JP2006087200A - Power supply device, stage device, and aligner - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a power supply device that is small, lightweight, inexpensive, and capable of generating high power, a stage device, and an aligner. <P>SOLUTION: A driver 22 alternately turns on and off FET1 and FET2 at a high frequency, and thereby transfers electric charge stored in a capacitor C3 to a capacitor C2. Thus, the output voltage of the power supply device becomes equal to twice (560 V) 280 V obtained by rectifying three-phase alternating-current 200 V. In addition, since the FET1 and the FET2 are turned on and off at a high frequency, the capacity of the capacitor C2 can be reduced. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a power supply device that outputs high power, a stage device, and an exposure apparatus.

  In recent years, a power supply device capable of outputting high power has been demanded as a power supply device. For example, in an exposure apparatus, high power (for example, a high voltage of 500 V or more, a high current of 20 A or more) is used as a motor driving power source for moving the stage as the motor moving speed increases and torque increases. What can be output is required. Hereinafter, the prior art will be described using an exposure apparatus as an example.

In a power supply device for a stage driving motor in a conventional exposure apparatus, a power supply device using a switching regulator is used. However, in order to use a switching regulator in a power supply device for a stage drive motor to enable generation of high power, both the shape and weight of the power supply device increase and the cost increases. For example, as a power supply device using a switching regulator, even if the output of the power supply device is about 1.5 kW, the mass (corresponding to the weight) is described as 6 kg (see Non-Patent Document 1).
TDK Corporation homepage (http://www.tdk.co.jp/tjfx01/ja111_rkw.pdf, pages 33 and 34: August 9, 2004)

  As described above, the power supply device using the switching regulator increases the power (current / voltage) to be output to the motor with the increase in output and accuracy of the motor to be driven, and the power supply becomes larger. The weight increased. Furthermore, in the exposure apparatus and stage apparatus, the ratio of the volume and price occupied by the motor drive power supply is increased, the motor drive power supply is increased in size, and the stage apparatus and exposure apparatus are increased in size by the weight. The weight is also increasing.

  The present invention has been made in view of the above-described problems of the prior art, and aims to provide a power supply device, a stage device, and an exposure device that are small, lightweight, inexpensive, and capable of generating high power. To do.

  According to the first aspect of the present invention, a rectifying means for converting an AC input into a direct current, a clock generating means for outputting a high-frequency clock signal ranging from 10 KHz to 100 KHz, and a high-frequency clock signal output from the clock generating means. In response, when the first switching element and the second switching element are alternately turned on / off in the range of 10 KHz to 100 KHz, the rectifying means when the first switching element is in the on state and the second switching element is in the off state First storage means for storing charges from the high voltage side, and second storage for transferring and storing charges stored in the first storage means when the first switching is in the off state and the second switching element is in the on state. And the voltage on the plus side of the rectifying means and the voltage across the second storage means are added to obtain an output voltage. To.

According to a second aspect of the present invention, in the power supply device according to the first aspect, the power supply device is for driving a motor.
According to a third aspect of the present invention, in the power supply device according to the first or second aspect, the output voltage is twice the output voltage of the rectifying means.
A fourth aspect of the present invention is a stage apparatus, wherein the power source apparatus according to any one of the first to third aspects is provided as a power source for driving a motor for moving the stage. .

According to a fifth aspect of the present invention, there is provided an exposure apparatus comprising the stage device according to the fourth aspect.
According to the present invention, since the first switching element and the second switching element are alternately turned on / off in the range of 10 KHz to 100 KHz, the first storage means and the second storage means having a small capacity can be used. In addition, since the output voltage is the sum of the voltage on the plus side of the rectifying means and the voltage across the second storage means, high power can be output.

According to the present invention, it is possible to provide a power supply device capable of generating high power while being small and light.
In addition, since the power supply device can be provided in a small size and light weight, it is possible to suppress an increase in size and cost of the stage device and the exposure device.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In this embodiment, a motor driving power source will be described as an example of the power source device. The overall configuration of a stage apparatus and an exposure apparatus incorporating a motor driving device will be described first.
FIG. 1 shows a stage apparatus and an exposure apparatus provided with a plurality of motors operated by the motor driving power source of the present invention, and FIG. 2 is a circuit diagram of the motor driving power source. In the following description, a three-phase motor will be described as an example of the motor, but the present invention is not limited to this. This embodiment corresponds to all the claims recited in the claims.

