JP2006087974A - Micro channel substrate and its manufacturing method - Google Patents
Micro channel substrate and its manufacturing method Download PDFInfo
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- JP2006087974A JP2006087974A JP2004273140A JP2004273140A JP2006087974A JP 2006087974 A JP2006087974 A JP 2006087974A JP 2004273140 A JP2004273140 A JP 2004273140A JP 2004273140 A JP2004273140 A JP 2004273140A JP 2006087974 A JP2006087974 A JP 2006087974A
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本発明は微小流路を有する基板およびその製造方法に関するものである。より詳細には、医療、生化学、創薬、有機合成などの分野において微小量の流体を操作するために用いられる微小流路を有する基板とその製造方法に関する。 The present invention relates to a substrate having a microchannel and a method for manufacturing the same. More specifically, the present invention relates to a substrate having a microchannel used for manipulating a minute amount of fluid in fields such as medicine, biochemistry, drug discovery, and organic synthesis, and a method for manufacturing the same.
従来、微小流路を有する基板はエッチングや切削やPDMSを用いたモールディング、キャスティングなどで作成される。従来手法により製造される微小流路構造の例を図１に示す。基板102上に流路104を作成する方法に、石英基板に溝を作る方法による流路作成、樹脂を用い流路を残してモールディング、キャスティングによる流路形成がある。 Conventionally, a substrate having a micro flow path is formed by etching, cutting, molding using PDMS, casting, or the like. An example of a microchannel structure manufactured by a conventional method is shown in FIG. As a method of creating the flow path 104 on the substrate 102, there are a flow path creation by a method of forming a groove in a quartz substrate, a flow path formation by molding and casting while leaving a flow path using a resin.
ガラス基板や石英基板に対して流路を形成する構造の一例を説明する。基板102上に溝状に流路104をエッチングや切削などの方法で作成する。問題点はレジスト処理やエッチング処理における処理時間がかかることや工数が増えることである。マイクロミルを利用した切削などの方法も切削処理において時間がかかることや切削工具の摩耗による精度低下などの問題点がある。（特許文献１） An example of a structure for forming a flow path for a glass substrate or a quartz substrate will be described. A channel 104 is formed in a groove shape on the substrate 102 by a method such as etching or cutting. The problem is that the processing time in the resist process and the etching process is long and the man-hour is increased. Cutting using a micromill also has problems such as time-consuming cutting processing and reduced accuracy due to wear of the cutting tool. (Patent Document 1)
樹脂基板に対して流路形成する構造の一例を説明する。基板102は流路104を備えた状態で、樹脂を使いモールディングまたはキャスティングにより作成される。流路孔103を備えた蓋板101を基板102に接合することで微小流路基板を作成する。本方式は型を作成するのに時間がかかるといった問題点がある。（特許文献２）
微小流路基板を作成する従来の方法では、利用者が手にするまでに２週間〜１ヶ月の微小流路作成時間がかかる、設計の変更に柔軟に対応できないといった課題がある。 In the conventional method of creating a microchannel substrate, there is a problem that it takes two weeks to one month to create a microchannel before the user has it, and the design change cannot be flexibly handled.
上記課題を解決するために、本発明の請求項１記載の微小流路基板は、切削やエッチングによる手法ではなく、基板上にマイクロディスペンサでPDMSやエポキシ樹脂やアクリル樹脂やガラスペーストを土手状に盛り上げ硬化し流路壁を形成し、蓋板で上部を覆う構造とすることで流路を形成する。 In order to solve the above-mentioned problem, the micro-channel substrate according to claim 1 of the present invention is not a method of cutting or etching, but a PDMS, an epoxy resin, an acrylic resin, or a glass paste is formed on a bank with a micro dispenser. The flow path is formed by forming a flow path wall by bulging and curing and covering the upper part with a cover plate.
請求項２に記載の発明は、請求項１に記載の微小流路基板の基板と蓋板の間にスペーサをいれた構成である。 The invention described in claim 2 has a configuration in which a spacer is inserted between the substrate and the cover plate of the microchannel substrate described in claim 1.
請求項３に記載の発明は、請求項１または請求項２に記載の微小流路基板の基板と蓋板は、流路壁の接着力により接合されている。 According to a third aspect of the present invention, the substrate and the cover plate of the microchannel substrate according to the first or second aspect are joined by the adhesive force of the channel wall.
