JP2006086537A - Solid state imaging apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To enhance sensitivity by extending an aperture of a lens and constituting the lens having a sufficient curvature for condensing lights. <P>SOLUTION: A solid state imaging apparatus is configured in such a way that a plurality of condenser lenses 111 are arranged in every direction, each condenser lens is equipped with a lens array installed to correspond one by one to each pixel arranged on a two-dimensional plane surface, and a light-receiving section is provided in each pixel. The plane shape of the condenser lens seen form a direction perpendicular to an arrangement surface of the condenser lens 111 has four straight sides and four approximate circle arcs connecting each straight sides in order. Centers of four approximate circle arcs approximately coincide with centers of regions corresponding to the pixel, respectively. A curvature of the condenser lens along a diagonal direction of the region and the curvature of the condenser lens along a side direction of the region become approximately equal. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a solid-state imaging device.

  A solid-state imaging device will be described as an example.

  FIG. 6 is a cross-sectional view illustrating an outline of a configuration of a general solid-state imaging device.

  In general, as shown in FIG. 6, the solid-state imaging device includes an n-type semiconductor substrate 312, a p-well layer 311, a light receiving unit 310, a charge transfer unit 309, a silicon oxide film or nitride film 307, a polysilicon electrode 308, and a metal light shielding layer. 306, an element surface protective layer 305, a flat film 304, a color filter layer 303, an intermediate transparent film 302, and a lens array (on-chip lens) 301. Note that the color filter layer 303 is not necessary in the case of a three-plate imaging device or a monochrome imaging device, or when color-coded by other wavelength selection means.

  In a general solid-state imaging device, light is received only by the light receiving unit 310, and light rays other than that do not contribute to sensitivity. For this reason, as one of the techniques for increasing the sensitivity, it is known that the lens array 301 is formed on a transparent surface layer on the light receiving unit 310 to collect more light by the light receiving unit 310.

  Each lens of the lens array 301 is arranged corresponding to each light receiving unit 310, and the light incident on the lens is efficiently guided to each light receiving unit 310 using the light collecting action.

  The structure of a conventional lens array is shown in FIG. FIG. 7A is a plan view of the lens array 301 as viewed from above, and FIG. 7B is a cross-sectional view of the lens array 301 as viewed from the direction of the arrows along the line V-V in FIG. An area corresponding to one pixel (hereinafter, sometimes referred to as “pixel area”) is an area surrounded by a vertical side 355 and a horizontal side 354, and a lens 301 is disposed at the substantially central portion to improve sensitivity. Contributing to Here, a gap 353 is provided between adjacent lenses for manufacturing reasons. In FIG. 7, only four pixels are shown in order to simplify the drawing, but in reality, a predetermined number of pixels shown in FIG. 7A are arranged in the vertical and horizontal directions.

  In the lens array, each lens has a substantially circular or elliptical lens shape, so that the lens diameter does not exceed one side of the region corresponding to the pixel. Accordingly, there is a space of the gap 353 generated in the manufacturing process in the alignment direction of the lenses. Further, in the square pixel region, a gap is also generated at a corner where the lens 301 is not formed. There is a problem that light incident on these portions hardly enters the light receiving element and does not contribute to sensitivity.

  Similarly, in a liquid crystal display element used in a transmissive liquid crystal display device or the like, a lens array having a gap as shown in FIG. 7 is laminated so as to correspond to each pixel. Has a problem that it does not contribute to the brightness of the screen of the liquid crystal display device.

  In view of the above problems, the present invention improves sensitivity when used in, for example, a solid-state imaging device by expanding a lens opening and constructing a lens having a sufficient curvature to collect light rays. It is another object of the present invention to provide a lens array that can improve the luminance of the screen when used in a liquid crystal display element.

  In order to achieve the above object, the lens array of the present invention has the following configuration.

  That is, the lens array according to the first configuration of the present invention includes a plurality of condensing lenses arranged in the vertical and horizontal directions, and each of the condensing lenses is in a one-to-one relationship with each pixel arranged in a two-dimensional plane. A lens array that is installed and used so as to correspond to each other, and the planar shape of the condensing lens viewed from a direction perpendicular to the arrangement surface of the condensing lenses has four linear sides and the linear shape The four substantially circular arcs connecting the respective sides in order, and the centers of the four substantially circular arcs substantially coincide with the centers of the regions corresponding to the pixels.

