JP2006071492A - Apparatus and method for measuring particulate component in gas - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an apparatus and a method for measuring a particulate component in a gas which eliminate a gas component and finely analyze the particulate component only. <P>SOLUTION: The apparatus is provided with a depressurization chamber 11 comprising a first depressurization chamber 11-1 and a second depressurization chamber 11-2 having the different degree of depressurization, a gas introducing section 13 provided in the first depressurization chamber 11-1 having the high degree of depressurization and introducing the gas containing the particulate component, a separation section 14 for communicating the first depressurization chamber 11-1 having the high degree of depressurization with the second depressurization chamber 11-2 having the low degree of depressurization and separating the introduced gas component 12a and particulate component 12b, a laser light L emitted from a laser apparatus as a plasma conversion apparatus for converting the particulate component 12b introduced into the second depressurization chamber 11-2 having the low degree of depressurization into a plasma, and a photodetector 17 as a detector for measuring the plasma 16 generated by the plasma conversion apparatus 15. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a fine particle component measuring apparatus and method for measuring a concentration of a trace element component in a gas.

  As an analysis apparatus for fine particle components, there is an apparatus such as a mass spectrometer that performs analysis after ionizing a particulate material as a measurement sample. As such a mass spectrometer, a time-of-flight mass spectrometer (TOFMS: Time-of-flight mass spectrometry) as described in Patent Document 1 described below is known, for example.

Japanese Patent Laid-Open No. 10-288602 (paragraph [0005] and FIG. 3)

However, the particulate matter to be a measurement sample is not only one having a uniform composition as a whole, but some particulate matter contains many components to be analyzed.
When such a particulate material is ionized, only the surface components are ionized, and the components inside the core are hardly ionized, so that the internal components cannot be efficiently analyzed.

  In recent years, there has been a demand for measurement of nanoparticles that are fine particles of nano units in a gas. In the apparatus according to Patent Document 1 when measuring such nanoparticles, the accompanying gas is directly applied to the mass spectrometer. As a result of the introduction, there is a problem that it cannot be determined whether the gas component is derived from fine particles or the exhaust gas, and accurate analysis cannot be performed.

  The present invention has been made in view of such circumstances, and provides a fine particle component measuring apparatus and method in a gas that can eliminate gas components and perform good analysis of only fine particle components. Let it be an issue.

  A first invention of the present invention for solving the above-mentioned problem is a particulate component measuring device in a gas for measuring particulate components in a gas, comprising a plurality of decompression chambers having different decompression chambers, A gas introduction part that is provided in a decompression chamber having a high degree of decompression and introduces a gas containing particulate components communicates with a decompression chamber having a high degree of decompression and a decompression chamber having a low degree of decompression. A plasma generator for plasmaizing fine particle components introduced into a vacuum chamber having a low vacuum level, and a detection device for measuring plasma generated by the plasma generator. It is in the particulate component measuring device in the feature gas.

  According to a second invention, in the first invention, the decompression chamber is divided into two parts by a separation unit, and includes a first decompression chamber having a high degree of decompression and a second decompression chamber having a low degree of decompression. The pressure ratio of the first decompression chamber and the second decompression chamber is 10 times or more, and the pressure ratio of the first decompression chamber and the second decompression chamber is 2 times or more. An apparatus for measuring a particulate component in a gas is characterized in that the particulate component is turned into plasma in a chamber.

  According to a third invention, in the first invention, the decompression chamber is divided into three parts by two separators, and a first decompression chamber having a high degree of decompression, a second decompression chamber having a low decompression degree, and a second It comprises a third decompression chamber having a lower degree of decompression than the decompression chamber, the pressure ratio of the gas introduction part, the first decompression chamber, and the second decompression chamber is 10 times or more, and the first decompression chamber and the second decompression chamber The pressure ratio of the decompression chamber is 2 times or more, and the pressure ratio of the second decompression chamber and the third decompression chamber is 10 times or more, and the fine particles in the second decompression chamber and the third decompression chamber, respectively. An apparatus for measuring fine particle components in a gas, characterized in that the components are converted into plasma.

