JP2006130742A5 - - Google Patents

Download PDF

Info

Publication number
JP2006130742A5
JP2006130742A5 JP2004320812A JP2004320812A JP2006130742A5 JP 2006130742 A5 JP2006130742 A5 JP 2006130742A5 JP 2004320812 A JP2004320812 A JP 2004320812A JP 2004320812 A JP2004320812 A JP 2004320812A JP 2006130742 A5 JP2006130742 A5 JP 2006130742A5
Authority
JP
Japan
Prior art keywords
recording head
jet recording
ink jet
ink
head according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004320812A
Other languages
Japanese (ja)
Other versions
JP4667008B2 (en
JP2006130742A (en
Filing date
Publication date
Application filed filed Critical
Priority to JP2004320812A priority Critical patent/JP4667008B2/en
Priority claimed from JP2004320812A external-priority patent/JP4667008B2/en
Publication of JP2006130742A publication Critical patent/JP2006130742A/en
Publication of JP2006130742A5 publication Critical patent/JP2006130742A5/ja
Application granted granted Critical
Publication of JP4667008B2 publication Critical patent/JP4667008B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Claims (11)

インクを吐出する吐出口と、前記吐出口に連通する液流路と、
前記液流路に連通するインク供給口と、前記液流路内のインクを前記吐出口から吐出させるためのエネルギーを発生する吐出エネルギー発生素子と、前記インク供給口から前記液流路に至るインク供給経路に形成された第１のフィルターと、を備えた基板を有するインクジェット記録ヘッドであって、
前記第１のフィルターは、前記基板の厚み方向にインクを通過させることが可能であり、かつ、前記吐出口の断面積よりも小さな断面積の複数の貫通孔によって構成され、該第１のフィルターが形成された部分の前記基板の厚みよりも、前記吐出エネルギー発生素子が形成された部分の前記基板の厚みの方が厚いことを特徴とするインクジェット記録ヘッド。 An ejection port for ejecting ink; a liquid flow path communicating with the ejection port;
An ink supply port that communicates with the liquid channel, an ejection energy generating element that generates energy for ejecting ink in the liquid channel from the ejection port, and an ink that extends from the ink supply port to the liquid channel An ink jet recording head having a substrate provided with a first filter formed in a supply path,
The first filter can pass ink in the thickness direction of the substrate and includes a plurality of through-holes having a cross-sectional area smaller than the cross-sectional area of the discharge port. an ink jet recording head but also than the thickness of the substrate of the formed part, characterized in that the thicker the thickness of the substrate of the discharge energy generating element is formed partially. 前記供給経路における前記基板に、インクを通過させることが可能な複数の開口部によって構成された第２のフィルターが形成され、前記開口部の断面積は前記吐出口の断面積より小さいことを特徴とする請求項１記載のインクジェット記録ヘッド。 Wherein the base plate in the supply route, the second filter is formed, which is constituted by a plurality of openings capable of passing through the ink, that the cross-sectional area of the opening is smaller than the cross-sectional area of the discharge port The ink jet recording head according to claim 1. 前記第１のフィルターを構成する複数の貫通孔の長さが同一であることを特徴とする請求項１又は請求項２記載のインクジェット記録ヘッド。   3. The ink jet recording head according to claim 1, wherein the plurality of through-holes constituting the first filter have the same length. 前記第１のフィルターを構成する複数の貫通孔を連結させる合流部が前記基板の表面に形成されていることを特徴とする請求項１乃至請求項３のいずれかに記載のインクジェット記録ヘッド。   4. The ink jet recording head according to claim 1, wherein a merging portion that connects a plurality of through holes constituting the first filter is formed on a surface of the substrate. 5. 前記第１のフィルターを構成する貫通孔の表面に保護膜が形成されていることを特徴とする請求項１乃至請求項４のいずれかに記載のインクジェット記録ヘッド。   The inkjet recording head according to any one of claims 1 to 4, wherein a protective film is formed on a surface of a through hole constituting the first filter. 前記保護膜が無機膜であることを特徴とする請求項５記載のインクジェット記録ヘッド。   6. The ink jet recording head according to claim 5, wherein the protective film is an inorganic film. 前記保護膜が有機膜であることを特徴とする請求項５記載のインクジェット記録ヘッド。   6. The ink jet recording head according to claim 5, wherein the protective film is an organic film. 前記保護膜がＳｉＮ膜であることを特徴とする請求項５記載のインクジェット記録ヘッド。   6. The ink jet recording head according to claim 5, wherein the protective film is a SiN film. 前記保護膜がＳｉＯ膜であることを特徴とする請求項５記載のインクジェット記録ヘッド。   6. The ink jet recording head according to claim 5, wherein the protective film is a SiO film. 前記保護膜がＳｉＯＮ膜であることを特徴とする請求項５記載のインクジェット記録ヘッド。   6. The ink jet recording head according to claim 5, wherein the protective film is a SiON film. 請求項１乃至請求項１０のいずれかに記載のインクジェット記録ヘッドを製造する方法であって、
基板の表面に吐出エネルギー発生素子を形成する工程と、
前記基板に第１のフィルターを構成する貫通孔となる孔を形成する工程と、
前記孔の表面に保護膜を形成する工程と、
前記基板をエッチングしてインク供給口を形成する工程と、
前記インク供給口の内側に露出している前記保護膜を除去する工程と、を少なくとも含むことを特徴とするインクジェット記録ヘッドの製造方法。 A method for manufacturing the ink jet recording head according to any one of claims 1 to 10,
Forming a discharge energy generating element on the surface of the substrate;
Forming a hole to be a through-hole constituting the first filter in the substrate;
Forming a protective film on the surface of the hole;
Etching the substrate to form an ink supply port;
And a step of removing the protective film exposed to the inside of the ink supply port.
JP2004320812A 2004-11-04 2004-11-04 Method for manufacturing ink jet recording head Expired - Fee Related JP4667008B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004320812A JP4667008B2 (en) 2004-11-04 2004-11-04 Method for manufacturing ink jet recording head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004320812A JP4667008B2 (en) 2004-11-04 2004-11-04 Method for manufacturing ink jet recording head

