JP2006047090A5 - - Google Patents
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- JP2006047090A5 JP2006047090A5 JP2004227877A JP2004227877A JP2006047090A5 JP 2006047090 A5 JP2006047090 A5 JP 2006047090A5 JP 2004227877 A JP2004227877 A JP 2004227877A JP 2004227877 A JP2004227877 A JP 2004227877A JP 2006047090 A5 JP2006047090 A5 JP 2006047090A5
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004227877A JP4555021B2 (en) | 2004-08-04 | 2004-08-04 | Surveyor inspection method and collimator used in this inspection method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004227877A JP4555021B2 (en) | 2004-08-04 | 2004-08-04 | Surveyor inspection method and collimator used in this inspection method |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2006047090A JP2006047090A (en) | 2006-02-16 |
JP2006047090A5 true JP2006047090A5 (en) | 2009-11-12 |
JP4555021B2 JP4555021B2 (en) | 2010-09-29 |
Family
ID=36025806
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004227877A Expired - Fee Related JP4555021B2 (en) | 2004-08-04 | 2004-08-04 | Surveyor inspection method and collimator used in this inspection method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4555021B2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4774332B2 (en) | 2006-06-06 | 2011-09-14 | 富士フイルム株式会社 | Eccentricity measurement method |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2592340Y2 (en) * | 1993-02-09 | 1999-03-17 | 株式会社ニコン | 2-axis photoelectric autocollimator |
JP2001221622A (en) * | 2000-02-03 | 2001-08-17 | Nikon Corp | Dark-field-type autocollimator |
EP1503175A1 (en) * | 2003-07-28 | 2005-02-02 | Leica Geosystems AG | Device and method for calibrating the alignment of a device under test |
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2004
- 2004-08-04 JP JP2004227877A patent/JP4555021B2/en not_active Expired - Fee Related