JP2006105391A - Cylinder with guide - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a cylinder with a guide which prevents the burning even at the time of an outflow of a lubricant, and prevents the corrosion of a guide member. <P>SOLUTION: A piston rod 16 is inserted to a central inner hole 14 of a cylinder tube 12 comprising the cylinder with the guide 10. Then a first guide rod 22 and a second guide rod 24, both of which are connected to the piston rod 16 through the medium of a connecting plate 26, are inserted to a first side inner hole 18 and a second side inner hole 20 respectively. Then the first guide rod 22 is drawn through each of the through holes of a first bush 82a and a second bush 84a, while the second guide rod 24 is drawn through each of the through holes of a third bush 82b and a fourth bush 84b. The side peripheral walls of the first guide rod 22 and the second guide rod 24 and the inner peripheral walls of the first bush 82a to the fourth bush 84b are covered with coatings 86 and 88 respectively. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a cylinder with a guide that guides a piston rod while a guide member moves back and forth.

  A fluid pressure cylinder generally has a cylinder tube provided with an inner hole, and a piston rod that operates with a pressure fluid such as compressed air or pressurized oil in the inner hole and protrudes at one end from the inner hole. .

  Here, the piston rod is usually a long object that moves forward and backward along its axial direction. For this reason, when a load in the direction orthogonal to the axial direction (hereinafter referred to as a lateral load) is applied to the tip of the piston rod on the side protruding from the inner hole, the other side of the piston rod inserted into the inner hole The end may be displaced in the direction opposite to the direction of lateral load. That is, for example, when the piston rod extends in the horizontal direction, if a lateral load directed vertically downward is applied to the tip of the piston rod, the other end of the piston rod depends on the magnitude of the lateral load. The portion may be slightly displaced vertically upward within the cylinder tube.

  When such a situation occurs, the other end of the piston rod comes into contact with the side peripheral wall forming the inner hole, and as a result, there is a concern that a so-called stick-slip phenomenon may occur in which the piston rod is difficult to advance and retract. . Furthermore, when a larger load is applied, the piston rod may be permanently deformed.

  In addition, the fluid pressure cylinder is required to have less fluctuation along the circumferential direction of the piston rod while the piston rod is moving back and forth, in other words, to have excellent non-rotational accuracy. .

  In order to solve the above problems, for example, as described in Patent Document 1, a cylinder with a guide in which the piston rod and the guide rod are arranged in parallel by sandwiching the piston rod between the two guide rods is widely adopted. Has reached the point. In the cylinder with guide, two inner holes are provided in the vicinity of the inner hole into which the piston rod is inserted, and the guide rod is inserted into each inner hole through a bush so as to be able to advance and retract. Further, the tip portions of the piston rod and the guide rod that protrude from the respective inner holes are connected by a connecting member such as a plate. For this reason, the guide rod and the plate also move forward and backward following the forward and backward movement of the piston rod. .

  In this type of cylinder with guide, the piston rod is connected to the guide rod via the connecting member, so that displacement and deformation are less likely to occur even when a lateral load is applied. Further, since it is extremely difficult for the piston rod to rotate, there is an advantage that non-rotation accuracy is improved.

JP-A-9-303318

  By the way, if a cylinder with a guide as described above is used in an environment where droplet water scatters or an environment where water vapor is filled, droplet water or water vapor will enter the cylinder tube as the piston rod moves forward and backward. Infiltrate / discharge. Due to the entry and exit of such moisture, a lubricant (such as grease) interposed between the guide rod and the bush may flow out. In this case, since the frictional resistance between the guide rod and the bush increases, there is a concern that the lubrication between the two becomes poor and seizure occurs.

  In the cylinder with guide, copper or iron is selected as the bushing material in order to avoid the occurrence of seizure as much as possible. However, in this case, there is an aspect in which it is difficult to say that the corrosion resistance in an environment where water is present is good. In addition, although there are bushes made of resin, they have less wear resistance than metals.

  The present invention has been made in order to solve the above-described problems, and provides a guided cylinder capable of avoiding seizure even when a lubricant flows out and avoiding corrosion of the bush. For the purpose.

