JP2006055968A - Vertical type rotary grinder - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a vertical type rotary grinder capable of sufficiently obtaining tilting accuracy of an upper part frame. <P>SOLUTION: The upper part frame 20 is tilted by moving a movable block 27 pinched between a first fixed block 21 fixed to the upper frame 20 and a second fixed block 24 fixed to a lower part frame 12 in one direction by a movable block driving device 28. Since load of the upper part frame 20 can be received by comparatively large sliding contact area between a first sliding contact surface 22 of the first fixed block 21 and a second sliding contact surface 23 of the second fixed block 24, and third sliding contact surface 25 and fourth sliding contact surface 26 of the movable block 27 in surface contact with the blocks 21 and 24, load per unit area is reduced to obtain sufficient rigidity (load resistance) and minimize wear. As a result, the vertical type rotary grinder having sufficient tilting accuracy of the upper part frame 20 is obtained. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a vertical rotary grinder for surface-grinding the surface of a flat workpiece with high flatness.

  For example, a workpiece rotation drive device for rotating a workpiece around a rotation axis extending along the vertical direction, and a grinding tool rotation drive for rotating a rotary grinding tool having an annular grinding surface about its axis A vertical rotary that grinds one surface flatly by rotating the workpiece such as silicon wafer or glass and a rotary grinding tool such as a grindstone while pressing the grinding surface against one surface of the workpiece. A grinding apparatus such as a grinding machine is known.

  In one type of the above grinding processing equipment, it is used for a grinding method in which the axis of the rotary grinding tool is inclined to the workpiece rotation axis by a minute angle (that is, a minute angle with respect to the horizontal) and pressed against the workpiece. There is something to be done. According to such a grinding method, the grinding amount is suppressed from being excessive as compared with the case where the tool axis is parallel to the workpiece rotation axis, and the escape of the tool when pressed against the workpiece is suppressed. Therefore, a certain flatness can be obtained regardless of the initial unevenness of the entire surface of the workpiece. That is, even if the rigidity of the grinding device or the rotary grinding tool is insufficient, a flat work surface can be obtained because the workpiece is prevented from being locally ground due to the clearance (for example, Patent Document 1).

  By the way, in the grinding apparatus described in the above-mentioned Patent Document 1, the support device to which the rotary grinding tool is attached is fixed to the apparatus main body frame with a bolt or the like, and the tool shaft is changed by changing the screwing amount of the bolt. I'm tilting my heart. Although the purpose is different, for example, a motor for rotationally driving a rotary grinding tool is supported by, for example, four piezoelectric elements arranged uniformly on the end surface in the circumferential direction, and the amount of distortion of each of the four piezoelectric elements is determined. A structure is also known in which the tool axis is inclined by adjustment (see, for example, Patent Document 2).

JP 11-245148 A Japanese Patent Laid-Open No. 9-290366

  On the other hand, the present inventor vertically attaches a lower frame provided with a work rotation driving device for rotating and driving a disk-shaped work around a vertical axis, and a polishing tool positioned above the flat work. An upper frame provided with a tool rotation driving device that is driven to rotate around a central axis, and provided on the lower frame so as to be rotatable around a horizontal rotation axis that is positioned on the workpiece rotation driving device side; In order to tilt the upper frame, a vertical rotary grinding machine having a tilting drive device provided on the opposite side of the work rotation drive device from the rotation axis has been devised. According to this, in order to slightly tilt the axis of the rotary grinding tool, the entire upper frame with high rigidity and high load attached with the tool rotation drive device is tilted. Thus, high polishing accuracy can be obtained.

  However, in the above-described vertical rotary grinding machine, the upper frame to which the tool rotation driving device is attached has high rigidity and high load. Therefore, the tilt driving device that supports the load and changes the tilt angle is a screw shaft or the like. In the general thing using this, since the rigidity is insufficient and the influence of wear due to continuous use is large, the inclination accuracy cannot be obtained, and therefore the polishing accuracy for the workpiece cannot be sufficiently obtained.

  The present invention has been made against the background of the above circumstances, and an object of the present invention is to provide a vertical rotary grinder capable of sufficiently obtaining the inclination accuracy of the upper frame.

  The gist of the invention according to claim 1 for achieving such an object is to provide a lower frame provided with a work rotation driving device for rotating and driving a disk-shaped work around a vertical axis, and the flat plate. A tool rotation driving device for rotating a polishing tool positioned above the workpiece is rotated around a vertical axis, and a horizontal rotation axis positioned on the workpiece rotation driving device side on the lower frame. A vertical rotary grinding machine comprising: an upper frame that is pivotably provided on the upper surface; and a tilt drive device that is provided on the opposite side of the work rotation drive device from the rotation axis for tilting the upper frame. The tilt drive device is provided such that (a) one and the other of the upper frame and the lower frame face each other and approach each other toward one direction. A first sliding contact surface and a second sliding contact surface; and (b) a third sliding contact surface and a fourth sliding contact surface that are in sliding contact with the first sliding contact surface and the second sliding contact surface. A movable block movably provided along one direction, and (c) a movable block driving device that moves the movable block along the one direction in order to change the position of the movable block. Features.

