JP2006064489A - Measuring instrument using static pressure gas bearing and supporting stand - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To raise a precision in a measuring process, and each efficiency of positioning and conveyance by suppressing friction with a surface plate and vibration produced by instrumentation operation, and moreover to raise the efficiency of operation such as handling by suppressing friction with the surface plate, etc., when a measuring instrument wanted to support is heavy, since instrumentation precision lowers owing to friction and vibration and workability becomes inefficient, when smoothness in a horizontal direction is measured with a dial gauge (2) or the like, or marking-off in the horizontal direction is carried out with a height gauge or the like. <P>SOLUTION: By improving an existing invention which floats and supports, by static pressure, a measuring instrument or the like with a measuring instrument supporting stand (10) having a static pressure gas bearing mechanism, friction produced from the instrumentation action etc. is suppressed, vibration is suppressed, a load on an instrumentation mechanism is reduced, and a burden on a worker in respect of weight is lightened. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a measuring instrument and a support base that can improve measurement accuracy and working efficiency using a static pressure gas bearing in mechanical engineering.

Conventionally, in a measurement process using a dial gauge or the like, oil or fat was used as a lubricant between the measuring instrument support and the surface plate. When measuring work without using a lubricant, when measuring and moving the measuring instruments and materials on the surface plate and their weight is excessive, time and labor are wasted due to mutual friction and inefficiency There was a drawback.

To counteract these problems, a pneumatic hammer (vibration) was generated even if the measuring instrument support was lifted by a static pressure gas bearing to reduce the mutual friction, and it was not easy to improve measurement accuracy. Even when a pneumatic hammer does not occur, the seating of the support base is unstable, making it unsuitable for measurement work. Furthermore, most of the static pressure gas bearings are used for lubrication to reduce mutual friction in the rotational motion in the bearing and the reciprocating motion on the track.
JP 2002-39180 A Japanese Patent Application No. 2004-212751 Junichi Juai "Gas bearing design guidebook" Kyoritsu Shuppan Co., Ltd. January 10, 2002 First edition

When measuring while moving the measuring instrument support on the surface plate, the measurement error occurs due to the vibration caused by the friction between the measuring instrument support and the surface plate. And it takes a burden on the workers in repeated measurement work for a long time. Furthermore, the friction between the measuring instrument and the surface plate causes a decrease in accuracy due to wear, resulting in contamination due to wear, resulting in reduced workability.
Measurement accuracy cannot be maintained because vibration due to friction between the measuring instrument support and the surface plate causes unnecessary fatigue to the mechanism of the measuring device and lowers the accuracy of the measuring instrument.

  In order to solve the above problems, when a measuring instrument is supported by a levitating support base using a static pressure gas bearing (hereinafter abbreviated as static pressure), if the support rigidity by static pressure is increased, the pneumatic characteristic peculiar to the static pressure gas bearing The vibration of the hammer occurs, the gap (h) between the support base and the surface plate is not constant, and the measurement accuracy cannot be increased. Moreover, even if the measuring instrument support is simply lifted by static pressure in the absence of vibration of the pneumatic hammer, the gap between the support and the surface plate is not constant, and the support is unstable. Since it cannot be expected, it aims at providing the measuring instrument which applied the measuring instrument support stand provided with the static pressure floating support mechanism which prevents the stability of the support stand and the generation of the pneumatic hammer during the static pressure operation.

  Moving a large cylindrical scorer on the surface plate wears both sides due to friction, leading to reduced accuracy. Furthermore, a huge scoyer cannot be moved easily by human power, and must be lifted with equipment such as a chain block for movement, which is very inconvenient. On the other hand, when a heavy material is repeatedly processed on a table of a drilling machine, or when a material is processed using a heavy vise, labor is wasted in positioning a processing point.

  Therefore, another object of the present invention is to provide a cylindrical scorer and a positioning correction table that reduce the mutual friction between the surface plate / table and the measuring instrument / positioning table with the floating support of static pressure and improve workability. Yes.

The first feature of the present invention is, for example, as shown in FIG. 1, a normal atmosphere is compressed by an external compressor, and a hose that is an air pressure source leads to a chamber in which compressed air is configured inside a support base, etc. Compressed air in the chamber is squeezed and discharged from the discharge port (13), and the vertical and horizontal directions are supported by levitating and supporting the measuring instrument on the plane to be operated by the static pressure generated between the bottom surface of the measuring instrument and the surface plate. Can move easily.
The present invention in which the existing invention in which the static pressure mechanism is opened on the two-dimensional plane is further applied to the measurement, positioning correction, and conveyance and the work efficiency is improved has a great feature in this respect.

  The measuring instrument according to the first aspect of the present invention includes a fixing column (22) for fixing the arm (20a, 20b) to the measuring instrument support base upper surface (11a) at an angle, and the measuring instrument support base. The bottom surface inner side (12a) is concave and the bottom surface outer side (12b) is convex. The convex surface becomes a hydrostatic bearing surface region, and there is a compressed air discharge port (13) and a compressed air escape groove (17). Is provided. For example, as shown in FIG. 1, a plate-shaped arm freely supports a measuring unit (2) such as a dial gauge at an arbitrary angle (φ1, φ2, φ3), and the arm is fixed to a measuring instrument support with a column. It is a measuring instrument. Further, the leveling instrument (20) can be provided which is used while being floated and supported by static pressure due to the bottom shape of the instrument support base.

  The measuring instrument support according to the second aspect of the present invention has a concave (31f) inside the bottom surface of the static pressure base and a convex shape outside the bottom surface, and the convex surface (31e) becomes a static pressure bearing surface region where compressed air flows. A discharge port (13) and a compressed air escape groove (17) are provided, and a measuring instrument can be mounted on the upper surface of the variable base in which the variable base is tiltably connected on the static pressure base. As illustrated in FIG. 4, one static pressure base (36 c) and two variable bases (36 a, 36 b), a total of three parts, constitute a general shape of the measuring instrument support base (36). . Each of the variable bases is supported by three points and is grounded to the lower part, and one of the three points is an adjustment screw (37a, 37b), so that the upper surface portion (31a) of each variable base is inclined by the upper and lower sides of the adjustment screw. And a measuring instrument support (36) that can be used while floating and supporting itself with static pressure due to the shape of the bottom surface.

