JP2006040261A - Slave device, master device and laminated device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a technology for easily manufacturing a stacked device while identifying a plurality of devices that are stacked. <P>SOLUTION: This laminated device includes a lamination of a plurality of slave devices and a master device having identical terminal arrangements. Here, the master device includes a command transmitting means for inputting an identification command to the terminal of an adjacent slave device. Furthermore, the slave device includes a through-wire for interconnecting at least one terminal of that same device and an adjacent slave device, a command receiving means for receiving the identification command and an ID (identifier) setting means for setting the ID of that same device based on the identification command. In this case, the positions of the terminals that are interconnected with the adjacent slave devices are made different in each slave device, and the command receiving means of each slave device receives an identification command having a modified value as a result of transiting through-wires that are connected at differing positions in each slave device. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a master device and a stacked device in which a plurality of slaves are stacked, and the slave device and the master device.

  A stacking device has been developed in which a plurality of semiconductor devices that execute various processes and a control device such as a CPU that controls each semiconductor device are stacked on a board. By stacking the semiconductor devices on the board in this way, a product including the semiconductor devices can be reduced in size and weight. Here, each semiconductor device is given a unique identification ID in advance at the stage of manufacturing on the wafer. The control device can access each semiconductor device based on this unique identification ID, and can control each semiconductor device.

  Patent Document 1 discloses a method for identifying each semiconductor device mounted three-dimensionally. FIG. 32 is a configuration diagram of the three-dimensional stacked semiconductor device disclosed in Patent Document 1. In FIG. As shown in FIG. 32, second and third semiconductor devices 2 and 3 having the same terminal structure are stacked on the first semiconductor device 1. In each semiconductor device, the front and back surfaces are electrically connected by a through wiring penetrating the inside of the substrate. In addition, terminals at the same position of each semiconductor device are in contact with each other. With this configuration, a signal for controlling each device is commonly transmitted from the control device to the first, second, and third semiconductor devices 1, 2, and 3.

  Each semiconductor device is provided with a control terminal to which various control signals are input and a CS (Chip Select) terminal to which a selection signal for selecting each device is input. Examples of the control terminals of the first semiconductor device 1 include a control terminal 12a and a control terminal 12b. Further, CS terminals of the first semiconductor device 1 include CS terminals 11a, 11b, 13a, 13b, 15a, and 15b. A control terminal 12 a on the back surface 1 a of the first semiconductor device 1 and a control terminal 12 b on the front surface 1 b are connected via a vertical through wiring 51. Here, the vertical through wiring is a through wiring perpendicular to the front and back surfaces, and transmits various control signals. Further, the control terminal 12b on the front surface 1b of the first semiconductor device 1 and the control terminal 18a on the back surface 2a of the second semiconductor device 2 are in contact with each other, and the control terminal 18b on the front surface 2b of the second semiconductor device 2 and the third semiconductor. The control terminal 20a on the back surface 3a of the device 3 is in contact. With this configuration, a common control signal is transmitted to the first, second, and third semiconductor devices 10, 20, and 30 through each terminal and vertical through wiring that are in contact with each other.

  In addition, the CS terminals 11a, 13a, and 15a on the back surface 1a of the first semiconductor device 1 and the CS terminals 11b, 13b, and 15b on the front surface 1b are connected to each other through oblique through wires 31, 33, and 35. Here, the diagonal through wiring is a through wiring that penetrates the front and back surfaces of the semiconductor device and obliquely intersects the front and back surfaces. The CS terminal 11b on the front surface 1b of the first semiconductor device 1 and the CS terminal 17a on the back surface 2a of the second semiconductor device 2 are in contact with each other, and the CS terminal 13b on the front surface 1b of the first semiconductor device 1 and the second semiconductor. The CS terminal 19a on the back surface 2a of the device 2 is in contact. Other CS terminals and oblique through wirings are also connected to each other as shown in FIG. Here, a control device (not shown) provided in the lower part of the first semiconductor device 1 transmits a selection signal for setting each semiconductor device to a selected state via a predetermined terminal, whereby a desired semiconductor device is obtained. Can be accessed.

  For example, the selection signal transmitted from the CS terminal 11a of the first semiconductor device 1 is the CS terminal 11a → the through wiring 31 → the CS terminal 11b → the CS terminal 17a → the through wiring 37 → the CS terminal 17b → the CS terminal 21a → the through wiring 41. → The CS terminal 21b of the third semiconductor device 3 is reached via the CS terminal 21b. As a result, the third semiconductor device 3 is selected, and the third semiconductor device 3 receives various control signals from the control device via the control terminal and the vertical through wiring. Similarly, the selection signal transmitted from the CS terminal 13a of the first semiconductor device 1 is transmitted to the second semiconductor device via the CS terminal 13a → the through wiring 33 → the CS terminal 13b → the CS terminal 19a → the through wiring 39 → the CS terminal 19b. The second CS terminal 19b is reached. Thereby, the second semiconductor device 2 is selected. Furthermore, the selection signal transmitted from the CS terminal 15a of the first semiconductor device 1 reaches the CS terminal 15b of the first semiconductor device 1 via the CS terminal 15a → the through wiring 35 → the CS terminal 15b. Thereby, the first semiconductor device 1 is selected.