  According to the lens array according to the first configuration, since the pixel region can be used effectively, the aperture of the condensing lens can be enlarged, and the waste of the light beam passing through the pixel region can be reduced. As a result, for example, when used in a solid-state imaging device, the sensitivity can be improved, and when used in a liquid crystal display element, the brightness of the screen can be improved. Furthermore, such a lens shape is relatively easy to manufacture.

  In the first configuration, the region corresponding to the pixel is rectangular (rectangular or square), and the diameter of the substantially arc is shorter than the diagonal of the region, and the shorter side of the region (the region) When is a square, it is preferably longer than one side in the vertical or horizontal direction. According to such a preferable configuration, it is possible to increase the ratio of the area where the condenser lens is arranged in the pixel area, and it is possible to further increase the aperture of the condenser lens.

  In the first configuration, the region corresponding to the pixel is rectangular (rectangular or square), and the condensing lens includes a curvature of a lens in a diagonal direction of the region and a side direction of the region. It is preferable that the lens curvature is substantially equal. According to such a preferable configuration, a lens array in which a large number of condensing lenses are arranged in the vertical and horizontal directions can be formed by a simple method described later.

  In the first configuration, the area corresponding to the pixel is rectangular (rectangular or square), and the shorter one of the vertical and horizontal lengths of the area is X and the longer is Y. (If the region is square, Y = X), it is preferable that the curvature radius R of the condenser lens satisfies the following formula (1).

  According to such a preferable configuration, it is possible to increase the ratio of the area where the condenser lens is arranged in the pixel area, and it is possible to further increase the aperture of the condenser lens.

  The lens array according to the second configuration of the present invention includes a plurality of condensing lenses arranged in the vertical and horizontal directions, and each of the condensing lenses corresponds to each pixel arranged in a two-dimensional plane on a one-to-one basis. The lens array is used in such a manner that the region corresponding to the pixel is a rectangle, the short side of the region is less than half the long side, and the arrangement of the condenser lenses The planar shape of the condenser lens viewed from the direction perpendicular to the surface has two substantially parallel straight sides facing each other and two substantially arcs connecting the straight sides, and the two substantially arcs Is substantially the same as the center of the region corresponding to the pixel.

  According to the lens array according to the second configuration, since the pixel area can be used effectively when the vertical and horizontal arrangement intervals of the pixels are different, the aperture of the condenser lens is enlarged, and the light beam passing through the pixel area Waste can be reduced. As a result, for example, when used in a solid-state imaging device, the sensitivity can be improved, and when used in a liquid crystal display element, the brightness of the screen can be improved. Furthermore, such a lens shape is relatively easy to manufacture.

  Said 1st or 2nd structure WHEREIN: It is preferable that the wall surface of the said condensing lens containing the linear side in the planar shape of the said condensing lens is not perpendicular | vertical with respect to the arrangement surface of the said condensing lens. According to such a preferable configuration, for example, when applied to an individual imaging device, light incident on the wall surface can be efficiently guided to the light receiving device. Further, by selecting the inclination angle of the wall surface in consideration of the manufacturing method, a lens array that is easy to manufacture can be obtained.

  In the first or second configuration, the condensing lens is preferably formed in a binary shape whose shape approximates a step shape. According to such a preferable configuration, the choice of the manufacturing method of the lens array increases, and the process can be simplified and the cost can be reduced.

  The solid-state imaging device according to the present invention is a solid-state imaging device having a light receiving unit arranged in a two-dimensional plane and the lens array according to the first or second configuration stacked on the light receiving unit. The individual condensing lenses of the lens array correspond to the light receiving portions on a one-to-one basis. According to this configuration, it is possible to obtain an individual imaging device that can obtain a clear image with high sensitivity.

  In the above configuration, it is preferable that a focal length of the condenser lens is substantially equal to a distance to the light receiving unit. According to such a preferable configuration, the light that has passed through the condensing lens can be condensed on the light receiving unit without waste, and the substantial aperture of the condensing lens can be enlarged. As a result, a clear image can be obtained.

  Moreover, the liquid crystal display element concerning this invention is a liquid crystal display element which has the pixel arranged in the two-dimensional plane, and the lens array in any one of Claims 1-7 laminated | stacked on the said pixel. The individual condensing lenses of the lens array correspond to the individual pixels on a one-to-one basis. According to this configuration, it is possible to obtain a liquid crystal display element that can improve the brightness of the screen and obtain a clear image.

