JP2006127730A - Magnetic head, magnetic recording and reproducing device, manufacturing method of magnetic head and magnetic tape - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a magnetic head in which spacing between a sliding surface and a linear type magnetic tape is reduced during the running of the linear type magnetic tape, the running stability of the tape is improved and servo signal recording is enabled, for example. <P>SOLUTION: First and second blind cavities 6a and 6b having closed surroundings are formed on a sliding surface 4 on which the linear type magnetic tape runs. At least one of the blind cavities is opposed to the linear type magnetic tape and formed only within the width of a running region 4a of the tape. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a magnetic head, a magnetic recording / reproducing apparatus, a method of manufacturing a magnetic head, and a magnetic tape.

The linear magnetic tape is widely used as a recording medium for data backup because of its low cost per recording capacity and excellent recording accuracy of data, that is, data, that is, long-term reliability.
In recent years, the demand for increased capacity and improved recording / reproducing speed in recording media has increased, and linear magnetic tape also has increased recording density, increased transfer rate, improved tape running speed, and high-frequency recording. It has been demanded.

In this linear magnetic tape system, data is recorded / reproduced linearly along the running direction of the magnetic tape in the longitudinal direction.
FIG. 40 is a schematic diagram showing an example format of the linear magnetic tape. In the linear magnetic tape in this example, a large number of servo bands (servo bands) in which servo signals are recorded are formed along the longitudinal direction of the magnetic tape, and a data band (data band) is formed between the servo bands. And a tape edge guard band for providing a margin at both ends in the width direction orthogonal to the longitudinal direction.

A servo band width (Servo band width) is defined as the width of one servo band, and a servo band pitch (Servo band pitch) is defined as the width of one servo band and one data band.
In addition, in the data band, a large number of data tracks having data tracks (not shown) are juxtaposed in the width direction along the longitudinal direction of the magnetic tape to increase the capacity. It has been.

  Here, when the magnetic tape runs in the forward direction, for example from BOT (Beginning of Tape) to EOT (End of Tape), the direction perpendicular to the longitudinal direction of the tape is called the so-called Lateral Tape Motion. Since a movement of several μm to several tens of μm occurs, especially when the data track width is narrow, for example, several μm or less, the magnetic head is moved at high speed according to the vertical movement of the tape. Need to follow.

  For this reason, when reading or writing data, the magnetic recording / reproducing head reads the servo position signal written in advance on the tape, calculates the position information, and moves the head at a high speed so that it can follow a specific track position. Need to move vertically. As described above, in the linear type magnetic recording / reproducing apparatus, in order to write / read data to / from the magnetic tape as the data recording density increases and the data track width becomes narrower, the linear type magnetic recording / reproducing apparatus In addition to the precise positioning of the magnetic head mounted on the servo head, the writing accuracy of servo data serving as a reference signal for the track position is important.

The servo signal is written on the tape by a dedicated servo signal writing device called a servo writer. For example, in the LTO tape format, a so-called Timing Based Servo method is adopted. As the servo write data, as shown in FIG. 41, so-called “cross-shaped” continuous data is written.
When the servo signal is read out, for example, when the position of the head is above the servo band centerline, the A burst, B burst, and C burst (C burst (C Each time interval between Burst and D Burst, ie AB and CD, is narrowed.

  On the other hand, as shown in FIG. 41, when it is below the center line of the servo band (Typical servo location trajectory), the time interval (AB distance, CD distance) of AB and CD in this servo signal (Typical servo readback signal) is Become wider. Accordingly, the servo read element of the magnetic head mounted on the linear magnetic recording / reproducing apparatus reads the servo signal written in advance, measures the time intervals AB and CD, and defines Subframe 1 and Subframe 2, so that Servo frame The magnetic head mounted on the linear magnetic recording / reproducing apparatus can be positioned.

  However, as shown in FIGS. 42A and 42B, as a problem in writing by the servo writer, the distance between the head and the tape, that is, the distance between the servo head sliding surface and the linear magnetic tape, insufficient servo signal output due to spacing, foreign matter In order to improve the productivity of servo signal recording, for example, 5 m / s in order to improve the servo signal dropout due to the winding of the head, the head life in which the spacing between the servo head and the tape increases due to the wear of the head. It is preferable to write servo signals at the above high-speed tape speed. However, when the tape running speed increases, the air that is caught in the vicinity of the sliding surface by the linear magnetic tape that runs toward the sliding surface of the servo head. So that the so-called spacing is increased to stabilize the recording magnetic field on the tape, for example. There is a problem, such as it is difficult.

In particular, as the edge wear ahead of the servo head progresses, the air blocking effect at the leading edge of the servo head is reduced, the pressure drop near the sliding surface is insufficient, and the spacing increases. .
In addition, if the tape speed is increased when writing servo signals in order to improve productivity, there is a problem that spacing increases.
With regard to the spacing between the head sliding surface and the tape, since the spacing tends to decrease from the front to the rear of the sliding surface as shown in FIG. As a problem, when servo signals are written in the order of A and B-Burst, C and D-Burst, for example, there is a problem that the outputs of A and C are smaller than those of B and D as shown in FIG.

22A and 22B are schematic cross-sectional views showing the structure of a conventional magnetic head.
As a magnetic head that has been used for recording / reproducing of a conventional linear type magnetic tape, as shown in FIG. 22A, a so-called R type in which a sliding surface on which a recording element and a reproducing element are formed is a curved surface. A cylindrical magnetic head 101 is exemplified.

However, the cylindrical magnetic head 101 has a feature that the curved sliding surface 104 can flexibly come into contact with the linear magnetic tape 110, while air in the vicinity of the medium is directly caught in the sliding surface. .
Therefore, in order to ensure recording / reproduction characteristics, for example, to stabilize the above-described reproduction output, the traveling speed of the linear magnetic tape is limited to about 0.5 m / s.

On the other hand, for the purpose of improving the tape running speed, various proposals have been made to reduce the spacing between the sliding surface of the head having the recording element and / or the reproducing element and the tape type recording medium. .
For example, as shown in FIG. 22B, a concave portion, that is, a slit formed by opening both ends is formed on a sliding surface that is a curved surface, and the air flow in the vicinity of the medium is blocked by the edge of the slit. A cylindrical magnetic head 201 with slits has been proposed.

  The slit-shaped cylindrical magnetic head 201 has a structure in which the edge 209 of the slit 208 is in contact with the linear magnetic tape 210, and by blocking the flow of air in the vicinity of the medium traveling at the edge 209, The air pressure on the sliding surface 204 decreases, and the spacing between the linear tape type magnetic tape 210 and the sliding surface 204 is reduced. In this flat type magnetic head, the traveling speed of the linear type magnetic tape 210 was improved to about 4.0 m / s.

23A and 23B show a so-called flat type in which at least a part of a sliding surface on which a recording element and a reproducing element are formed, for example, a part facing the recording and / or reproducing element is flat. A schematic sectional view and a schematic configuration diagram of the magnetic head 301 are shown.
The flat magnetic head 301 has a structure in which the edge 209 of the sliding surface 304, at least a part of which is flat, is in strong contact with the linear magnetic tape 310. By blocking the air flow, the air pressure in the vicinity of the sliding surface 304 is lowered, and the spacing between the linear tape type magnetic tape 310 and the sliding surface 304 is reduced.

  Actually, however, this flat type magnetic head can only accept a tape running speed of about 4.0 m / s, and it has been confirmed that there is little improvement compared to a normal cylindrical magnetic head with slits.

  That is, information recording and / or reproduction with respect to the linear magnetic tape is performed by a magnetic head on which recording and / or reproducing elements are formed. When the tape traveling speed increases, the linear magnetic tape of the magnetic head is used. The amount and state of air trapped in the vicinity of the sliding surface is changed by the traveling linear magnetic tape toward the sliding surface, and the sliding surface on which the recording / reproducing element is formed and the linear magnetic tape The distance, so-called spacing, increases, and various problems occur, for example, it becomes difficult to stabilize the reproduction output.

To solve these problems, as shown in the schematic sectional view and the schematic perspective view in FIGS. 24A and 24B, a sliding surface 404 of a magnetic head having a flat region, and a slit 408 for reducing the distribution of the air layer, A magnetic head having a slit 408, an outrigger 411 in which the wrap angle of the flat magnetic head sliding surface 404 is less than 5 degrees, and a recess or cavity 406 formed by closing both ends has been proposed (for example, Patent Document 1).
Further, in order to solve the problem of the occurrence of spacing due to wear, as shown in FIG. 43, the front edge of the servo head is made of a wear-resistant material so that the wear of the head edge is reduced. Proposals have also been made (see, for example, Patent Document 2).
JP 2000-207800 A Japanese Unexamined Patent Publication No. 2004-5960

However, the present inventors reduce the above-mentioned spacing only in the case of a magnetic head having a specific condition in a magnetic head having a cavity formed on a sliding surface. It was found that the specific effect was not exhibited.
That is, in the above-mentioned Patent Document 1, for example, a proposal has been made to configure a magnetic head with a minimal cavity having a length of less than 2.0 mm or a depth of, for example, 0.5 μm to several μm. In this case, it is difficult to cope with an increase in the running speed of the linear magnetic tape, and the spacing may not be sufficiently reduced.

