JP2006087182A - Polymer actuator device and its driving method - Google Patents

Polymer actuator device and its driving method Download PDF

Info

Publication number
JP2006087182A
JP2006087182A JP2004267735A JP2004267735A JP2006087182A JP 2006087182 A JP2006087182 A JP 2006087182A JP 2004267735 A JP2004267735 A JP 2004267735A JP 2004267735 A JP2004267735 A JP 2004267735A JP 2006087182 A JP2006087182 A JP 2006087182A
Authority
JP
Japan
Prior art keywords
polymer actuator
expansion
contraction
driver
correction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004267735A
Other languages
Japanese (ja)
Inventor
Hironobu Yoshitake
博信 吉武
Toshiyuki Ishibashi
利之 石橋
Toru Shikayama
透 鹿山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yaskawa Electric Corp
Original Assignee
Yaskawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yaskawa Electric Corp filed Critical Yaskawa Electric Corp
Priority to JP2004267735A priority Critical patent/JP2006087182A/en
Publication of JP2006087182A publication Critical patent/JP2006087182A/en
Pending legal-status Critical Current

Links

Images

Landscapes

  • Control Of Position Or Direction (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a polymer actuator driving unit which improves the accuracy in positioning of a polymer actuator and besides performs positioning at high speed. <P>SOLUTION: This polymer actuator device is equipped with a polymer actuator 1, an actuator 2 which drives the polymer actuator 1, and a control unit 9 which controls the actuator 2. The polymer actuator is provided with a sensor 4 which measures the quantity of expansion and contraction of itself. A rectifying circuit 3 which corrects the nonlinearity of the quantity of expansion and contraction to the drive voltage of the polymer actuator is provided between the control unit 9 and the actuator 2. A driving method is one which feeds back the quantity of expansion and contraction acquired from the sensor 4 to the control unit 9, and corrects the quantity of expansion and contraction by the correcting circuit 3 to make it a drive voltage command 6. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、化学的な変化により、機械的変形を生じる高分子アクチュエータ装置に関する。   The present invention relates to a polymer actuator device that causes mechanical deformation due to a chemical change.

従来の高分子アクチュエータ装置として、目的の伸縮量に比例した駆動電圧を高分子アクチュエータに印加し駆動するものが提案されている(例えば、特許文献1参照)。   As a conventional polymer actuator device, a device that drives by applying a drive voltage proportional to a target expansion / contraction amount to the polymer actuator has been proposed (for example, see Patent Document 1).

図4は従来の高分子アクチュエータ装置である。図4において、筐体7に取り付けられた高分子アクチュエータ1に駆動器2が接続され、高分子アクチュエータ1の伸縮駆動を制御する制御器9から伸縮量指令5が駆動器2に入力される。高分子アクチュエータ1には、伸縮量指令5に比例した駆動電圧を駆動器2より高分子アクチュエータ1に印加する。このようにして、高分子アクチュエータ1を駆動していた。
特開2000−83389(請求項第1項、図4)
FIG. 4 shows a conventional polymer actuator device. In FIG. 4, a driver 2 is connected to the polymer actuator 1 attached to the housing 7, and an expansion / contraction amount command 5 is input to the driver 2 from a controller 9 that controls expansion / contraction driving of the polymer actuator 1. A driving voltage proportional to the expansion / contraction amount command 5 is applied to the polymer actuator 1 from the driver 2 to the polymer actuator 1. In this way, the polymer actuator 1 was driven.
JP-A-2000-83389 (Claim 1, Claim 4)

従来の高分子アクチュエータ駆動装置は、高分子アクチュエータの駆動電圧を目的の伸縮量に比例して印加するため、高分子アクチュエータの駆動電圧と伸縮量が比例関係に無い種類の高分子アクチュエータに対しては正確に伸縮量を制御できず位置決め精度が悪くなるという問題があった。また、位置決めに必要となる適切な変位量を算出することができず、位置決めに時間を要していた。   The conventional polymer actuator driving device applies the driving voltage of the polymer actuator in proportion to the target expansion / contraction amount, so that the driving voltage of the polymer actuator and the expansion / contraction amount are not proportional to each other. However, there is a problem that positioning accuracy is deteriorated because the amount of expansion and contraction cannot be controlled accurately. In addition, an appropriate amount of displacement required for positioning cannot be calculated, and time is required for positioning.