  The gist of the invention according to claim 2 is that, in the invention according to claim 1, the first sliding contact surface is formed on an upper surface or a lower surface of a fixed block fixed to one of the upper frame and the lower frame. The second sliding contact surface is a horizontal surface provided opposite to the first sliding contact surface on the other of the lower frame and the lower frame, and the movable block includes the first sliding surface. It is sandwiched between the sliding contact surface and the second sliding contact surface.

  The gist of the invention according to claim 3 is that, in the invention according to claim 2, the fixed block is fixed to the upper frame, and the movable frame is a horizontal first provided on the lower frame. The movable block driving device is attached to the lower frame and is provided so as to be movable on two sliding contact surfaces.

  The gist of the invention according to claim 4 is that, in the invention according to claim 3, the movable block driving device includes a rotary actuator whose rotation amount is controlled, and a speed reduction of the rotation actuator. A reduction gear that transmits the movable block, and the movable block is moved based on the rotation reduced by the reduction gear.

  According to the first aspect of the present invention, the tilting drive device includes: (a) a first sliding contact provided so as to face each other on one and the other of the upper frame and the lower frame and approach each other toward one direction. A surface and a second slidable contact surface; and (b) a third slidable contact surface and a fourth slidable contact surface that are in slidable contact with the first slidable contact surface and the second slidable contact surface, along the one direction. (C) a movable block driving device that moves the movable block along the one direction in order to change the position of the movable block. Since the load is received by a relatively large sliding contact area between the first sliding contact surface and the second sliding contact surface and the third sliding contact surface and the fourth sliding contact surface that are in sliding contact with the first sliding contact surface, the unit Since the load per area becomes small, sufficient rigidity (resistance Abrasion with heavy resistance) can be obtained are as small as possible. Therefore, a vertical rotary grinder that can sufficiently obtain the inclination accuracy of the upper frame is obtained.

  According to the invention of claim 2, the first sliding contact surface is an inclined surface formed on an upper surface or a lower surface of a fixed block fixed to one of the upper frame and the lower frame, and the second The slidable contact surface is a horizontal surface provided opposite to the first slidable contact surface on the other of the lower frame and the lower frame, and the movable block is formed between the first slidable contact surface and the second slidable contact surface. Since the upper frame is loaded by the highly rigid fixed block and the movable block, sufficient rigidity (load resistance) can be obtained.

  According to the invention of claim 3, the fixed block is fixed to the upper frame, and the movable frame is movably provided on a horizontal second sliding contact surface provided on the lower frame, Since the movable block driving device is attached to the lower frame, there is an advantage that it has a simple structure.

  According to a fourth aspect of the present invention, the movable block driving device includes a rotary actuator whose amount of rotation is controlled, and a speed reducer that decelerates and transmits the rotation of the rotary actuator. Since the movable block is moved based on the decelerated rotation, the load of the upper frame is supported in the thickness direction of the fixed block and the movable block, and it is only necessary to move the movable block. There is an advantage that the inclination angle of the upper frame can be controlled with high accuracy over a long period of time without receiving the load as it is.

  Here, the tilt drive device may be single, but preferably a plurality of tilt drive devices are suitably provided according to the load of the upper frame. A plurality of the tilt driving devices are arranged as far as possible from a horizontal rotation axis located on the workpiece rotation driving device side of the upper frame, and are arranged on a line parallel to the rotation axis. .

  Further, the upper frame may be provided so as to be rotatable with the lower frame by a rotation shaft, but without using the rotation shaft, the upper frame is formed from a semi-cylindrical protrusion and a semi-cylindrical receiving groove for receiving the protrusion. The upper frame may be rotatably supported by providing the bearing device to be provided on the lower frame.

  Various directions such as a direction toward the rotation axis, a direction away from the rotation axis, and a direction parallel to the rotation axis can be adopted as the moving direction of the movable block of the tilt driving device. In short, it is only necessary to change the inclination angle of the upper frame by moving the movable block.

  Further, the first sliding contact surface and the second sliding contact surface and the third sliding contact surface and the fourth sliding contact surface that are in sliding contact with the first sliding contact surface may not necessarily be a flat surface, and may be a slight curved surface. Good.

  Further, the tilting drive device may be composed of three or more blocks that are stacked on each other.

  Further, when the rotation axis is the first rotation axis, the tool rotation drive unit is pivotable about a second rotation axis that intersects the first rotation axis and is not parallel to the first rotation axis, for example. It may be provided on the frame. In this case, the rotary tool or the tool rotation shaft is rotated about the first rotation axis and is also rotated about the second rotation axis, so that the tool rotation driving device is provided. The tool rotation axis is inclined in a plane perpendicular to the first rotation axis, and is also inclined in a plane perpendicular to the second rotation axis, so that any direction in which the respective inclinations are combined and The tool rotation axis is inclined at an angle. At this time, since the rotation around the first rotation axis and the rotation around the second rotation axis are performed in a shared manner, the tool rotation axis can be inclined in an arbitrary direction with simple control. . Note that the term “non-parallel” includes various aspects other than parallel, for example, when there is an orthogonal positional relationship, or when a plane parallel to each of the first rotation axis and the second rotation axis is orthogonal. Of course, this includes a case where the planes parallel to each of the first rotation axis and the second rotation axis cross each other at an arbitrary angle.

