanning electron microscope observation is performed. The observation area was selected. In addition, the transmitted electrons that were not scattered were introduced into the energy filter device 10, the electrons were subjected to energy spectroscopy by the spectrometer 12, and it was confirmed that the EELS spectrum was measured by the two-dimensional detector 15. Since the fluorescent screen 09 is not used in the scanning transmission electron microscope observation, it is retracted from the electron optical path.

  Next, the measurement time of the EELS spectrum of each irradiation region was set to 0.01 seconds, and the EELS spectrum was acquired for all irradiation regions by dividing the observation region into desired observation regions 512 × 512.

  Then, all the EELS spectra are stored in the image processing computer 17, and the zero-loss electron peak and the plasmon-loss electron peak position are obtained from all the EELS spectra by differentiation, and the intensity of the plasmon-loss electron is obtained therefrom. It was.

  Finally, as in the first embodiment, it was possible to obtain a two-dimensional image reflecting the density of valence electrons and free electrons of the sample from the peak position and intensity of plasmon loss electrons. Moreover, by comparing with a Z contrast image using a HAADF detector, it was possible to compare the amount of state and the average atom number density.

(Third embodiment)
This example uses a transmission electron microscope energy filter, and the two-dimensional state analysis of the same fine metal particles as in the second example and an amorphous carbon film partially containing DLC from the peak position and intensity of plasmon loss electrons. It is an example obtained as an image.

  Also in this example, the same transmission electron microscope as in the first example was used. Below, the implemented analysis method is demonstrated. In this embodiment, as shown in FIG. 7, an electron line beam is converted into energy for an EELS spectrum image obtained by irradiation of an electron line beam (δX) in a direction 90 ° (Y direction) with respect to the energy dispersion direction. This is a method of obtaining three-dimensional data by scanning the observation region in the dispersion direction (X direction).

  First, after selecting a desired observation region by TEM observation on a normal fluorescent screen 09, the astigmatism correction of the focusing lens 03 is used to change the electron beam into a line beam perpendicular to the energy dispersion direction of the energy filter device. Shaped. Further, the fluorescent screen 09 is withdrawn from the electron optical path, the transmitted electrons are introduced into the energy filter device 10, the electrons are subjected to energy spectroscopy by the spectroscope 12, and it is confirmed that the image of the EELS spectrum is observed by the two-dimensional detector 15. did.

  Next, the measurement time of the EELS spectrum image of each irradiation area is set to 0.01 seconds, the desired observation area is divided into 512 lines, the line beam is scanned in the line vertical direction, and the EELS spectrum image is acquired for all irradiation areas. did. Furthermore, in order to calibrate the intensity of the line beam, an EELS spectrum image when the sample was not irradiated was also acquired.

  Then, all the EELS spectrum images are stored in the image processing computer 17, and 512 EELS spectra are formed from each EELS spectrum image with the line beam intensity calibrated. The peak position was determined by differentiation, from which the intensity of plasmon loss electrons was determined.

  Finally, as in the first embodiment, the plasmon-loss electron peak position is converted into color information, and the peak intensity is converted into the luminance information of the color. It was possible to obtain as a two-dimensional image reflecting the above.

The figure for demonstrating the signal extraction of the plasmon loss electron from the EELS spectrum in the analysis method of this invention The figure for demonstrating the two-dimensional image acquired by the analysis method of this invention The figure for demonstrating the analyzer for performing the analysis method of this invention Conceptual diagram explaining 2D image and 3D data of EELS spectrum Conceptual diagram explaining energy filter TEM image by transmission electron microscope Conceptual diagram for explaining STEM-EELS using a scanning transmission electron microscope Conceptual diagram explaining position-resolved EELS method The figure for demonstrating the signal extraction of the plasmon loss electron from the EELS spectrum in the conventional analysis method Diagram for explaining a two-dimensional image acquired by a conventional analysis method

Explanation of symbols

DESCRIPTION OF SYMBOLS 01 ... Electron microscope barrel 02 ... Electron gun and acceleration tube 03 ... Focusing lens 04 ... Deflection coil 05 ... Sample 06 ... Objective lens 07 ... Intermediate lens 08 ... Projection lens 09 ... Fluorescent plate 10 ... Post column type energy filter device 11 ... Incident Aperture 12 ... Spectrometer 13 ... Energy slit 14 ... Multipole lens system 15 ... Two-dimensional detector 16 ... Energy filter controller 17 ... Computer for image processing 18 ... HAADF detector

Claims (5)

A method for analyzing a sample using an energy filter of a transmission electron microscope or a scanning transmission electron microscope,
A step of irradiating a desired observation region with electrons, a step of obtaining an EELS spectrum by dispersing the energy of electrons transmitted through the sample with an energy filter, and a position and intensity of a peak due to plasmon loss electrons in the EELS spectrum are obtained. And a method for analyzing a sample using a transmission electron microscope or a scanning transmission electron microscope, comprising: obtaining a two-dimensional image using the peak position and intensity of the plasmon loss electron as color information and luminance information . A method for analyzing a sample using an energy filter of a transmission electron microscope,
The step of obtaining the EELS spectrum by dispersing the energy of electrons transmitted through the sample with an energy filter, acquiring the energy filter TEM image as a continuous still image or moving image while sweeping the center energy of the energy filter, and the acquisition 2. The method for analyzing a sample using a transmission electron microscope according to claim 1, wherein the EELS spectrum is formed from an intensity change at each pixel in the continuous still image or moving image. A method for analyzing a sample using an energy filter of a scanning transmission electron microscope,
A step of irradiating the desired observation region with electrons, a step of obtaining an EELS spectrum by dispersing the energy of electrons transmitted through the sample with an energy filter, a step of irradiating electrons onto a minute region and scanning the observation region; 2. The method for analyzing a sample using a scanning transmission electron microscope according to claim 1, wherein the EELS spectrum of each irradiation region is obtained with an energy filter for the transmitted electrons. A method for analyzing a sample using an energy filter of a transmission electron microscope,
The step of irradiating the desired observation region with electrons and the step of obtaining the EELS spectrum by dispersing the energy of electrons transmitted through the sample with an energy filter irradiate the observation region with a line electron beam, A process of acquiring an EELS spectrum image in which energy is dispersed in a direction perpendicular to a line, and a process of acquiring an EELS spectrum in an observation region of all lines by scanning a line-shaped electron beam in a direction perpendicular to the line. Item 8. A method for analyzing a sample using the transmission electron microscope according to Item 1.   A spectroscope that separates the energy of electrons transmitted through the sample, a two-dimensional detector that detects the spectroscopic electrons, and an electromagnetic lens system that forms an image of the spectroscopic electrons on the surface of the two-dimensional detector, An energy filter device for obtaining an EELS spectrum, and a peak of plasmon loss electrons from the EELS spectrum obtained from the EELS spectrum or the TEM image by driving a spectroscope, an electromagnetic lens system, and a two-dimensional detector of the energy filter device A transmission electron microscope apparatus comprising: a control device that obtains position and intensity; and a computer that converts the peak position and intensity of the plasmon loss electrons into color information and luminance information to form and display a two-dimensional image. Or a scanning transmission electron microscope apparatus.