  According to a third aspect of the present invention, there is provided a compressed air discharge port on the inner surface of a lift having a hollow horizontal cross section for connecting the measuring sections (2b, 2c), and a gap is opened between the linear guide and the lift is held by the linear guide. A hydrostatic bearing surface area is formed on the upper surface of the measuring instrument support base of the second aspect, and the lift slides up and down while holding an upright linear guide. For example, as shown in FIG. 4, it has a lift (32) in which a measuring part such as a test gauge can be installed, and the annular (FIG. 6) lift has a clearance from four sides on the side surface (37c) of the linear guide (37). Open and carry it. An air gap (FIG. 7-h3) between the inner surface (32a) of the lift and the convex surface (i2) of the linear guide facing the lift forms a hydrostatic bearing surface region, and a compressed air discharge port ( 32e). The upper limit is the stroke until the upper surface part (30a) of the lift hits the stopper, and the lower limit is the stroke until the lower surface part (30b) of the lift hits the upper surface part (31a) of the measuring instrument support. Can slide up and down. By providing such a sliding structure on the upper surface of the variable base of the measuring instrument support base according to the second aspect of the present invention, it is possible to provide a verticality / horizontality measuring instrument that floats and supports itself with static pressure.

  According to the invention of claim 4, the inner side of the bottom surface of the cylindrical scorer is concave (49), the outer side of the bottom surface is convex (48), the convex surface becomes a hydrostatic bearing surface region, and the compressed air discharge port is connected to the hydrostatic bearing surface. It is arranged in a region. For example, as shown in FIG. 9, in the bottom surface portion (41b) of the cylindrical scorer (40), the discharge port (43) for the static pressure gas bearing is the bottom surface convex portion (48) which is the static pressure bearing surface region of the bottom surface. By providing a plurality of them, a cylindrical scorer can be provided that can float and move itself without contact with a surface plate or the like by gas lubrication by static pressure.

  According to the fifth aspect of the present invention, there is provided a measuring instrument support base comprising a frame (72) inserted into a hollow portion of the frame-shaped exterior part (71) to form an integral measuring instrument support base, and the measuring instrument is placed on the upper surface of the support base However, a compressed air chamber (75) is provided on both the frame-shaped exterior part and the frame, or on the inner surface (FIGS. 12-72s, 72ss) where the frame-shaped exterior part and the frame are in contact with each other. A groove structure is provided, and the inner surface of the bottom surface (70b) is concave (79), the other outer portion is convex, and the compressed air discharge port and escape groove (77) are formed on the convex surface. ) Is provided. As illustrated in FIG. 11, the static pressure bearing surface region is provided on the bottom surface of the measuring instrument support base (70) while the measuring instrument is placed on the upper surface (70a), and the discharge port (73) of the static pressure gas bearing is provided. Can be moved in a non-contact manner with a surface plate by gas lubrication by static pressure, thereby providing a measuring instrument support.

  According to a sixth aspect of the present invention, there is provided a handle (54) having an adjustable handle having a compressed air discharge on / off switch provided with a compressed air discharge port in a bottom surface portion of a positioning correction base, the bottom surface serving as a hydrostatic bearing surface region. It is provided. As illustrated in FIG. 15, the entire bottom surface portion (53b) is a hydrostatic bearing surface region, and the discharge port (56) of the hydrostatic gas bearing that can move on the table by levitation support is formed on the bottom surface of the support base (50). By providing it, it can move without contact with the lower table by gas lubrication by static pressure, enabling positioning correction of the processing point on the drilling machine, and the operator can immediately stop the static pressure at any angle It is possible to provide a positioning correction stand (50, 50t) characterized in that it can be fixedly supported while the handle is held.

  According to the first aspect of the present invention, when measuring the smoothness in the horizontal direction by using a dial gauge or the like as the measuring section (2), the discharge port of the static pressure gas bearing capable of supporting floating is provided on the bottom surface of the measuring instrument support base. As a result, the static pressure itself supports the surface, and the friction is remarkably reduced without contact with the surface plate. Therefore, there is no vibration caused by friction between the bottom surface (11b) of the measuring instrument support and the surface plate (3). Therefore, an unnecessary load is not applied to the dial gauge measuring mechanism, the accuracy can be prevented from being lowered, and the device itself can be moved horizontally in a stable manner, so that highly accurate measurement can be performed.

  By making the arms (20a, 20b) plate-like, the measuring instrument can be reduced in weight and size while ensuring rigidity. By reducing the weight and size, it is possible to maintain the ascent by static pressure by supplying a slight air pressure and to use it in a narrow work environment. Therefore, when there are restrictions on working conditions such as constant temperature, humidity, dustproof, etc., such as in clean rooms that handle pharmaceuticals and foodstuffs, this measuring instrument that performs non-contact measurement operation does not have dust due to wear, and is oil-lubricated. If the supply air from the air pressure source (s) is controlled cleanly, it can be used effectively.

  According to the second aspect of the present invention, the inclination of the variable base (36a, 36b) can be adjusted arbitrarily. The upper surface portion can be corrected horizontally with two adjustment screws (37a, 37b) even when the upper surface portion becomes non-horizontal, and the horizontal correction is installed upright on the upper surface portion of the measuring instrument support base. Since the vertical correction of the linear guide according to the invention is performed, it becomes possible to measure the verticality and the perpendicularity while floating with static pressure.

  Conventional vertical and perpendicularity measuring instruments are heavy and heavy, and workers move and measure the instrument with both hands. In this case, the mutual friction between the bottom surface of the measuring instrument and the surface plate is greatly reduced in accuracy, and labor is wasted. However, the present invention floats and supports the measuring instrument itself with static pressure, so there is no wear due to mutual friction and it is possible to prevent a decrease in accuracy, and overcoming conventional problems by saving labor and improving efficiency of measuring instrument movement.

  According to the third aspect of the present invention, since the lift (32) air-chucks the linear guide with static pressure, the inner surface (32a) of the lift and the side surface (37c) of the linear guide are not in contact with each other. In addition, there is no mutual wear and backlash, and since there is a constant centering effect due to holding by static pressure, highly accurate vertical measurement can be maintained. Furthermore, if the lift is fixed at an arbitrary height, the measuring instrument can be moved in the horizontal direction with static pressure, so that there is an advantage that the same measuring unit can measure the levelness as it is.