  The rotary actuator is preferably an electric motor that can be driven and controlled with high accuracy, such as an inverter motor, a stepping motor, or a servo motor. In this way, since these motors can be controlled with higher accuracy than general-purpose motors, the screwing amount of the screw member and the inclination angle of the tool rotating shaft can be controlled with high accuracy. For this reason, since it can grind with the optimal inclination angle according to the magnitude | size of a workpiece | work and a rotary grinding tool, high flatness can be obtained reliably. That is, in the grinding method in which the tool rotation axis is inclined, the flatness after processing is determined by the inclination angle determined according to the size of the workpiece and the rotary grinding tool, and therefore the inclination angle is controlled with high accuracy. It is desirable. For example, in manual or general-purpose motors, the adjustment accuracy of the screwing amount becomes rough, so it is extremely difficult to set an ideal inclination angle. In particular, the flatness remains low. On the other hand, in an inverter / motor or the like, the adjustment accuracy of the screwing amount becomes fine, so that an ideal inclination angle can be easily set, so that a high flatness can be secured constantly.

  Further, instead of the rotary actuator, a piezoelectric element or a magnetostrictive element is provided.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. In addition, regarding the drawings used for the following description, the dimensional ratios of the respective parts are not necessarily drawn accurately.

  FIG. 1 is a front view of a vertical rotary grinding machine 10 which is an embodiment of the high flatness machining apparatus of the present invention, and FIG. 2 is a side view thereof. In these drawings, the vertical rotary grinding machine 10 is rotated around the pin 16 in the horizontal axis direction in the lower frame 12 and the remaining portion of the upper surface of the lower frame 12 where the surface plate 14 is placed. And an upper frame 20 fixed by the first tilting device 18 so as to be finely adjustable. The first tilting device 18 includes, for example, a first fixed block 21 that protrudes laterally at a lower end opposite to the pin 16 of the upper frame 20, that is, a lower end as far as possible from the pin 16, and A second fixed block 24 fixed to the lower frame 12 with a second horizontal sliding contact surface 23 facing the slightly inclined first sliding contact surface 22 which is the lower surface of the fixed block 21; and the first sliding contact surface The third slidable contact surface 25 slidably contacts the second slidable contact surface 26 and the fourth slidable contact surface 26 slidably contacts the second slidable contact surface 23, and is movable between the first fixed block 21 and the second fixed block 24. A movable block driving device 28 including a block 27, a rotary actuator 28a, a speed reducer 28b that decelerates the rotation, and an output shaft 28c of the speed reducer 28b screwed to the movable block 27 is provided.

  The first fixed block 21, the second fixed block 24, and the movable block 27 are made of steel having excellent rigidity and durability, such as alloy tool steel, chrome molybdenum steel, carbon steel for machine structure, and high-speed steel. Thus, they are always lubricated with each other using a liquid lubricant or a solid lubricant.

  In the first tilting device 18, the first sliding contact surface 22 of the first fixed block 21 fixed to the upper frame 20 and the second sliding contact surface 23 of the second fixed block 24 fixed to the lower frame 12 are They are provided so as to face each other and to approach each other toward one direction, that is, toward the pin 16 side. The movable block 27 is moved along the one direction by the movable block driving device 28. In the present embodiment, the first tilting device 18 is not shown, but is on a line parallel to the axis of the pin 16, that is, the rotation axis, and both ends of the upper frame 20 in the direction of the rotation axis. These are provided in a plurality of locations, or in addition to that at one location in the central portion in the rotational axis direction.

  The rotary actuator 28a of the movable block drive device 28 is composed of a motor capable of controlling rotation with high accuracy, such as an inverter motor, a stepping motor, or a servo motor, and is attached to the lower frame 12. Yes. When the movable block is moved by the movable block driving device 28, the upper frame 20 is inclined about the rotation axis (pin 16) perpendicular to the paper surface in FIG. 2 by an angle corresponding to the movement amount. In FIG. 1 and FIG. 2, the state which is not made to incline is shown. In the present embodiment, the first tilting device 18, the pin 16, the lower frame 12, and the like constitute a second rotation support device.

  The upper frame 20 has a pair of vertical pillars 30 that are vertically elongated, and a pair of vertical directions that are respectively fitted to the pillars 30 that function as vertical guide members and guided in the vertical direction. A static pressure gas bearing device 32 is provided. The pair of vertical direction static pressure gas bearing devices 32 are connected to each other via a connecting plate 34 or the like. FIG. 3 shows a cross section of the column 30.

  Further, as shown in FIG. 4 for example, the vertical direction static pressure gas bearing device 32 includes a housing 36 that surrounds the four guide surfaces of the support column 30, and is opposed to the guide surface in the housing 36. A porous member 38 provided so as to be located at a certain gap, and a gas supply passage 40 for supplying compressed gas, for example, compressed air, to the opposite side of the porous member 38 from the guide surface side. The high pressure fluid pressure (static pressure) ejected from the porous member 38 is interposed in the gap between the guide surface of the support column 30 so that the housing 36 is supported or restrained by the support column 30 in contact. .