  A fourth invention is the laser according to the third invention, wherein the plasma generator in the second decompression chamber irradiates the fine particle component with laser light having a wavelength of 180 to 400 nm to vaporize the volatile organic compound of the fine particle component. The apparatus for measuring fine particles in a gas, characterized in that the plasma generator in the third decompression chamber is a laser device that irradiates and ionizes a vaporized volatile organic compound with a laser beam in the range of 180 to 400 nm. In the device.

  A fifth invention is the laser according to the third invention, wherein the plasma generator in the second decompression chamber irradiates the fine particle component with laser light having a wavelength of 180 to 400 nm to vaporize the volatile organic compound of the fine particle component. A device for measuring fine particle components in a gas, characterized in that the plasma generator in the third decompression chamber is a laser device that irradiates and irradiates the core of fine particle components with laser light in the range of 400 to 2000 nm. is there.

  A sixth invention is characterized in that, in the fourth or fifth invention, the laser of the laser device is a pulse laser, the pulse width is 1 μs or less, and the laser output is 1 mJ / p or more. In the fine particle component measuring apparatus.

  A seventh invention is the fine particle component measuring apparatus in the gas according to the second or third invention, wherein the pressure of the gas introduction part is atmospheric pressure.

  According to an eighth aspect of the present invention, there is provided the fine particle component measuring apparatus in the gas according to the first aspect, wherein a particle size classification part for classifying the fine particle component is provided on the upstream side of the gas introduction part.

  According to a ninth aspect of the invention, there is provided the fine particle component measuring apparatus in the gas according to the first aspect, wherein a gas component not contained in the sample such as an isotope gas component is mixed into the gas.

  According to a tenth aspect of the invention, there is provided the fine particle component measuring apparatus in the gas according to the first aspect, wherein the gas is an inert gas.

  According to an eleventh aspect of the invention, there is provided the fine particle component measuring apparatus in the gas according to the first aspect, wherein the detecting device for measuring the plasma is a photodetector.

  According to a twelfth aspect of the invention, there is provided the fine particle component measuring apparatus in the gas according to the first aspect, wherein the detection device for measuring the plasma is a mass spectrometer.

  According to a thirteenth aspect of the invention, there is provided the fine particle component measuring apparatus in the gas according to the twelfth aspect, wherein a trap for concentrating the plasma ionized product is provided.

  According to a fourteenth aspect of the invention, in the first aspect of the invention, the particulate component measuring device in the gas is characterized in that the particulate component is a nanoparticle having a particle size in the gas of 100 nm or less.

  A fifteenth aspect of the invention is a method for measuring a fine particle component in a gas for measuring a fine particle component in a gas. There is a method for measuring a particulate component in a gas, wherein the particulate component is separated while separating the gas into a low-pressure decompression chamber, the separated particulate component is turned into plasma, and the plasma is measured.

  A sixteenth aspect of the invention is the fine particle component measuring method in gas according to the fifteenth aspect of the invention, wherein the fine particle component is a nanoparticle in gas.

According to the present invention, by providing the separation unit for separating the gas component in the decompression chamber, only the particulate component can be turned into plasma, and the particulate component can be analyzed efficiently.
In addition, by making the degree of decompression of the decompression chambers divided into a plurality of parts into a plasma in the decompression chamber having a low degree of decompression, only the fine particle component can be made into plasma.
Further, by changing the wavelength of the laser light, the volatile organic compound constituting the fine particles can be ionized or the nuclei of the fine particles can be ionized, and the composition of the fine particle components can be analyzed.
In addition, gas components that are not included in the sample such as isotope gas components are mixed and measured within a range in which the peak of the gas components does not appear, so that the gas components are not affected by the influence of the gas components. Analysis of volatile organic compounds becomes possible.

  Hereinafter, the present invention will be described in detail with reference to the drawings. Note that the present invention is not limited to the embodiments. In addition, constituent elements in the following embodiments include those that can be easily assumed by those skilled in the art or those that are substantially the same.