本発明はこのような問題点に鑑みてなされたものであり、高分子アクチュエータの駆動電圧と伸縮量が比例関係に無い種類の高分子アクチュエータに対しても位置決め精度を向上させ、かつ高速に位置決めを行う駆動装置およびその駆動方法を提供することを目的とする。   The present invention has been made in view of such problems, and improves the positioning accuracy for a type of polymer actuator in which the driving voltage and expansion / contraction amount of the polymer actuator are not in a proportional relationship, and positioning at high speed. It is an object of the present invention to provide a driving device that performs the above and a driving method thereof.

上記問題を解決するため、本発明は、次のように構成したものである。   In order to solve the above problems, the present invention is configured as follows.

請求項1に記載の発明は、高分子アクチュエータと、前記高分子アクチュエータを駆動する駆動器と、前記駆動器を制御する制御器とを備えた高分子アクチュエータ装置において、前記高分子アクチュエータに自身の伸縮量を測定するセンサを設け、前記制御器と前記駆動器との間に前記高分子アクチュエータの駆動電圧に対する伸縮量の非線型性を補正する補正回路を設けたものである。
請求項2に記載の発明は、前記センサが前記高分子アクチュエータとともに筐体に取り付けられ、前記センサ先端と前記高分子アクチュエータの先端が固定体により固定されたものである。
請求項3に記載の発明は、高分子アクチュエータと、前記高分子アクチュエータを駆動する駆動器と、前記駆動器を制御する制御器とを備え、前記制御器から前記駆動器に駆動指令を送り、前記高分子アクチュエータを駆動する高分子アクチュエータ装置の駆動方法において、前記高分子アクチュエータに自身の伸縮量を測定するセンサを設け、前記センサから取得した伸縮量を前記制御器へフィードバックし、前記制御器と前記駆動器との間に設けた補正回路により前記高分子アクチュエータの駆動電圧に対する伸縮量を補正して駆動電圧指令とするものである。
請求項4に記載の発明は、 前記非線型性の補正が前記高分子アクチュエータに駆動電圧を変化しながら印加することで高分子アクチュエータを最小値から最大値まで伸縮変化させ、このときのセンサから取得した実際の伸縮量と駆動電圧を比較し、前記補正回路に設けた補正データ記憶装置に補正データを記憶させるものである。
請求項5に記載の発明は、前記高分子アクチュエータの非線型性の補正が、前記補正データ記憶装置に記憶している補正データを移動平均法により補間したデータをもとに、伸縮量に対する補正された駆動電圧を求めるものである。
ものである。
The invention according to claim 1 is a polymer actuator device comprising a polymer actuator, a driver that drives the polymer actuator, and a controller that controls the driver. A sensor for measuring the amount of expansion and contraction is provided, and a correction circuit for correcting the nonlinearity of the amount of expansion and contraction with respect to the drive voltage of the polymer actuator is provided between the controller and the driver.
According to a second aspect of the present invention, the sensor is attached to a casing together with the polymer actuator, and the tip of the sensor and the tip of the polymer actuator are fixed by a fixed body.
The invention according to claim 3 includes a polymer actuator, a driver that drives the polymer actuator, and a controller that controls the driver, and sends a drive command from the controller to the driver. In the driving method of the polymer actuator device for driving the polymer actuator, the polymer actuator is provided with a sensor for measuring the amount of expansion / contraction of the polymer actuator, and the amount of expansion / contraction acquired from the sensor is fed back to the controller. And a correction circuit provided between the driver and the driver corrects the amount of expansion and contraction of the polymer actuator with respect to the drive voltage, thereby obtaining a drive voltage command.
The invention according to claim 4 is that the non-linearity correction is applied to the polymer actuator while changing the drive voltage to change the expansion and contraction of the polymer actuator from the minimum value to the maximum value. The obtained actual expansion / contraction amount is compared with the driving voltage, and the correction data is stored in the correction data storage device provided in the correction circuit.
According to a fifth aspect of the present invention, the non-linearity correction of the polymer actuator is performed on the amount of expansion / contraction based on data obtained by interpolating correction data stored in the correction data storage device by a moving average method. The obtained driving voltage is obtained.
Is.