First, an exposure apparatus in which a stage is driven by a plurality of motors will be described with reference to FIG.
FIG. 1 is a view showing the schematic arrangement of this exposure apparatus. This exposure apparatus is a stepper type (step-and-repeat type) exposure apparatus that exposes a reduced image of a reticle pattern to each shot area of a wafer.

In the description of this embodiment, the term “reticle” is used. However, in this specification, both the reticle and the mask are treated as having the same pattern as the pattern to be projected on the wafer.
In FIG. 1, the exposure light IL from the illumination optical system 1 is reflected by the dichroic mirror 2 to illuminate the pattern area of the reticle R. The Z-axis is taken in parallel to the optical axis of the exposure light IL after being reflected by the dichroic mirror 2, and the X-axis is taken in a direction parallel to the paper surface of FIG. 1 in a two-dimensional plane perpendicular to the Z-axis. Take the Y axis in the direction perpendicular to

  The reticle R is mounted on the reticle base 4 via the reticle side Y stage 3Y and the reticle side X stage 3X. The reticle side X stage 3X is driven in the X direction with respect to the reticle base 4 by a linear motor (hereinafter referred to as “linear motor 5”) including a stator 5A and a mover 5B. The reticle side Y stage 3Y is driven in the Y direction by a linear motor (not shown) with respect to the reticle side X stage 3X.

  An X-axis moving mirror 6X and a Y-axis moving mirror (not shown) are fixed on the reticle-side Y stage 3Y. The X coordinate XR of the reticle side X stage 3X is measured by the movable mirror 6X and an X axis reticle side laser interferometer (hereinafter referred to as "reticle interferometer") 7X installed outside. The Y coordinate YR of the reticle side Y stage 3Y is measured by a Y-axis movable mirror (not shown) and a Y-axis reticle interferometer 7Y. The measured X-coordinate XR and Y-coordinate YR are supplied via connectors 17 and 18 to the central control system 8 that controls the overall operation of the apparatus. A stage system including a reticle side Y stage 3Y, a reticle side X stage 3X, a reticle base 4, an X axis linear motor 5, and a Y axis linear motor is referred to as a reticle stage device 3.

  Under the exposure light IL, the pattern image of the reticle R is reduced through the projection optical system PL with a projection magnification β (β is, for example, 1/5), and is projected and exposed to each shot area of the wafer W. . The wafer W is mounted on the wafer base 11 via the wafer side Y stage 10Y and the wafer side X stage 10X. The wafer-side X stage 10X is driven in the X direction with respect to the wafer base 11 via a linear motor (hereinafter referred to as “linear motor 12”) including a stator 12A and a mover 12B. The wafer side Y stage 10Y is driven in the Y direction by a linear motor (not shown) with respect to the wafer side X stage 10X.

  An X-axis moving mirror 13X and a Y-axis moving mirror (not shown) are fixed on the wafer-side Y stage 10Y. The X-coordinate XW of the wafer-side X stage 10X is measured by the movable mirror 13X and an X-axis wafer-side laser interferometer (hereinafter referred to as “wafer interferometer”) 14X installed outside. The Y coordinate YW of the wafer-side Y stage 10Y is measured by a Y-axis movable mirror (not shown) and a Y-axis wafer interferometer 14Y. The measured X coordinate XW and Y coordinate YW are supplied to the central control system 8 via connectors 19 and 20. Wafer-side Y stage 10Y, wafer-side X stage 10X, wafer base 11, X-axis linear motor 12, Y-axis linear motor, and Z-leveling stage for controlling the position and tilt angle of wafer W in the Z direction A stage system (not shown) is referred to as a wafer stage apparatus 10.

  In this embodiment, a three-phase linear motor is used as the linear motor. For example, the linear motor 12 will be described as an example. The linear motor 12 includes a stator 12A and a mover 12B. The stator 12A includes three-phase armature windings (not shown), and the mover 12B has a polarity on the side surface of the wafer side X stage 10X. It consists of four permanent magnets (not shown) that are sequentially inverted and fixed in the X direction. That is, the linear motor 12 is a moving magnet type linear synchronous motor. A moving coil type linear motor that houses the armature winding on the mover side may be used.