  Further, according to the magnetic head described in the above-mentioned Patent Document 1, the magnetic head is formed by a cavity that is small, large, or similar to the width of the linear magnetic tape that runs on the sliding surface of the magnetic head. Proposals to compose have also been made. However, the present inventors have found that the amount of spacing varies greatly depending on the size of the cavity with respect to the width of the linear magnetic tape, and the running stability of the linear magnetic tape also varies. This has led to the proposal of a configuration of a magnetic head that enables traveling in a speed range that has been considered difficult in the past.

  Further, conventionally, for example, when a signal is recorded on a tape by a magnetic head having two recording / reproducing element portions on a sliding surface, a signal written by one recording element is collated by the other reproducing element. In order to prevent the recording magnetic field of the recording element from affecting the reproducing element, a magnetic shield material is inserted between, for example, two sets of recording / reproducing element portions formed on the sliding surface of the magnetic head. However, in order to reduce the influence of the recording magnetic field, it is necessary to increase the distance between the two sets of recording / reproducing element units. In the case of a manufacturing method in which a magnetic shield material is sandwiched and bonded, the magnetic shield material cannot be placed close to any recording / reproducing element part, and machining is also required to form the installation location. There is a problem that it takes .

On the other hand, in the case of using the magnetic head described in Patent Document 2 described above, although the servo head wear is improved, it is difficult to expect an improvement in the servo signal output shortage and the dropout, and the productivity is further improved. Therefore, it is also difficult to increase the servo signal writing tape speed.
In other words, since the above-mentioned spacing is reduced only by a cavity with a specific condition, the effect unique to the cavity is not exhibited unless this condition is met, and high speed for improving productivity is achieved. Since it becomes difficult to support servo signal writing at tape speed and to ensure long-term reliability, even if only the wear resistance of the head is improved, it has the optimum configuration that brings about the improvement required for the magnetic head Is hard to say.

  For example, the magnetic head described in Patent Document 2 basically improves the head life, and thus solves the problem of output difference and dropout in the AC part and BD part in the above-mentioned Timing Based Servo System. It is difficult to do.

  The present invention relates to a magnetic head that enables stable running of a linear magnetic tape on a sliding surface on which a recording / reproducing element is formed in a higher speed region, a magnetic recording / reproducing apparatus having the magnetic head, and a magnetic head And a linear type magnetic tape.

A magnetic head according to the present invention is a magnetic head provided with a linear magnetic tape recording element and / or reproducing element, and a bottomed cavity having a closed periphery is formed on a sliding surface with the linear magnetic tape. At least one or more of the bottomed cavities are formed so as to face the linear magnetic tape and are formed only within the width of the running area of the linear magnetic tape.

According to the present invention, in the magnetic head, at least a part of the sliding surface is a flat surface.
In the magnetic head, the total volume of the bottomed cavities is 0.025 mm ³ or more.
According to the present invention, in the magnetic head, a magnetic shield material is provided in the bottomed cavity.
Further, the present invention is characterized in that in the magnetic head, at least two recording elements are juxtaposed, and at least one of the bottomed cavities is disposed between the two or more recording elements. To do.
According to the present invention, in the magnetic head, a number of bottomed cavities corresponding to the recording elements are formed on a sliding surface on which the two or more recording elements are formed. And a plurality of head chips in which at least one of the bottomed cavities is disposed between the elements, and a head carrier serving as a common base for supporting the plurality of head chips.
According to the present invention, in the magnetic head, at least a part of the recording element has a servo signal recording element.
According to the present invention, in the magnetic head, a reinforcing material is provided on at least one of a front edge and a rear edge of the sliding surface with respect to a running direction of the tape.
According to the present invention, in the magnetic head, the linear magnetic tape is closer to the opening of the cavity when the medium is running than when the medium is stationary.

  A magnetic recording / reproducing apparatus according to the present invention is a magnetic recording / reproducing apparatus having a magnetic head having a linear magnetic tape recording element and / or reproducing element, on a sliding surface constituting the magnetic head, At least one bottomed cavity with a closed periphery was formed, and at least one of the bottomed cavities was formed only within the width of the linear magnetic tape in a running direction facing the linear magnetic tape. It is characterized by.

  A method of manufacturing a magnetic head according to the present invention is a method of manufacturing a magnetic head provided with a linear magnetic tape recording element and / or reproducing element, the head having the recording element and / or reproducing element. A peripheral surface and a bottom surface of the same cavity are constituted by a chip and a head carrier which is a base of the head chip.

  A method for manufacturing a magnetic head according to the present invention is a method for manufacturing a magnetic head provided with a linear magnetic tape recording element and / or reproducing element, wherein the recording element and / or reproducing element is A peripheral surface and a bottom surface of the same cavity are configured by a head chip having a back core attached to the head chip from a side different from a sliding surface with the linear tape. To do.

According to the present invention, in the method of manufacturing the magnetic head, a magnetic shield material is provided on at least a part of the peripheral surface of the cavity.
According to the present invention, in the method of manufacturing the magnetic head, at least two sets of the recording elements are juxtaposed on the head carrier, and at least the bottomed cavity is interposed between the two or more sets of recording elements. One is arranged.
According to the present invention, in the method of manufacturing the magnetic head, a number of bottomed cavities corresponding to the recording elements are formed on a sliding surface on which the two or more recording elements are formed. At least one of the above-mentioned bottomed cavities is arranged between the above recording elements.
According to the present invention, in the method for manufacturing the magnetic head, a servo signal recording element is formed at least on a part of the recording element.

  The linear magnetic tape according to the present invention includes at least a servo signal recording element in a part of the recording element, and at least a bottomed cavity having a closed periphery on a sliding surface with the linear magnetic tape. One or more of the bottomed cavities are formed, and the servo signal is recorded by a magnetic head in which at least one of the bottomed cavities is disposed so as to face only within the running area width of the linear magnetic tape. .

  According to the magnetic head of the present invention, at least one bottomed cavity having a closed periphery is formed on the sliding surface with the linear magnetic tape, and at least one of the bottomed cavities is formed on the linear magnetic tape. Oppositely, since it is configured to be formed only within the width of the linear magnetic tape traveling region, the sliding surface and the linear magnetic tape are compared with the case where no cavity is formed when the linear magnetic tape travels. The expansion of the fluid, such as air, is promoted, and the reduction of the spacing and the improvement of the running stability of the linear magnetic tape are achieved by the decrease in the atmospheric pressure.

  As a result, recording / reproduction and servo signal writing can be performed under conditions of a small wrap angle and low tension as compared with the setting in the conventional magnetic head, thereby avoiding the problem of wear of the magnetic head. Therefore, it is possible to provide a magnetic head having a longer life than the conventional one.

In particular, in a flat type magnetic head in which at least a part of the sliding surface is a flat surface, for example, air in the vicinity of the traveling linear magnetic tape is positively moved at the edge of the head before reaching the sliding surface. Since it is scraped off, the air pressure between the sliding surface and the linear magnetic tape can be further reduced. As will be described later, in order to obtain the effect of the cavity, the total volume of the cavity needs to be 0.025 mm ³ or more. In this case, the linear magnetic tape and the sliding surface of the magnetic head It is possible to improve the spacing between.

  Further, according to the magnetic head and the magnetic recording / reproducing apparatus of the present invention, for example, the cavity is formed only in the above-described traveling region facing the linear magnetic tape, so that the cavity is formed when the linear magnetic tape is traveling. Can be made a closed space in which a low-pressure state is maintained, and can be configured to be closer to the opening of the cavity than a stationary state by a negative pressure. Since the type magnetic tape can be run, the linear type magnetic tape can be stably run even in a speed region of 12 m / s or more, as will be described later.

  Further, according to the magnetic head and the magnetic recording / reproducing apparatus of the present invention, since the magnetic shield material is provided in the cavity, particularly when the cavity is configured with a sufficiently large volume, for example, the recording element Since the shield material having a shape and dimension corresponding to the recording magnetic field can be disposed at a position sufficiently close to the recording element, that is, in the cavity, the influence of the recording magnetic field on the reproducing element, so-called cross feed is reduced or avoided. be able to.

  In addition, when the cavity is in front of the servo recording element, the effect of removing the adhering tape by the edge in the cavity can be expected, so that the problem of dropout during servo signal recording can be avoided.

Furthermore, according to the method of manufacturing a magnetic head according to the present invention, as will be described later, a head chip having a recording element and / or a reproducing element and a head carrier serving as a base of the head chip have the same cavity. Since the peripheral surface, that is, the side surface and the bottom surface are formed, the manufacturing can be simplified as compared with the case where the cavity is partitioned by etching.
And, it is possible to manufacture a magnetic head by installing it in a cavity sufficiently close to a recording / reproducing element part, for example, a recording element, without requiring special labor to install a magnetic shield material in the magnetic head. For example, according to the configuration of the present invention, important and many effects can be obtained.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. However, the present invention is not limited to these embodiments. First, an embodiment of a magnetic head according to the present invention will be described together with an embodiment of a magnetic recording / reproducing apparatus according to the present invention.