請求項1に記載の発明によると、高分子アクチュエータの駆動電圧と伸縮量の非線型性を補正回路により補正するので、高分子アクチュエータの位置決め精度を向上させ、かつ高速に位置決めを行うことができる。
請求項2に記載の発明によると、センサ先端と高分子アクチュエータの先端が固定体により固定されているので、確実に高分子アクチュエータの伸縮量を得ることができるので、高分子アクチュエータの位置決め精度を向上させ、かつ高速に位置決めを行うことができる。
請求項3に記載の発明によると、高分子アクチュエータの駆動電圧と伸縮量の非線型性を補正回路により補正するので、高分子アクチュエータの位置決め精度を向上させ、かつ高速に位置決めを行うことができる。
請求項4に記載の発明によると、高分子アクチュエータを最小値から最大値まで伸縮変化させることで補正データを作成できるので、高速かつ簡便に補正データを取得できる。
請求項5に記載の発明によると、高分子アクチュエータの駆動電圧と伸縮量の非線型性を補正データ記憶装置に記憶してある補正データを移動平均法などにより補間したデータをもとに補正するので、高分子アクチュエータの位置決め精度を向上させ、かつ高速に位置決めを行うことができる。
According to the first aspect of the present invention, since the non-linearity of the driving voltage and the expansion / contraction amount of the polymer actuator is corrected by the correction circuit, the positioning accuracy of the polymer actuator can be improved and the positioning can be performed at high speed. .
According to the second aspect of the invention, since the sensor tip and the tip of the polymer actuator are fixed by the fixed body, the expansion / contraction amount of the polymer actuator can be obtained with certainty. It is possible to improve positioning at high speed.
According to the invention described in claim 3, since the non-linearity of the driving voltage and the expansion / contraction amount of the polymer actuator is corrected by the correction circuit, the positioning accuracy of the polymer actuator can be improved and the positioning can be performed at high speed. .
According to the fourth aspect of the present invention, the correction data can be created by changing the expansion and contraction of the polymer actuator from the minimum value to the maximum value, so that the correction data can be acquired quickly and easily.
According to the fifth aspect of the present invention, the correction data stored in the correction data storage device for the non-linearity of the driving voltage and the expansion / contraction amount of the polymer actuator is corrected based on the data interpolated by the moving average method or the like. Therefore, the positioning accuracy of the polymer actuator can be improved and positioning can be performed at high speed.

以下、本発明の実施の形態について図を参照して説明する。   Hereinafter, embodiments of the present invention will be described with reference to the drawings.