  According to the fourth aspect of the present invention, by providing the discharge port (43) of the static pressure gas bearing capable of moving on the surface plate or the like by the floating support at the bottom surface portion (41b) of the cylindrical scorer, gas lubrication by static pressure is performed. By making non-contact with the surface plate etc., the friction with the surface plate etc. is remarkably reduced, and it can move on the surface plate etc. with a minute force from the side, so it is not easy to move on the surface plate Even if the cylinder scorer (40) is excessively large, it is possible to easily move to the measurement point by levitating itself by static pressure, so that there is an advantage that measurement work can be easily continued.

  Conventionally, if the weight is too heavy, it is lifted by a chain block or the like, or left on the surface plate. However, according to the invention of claim 4, the weight that is difficult to move by human power is excessive. Even a squayer can move with light force.

  According to invention of Claim 5, a measuring instrument can be mounted in an upper surface, and a static pressure bearing surface area | region is provided in the bottom face of a measuring instrument support stand (70), and the discharge port ( 73) is arranged on the bottom convex portion (78) which is the hydrostatic bearing surface area of the bottom surface, and can move without contact with the surface plate by gas lubrication by static pressure. In addition, because the thickness can be reduced to around 10 mm, the measurement work can be carried out with the ready-made height gauge mounted and immediately floating with static pressure. The working efficiency of measurement can be remarkably improved. As another method of use, install a jack on the top of the support base, place it on multiple (three or more) surface plates, and place it on the jack so that the lower surface of the heavy object hits the main support. It can also be used in conveyors that can adjust the level of heavy objects simply by increasing the number of platforms.

  According to the sixth aspect of the present invention, the bottom surface portion is a hydrostatic bearing surface region, and the discharge port of the hydrostatic gas bearing that can move on the table or the like by floating support is provided on the bottom surface portion of the correction base (50). Therefore, the friction with the table or the like can be remarkably reduced by non-contact with the lower table or the like by gas lubrication by static pressure, and the table or the like can be moved with a small force from the side surface. For example, as shown in FIG. When a single material is processed with a drilling machine, a correction table (50) that floats and supports with static pressure is placed on the table (61) of the drilling machine, and the material (Wk) is heavy when placed on it. However, since it can be moved with a light force, there is an advantage that the processing point positioning time can be shortened and labor can be saved. In addition, as illustrated in FIG. 16, as a method for positioning a plurality of materials in one material, a machining point is used to mark a processing point with a shallow temporary hole (F1) by a drill, and then in the main processing with a drilling machine. By simply rubbing the conical tip (3e) of the drill that has been rotated and mounted on the drilling machine into the temporary hole just above, if the material is placed on the correction table and supported to float, the rotational force of the drill can be adjusted to the position of the hole. Centering is performed and accurate positioning is completed, and it is possible to proceed to boring as it is.

  Conventionally, when repeatedly processing a single material with a drilling machine, if the material is heavy or if the material is fixed with a heavy vise, each time the next processing point is positioned, Because of the large amount of friction, labor and time were wasted. Also, regarding the positioning accuracy, the drill positioning after the marking of the processing point was visually observed each time. Although it is easy to eliminate the error, it was very inefficient to eliminate the error before and after seeing the material from the side because the posture of the operator was difficult to collapse. However, the invention according to claim 6 has the advantages of shortening the processing point positioning time, saving labor, and maintaining processing accuracy.

  In the past, there was a device that provided a discharge port on the upper surface of the support base, and in FIG. 13 (53a), and moved the material up and moved, but since the discharge port was upward, cutting waste entered it and caused clogging. It was. However, since the discharge port is in the bottom surface portion (53b) in the invention described in claim 6, there is an advantage that the cutting waste generated from the processing does not enter the discharge port (56) and clogging does not occur.

  After finishing the positioning of the processing point on the upper surface of the material (Wk1), when moving to the boring processing of the same point, operate the boring handle with the right hand and the handle (54) installed on the side of the correction table (50) with the left hand The material (Wk) can be indirectly fixed by grasping at an arbitrary angle. At this time, while holding the handle (54) of the correction table with the left hand, an on / off switch for discharging compressed air installed on the handle With one finger off, stabilizing the support base stops the static pressure of the support base, the correction base lands on the table of the drilling machine, and supports the handle with the left hand. There is an advantage that sufficient stability can be maintained to face the material to be rotated as the drill rotates.

  Conventionally, after processing at a certain point, if the material is light, positioning of the next processing point on the upper surface (Wk1) of the same material can be done with one hand. However, if the material is heavy or if it is a heavy material, In the case where the material is fixed, the material cannot be moved for positioning to the next processing point unless both hands are unavoidable. The invention according to claim 6 is the case where the material is heavy or heavy. Even when the material is fixed with a vise, there is an advantage that the next processing point can be positioned with one hand so as to handle a light material.

  Applying the existing invention that floats stably on the surface plate by static pressure from the bottom surface of measuring instruments, etc., ensuring sufficient strength with as few parts as possible so that it is more convenient for measurement and transport However, the following examples were realized.

  FIG. 1 shows a first embodiment of the present invention. The dial gauge (2) of the measuring unit is installed with two types of arms and a column (22) at the end of the upper surface (11a) of the measuring instrument support (10), and performs horizontal smoothness measurement. The column is installed at the right end of the upper surface. When the measuring unit and arm supported by the column are used to the left as shown in the figure, the center of gravity of the measuring unit and arm located near the knob 21b is generally supported by the measuring instrument. This is because the position of the center of gravity of the entire measuring instrument (20) is small because it is located above the table, which contributes to the stability of its own floating support.

  If the measuring unit is fixed, the inclination of the bottom surface of the measuring instrument support base is constant and a stable stationary state can be maintained, and it can be translated horizontally and vertically on the surface plate. If the compressed air is supplied at a constant pressure from the air pressure source (S), the gap (h) between the surface plate (3) and the surface plate (3) keeps rising, so that the measuring instrument can measure with high accuracy. In order to set the supply pressure to an arbitrary pressure, an air pressure regulator is interposed between the compressor and the air pressure source.