<First Embodiment of Magnetic Head and Magnetic Recording / Reproducing Apparatus>
1A and 1B are a schematic perspective view and a schematic cross-sectional view showing an example of the configuration of the magnetic head according to the present invention in the first embodiment.
In this embodiment, as shown in FIG. 1A, a magnetic head 1 constituting the main part of a magnetic recording / reproducing apparatus according to the present invention includes, for example, a plurality of recording elements and / or reproducing elements, that is, magnetic head elements. A first and second head chips 2a and 2b having a multi-channel configuration, and a head carrier 3 serving as a base on which the first and second head chips 2a and 2b are arranged and integrated. Have.

  The first and second head chips 2a and 2b have a common sliding surface 4 with respect to a linear magnetic tape (not shown), and a recording element and / or a reproducing element are included in the sliding surface 4. And the first and second bottomed cavities 6a and 6b, which are closed at the periphery, are formed in the first and second bottomed cavities, for example, A magnetic shield material made of a copper plate is arranged and formed. Further, in this embodiment, a step is formed in the bonded portion of the first and second head chips 2a and 2b, and a slit 8 having both ends opened is formed by this step.

  As shown in FIG. 1B, the linear type magnetic tape 10 disposed to face the sliding surface 4 of the magnetic head 1 is, as shown in FIG. 1B, an edge portion of the magnetic head sliding surface 4 which is flat in this embodiment. The air in the vicinity is scraped off by 9a or 9b, and the spacing with the sliding surface 4 is further reduced in the upper portions of the first and second bottomed cavities 6a and 6b as described later.

2A and 2B are a schematic perspective view and a schematic sectional view of the vicinity of the sliding surface 4 with respect to the linear magnetic tape 10 of the magnetic head 1 according to the present invention.
As shown in FIG. 2A, in the magnetic head 1, at least one or more bottomed cavities 6 whose periphery, that is, a peripheral surface is closed are formed on the sliding surface 4 of the head chip 2, and at least one of the bottomed cavities 6 is formed. One has a configuration that is formed only within the width of the traveling region 4 a facing the linear magnetic tape 10, that is, with a smaller width than the linear magnetic tape 10.

The linear magnetic tape 10 is not shown in the figure, but for example, a plurality of servo bands extending in the longitudinal direction are arranged in parallel at a predetermined interval in the width direction of the magnetic tape 10, and a data band is sandwiched between these servo bands. It is formed.
Servo signals are recorded in advance in the servo bands, and in each data band, a large number of data tracks formed along the longitudinal direction of the magnetic tape 10 are formed in parallel.

  On the other hand, the magnetic head 1 performs recording and / or reproduction with respect to the servo signal reproducing element for reproducing the servo signal of the above-mentioned servo band of the magnetic tape 10 and a plurality of selected tracks of a large number of data tracks. A plurality of recording elements and / or reproducing elements are arranged in the width direction of the magnetic tape 10 along the sliding surface 4 with the magnetic tape 10.

  In the traveling area 4a of the magnetic head 1 in which the magnetic tape 10 travels, the plurality of recording elements and / or reproducing elements described above are correctly connected to a selected part of the selected data track. Recording and / or reproduction are performed by reciprocal driving of the magnetic tape 10 with respect to the magnetic head 1.

  At this time, the servo signal is read by the reproducing element for servo signal reproduction, and thereby the fine adjustment control means of the actuator of the magnetic head 1 is controlled to perform the tracking servo. Each magnetic head portion is configured as described above. Further, in the present invention, for example, two sets of magnetic head portions having the recording element and / or reproducing element are opposed to each other as shown in FIG. 1A. Can do.

  As shown in FIG. 1A, the magnetic head 1 is a so-called two-bump type in which two sets of head chips each having a recording head and / or a reproducing element are formed so as to face each other. When a signal is recorded by the magnetic head part of one head chip, the signal of the recording part of the magnetic tape is reproduced by the magnetic head part of the other head chip. Confirmation (monitoring) of the transmitted signal can be performed.

  According to the above-described configuration, as shown in FIG. 2B, the air pressure on the sliding surface 4 is lowered when the traveling linear magnetic tape 10 is scraped of the air near the edge portion 9, and the cavity 6 Since the width is smaller than the width of the linear magnetic tape 10, the fluid remaining on the sliding surface 4, such as air, is drawn into the cavity and expands, whereby the pressure on the sliding surface 4 is increased. Further decrease. Accordingly, although a slight spacing is formed in the vicinity of the edge portion 9, the spacing between the sliding surface 4 and the linear magnetic tape 10, that is, between the magnetic tape 10 and the recording element and / or the reproducing element. Spacing is greatly reduced.

Next, the measurement result of the spacing between the sliding surface 4 and the linear type magnetic tape 10 will be described.
3A and 3B show the spacing of the magnetic head according to the above-described configuration of the present invention, the tape traveling speed 1 m / s, the tape tension 0.5 N / 12.7 mm, and the contact angle of the linear magnetic tape with respect to the edge of the sliding surface. The measurement results at a so-called wrap angle of 1.5 deg and a cavity volume of 3.5 mm ³ are shown. 3A shows the measurement result of the perspective position information measured from vertically above the sliding surface 4, and FIG. 3B shows the measurement result of the height position information measured from the horizontal direction of the sliding surface 4.

In addition, since the perspective position information is measured from above the sliding surface 4, the color is displayed lighter as the position is closer to the measurement source, that is, the spacing between the sliding surface and the linear magnetic tape 10 is larger. Yes.
From the measurement results of FIGS. 3A and 3B, according to the above-described configuration of the present invention, the tape traveling speed is 1 m / s, the tape tension is 0.5 N / 12.7 mm, the wrap angle is 1.5 deg, and the cavity volume is 3.5 mm ³ . It can be confirmed that the pacing stays at about 50 nm except for the edge portion.

4A and 4B show the spacing of the magnetic head according to the above-described configuration of the present invention at a tape traveling speed of 4 m / s, a tape tension of 0.5 N / 12.7 mm, a wrap angle of 1.5 deg, and a cavity volume of 3.5 mm ³ . The measurement results are shown. 4A shows the measurement result of the perspective position information measured from vertically above the sliding surface 4, and FIG. 4B shows the measurement result of the height position information measured from the horizontal direction of the sliding surface 4.
From the measurement results of FIGS. 4A and 4B, according to the above-described configuration of the present invention, it can be confirmed that the spacing remains at about 50 nm except for the edge portion even when the tape running speed is increased to 4 m / s.

5A and 5B show the spacing of the magnetic head according to the above-described configuration of the present invention at a tape traveling speed of 8 m / s, a tape tension of 0.5 N / 12.7 mm, a wrap angle of 1.5 deg, and a cavity volume of 3.5 mm ³ . The measurement results are shown. FIG. 5A shows the measurement result of the perspective position information measured from vertically above the sliding surface 4, and FIG. 5B shows the measurement result of the height position information measured from the horizontal direction of the sliding surface 4.
From the measurement results of FIGS. 5A and 5B, according to the above-described configuration of the present invention, it can be confirmed that the spacing remains at about 50 nm except for the edge portion even when the tape running speed is increased to 8 m / s. Spacing is almost the same as when the traveling speed is 1 m / s.

6A and 6B show the measurement results of spacing in a conventional flat magnetic head in which no cavity is formed at a tape traveling speed of 1 m / s, a tape tension of 0.5 N / 12.7 mm, and a wrap angle of 1.5 deg. Show. FIG. 6A shows the measurement result of the perspective position information measured from vertically above the sliding surface, and FIG. 6B shows the measurement result of the height position information measured from the horizontal direction of the sliding surface.
From the measurement results of FIGS. 6A and 6B, it can be confirmed that the spacing at the tape running speed of 1 m / s is about 50 nm in the case of the conventional configuration in which no cavity is formed.

7A and 7B show the measurement results of spacing in a conventional flat type magnetic head in which no cavity is formed at a tape traveling speed of 4 m / s, a tape tension of 0.5 N / 12.7 mm, and a wrap angle of 1.5 deg. Show. FIG. 7A shows the measurement result of the perspective position information measured from vertically above the sliding surface, and FIG. 7B shows the measurement result of the height position information measured from the horizontal direction of the sliding surface.
From the measurement results of FIGS. 7A and 7B, it can be confirmed that the spacing at the tape running speed of 4 m / s increases to approximately 65 nm in the case of the conventional configuration in which no cavity is formed.