  In the above configuration, it is preferable that a focal length of the condenser lens is substantially equal to a distance to the pixel. According to such a preferable configuration, the substantial aperture of the condenser lens can be enlarged. As a result, a clear image can be obtained.

  According to the lens array of the present invention, since the pixel area can be used effectively, the aperture of the condensing lens can be enlarged, and the waste of light rays passing through the pixel area can be reduced. As a result, for example, when used in a solid-state imaging device, the sensitivity can be improved, and when used in a liquid crystal display element, the brightness of the screen can be improved. Furthermore, it can be manufactured relatively easily.

  Hereinafter, the lens array of the present invention will be described more specifically with reference to the drawings.

(Embodiment 1)
1A and 1B are conceptual diagrams of a lens array according to a first embodiment of the present invention, in which FIG. 1A is a plan view, and FIG. 1B is an arrow direction along line Ib-Ib in FIG. FIG. 1C is a cross-sectional view taken along the line Ic-Ic in FIG. 1A.

  In FIG. 1, only four pixels are shown in order to simplify the drawing. However, in actuality, a predetermined number of pixels shown in FIG. 1A are arranged in the vertical and horizontal directions.

  In the lens array of the present embodiment, a condensing lens 111 having a convex lens shape is arranged in a rectangular pixel region arranged in the vertical and horizontal directions, and one condensing lens corresponds to one pixel region. .

  Here, the planar shape of the condensing lens 111 viewed from the direction perpendicular to the arrangement surface of the condensing lens is substantially octagonal as shown in FIG. 1A, and is adjacent to the four sides of the boundary of the pixel region. The four sides that do not match are straight lines, and the other four sides that connect the four sides in sequence are centered on the substantially center of the substantially octagon (which substantially coincides with the center of the pixel region). It is a part of an approximate circle. The diameter of the approximate circle is shorter than the diagonal length of the pixel region and longer than one side of the pixel region (or the short side when the pixel region is rectangular).

  With the lens array according to the present embodiment, the area of the portion covered with the condensing lens 111 in the pixel region is increased as compared with the conventional lens. At the same time, the curvature of the condensing lens 111 necessary for condensing can be freely selected without being limited by the length of the diagonal line of the pixel region.

  As shown in FIG. 6, a p-well layer 311 is provided, a light receiving portion 310 having a side of about 2.5 μm is formed on the surface layer portion, and then a silicon oxide film or nitride film 307 having a thickness of about 0.1 μm is formed. An element surface protective film 305 having a refractive index of 1.55 and a thickness of about 0.9 μm, a flat film 304 having a refractive index of 1.47 and a thickness of about 1 μm, and a refractive index of 1.52 and a thickness of about 2 μm. Assume a solid-state imaging device that constitutes the color filter layer 303 and has a pixel area corresponding to the light receiving element, which is a square having a length and width of about 4.5 μm. A simulation was performed by placing a condenser lens 301 having a refractive index of 1.5 on the pixel region.

  According to the lens array of the present embodiment, the condensing rate was 90% when the length was 4.3 × width 4.3 μm, the curvature radius was 3.4 μm, and the lens thickness was 1.8 μm. On the other hand, in the conventional general lens array, the condensing rate was 72% when the lens diameter was 4.3 μm and the curvature was 3 μm. That is, it can be seen that the light collection rate of the present embodiment is improved by about 25% compared to the conventional case.

  Here, the light collection rate is the number of light rays incident on the light receiving element among the number of light rays passing through the pixel region corresponding to one light receiving element when the light ray tracing is arbitrarily performed. However, in this simulation, the incident ray angle to the pixel region is arbitrary in the range of 0 degrees to 15 degrees.

  For example, in order for the lens to cover the pixel area wider than the conventional lens, the radius of curvature of the condensing lens needs to be at least half the length of one side of the shorter rectangular pixel area. In addition, if the radius of curvature is too large, the light condensing power is weakened, causing a decrease in sensitivity. For this reason, when the shorter length of the pixel region is X and the longer length is Y, it is preferable that the curvature radius R of the condenser lens satisfies the following formula (1).