When the angle (φ2) formed by the two types of arms is increased and the position of the measuring unit is moved to the left, the center of gravity of the measuring instrument support base connected to the measuring unit also moves to the left. Although it becomes smaller than the space | gap h and a bottom face (11b) inclines, it can maintain a stable still state as it is and can continue measurement. Further, when the measuring unit and the arm are extended to the right in the opposite direction, the gap h2 is larger than the gap h, and the bottom slope is reversed. Moreover, although the slope becomes steeper than before, the measurement can be continued while still maintaining a stable stationary state. However, since the bottom surface is more stable in a horizontal state, it is preferable to use the measurement unit and the arm by extending leftward as shown in the figure.

  The measuring instrument support of the side view is a cross-sectional view. The compressed air for static pressure is usually the atmosphere, and the hose of the pneumatic pressure source (S) is attached to the hole (W) on the side surface of the support base, passes through the tunnel (19) extending from the inside, and enters the chamber (15). Is sent to. The chamber becomes an annular sealed space when the frame (14) enters the exterior part (10a), and the inside is filled with air of equal pressure. The compressed air sent into the chamber is kept sealed by an O-ring (14r). As a result, the compressed air is squeezed from the chamber and exhausted from all six outlets (13) on the bottom surface, and the static pressure generated between the bottom surface (11b) of the measuring instrument support base and the surface plate (3) is fixed. A slight gap (h) is continuously formed between the plates. When the compressed air for static pressure is supplied at a constant pressure from the air pressure source, the gap (h, h2) between the measuring instrument support (10) and the surface plate is also kept constant.

  As a method for fixing the top (14) to the support base (10), a fixing bolt may be used, or a method of cutting a screw thread into the inner recess itself of the support base and inserting a screw-shaped top may be considered. In the example, the frame is fixed with the fixing bolt (18). In the bottom view, a fixing bolt is arranged at the center of the inner concave surface (12a). In the side view, the fixing bolt penetrates from the bottom to the top of the top, enters into a female screw provided on the lower side of the exterior, and the tightened exterior and the top are integrated.

  The bottom view of FIG. 1 shows the bottom surface of the measuring instrument support. The reason why the shape is circular is to facilitate the forming process by a lathe and reduce the frequency of contact with the surface plate. The compressed air sent into the chamber (15) is discharged from all six outlets (13) on the bottom surface. The six discharge ports on the bottom surface were arranged at equal intervals. The outer periphery of the inner recess (CL) and the outer periphery of the inner recess (CS) are concentric circles, and the diameter of the outer periphery of the inner recess (CS) is set to the outer periphery of the bottom ) Is preferably at least 1/2 of the diameter.

  FIG. 2 shows a cross-sectional view of the measuring instrument support base in a state where no frame is inserted into the exterior part. The space on the inner surface of the exterior part surrounded by the surfaces of 11s, 11ss, and 11d is a columnar shape having the sides of 11s and 11ss, and the frames to be inserted have the same outer shape. The outer diameter of the frame is smaller than the diameter of the inner side surface (11s) of the exterior part by approximately the same dimension, and the frame is inserted along the inner side surface (11s) of the exterior part. As a result, an annular chamber (15) is formed which is closed by four surfaces, that is, the inner surface (11g, 11u, 11t) of the exterior portion and the side surface (14a) of the frame. In order to increase the degree of sealing of the chamber, it is preferable to provide an annular packing such as an O-ring (14r) on the contact surface (11s) between the exterior part and the top and below the chamber.

  The six grooves (17) on the bottom surface of the measuring instrument support base are gas exhaust grooves provided to escape the air pool generated in the space of the bottom surface inner side recess (16) in FIG. If the number of grooves is increased or the width of the grooves is increased, the air easily escapes, so the consumption of compressed air increases, but the occurrence of pneumatic hammer (vibration) is unlikely to occur. Further, it is preferable that the gas exhaust groove and the discharge port (13) are equidistant from each other so that there is no exhaust unevenness, and the grooves are arranged radially when viewed from the fixing bolt (18). If the hole diameter of the discharge port is small, the squeezing effect is great and the static pressure rigidity is increased, but clogging due to dirt is likely to occur. If the hole diameter is large, clogging due to dirt is difficult to occur, but the squeezing effect is small and the static pressure rigidity is lowered, making it difficult to support floating. Therefore, it is preferable to determine the hole diameter of the discharge port according to the purpose of use.

  The surface of the donut-shaped outer convex surface (12b), which is the hydrostatic bearing surface region between the bottom surfaces (CL) and (CS) of the support base in FIG. 1, is mirror-finished and maintains the mirror-finished state. For this reason, when a steel material is used for the measuring instrument support base, it is preferable to increase the hardness by burning or the like. This is because when a strain protrusion is generated on the convex surface due to some impact, the portion comes into contact with the surface plate and it becomes difficult to support the floating of the support base.

  FIG. 3 is an exploded view of the arm projected horizontally. The two types of arm members (20a, 20b) are plate-shaped because of their good workability. Two arms 20a, 20b are connected in parallel so that the longitudinal direction of each member cross-section is vertical, and one arm is connected. As a result, strength was ensured even with light weight. In addition, as shown in the side view of FIG. 1, the arm width is reduced from the support to the measuring unit, and a plurality of circular holes are provided between the knobs in the middle of the arm while ensuring rigidity. This is in order to further reduce the weight and reduce the heavy load concentrated on the arm (20b). In addition, since the link structure is used, the angle (φ1, φ2, φ3) can be changed by adjusting the knobs (21a, 21b, 21c) to set the measuring unit at a free position.

  Assembling the link structure, the convex part (20nt) of the convex nut a (20na) passes through the end hole (20ah) of the arm a and the hole 1 (20h1) inside the collar a (20ka) and protrudes from the opposite direction. The projecting part (20rt) of a (20ra) passes through the end hole of the other parallel arm a and enters the hole 1 of the collar a. The convex part of the ring a is opposed to each other with a gap, and the two parallel arms a are sandwiched between the convex nut a and the convex ring a. Further, the male screw at the tip of the knob a (21a) passes through the relief hole (20h) of the convex ring a and enters the female screw in the convex portion of the convex nut a, and is tightened by the screw mechanism. Both the knob b (21b) and the knob c (21c) are tightened in the same manner, but the knob b, which is a key part of the link structure, sandwiches four plate-like arms. It is preferable to stabilize the arm support by reducing the diameter and length of the collar b than the collar c and the collar a than the collar b. The reason why the plate-like arms are arranged in parallel but not in parallel is to reduce the weight of the arm on the measuring unit side and reduce the overload concentrated on the arm portion on the knob (21c) side. On the other hand, the parts of the arm that are tightened with the convex nut and the knob are all arranged in parallel because the shape of the other parts can be simplified. As a result, the two types of plate-like arms are slightly bent at each point (p1, p2, p3, p4).

