JP2006105292A - Sealed structure and vacuum device using the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To prevent dropping of a packing while securing easiness in mounting and demounting the packing in maintenance with respect to a vacuum seal of a vacuum device having a sealed structure, a container and its cover body. <P>SOLUTION: This sealed structure for closing a first member and a second member by using the packing compressed to a first plane surface of the first member and a second plane surface of the second member, has a supporting means for determining a mounting position of the packing on the first or second plane surface, and a pressing means for pressing the packing in the direction approximately in parallel to the first or second plane surface. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a sealing structure, and particularly to a vacuum seal of a vacuum apparatus having a container and its lid, and more specifically to mounting of a packing.

  Conventionally, several packing structures for vacuum-sealing the contact surfaces of machine parts are known. In order to perform vacuum sealing in a vacuum container having a lid, it is common to place a packing on the contact surface between the lid and the container and apply pressure, thereby enabling the inside of the vacuum container to be kept airtight. . Hereinafter, the lid is a generic name including a door that opens and closes the container, and the vacuum container is a generic name including all devices that define a vacuum region. In some cases, an adhesive or grease is used as the structure of the packing. However, as a premise of the following explanation, these are not used for the contact surface of the packing. The reason for this is that the use of an adhesive contributes to the prevention of falling off, but the labor for replacement increases, and when grease is used, the inside of the tank is contaminated with grease vapor due to the relatively high vapor pressure of the grease. It is because it ends up.

  FIG. 5 shows a vacuum seal with an O-ring which is the most common packing. In the figure, a vacuum container 20, a lid 7, and an O-ring 21 are shown. 5 to 7, a is a schematic sectional view of the vacuum vessel 20, b is a schematic plan view of the lid 7, and c is an enlarged view of a broken line portion shown in a. The O-ring 21 has a ring shape with a circular cross section, and an elastic material such as an elastomer is used as the material thereof. The lid 7 of the vacuum vessel 20 is provided with an annular groove 22 that matches the diameter of the O-ring 21, and the O-ring 21 is fitted and fixed inside the annular groove 22. The vacuum vessel 20 has a contact surface 23 in contact with the lid 7, and the annular groove 22 is provided at a position facing the contact surface 23. The O-ring 21 fitted in the annular groove 22 is in close contact with the contact surface 23 and keeps the inside of the vacuum vessel 20 airtight.

  FIG. 6 shows an example of a vacuum seal using Kosan packing. The Kou Packing 1 has a mountain-shaped cross section, and an elastic material such as an elastomer is used as the material. In the lid 7 of the vacuum vessel 20, an annular groove 24 that matches the diameter of the ring of the mount packing 1 is machined, and this groove 24 is a dovetail with a narrow inlet. Since the shape of the dovetail matches the shape of the packing, there is no fear that the packing will fall off from the lid 7. Further, there is no risk of dropping even when the lid 7 is positioned on the top.

FIG. 7 shows another embodiment of the vacuum seal using the Kosan packing 1. In order to reduce the cost of grooving and facilitate the removal and installation of the packing, a method of attaching and fixing packing pressers 3 and 25, which are members for pressing the packing, to the lid 7 will be shown. The packing retainers 3 and 25 are disposed on the inside and outside of the mount packing 1 with the mount mount 1 interposed therebetween, and are fixed by screws 5 or the like. The structure of the packing presser is disclosed in Patent Document 1, for example. In Patent Document 1, a height difference is provided in the packing presser disposed in a face-to-face manner to form a packing escape passage, which facilitates the replacement of the packing and improves the life.
Utility model registration No. 2520842

  In the case of the vacuum seal using the packing shown in FIG. 5, there is a problem that the O-ring 21 is easily detached from the annular groove 22. When the inside of the vacuum vessel 20 in the figure is evacuated by an exhaust system (not shown), the O-ring 21 is crushed by the pressure difference and closely contacts the lid 7 and the vacuum vessel 20. Since the elastomer or the like used as the material of the O-ring 21 has strong adhesiveness, the O-ring 21 adheres to the contact surface 23 when the lid 7 is opened and falls off the annular groove 22. In particular, after maintaining the vacuum state for a long time, the O-ring 21 strongly adheres to the contact surface 23, and thus the O-ring 21 is frequently dropped. Moreover, it can be easily imagined that this tendency is further strengthened in an apparatus having a structure with the lid 7 on top.