8A and 8B show the measurement results of spacing in a conventional flat magnetic head in which no cavity is formed at a tape traveling speed of 8 m / s, a tape tension of 0.5 N / 12.7 mm, and a wrap angle of 1.5 deg. Show. FIG. 8A shows the measurement result of the perspective position information measured from vertically above the sliding surface, and FIG. 8B shows the measurement result of the height position information measured from the horizontal direction of the sliding surface.
From the measurement results of FIGS. 8A and 8B, it can be confirmed that the spacing at the tape running speed of 8 m / s increases to approximately 75 nm in the case of the conventional configuration in which no cavity is formed. It can be seen that the increase in spacing is unavoidable with the rise in

From the above measurement results, it is possible to reduce the spacing between the sliding surface and the linear magnetic tape and increase the tape running speed by adopting a configuration in which the cavity is formed on the sliding surface of the magnetic head. It was confirmed that a constant spacing could be maintained.
Further, since it has been confirmed that a constant spacing can be maintained between 1 m / s and 8 m / s, according to the configuration of the present invention, a tape traveling speed of 12 m / s or more can be achieved. An increase in pacing can be suppressed, and it is considered that sufficient recording / reproduction characteristics can be obtained with a smaller spacing than in the past even at a tape traveling speed of, for example, about 24 m / s.

Next, the results of measuring the change in spacing with respect to the change in wrap angle using the tape running speed described above as a parameter will be described.
9A and 9B show the spacing measurement results when the tape tension of the linear magnetic tape is 0.5N and 1N in the magnetic head according to the configuration of the present invention. In any of the tape tensions, the spacing hardly changes with changes in the tape running speed and wrap angle, and it can be confirmed that the spacing is about 50 nm to 55 nm at the maximum.

  10A and 10B show the spacing measurement results when the tape tension of the linear magnetic tape is 0.5 N and 1 N in the conventional magnetic head in which no cavity is formed. In all tape tensions, the spacing changes with respect to the wrap angle for each tape running speed, and the maximum is about 90 nm, which is large for the measurement in the configuration of the present invention. ing.

  From this measurement result, according to the magnetic head according to the present invention, not only the increase in the spacing due to the increase in the tape running speed but also the reduction in the increase in the spacing due to the selection of the wrap angle can be achieved. A magnetic recording / reproducing apparatus capable of running a linear magnetic tape more stably can be freely configured as compared with the conventional one by expanding the allowable angle of the wrap angle in a magnetic recording / reproducing apparatus having a head. It is said.

Next, in the magnetic head according to the present invention, the width of the cavity is made smaller than that of the linear type magnetic tape, and the above-mentioned configuration is formed only in the running region facing the linear type magnetic tape. The results of examining changes in pacing will be described.
11A and 11B show a tape travel speed of 1 m / s, a tape tension of 0.5 N / 12.7 mm, and a wrap angle of 1 with a configuration in which the cavity width is 20 mm and is larger than the width of the linear magnetic tape. The measurement results at .5 deg, cavity length 0.5 mm, and cavity depth 10 um are shown. FIG. 11A shows the measurement result of the perspective position information measured from vertically above the sliding surface, and FIG. 11B shows the measurement result of the height position information measured from the horizontal direction of the sliding surface.

  From the measurement results of FIGS. 11A and 11B, when the width of the cavity is larger than the width of the linear magnetic tape, the tape travel direction indicated by the arrow a in FIG. Although the spacing on the front side is about 50 nm, the spacing on the rear side of the cavity is about 70 nm, and the running of the linear magnetic tape becomes unstable due to the spacing difference before and after the cavity. I understand that.

  12A and 12B show a tape travel speed of 4 m / s, a tape tension of 0.5 N / 12.7 mm, and a wrap angle of 1 with a configuration in which the cavity width is 20 mm and is larger than the width of the linear magnetic tape. The measurement results at .5 deg, cavity length 0.5 mm, and cavity depth 10 um are shown. FIG. 12A shows the measurement result of the perspective position information measured from vertically above the sliding surface, and FIG. 12B shows the measurement result of the height position information measured from the horizontal direction of the sliding surface.

  From the measurement results of FIGS. 12A and 12B, when the width of the cavity is larger than the width of the linear magnetic tape, the spacing on the front side of the cavity with respect to the tape running direction is 60 nm. Unlike the case where the width of the cavity is made smaller than the width of the linear magnetic tape according to the present invention, the spacing is easily changed by a slight increase in the tape running speed. I understand that. Further, the spacing on the rear side of the cavity with respect to the tape running direction becomes larger than 70 nm, which is worse than the case of the conventional flat type magnetic head shown in FIG. I was able to confirm.

  13A and 13B show a tape travel speed of 8 m / s, a tape tension of 0.5 N / 12.7 mm, and a wrap angle of 1 with a configuration in which the cavity width is 20 mm and is larger than the width of the linear magnetic tape. The measurement results at .5 deg, cavity length 0.5 mm, and cavity depth 10 um are shown. FIG. 13A shows the measurement result of the perspective position information measured from vertically above the sliding surface, and FIG. 13B shows the measurement result of the height position information measured from the horizontal direction of the sliding surface.

  From the measurement results shown in FIGS. 13A and 13B, when the width of the cavity is larger than the width of the linear magnetic tape, the spacing on the front side of the cavity in the tape running direction is 80 nm. It can be seen that the spacing increases as the tape running speed increases. Furthermore, the spacing behind the cavity with respect to the tape running direction is as large as about 90 nm, which is worse than in the case of the conventional flat magnetic head shown in FIG. Was confirmed.

  From this measurement result, according to the magnetic head according to the present invention, not only the cavity is formed on the sliding surface, but the cavity is compared with the linear magnetic tape in the running region facing the linear magnetic tape. It is considered that the spacing between the sliding surface and the linear magnetic tape can be particularly reduced by adopting a configuration having a small width.

Next, the results of studying the cavity volume and the above-described change in spacing will be described.
14A and 14B are a schematic top view showing the relationship between the linear magnetic tape and the sliding surface of the magnetic head, and a tape running speed of 8 m / s and a tape tension of 0.5 N / 12 with respect to a change in the volume of the cavity. 7 shows the measurement results of the amount of change in spacing at a lap angle of 1.5 deg.

Measurement is performed by changing the width and length of the cavity and the depth of the cavity (not shown, orthogonal to the drawing) indicated by arrows a and b in FIG. 14A, and observing the change in volume and the change in spacing due to this. Went by.
As shown in FIG. 14B, the spacing was reduced as the volume of the cavity was increased, but it was confirmed that there was no change in the spacing when the volume was less than 0.025 mm ³ . Therefore, the magnetic head according to the present invention preferably has a configuration in which the total volume of the cavities is 0.025 mm ³ or more.

<Second Embodiment of Magnetic Head and Magnetic Recording / Reproducing Apparatus>
FIG. 26A and FIG. 26B are a schematic perspective view and a schematic cross-sectional view showing the configuration of an example in the second embodiment of the magnetic head according to the present invention.
In this embodiment, the magnetic head (servo signal recording magnetic head) constituting the main part of the magnetic recording / reproducing apparatus (servo signal recording apparatus) according to the present invention is at least partially as shown in FIG. 26A. The head chip has a multi-channel configuration including a plurality of recording elements for servo signal recording. Note that a reproducing element may be provided in addition to the recording element.

  In this embodiment, the magnetic head 31 has a head chip 32, and has a sliding surface 34 with respect to a linear magnetic tape (not shown) on the top surface of the head chip 32. In addition, at least a magnetic head portion 35 made of a recording element partially used for servo signal recording and a bottomed cavity 36 whose periphery is closed are formed.

  As shown in FIG. 26B, at least a part of the sliding surface 34 of the magnetic head 31 is a flat surface, and a linear magnetic tape (not shown) arranged to face the sliding surface 34 The air in the vicinity is scraped off by the edge portion of the magnetic head sliding surface 34 and is further depressurized in the bottomed cavity 36, whereby the spacing with the sliding surface 34 is further reduced as will be described later.

27A and 27B are a schematic perspective view and a schematic cross-sectional view of the magnetic head 31 in the present embodiment in the vicinity of the sliding surface 34 with respect to the linear magnetic tape 40.
As shown in FIG. 27A, in the magnetic head 31, at least one bottomed cavity 36 whose periphery, that is, the peripheral surface is closed is formed on the sliding surface 34 of the head chip 32, and at least one of the bottomed cavities 36 is formed. All of the parts, for example, have a configuration that is formed only within the width of the running region 34 facing the linear magnetic tape 40, that is, with a smaller width than the linear magnetic tape 40.

As shown in FIG. 40, the linear magnetic tape has, for example, a plurality of servo bands extending in the longitudinal direction and arranged in parallel at a predetermined interval in the width direction of the magnetic tape. A band is formed.
For example, in the case of the Timing based Servo method, a servo signal as shown in FIG. 41 is recorded in the servo band, and in each data band, a large number of data tracks formed along the longitudinal direction of the magnetic tape are arranged in parallel. Formed.

  According to the above-described configuration, as shown in FIG. 27B, the air pressure on the sliding surface 34 is lowered by the traveling linear magnetic tape 40 being scraped of the nearby air by the edge portion 39, and the cavity 36 Since the width is smaller than the width of the linear magnetic tape 40, the fluid remaining on the sliding surface 34, such as air, is drawn into the cavity 36 and expands, whereby the pressure on the sliding surface is increased. Further decrease. Accordingly, although a slight spacing is formed in the vicinity of the edge portion 39, the spacing between the sliding surface 34 and the linear magnetic tape 40, that is, the magnetic head portion using the magnetic tape 40 and the recording element and / or the reproducing element. The spacing between and 35 is greatly reduced.