  With this link structure, the arm posture can be changed by loosening the three knobs and the arm posture can be fixed independently by further tightening, so that the measuring unit installed at the tip of the arm can be positioned. Can be played easily. Also, if you want to add strength to the link structure, it is very easy to change the design, such as increasing the thickness (20z) of the arm member or changing the material, and there is an advantage that it can be done without changing the machining process. is there.

  FIG. 4 shows a second embodiment of the present invention. A measuring instrument according to the third aspect of the present invention is installed on the measuring instrument support base according to the second aspect of the present invention to form one measuring instrument (30), which is the second embodiment. A linear guide is installed vertically on the upper surface of the support base (36) consisting of a three-layer base, the upper end is fixed to the stopper with four fixing bolts (34b), and the lower end is fixed to four fixing bolts (39a ) And fix to the variable base. The four pillars (38) and the stopper (34) maintain the linear guide in an upright state. A plurality of measuring units can be installed on a lift that surrounds the linear guide and slides up and down. The measurement unit (2b) on the left side is mainly used for measuring the verticality, and the measurement unit (2c) on the right side is for the purpose of measuring the levelness. In either case, the measuring instrument itself floats on the surface plate with static pressure. Designed to allow measurement work.

  When the vertical measurement is performed by the measurement unit (2b) on the left side, the lift (32) needs to move up and down vertically, so the support base has a three-layer structure in order to correct the linear guide (37) vertically. This is because although the measurement work is performed while floating, the gravity center of the measurement unit arm (32bm) may move and the center of gravity of the measurement unit may move, and the gap between the bottom surface (31b) and the surface plate may move the center of gravity. The linear side becomes smaller and the linear guide tilts. Therefore, the vertical adjustment of the linear guide is performed before the measurement with the two adjustment screws (37a, 37b) provided on the support base.

  The four struts (38) support the linear guide via the stopper (34) and also serve to protect against contact with foreign matter. Further, in the linear guide installation, it is preferable that the tensile stress in the vertical direction acts on the linear guide by the fixing bolt on the stopper side and the fixing bolt on the variable base side. This is because the integration of the stopper / support / support and the entire measuring instrument is strengthened by tensile stress, and the linear guide is not easily distorted, which leads to maintenance of measurement accuracy.

  The measurement in the horizontal direction can be performed by the measurement unit (2c) on the right side by moving the measurement instrument (30) itself horizontally while moving on the surface plate. The mechanism for generating a static pressure based on the static pressure that floats itself is the same as the technique described in the paragraphs 0030 to 0037 of the first embodiment.

  The plan view of FIG. 5 is a view of the measuring instrument from directly above, and four fixing bolts (34b) in the center pass through the stopper and are fixed in the female screw holes at the upper end of the linear guide. The remaining four fixing bolts (34p) pass through the stopper and are fixed in the female screw holes at the upper ends of the four columns. The lower end of the column is fixed to the variable base a by a fixing bolt (dashed line in FIG. 4). The measurement unit (2d) in the upper part of the figure is hidden in FIG. 4 and shows that a third measurement unit can be provided. The reason why the three measuring units and the fixed knob are arranged in directions of 90 degrees in the vertical and horizontal directions is that the measuring instrument itself is aimed for balance so that it can be floated horizontally with few fine adjustments. Further, from the viewpoint of material strength, it is preferable to dispose the measurement parts and fixing bolts radially at equal angles as viewed from the center part of the stopper in order to secure the thickness after processing.

  FIG. 6 shows the shape of the linear guide and the lift. Looking at the linear guide cross-sectional view, the outline is a square with a side guide width of (j), but the four corners have a face (i4), and the guide groove enters each side with a depth (k). It is out. One side of each side surface is composed of two guide convex surfaces (i2), one guide groove width (i1), and a corner surface (i3). Each of the eight guide convex surfaces has a high hardness, a mirror finish, and a high flatness is preferable for high accuracy measurement. The linear guide sectional view will be described in detail with reference to FIG.

  Below the lift sectional view, an exploded plan view and side view of the lift interior and exterior parts are shown side by side. The lift exterior part (32m) that covers the entire side surface of the lift is a thin cylindrical shape, and is closely attached to the outer peripheral surface (32f) of the interior part (32n) by shrink fitting. A surface finish of the inner peripheral surface (32 g) is required. The reason why the shape is cylindrical is that it is suitable for shrink fitting.

  A plan view and a side view of the lift interior part (32n) are shown on the right side of the lift exterior part. The cross section of the lift interior portion is generally annular, but when viewed from the side, the vertical length (L2) is longer than the diameter (L1) of the cross section. L2 is preferably at least 1.5 times L1. Further, it is necessary to consider that the diameter (L1) is smaller in tolerance than the diameter (L3) of the inner peripheral surface of the lift exterior part, and that the tolerance is for close contact by shrink fitting. Two annular air passages are provided near both ends in the vertical direction of the lift interior part, and a belt-like groove is formed at a depth (h6) and runs around the entire interior part. The air passage is moved to both ends in the vertical direction, thereby preventing backlash from occurring in the sliding operation. Furthermore, in each of the two air passages provided close to both ends, eight chambers (32b) each having a throttling function for generating a static pressure were provided in the periphery.