  The vertical hydrostatic gas bearing device 32 has a substantially vertical direction (variable in direction as will be described later) in order to grind one surface (upper surface) of a disk-shaped workpiece W which is an object to be polished such as a glass plate or a semiconductor wafer. A grindstone driving device 42 for rotating the grinding wheel G around the rotation axis is connected and fixed. The grindstone drive device 42 functions as a polishing tool rotation drive device for rotationally driving a grinding wheel G that is a rotary grinding tool such as a cup grindstone. Therefore, the support column 30 and the vertical hydrostatic gas bearing device 32 guided thereby function as a grindstone drive device support device for supporting the grindstone drive device 42 so as to be movable in the vertical direction. The grindstone driving device 42 is supported by the vertical static pressure gas bearing device 32 so as to be movable in the vertical direction. The grindstone driving device 42 is fixed to the rotating shaft 44 with the grinding wheel G fixed to the lower end of the shaft, the fixed plate 48 to which the motor 46 for rotating the rotating shaft 44 is fixed, and the motor 46. And a static pressure gas rotary bearing device 50 that rotatably supports the rotary shaft 44 via a static pressure gas. The static pressure gas rotary bearing device 50 supports the rotary shaft 44 in a contactless manner with a high-pressure fluid pressure (static pressure) blown out from a porous member facing the outer peripheral surface of the rotary shaft 44 interposed therebetween. It is.

  A pair of second tilting devices 52, 52 are provided in the vicinity of the upper end portion of the fixed plate 48 by being fixed to the vertical static pressure gas bearing device 32. Each of these second tilting devices 52, 52 extends, for example, screw shafts 56, 56 screwed into support members 54, 54 fixed to one surface of the housing 36, and these screw shafts 56, 56 extend in the horizontal direction. It comprises driving devices 58, 58, etc. for rotating around the axis thereof, and these screw shafts 56, 56 are attached to the side end face of the fixing plate 48 while being abutted or screwed. The driving device 58 is also composed of a motor capable of controlling rotation with high accuracy, such as an inverter motor, a stepping motor, or a servo motor, and is attached to, for example, support members 54 and 54, not shown. They are controlled by the control device so that their driving directions are opposite to each other and their driving amounts coincide with each other. In the present embodiment, the second tilting devices 52 and 52, the upper frame 20, the vertical static pressure gas bearing device 32, and the like constitute the first rotation support device.

  When the screw shafts 56, 56 are rotated around the axis by the driving devices 58, 58, one of the screw shafts 56, 56 is moved toward the fixing plate 48 and the other is moved backward. In FIG. 4, the upper end of the fixing plate 48 is pressed, and on the backward side, the screw shaft 56 is pulled when it is screwed in, and the pressing force is reduced when it is abutted. As shown in an enlarged view in FIG. 5, the fixed plate 48 is provided with a bottomed hole 60 that opens on the back side thereof (that is, on the housing 36 side). The inserted pin 62 protrudes. These bottomed holes 60 and pins 62 are formed in substantially the same diameter so that the direction perpendicular to the paper surface in FIG. 1 is the axial direction, and relative rotation around the axial center is allowed. It is fitted with a slight gap. Therefore, when one of the screw shafts 56, 56 is advanced and the other is retracted by being rotationally driven by the driving devices 58, 58, the fixing plate 48 rotates around the pin 62 by an angle corresponding to the change in the screwing amount. And tilted with respect to the vertical direction. In FIG. 1 and FIG. 2, the state which is not made to incline is shown.

  When the fixed plate 48 is thus rotated, the rotation shaft 44 of the motor 46 fixed to the fixed plate 48 is rotated by the rotation angle of the fixed plate 48 around the rotation axis perpendicular to the paper surface in FIG. And tilted with respect to the vertical axis. Further, when the upper frame 20 is rotated by the first tilting device 18, both the fixing plates 48 are rotated around the pins 16 as is apparent from the configuration shown in FIG. At the same time, the motor 46 attached to is rotated about a rotation axis perpendicular to the paper surface in FIG. Therefore, the rotation axis 44 of the motor 46, that is, the rotation axis Cg of the grinding wheel G is non-parallel to the rotation axis perpendicular to the paper surface in FIG. 1 and the rotation axis perpendicular to the paper surface in FIG. Can be rotated around two rotation axes that are not parallel to each other.

  Further, as shown in FIGS. 1 and 2, the fixing plate 48 is fixed to the housing 36 using, for example, six hexagon socket head bolts 64. Further, as shown in FIG. 5 above, the housing 36 is provided with a female screw hole 66, and the fixing plate 48 is provided with a through hole 68, and the six bolts 64 are respectively connected via a washer 70. The fixing plate 48 is fixed to the housing 36 by being fastened to the housing 36. As shown in FIG. 6, the through hole 68 is a long hole extending in the left-right direction in FIG. 1, and is configured to have a sufficiently larger diameter than the screw portion diameter of the bolt 64 in the short diameter direction. It is. Therefore, the bolt 64 is fitted into the elongated hole 68 of the fixing plate 48 with a relatively large play.