図1は、本発明の第1実施例を示す高分子アクチュエータ駆動装置の構成図である。図において、3は高分子アクチュエータ1の駆動電圧に対する伸縮量の非線型性を補正する補正回路、4は高分子アクチュエータ1の伸縮量を測定するセンサ、6は補正回路3から駆動器2に入力される駆動電圧指令、8は高分子アクチュエータ1の先端とセンサ4の先端を固定するための固定体である。他の符号は従来例と同じであるため、省略する。
高分子アクチュエータ1として電子導電性タイプのものを用い、センサ4として直動式の渦電流式変位センサを用いた。
FIG. 1 is a block diagram of a polymer actuator driving apparatus showing a first embodiment of the present invention. In the figure, 3 is a correction circuit for correcting the nonlinearity of the expansion / contraction amount with respect to the driving voltage of the polymer actuator 1, 4 is a sensor for measuring the expansion / contraction amount of the polymer actuator 1, and 6 is input from the correction circuit 3 to the driver 2. The drive voltage command 8 is a fixed body for fixing the tip of the polymer actuator 1 and the tip of the sensor 4. Other reference numerals are the same as in the conventional example, and are omitted.
As the polymer actuator 1, an electronic conductive type was used, and as the sensor 4, a direct acting eddy current displacement sensor was used.

本発明が特許文献1と異なる部分は、高分子アクチュエータ1の駆動電圧と伸縮量の関係が非線型である場合に、高分子アクチュエータ1の伸縮を、伸縮量指令5に比例した駆動電圧を駆動器2により高分子アクチュエータ1に印加する代わりに、補正回路3により補正した駆動電圧指令6を駆動器2に出力し、適切な駆動電圧を駆動器2より高分子アクチュエータ1に印加する部分である。   The present invention is different from Patent Document 1 in that when the relationship between the driving voltage of the polymer actuator 1 and the expansion / contraction amount is non-linear, the expansion / contraction of the polymer actuator 1 is driven by a driving voltage proportional to the expansion / contraction amount command 5. Instead of being applied to the polymer actuator 1 by the device 2, the drive voltage command 6 corrected by the correction circuit 3 is output to the driver 2 and an appropriate drive voltage is applied from the driver 2 to the polymer actuator 1. .

次に本実施例の補正方法について説明する。
図2は本実施例の高分子アクチュエータ駆動装置における駆動電圧の補正方法の手順を示すフローチャートである。図3は本実施例の補正回路3にある補正データ記憶装置32の補正データ10の一例である。
まず、補正データ記憶装置32からの補正データを取得する。補正回路3の補正演算回路31が、伸縮量指令5に対し補正することなしに駆動電圧指令6を出力する状態とする。次に、伸縮量指令5を入力し高分子アクチュエータ1を駆動する。このとき、高分子アクチュエータ1の実際の伸縮量をセンサ4から取得し、駆動電圧指令6に対する伸縮量指令5の補正データ10として補正データ記憶装置32に記憶させる。この動作を伸縮量指令5の最小値から最大値まで変化させ行うことで補正データ10を作成する。このときの伸縮量指令5の変化量を細かくとることによりより高精度、かつ高速に位置決めを行うことが可能となる補正データ10を作成することができる。最後に、補正回路3の補正演算回路31が、補正データ記憶装置32のデータをもとに伸縮量指令5に対して補正をした駆動電圧指令6を出力する状態とし補正データ記憶装置32の補正データ10の取得を完了する。
Next, the correction method of this embodiment will be described.
FIG. 2 is a flowchart showing a procedure of a driving voltage correction method in the polymer actuator driving apparatus of this embodiment. FIG. 3 shows an example of the correction data 10 in the correction data storage device 32 in the correction circuit 3 of this embodiment.
First, correction data from the correction data storage device 32 is acquired. The correction operation circuit 31 of the correction circuit 3 outputs the drive voltage command 6 without correcting the expansion / contraction amount command 5. Next, the expansion / contraction amount command 5 is input to drive the polymer actuator 1. At this time, the actual expansion / contraction amount of the polymer actuator 1 is acquired from the sensor 4 and stored in the correction data storage device 32 as the correction data 10 of the expansion / contraction amount command 5 with respect to the drive voltage command 6. The correction data 10 is created by changing this operation from the minimum value to the maximum value of the expansion / contraction amount command 5. By making the change amount of the expansion / contraction amount command 5 fine at this time, it is possible to create correction data 10 that enables positioning with higher accuracy and higher speed. Finally, the correction calculation circuit 31 of the correction circuit 3 sets the state in which the drive voltage command 6 corrected for the expansion / contraction amount command 5 based on the data of the correction data storage device 32 is output, and the correction of the correction data storage device 32 The acquisition of data 10 is completed.