Here, the effect of the cavity 36 in the present embodiment will be described.
FIG. 28A shows a so-called lap angle of the linear magnetic tape 40 with respect to the edge of the sliding surface 34, with a tape traveling speed of 1 m / s, a tape tension of 0.5 N / 12.7 mm, in the magnetic head 31 according to the above-described configuration of the present invention. (Wrap Angle) Under the evaluation condition of 1 deg, the length of the sliding surface 34 along the tape running direction (shown by the arrow d in FIG. 28A) is 2 mm, the tape width 12.7 mm, and the length of the cavity 36 along the tape running direction ( FIG. 28B shows the result of measuring the spacing when 0.5 c, the cavity width is 3.5 mm, and the cavity volume is 3.5 mm ³ .
The spacing measurement result under this condition is indicated by a solid line, while as a comparative example, the evaluation condition is the same, and the spacing measurement result using a so-called simple flat shape without a cavity is indicated by a dotted line.

From the measurement result of FIG. 28A, according to the above-described configuration of the present invention, the tape traveling speed is 1 m / s, the tape tension is 0.5 N / 12.7 mm, the wrap angle is 1 deg, the cavity volume is 3.5 mm ³ , and the flat head is not in the cavity. It can be confirmed that the spacing at is approximately 40 nm except for the edge portion.

FIG. 28B shows the magnetic head according to the above-described configuration of the present invention along the tape running direction of the sliding surface 34 under the evaluation conditions of tape running speed 4 m / s, tape tension 0.5 N / 12.7 mm, and wrap angle 1 deg. The result of measuring the spacing when the length is 2 mm, the tape width is 12.7 mm, the length of the cavity 36 along the tape running direction is 0.5 mm, the cavity width is 3.5 mm, and the cavity volume is 3.5 mm ³ is shown.
The spacing measurement result under this condition is indicated by a solid line, while as a comparative example, the evaluation condition is the same, and the spacing measurement result using a so-called simple flat shape without a cavity is indicated by a dotted line.

  From the measurement result of FIG. 28B, according to the above-described configuration of the present invention, it can be confirmed that the spacing remains approximately 40 nm except for the edge portion even when the tape running speed is increased to 4 m / s. However, in the case of a flat shape without a cavity, the spacing is 60 nm to 70 nm except for the edge portion, and it can be seen that the spacing is deteriorated as compared with the case with a cavity.

FIG. 28C shows the magnetic head according to the above-described configuration of the present invention along the tape running direction of the sliding surface 34 under the evaluation conditions of a tape running speed of 8 m / s, a tape tension of 0.5 N / 12.7 mm, and a wrap angle of 1 deg. The result of measuring the spacing when the length is 2 mm, the tape width is 12.7 mm, the length of the cavity 36 along the tape running direction is 0.5 mm, the cavity width is 3.5 mm, and the cavity volume is 3.5 mm ³ is shown.
The spacing measurement result under this condition is indicated by a solid line, while as a comparative example, the evaluation condition is the same, and the spacing measurement result using a so-called simple flat shape without a cavity is indicated by a dotted line.

  From the measurement result of FIG. 28C, according to the above-described configuration of the present invention, when the tape running speed is increased to 8 m / s, the spacing in front of the cavity increases, but the spacing in the rear of the cavity becomes approximately 40 nm. We can confirm that we stay. Therefore, stable writing can be expected by arranging the recording element behind the cavity. However, in the case of a flat shape without a cavity, the spacing is 75 nm to 90 nm except for the edge portion, and it can be seen that the spacing is deteriorated as compared with the case with a cavity.

Based on the above measurement results, the configuration in which the cavity is formed on the sliding surface of the magnetic head for servo signal recording reduces the spacing between the sliding surface and the linear magnetic tape and increases the tape running speed. In this case, it was confirmed that a certain spacing could be maintained.
Further, since it has been confirmed that a constant spacing can be maintained between 1 m / s and 8 m / s, according to the configuration of the present invention, a tape traveling speed of 12 m / s or more can be achieved. An increase in pacing can be suppressed, and it is considered that sufficient recording / reproduction characteristics can be obtained with a smaller spacing than in the past even at a tape traveling speed of, for example, about 24 m / s.

Next, the results of measuring the change in spacing with respect to the change in wrap angle using the tape running speed described above as a parameter will be described.
FIG. 29A and FIG. 29B show the spacing measurement result when the tape tension of the linear type magnetic tape is 0.5 N and 1 N in the magnetic head according to the configuration of the present invention, and the magnetic head according to the conventional configuration in which no cavity is formed. The spacing measurement results when the tape tension of the linear magnetic tape is 0.5N and 1N are shown. In the case where there is a cavity, in any tape tension, the spacing hardly changes with respect to changes in tape running speeds of 4 m / s and 8 m / s and a wrap angle of 1 ° to 3 °. It can be confirmed that it is about 40 nm to 45 nm at the maximum.

  However, in the conventional magnetic head having no cavity, the spacing varies with the change in the wrap angle at each tape tension at every tape running speed, and the maximum is about 80 nm. For example, it is large for the measurement in the configuration of the present invention.

  From this measurement result, according to the magnetic head according to the present invention, not only the increase in spacing due to the increase in tape running speed but also the reduction in spacing increase due to selection of the wrap angle can be achieved. The increase in the allowable angle of the wrap angle and the expansion of the tape tension range in the servo writer with the magnetic head for signal recording can also suppress the wear of the magnetic head for servo signal recording, especially at low wrap angle and low tape tension. Since the linear magnetic tape can be run more stably, a servo writer having a long-life servo signal recording magnetic head can be provided.

Next, in the magnetic head (servo recording magnetic head) according to the present invention, the width of the cavity is made smaller than that of the linear magnetic tape, and is formed only in the running region facing the linear magnetic tape. The results of studying the configuration will be described.
In this study, the change in spacing was measured in a configuration in which the cavity width was larger than that of the linear magnetic tape, and the cavity width was made smaller than that of the linear magnetic tape. We verified the effectiveness of.

FIG. 30A shows a tape travel speed of 1 m / s, a tape tension of 0.5 N / 12.7 mm, a wrap angle of 1.5 deg, and a configuration in which the cavity width is 20 mm and is larger than the width of the linear magnetic tape. The measurement results of spacing at a tape width of 12.7 mm, a cavity length of 0.5 mm, and a cavity depth of 10 μm are shown.
The spacing measurement result under this condition is indicated by a solid line, while as a comparative example, the evaluation condition is the same, and the spacing measurement result using a so-called simple flat shape without a cavity is indicated by a dotted line.

  From the measurement result shown in FIG. 30A, when the width of the cavity is larger than the width of the linear magnetic tape, it corresponds to the front of the cavity with respect to the tape running direction indicated by arrow a in FIG. 11A. Although the spacing on the side is about 50 nm, the spacing on the rear side of the cavity is about 70 nm, and the running of the linear magnetic tape may become unstable due to the spacing difference before and after the cavity. Recognize.

FIG. 30B shows a tape traveling speed of 4 m / s, a tape tension of 0.5 N / 12.7 mm, a wrap angle of 1.5 deg, and a configuration in which the cavity width is 20 mm and is larger than the width of the linear magnetic tape. The measurement results of spacing at a tape width of 12.7 mm, a cavity length of 0.5 mm, and a cavity depth of 10 μm are shown.
The spacing measurement result under this condition is indicated by a solid line, while as a comparative example, the evaluation condition is the same, and the spacing measurement result using a so-called simple flat shape without a cavity is indicated by a dotted line.

  From the measurement result of FIG. 30B, when the width of the cavity is larger than the width of the linear magnetic tape, the spacing on the front side of the cavity with respect to the tape running direction is about 60 nm. Therefore, unlike the case where the width of the cavity is made smaller than the width of the linear magnetic tape according to the present invention, the spacing may easily change due to a slight increase in the tape running speed. Recognize. Further, the spacing on the rear side of the cavity with respect to the tape running direction is larger than 70 nm, which is worse than the case of the conventional flat magnetic head shown in FIG. I was able to confirm.

FIG. 30C shows a tape traveling speed of 8 m / s, a tape tension of 0.5 N / 12.7 mm, a wrap angle of 1.5 deg, and a configuration in which the cavity width is 20 mm and is larger than the width of the linear magnetic tape. The measurement results of spacing at a tape width of 12.7 mm, a cavity length of 0.5 mm, and a cavity depth of 10 μm are shown.
The spacing measurement result under this condition is indicated by a solid line, while as a comparative example, the evaluation condition is the same, and the spacing measurement result using a so-called simple flat shape without a cavity is indicated by a dotted line.

  From the measurement result of FIG. 30C, when the width of the cavity is larger than the width of the linear magnetic tape, the spacing on the front side of the cavity with respect to the tape running direction is about 80 nm. Therefore, unlike the case where the width of the cavity is made smaller than the width of the linear magnetic tape according to the present invention, the spacing may easily change due to a slight increase in the tape running speed. Recognize. Furthermore, the spacing on the rear side of the cavity with respect to the tape running direction becomes larger than 90 nm, which is worse than the conventional flat magnetic head shown in FIG. I was able to confirm.