In order to achieve the above object, according to the present invention, the piston rod is moved while the second inner hole of the cylinder tube is moved forward and backward as the piston rod inserted into the first inner hole of the cylinder tube moves forward and backward. A cylinder with a guide, wherein the piston rod and the guide member are connected to each other through a connecting member.
The guide member is made of a metal material,
And having a bush provided in the second inner hole and provided with a through hole through which the guide member is passed,
The bush is made of a metal material, and an inner wall of the through hole is coated with a film made of nitride ceramics, carbide ceramics or diamond-like carbon.

Further, the present invention has a guide member for guiding the piston rod while moving the second inner hole of the cylinder tube forward and backward as the piston rod inserted into the first inner hole of the cylinder tube moves forward and backward. And a cylinder with a guide in which tip portions of the piston rod and the guide member are connected to each other via a connecting member,
The guide member is made of a metal material whose outer wall surface is coated with a film made of nitride ceramics, carbide ceramics, diamond-like carbon, or chrome plating,
And having a bush provided in the second inner hole and provided with a through hole through which the guide member is passed,
The bush is made of a metal material.

Furthermore, the present invention has a guide member for guiding the piston rod while the piston rod inserted into the first inner hole of the cylinder tube moves back and forth in the second inner hole of the cylinder tube. And a cylinder with a guide in which tip portions of the piston rod and the guide member are connected to each other via a connecting member,
The guide member is made of a metal material whose outer wall surface is coated with a film made of nitride ceramics, carbide ceramics, diamond-like carbon, or chrome plating,
And having a bush provided in the second inner hole and provided with a through hole through which the guide member is passed,
The bush is made of a metal material, and an inner wall of the through hole is coated with a film made of nitride ceramics, carbide ceramics or diamond-like carbon.

  In the present invention, since the metal material is selected as the material of the bush and the guide member, even if the cylinder with a guide is used in an environment where droplet water scatters or an environment where water vapor is filled, these bushes are used. And it can avoid that a guide member corrodes. That is, the corrosion resistance of the bush and the guide member is extremely good.

  Moreover, in the present invention, a coating is provided on the inner wall of the bush that is in sliding contact with the guide member, thereby providing lubricity. For this reason, the wear resistance of the bush and the guide member is improved, and it is possible to avoid the occurrence of seizure even when a bush made of stainless steel, which tends to seize as compared with copper or iron, is used.

  Alternatively, the outer wall surface of the guide member may be coated with nitride ceramics, carbide ceramics, diamond-like carbon, or chrome plating. Thereby, the corrosion resistance of the guide member is also improved. In addition, even when both the bush and the guide member are made of a metal material, the occurrence of seizure is further avoided due to the presence of the coating.

As a suitable example of the nitride ceramic used as the material of the coating film, any of CrN, TiN, TiCN, and TiAlN can be cited. Moreover, as a suitable example of carbide ceramics, either TiC or Cr ₂ C ₃ can be cited.

  In any case, stainless steel can be mentioned as a suitable example of the metal material constituting the guide member or the bush. Stainless steel has the advantage of very good corrosion resistance.

  The guide member and the bush may be made of another metal material, for example, aluminum or an aluminum alloy. In this case, it is possible to reduce the weight of the guide member and the bush, and thus the guide cylinder.

  According to the present invention, since the bush and the guide member are made of a metal material, even if the guided cylinder is used in an environment where droplet water scatters or an environment where water vapor is filled, Corrosion of the bush and the guide member can be avoided. This effect is particularly remarkable when stainless steel, aluminum, or an aluminum alloy is selected as the metal material.

  In addition, since lubricity is imparted by providing a film on at least one of the guide member and the inner wall of the bush, it is possible to ensure wear resistance of the bush and the guide member and to cause seizure. It can be avoided.

  Hereinafter, preferred embodiments of a cylinder with a guide according to the present invention will be described and described in detail with reference to the accompanying drawings.