請求項４に記載の発明は、請求項１または請求項２に記載の微小流路基板の流路壁は弾力性もしくは塑性がある。 According to a fourth aspect of the present invention, the flow path wall of the micro flow path substrate according to the first or second aspect is elastic or plastic.
請求項５に記載の発明は、請求項１または請求項２に記載の微小流路基板の基板と蓋板は、接着剤により接合されている。 According to a fifth aspect of the present invention, the substrate and the cover plate of the microchannel substrate according to the first or second aspect are joined by an adhesive.
請求項６に記載の発明は、請求項１または請求項２に記載の微小流路基板の基板と蓋板は、ボルト・ナットにより接合されていることで、ボルト・ナットを操作することで基板と蓋板を取り外し分解できる。 According to the sixth aspect of the present invention, the substrate and the cover plate of the micro-channel substrate according to the first or second aspect are joined by a bolt / nut so that the substrate can be operated by operating the bolt / nut. And the cover plate can be removed and disassembled.
請求項７に記載の発明は、請求項１または請求項２に記載の微小流路基板の基板と蓋板は、リベットにより接合されている。 According to a seventh aspect of the present invention, the substrate and the cover plate of the microchannel substrate according to the first or second aspect are joined by rivets.
請求項８に記載の発明は、請求項１または請求項２に記載の微小流路基板の基板と蓋板は、治具（例えばクリップ）により接合されている。治具を操作することで基板と蓋板を取り外し分解できる。 According to an eighth aspect of the present invention, the substrate and the cover plate of the microchannel substrate according to the first or second aspect are joined by a jig (for example, a clip). The substrate and the cover plate can be removed and disassembled by operating the jig.
請求項９に記載の発明は、マイクロディスペンサでPDMSやエポキシ樹脂やアクリル樹脂やガラスペーストを土手状に盛り上げ硬化することで流路壁を形成する工程を特徴とする微小流路形成方法。 The invention according to claim 9 is a method for forming a microchannel, characterized in that a channel wall is formed by raising and curing PDMS, epoxy resin, acrylic resin or glass paste in a bank shape with a microdispenser.
本微小流路と微小流路製造法を利用することで、硬化接着に要する時間に左右されるがおよそ１日〜２日で微小流路基板が作成できる、その場で柔軟に研究試作段階に必要な試行錯誤と頻繁な修正設計変更に対応できる、少量多品種生産を容易に実現することが可能となる。 By using this micro-channel and micro-channel manufacturing method, the micro-channel substrate can be created in about 1 to 2 days, depending on the time required for curing and bonding. It is possible to easily realize small-quantity, multi-product production that can cope with necessary trial and error and frequent modification design changes.
流路壁に弾性もしくは塑性のある素材を用いることで平行度や平坦度に左右されることなく液漏れのない微小流路を形成することができる。 By using an elastic or plastic material for the flow path wall, it is possible to form a micro flow path free from liquid leakage without being affected by parallelism or flatness.
図２に、本発明である微小流路基板と基板製造方法の概略図を示す。図２(a)は斜視図であり、図２(b)は図２(a)の断面Aにおける断面図である。図２に示すように本発明では基板301上に流路壁のパターンを、例えばXYステージ303のついたマイクロディスペンサ304などで作画しながら樹脂やガラスペーストを盛ることで流路壁302を形成する。 FIG. 2 shows a schematic diagram of a microchannel substrate and a substrate manufacturing method according to the present invention. 2 (a) is a perspective view, and FIG. 2 (b) is a cross-sectional view taken along a cross-section A in FIG. 2 (a). As shown in FIG. 2, in the present invention, a flow path wall 302 is formed by depositing a resin or glass paste while drawing a flow path wall pattern on a substrate 301 with, for example, a micro dispenser 304 with an XY stage 303. .
図３と図４と図５の図面を参照しながら第１の微小流路の説明をする。微小流路は、流路孔406を備え、流体を流路孔から入出力する機能をもつ。流路孔406は流路403に接続され、流路403は、例えばYの字型をし、流体の反応を行うなどための構造を持つ。基板401と蓋板405を接合するために流路壁402に接着性を持たせているのが特徴である。スペーサ404は流路壁403を確保するために設置されている。 The first microchannel will be described with reference to FIGS. 3, 4, and 5. The microchannel has a channel hole 406 and has a function of inputting and outputting fluid from the channel hole. The channel hole 406 is connected to the channel 403, and the channel 403 has, for example, a Y shape, and has a structure for performing a fluid reaction. In order to join the substrate 401 and the cover plate 405, the flow path wall 402 is provided with adhesiveness. The spacer 404 is installed to secure the flow path wall 403.