A trace component measuring apparatus in gas according to Embodiment 1 of the present invention will be described with reference to the drawings.
FIG. 1 is a conceptual diagram illustrating a fine particle component measuring apparatus in gas according to a first embodiment. As shown in FIG. 1, the particulate component measuring device 10-1 in the gas is a particulate component measuring device in the gas that measures the particulate component in the gas, and a plurality of first decompression chambers 11 having different degrees of decompression. -1 and the second decompression chamber 11-2, the first decompression chamber 11-1 having a high degree of decompression, the gas introduction section 13 for introducing the gas 12 containing the particulate component, and the decompression The gas component 12a and the fine particle component 12b constituting the gas 12 including the introduced fine particle component and the first decompression chamber 11-1 having a high degree of communication with the second decompression chamber 11-2 having a low degree of decompression are communicated with each other. And a laser beam irradiated from a laser device (not shown) that is a plasma generator that converts the particulate component 12b introduced into the second decompression chamber 11-2 having a low degree of decompression into plasma. L and generated by the laser beam L And is the plasma 16 made comprises a photodetector 17 is a detection device that measures.

  Here, in this embodiment, a particle size classifying part 21 for classifying the fine particles 12b constituting the gas 12 containing the fine particle component to be introduced is provided on the upstream side of the gas introducing part 13, and the fine particles in the gas to be analyzed The particle size is made uniform. The particle size classifying unit 21 is a known type such as a differential type electric mobility classifier that classifies charged fine particles as disclosed in the above-mentioned Patent Document 1 for each particle size using the difference in electric mobility. A classifier can be used. By this classification, for example, nano-unit particles that exist in the exhaust gas 22 can be introduced.

Further, as the entrained gas 21a to be entrained in the particle size classifying unit 21, for example, N ₂ gas and an inert gas such as Ar or He are used.
In the gas introduction unit 13, the amount of gas introduced into the decompression chamber 11 is adjusted by a splitter (not shown) so that the split ratio is 90:10 to 99.9: 0.1.

  In the present invention, fine particles in exhaust gas, particularly nanoparticles, are mainly measured. However, the present invention is not limited to this, and any fine particle component floating in the gas may be used. Here, the nanoparticle particularly refers to a particle having a particle size of 100 nm or less.

  In the present embodiment, the decompression chamber 11 is divided into two parts by the separation unit 14 and includes a first decompression chamber 11-1 having a high degree of decompression and a second decompression chamber 11-2 having a low degree of decompression. The pressure ratio between the gas introduction unit 13 and the first decompression chamber 11-1 is 10 times or more, and the pressure ratio between the first decompression chamber 11-1 and the second decompression chamber 11-2 is 2 times or more. Yes. In the present embodiment, the gas introduction unit 13 is in the vicinity of atmospheric pressure. In the second decompression chamber 11-2, a plasma 16 is generated from the fine particle component 12b by the laser beam L. The first decompression chamber 11-1 and the second decompression chamber 11-2 are subjected to the above-described predetermined decompression conditions by the first vacuum pump 23-1 and the second vacuum pump 23-2, respectively. I am doing so.

  Here, the first decompression chamber 11-1 and the second decompression chamber 11-2 are communicated with each other, and the gas component 12a and the particulate component 12b constituting the gas 12 containing the introduced particulate component are separated. As the part 14, for example, a skimmer, a fine hole provided in a separation wall located on the same axis as the nozzle of the gas introduction part 13, a gas component 12a such as a communication pipe provided in the separation wall, and a fine particle component 12b are efficiently used. Any one may be used as long as it is well separated and only the fine particle component 12b is introduced into the second decompression chamber 11-2.

  As a result, the gas component 12a is prevented from being introduced into the second decompression chamber 12-2, and only the fine particle component 12b is introduced, so that only the fine particle component can be analyzed.

  The laser of the laser device is preferably a pulse laser, and the pulse width is preferably 1 μm or less, more preferably 10 ns or less. The laser output is preferably 1 mJ or more, preferably in the range of 100 to 500 mJ / p, more preferably in the range of 300 to 400 mJ / p.