  FIG. 1 shows a schematic overall cross-sectional view along the axial direction of the cylinder with guide according to the present embodiment. The cylinder 10 with a guide is provided in the vicinity of a cylinder tube 12, a piston rod 16 inserted in a central inner hole 14 provided in the cylinder tube 12 so as to be able to advance and retreat, and the central inner hole 14. The first and second guide rods 22 and 24 (both guide members) made of stainless steel are inserted into the first side inner hole 18 and the second side inner hole 20 so as to be able to advance and retract. One end portions of the piston rod 16, the first guide rod 22 and the second guide rod 24 protrude from the center inner hole 14, the first side inner hole 18 and the second side inner hole 20, respectively. The tip portions are connected to each other by a connecting plate 26 as a connecting member. FIG. 1 shows a state where the piston rod 16, the first guide rod 22, and the second guide rod 24 are located at the rearmost end.

  The central inner hole 14, the first side inner hole 18, and the second side inner hole 20 are provided so as to penetrate the cylinder tube 12. 1 are closed by the first cap member 28, the second cap member 30, and the third cap member 32. In addition, concave portions 34 and 36 are formed on the surfaces of the second cap member 30 and the third cap member 32 facing the first guide rod 22 and the second guide rod 24, respectively, so that the forward movement is performed to the foremost end. The front end surfaces of the first guide rod 22 and the second guide rod 24 are prevented from coming into contact with the second cap member 30 and the third cap member 32.

  The cylinder tube 12 has a first communication passage 38 that allows the first side inner hole 18 and the central inner hole 14 to communicate with each other, and a second communication passage 40 that allows the center inner hole 14 and the second side inner hole 20 to communicate with each other. And are provided. Further, the second side inner hole 20 communicates with an open port 42 which is engraved with a screw and opened to the atmosphere. That is, the first side inner hole 18, the center inner hole 14, and the second side inner hole 20 are open to the atmosphere via the open port 42.

  The port 44 communicating with the first side inner hole 18 is closed with a bolt 46.

  In the central inner hole 14, a first annular groove 48 is formed in the vicinity of the first communication path 38 and the second communication path 40, and a second annular groove 48 is slightly above the first annular groove 48 in FIG. 1. A groove 50 is provided. A seal member 52 having a substantially C-shaped cross section is fitted in the first annular groove 48, while an O-ring 54 is inserted in the second annular groove 50. A substantially disc-shaped closing member 56 is positioned so as to close the second annular groove 50.

  The piston rod 16 inserted into the central inner hole 14 has a small diameter portion 58 and a long large diameter portion 60 in order from the first communication passage 38 and the second communication passage 40 side to the connection plate 26 side. Of these, a substantially disc-shaped piston 62 is connected to the peripheral wall on the front end side of the small-diameter portion 58.

  The piston 62 is provided with a first storage annular groove 64 having an inverted L-shaped cross section on the end face facing the closing member 56. The first storage annular groove 64 is provided with a first rubber damper 66 having a reverse L-shaped cross section. The horizontal portion of the first rubber damper 66 is fitted into the horizontal portion of the first storage annular groove 64, thereby preventing the first rubber damper 66 from coming off from the first storage annular groove 64. ing. The tip end portion of the first rubber damper 66 slightly protrudes from the first storage annular groove 64. In addition, an O-ring 67 is accommodated in an annular recess provided in the side peripheral wall of the piston 62.

  A pressure receiving member 68 is sandwiched between the piston 62 and the large diameter portion 60. The small diameter portion of the pressure receiving member 68 is fitted into the through holes of the magnets 70a and 70b. By this fitting, the magnets 70 a and 70 b are held in the small diameter portion of the pressure receiving member 68.

  A screw portion is engraved in the vicinity of the upper opening of the central inner hole 14. The threaded portion of the fourth cap member 72 that closes the central inner hole 14 is screwed into the threaded portion. The upper end surface of the fourth cap member 72 protrudes from the central inner hole 14.

  Similar to the piston 62, a second storage annular groove 74 having an inverted L-shaped cross section is provided on the end surface of the fourth cap member 72 facing the pressure receiving member 68. Is provided with a second rubber damper 76 having an inverted L-shaped cross section. Similarly to the first rubber damper 66, the second rubber damper 76 is also housed in the second housing annular groove 74 and slightly protrudes from the second housing annular groove 74.