次に、伸縮量指令5を補正する。伸縮量指令5が制御器9より補正回路3に入力される(図2、S1)。次に、補正データ記憶装置32の補正データ10をもとに補正演算回路31により伸縮指令5に対する適切な駆動電圧指令6を求める(図2、S2)。このとき、補正データ記憶装置32の補正データ10は離散的なデータであるため、補正演算回路31により移動平均法などの補間により補間値11を求め、伸縮指令5に対する駆動電圧指令6が算出される。この補間方法は、とくに移動平均法には限定はしない。具体的には、図3の伸縮量指令5aが補正回路3に入力されると、補正データ記憶装置32のデータをもとに補正演算回路31により補間値11を求め、補正した駆動電圧指令6aが求められる。同様にして、伸縮量指令5bに対しても、補正データ記憶装置32のデータをもとに補正演算回路31により駆動電圧指令6bが求められる。最後に、補正回路3により求められた駆動電圧指令6に従い駆動器2より高分子アクチュエータ1へ駆動電圧を印加する(図2、S3)。
このように、センサ4からの高分子アクチュエータ1の実際の伸縮量を制御器9へフィードバックし、伸縮量指令5との偏差を考慮した制御をおこなうことでより高精度、かつ高速に位置決めを行うことが可能となる。
Next, the expansion / contraction amount command 5 is corrected. The expansion / contraction amount command 5 is input from the controller 9 to the correction circuit 3 (FIG. 2, S1). Next, an appropriate drive voltage command 6 for the expansion / contraction command 5 is obtained by the correction calculation circuit 31 based on the correction data 10 in the correction data storage device 32 (S2 in FIG. 2). At this time, since the correction data 10 in the correction data storage device 32 is discrete data, the correction calculation circuit 31 obtains the interpolation value 11 by interpolation such as a moving average method, and the drive voltage command 6 for the expansion / contraction command 5 is calculated. The This interpolation method is not particularly limited to the moving average method. Specifically, when the expansion / contraction amount command 5a shown in FIG. 3 is input to the correction circuit 3, the correction value calculation circuit 31 obtains the interpolation value 11 based on the data in the correction data storage device 32, and the corrected drive voltage command 6a. Is required. Similarly, for the expansion / contraction amount command 5b, the drive voltage command 6b is obtained by the correction calculation circuit 31 based on the data in the correction data storage device 32. Finally, a drive voltage is applied from the driver 2 to the polymer actuator 1 in accordance with the drive voltage command 6 obtained by the correction circuit 3 (FIG. 2, S3).
As described above, the actual expansion / contraction amount of the polymer actuator 1 from the sensor 4 is fed back to the controller 9, and the control is performed in consideration of the deviation from the expansion / contraction amount command 5, thereby positioning with higher accuracy and higher speed. It becomes possible.

なお、本実施例ではセンサ4として、直動式の渦電流式変位センサを用いたが、直動方向を検出できるものであればどんな種類のものでもよい。   In this embodiment, a linear motion type eddy current displacement sensor is used as the sensor 4, but any type of sensor may be used as long as it can detect the linear motion direction.