In this embodiment, a photodetector is used as a detection device for measuring plasma.
The photodetector may be composed of, for example, a spectroscope and an ICCD camera (camera in which an image intensifier and a CCD element are fiber-coupled).

  In the present embodiment, the laser light L oscillated from a laser irradiation apparatus (not shown) is condensed and condensed on the measurement field 24, and the fine particle component is turned into plasma to generate plasma 16. The plasma 16 is detected by a photodetector 17, the spectrum is obtained, and the fine particle composition is analyzed.

  As described above, the gas 12 containing fine particles classified into a predetermined particle diameter is introduced from the gas introduction unit 13 into the first decompression chamber 11-1, and the first decompression chamber 11-1 and the second decompression chamber 11-1. The gas component 12a is separated by the separation unit 14 communicating with the chamber 11-2, and only the fine particle component 12b is fed into the second decompression chamber 11-2. Thereafter, the fine particle component 12b is converted into plasma by the laser light L, and the plasma 16 is analyzed by the photodetector 17, whereby the entire composition of the fine particle component can be analyzed.

  FIG. 2 is a conceptual diagram illustrating a fine particle component measuring device in gas according to a second embodiment. The fine particle component measuring apparatus 10-2 in the gas of the present embodiment introduces an isotope gas into the gas in the apparatus of the first embodiment, and other configurations are the same as the first embodiment. About the same member, the same code | symbol is attached | subjected and the description is abbreviate | omitted. As shown in FIG. 2, the particulate component measuring device 10-2 in the gas is configured such that the isotope gas 31 is mixed into the gas 12 introduced into the gas introduction unit 13.

Here, examples of the isotope gas 31 include gases having elements labeled with ¹³ C, ¹⁵ N, ¹⁸ O, CH ₃ D, etc., but the present invention is not limited thereto. Absent. Note that isotope gas is a suitable example, and any gas component having a specific peak not included in the sample may be used.

  In the measurement of the second decompression chamber 11-2, the presence or absence of the isotope gas 31 is detected, and the first and second conditions are set so that the mixed isotope gas 31 component is not analyzed. By adjusting various conditions such as the degree of decompression of the decompression chambers 11-1 and 11-2 and the hole diameter of the separation portion 14 and irradiating the laser beam L, the composition of only the fine particle component not affected by the accompanying gas 21a is obtained. Can be analyzed. That is, some gas components may be introduced into the second decompression chamber 11-2 also in the separation unit 14, but when the mixed isotope gas is not analyzed, analysis without influence of the gas components is performed. As a result, only the fine particle component can be analyzed.

An apparatus for measuring particulate components in gas according to Example 3 of the present invention will be described with reference to the drawings.
FIG. 3 is a conceptual diagram illustrating a fine particle component measuring device in gas according to a third embodiment. In addition, about the same member as the microparticle component measuring apparatus concerning FIG. 1, the same code | symbol is attached | subjected and the description is abbreviate | omitted.
In this embodiment, instead of using the laser irradiation apparatus used in Embodiment 1 to generate plasma, the discharge electrode is used to generate plasma.
As shown in FIG. 3, the plasma generating apparatus according to the particulate component measuring apparatus 10-3 in the gas of this embodiment supplies a voltage between the electrodes 41 and 41 that generate the discharge 40 and the electrodes 41 and 41. And a discharge unit 42. Here, the discharge pulse width is preferably 1 μs or less.

  Thus, by using spark discharge instead of using a laser device, a large-scale laser device as in the first embodiment is not used, so that the device configuration is simplified and the cost can be reduced. .

An apparatus for measuring fine particle components in gas according to Embodiment 4 of the present invention will be described with reference to the drawings.
FIG. 4 is a conceptual diagram illustrating a fine particle component measuring device in gas according to a fourth embodiment. In addition, about the same member as the microparticle component measuring apparatus concerning FIG. 3, the same code | symbol is attached | subjected and the description is abbreviate | omitted.
In the present embodiment, in the apparatus of the third embodiment, a plurality of separation sections 14-1 and 14-2 are provided in the decompression chamber 11 so that the decompression chamber 11 has different degrees of decompression.