  An annular notch 77 is provided in a substantially middle part of the fourth cap member 72 along the axial direction of the piston rod 16 so as to face the piston rod 16, and a seal member 78 is accommodated in the annular notch 77. ing.

  An annular groove 79 is also formed in the side peripheral wall of the large diameter portion of the fourth cap member 72, and an O-ring 80 is inserted into the annular groove 79. Furthermore, a concave portion is provided on the upper end surface of the fourth cap member 72 protruding from the central inner hole 14, and a first scraper 81 that also functions as a seal is accommodated in the concave portion.

  On the other hand, a first bush 82a and a second bush 84a are positioned and fixed in the first side inner hole 18, and the first guide rod 22 is passed through the through holes of the first bush 82a and the second bush 84a. ing. Accordingly, when the first guide rod 22 moves back and forth, the side peripheral wall of the first guide rod 22 comes into sliding contact with the inner peripheral walls of the first bush 82a and the second bush 84a.

  Here, the inner wall portion of the first bush 82a and the side peripheral wall portion of the first guide rod 22 are enlarged and shown in FIG. As can be understood from FIG. 2, coatings 86 and 88 are coated on the side wall portion of the first guide rod 22 and the inner wall portion of the first bush 82 a, respectively.

As the material of these films 86 and 88, a material that is hard but excellent in lubricity, specifically, nitride ceramics, carbide ceramics, or diamond-like carbon (DLC) is selected. Suitable examples of nitride ceramics include CrN, TiN, TiCN, TiAlN and the like, and preferable examples of carbide ceramics include TiC, Cr ₂ C _{3 and the} like. It is not limited.

  The films 86 and 88 can be provided by, for example, an ion plating method, and the film thickness can be set to an extremely small value of about 2 to 5 μm.

  On the other hand, the coating 88 is coated on the inner peripheral wall of the second bush 84a in the same manner as the first bush 82a.

  As shown in FIG. 1, the first side inner hole 18 opens above the cylinder tube 12 in FIG. 1, and the second scraper 89 a is accommodated in the opening.

  The remaining second side inner hole 20 is configured in the same manner as the first side inner hole 18, and accordingly, the third bush and the fourth bush accommodated in the second side inner hole 20 are formed in the opening. The reference numerals of the third scraper accommodated are 82b, 84b, and 89b in which the suffix a of the reference numerals of the first bush 82a, the second bush 84a, and the second scraper 89a is replaced with b, and detailed description thereof is omitted. . Of course, the coatings 86 and 88 are also coated on the side peripheral wall of the second guide rod 24 and the inner peripheral walls of the third bushing 82b and the fourth bushing 84b accommodated in the second side inner hole 20 (FIG. 2). reference).

  In the above configuration, the cylinder tube 12 includes the first port 90 and the first passage 92 for supplying and discharging the pressure fluid to and from the first chamber formed between the closing member 56 and the piston 62, and the pressure receiving member. A second port 94 and a second passage 96 for supplying and discharging the pressure fluid are provided in the second chamber between 68 and the fourth cap member 72 (see FIG. 1).

  The connecting plate 26 is provided with a first through hole 98 and a second through hole 100, and bolts 102 and 104 passed through the first through hole 98 and the second through hole 100 are connected to the first guide rod 22. The first guide rod 22 and the second guide rod 24 are coupled to the coupling plate 26 by being screwed into the bolt holes at the tip of the second guide rod 24.

  The connecting plate 26 and the piston rod 16 are connected via a headless bolt 106 screwed into a bolt hole provided in the connecting plate 26 and a bolt hole provided in the end face of the piston rod 16. Yes.

  A displacement sensor (not shown) is installed on the outer wall of the cylinder tube 12.

  The cylinder 10 with guide according to the present embodiment is basically configured as described above, and the operation and effect thereof will be described next.

  The cylinder 10 with guide is installed in a work place where droplet water is scattered or water vapor is generated, for example, in a food processing line.