  Further, the washer 70 is composed of a disc spring washer or the like as shown in FIG. 7 in which the bolt 64 is slightly loosened. Therefore, since the bolt 64 is elastically deformed (ie, flattened) by being tightened, the washer 70 presses the fixing plate 48 toward the housing 36 even in the illustrated state.

  1 and 2, in order to feed the grindstone G toward the workpiece W with a predetermined cutting amount when the workpiece W is polished, the grindstone G is directed to the rotation axis of the upper frame 20 toward the workpiece W. A grindstone feed driving device 72 for feeding in a parallel direction, that is, a substantially vertical direction is provided. The grindstone feed driving device 72 includes a feed screw device 74 provided on the fixed upper frame 20, a movable member 76 fed by the feed screw device 74, and a connecting plate connected to the vertical hydrostatic gas bearing device 32. , And a piezoelectric actuator 78 that moves the vertical static pressure gas bearing device 32 in a direction parallel to the moving direction of the movable member 76. The feed screw device 74 includes a feed screw 80 provided on the upper frame 20 so as to be rotatable about a vertical rotation axis, and a motor 82 connected to the feed screw 80 and provided on the upper frame 20. As the feed screw 80 driven to rotate by 82 is rotated, the movable member 76 engaged with the feed screw 80 is positioned in the vertical direction. The piezoelectric actuator 78 is formed by laminating, for example, plate-shaped piezoelectric ceramics, and its total length is changed with high accuracy within a 200 (μm) stroke, for example, according to the applied drive voltage. The output of (kN) is obtained.

  Further, the upper frame 20 reduces the uneven distribution of the surface pressure distribution on the guide surface of the support column 30 due to the load of the grindstone driving device 42 supported in a cantilever manner by the vertical hydrostatic gas bearing device 32. A load balancing device 84 is provided. The load balancer 84 includes a balance weight 86 having a load substantially equal to that of the grindstone drive device 42 and arranged to be movable in the vertical direction in the upper frame 20, and the balance weight 86 and the grindstone drive device 42. And a cable 90 that is guided in an inverted U shape by a roller 88, and by applying a thrust in the direction of pulling it up to the grindstone driving device 42, the load can be applied regardless of its vertical position. Reduce.

  Further, on the lower frame 12, a work rotation driving device 92 for rotating the work W around the vertical rotation axis Cw to polish the upper surface of the work W is provided with a surface plate 14, a three component force dynamometer. 94, and a work rotation driving device support device 96. The workpiece rotation driving device support device 96 is for supporting the workpiece rotation driving device 92 so as to be movable in the horizontal direction. The horizontal rotation guide member 98 extending in the horizontal direction and the workpiece rotation driving device 92 include A horizontal static pressure gas bearing device 100 that is connected and is guided in one horizontal direction by the horizontal guide member 98 with a static pressure gas interposed between the guide surface of the horizontal guide member 98 and the horizontal guide member 98. ing. As shown in FIG. 5, the workpiece W fixed to the workpiece rotation driving device 92 is set to overlap with the grinding wheel G in the vertical direction by the radius of the workpiece W.

  The workpiece rotation driving device 92 is fixed to the rotation shaft (not shown) to which the suction plate 102 to which the workpiece W is detachably fixed is fixed, the motor 104 that rotationally drives the rotation shaft, and the rotation thereof. And a static pressure gas rotary bearing device 106 that supports the shaft via static pressure gas. The static pressure gas rotary bearing device 106 supports the rotary shaft 44 in a contactless manner with a high pressure fluid pressure (static pressure) blown out from a porous member facing the outer peripheral surface of the rotary shaft (not shown) interposed therebetween. To do. Similarly to the vertical hydrostatic gas bearing device 32, the horizontal hydrostatic gas bearing device 100 has a housing 108 that surrounds the guide surface of the horizontal guide member 98, and is opposed to the guide surface in the housing 108. And a porous member (not shown) provided so as to be positioned with a slight gap, and a gas passage for supplying compressed gas, for example, compressed air, to the opposite side of the porous member to the guide surface side. And the housing 108 is in contact with the horizontal guide member 98 in a contacted manner by interposing a high-pressure fluid pressure (static pressure) ejected from the porous member into a gap between the horizontal guide member 98 and the guide surface. The movement other than is restricted. The housing 108 is reciprocated in the horizontal direction, that is, the left-right direction in FIG. 1 by a horizontal driving device 110 such as a linear motor or by manual operation.

