JP2006130742A5 - - Google Patents
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- JP2006130742A5 JP2006130742A5 JP2004320812A JP2004320812A JP2006130742A5 JP 2006130742 A5 JP2006130742 A5 JP 2006130742A5 JP 2004320812 A JP2004320812 A JP 2004320812A JP 2004320812 A JP2004320812 A JP 2004320812A JP 2006130742 A5 JP2006130742 A5 JP 2006130742A5
- Authority
- JP
- Japan
- Prior art keywords
- recording head
- jet recording
- ink jet
- ink
- head according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Claims (11)
前記液流路に連通するインク供給口と、前記液流路内のインクを前記吐出口から吐出させるためのエネルギーを発生する吐出エネルギー発生素子と、前記インク供給口から前記液流路に至るインク供給経路に形成された第1のフィルターと、を備えた基板を有するインクジェット記録ヘッドであって、
前記第1のフィルターは、前記基板の厚み方向にインクを通過させることが可能であり、かつ、前記吐出口の断面積よりも小さな断面積の複数の貫通孔によって構成され、該第1のフィルターが形成された部分の前記基板の厚みよりも、前記吐出エネルギー発生素子が形成された部分の前記基板の厚みの方が厚いことを特徴とするインクジェット記録ヘッド。 An ejection port for ejecting ink; a liquid flow path communicating with the ejection port;
An ink supply port that communicates with the liquid channel, an ejection energy generating element that generates energy for ejecting ink in the liquid channel from the ejection port, and an ink that extends from the ink supply port to the liquid channel An ink jet recording head having a substrate provided with a first filter formed in a supply path,
The first filter can pass ink in the thickness direction of the substrate and includes a plurality of through-holes having a cross-sectional area smaller than the cross-sectional area of the discharge port. an ink jet recording head but also than the thickness of the substrate of the formed part, characterized in that the thicker the thickness of the substrate of the discharge energy generating element is formed partially.
基板の表面に吐出エネルギー発生素子を形成する工程と、
前記基板に第1のフィルターを構成する貫通孔となる孔を形成する工程と、
前記孔の表面に保護膜を形成する工程と、
前記基板をエッチングしてインク供給口を形成する工程と、
前記インク供給口の内側に露出している前記保護膜を除去する工程と、を少なくとも含むことを特徴とするインクジェット記録ヘッドの製造方法。 A method for manufacturing the ink jet recording head according to any one of claims 1 to 10,
Forming a discharge energy generating element on the surface of the substrate;
Forming a hole to be a through-hole constituting the first filter in the substrate;
Forming a protective film on the surface of the hole;
Etching the substrate to form an ink supply port;
And a step of removing the protective film exposed to the inside of the ink supply port.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004320812A JP4667008B2 (en) | 2004-11-04 | 2004-11-04 | Method for manufacturing ink jet recording head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004320812A JP4667008B2 (en) | 2004-11-04 | 2004-11-04 | Method for manufacturing ink jet recording head |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2006130742A JP2006130742A (en) | 2006-05-25 |
JP2006130742A5 true JP2006130742A5 (en) | 2007-12-27 |
JP4667008B2 JP4667008B2 (en) | 2011-04-06 |
Family
ID=36724711
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004320812A Expired - Fee Related JP4667008B2 (en) | 2004-11-04 | 2004-11-04 | Method for manufacturing ink jet recording head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4667008B2 (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4898171B2 (en) * | 2005-09-02 | 2012-03-14 | セイコーインスツル株式会社 | Method for manufacturing heating resistance element component, and thermal head and printer manufactured using the same |
US8043517B2 (en) * | 2005-09-19 | 2011-10-25 | Hewlett-Packard Development Company, L.P. | Method of forming openings in substrates and inkjet printheads fabricated thereby |
US8778200B2 (en) | 2007-10-16 | 2014-07-15 | Canon Kabushiki Kaisha | Method for manufacturing liquid discharge head |
US20170182785A1 (en) * | 2015-12-23 | 2017-06-29 | Océ-Technologies B.V. | Inkjet printhead |
JP6597968B2 (en) * | 2016-01-29 | 2019-10-30 | セイコーエプソン株式会社 | Liquid ejecting head and liquid ejecting apparatus |
JP2020023197A (en) * | 2019-11-26 | 2020-02-13 | セイコーエプソン株式会社 | Flow path component, liquid discharge head and liquid discharge device |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6336714B1 (en) * | 1996-02-07 | 2002-01-08 | Hewlett-Packard Company | Fully integrated thermal inkjet printhead having thin film layer shelf |
US6264309B1 (en) * | 1997-12-18 | 2001-07-24 | Lexmark International, Inc. | Filter formed as part of a heater chip for removing contaminants from a fluid and a method for forming same |
KR100484168B1 (en) * | 2002-10-11 | 2005-04-19 | 삼성전자주식회사 | Ink jet printhead and manufacturing method thereof |
-
2004
- 2004-11-04 JP JP2004320812A patent/JP4667008B2/en not_active Expired - Fee Related
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