  In such a work place, when the piston rod 16 is lowered from the state shown in FIG. 1 to the state shown in FIG. 3, in other words, when the piston rod 16 is moved forward, the second port 94 is connected to the second port 94. Fluid pressure is supplied to the second chamber via the passage 96. Then, the pressure receiving member 68 is pressed by the fluid pressure, and as a result, the pressure receiving member 68 and eventually the piston rod 16 holding the pressure receiving member 68 are lowered, and finally, the small diameter portion 58 of the piston rod 16 is formed. The piston 62 held at the tip part descends.

  The piston 62 descends to the vicinity of the closing member 56. At this time, even when the lowering speed of the piston 62 is remarkably large and the first rubber damper 66 abuts against the closing member 56, the first rubber damper 66 functions as a cushioning material. The impact is greatly reduced.

  The pressure fluid in the first chamber is discharged to the outside of the cylinder tube 12 through the first passage 92 and the first port 90 as the piston 62 moves down.

  Further, following the lowering of the piston 62, the first guide rod 22 and the second guide rod 24 connected to the piston rod 16 through the connecting plate 26 are lowered. The air in the first side inner hole 18 and the second side inner hole 20 thus pressed is a chamber between the first cap member 28 and the closing member 56 in the first communication passage 38 and the central inner hole 14. The air is discharged to the atmosphere through the second communication path 40 and the open port 42.

  At this time, the side peripheral wall of the first guide rod 22 is in sliding contact with the inner peripheral walls of the first bush 82a and the second bush 84a, while the side peripheral wall of the second guide rod 24 is the third bush 82b and the fourth bush 84b. Touching the inner wall.

  On the other hand, when the piston rod 16 is raised from the state shown in FIG. 3 and restored to the state shown in FIG. 1 (the piston rod 16 is moved backward), fluid pressure is applied from the first port 90 to the first chamber via the first passage 92. Is supplied. The lower end surface of the piston 62 in FIG. 3 is pressed by the fluid pressure, so that the piston rod 16 finally rises. At this time, the pressure fluid in the second chamber is discharged to the outside of the cylinder tube 12 through the second passage 96 and the second port 94.

  When the piston 62 moves up, the first guide rod 22 and the second guide rod 24 connected to the piston rod 16 through the connecting plate 26 also move up. As a result, the atmosphere outside the cylinder tube 12, the droplet water DW and water vapor pass through the first communication path 38, the chamber between the first cap member 28 and the closing member 56 in the central inner hole 14, and the second communication. Through the passage 40 and the open port 42, the liquid is introduced into the first side inner hole 18 and the second side inner hole 20, and the droplet water DW and water vapor are side peripheral walls of the first guide rod 22 and the second guide rod 24. Adhere to. In this state, the side peripheral walls of the first guide rod 22 and the second guide rod 24 are in sliding contact with the inner peripheral walls of the first bush 82a to the fourth bush 84b.

  However, in the present embodiment, both the first guide rod 22 and the second guide rod 24 are made of stainless steel. Stainless steel exhibits significantly superior durability against water. That is, it exhibits excellent corrosion resistance. For this reason, it can avoid that the 1st guide rod 22 and the 2nd guide rod 24 corrode by the infiltrated droplet water DW and water vapor.

  In addition, when dust etc. are adhering to the side peripheral walls of the piston rod 16, the first guide rod 22 and the second guide rod 24, this dust etc. is caused by the first scraper 81, the second scraper 89a and the third scraper 89b. Detached. Further, even when the ascending speed of the piston 62 is remarkably large and the second rubber damper 76 is in contact with the fourth cap member 72, the second rubber damper 76 functions as a cushioning material. The shock at the time is greatly reduced.

  In the above operation, the lowering and raising of the piston rod 16 are monitored by the displacement sensor detecting that the magnets 70a and 70b are displaced following the piston rod 16.

  When the piston rod 16, the first guide rod 22 and the second guide rod 24 are lowered again, a part of the droplet water DW and the water vapor that have permeated into the first side inner hole 18 and the second side inner hole 20 are released. Outflow from port 42. At this time, since a part of the lubricant introduced into the first side inner hole 18 and the second side inner hole 20 is accompanied, the piston rod 16 repeats the advancing and retreating operation as described above. There is a concern that the lubricant may be washed away.