  When the surface of the workpiece W such as a silicon wafer is ground by the vertical rotary grinding machine 10 configured as described above, first, the first tilting device 18 and the second tilting device 52 are driven, and the upper frame 20 is driven. Is rotated about the pin 16 and the fixing plate 48 is rotated about the pin 62, whereby the grindstone rotation axis Cg is inclined by a predetermined angle with respect to the vertical direction. The inclination angle is, for example, about 0.03 ° in the clockwise direction in FIG. 1 and about 0.03 ° in the counterclockwise direction in FIG. As a result, as shown in FIG. 8 (a), the grinding wheel G is in a state of being inclined such that the upper surface is slightly facing forward and the left end side is lowered as a whole in front view. Further, as shown in FIG. 8 (b), the grinding wheel G has an outer peripheral edge passing on the rotation axis Cw of the workpiece W and a lowermost point P on the lower surface (that is, the grinding surface). It is at a position between the rotation center of the workpiece W and the outer peripheral edge, for example, a position separated from the rotation center by a length of ½ of the radius. In the present embodiment, the first tilting device 18 and the second tilting device 52 for tilting the grindstone rotation axis Cg in two planes orthogonal to each other are provided for the purpose of realizing such a tilted state. On the lower surface of the grinding wheel G, the difference in height between the lowest point P and the uppermost point (not shown) is, for example, about 20 (μm). In addition, the grinding wheel G is formed by, for example, a cylindrical lower end surface having a large number of grinding wheel members fixed along the circumferential direction thereof.

  When rotating around the pins 16 and 62 as described above, in the former, a large load that is the sum of the weights of the upper frame 20 and each member attached directly or indirectly reduces the rotation angle. 2 (ie, the clockwise direction in FIG. 2), the rotation angle is stabilized at a value corresponding to the set value of the moving amount of the movable block 27 of the first tilting device 18, and fluctuation due to disturbance is less likely to occur. . On the other hand, in the latter, since the grindstone driving device 42, the static pressure gas rotary bearing device 50, and the fixed plate 48 to which the grinding grindstone G is attached, the load acting in the direction of decreasing the rotation angle is relatively small. The rotation angle is likely to vary due to the load acting on the grinding wheel G from the workpiece W. That is, it is difficult to stabilize at the rotation angle corresponding to the set value of the screwing amount of the screw shaft 56.

  Therefore, in this embodiment, after the fixing plate 48 is tilted by the set angle by the second tilting device 52, it is necessary to fasten the bolt 64 to fix the fixing plate 48 to the housing 36 in order to maintain the tilting state. . At this time, as shown in FIG. 7, the tilting operation of the fixing plate 48 is performed in a state where the bolt 64 is not completely tightened but the washer 70 is elastically deformed, that is, the fixing plate 48 is This is performed in a state where it is pressed against the housing 36 by a pressing force acting from the washer 70 to be restored (that is, in a semi-fixed state). Therefore, when the bolt 64 is tightened, the fixing plate 48 is preferably prevented from rotating around the pin 62 by the tightening torque due to the pressing force of the washer 70. Thereby, since the control accuracy of the drive device 58 that rotates the fixed plate 48 with high accuracy is favorably reflected in the rotation angle, a desired rotation angle can be realized in any direction, and the grindstone can be rotated. The axis Cg can be set to a desired inclination angle. Therefore, in this embodiment, the bolt 64 corresponds to the fastening member, and the washer 70 corresponds to the insertion member, and the resistance applying device is configured by the bolt 64 and the washer 70.

  In addition, since the tilting by the second tilting device 52 is performed in the state where the pressing force by the washer 70 is applied as described above, the driving capability of the driving device 58 is based on the pressing force between the fixing plate 48 and the housing 36. It is necessary to be sufficiently larger than the rotational resistance generated between them. In this embodiment, the driving capability is set to about 20 times the load in the semi-fixed state, for example, and the fixing plate 48 can be rotated regardless of the pressing force.

  Further, the shape of the elongated hole 68 provided in the fixed plate 48 is determined so as to allow the fixed plate 48 to rotate by a preset rotation angle. As described above, since the play is provided between the bolt 64 and the long hole 68, even if the bolt 64 is tightened to the semi-fixed state as described above, it is an obstacle to tilting the fixing plate 48. In addition, the fixing plate 48 can be tilted by an angle corresponding to the length of the elongated hole 68 in the horizontal direction.

  After the grinding wheel rotation axis Cg is tilted as described above, when the workpiece W is fixed to the suction disk 102, the grinding wheel G and the workpiece W are rotationally driven in predetermined directions around the respective rotation axes Cg and Cw. While being supplied with a grinding fluid (not shown), the feed screw device 74 lowers the grinding wheel G until just before the grinding wheel G contacts the workpiece W. That is, the grinding wheel G is rotated in a state where the rotation axis Cg is inclined with respect to the workpiece rotation axis Cw. FIG. 8A shows the positional relationship at this stage. Next, the grinding wheel G is cut into the workpiece W by the piezoelectric actuator 78, whereby the entire upper surface of the workpiece W is ground. At this time, since the grinding wheel G is inclined as described above and the lowest point P is located at the center of the radius of the workpiece W, the actual contribution to grinding is shown in FIG. Only the range indicated by the bold line. That is, the grinding wheel G is brought into contact only with the radius portion of the workpiece W. However, since the workpiece W is rotated about the rotation axis Cw and the grinding wheel G is also rotated about the rotation axis Cg, the entire surface of the workpiece W is ground using the entire circumference of the grinding wheel G. .