  The vacuum seal in which the Koyama packing is inserted into the dovetail groove shown in FIG. 6 was developed to compensate for the defect of the structure shown in FIG. 5, which contributes to preventing the packing from falling off. Difficult to attach and detach during maintenance. For example, a great deal of labor is required to insert the Kosan packing 1 having a certain hardness. Further, when the lid 7 is enlarged, there is a problem that a large machine tool is required to process the dovetail groove 24.

  In the case of the vacuum seal using the packing pressers 3 and 25 shown in FIG. 7, the detachability at the time of maintenance, which was the problem of the structure shown in FIG. 6, is solved. When the inside of the vacuum vessel 20 is evacuated, all of the force generated by the differential pressure inside and outside acts on the mount packing 1 and changes to a force that crushes the mount mount 1. Since the packing is an elastic body, permanent deformation does not occur in a short time range, and the applied force generates internal stress in the Kozan packing 1 and exerts a force on the vacuum vessel 20, the lid 7, and the packing retainers 3 and 25. . Since the vacuum vessel 20 and the lid 7 are high in strength, there is no problem. However, since the packing retainers 3 and 25 are fixed to the lid by screwing, the force capable of maintaining the interval is weak, and the restoring force of the packing is superior to this force. In this case, the gap between the packing retainers 3 and 25 is widened, and the packing is dropped. As schematically shown in FIG. 7c, there is a gap between the packing pressers 3 and 25 and the screw 5, and the packing pressers 3 and 25 are moved by this gap distance. In fact, the packing is frequently dropped for this reason. If the size of the door increases due to the increase in size of the device, there is a problem that the force generated by the difference between the atmospheric pressure and the pressure inside the tank increases and the frequency of dropout increases.

The measures for preventing the packing from falling off as described above have also become difficult to prevent as the size of the lid increases. At the same time, it is no longer easy to reattach when it falls off.
Further, in the case of the packing presser described in Patent Document 1, since the protruding distance in the clamping direction of the packing tip is determined in advance, depending on the packing, the force for clamping the packing is too strong, causing cracking and peeling. If the pressure is too weak, the packing may fall off.

The present invention relates to a mechanism that prevents dropping while securing ease of attaching and detaching packing during maintenance.
According to a first aspect of the present invention, there is provided a first member and a second member using a packing compressed into a first plane of the first member and a second plane of the second member. A sealing structure for sealing, comprising: a supporting means for determining the mounting position of the packing on the first or second plane; and a pressing means for pressing the packing in a direction substantially parallel to the first or second plane. It is a sealed structure. Here, the supporting means is composed of a packing presser fixed to at least one of the first and second planes and sandwiching the packing, and the pressing means presses the packing through the packing presser. Further, the pressing means was a screw attached to the packing presser. The pressing means is a spring, a seat connected to one end of the spring and fixedly disposed with respect to the packing presser, and a pressing tool connected to the other end of the spring and pressing the packing.

  According to a second aspect of the present invention, the first member and the second member are bonded to each other by using the packing compressed into the first plane of the first member and the second plane of the second member. In the sealing structure for sealing, the pressing means is an insertion member that is inserted into the packing and the packing presser. Here, the insertion member was a wire. Further, at least one end of the insertion member is bent.

  According to a third aspect of the present invention, there is provided a sealing structure for the first or second side, a first member made of a container, a second member made of a lid for the container, and an annular packing surrounding the opening of the container It is the vacuum device which consists of. Further, the pressing means is arranged on the atmosphere side of the vacuum device.

  According to a fourth aspect of the present invention, there is provided a first member having a first plane, a second member having a second plane, a packing compressed by the first and second planes, the first or second plane. A sealing method for sealing a first member and a second member using a supporting means for determining a packing mounting position on a plane and a pressing means for pressing the packing, wherein the first or second member is sealed by the pressing means. In this sealing method, the packing is pressed in a direction substantially parallel to the plane. Here, the supporting means is composed of a packing presser fixed to at least one of the first and second planes and sandwiching the packing, and the pressing means penetrates the packing presser and presses the packing. Further, the pressing means has at least a spring and presses the packing by the restoring force of the spring.