By selecting the CS terminal and transmitting the selection signal as described above, each semiconductor device can be accessed individually.
JP 2002-50735 A

  However, when a unique identification ID is assigned in advance at the manufacturing stage on the wafer, it is necessary to store the identification ID set in advance in a control device that controls each semiconductor device. Therefore, it is necessary to manage which identification ID semiconductor device is stacked. In particular, since a large number of semiconductor devices are manufactured on a wafer, it is very troublesome to manage the semiconductor devices by using identification IDs assigned individually.

  Further, in Patent Document 1, since each semiconductor device can be identified by connecting the CS terminal and the diagonal through wiring, it is not necessary to attach a unique identification ID to each semiconductor device during wafer manufacture. However, in order to be able to access only each semiconductor device through one CS terminal, it is necessary to stack each semiconductor device in consideration of the combination of the oblique through wiring and each CS terminal. 32, only the third semiconductor device 3 can be accessed from the CS terminal 11a, only the second semiconductor device 2 can be accessed from the CS terminal 13a, and the first semiconductor device can be accessed from the CS terminal 15a. Only one can be accessed. Therefore, it is necessary to stack each semiconductor device in consideration of the combination of the CS terminal and the stack location of the semiconductor device to be accessed.

  Further, in Patent Document 1, in order to individually select semiconductor devices, it is necessary to form diagonal through wirings in particular. Special processing is required to form the diagonal through wiring, and it is not easy to form with high accuracy. In addition, it is necessary to provide two types of through wirings, that is, a vertical through wiring used for connection between control terminals and an oblique through wiring used for connection between CS terminals, which complicates the manufacturing process.

  Then, an object of this invention is to provide the technique which can manufacture a lamination apparatus easily, identifying the several apparatus laminated | stacked in a lamination apparatus.

  In order to solve the above problems, the first invention of the present application provides a stacking device in which a plurality of slave devices and master devices having the same terminal arrangement are stacked.

  Here, the master device receives a command transmission means for inputting an identification command to a terminal of an adjacent slave device and an identification ID of each slave device set in accordance with the identification command from each slave device. Receiving means, and association storage means for storing the association between each slave device and each identification ID.

  In addition, the slave device includes a through wiring that connects at least one terminal of the adjacent slave device and the own device, a command receiving unit that receives the identification command, and an identification ID of the own device based on the identification command. An identification ID setting unit for setting, and a position of a terminal for connecting the adjacent slave devices is different for each slave device, and the command receiving unit of each slave device is connected to each slave device. By passing through different through-wires, the identification command changed to a different value for each slave device is received.

  The same terminal arrangement means that the arrangement of each terminal such as an address terminal, a read / write terminal, and a CS (Chip Select) terminal is the same in the slave device and the master device. The slave device has, for example, at least the number of stacked CS terminals to which an identification command is input. The identification command is a command composed of, for example, the number of bits for stacking. At least one CS terminal of each slave device is connected to each other via a through wiring that penetrates the slave device, and each CS terminal is clamped to the first potential. Here, by changing the installation position of the through wiring, the combination of connections between the CS terminals is made different for each slave device. For example, when certain CS terminals are electrically connected to each other by through wiring, a corresponding 1-bit identification command is transmitted from the master device, and the potential of the CS terminal changes from the first potential. On the other hand, by not providing a through-wiring at the connection portion between the other CS terminals, no identification command is input to the CS terminal, and the potential does not change.

  With this configuration, the identification command transmitted by the master device becomes different information for each slave device when each slave device receives it. The identification ID setting means of the slave device sets an identification ID unique to each slave device in accordance with an identification command that differs for each slave device. Therefore, the master device can access each slave device by the set identification ID even when the terminals having the same terminal configuration of each slave device are connected through the through wiring. For example, the master device first selects a slave device to be controlled based on the identification ID, and puts the corresponding slave device in a selected state. Thereafter, a command is transmitted to the corresponding slave device to perform various controls. Here, the identification ID may be information for identifying a selection signal line for accessing only each slave device, for example. By setting a unique selection signal line for each slave device, only each slave device can be selected.