  After grinding to a predetermined thickness dimension as described above, for example, the surface plate 14 is predetermined in the counterclockwise direction around the rotation axis Cw of the workpiece W while the grinding wheel G and the workpiece W are continuously rotated. It is rotated by a given angle θ. That is, the moving direction of the workpiece W by the horizontal static pressure gas bearing device 100 is inclined. Thereafter, when the housing 108 is reciprocated back and forth on the horizontal guide member 98 by the horizontal driving device 110, the rotation axis is within a range in which the lowest point P passes through the rotation axis Cw and the outer peripheral edge of the workpiece W. It is moved in the horizontal direction perpendicular to Cw. As a result, the vicinity of the center of rotation of the workpiece W and the vicinity of the outer peripheral edge where the grinding amount has been reduced at the stage where the relative position in the horizontal direction is fixed are ground at the lowest point P, and the surface to be ground of the workpiece W is flattened. It becomes. After this reciprocating movement is performed an appropriate number of times, for example, once, the grinding wheel G is separated upward from the workpiece W, the surface plate 14 is returned to the initial position, and the workpiece W is moved to the suction plate 102. The grinding process for one workpiece W is completed. The surface of the workpiece W thus ground has a high flatness of, for example, about 1 (μm) or less.

  As described above, according to the present embodiment, the first tilting drive device 18 is provided such that the first sliding drive device 18 is provided such that (a) the upper frame 20 and the lower frame 12 face each other and approach each other toward one direction. A contact surface 22 and a second slidable contact surface 23; and (b) a third slidable contact surface 25 and a fourth slidable contact surface 26 that are in sliding contact with the first slidable contact surface 22 and the second slidable contact surface 23, respectively. A movable block 27 movably provided along one direction; and (c) a movable block driving device 28 for moving the movable block 27 along the one direction in order to change the position of the movable block 27. Therefore, the load of the upper frame 20 is generated between the first slidable contact surface 22 and the second slidable contact surface 23 and the third slidable contact surface 25 and the fourth slidable contact surface 26 slidably contacted with each other. Can it be received with a relatively large sliding contact area? Since load per unit area becomes smaller, wear is also as small as possible with sufficient rigidity (load bearing properties) is obtained. Therefore, a vertical rotary grinder that can sufficiently obtain the inclination accuracy of the upper frame 20 is obtained.

  Further, according to the present embodiment, the first sliding contact surface 22 is an inclined surface formed on the lower surface of the first fixed block 21 fixed to the upper frame 20, and the second sliding contact surface 23 is the lower frame. 12, the movable block 27 is sandwiched between the first slidable contact surface 22 and the second slidable contact surface 23. Therefore, since the load of the upper frame 20 is received by the highly rigid first fixed block 21 and the movable block 27, sufficient rigidity (load resistance) can be obtained.

  Further, according to the present embodiment, the first fixed block 21 is fixed to the upper frame 20, and the movable frame 12 is provided so as to be movable on the horizontal second sliding contact surface 23 provided on the lower frame 20, Since the movable block drive device 28 is attached to the lower frame 20, there is an advantage that it is configured with a simple structure.

  In addition, according to the present embodiment, the movable block drive device 28 includes a rotation actuator 28a whose rotation amount is controlled, and a speed reducer 28b that decelerates and transmits the rotation of the rotation actuator 28a, and the speed reducer 28b. Therefore, the load of the upper frame 20 is supported in the thickness direction of the first fixed block 21 and the movable block 27, and the movable block 27 can be moved. Therefore, there is an advantage that the inclination angle of the upper frame can be controlled with high accuracy over a long period of time without receiving the load of the upper frame 20 as it is.

  Further, according to the present embodiment, the grindstone driving device 42 is rotated around the pin 16 by the first tilting device 18 and is also rotated around the pin 62 by the second tilting device 52, so that the grindstone driving is performed. The grindstone rotation axis Cg provided in the device 42 is tilted in a plane perpendicular to the pin 16 by being rotated about the pin 16, and is rotated to the pin 62 by being rotated about the pin 62. It can be tilted even in a vertical plane. Therefore, the grindstone rotation axis Cg is inclined at an arbitrary direction and angle in which the respective inclinations are combined. At this time, the first tilting device 18 and the second tilting device 52 are separately provided, and the rotation around the pin 16 and the rotation around the pin 62 are separately performed, so that the control is also simplified. . Therefore, a vertical rotary grinder capable of inclining the grindstone rotation axis Cg in an arbitrary direction with simple control is obtained.

  Further, according to the present embodiment, the first tilting device 18 and the second tilting device 52 include the movable block driving device 28, the driving device 58 such as a motor, the movable block 27, and the screw shaft 56, respectively. The grindstone rotating shaft Cg is tilted by mechanical control that changes the moving amount of the movable block 27 and the screwing amount of the screw shaft 56. Therefore, there is an advantage that the inclination state is not easily changed due to disturbance such as vibration during grinding. Moreover, since the fixing plate 48 rotated by the second tilting device 52 is fixed in a rotating state by the bolt 64, the change of the inclination angle is prohibited during grinding. Therefore, the change of the inclination angle due to disturbance such as vibration during grinding is further suppressed.