  According to a fifth aspect of the present invention, there is provided a vacuum sealing method using the sealing method of the fourth aspect, wherein the first member is a container, the second member is a lid for the container, This is a vacuum sealing method in which a space defined by the container and the lid is evacuated by an exhaust system provided in the lid.

  By providing the means for pressing the packing from the side according to the present invention, it is possible to prevent the packing from falling off while ensuring detachability during maintenance.

Hereinafter, the first embodiment of the present invention will be described with reference to FIG. 1 and FIG.
FIG. 1 shows a part of the annular packing, and it is held by the lid in the form of being sandwiched between two packing pressers arranged at the outer peripheral position and the inner peripheral position as in the conventional example shown in FIG. As the annular packing, the Kouyama packing 1 is used, but the present invention is not limited to this, and an O-ring packing having a semicircular cross section or an O-ring having a circular cross section may be used. The ring shape is not limited to a quadrangle, and may be appropriately selected according to the shape of the vacuum vessel, such as a circle or a polygon. The first embodiment is characterized in that a required number of female screws 2 are machined on the packing retainer 4 disposed at the outer peripheral position of the Kozan packing 1. What is necessary is just to select the process location of the internal thread 2 suitably. The packing retainer 4 at the outer peripheral position in which a necessary number of female screws are processed is assembled by being fixed to the lid 7 with a screw 5 or the like as in the prior art. After that, the fixing screw 6 is screwed into the female screw 2 and pushed into the mount packing 1 by about several mm. As a result, even if the packing retainers 3 and 4 are separated, the packing is not dropped until the distance at which the fixing screw is screwed.

  In the embodiment, the number of parts in the vacuum chamber is prevented from increasing by processing the female screw 2 on the packing retainer 4 at the outer peripheral position. However, even if the female screw 2 is processed on the packing retainer 3 at the inner peripheral position. Good. However, there is also an effect that the position of the fixing screw 6 can be adjusted while the inside of the vacuum vessel is kept in a vacuum state by processing the internal thread on the packing retainer 4 at the outer peripheral position.

  The embodiment is not a means of changing the packing presser to a strong member, but merely adding a simple structure of providing a means for screwing from the side, so that the packing can be removed while maintaining detachability during maintenance. It became possible to solve the problem. In other words, since the conventional mechanism is merely provided with screwing means, it is possible to obtain an effect at low cost while ensuring workability during maintenance. Moreover, since it is not the protrusion part previously provided by welding etc., there exists an effect that the distance of screwing can be finely adjusted according to packing.

FIG. 3 shows a second embodiment of the present invention, and the same parts as those in FIG. 1 and FIG. The first embodiment is a method in which the packing is pressed in advance with a fixing screw, but the second embodiment prevents the packing from falling off by dividing the seat 8 and the pusher 10 and inserting a spring 9 between them. It is characterized by doing.
By using a seat and a spring, even if there is a gap around the packing due to permanent deformation of the packing or a gap in the packing presser, the presser fitting always keeps contact with the packing with the force of the spring. Dropping can be prevented with a small force that does not cause permanent deformation. Further, even when the door is sucked, the packing is not partially deformed.
In the second embodiment, in addition to the effect of the first embodiment, the function of preventing the packing from falling off is further improved by using a spring.

  FIG. 4 shows a third embodiment of the present invention, and the same parts as those in FIGS. The third embodiment is characterized in that a wire 11 made of a wire material such as a metal is disposed so as to penetrate the mount packing 1, the packing retainer 4 at the outer peripheral position, and the packing retainer 3 at the inner peripheral position. If the wire 11 is bonded or welded to the mount packing 1 and the wire 11 is inserted into a hole provided in the packing presser 3 and both ends thereof are bent, the dropping of the packing can be prevented.