  That is, as shown in FIG. 4, the decompression chamber 11 according to the particulate component measuring apparatus 10-4 in the gas according to the present embodiment is divided into three parts by a first separation unit 14-1 and a second separation unit 14-2. The first decompression chamber 11-1 having a high degree of decompression, the second decompression chamber 11-2 having a low degree of decompression, and the third decompression degree further lower than the second decompression chamber 11-2. The pressure reduction chamber 11-3 includes a pressure ratio between the gas introduction unit 13 and the first pressure reduction chamber 11-1 that is 10 times or more, and a pressure ratio between the first pressure reduction chamber 11-1 and the second pressure reduction chamber 11-2. The pressure ratio between the first decompression chamber 11-1 and the second decompression chamber 11-2 is 10 times or more. In the present embodiment, the gas introduction unit 13 is in the vicinity of atmospheric pressure. The fine particle component 12b is generated in the second decompression chamber 11-2 by the first discharge 40-1, and the first plasma 16-1 is generated in the third decompression chamber 11-3. The second plasma 16-2 is generated by the discharge 40-2. The first decompression chamber 11-1, the second decompression chamber 11-2, and the third decompression chamber 11-3 are set to predetermined decompression conditions by a vacuum pump (not shown).

  In the present embodiment, the fine particle component of the second decompression chamber 11-2 and the fine particle component of the third decompression chamber 11-3 are turned into plasma by the discharges 40-1 and 40-2, respectively, and plasmas 16-1 and 16 are generated. -2 is generated, and the plasmas 16-1 and 16-2 are detected by the first photodetector 17-1 and the second photodetector 17-2, respectively, to obtain spectra and analyze the fine particle composition. I have to.

  Thereby, the atomic species that can be measured at high pressure and the atomic species that can be measured at low pressure can be efficiently analyzed.

  Here, atoms that can be measured at a high pressure are atoms having low energy levels, and examples thereof include Fe, Na, K, Cr, and Ni. On the other hand, atoms that can be measured at low pressure are atoms with high energy levels, and examples thereof include C, As, SE, and S.

  As a result, in the same apparatus, by making the decompression chamber 11 a plurality of decompression chambers having different degrees of decompression, highly sensitive measurement according to the atomic species of the particulate component can be performed under relatively high pressure and low pressure conditions. It will be possible.

FIG. 5 is a conceptual diagram illustrating a fine particle component measuring apparatus in gas according to the fifth embodiment. In the fine particle component measuring apparatus 10-5 in the gas of this example, in Example 4, the ion accelerating electrode 51 for accelerating ions is provided in the third decompression chamber 11-3, and the accelerated ions are converted into the mass analysis tube 52. The mass is detected by the ion detector 53.
That is, as shown in FIG. 5, the gas component 12a is separated into the fine particle component 12b by the first separation unit 14-1, the plasma 16 is generated by the discharge 40, and the plasma is converted into the second separation unit 14-2. , Is accelerated by the ion acceleration electrode 51, and is analyzed by the ion detector 53 of a time-of-flight mass spectrometer (TOFMS: Time-of-flight mass spectrometry).

  Thereby, the whole composition of the particulate component in the gas can be efficiently analyzed by the time-of-flight mass spectrometer (TOFMS).

FIG. 6 is a conceptual diagram illustrating a fine particle component measuring device in gas according to a sixth embodiment. The fine particle component measuring apparatus 10-6 in the gas according to the present embodiment does not include the second separation unit 14-2 in the fifth embodiment, and irradiates the laser beam L within the ion acceleration electrode 51. Yes.
That is, as shown in FIG. 6, the gas component 12a is separated into the fine particle component 12b by the separation unit 14 applied to the fine particle component measuring device 10-6 in the gas, and the fine particle component 12b is converted into plasma by the laser beam L, The plasma ions are accelerated by the acceleration electrode 51 and analyzed by an ion detector 53 of a time-of-flight mass spectrometer (TOFMS) (Time-of-flight mass spectrometry).