図３と図６と図７の図面を参照しながら第２の微小流路の説明をする。微小流路の機能は第１の微小流路と同様である。基板401上に流路壁402を盛り流路403を形成する。基板401と蓋板405は接着剤407により接合されているのが特徴である。 The second microchannel will be described with reference to FIGS. 3, 6, and 7. The function of the microchannel is the same as that of the first microchannel. A flow path wall 402 is formed on a substrate 401 to form a flow path 403. The substrate 401 and the cover plate 405 are characterized by being bonded by an adhesive 407.
図３と図８の図面を参照しながら第３の微小流路の説明をする。微小流路の機能は第１の微小流路と同様である。基板401上に流路壁402を盛り流路403を形成する。基板401と蓋板408はボルト・リベット穴409を貫通するボルト・ナットやリベットにより接合されているのが特徴である。 The third microchannel will be described with reference to FIGS. 3 and 8. The function of the microchannel is the same as that of the first microchannel. A flow path wall 402 is formed on a substrate 401 to form a flow path 403. The substrate 401 and the cover plate 408 are characterized by being joined by bolts / nuts or rivets that penetrate the bolt / rivet holes 409.
図３と図９の図面を参照しながら第４の微小流路の説明をする。微小流路の機能は第１の微小流路と同様である。基板401上に流路壁402を盛り流路403を形成する。基板401と蓋板405は治具410により接合されているのが特徴である。 The fourth microchannel will be described with reference to FIGS. 3 and 9. The function of the microchannel is the same as that of the first microchannel. A flow path wall 402 is formed on a substrate 401 to form a flow path 403. The substrate 401 and the cover plate 405 are characterized by being joined by a jig 410.
図１０に微小流路の製造手順その１を示す。１．基板上に流路壁をマイクロディスペンサで描画する。スペーサを設置し基板と蓋板の間で流路が確保されるようにする。蓋板を設置し流路壁を硬化させ、基板と蓋板を接合する。 FIG. 10 shows the first manufacturing procedure of the microchannel. 1. A channel wall is drawn on the substrate with a microdispenser. Spacers are installed to ensure a flow path between the substrate and the cover plate. A lid plate is installed, the flow path wall is cured, and the substrate and the lid plate are joined.
図１１に微小流路の製造手順その２を示す。基板上に流路壁をマイクロディスペンサで描画する。流路壁を硬化し、スペーサを設置する。基板上に接着剤を塗布し蓋板を設置し、接着剤を硬化させ、基板と蓋板を接合する。 FIG. 11 shows a second manufacturing procedure of the microchannel. A channel wall is drawn on the substrate with a microdispenser. Harden the channel walls and install spacers. An adhesive is applied onto the substrate, a lid plate is installed, the adhesive is cured, and the substrate and the lid plate are joined.
図１２に微小流路の製造手順その３を示す。基板上に流路壁をマイクロディスペンサで描画する。流路壁を硬化させる。スペーサを設置する。蓋板を設置し、ボルト・ナットまたはリベットまたは治具などで基板と蓋板を接合する。 FIG. 12 shows Part 3 of the manufacturing procedure of the microchannel. A channel wall is drawn on the substrate with a microdispenser. Harden the channel walls. Install spacers. Install the cover plate and join the substrate and cover plate with bolts, nuts, rivets or jigs.
本発明は、微小流路を必要とするユーザ自身が手軽に微小流路の製造を短時間かつ低コストででき、なおかつ、設計変更に即時柔軟に対応できるという点で従来製造方法にはない特徴がある。よって研究試作を行う用途や少量多品種を必要とする用途の期待に応えうるため、利用の可能性は大きいと思われる。 The present invention is a feature that is not found in the conventional manufacturing method in that the user who needs the micro-channel can easily manufacture the micro-channel in a short time and at a low cost, and can respond flexibly to a design change immediately. There is. Therefore, the possibility of use seems to be great because it can meet the expectation of the use for research trial manufacture and the use that requires a small variety of products.