  FIG. 7 shows a cross section horizontally cut at a position of the chamber of the measuring instrument and the flow of compressed air. The surrounding four circles represent the cross section of the column, and the relatively large circle in the middle and the inside of it showed the cross section of the lift holding the linear guide. The square surrounded by the inner surface (32a) in the lift sectional view is hollow, and the linear guide (37) is held in the four inner surfaces forming the square. Since the guide convex surface (i2) serves as a hydrostatic bearing surface region, eight discharge ports are similarly arranged toward all the eight guide convex surfaces so that the discharge ports (32e) are directed to the guide convex surface. A chamber (32b) that squeezes compressed air from the air passage and supplies it to the discharge port is provided between the air passage and the discharge port. The compressed air supplied from the air pressure source (s) with the above configuration travels around the air passage (33c) that goes around the inside of the exterior part (32m) toward the eight chambers in the direction of the arrows, and is further restricted from there. Ejected from each of the eight discharge ports, static pressure is generated on all four convex surfaces of the four sides in the four directions. As a result, air chucking is performed while holding the gap (h3). By providing guide grooves (37g) in the middle of each side of the linear guide, air chucking is performed only on the hydrostatic bearing surface area of the guide convex surface that occupies the corner of the linear guide 4 side. However, it is possible to realize a non-blurring slide facing the rotational force in the horizontal direction. Furthermore, since the guide groove becomes an exhaust groove of static pressure as it is, it also prevents vibration unique to static pressure. Further, although the surface (i4) is provided at the four corners of the linear guide, this also serves as an exhaust groove, which also prevents vibration. This is because the cylindrical exterior portion (32m) covers the entire side surface of the interior portion (32n) and is in close contact by shrink fitting, but it is possible to omit packing for sealing purposes.

  The fixed knob (33) which does not appear in this cross section is shown by a broken line below the figure. One end of the fixing knob (33) has a male screw structure and penetrates the hole (32r) on the side surface of the lift exterior part, and further enters the female screw hole (32p) of the lift interior part and can be fixed. When the tip (33e) protruding through the lift inner surface (32b) faces the opposing linear guide groove and the fixing knob is tightened, the tip (33e) collides with the linear guide groove and the fixing knob tip penetrates. The lift inner surface (32c) facing the lift inner surface contacts the two linear guide convex surfaces (i2c) opposite to the lift inner surface to sandwich the linear guide from both sides. In this way, the lift can be fixed at an arbitrary position within the slide stroke of the linear guide. When the lift is slid up and down, the fixing knob is loosened while pinching it with a finger, and the linear guide is released from being caught. Until the fixing knob is tightened, it is necessary to support with the fingers pinched so that the lift does not fall.

  FIG. 8 is an exploded view of a three-layer support base (36). The variable base a (36a), the variable base b (36b), the static pressure base (36c) from the top, and the coma below it become a part of the static pressure base. The variable base a is grounded to three sinks (36s) which are depressions on the upper surface of the variable base b at three points, two pieces installed on the bottom surface and the adjusting screw Y. The variable base b is grounded to three sinks on the upper surface of the static pressure base at three points, two pieces installed on the bottom surface and the adjusting screw X. The arrangement of the sinks corresponds to the arrangement of two pieces and a total of three adjustment screws. The arrangement of the three points forms an equilateral triangle with the center of each base as the center, and two donut-shaped upper surfaces (36bf , 36cs), it is preferable from the standpoint of strength that it is set so as not to hit the edge. The bottom of the sink recess and the shape of the tip of the piece and the adjusting screw that are grounded are also flat. In addition, the bottom of the sink recess may have a hemispherical shape for the tip of the piece and the adjustment screw to be grounded, but in that case, if the sphere radius of the sink is increased and the tip of the piece or the adjustment screw is grounded in the sink It is preferable to stabilize the seat while the bases are gently engaged with each other.

  Each adjustment screw protrudes downward from the bottom surface of the variable base to be installed, and preferably has a protruding degree similar to that of the other two installed pieces. The adjusting screw Y corresponds to the female screw in the hole Y (37hy), the adjusting screw X corresponds to the female screw in the hole X2 (37hx2), and only passes through the variable base a hole X (37hx). . Therefore, it is preferable to make the length of the adjustment screw X longer than the adjustment screw Y by the thickness of the variable base a. The angle (θ) formed by the two adjustment screws (37a, 37b) as viewed from the center is 90 degrees, but this is for realizing the fine vertical adjustment of the linear guide with the minimum rotation of the adjustment screw.

  The outer shape of the frame (36k) is a rotating body having a convex staircase structure as viewed from the side, with two large and small cylinders stacked one above the other. Corresponding to this shape, hollow out the interior of the static pressure base and insert a piece from the bottom of the static pressure base to insert a piece of rotating body with a convex staircase structure and a rotating body space of the staircase structure inside the static pressure base hollowed out into a concave shape ( It is preferable to have a configuration in which a tolerance is left in place and the meshing is omitted. The upper surface (36ka) of the top can be seen through the hole (36h) in the center of the static pressure base, and preferably does not protrude from the top of the hole. The top of the rotating body of the convex staircase structure has a smaller tolerance than the space of the rotating body of the staircase structure in the static pressure base hollowed out in a concave shape, and the concave surface is concave except for the top and bottom surfaces (Fig. 4-31f) of the top. It is preferable to make contact with the surface of the interior space of the hollow static pressure base (omitted for shade). In this way, the coma is integrated with the static pressure base, and as a result, the space in which both are closed (FIG. 4-35) forms an annular chamber for generating static pressure. The shape of the chamber, the bottom surface (31b), etc. and the mechanism for generating static pressure overlap with the technique described in the paragraphs 0030 to 0037 of the first embodiment, and will be omitted. However, since the static pressure base has a central hole (36h), it is preferable to provide an additional packing for stopping air leakage. Although the depiction of the O-ring serving as the packing is omitted in FIG. 8, it is preferable to install the O-ring on the surface (36 kf) in which the top and the static pressure base are in contact with each other as shown in FIG. Different.

  The fixing bolt (FIG. 4-39b) plays the role of fixing the top to the static pressure base, but is omitted in FIG. The female screw into which the tightening bolt (39) is inserted is cut in a hole (not shown for shade) at the top of the upper surface of the variable base a, and the variable base b is clamped between the static pressure base and the variable base a from above and below. It becomes composition. The clamping bolt is not fixed, but by providing play, the inclination of the upper surface portion (31a) of the support base can be finely adjusted by moving the adjustment screw described in the paragraphs 0017, 0042, and 0052, as it is. It also becomes vertical correction. Furthermore, elastic tightening is realized by inserting a spring into the play of the tightening bolt. The spring is preferably a disc spring (39s) that exhibits sufficient elasticity even in a narrow space. When mounting the disc spring, the bottom is a washer (39w), and a plurality of disc springs are alternately placed on the washer with the holes aligned, with the screw bolts facing upward. All holes are penetrated. Although not shown in the drawing, in order to prevent excessive tightening by the tightening bolt, it is considered beneficial to incorporate a cylindrical part that wraps the overlapping disc spring from the side. As described above, the support base of the three-layer structure is a flexible clamp that secures the tightening rigidity, and realizes the linear guide upright holding and simple vertical correction.