  The central control system 8 controls the operations of the X-axis linear motor 5 and the Y-axis linear motor 5 on the reticle side via the reticle stage drive system 15 to position the reticle R, and at the same time, the wafer stage drive system The wafer W is positioned by controlling the operations of the X-axis linear motor 12 and the Y-axis linear motor 12 on the wafer side via 16. By such control, the pattern of the reticle R is reduced and exposed to each shot area of the wafer W.

These linear motors are required to supply higher voltage power in order to improve processing speed.
Therefore, the reticle stage drive system 15 and the wafer stage drive system 16 are equipped with a motor drive power supply capable of supplying high voltage power for driving each linear motor using a single power supply as a drive power supply. Next, the motor driving power source will be described.

FIG. 2 is a circuit diagram showing an embodiment of a motor driving power source.
As shown in FIG. 2, the motor drive power supply includes fuses FU1 to FU3, a three-phase full-wave rectifier circuit including diodes D1 to D6, a power factor improving coil L1, a smoothing capacitor C1, and a thyristor. Inrush current prevention circuit composed of S1 and resistor R1, clock generator 21, driver 22 for alternately turning on / off field effect transistors FET1 and FET2 (hereinafter simply referred to as FET1 and FET2), and capacitors C2 and C3 And diodes D7 and D8.

The operation of the motor driving power source shown in FIG. 2 will be described with reference to the waveform diagram shown in FIG.
The commercial 200V three-phase alternating current input through the fuses FU1 to FU3 is rectified by a three-phase full-wave rectifier circuit composed of diodes D1 to D6, and then the power factor is improved by the coil L1 and smoothed by the capacitor C1. Is done.
The inrush current prevention circuit prevents an inrush power source for charging the capacitors C1 to C3 from flowing when the motor driving power source shown in FIG. That is, the thyristor S1 is in a non-conductive state for a predetermined time after the start, and a current flows through the resistor R1, thereby limiting the inrush current at the start. After the predetermined period has elapsed, a trigger signal is input to the thyristor S1 from a control circuit (not shown), and the thyristor S1 becomes conductive. As a result, no current flows through the resistor R1, and the motor drive power supply shifts to a normal operation.

When the motor driving power source shown in FIG. 2 is started, a DC voltage of 280V is generated across the capacitor C1, and the voltage at the point A shown in FIG.
The clock generator 21 outputs a high-frequency clock signal of 10 KHz to 100 KHz and outputs it to the driver 22. FIG. 3A is a diagram illustrating an example of a clock signal output from the clock generator 21.

  The driver 22 shown in FIG. 2 receives the clock signal output from the clock generator 21 and turns on / off the FET 1 and FET 2 alternately. FIG. 3B is a diagram showing potential changes in the outputs of FET1 and FET2 (point B: see FIG. 2). The potential at point B is approximately 0V when FET2 is on (FET1 is off), and is approximately 280V when FET1 is on (FET2 is off).

That is, at the timing when FET2 is turned on (FET1 is turned off), a current flows through the path of diode D7 → capacitor C3 → FET2 based on the voltage at point B (voltage of 280V of capacitor C1), and the electric charge flows to capacitor C3. Accumulated.
On the contrary, at the timing when FET1 is turned on (FET2 is turned off), the electric charge accumulated in the capacitor C3 is accumulated in the capacitor C2 through the path of the capacitor C3 → the diode D8 → the capacitor C2. Therefore, each time the FET1 and FET2 are repeatedly turned on / off, the voltage across the capacitor C2 increases.

FIG. 3C is a diagram showing a process in which the output voltage of the motor driving power source is increased by accumulating charges in the capacitor C3 and transferring the accumulated charges to the capacitor C2.
As shown in the figure, the voltage at the point A in FIG. 2 is about 280V, and the voltage across the capacitor C2 is added to about 280V, so that the output voltage of the motor driving power supply is finally twice as high as about 280V. That is, it rises to about 560V. Therefore, a high voltage / high current power source can be obtained.