From the measurement results of FIGS. 30A to 30C, when the width of the cavity is larger than the width of the linear magnetic tape, the spacing on the front side of the cavity with respect to the tape running direction is: For example, when the tape traveling speed is 8 m / s, it becomes about 80 nm, and it can be seen that the spacing increases as the tape traveling speed increases.
Furthermore, the spacing on the rear side of the cavity with respect to the tape running direction is as large as about 90 nm, which is worse than in the case of the conventional flat type magnetic head shown in FIG. Was confirmed.

  From this measurement result, according to the magnetic head according to the present invention, not only the cavity is formed on the sliding surface, but the cavity is compared with the linear magnetic tape in the running region facing the linear magnetic tape. It was confirmed that the spacing between the sliding surface and the linear magnetic tape was particularly reduced by adopting a configuration having a small width.

Next, the results of studying the cavity volume and the above-described change in spacing will be described.
31A and 31B are a schematic top view showing the relationship between the linear magnetic tape and the sliding surface of the magnetic head, and a tape running speed of 8 m / s and a tape tension of 0.5 N / 12 with respect to a change in the volume of the cavity. 7 shows the measurement results of the amount of change in spacing at a lap angle of 1.5 deg.

Measurement is performed by changing the cavity width and length indicated by arrows a and b in FIG. 31A and the cavity depth (not shown, orthogonal to the paper surface), and observing changes in volume and spacing due to this. Went by.
As shown in FIG. 31B, the spacing was reduced as the volume of the cavity was increased, but it was confirmed that there was no change in the spacing when the volume was less than 0.025 mm ³ . Therefore, the magnetic head according to the present invention preferably has a configuration in which the total volume of the cavities is 0.025 mm ³ or more.

  Next, an embodiment of a method for manufacturing a magnetic head according to the present invention will be described with reference to the drawings.

<First Embodiment of Manufacturing Method of Magnetic Head>
In the present embodiment example, that is, the first embodiment example, first, a pattern (not shown) such as wiring is formed on the substrate 21 made of, for example, AlTiC (alumina-titanium carbide) by sputtering, etching, plating, or the like. Then, as shown in FIG. 15A, a recording / reproducing element pattern 22 having a magnetic head portion 5 (not shown) constituting a finally obtained magnetic head is partitioned.
Subsequently, as shown in FIG. 15B, the substrate 21 is cut along the recording / reproducing element pattern to obtain the bar chip 23 as shown in FIG. 15C.

  Next, as shown in FIG. 16A, the first and second side bars 24a and 24b made of, for example, Altic or calcium titanate, which define the width of the head chip constituting the finally obtained magnetic head, are formed on the bar chip 23. As shown in FIG. 16B, a first cover 25a made of Altic, for example, extending over the bar chip 23 and the side bars 24a and 24b from the upper surface of the bar chip 23 on which the recording / reproducing element pattern 22 is formed, It is formed by adhesion.

Next, as shown in FIG. 17A, a groove 23a is formed by machining on the opposite side of the surface of the bar chip 23 on which the first cover 25a is formed, that is, the surface on which the recording / reproducing element pattern is formed. After that, a second cover 25b made of Altic is formed on the surface on which the groove 23a is formed so as to cover the bar chip 23 and the side bars 24a and 24b, for example, by adhesion, thereby forming the array structure 26. obtain.
Subsequently, as shown in FIG. 17B, the first cover 25a deposited on the bar chip 23 is cut for each head chip constituting the magnetic head finally obtained.

Next, as shown in FIG. 18A, the bar chip 23, the side bars 24 a and 24 b, and the second cover 25 b are cut at the same time, so as to finally form the array structure 26 as shown in FIG. 18B. The head chip 2 constituting the magnetic head to be obtained is obtained.
Subsequently, as shown in FIG. 19A, the surface to be the sliding surface of the finally obtained magnetic head is set as the upper surface, and the first and second covers 25a and 25b are polished from this upper surface by polishing and slicing. The contact width and the sharp edge are formed, and the outer shape of the head chip 2 is selected as shown in FIG. 19B.

  Next, as shown in FIG. 20A, a magnetic shield material 7 made of a non-magnetic material such as a copper plate is inserted into the groove 23a that becomes a cavity constituting the finally obtained magnetic head, and fixed to the side surface of the groove 23a, for example, by bonding. After the installation, as shown in FIG. 20B, for example, the first head chip 2a and the second head chip 2b are bonded to each other, and based on the external shape selection performed in advance on the second cover 25b. , Slits 8 are formed.

  In this embodiment, the first and second magnetic head portions 5a and 5b constituting the head chips 2a and 2b are arranged to face each other with the first and second bottomed cavities 7a and 7b interposed therebetween. Thus, a magnetic shield material for preventing the recording magnetic field from one magnetic head part in the finally obtained magnetic head from affecting, for example, a reproducing element constituting the other magnetic head part is provided with a special It can be arranged and formed at a position close to each magnetic head portion without trouble.

  After laminating the first head chip 2a and the second head chip 2b, as shown in FIG. 21, these head chips 2a and 2b are placed and fixed on the head carrier 3 made of aluminum or brass, and By closing the bottom side opening of the groove 23a constituting each head chip with the head carrier 3, the side surfaces and the bottom surface of the first and second bottomed cavities 7a and 7b can be connected to the head chips 2a and 2b and the head carrier 3 with each other. Thus, the magnetic head according to the present invention is obtained.

<Second Embodiment of Manufacturing Method of Magnetic Head>
In this embodiment example, that is, the second embodiment example, first, as shown in FIG. 32A, a groove for forming a cavity in a substrate 51 made of ferrite such as MnZnFe ₂ O ₄ or NiZnFe ₂ O ₄ , for example. Processing is performed to form the groove 52.
Thereafter, as shown in FIG. 32B, several processed substrates 51 are bonded together so that a large number of magnetic heads can be obtained, that is, a large number of magnetic heads can be obtained simultaneously by a series of operations.
Thereafter, as shown in FIG. 32C, glass groove processing for forming a filling groove 53 for filling a filler for forming a magnetic path, for example, glass, is performed on the substrate 51.

After that, as shown in FIG. 33A, a filling material such as glass 54 is filled in the filling grooves 53 respectively formed in each substrate 51.
Thereafter, as shown in FIG. 33B, a planarization process for planarizing the rising of the filler 54 is performed on the surface of the substrate 51 by, for example, polishing.
After that, as shown in FIG. 33C, for example, a recording gap (for example, a recording element partially used for servo signal recording) is formed so as to be formed in a C shape in a direction orthogonal to the running direction of the linear tape. Gap) is formed.
Although the gap is not shown, a gap material such as SiO ₂ is deposited by sputtering, for example, followed by resist coating, exposure, resist removal, etching for removing unnecessary or excessive magnetic material, and resist removal. , Fe—Ta, Ni—Fe or the like magnetic film is sputtered and polished to form a magnetic film having a C-shaped gap as shown in the figure.

Thereafter, as shown in FIG. 34A, a groove for cutting the chip is formed by machining, and then the polishing of the sliding surface is performed.
Thereafter, as shown in FIG. 34B, the substrate 51 is inverted and backside grinding is performed.
Thereafter, as shown in FIG. 34C, the head chip 32 constituting the finally obtained magnetic head is divided.

After that, as shown in FIG. 35A, the back core 33 made of, for example, a magnetic material is bonded to the head chip 32 from the back surface, thereby forming the magnetic path of the finally obtained magnetic head and being formed on the head chip. The bottomed cavity 36 is formed by closing the bottom of the groove 52.
Thereafter, as shown in FIG. 35B, a winding 58 serving as a conducting wire for forming a magnetic field is provided to obtain the magnetic head 31 as shown in FIG. 35C. By providing the space for the winding 58 and the cavity 36 with their positions shifted with respect to the horizontal direction, the bottom of the cavity 36 can be formed by the back core 33.

  As shown in FIG. 36, in order to suppress wear of the edge portion 39 of the magnetic head 31, the edge portion 39 is more resistant to at least the material constituting the sliding surface 34, such as Altic or calcium titanate. It is also possible to configure the reinforcing material 59 with excellent wear characteristics.

<Third Embodiment of Magnetic Head Manufacturing Method>
In the present embodiment example, that is, the third embodiment example, first, as shown in FIG. 37A, a second base material 81b made of ceramic, for example, is sandwiched between first base material 81a made of ferrite, for example. A substrate 81 is prepared.
Thereafter, as shown in FIG. 37B, finally, a plurality of magnetic head elements, that is, a large number of magnetic head elements for multi-channels, for example, can be formed simultaneously by a series of operations. Longitudinal grooves along the tape running direction are formed at positions corresponding to a large number of magnetic heads.
Thereafter, as shown in FIG. 37C, the groove 82 for forming the cavity is formed as a lateral groove in a direction perpendicular to the running direction of the tape in the finally obtained magnetic head.