  FIG. 9 shows a third embodiment of the present invention. The cylindrical squirt (40) itself can be easily moved on the surface plate by the floating support by static pressure. The compressed air for static pressure is sent into the chamber (45) through the tunnel (42) extending therefrom by attaching the hose of the pneumatic pressure source (S) to the hole (W) on the side surface of the cylindrical skewer. The chamber becomes a donut-shaped space by entering the top (44), and the inside is filled with compressed air of equal pressure. Compressed air is squeezed from the chamber, exhausted from all the discharge ports (43) on the bottom surface, and slightly generated between the surface plate due to the static pressure generated between the bottom surface (41b) of the cylindrical disc and the surface plate (3). The void (h) is continuously formed. If the compressed air for static pressure is supplied at a constant pressure, the air gap between the surface plate and the surface plate also keeps rising. The detailed mechanism of the generation of static pressure was described in the paragraphs 0030 to 0037 of Example 1.

  FIG. 10 shows an embodiment with a literal cylindrical scorer. The difference from the square in FIG. 9 is that it is pipe-shaped, so the inside is a cavity, and if an exhaust port (47h) that penetrates up and down is provided in the top, static pressure exhaust can pass through itself and escape from the bottom to the top That is. This figure is illustrated because it is necessary to consider the enhancement of the static pressure rigidity at the bottom surface on which the cylinder scorer is levitated when the weight of the cylindrical skewer is excessive. In order to save air supplied from the air pressure source, as a method for enhancing the static pressure rigidity of the bottom surface without increasing the supply air pressure, for example, in order to enlarge the area of the hydrostatic bearing surface which is the bottom surface convex portion (48), the groove (47 ) Or reduce the number. In this case, the depth of the groove is increased to ensure exhaust escape. As another method, the groove on the bottom convex portion is eliminated. In this case, an exhaust port / exhaust outlet (47e) penetrating the top (44) and the lid (42) is provided, and exhaust escape is ensured through the exhaust port / exhaust port and the hollow (40e) of the cylindrical skewer. In addition, although the bottom concave part (49) is not as strong as the bottom convex part, the force to lift the cylindrical square itself works. Therefore, if the exhaust escape is too large, the bottom concave part does not have the force to lift itself and wastes air. If the exhaust escape is too small, air is not wasted and it is easy to float, but there is a drawback that vibration (pneumatic hammer) is likely to occur. In any case, since the exhaust control is a problem closely related to the size of the measuring instrument and the working environment, it is preferable to set the exhaust groove, the shape of the exhaust outlet / exhaust outlet, etc. according to the situation.

  The structure and material of the bottom surface of the cylindrical scorer are substantially the same as those in the first embodiment. The lid was embedded by being embedded in the upper end of the cylindrical square so as to cover the cavity, and fixed with a fixing bolt (42b).

  FIG. 11 shows a fourth embodiment of the present invention. The general shape of the measuring instrument support (70) is disk-shaped, and is composed of two main parts, an annular exterior part (71) and a columnar frame (72). The reason why the exterior part and the top are formed in an annular shape and a cylindrical shape is that workability in lathe processing is easy. In the plan view, the support is viewed from above, and the frame with the exterior portion is arranged concentrically. A measuring instrument such as a height gauge is mounted on the upper surface of this circle, but when a large measuring instrument is to be mounted, stable mounting can be achieved by expanding only the same horizontal projection area as the plan view. There is no need to increase 70h). As a result, the greatest advantage is that measurement from a low position and stable use at a low center of gravity are possible. Also, when the bottom area of the measuring instrument to be placed is small, if the magnet is attached to the bottom of the measuring instrument, it can be used as it is, but if it is not a magnet, a bolt hole (74) etc. that penetrates the top is provided, It is also possible to fix the measuring instrument and the main support base on the upper surface (72a) using a penetrating bolt.

  The shape of the chamber, the bottom surface (70b) and the like and the mechanism for generating static pressure are the same as those described in the paragraphs 0030 to 0037 of the first embodiment, and are therefore omitted. However, since the exterior part is annular, the inside is hollow, so it is preferable to provide packing that stops air leakage at two locations (72r1, 72r2) and a side surface (72s) above and below the chamber. Is different from the first embodiment.

  In any case of Examples 1 to 3, it is preferable that the smoothness and flatness of the surface of the surface plate on which the measuring instrument is installed have a higher accuracy.

  In claim 5, three options of either the exterior part and the frame, or either the exterior part or the frame, are shown for the location where the groove structure for forming the chamber is provided. Therefore, a method of providing a groove structure only in the frame-shaped exterior part was adopted.

  FIG. 12 shows a longitudinal sectional view of the exterior part as seen from the side. By providing an edge (eg) that forms a diameter (m1) slightly smaller than the hole diameter (m2) into which the frame enters, the frame inserted from below hits the lower surface (71d) and stops. . The stopped frame can be fixed by the adhesion force due to the elasticity of the two O-rings (72r1, 72r2). The two surfaces of 72s and 72s were originally one surface, but were divided into two by a parting with a lathe. The three cut surfaces 71e, 71f and 71g thus formed constitute a groove structure for forming a chamber. Since the mechanism for generating static pressure overlaps with the items 0030 to 0037 in Example 1, the description thereof is omitted.

  13 and 14 show a fifth embodiment of the present invention. The positioning correction table (50, 50t) is supported in a floating manner by static pressure and is not in contact with the table or the like under the support table and can easily move on the table (61) such as a drilling machine. The compressed air for static pressure is sent into the chamber (55) through the tunnel (59) penetrating from the side surface to the inside by attaching the supply hose of the pneumatic pressure source (S) to the side hole (W) of the correction table. The inside of the chamber is filled with compressed air of equal pressure, and is further squeezed and exhausted from all the discharge ports (56) on the bottom surface, and the static pressure generated between the correction table bottom surface portion (53b) and the table causes a gap between the chamber and the table. A slight void (h) is continuously formed. When the compressed air for static pressure is supplied at a constant pressure from the air pressure source, the gap between the support table and the table due to the static pressure continues to float.