  As a result, the third decompression chamber 11 is cooled after being converted into plasma in the second decompression chamber 11-2 as in the fifth embodiment and then passing through the second separator 14-2. As compared with the case of accelerating with the ion accelerating electrode 51 in -3, no noise is generated during the cooling, so that highly sensitive measurement is possible.

FIG. 7 is a conceptual diagram illustrating an apparatus for measuring a particulate component in gas according to a seventh embodiment. The fine particle component measuring apparatus 10-7 in the gas of this embodiment is provided with the second separation unit 14-2 and the third decompression chamber 11-3 in the sixth embodiment, and the second decompression chamber 11-3. In the chamber 11-2 and the third decompression chamber 11-3, the laser beams L-1 and L-2 are irradiated.
That is, as shown in FIG. 7, the gas component 12a is separated into the fine particle component 12b by the first separation unit 14-1, and this is irradiated with the first laser light L-1 to volatilize the fine particle component 12b. The organic organic compound (VOC) is turned into plasma, the core portion of the fine particle component 12b is passed through the second separation unit 14-2, introduced into the third decompression device 11-3, and into the ion acceleration electrode 51. Then, the second laser beam L-2 is irradiated to make the core portion of the fine particle component 12b or the volatile organic compound (VOC) into plasma, and the plasma ions are accelerated by the acceleration electrode 51, and a time-of-flight mass spectrometer ( Analysis is performed by an ion detector 53 of TOFMS (Time-of-flight mass spectrometry).

  That is, the volatile organic compound of the fine particle component is separated in the second decompression chamber 11-2, and the separated volatile organic compound or the fine particle component that has become the core part is separated into the laser beam in the third decompression chamber 11-3. Since the plasma is generated by L-2, the composition of the fine particle component can be analyzed.

  Here, the wavelength of the laser beam for vaporizing the volatile organic compound of the fine particle component 12b in the second decompression chamber 11-2 may be in the range of 180 to 400 nm. Further, in the case where the vaporized volatile organic compound is ionized in the third decompression chamber 11-3, the wavelength of the laser light may be similarly set in the range of 180 to 400 nm. Thereby, an aromatic hydrocarbon type substance can be measured. Note that vacuum ultraviolet light may be used for measurement of paraffinic hydrocarbons.

On the other hand, when the core portion of the fine particle component is ionized, the wavelength of the laser beam in the third decompression chamber 11-3 may be in the range of 400 to 2000 nm, more preferably in the range of 500 to 1500 nm.
Thereby, the whole core part other than the volatile organic compound is ionized, and mass analysis of the whole core part becomes possible.

  As a result, the volatile organic compound component and the core portion constituting the fine particle component can be separately measured, and the composition distribution of the fine particle component can be analyzed.

Here, FIG. 9 shows the result of mass spectrometry of anthracene, which is a volatile organic compound, using the fine particle component measuring apparatus 10-7 shown in FIG.
FIG. 9 shows the measurement of only the components of the volatile organic compound. The wavelength of the laser beam is 266 nm, the laser output is 2 mJ / p, and the laser beam is not condensed.
In the measurement, the degree of decompression in the third decompression chamber 11-3 was 10 ⁻³ torr, and the degree of decompression in the mass spectrometer tube 52 was 10 ⁻⁵ to 10 ⁻⁶ torr.

  FIG. 10 shows the case where the laser beam is condensed in FIG. 9 and the particle is decomposed at a laser beam wavelength of 266 nm. The particle composition is strongly influenced by the decomposition of anthracene which is a volatile organic compound. Could not be measured.

  FIG. 11 shows a case where the fine particle component is decomposed with the wavelength of the laser light being 1064 nm. In this case, unlike the case where the wavelength of the laser beam was 266 nm, the composition of the particles could be measured without being affected by the decomposition of anthracene, which is a volatile organic compound.