Then, as shown in FIG. 38A, a cover 87 made of, for example, ceramic and having one main surface corresponding to the above-described vertical and horizontal grooves is prepared. As shown in FIG. It is deposited on the side or top surface.
Thereafter, as shown in FIG. 38C, the excess portion of the cover 87 is removed by polishing, for example, by polishing, thereby exposing the first and second bases 81a and 81b and forming the cavity 86 at the same time.

Thereafter, the back surface of the substrate 81 is also polished as shown in FIG. 39A. Subsequently, as shown in FIG. 39B, for example, a C-shape is formed in a direction perpendicular to the running direction of the linear tape. In addition, for example, a recording gap (Gap) is formed by a recording element partially used for servo signal recording.
Although not shown, the gap is formed by depositing a Gap material, for example, by sputtering, followed by resist coating, exposure, resist removal, etching for removing unnecessary or excessive magnetic material, resist removal, Fe-Ta or The magnetic film such as Ni—Fe is sputtered and polished to form a magnetic film having a cross-shaped gap as shown in the figure.

Thereafter, as shown in FIG. 39C, the back core 83 is bonded to the head chip 82 from the back surface, thereby forming the magnetic path of the finally obtained magnetic head.
According to the manufacturing method in this embodiment, it is possible to manufacture a magnetic head having a large number of magnetic head portions 85 each having a corresponding cavity on the sliding surface.

  As described in the above embodiments, according to the magnetic head of the present invention, at least one bottomed cavity having a closed periphery is formed on the sliding surface with the linear magnetic tape. When at least one of the cavities faces the linear magnetic tape and is formed only within the width of the linear magnetic tape traveling area, the cavity is not formed when the linear magnetic tape travels. In comparison with the above, the expansion of air between the sliding surface and the linear magnetic tape is promoted, and the reduction of the spacing and the improvement of the running stability of the linear magnetic tape are achieved by the lowering of the atmospheric pressure, that is, the negative pressure.

In particular, for example, in a flat type magnetic head in which at least a part of the sliding surface is a flat surface, air in the vicinity of the traveling linear magnetic tape is scraped off at the edge of the head before reaching the sliding surface. The air pressure between the sliding surface and the linear magnetic tape can be lowered, and the air pressure can be further lowered according to the volume of the cavity. And by making the total volume of the cavities 0.025 mm ³ or more, it is possible to improve the spacing.

  Further, according to the magnetic head and the magnetic recording / reproducing apparatus of the present invention, the cavity can be a closed space in which a low pressure state is maintained when the linear magnetic tape is running. It can be configured so as to be close to the opening of the cavity, and can be stably performed even in a speed range that has been considered difficult in the past, for example, a speed range of 12 m / s or more.

  Further, by providing a magnetic shield material in the cavity, especially when the cavity is configured with a sufficiently large volume, for example, a shield material having a shape and dimension corresponding to the recording magnetic field of the recording element is recorded. Therefore, the influence of the recording magnetic field on the reproducing element, so-called cross feed, can be reduced or avoided.

  Furthermore, according to the method of manufacturing a magnetic head according to the present invention, the peripheral surface, that is, the side surface of the same cavity is formed by a head chip having a recording element and / or a reproducing element and a head carrier that is a base of the head chip. Since the bottom surface is configured, the manufacturing can be simplified as compared with the case where the cavity is partitioned by etching, and no special effort is required to install the magnetic shield material, and the recording / reproducing element The magnetic head can be manufactured by installing a magnetic shield material in a cavity sufficiently close to the recording element, for example.

  Furthermore, according to the linear type magnetic tape of the present invention, recording signals such as servo signals can be more reliably recorded by the above-described magnetic head of the present invention.

The magnetic head, magnetic recording / reproducing apparatus, magnetic head manufacturing method, and linear magnetic tape according to the present invention are not limited to the above-described embodiments.
For example, in the above-described embodiment, an example of a flat type magnetic head has been described. However, the magnetic head according to the present invention can be configured by a magnetic head of another shape, for example, a cylindrical magnetic head, or according to the present invention. The magnetic recording / reproducing apparatus can also have an apparatus configuration in which only at least one of recording and reproduction is possible.
In addition, the shape of the bottomed cavity is not limited to a rectangular parallelepiped shape, and can be various shapes, or a configuration in which no shield material is provided in the cavity, or a configuration in which another member is provided instead of the shield material. You can also.

  In addition to forming cavities by machining, for example, cavities can be formed by so-called edging, and the shape and number of cavities can be arbitrarily set as shown in FIG. is there. In the case where there are a plurality of cavities, it is only necessary that the cavities be installed in a running region facing the linear magnetic tape. Further, the position of the magnetic head portion with respect to the cavity can be arbitrarily set.

In the above-described embodiment, the example in which the number of bottomed cavities and the number of recording elements, that is, the number of magnetic head portions is the same, that is, two has been described, but in the magnetic head according to the present invention, Even if it is not necessarily the same number, it is only necessary to have an arbitrary number of configurations.
Furthermore, the number of reproducing elements can be set to be smaller than the number of recording elements constituting the magnetic head portion, and the material of the linear magnetic tape can be used for the wrap angle and the like. You can select a new one.

  In the above-described embodiment, the example in which the head carrier or the back core directly forms the bottom of the cavity has been described. However, the present invention is not limited to this, and the head carrier or the back core is not limited unless the characteristics of the magnetic head are impaired. The peripheral surface and the bottom surface of the cavity are constituted by the head chip and at least one of the back core and the head carrier, such as a manufacturing process in which another plate-like member is sandwiched between the core and the head chip. Anything to do.

  Although the method of forming the cavity by machining has been described here, the cavity can be formed by edging, for example, and the shape and number of the cavities can be arbitrarily set. In the case where there are a plurality of cavities, it is only necessary that the cavities be installed in a running region facing the linear magnetic tape. Further, the present invention can be variously changed and modified such that the position of the recording element with respect to the cavity can be arbitrarily set.