Publications (3)

Publication Number Publication Date
JP2006130742A JP2006130742A (en) 2006-05-25
JP2006130742A5 true JP2006130742A5 (en) 2007-12-27
JP4667008B2 JP4667008B2 (en) 2011-04-06

Family

ID=36724711

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004320812A Expired - Fee Related JP4667008B2 (en) 2004-11-04 2004-11-04 Method for manufacturing ink jet recording head

Country Status (1)

Country Link
JP (1) JP4667008B2 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4898171B2 (en) * 2005-09-02 2012-03-14 セイコーインスツル株式会社 Method for manufacturing heating resistance element component, and thermal head and printer manufactured using the same
US8043517B2 (en) * 2005-09-19 2011-10-25 Hewlett-Packard Development Company, L.P. Method of forming openings in substrates and inkjet printheads fabricated thereby
US8778200B2 (en) 2007-10-16 2014-07-15 Canon Kabushiki Kaisha Method for manufacturing liquid discharge head
US20170182785A1 (en) * 2015-12-23 2017-06-29 Océ-Technologies B.V. Inkjet printhead
JP6597968B2 (en) * 2016-01-29 2019-10-30 セイコーエプソン株式会社 Liquid ejecting head and liquid ejecting apparatus
JP2020023197A (en) * 2019-11-26 2020-02-13 セイコーエプソン株式会社 Flow path component, liquid discharge head and liquid discharge device

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6336714B1 (en) * 1996-02-07 2002-01-08 Hewlett-Packard Company Fully integrated thermal inkjet printhead having thin film layer shelf
US6264309B1 (en) * 1997-12-18 2001-07-24 Lexmark International, Inc. Filter formed as part of a heater chip for removing contaminants from a fluid and a method for forming same
KR100484168B1 (en) * 2002-10-11 2005-04-19 삼성전자주식회사 Ink jet printhead and manufacturing method thereof

Similar Documents

Publication Publication Date Title
JP2005178364A5 (en)
TW200711862A (en) Method of forming openings in substrates and inkjet printheads fabricated thereby
WO2006004970A3 (en) Integrated black and colored ink printheads
JP2012504059A5 (en) Method of forming fluid supply path having self-aligned hole, liquid ejection device, and print head
JP2009132133A5 (en)
JP2009208393A (en) Inkjet recording head
JP2006264034A5 (en)
JP2012504059A (en) Droplet dispenser with self-aligning holes
JP2008114589A5 (en)
ITTO20021099A1 (en) PROTECTIVE COATING PROCESS OF HYDRAULIC MICRO CIRCUITS COMPARED TO AGGRESSIVE LIQUIDS. PARTICULARLY FOR AN INK-JET PRINT HEAD.
JP2005212486A5 (en)
JP2009051197A (en) Substrate for liquid discharge head, method of manufacturing the same, and liquid discharge head using such substrate
JP2003165225A5 (en)
JP2011520668A (en) Cavity plate
JP2007001270A5 (en)
JP2007230132A5 (en)
JP2006130742A5 (en)
JP2011025657A (en) Inkjet head, and manufacturing method therefor
US8528209B2 (en) Method for manufacturing discharge port member and method for manufacturing liquid discharge head
JP2006051770A (en) Substrate for inkjet head, manufacturing method for the substrate and inkjet head using the substrate
US8960886B2 (en) Thermal inkjet print head with solvent resistance
JP2008094018A5 (en)
JP2006035853A5 (en)
JP2006130885A5 (en)
JP2012136014A (en) Ink jet recording head