FIG. 12 is an analysis example using the particulate component measuring device 10-7 in the gas shown in FIG. 7 and actually using exhaust gas from a diesel engine as exhaust gas.
The wavelength of the laser beam is 1064 nm, the laser output is 500 mJ / p, and the laser is condensed. From this result, it was possible to analyze the Na component and S component, which are the core parts of the nanoparticles that are fine particle components.

  FIG. 8 is a conceptual diagram illustrating a fine particle component measuring apparatus in gas according to an eighth embodiment. In the present embodiment, in the seventh embodiment, an ion trap 61 is provided in the ion path of the third decompression chamber 11-3 to concentrate ions.

  That is, pores are formed at substantially the centers of the first end cap electrode 61a and the second end cap electrode 61b opposite to each other of the ion trap 61, and are applied by a high-frequency power source (not shown). While capturing molecules ionized in the pores, specific ions are trapped in the ion trap region by a voltage frequency corresponding to the mass, and ions of other masses are ejected from the pores of the second end cap 61b, or ions Defeated by hitting the inner wall of the trap. As a result, only ions with a specific mass gather in the central region. Thereafter, when the high-frequency electrode is turned off and a voltage is applied to the first end cap electrode 61a and the second end cap electrode 61b, the collected ions are ejected from the pores of the second end cap electrode 61b, and mass spectrometry is performed. It is detected by an ion detector 53 in the tube 52.

  Here, in the present invention, it is preferable that the high-frequency electrode has a voltage of 1000 to 1500 V and the frequency is 1 MHz or more. This is because when the object to be measured is nano-particles, the voltage and frequency are used to efficiently trap in the ion trap region.

  In the present invention, the ionization timing by the second laser beam L-2 is synchronized with the cycle timing of the high-frequency electrode of the ion trap 61 so that the ionized molecules are selectively captured by the ion trap 61. Yes.

  Thus, according to this embodiment, it is possible to measure the volatile organic compound having the composition of the fine particle component in the same gas and the core portion almost simultaneously.

  As described above, the particulate component measuring device in the gas according to the present invention can reduce noise from the plasma field and improve the measurement sensitivity, so that the particulates in the gas can be efficiently analyzed. It can be applied to elucidate the composition of nanoparticles.

1 is a schematic view of a fine particle component measuring device in gas according to Example 1. FIG. It is the schematic of the particulate component measuring device in the gas concerning Example 2. FIG. It is the schematic of the particulate component measuring device in the gas concerning Example 3. FIG. It is the schematic of the particulate component measuring device in the gas concerning Example 4. FIG. FIG. 6 is a schematic view of a fine particle component measuring device in gas according to a fifth embodiment. FIG. 7 is a schematic view of a fine particle component measuring device in gas according to a sixth embodiment. FIG. 10 is a schematic view of a particulate component measuring apparatus according to Example 7. FIG. 10 is a schematic diagram of a fine particle component measuring apparatus according to Example 8. It is a figure which shows the measurement result of the anthracene which is a volatile organic compound of microparticles | fine-particles. It is a figure which shows the measurement result which decomposed | disassembled the anthracene which is a volatile organic compound of microparticles | fine-particles. It is a figure which shows the measurement result of the nucleus part of microparticles | fine-particles. It is a figure which shows the measurement result of the fine particle nucleus part in diesel exhaust gas.

Explanation of symbols

10-1 to 10-8 Fine particle component measuring device in gas 11 Decompression chamber 11-1 First decompression chamber 11-2 Second decompression chamber 11-3 Third decompression chamber 12 Gas containing particulate component 13 Gas introduction Part 14 Separation part 14-1 First separation part 14-2 Second separation part 16 Plasma 17 Photodetector L Laser light

Claims (16)