1A and 1B are a schematic perspective view and a schematic cross-sectional view, respectively, showing the configuration of an example of a magnetic head that is a main part of a magnetic recording / reproducing apparatus according to the present invention. 2A and 2B are a schematic perspective view and a schematic cross-sectional view showing an example of the relationship between the magnetic head according to the present invention and a linear magnetic tape running on the sliding surface of the magnetic head, respectively. 3A and 3B respectively show the spacing between the sliding surface and the magnetic tape when the linear magnetic tape is run along the sliding surface of the magnetic head according to the present invention. It is a schematic diagram which shows an example of the result measured from the vertical upper direction and the horizontal side. 4A and 4B respectively show the spacing between the sliding surface and the magnetic tape when the linear magnetic tape is run along the sliding surface of the magnetic head according to the present invention. It is a schematic diagram which shows the other example of the result measured from the vertical upper direction and the horizontal side. 5A and 5B show the spacing between the sliding surface and the magnetic tape when the linear magnetic tape is run along the sliding surface of the magnetic head according to the present invention. It is a schematic diagram which shows the other example of the result measured from the vertical upper direction and the horizontal side. 6A and 6B show the spacing between the sliding surface and the magnetic tape when the linear magnetic tape is run along the sliding surface of the conventional magnetic head, respectively. It is a schematic diagram which shows the result measured from upper direction and a horizontal side. 7A and 7B show the spacing between the sliding surface and the magnetic tape when the linear magnetic tape is run along the sliding surface of the conventional magnetic head, respectively. It is a schematic diagram which shows the result measured from upper direction and a horizontal side. 8A and 8B show the spacing between the sliding surface and the magnetic tape when the linear magnetic tape is run along the sliding surface of the conventional magnetic head, respectively. It is a schematic diagram which shows the result measured from upper direction and a horizontal side. FIG. 9A and FIG. 9B each measure the spacing when the magnetic tape is run at a constant tape tension along the sliding surface of the magnetic head according to the present invention for each wrap angle using the tape running speed as a parameter. It is a schematic diagram which shows an example of the result obtained. FIG. 10A and FIG. 10B each measured the spacing when the magnetic tape was run with a constant tape tension along the sliding surface of the conventional magnetic head for each lap angle using the tape running speed as a parameter. It is a schematic diagram which shows an example of a result. FIG. 11A and FIG. 11B each show the spacing when the magnetic tape is moved along the sliding surface of the magnetic head having a bottomed cavity whose width is larger than that of the magnetic tape. It is a schematic diagram which shows the example of the result measured from the vertical upper side and horizontal side. 12A and 12B respectively show the spacing when the magnetic tape travels along the sliding surface of the magnetic head having a bottomed cavity whose width is larger than that of the magnetic tape. It is a schematic diagram which shows the example of the result measured from the vertical upper side and horizontal side. FIG. 13A and FIG. 13B each show the spacing when the magnetic tape is moved along the sliding surface of the magnetic head having a bottomed cavity whose width is larger than that of the magnetic tape. It is a schematic diagram which shows the example of the result measured from the vertical upper side and horizontal side. FIG. 12A and FIG. 12B are a schematic diagram and a measurement for explaining the measurement results of the relationship between the volume of the cavity and the spacing between the sliding surface of the magnetic head and the magnetic tape in the magnetic head according to the present invention, respectively. It is a result. 15A to 15C are process diagrams for explaining an example of a method of manufacturing a magnetic head according to the present invention. FIG. 16A and FIG. 16B are process diagrams for explaining an example of a method of manufacturing a magnetic head according to the present invention. 17A and 17B are process diagrams for explaining an example of a method of manufacturing a magnetic head according to the present invention. 18A and 18B are process diagrams for explaining an example of a method of manufacturing a magnetic head according to the present invention. FIG. 19A and FIG. 19B are process diagrams for explaining an example of a method of manufacturing a magnetic head according to the present invention. 20A and 20B are process diagrams for explaining an example of a method of manufacturing a magnetic head according to the present invention. It is process drawing with which it uses for description of an example of the manufacturing method of the magnetic head by this invention. 22A and 22B are schematic cross-sectional views showing the configuration of a conventional magnetic head, respectively. 23A and 23B are a schematic cross-sectional view and a schematic perspective view, respectively, showing the configuration of a conventional magnetic head. 24A and 24B are a schematic cross-sectional view and a schematic perspective view, respectively, showing the configuration of a conventional magnetic head. FIG. 25 is a schematic perspective view showing another example of the magnetic head according to the present invention. 26A and 26B are a schematic perspective view and a schematic cross-sectional view, respectively, showing the configuration of another example of the magnetic head that is the main part of the magnetic recording / reproducing apparatus according to the present invention. 27A and 27B are a schematic perspective view and a schematic cross-sectional view, respectively, showing another example of the relationship between the magnetic head according to the present invention and a linear magnetic tape running on the sliding surface of the magnetic head. 28A to 28C show the spacing between the sliding surface and the magnetic tape when the linear magnetic tape is run along the sliding surface of the magnetic head according to the present invention. It is a schematic diagram which shows the other example of the result measured from the horizontal side. FIG. 29A and FIG. 29B each measured the spacing when the magnetic tape was run with a constant tape tension along the sliding surface of the conventional magnetic head for each lap angle with the tape running speed as a parameter. It is a schematic diagram which shows the other example of a result. 30A to 30C show the spacing between the sliding surface and the magnetic tape when a linear magnetic tape narrower than the cavity is run along the sliding surface of the magnetic head. It is a schematic diagram which shows the other example of the result of having measured from the horizontal side of the sliding surface. FIG. 31A and FIG. 31B are a schematic diagram and a measurement for explaining the measurement results of the relationship between the volume of the cavity and the spacing between the sliding surface of the magnetic head and the magnetic tape in the magnetic head according to the present invention, respectively. It is a result. 32A to 32C are process diagrams for explaining another example of the magnetic head manufacturing method according to the present invention. 33A to 33C are process diagrams for explaining another example of the magnetic head manufacturing method according to the present invention. 34A to 34C are process diagrams for explaining another example of the magnetic head manufacturing method according to the present invention. FIG. 35A to FIG. 35C are process diagrams for explaining another example of the method of manufacturing a magnetic head according to the present invention. It is a perspective view which shows the structure of the other example of the magnetic head based on this invention. 37A to 37C are process diagrams for explaining another example of the magnetic head manufacturing method according to the present invention. 38A to 38C are process diagrams for explaining another example of the magnetic head manufacturing method according to the present invention. 39A to 39C are process diagrams for explaining another example of the magnetic head manufacturing method according to the present invention. It is a schematic diagram with which it uses for description of the servo signal recording of a linear type magnetic tape. It is a schematic diagram with which it uses for description of the servo signal recording of a linear type magnetic tape. 42A and 42B are a schematic diagram for explaining the spacing and a schematic diagram for explaining the servo signal recording in the conventional magnetic head, respectively. It is a schematic perspective view which shows the structure of the conventional magnetic head.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Magnetic head (magnetic recording / reproducing apparatus), 2 ... Head chip, 2a ... 1st head chip, 2b ... 2nd head chip, 3 ... Head carrier, 4 ... · Sliding surface, 4a · · · Traveling region, 5 · · · Magnetic head portion, 5a · · · 1st magnetic head portion, 5b · · · 2nd magnetic head portion, 6 · · · cavity, 6a · ..First cavity, 6b ... second cavity, 7 ... magnetic shield material, 7a ... first magnetic shield material, 7b ... second magnetic shield material, 8 ... Slit, 9, 9a, 9b ... edge portion, 10 linear magnetic tape, 21 ... substrate, 22 ... recording / reproducing element pattern, 23 ... bar chip, 23a ... groove, 24a ... -1st sidebar, 24b ... 2nd sidebar, 25a ... 1st cover 25b ... second cover 26 ... array structure 31 ... magnetic head (magnetic recording / reproducing apparatus) 32 ... head chip 33 ... back core 34 ... Sliding surface, 34a ... traveling region, 35 ... magnetic head, 36 ... cavity, 39 ... edge, 40 linear magnetic tape, 51 ... substrate, 52 ... groove, 53 ... Filling groove, 54 ... Filling material, 55 ... Magnetic film, 56 ... Dividing groove, 58 ... Winding, 59 ... Reinforcing material, 81 ... Substrate, 81a ..First substrate, 81b ... second substrate, 82 ... groove, 83 ... back core, 85 ... magnetic head, 86 ... cavity, 87 ... cover , 88... Winding, 101... Cylindrical magnetic head, 201... Cylindrical magnetic head with slit, 30 , 401 ... Flat magnetic head, 501 ... Conventional magnetic head, 510 ... Linear magnetic tape, 601 ... Conventional magnetic head, 602 ... Head chip, 604 ... Sliding Surface, 605... Magnetic head

Claims (17)

A magnetic head comprising a linear magnetic tape recording element and / or reproducing element,
At least one bottomed cavity having a closed periphery is formed on a sliding surface with the linear type magnetic tape, and at least one of the bottomed cavities faces the linear type magnetic tape, and the linear type magnetic tape The magnetic head is formed only within the width of the traveling area. The magnetic head according to claim 1, wherein at least a part of the sliding surface is a flat surface. 2. The magnetic head according to claim 1, wherein a total volume of the bottomed cavities is 0.025 mm ³ or more. The magnetic head according to claim 1, further comprising a magnetic shield material in the bottomed cavity. At least two sets of the recording elements are juxtaposed,
The magnetic head according to claim 1, wherein at least one of the bottomed cavities is disposed between the two or more sets of recording elements. A number of bottomed cavities corresponding to the recording elements are formed on the sliding surface on which the two or more sets of recording elements are formed, and at least the bottomed cavities are provided between the two or more sets of recording elements. A plurality of head chips, one of which is disposed;
The magnetic head according to claim 5, further comprising: a head carrier serving as a common base for supporting the plurality of head chips. The magnetic head according to claim 1, wherein at least a part of the recording element has a servo signal recording element. The magnetic head according to claim 1, wherein a reinforcing material is provided on at least one of a front edge and a rear edge of the sliding surface with respect to a running direction of the tape. The magnetic head according to claim 1, wherein the linear magnetic tape is closer to the opening of the cavity when the medium is running than when the medium is stationary. A magnetic recording / reproducing apparatus having a magnetic head provided with a linear magnetic tape recording element and / or reproducing element,
At least one bottomed cavity having a closed periphery is formed on the sliding surface constituting the magnetic head, and at least one of the bottomed cavities faces the linear magnetic tape, and the linear magnetic tape A magnetic recording / reproducing apparatus characterized in that the magnetic recording / reproducing apparatus is formed only within the width of the traveling area. A method of manufacturing a magnetic head comprising a linear magnetic tape recording element and / or reproducing element,
A method of manufacturing a magnetic head, comprising: a head chip having the recording element and / or reproducing element; and a head carrier serving as a base of the head chip to form a peripheral surface and a bottom surface of the same cavity. . A method of manufacturing a magnetic head comprising a linear magnetic tape recording element and / or reproducing element,
A head chip having the recording element and / or reproducing element, and a back core attached to the head chip from a side different from the sliding surface of the linear tape, the circumference of the same cavity. A method of manufacturing a magnetic head, comprising: a surface and a bottom surface. The method of manufacturing a magnetic head according to claim 11, wherein a magnetic shield material is installed on at least a part of the peripheral surface of the cavity. The at least one recording element is juxtaposed on the head carrier, and at least one of the bottomed cavities is disposed between the two or more recording elements. Method of manufacturing the magnetic head of the present invention. A number of bottomed cavities corresponding to the recording elements are formed on the sliding surface on which the two or more sets of recording elements are formed, and at least the bottomed cavities are provided between the two or more sets of recording elements. The method of manufacturing a magnetic head according to claim 11, wherein one is disposed. The method of manufacturing a magnetic head according to claim 11, wherein a servo signal recording element is formed at least on a part of the recording element. At least one bottomed cavity having a servo signal recording element at least in a part of the recording element and having a closed periphery formed on a sliding surface with the linear magnetic tape, the bottomed cavity The linear magnetic tape is characterized in that at least one of the servo signals is recorded by a magnetic head that is disposed so as to face only within the running area width of the linear magnetic tape.