  However, in this case, as described above, the coatings 86 and 88 are coated on the side peripheral wall portions of the first guide rod 22 and the second guide rod 24 and the inner wall portions of the first bush 82a to the fourth bush 84b, respectively. (See FIG. 2). Since the lubricity is maintained by these films 86 and 88, it is possible to avoid the occurrence of seizure even if a large amount of lubricant is lost.

Here, various coatings with a film thickness of 2 to 3 μm are applied to both the plate member and the block member made of stainless steel, the plate has a load of 30 N (surface pressure 3.1 × 10 ⁻⁴ N / m ² ), and a moving distance of 50 m. FIG. 4 shows the result of investigating the change in the maximum height Rz (see JIS B0601) before and after sliding contact with the block member on the upper end surface of the member. From FIG. 4, it is clear that the change in Rz can be suppressed by providing a film, in other words, wear can be suppressed.

  Moreover, the change with time of the friction coefficient in this test was measured. The results are also shown in FIG. In this test, when no film was provided, the friction coefficient increased rapidly immediately after the start of the test, and abnormal friction noise was generated when the sliding distance exceeded 10 m. Even when the TiAlN film was provided, the friction coefficient increased, but no wear was observed as shown in FIG.

  From the test results shown in FIG. 4 and FIG. 5, the first guide rod 22, the second guide rod 24, and the first bush 82a to the fourth bush 84b are made of stainless steel that is more frequently baked than copper and iron. It is understood that even if the material is employed, lubricity is imparted by providing the coatings 86 and 88, and therefore, baking can be avoided.

  Further, for comparison, the first bushing 82a to the fourth bushing 84b are made of materials other than stainless steel, are not provided with the coating 88, and the first guide rod 22 and the second guide rod 24 are coated with chromium as the coating 86. A guided cylinder having the same configuration as the above-described guided cylinder 10 was prepared except that plating was provided. FIG. 6 shows a comparison of the performance of the various cylinders with guides configured as described above and the cylinder 10 with guides according to the present embodiment.

  In FIG. 6, “operation stability” is determined based on whether or not the stick-slip phenomenon is likely to occur, and “×” means that the stick-slip phenomenon is likely to occur and the operation stability is not good. In the order of “現象”, stick-slip phenomenon hardly occurs and the operational stability is good. The “lateral load resistance” is determined based on whether or not it is easily displaced by the above-described lateral load, and indicates that it is difficult to displace in the order of “×”, “Δ”, “◯”, and “◎”.

  Further, “plate tip deflection” indicates the amount of displacement in the vertical direction of the plate when the cylinder with guide is mounted so that the axial direction is horizontal, and “×”, “△”, “○” This means that the amount of displacement decreases in the order of “◎”. The remaining “non-rotating accuracy” indicates the magnitude of fluctuation in the rotational direction of the piston rod, and the amount of fluctuation decreases in the order of “×”, “△”, “○”, “◎”, in other words, non-rotating accuracy. Means improved.

  From FIG. 6, the first bushing 82 a to the fourth bushing 84 b, the first guide rod 22, and the second guide rod 24 are made of stainless steel, and the films 86 and 88 are formed on the sliding contact portions of each other, It is clear that the guided cylinder 10 having excellent performance can be configured.

  Thus, in this Embodiment, since the stainless steel is selected as a material of the 1st guide rod 22, the 2nd guide rod 24, and the 1st bush 82a-the 4th bush 84b, the droplet water DW scatters. Even when the cylinder 10 with a guide is used in an environment or an environment filled with water vapor, the first guide rod 22, the second guide rod 24, and the first bush 82a to the fourth bush 84b are corroded. Can be avoided.

  Further, since the side peripheral walls of the first guide rod 22 and the second guide rod 24 and the inner peripheral walls of the first bushing 82a to the fourth bushing 84b, that is, the sliding contact portions are coated with the films 86 and 88, Even if stainless steel, which is more susceptible to seizure than iron or copper, is selected as the material of the first guide rod 22, the second guide rod 24, and the first bush 82a to the fourth bush 84b, seizure is avoided. can do.