Here, as described above, since the clock generator 21 outputs a high-frequency (10 KHz to 100 KHz) clock signal, the output voltage rise shown in FIG. 3C occurs in a short time.
Similarly, since the clock generator 21 outputs a high-frequency (10 KHz to 100 KHz) clock signal, it is sufficient that the capacitors C2 and C3 have a small capacity. For example, as the capacitors C2 and C3, those having a theoretical value of about 10 μF can be used. However, in practice, it is preferable to use a capacitor having a capacity of about 1000 μF because of heat generation and lifetime problems of the capacitors C2 and C3. Of course, this numerical value changes appropriately depending on the required output power.

According to the present embodiment, FET1 and FET2 are turned on / off at a high frequency, so that the capacity of capacitors C2 and C3 can be small, and even a high-power motor drive power supply is small and inexpensive. it can.
As shown in FIG. 3C, the output voltage of the motor driving power source rises with a slope in the first half portion and falls with a slope in the second half portion in one cycle of the clock signal. The rise in the first half with an inclination is due to the influence of the resistance component of the FET 1 and the like. Further, the lowering in the latter half portion is due to the influence of the load connected to the motor driving power source.

In FIG. 2, the power factor improving coil L1 is preferably provided to improve the power factor, but it is not always necessary.
In the embodiment shown in FIG. 2, a commercial three-phase AC power supply is used. However, the present invention is not limited to this, and a single-phase AC power supply can also be used.
As is clear from the above description, according to the motor driving power source shown in FIG. 2, the full-wave rectifier circuit full-wave rectifies the three-phase 200V AC power source, improves the power factor through the coil L1, and smoothes it. It is possible to provide a power supply device that is smoothed by the capacitor C1 and that can output a high voltage and a high current between the output terminals.

  The present invention can be used industrially in various fields such as a power supply device, a motor drive power supply, a stage device, and an exposure device.

It is a figure which shows schematic structure of a stage apparatus and exposure apparatus. It is a circuit diagram which shows the motor drive power supply. FIG. 3 is a waveform diagram for explaining the operation of the motor driving power source shown in FIG. 2.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Illumination optical system 2 Dichroic mirror 3 Reticle stage apparatus 3X Reticle side X stage 3Y Reticle side Y stage 4 Reticle base 5 Linear motor (for X axis)
5A Stator 5B Movable element 6X Moving mirror 7X, 7Y Reticle interferometer 8 Central control system 10 Wafer stage device 10X Wafer side X stage 10Y Wafer side Y stage 11 Wafer base 12 Linear motor (for X axis)
12A Stator 12B Mover 13X Moving mirror 14X Wafer interferometer 14Y Wafer interferometer 15 Reticle stage drive system 16 Wafer stage drive system 17-20
21 Clock generator 22 Driver C1, C2, C3 Capacitors D1-D6, D7, D8 Diode FET1, FET2 Field effect transistor FU1-FU3 Fuse L1 Coil S1 Thyristor R Reticle R1 Resistance W Wafer

Claims (5)

Rectifying means for converting alternating current input into direct current;
Clock generating means for outputting a high-frequency clock signal ranging from 10 KHz to 100 KHz;
A driver that receives a high-frequency clock signal output from the clock generating means and alternately turns on and off the first switching element and the second switching element in a range of 10 KHz to 100 KHz;
A first accumulating means for accumulating charges from the high voltage side of the rectifying means when the first switching element is in an on state and the second switching element is in an off state;
Second storage means for transferring and storing charges stored in the first storage means when the first switching is in an off state and the second switching element is in an on state;
The power supply apparatus according to claim 1, wherein the positive voltage of the rectifying means and the voltage across the second storage means are added to obtain an output voltage. The power supply device according to claim 1, wherein
The power supply apparatus is used for driving a motor. The power supply device according to claim 1 or 2,
The power supply apparatus according to claim 1, wherein the output voltage is twice the output voltage of the rectifying means. In a stage device that drives a stage with a motor,
A stage apparatus comprising the power supply apparatus according to any one of claims 1 to 3 as a motor driving power supply for moving a stage. An exposure apparatus comprising the stage apparatus according to claim 4.

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