１０１ 蓋板 （材質：ガラス、樹脂）
１０２ 基板 （材質：ガラス、樹脂）
１０３ 流路孔
１０４ 流路
３０１ 基板 （材質：ガラス、アクリル樹脂）
３０２ 流路壁 （材質：PDMS、エポキシ樹脂、アクリル樹脂、ガラスペースト）
３０３ XYステージ
３０４ マイクロディスペンサ
４０１ 基板 （材質：ガラス、アクリル樹脂）
４０２ 流路壁 （材質：PDMS、エポキシ樹脂、アクリル樹脂、ガラスペースト）
４０３ 流路
４０４ スペーサ
４０５ 蓋板 （材質：ガラス、アクリル樹脂）
４０６ 流路孔
４０７ 接着剤 （材質：PDMS、エポキシ樹脂、アクリル樹脂）
４０８ ボルト・リベット用穴付き蓋板 （材質：ガラス、アクリル樹脂）
４０９ ボルト・リベット穴
４１０ 治具（クリップ）
101 Lid (Material: Glass, Resin)
102 Substrate (Material: Glass, Resin)
103 channel hole 104 channel
301 Substrate (Material: Glass, Acrylic resin)
302 Channel wall (Material: PDMS, epoxy resin, acrylic resin, glass paste)
303 XY stage 304 Micro dispenser
401 substrate (material: glass, acrylic resin)
402 Channel wall (Material: PDMS, epoxy resin, acrylic resin, glass paste)
403 Flow path 404 Spacer 405 Cover plate (Material: Glass, Acrylic resin)
406 Channel hole 407 Adhesive (Material: PDMS, epoxy resin, acrylic resin)
408 Cover plate with holes for bolts and rivets (Material: glass, acrylic resin)
409 Bolt / Rivet hole 410 Jig (clip)
Claims (9)
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| JP2004273140A JP2006087974A (en) | 2004-09-21 | 2004-09-21 | Micro channel substrate and its manufacturing method |
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| JP2004273140A JP2006087974A (en) | 2004-09-21 | 2004-09-21 | Micro channel substrate and its manufacturing method |
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| JP2006087974A true JP2006087974A (en) | 2006-04-06 |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008246348A (en) * | 2007-03-29 | 2008-10-16 | Fujifilm Corp | Microchemical chip and its manufacturing method |
| JP2013170858A (en) * | 2012-02-20 | 2013-09-02 | Sumitomo Bakelite Co Ltd | Manufacturing method of micro flow channel chip, and micro flow channel chip |
| US9523124B2 (en) | 2010-12-21 | 2016-12-20 | Hitachi High-Technologies Corporation | Device for nucleic acid analysis and nucleic acid analyzer |
| JP2020151784A (en) * | 2019-03-18 | 2020-09-24 | フコク物産株式会社 | Micro fluid device |
| DE112014007175B4 (en) | 2014-12-26 | 2022-10-06 | Hitachi High-Tech Corporation | Substrate for use in analysis of a nucleic acid, flow cell for use in analysis of a nucleic acid, and nucleic acid analysis device |
-
2004
- 2004-09-21 JP JP2004273140A patent/JP2006087974A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008246348A (en) * | 2007-03-29 | 2008-10-16 | Fujifilm Corp | Microchemical chip and its manufacturing method |
| JP4725545B2 (en) * | 2007-03-29 | 2011-07-13 | 富士フイルム株式会社 | Micro chemical chip |
| EP1975120A3 (en) * | 2007-03-29 | 2013-08-21 | FUJIFILM Corporation | Microchemical chip and method for fabricating the same |
| US9523124B2 (en) | 2010-12-21 | 2016-12-20 | Hitachi High-Technologies Corporation | Device for nucleic acid analysis and nucleic acid analyzer |
| JP2013170858A (en) * | 2012-02-20 | 2013-09-02 | Sumitomo Bakelite Co Ltd | Manufacturing method of micro flow channel chip, and micro flow channel chip |
| DE112014007175B4 (en) | 2014-12-26 | 2022-10-06 | Hitachi High-Tech Corporation | Substrate for use in analysis of a nucleic acid, flow cell for use in analysis of a nucleic acid, and nucleic acid analysis device |
| JP2020151784A (en) * | 2019-03-18 | 2020-09-24 | フコク物産株式会社 | Micro fluid device |
| JP7356241B2 (en) | 2019-03-18 | 2023-10-04 | フコク物産株式会社 | microfluidic device |
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