  In the above-described embodiment, the case where the coating 86 made of nitride ceramics, carbide ceramics, and diamond-like carbon is provided on the side peripheral walls of the first guide rod 22 and the second guide rod 24 is illustrated. As will be understood, a film 86 made of chrome plating may be formed instead.

  Further, there may be one guide rod or three or more guide rods.

  Furthermore, the first guide rod 22, the second guide rod 24, the first bush 82a, the second bush 84a, the third bush 82b, and the fourth bush 84b are formed of stainless steel. It is not limited to those made of stainless steel, and may be formed of a metal material. Other suitable examples include aluminum or aluminum alloys.

It is a schematic whole sectional view in alignment with the axial direction of the cylinder with a guide concerning this embodiment. It is a principal part expanded sectional view which expands and shows the guide rod and bush which comprise the cylinder with a guide of FIG. It is a schematic whole sectional view which shows the state which advanced the piston rod and guide rod which comprise the cylinder with a guide of FIG. 1 to the front end. It is a graph which shows the change of the maximum height Rz before and behind a sliding contact test. It is a graph which shows the time-dependent change of the friction coefficient in the case of a sliding contact test. It is a chart which shows the performance of each cylinder with a guide produced by changing the material of a bush.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Cylinder with guide 12 ... Cylinder tube 14, 18, 20 ... Inner hole 16 ... Piston rod 22, 24 ... Guide rod 26 ... Connection plate 28, 30, 32, 72 ... Cap member 38, 40 ... Communication path 42 ... Opening Port 56 ... Closing member 62 ... Piston 66, 76 ... Rubber damper 68 ... Pressure receiving member 70a, 70b ... Magnet 81, 89a, 89b ... Scraper 82a, 82b, 84a, 84b ... Bush 86, 88 ... Film 90, 94 ... Port 92, 96 ... passage DW ... droplet water

Claims (7)

A guide member that guides the piston rod while advancing and retracting the second inner hole of the cylinder tube as the piston rod inserted into the first inner hole of the cylinder tube moves forward and backward; The guide cylinder is a guide-equipped cylinder in which tip portions of the guide member are connected to each other via a connecting member,
The guide member is made of a metal material,
And having a bush provided in the second inner hole and provided with a through hole through which the guide member is passed,
A cylinder with a guide, wherein the bush is made of a metal material, and an inner wall of the through hole is coated with a film made of nitride ceramics, carbide ceramics, or diamond-like carbon. A guide member that guides the piston rod while advancing and retracting the second inner hole of the cylinder tube as the piston rod inserted into the first inner hole of the cylinder tube moves forward and backward; The guide cylinder is a guide-equipped cylinder in which tip portions of the guide member are connected to each other via a connecting member,
The guide member is made of a metal material whose outer wall surface is coated with a film made of nitride ceramics, carbide ceramics, diamond-like carbon, or chrome plating,
And having a bush provided in the second inner hole and provided with a through hole through which the guide member is passed,
The guide cylinder, wherein the bush is made of a metal material. A guide member that guides the piston rod while advancing and retracting the second inner hole of the cylinder tube as the piston rod inserted into the first inner hole of the cylinder tube moves forward and backward; The guide cylinder is a guide-equipped cylinder in which tip portions of the guide member are connected to each other via a connecting member,
The guide member is made of a metal material whose outer wall surface is coated with a film made of nitride ceramics, carbide ceramics, diamond-like carbon, or chrome plating,
And having a bush provided in the second inner hole and provided with a through hole through which the guide member is passed,
A cylinder with a guide, wherein the bush is made of a metal material, and an inner wall of the through hole is coated with a film made of nitride ceramics, carbide ceramics, or diamond-like carbon.   The guided cylinder according to any one of claims 1 to 3, wherein the nitride ceramic is one of CrN, TiN, TiCN, and TiAlN. The guided cylinder according to any one of claims 1 to 3, wherein the carbide ceramic is one of TiC and Cr ₂ C ₃ .   The cylinder with a guide according to any one of claims 1 to 5, wherein at least one of the guide member and the bush is made of stainless steel.   The cylinder with a guide according to any one of claims 1 to 5, wherein at least one of the guide member and the bush is made of aluminum or an aluminum alloy.

Images