    When the radius of curvature R satisfies the expression (1), the lens can cover the pixel area widely and a sufficient light collecting power can be obtained. If the radius of curvature R is below the lower limit of equation (1), the lens cannot cover the pixel area widely. On the other hand, when the curvature radius R exceeds the upper limit of the formula (1), sufficient light collecting power cannot be obtained.

(Embodiment 2)
2A and 2B are conceptual diagrams of a lens array according to a second embodiment of the present invention, in which FIG. 2A is a plan view, and FIG. 2B is an arrow direction along line IIb-IIb in FIG. 2C is a sectional view taken along the line IIc-IIc in FIG. 2A, and FIG. 2D is a sectional view taken along the line IId-IId in FIG. 2A. It is sectional drawing seen from the arrow direction.

  In FIG. 2, only four pixels are shown in order to simplify the drawing, but in reality, a predetermined number of pixels shown in FIG. 2A are arranged in the vertical and horizontal directions.

  The pixel area of the lens array of the present embodiment is rectangular as is apparent from FIG. 2A, and the short side (the vertical side in FIG. 2A) has a long side (FIG. 2). In (a), it is 1/2 or less the length of the side in the horizontal direction. A condensing lens 121 having a convex lens shape is arranged in such a pixel region so that one condensing lens corresponds to one pixel region.

  Here, the planar shape of the condensing lens 121 viewed from a direction perpendicular to the arrangement surface of the condensing lens is substantially a square as shown in FIG. 2A, and two opposite sides parallel to the long side of the pixel region. Is a straight line, and the other two sides connecting the two sides are a part of a substantially circle whose center is the substantially center of the substantially quadrilateral (which substantially coincides with the center of the pixel region).

  The lens array according to the present embodiment has an area of a portion covered with the condensing lens 121 in the pixel region as compared with the conventional lens when the arrangement intervals of the pixels in the vertical and horizontal directions are different due to such a configuration. Therefore, for example, when applied to a solid-state imaging device, the light collection rate is improved, which contributes to an improvement in sensitivity.

(Embodiment 3)
3A and 3B are conceptual diagrams of a lens array according to Embodiment 3 of the present invention, in which FIG. 3A is a plan view, and FIG. 3B is an arrow direction along line IIIb-IIIb in FIG. FIG. 3C is a cross-sectional view taken along the line IIIc-IIIc in FIG. 3A.

  In FIG. 3, only four pixels are shown in order to simplify the drawing. However, in actuality, a predetermined number of pixels shown in FIG. 3A are arranged in the vertical and horizontal directions.

  In the condensing lens 131 of the present embodiment, in the condensing lens 111 described in the first embodiment, four lens wall surfaces 132 parallel to the four sides of the rectangular pixel region are arranged with respect to the condensing lens array surface. It has a predetermined tilt angle that is not vertical but tilts toward the center of the pixel region.

  With such a configuration, the lens array according to the present embodiment can efficiently guide the light incident on the wall surface 132 to the light receiving element when applied to, for example, a solid-state imaging element. In addition, since it is not necessary to form the wall surface 132 vertically, a lens array that is easy to manufacture is realized.

  In the above description, the lens array according to the first embodiment is taken as an example. However, an inclined wall surface may be formed in the same manner as the lens array according to the second embodiment. In that case, the same effect as described above can be obtained.

(Embodiment 4)
4A and 4B are conceptual diagrams of a lens array according to Embodiment 4 of the present invention, in which FIG. 4A is a plan view, and FIG. 4B is an arrow direction along line IV-IV in FIG. It is sectional drawing seen from.

  In FIG. 4, only four pixels are shown in order to simplify the drawing, but in reality, a predetermined number of pixels shown in FIG. 4A are arranged in the vertical and horizontal directions.

  The condensing lens 141 of the present embodiment is a binary lens that approximates the shape of the condensing lens 111 of the lens array shown in the first embodiment in a step shape in rectangular pixel regions arranged in the vertical and horizontal directions. Is.

  A binary shape (step shape) is formed so as to approach the original lens shape 142. In this case, the larger the number of steps in the stairs, the closer to the performance of the original lens shape.

  By using such a binary lens shape, options for manufacturing a lens array can be expanded. Specifically, it can be manufactured using, for example, a photolithography technique.

  In the above description, the lens array of the first embodiment is taken as an example, but the lens array of the second or third embodiment may be a binary lens that is similarly approximated in a step shape, and in that case, the same effect as described above is obtained. Play.