  Further, in the present embodiment, the fixing plate 48 is rotated in a state in which a rotation resistance is given by being pressed against the washer 70, so that when the bolt 64 is tightened, the rotation is caused by the tightening torque. Since the change of the moving angle is suppressed, the tilt angle can be set with higher accuracy.

  In this embodiment, the movable block 27 for changing the rotation angle and the screw shaft 56 are moved or rotated by an inverter motor, stepping motor, servo motor or the like that can be driven and controlled with high accuracy. Therefore, the amount of screwing of the movable block 27 and the screw shaft 56 and the inclination angle of the grindstone rotating shaft Cg can be controlled with higher accuracy. For this reason, since it can grind with the optimal inclination angle according to the magnitude | size of the workpiece | work W and the grinding stone G, higher flatness can be obtained.

  The preferred embodiments of the present invention have been described in detail with reference to the drawings. However, the present invention is not limited to these embodiments, and may be implemented in other modes.

  For example, in the above-described embodiment, the first sliding contact surface 22 of the first fixed block 21 is inclined so as to approach the second sliding contact surface 23 toward the pin 16. It may be made to incline so that it may approach the 2nd sliding contact surface 23, so that it leaves | separates from. In this case, the third slidable contact surface 25 of the movable block 27 is also inclined in the same manner, and the movable block 27 is moved to the side away from the pin 16 and the rotational axis Cg of the grinding wheel (rotary tool) G is inclined forward. Be made.

  Further, the first fixing block 21 of the above-described embodiment may be fixed to the lower frame 12 and the second fixing block 24 may be fixed to the upper frame 20.

  The above description is merely an example of the present invention, and the present invention can be modified in various ways without departing from the spirit of the present invention.

It is a front view which shows the vertical rotary grinder which is one Example of the high flatness processing apparatus of this invention. It is a side view of the vertical rotary grinder of FIG. It is a figure which shows the cross section of a support | pillar in the III-III view cross section of FIG. It is sectional drawing explaining the principal part of a structure of the vertical direction static pressure gas bearing apparatus with which the vertical rotary grinder of FIG. 1 was equipped. It is a side view which expands a part of FIG. 2 and shows a 2nd tilting apparatus. FIG. 6 is a view taken along arrow IV in FIG. 5 for explaining a mounting structure of the fixing plate to the second tilting device. It is a figure which expands and shows a part of FIG. 5 for demonstrating the rotation resistance provision structure of a 2nd tilting apparatus. (A) is a front view and (b) is a top view for demonstrating the inclination state of the grinding wheel during grinding of the vertical rotary grinder of FIG.

Explanation of symbols

10: Vertical rotary grinding machine 18: First tilting device (tilting device)
21: 1st fixed block 22: 1st sliding contact surface 23: 2nd sliding contact surface 24: 2nd fixed block 25: 3rd sliding contact surface 26: 4th sliding contact surface 27: Movable block 28: Movable block drive device 28a: Rotary actuator 28b: Reducer 28c: Screw shaft W: Workpiece G: Grinding wheel (rotary tool)
Cg: Grinding wheel rotation axis

Claims (4)

A lower frame provided with a work rotation driving device for rotating a disk-shaped work around a vertical axis, and a tool for rotating a polishing tool positioned above the flat work around a vertical axis A rotation drive device is attached, and an upper frame is provided on the lower frame so as to be rotatable around a horizontal rotation axis located on the workpiece rotation drive device side, and the upper frame is tilted to tilt the upper frame. A vertical rotary grinding machine provided with a tilting drive device provided on the opposite side of the rotation rotation device from the rotation axis;
The tilting drive device
A first slidable contact surface and a second slidable contact surface provided so as to face each other and approach each other in one direction on one and the other of the upper frame and the lower frame;
A movable block that has a third sliding contact surface and a fourth sliding contact surface that are in sliding contact with the first sliding contact surface and the second sliding contact surface, and is movable along the one direction;
A vertical rotary grinding machine comprising: a movable block driving device that moves the movable block along the one direction in order to change the position of the movable block. The first sliding contact surface is an inclined surface formed on an upper surface or a lower surface of a fixed block fixed to one of the upper frame and the lower frame,
The second slidable contact surface is a horizontal surface provided opposite to the first slidable contact surface on the other of the lower frame and the lower frame,
The vertical rotary grinding machine according to claim 1, wherein the movable block is sandwiched between the first sliding contact surface and the second sliding contact surface. The fixing block is fixed to the upper frame;
The movable frame is movably provided on a horizontal second sliding contact surface provided on the lower frame,
The vertical rotary grinding machine according to claim 2, wherein the movable block driving device is attached to the lower frame. The movable block drive device includes a rotary actuator whose rotation amount is controlled, and a speed reducer that transmits the rotation of the rotary actuator by decelerating and moving the movable block based on the rotation decelerated by the speed reducer. The vertical rotary grinder according to claim 3, wherein the vertical rotary grinder is used.

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