本発明の一実施例を示す高分子アクチュエータ装置の構成図The block diagram of the polymer actuator apparatus which shows one Example of this invention 本発明の駆動電圧の補正方法の手順を示すフローチャートThe flowchart which shows the procedure of the correction method of the drive voltage of this invention 本発明の補正データの一例を示すグラフGraph showing an example of correction data of the present invention 従来の高分子アクチュエータ装置を示す構成図Configuration diagram showing a conventional polymer actuator device

符号の説明Explanation of symbols

1 高分子アクチュエータ
2 駆動器
3 補正回路
31 補正演算回路
32 補正データ記憶装置
4 センサ
5、5a、5b 伸縮量指令
6、6a、6b 駆動電圧指令
7 筐体
8 固定体
9 制御器
10 補正データ
11 補間値
DESCRIPTION OF SYMBOLS 1 Polymer actuator 2 Driver 3 Correction circuit 31 Correction calculation circuit 32 Correction data storage device 4 Sensor 5, 5a, 5b Expansion / contraction amount command 6, 6a, 6b Drive voltage command 7 Case 8 Fixed body 9 Controller 10 Correction data 11 Interpolated value

Claims (5)

高分子アクチュエータと、前記高分子アクチュエータを駆動する駆動器と、前記駆動器を制御する制御器とを備えた高分子アクチュエータ装置において、
前記高分子アクチュエータに自身の伸縮量を測定するセンサを設け、前記制御器と前記駆動器との間に前記高分子アクチュエータの駆動電圧に対する伸縮量の非線型性を補正する補正回路を設けたことを特徴とする高分子アクチュエータ装置。
In a polymer actuator device comprising a polymer actuator, a driver for driving the polymer actuator, and a controller for controlling the driver,
A sensor for measuring the amount of expansion / contraction of the polymer actuator is provided, and a correction circuit for correcting the nonlinearity of the amount of expansion / contraction with respect to the driving voltage of the polymer actuator is provided between the controller and the driver. A polymer actuator device.
前記高分子アクチュエータは、その先端が固定体により固定されており、前記センサは、前記高分子アクチュエータとともに筐体に取り付けられ、前記センサ先端とことを特徴とする請求項1に記載の高分子アクチュエータ装置。   The polymer actuator according to claim 1, wherein a tip of the polymer actuator is fixed by a fixed body, and the sensor is attached to a casing together with the polymer actuator, and the sensor tip. apparatus. 高分子アクチュエータと、前記高分子アクチュエータを駆動する駆動器と、前記駆動器を制御する制御器とを備え、前記制御器から前記駆動器に駆動指令を送り、前記高分子アクチュエータを駆動する高分子アクチュエータ装置の駆動方法において、
前記高分子アクチュエータに自身の伸縮量を測定するセンサを設け、前記センサから取得した伸縮量を前記制御器へフィードバックし、前記制御器と前記駆動器との間に設けた補正回路により前記高分子アクチュエータの駆動電圧に対する伸縮量を補正して駆動電圧指令とすることを特徴とする高分子アクチュエータ装置の駆動方法。
A polymer that includes a polymer actuator, a driver that drives the polymer actuator, and a controller that controls the driver, sends a drive command from the controller to the driver, and drives the polymer actuator In the driving method of the actuator device,
A sensor for measuring the amount of expansion / contraction of the polymer actuator is provided, the amount of expansion / contraction acquired from the sensor is fed back to the controller, and the polymer is provided by a correction circuit provided between the controller and the driver. A driving method for a polymer actuator device, wherein a driving voltage command is obtained by correcting an expansion / contraction amount with respect to a driving voltage of the actuator.
前記非線型性の補正は、前記高分子アクチュエータに駆動電圧を変化しながら印加することで高分子アクチュエータを最小値から最大値まで伸縮変化させ、このときのセンサから取得した実際の伸縮量と駆動電圧を比較し、前記補正回路に設けた補正データ記憶装置に補正データを記憶させることを特徴とする請求項3に記載の高分子アクチュエータ装置の駆動方法。   The non-linearity correction is performed by changing the drive voltage to the polymer actuator while changing the drive voltage from the minimum value to the maximum value, and the actual extension amount and drive acquired from the sensor at this time. 4. The method for driving a polymer actuator device according to claim 3, wherein voltages are compared and correction data is stored in a correction data storage device provided in the correction circuit. 前記高分子アクチュエータの非線型性の補正は、前記補正データ記憶装置に記憶している補正データを移動平均法により補間したデータをもとに、伸縮量に対する補正された駆動電圧を求めることを特徴とする請求項4記載の高分子アクチュエータ装置の駆動方法。   The correction of the non-linearity of the polymer actuator is characterized in that a corrected driving voltage with respect to the expansion / contraction amount is obtained based on data obtained by interpolating correction data stored in the correction data storage device by a moving average method. The driving method of the polymer actuator device according to claim 4.
JP2004267735A 2004-09-15 2004-09-15 Polymer actuator device and its driving method Pending JP2006087182A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004267735A JP2006087182A (en) 2004-09-15 2004-09-15 Polymer actuator device and its driving method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004267735A JP2006087182A (en) 2004-09-15 2004-09-15 Polymer actuator device and its driving method