  When the surface of the bottom surface portion (53b) of the positioning correction table in FIG. 15 is a hydrostatic bearing surface region, it is mirror-finished, and when a steel material is used for the support table in order to maintain the mirror-finished state It is preferable to increase the hardness by burning or the like. The reason is that if a protruding portion is generated on the bottom surface due to distortion caused by an impact, stable floating support becomes difficult due to contact with the protruding portion.

  FIG. 15 shows the shape of the positioning correction table (50) viewed from below. The discharge ports on the bottom surface portion are preferably arranged in a matrix at equal intervals over the entire surface from the viewpoint of giving rigidity to static pressure and workability for forming the support base internal chamber (55) by boring. .

  The handle (54) shown in FIG. 13 has a compressed air discharge on / off switch (51) installed on the handle, while holding the handle of the correction table with the left hand after the machining point has been positioned. Turn off with one finger, stop the static pressure, and land the positioning correction stand. Therefore, the right hand is used for boring work. Since the left hand is holding the handle (54) of the correction table, the material is indirectly fixed and stable work can be performed. In this way, both the left and right hands hold the same handle, and the series of operations of positioning, high-precision centering, fixing, and machining can be repeated, which is efficient.

  In FIG. 13, two types of hole type and T-groove type are illustrated as means for attaching the material to the correction table, but it is preferable to use them properly according to the purpose of the work. The reason why the pneumatic source hose is not connected to the T-groove handle is based on the assumption that the compressed air discharge on / off switch is a stepping type. It is efficient to repeat the operation. The illustration of the foot switch is omitted.

Since the handle of FIG. 13 expands and contracts with a link structure, the length of the handle can be properly used for positioning and processing, and work efficiency can be improved.
Further, by changing the length of the arm member and the number of parts, it is easy to match the operator's environment.

  FIG. 16 illustrates the mechanism of positioning correction, taking drilling as an example. A side view was drawn assuming that a temporary hole (F1) was formed by staking processing in accordance with the center (α2) of the planned processing region (F2) of the material, and then this processing was performed with a drill (3). The material placed on the positioning correction table is moved so that the center (α2) of the temporary hole faces the center (α1) of the tip of the drill visually. However, although both centers (α1, α2) do not match easily, the material that is supported by the descent is lowered only by slowly lowering the rotated drill and lightly sliding the cone tip (3e) into the temporary hole. The lateral position is finely corrected by the rotational force, and both centers (α1, α2) are aligned, and accurate boring can be performed to the planned machining area. Conventionally, the two centers have been bored without matching, and naturally they have shifted from the planned machining area, resulting in a defective product or damage to the drill. However, the present invention has overcome such problems.

  The present invention can be used in any of the design, processing, and assembly scenes regarding smoothness, vertical measurement, or heavy object movement. The more the object to be lifted and supported by static pressure is a heavy object such as a steel product, the more the utility value is expanded. On the other hand, if the material is small and measurement is desired on a small surface plate, the effect of the present invention can be realized by using a small object for the measuring instrument, measuring instrument arm, and measuring instrument support. If Examples 1, 2, 3, and 4 are used in combination, a certain degree of three-dimensional measurement is simplified. Structural distortions such as thermal variation and deflection due to its own weight are hardly a problem like a large three-dimensional measuring instrument, and it is possible to improve accuracy without changing existing facilities at many sites at low cost. The availability is high.

Explanatory drawing which showed the implementation method of a measuring instrument (Example 1) Sectional view of instrument support base exterior (Example 1) Arm exploded view (Example 1) Explanatory drawing which showed the implementation method of a measuring instrument (Example 2) Plan view of measuring instrument (Example 2) Cross section of linear guide / lift (Example 2) Sectional view of measuring instrument (Example 2) Exploded view of measuring instrument support (Example 2) Explanatory drawing which showed the implementation method (cylinder) of a measuring instrument (Example 3) Explanatory drawing which showed the implementation method (cylinder) of a measuring instrument (Example 3) Explanatory drawing which showed the implementation method of a measuring device support stand (Example 4) Sectional view of exterior part (Example 4) Explanatory drawing which showed the implementation method of a positioning correction stand (Example 5) Front view of positioning correction table (Example 5) Bottom view of positioning correction table (Example 5) Explanatory drawing of correction (Example 5)

Explanation of symbols

10 Measuring instrument support stand 20 Measuring instrument 30 Measuring instrument 40 Measuring instrument (cylindrical square)
70 Measuring instrument support base 50 Positioning correction base h Air gap h2 Air gap h3 Air gap

Claims (6)

A support column for an arm that connects the measuring unit to the measuring device support base at an angle is provided on the upper surface of the measuring instrument support base, the inner bottom surface of the measuring instrument support base is concave, the outer bottom surface is convex, and the convex surface is a hydrostatic bearing. A measuring instrument characterized in that a compressed air discharge port and a compressed air relief groove are provided in a surface area. The inside of the bottom surface of the static pressure base is concave and the outside of the bottom surface is convex, and the convex surface becomes a static pressure bearing surface area, which is provided with a discharge port for compressed air and a relief groove for compressed air. A measuring instrument support, characterized in that a measuring instrument can be placed on the upper surface of the variable base that is tiltably connected to the top of the instrument. A discharge port for compressed air is provided on the inner surface of the lift that has a hollow horizontal cross section connecting the measuring unit, and a hydrostatic bearing surface area is formed between the lift and the linear guide that the lift holds. The instrument mounted on the instrument support base according to claim 2, wherein the instrument slides up and down while holding an upright linear guide. A cylindrical scorer characterized in that a bottom inner side is concave, a bottom outer side is convex, the convex surface is a hydrostatic bearing surface region, and a compressed air discharge port is disposed in the hydrostatic bearing surface region. The frame is inserted into the hollow part of the frame-shaped exterior part to become an integrated measuring instrument support base, and the measuring instrument can be placed on the upper surface of the support base. A groove structure for forming a chamber of compressed air is provided on the inner surface where either the exterior part or the top is in contact, and the inner part is concave on the bottom part, and the other outer part is convex. A measuring instrument support, wherein the convex surface is provided with a compressed air discharge port and a relief groove. Positioning correction table with a compressed air discharge port on the bottom, a hydrostatic bearing surface area on the bottom, and a handle with a handle that has an ON / OFF switch for compressed air discharge. Stand.

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