  When the lens array described in each of the above embodiments is used for a solid-state image sensor, the focal length of the condensing lens constituting the lens array is substantially equal to the distance to the light receiving portion of the solid-state image sensor. Preferably formed. Further, when used in a liquid crystal display element, it is preferable that the focal length of the condensing lens constituting the lens array is substantially equal to the distance to the pixel of the liquid crystal display element. In any case, a clear image can be obtained with such a configuration.

(Embodiment 5)
Hereinafter, an example of a method for manufacturing the lens array of the present invention will be described.

  For example, a case where a lens array is formed on a flat film of a solid-state imaging device will be described with reference to FIG.

  First, a synthetic resin layer 421 serving as a lens material is formed on the flat film 402 by spin coating (FIG. 5A). As a material used for the synthetic resin layer 421, for example, a phenol resin, a styrene resin, and an acrylic resin can be used, and other conventionally used materials can also be used. Specifically, the material of the synthetic resin layer 421 is preferably a photosensitive resin obtained by adding naphthoquinonediazide to a polyparavinylphenol-based resin. This resin can be used as a positive resist, and when heat-treated, the resin liquefies due to thermoplasticity and deforms into a hemispherical shape. Then, shape fixing and solidification by thermosetting proceed, and a cured lens shape is realized. . Further, the photosensitive resin can improve the visible light transmittance to 90% or more by ultraviolet irradiation in the process immediately after development, and can be transformed into a lens shape in this transparent state.

  Next, the applied synthetic resin layer 421 is selectively exposed. In the case of using a positive resist such as the above polyparavinylphenol resin, only the portion to be removed is irradiated with ultraviolet light 423 and developed. By patterning using such an ultraviolet stepper, the synthetic resin layer 421 is divided into synthetic resin portions 422 corresponding to the respective light receiving portions on a one-to-one basis (FIG. 5B).

  Further, each of the divided synthetic resin portions 422 is bleached. That is, the opaque material is made transparent by irradiating with ultraviolet light. Thereafter, the synthetic resin portion 422 having a rectangular cross section is covered with the overcoat layer 425 by a method such as spin coating (FIG. 5C).

  Each synthetic resin portion 422 covered with the overcoat layer 425 is softened by being heated, and is deformed into a dome-shaped lens shape 401 whose cross section is formed by a convex curve upward (FIG. 5D )). In this deformation, since the overcoat layer 425 is formed, the adjacent synthetic resin portions are difficult to contact each other. In other words, the overcoat layer 425 exhibits a buffering action so that the synthetic resin portion does not approach rapidly. The material of the overcoat layer 425 can be used without particular limitation as long as it is a material capable of exhibiting the above buffering action. On the other hand, the overcoat layer 425 is required not to completely limit the deformation of the synthetic resin portion 422 at the temperature at which the synthetic resin portion 422 is heated.

  By leaving the overcoat layer 425 as it is, it is possible to form a lens array formed in contact with the condensing lenses adjacent in the vertical and horizontal directions. Further, when a lens is formed over the entire region corresponding to the pixel, it can be created by the same method as described above.

  When the overcoat layer 425 is extremely thin, as shown in FIG. 5E, a lens array in which the adjacent condenser lenses 401 are substantially in contact can be obtained even if the overcoat layer is removed.

  Furthermore, by adjusting the viscosity and thickness of the overcoat layer or adjusting the heating temperature, the four lens wall surfaces parallel to the four sides of the rectangular pixel region can be inclined rather than perpendicular to the lens array surface. it can.

1A and 1B are conceptual diagrams of a lens array according to a first embodiment of the present invention, where FIG. 1A is a plan view, and FIG. 1B is a view from the direction of an arrow along the Ib-Ib line in FIG. FIG. 1C is a cross-sectional view taken along the line Ic-Ic in FIG. FIG. 2A is a conceptual diagram of a lens array according to a second embodiment of the present invention, where FIG. 2A is a plan view, and FIG. 2B is viewed from the direction of the arrow along the line IIb-IIb in FIG. 2C is a cross-sectional view taken along the line IIc-IIc in FIG. 2A, and FIG. 2D is a cross-sectional view taken along the line IId-IId in FIG. FIG. FIGS. 3A and 3B are conceptual diagrams of a lens array according to a third embodiment of the present invention, where FIG. 3A is a plan view and FIG. 3B is viewed from the direction of the arrow along line IIIb-IIIb in FIG. FIG. 3C is a cross-sectional view as seen from the direction of the arrow along the line IIIc-IIIc in FIG. FIGS. 4A and 4B are conceptual diagrams of a lens array according to a fourth embodiment of the present invention, where FIG. 4A is a plan view, and FIG. 4B is viewed from the direction of the arrows along the line IV-IV in FIG. It is sectional drawing. It is sectional drawing which showed the outline of the manufacturing method of the lens array concerning Embodiment 5 of this invention in process order. It is sectional drawing which showed the outline of the structure of a general solid-state imaging device. FIGS. 7A and 7B are diagrams schematically illustrating a conventional lens array, in which FIG. 7A is a plan view, and FIG. 7B is a cross-sectional view taken along the line VV in FIG. 7A. .