Publications (1)

Publication Number Publication Date
JP2006087182A true JP2006087182A (en) 2006-03-30

Family

ID=36165215

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004267735A Pending JP2006087182A (en) 2004-09-15 2004-09-15 Polymer actuator device and its driving method

Country Status (1)

Country Link
JP (1) JP2006087182A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007148572A1 (en) * 2006-06-20 2007-12-27 Panasonic Corporation Polymer actuator
JP2010088144A (en) * 2008-09-29 2010-04-15 Sony Corp Polymeric actuator controller, method of the same, and electronic apparatus

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04117186A (en) * 1990-09-06 1992-04-17 Brother Ind Ltd High accuracy moving stage device
JP2000083389A (en) * 1998-06-25 2000-03-21 Matsushita Electric Works Ltd Actuator

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04117186A (en) * 1990-09-06 1992-04-17 Brother Ind Ltd High accuracy moving stage device
JP2000083389A (en) * 1998-06-25 2000-03-21 Matsushita Electric Works Ltd Actuator

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007148572A1 (en) * 2006-06-20 2007-12-27 Panasonic Corporation Polymer actuator
US7804226B2 (en) 2006-06-20 2010-09-28 Panasonic Corporation Polymer actuator
JP2010088144A (en) * 2008-09-29 2010-04-15 Sony Corp Polymeric actuator controller, method of the same, and electronic apparatus

Similar Documents

Publication Publication Date Title
JP4822358B2 (en) Position control method for shape memory alloy actuator
JP4650062B2 (en) Robot controller and robot positioning accuracy correction method
JP5750671B1 (en) Imaging device
US10656616B2 (en) Control device, control system, and recording medium
JP2011097434A (en) Semiconductor element for controlling current, and controller using the same
JP5262126B2 (en) Transducer
US20020053952A1 (en) Method and apparatus for temperature compensating a piezoelectric device
JP2006087182A (en) Polymer actuator device and its driving method
US7423361B2 (en) Vibration wave motor control apparatus, vibration wave motor control method, program, and storage medium
JP5391595B2 (en) Drive device for vibration actuator, lens barrel and camera including the same
JP2018112972A (en) Servo motor control apparatus, servo motor control method, and servo motor control program
JP4482986B2 (en) Vibration motor and driving method thereof
JP5138960B2 (en) Motor control device and motor control method
JP2009027900A (en) Output voltage detection error correction method for inverter and error correction circuit
JP2008257571A (en) Servo control method
JP4876525B2 (en) Magnetic pole detection method for synchronous motor
JP2015142390A (en) Motor control device, and method of correction data creation in the same
JP2011221596A (en) Positioning device and positioning method for positioning stage
JP2005304133A (en) Motor driving method and motor driving unit
JP4665678B2 (en) Motor drive device
JP2011010503A (en) Constant voltage generating circuit and lcd device employing the same
JP2006048563A (en) Voltage controller by fixed cycle distributed control
JP2007162617A (en) Electronic governor
JP2005164551A (en) Magnetic type linear absolute encoder
JP2008152523A (en) Position control device and control method

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20070807

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20100909

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20110105