JP2006100755A5 - - Google Patents

Claims (19)

A substrate processing apparatus comprising a processing chamber for storing and processing a substrate, and a heating device having a heating element and heating the processing chamber by the heating element,
The heating element is configured in a meandering manner, and has a plurality of heating elements, the upper end of each heating element is fixed to a support, and the lower end of each heating element is made movable in the vertical direction to generate heat. A substrate processing apparatus, wherein an upper end of a body and a lower end of another heating element are arranged close to each other, and an intermediate portion of each heating element is separated from an insulator. There are a plurality of serpentine heating elements, the upper end of each heating element is fixed to the support, the lower end of each heating element is movable in the vertical direction, the upper end of the heating element and other heating elements An electric heater for a substrate processing apparatus, which is disposed close to a lower end of the body, and an intermediate portion of each heating element is separated from an insulator. 3. The electric heater for a substrate processing apparatus according to claim 2, wherein the lower end is separated from the insulator with respect to the upper end of the heating element. The electric heater for a substrate processing apparatus according to claim 2 or 3, wherein a bent portion is formed at an upper end of the heating element, and the bent portion is hooked on a support. The electric heater for a substrate processing apparatus according to claim 4, wherein the bent portion is bent at a substantially right angle, and a hooking portion of the support is formed at a substantially right angle to receive the bent portion. The hook portion is substantially parallel to the lower wall portion and the lower wall portion where the bent portion is hooked, and prevents the upper wall portion and the bent portion from falling off in the horizontal direction. 6. The electric heater for a substrate processing apparatus according to claim 5, further comprising: a horizontal wall portion that hangs down from an upper wall portion for performing the operation, wherein the lower wall portion is separable from the upper wall portion and the horizontal wall portion. 7. The substrate processing apparatus according to claim 4, wherein a first insulating piece for preventing a short circuit of the heating element between the upper release slits is interposed in the bent portion of the upper release slit of the heating element. Electric heater. The electric heater for a substrate processing apparatus according to claim 2, wherein the support for fixing the upper end of the heating element passes through a lower release slit of the heating element. The electric heater for a substrate processing apparatus according to claim 8, wherein the support passes through an insulating piece interposed between the heating element and the insulator. The lower end side of the heating element is held by an insulator in such a manner that the lower fixed body penetrates the slit, is movable in the longitudinal direction of the slit, and restricts movement in the vertical direction of the slit. The electric heater for substrate processing apparatuses as described. The electric heater for a substrate processing apparatus according to any one of claims 2 to 10, wherein the lower end of the upper heating element is overlapped with a support supporting the upper end of the lower heating element in a horizontal direction. The curved part is formed in the upper part side of a heat generating body so that a part of heat generating body may hang down, providing the offset distance with respect to the heat radiating side between the upper end and lower end of a heat generating body. An electric heater for a substrate processing apparatus as described in 1. The electric heater for a substrate processing apparatus according to any one of claims 2 to 11, wherein an intermediate portion in the vertical direction of the heating element is curved so as to protrude to the side opposite to the insulator. The substrate processing apparatus provided with the electric heater for substrate processing apparatuses in any one of Claims 2-13. There are a plurality of serpentine heating elements, the upper end of each heating element is fixed to the support, the lower end of each heating element is movable in the vertical direction, the upper end of the heating element and other heating elements A structure for holding a heating element in an electric heater for a substrate processing apparatus, which is arranged close to a lower end of the body and separates an intermediate portion of each heating element from an insulator. A method of manufacturing a semiconductor device using the substrate processing apparatus according to claim 1,
Loading the substrate into the processing chamber;
Heat treating the substrate in the processing chamber with the heating element;
A method of manufacturing a semiconductor device, comprising a step of extracting the heat-treated substrate. A processing chamber that houses and processes the substrate; and a heating device that has a heating element and heats the processing chamber by the heating element, wherein the heating element is held only at one end by a holding portion, at least a part of which is A substrate processing apparatus formed so as to be convex toward the substrate. A processing chamber for storing and processing a substrate; and a heating device that includes a heating element and heats the processing chamber by the heating element. The heating element is held by a holding portion at one end, and the upper side of the heating element. A substrate processing apparatus in which the lower end of the heating element is separated from the insulator rather than the end. A serpentine heating element and a plurality of holding parts, the upper end of the heating element is held by the first holding part, and the lower end of the heating element is brought into contact with or close to the second holding part; A structure for holding the heating element in the electric heater for the substrate processing apparatus, wherein the intermediate part of the heating element is separated from the insulator.