A fine particle component measuring device for measuring fine particle components in gas,
A decompression chamber comprising a plurality of decompression chambers having different degrees of decompression;
A gas introduction part which is provided in a decompression chamber having a high degree of decompression and introduces a gas containing a fine particle component;
A separation unit that separates the introduced gas component and the fine particle component while communicating the decompression chamber having a high degree of decompression and the decompression chamber having a low degree of decompression;
A plasma generator that converts the particulate component introduced into the vacuum chamber having a low degree of vacuum into plasma;
A device for measuring fine particle components in a gas, comprising: a detector for measuring plasma generated by the plasma generator. In claim 1,
The decompression chamber is divided into two by a separation unit, and includes a first decompression chamber having a high degree of decompression and a second decompression chamber having a low degree of decompression,
While the pressure ratio of the gas introduction part, the first decompression chamber and the second decompression chamber is 10 times or more,
The pressure ratio between the first decompression chamber and the second decompression chamber is twice or more,
An apparatus for measuring a particulate component in a gas, wherein the particulate component is converted into plasma in the second decompression chamber. In claim 1,
The decompression chamber is divided into three parts by two separators, and a first decompression chamber with a high degree of decompression, a second decompression chamber with a low decompression degree, and a third decompression degree that is lower than the second decompression chamber. Consisting of a decompression chamber,
The pressure ratio of the gas introduction part, the first decompression chamber and the second decompression chamber is 10 times or more,
The pressure ratio between the first decompression chamber and the second decompression chamber is 2 times or more, and the pressure ratio between the second decompression chamber and the third decompression chamber is 10 times or more,
An apparatus for measuring a particulate component in a gas, wherein the particulate component is converted into plasma in each of the second decompression chamber and the third decompression chamber. In claim 3,
The plasma generator in the second decompression chamber is a laser device that irradiates a fine particle component with a laser beam having a wavelength in the range of 180 to 400 nm to vaporize a volatile organic compound of the fine particle component. An apparatus for measuring fine particle components in a gas, wherein the apparatus is a laser apparatus that irradiates and ionizes a vaporized volatile organic compound with a laser beam in a range of 180 to 400 nm. In claim 3,
The plasma generator in the second decompression chamber is a laser device that irradiates a fine particle component with a laser beam having a wavelength in the range of 180 to 400 nm to vaporize a volatile organic compound of the fine particle component. An apparatus for measuring fine particle components in a gas, characterized in that the apparatus is a laser device that irradiates the nuclei of fine particle components with a laser beam in the range of 400 to 2000 nm and ionizes them. In claim 4 or 5,
An apparatus for measuring fine particle components in gas, wherein the laser of the laser device is a pulse laser, the pulse width is 1 μm or less, and the laser output is 1 mJ / p or more. In claim 2 or 3,
The apparatus for measuring fine particle components in gas, wherein the pressure of the gas introduction part is atmospheric pressure. In claim 1,
An apparatus for measuring a fine particle component in a gas, wherein a particle size classification portion for classifying the fine particle component is provided on the upstream side of the gas introduction portion. In claim 1,
An apparatus for measuring a particulate component in a gas, wherein the gas is mixed with a gas component that is not contained in the sample, such as an isotope gas component. In claim 1,
The fine particle component measuring device in the gas, wherein the gas is an inert gas. In claim 1,
An apparatus for measuring fine particle components in gas, wherein the detection apparatus for measuring plasma is a photodetector. In claim 1,
A device for measuring particulate components in gas, wherein the detection device for measuring plasma is a mass spectrometer. In claim 12,
A device for measuring fine particle components in a gas, comprising a trap for concentrating the plasma ionized product. In claim 1,
The fine particle component measurement apparatus in gas, wherein the fine particle component is a nanoparticle having a particle size in gas of 100 nm or less. A method for measuring fine particle components in a gas for measuring fine particle components in a gas,
Introducing a gas containing particulate components into a vacuum chamber with a high degree of vacuum,
While separating the gas from the decompression chamber with a high degree of decompression to the decompression chamber with a low degree of decompression, the fine particle component is separated,
A method for measuring a fine particle component in a gas, wherein the separated fine particle component is converted into plasma and the plasma is measured. In claim 15,
A method for measuring a fine particle component in a gas, wherein the fine particle component is a nanoparticle in a gas.

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