  In the embodiment, the packing material is an elastomer such as rubber, but it is also possible to use metal or fluorine resin. For example, in a device with discharge, such as a sputtering device, in order to prevent the external emission of noise, a packing having a metal mesh on the outer periphery of a sponge having a circular cross section is used. In this case, since the packing is soft, it is particularly difficult to hold it on a vertical surface, and as a countermeasure, it is screwed at a constant interval, but there is a problem that it will sag for a long time. The present invention is also effective in a packing with such a wire mesh, and it is possible to suppress sagging by pressing from the side.

  In the above embodiment, a vacuum device that evacuates the inside of the container has been described as the most preferable specific example. However, the packing mounting structure according to the present invention, that is, the sealing structure, is separated from the container by an external force. A sealing device that seals the lid (may be a device that pressurizes the inside of the container, or may be a device that is only intended to be sealed without adjusting the pressure inside the container), or a container The present invention can also be applied to an apparatus configured to tightly seal or seal two members that do not form the body.

Schematic diagram of a first embodiment of a packing presser according to the present invention First embodiment schematic cross-sectional view of a packing presser according to the present invention Second embodiment schematic sectional view of a packing presser according to the present invention 3 is a schematic sectional view of a third embodiment of a packing presser according to the present invention. Figure showing a conventional O-ring seal The figure which shows the conventional Kosan packing seal 1 The figure which shows the conventional Kosan packing seal 2

Explanation of symbols

1 Kosan packing
2 Female thread
3 Inner packing holder
4 Outer packing holder
5 Screw
6 Fixing screw
7 lid
8 seats
9 Spring
10 Press
11 Wire
20 Vacuum container
21 O-ring
22 groove
23 Hit surface
24 groove
25 Outer packing holder

Claims (13)

A sealing structure that seals the first member and the second member using a packing that is compressed into a first plane that the first member has and a second plane that the second member has. ,
And a supporting means for determining the mounting position of the packing on the first or second plane, and a pressing means for pressing the packing in a direction substantially parallel to the first or the second plane. Characteristic sealed structure. The sealed structure according to claim 1, further comprising:
The support means comprises a packing presser fixed to at least one of the first and second planes and sandwiching the packing;
A sealing structure characterized in that the pressing means has a configuration for passing through the packing press and pressing the packing. The sealing structure according to claim 2,
The sealing structure, wherein the pressing means is a screw attached to the packing presser. The sealing structure according to claim 2,
The pressing means is
A sealing structure comprising: a spring; a seat connected to one end of the spring and fixedly disposed to the packing retainer; and a pusher connected to the other end of the spring and pressing the packing. A sealing structure that seals the first member and the second member using a packing that is compressed into a first plane that the first member has and a second plane that the second member has. ,
A sealing structure comprising: a packing presser fixed to at least one of the first and second planes and sandwiching the packing; and an insertion member inserted through the packing and the packing presser. The sealed structure according to claim 5,
The sealing structure, wherein the insertion member is a wire. The sealed structure according to claim 5 or 6,
A sealing structure, wherein at least one end of the insertion member is bent.   The hermetic structure according to any one of claims 1 to 7, the first member comprising a container, the second member comprising a lid for the container, and the annular surrounding the opening of the container Vacuum device consisting of packing. The vacuum apparatus according to claim 8, wherein
The pressing means is
A vacuum apparatus, which is disposed on the atmosphere side of the vacuum apparatus. A first member having a first plane; a second member having a second plane; a packing compressed by the first and second planes; the packing on the first or second plane A sealing method for sealing the first member and the second member using a supporting means for determining the mounting position of the first member and a pressing means for pressing the packing,
A sealing method, wherein the packing is pressed in a direction substantially parallel to the first or second plane by the pressing means. The sealing method according to claim 10, wherein the support means includes a packing presser fixed to at least one of the first and second planes and sandwiching the packing.
The sealing method, wherein the pressing means presses the packing through the packing presser. The sealing method according to claim 10,
The pressing means has at least a spring,
A sealing method, wherein the packing is pressed by a restoring force of a spring. A vacuum sealing method using the sealing method according to any one of claims 10 to 12, wherein the first member comprises a container, and the second member comprises a lid for the container, A vacuum sealing method, wherein a space defined by the container and the lid is evacuated by an exhaust system provided in the container or the lid.

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