Explanation of symbols

111 Condensing lens (lens array)
121 Condensing lens (lens array)
131 Condensing lens (lens array)
132 inclined surface 141 condenser lens (binary lens)
142 Original lens shape 301 Lens array (on-chip lens)
302 Intermediate transparent film 303 Color filter layer 304 Flat film 305 Element surface protective layer 306 Metal light shielding film 307 Silicon oxide film or nitride film 308 Polysilicon electrode 309 Charge transfer unit 310 Light receiving unit 311 p well layer 312 n-type semiconductor substrate 401 Lens 402 Flat film 421 Synthetic resin layer 422 Synthetic resin portion 423 Ultraviolet light 425 Overcoat layer

Claims (11)

A plurality of condensing lenses are arranged in the vertical and horizontal directions, and each of the condensing lenses includes a lens array arranged to correspond to each pixel arranged in a two-dimensional plane in a one-to-one correspondence. A solid-state imaging device provided with a light receiving unit,
The planar shape of the condensing lens viewed from a direction perpendicular to the arrangement surface of the condensing lens has four straight sides and four substantially circular arcs connecting the straight sides in order, The centers of the four substantially circular arcs substantially coincide with the centers of the regions corresponding to the pixels, and the curvature of the condenser lens in the diagonal direction of the region and the curvature of the condenser lens in the side direction of the region are approximately. Solid-state imaging device characterized by being equal.   The solid-state imaging device according to claim 1, wherein two types of films having different refractive indexes are provided between the light receiving unit and the lens array.   The solid-state imaging device according to claim 1, wherein the condensing lens has a visible light transmittance of 90% or more.   2. The solid-state imaging device according to claim 1, wherein a region corresponding to the pixel is rectangular, and a diameter of the substantially arc is shorter than a diagonal line of the region and longer than one side of the shorter region.   The solid-state imaging device according to claim 1, wherein a region corresponding to the pixel is rectangular. The region corresponding to the pixel is rectangular, and when the shorter one is X and the longer one is Y among the lengths in the vertical and horizontal directions, the radius of curvature R of the condenser lens is expressed by the following equation. The solid-state imaging device according to claim 1, wherein (1) is satisfied.

A plurality of condensing lenses are arranged in the vertical and horizontal directions, and each of the condensing lenses includes a lens array arranged to correspond to each pixel arranged in a two-dimensional plane in a one-to-one correspondence. A solid-state imaging device provided with a light receiving unit,
The region corresponding to the pixel is a rectangle, and the short side of the region is not more than 1/2 of the long side,
The planar shape of the condensing lens viewed from a direction perpendicular to the arrangement surface of the condensing lenses has two substantially parallel straight sides facing each other and two substantially circular arcs connecting the straight sides. The centers of the two substantially circular arcs substantially coincide with the center of the region corresponding to the pixel, and the curvature of the condenser lens in the diagonal direction of the region and the curvature of the condenser lens in the side direction of the region are Are substantially equal to each other.   The solid-state imaging device according to claim 1 or 7, wherein a wall surface of the condensing lens including a straight side in a planar shape of the condensing lens is not perpendicular to an arrangement surface of the condensing lens.   The solid-state imaging device according to claim 1, wherein the condenser lens is formed in a binary shape whose shape approximates a step shape.   The solid-state imaging device according to claim 1, wherein the light receiving units are arranged in a two-dimensional plane, and each condenser lens of the lens array corresponds to each of the light receiving units one to one.   The solid-state imaging device according to claim 10, wherein a focal length of the condenser lens is substantially equal to a distance to the light receiving unit.

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