  Further, since corresponding terminals having the same terminal configuration are connected by a through wiring, the through wiring can be formed perpendicular to the slave device. Therefore, for example, a complicated manufacturing process such as forming the through wiring with an inclination with respect to the slave device is unnecessary, and the stacked device can be easily manufactured.

  It is also possible to manufacture a stacking device by stacking slave devices for which an identification ID has not yet been set, and to set the identification ID as described above at the initial setting of the stacking device. After completion of the initial setting, the master device accesses each slave device based on each set identification ID. Thus, even if the slave device before being configured as the stacking device does not have the identification ID, the identification ID can be set after manufacturing the stacking device. In other words, it is not necessary to attach an identification ID to each slave device before manufacturing the laminated device. Therefore, when a large number of chip-type slave devices are manufactured on the wafer, it is not necessary to attach an identification ID to each slave device. Thereby, the complexity of managing each slave device after dicing with the identification ID can be eliminated. For example, it is not necessary to perform a complicated operation such as selecting a slave device according to an identification ID from a large number of slave devices diced from a wafer.

  In addition, each slave device receives an identification command corresponding to the connection configuration of the through wiring after lamination. Since the slave device sets the identification ID in response to the identification command, there is no need to consider a stacking method such as a stacking order when the slave devices are stacked. Therefore, for example, each slave device can be arbitrarily stacked, and a stacked device can be easily manufactured.

  In addition, the CS terminals of the slave devices to which the identification command is input are connected to each other through a through wiring. That is, a CS terminal dedicated to each slave device for receiving the identification command is not necessary. Furthermore, since the identification command changes with the passage of each slave device, it is not necessary to input an identification command specific to each slave device to each slave device.

  In a second invention of the present application, in the first invention, in each slave device, a terminal to which the identification command is input is clamped to a predetermined potential (hereinafter referred to as a first potential) before the input of the identification command. An identification command received by the command receiving unit is generated by changing the potential of the terminal from the first potential by inputting the identification command through the through wiring. .

  Each slave device has a plurality of CS (Chip Select) terminals, and the corresponding CS terminals are connected through a through wiring. Here, the connection configuration of the through wiring is differently connected for each slave device. When the CS terminals are connected to each other through the through wiring, the potential of each CS terminal changes from a predetermined potential in response to a potential corresponding to the identification command. On the other hand, CS terminals that are not connected by through wiring remain clamped at a predetermined potential. The identification command is generated depending on whether each CS terminal remains clamped or changes according to the identification command.

  A case where three slave devices are stacked will be described as an example. Assume that the first slave device A, the second slave device B, and the third slave device C are in the order adjacent to the master device, and each has three CS terminals. Here, the first slave device A has a first CS terminal A1, a second CS terminal A2, and a third CS terminal A3, and the second slave device B has a first CS terminal B1, a second CS terminal B2, and a third CS terminal B3. The third slave device C has a first CS terminal C1, a second CS terminal C2, and a third CS terminal C3. Each CS terminal is clamped at the first potential, the CS terminal arrangement of the first CS terminals A1, B1, and C1, the CS terminal arrangement of the second CS terminals A2, B2, and C2, and the third CS terminals A3, B3, and C3. The CS terminal arrangement is assumed to be the same. Further, the second CS terminal A2 and the second CS terminal B2 are connected through a through wiring that penetrates the second slave device B. As a result, the master device is electrically connected to the second CS terminal A2 of the slave device A that is separated first and the second CS terminal B2 of the slave device B that is separated second. Further, the third CS terminal A3 and the third CS terminal B3 are connected through a through wiring that penetrates the second slave device B, and the third CS terminal B3 and the third CS terminal C3 are connected to a through wiring that penetrates the third slave device C. Connect through. Thus, the master device, the third CS terminal A3 of the slave device A that is first separated, the third CS terminal B3 of the slave device B that is second separated, and the slave device that is third separated. The C third CS terminal C3 is electrically connected.

  Here, the states of the first CS terminal A1, the second CS terminal A2, and the third CS terminal A3 clamped at the first potential are represented by bits (1, 1, 1). Then, it is assumed that an identification command composed of a combination of (0, 0, 0) is input to each of the first CS terminal A1, the second CS terminal A2, and the third CS terminal A3. Then, the states of the first CS terminal A1, the second CS terminal A2, and the third CS terminal A3 change from (1, 1, 1) to (0, 0, 0). Therefore, the first slave device A receives (0, 0, 0) from the first CS terminal A1, the second CS terminal A2, and the third CS terminal A3. Here, (0, 0, 0) is an identification command received by the first slave device A in response to an identification command from the master device. The first CS terminal B1 of the second slave device B remains clamped at the first potential because the first CS terminal B1 and the first CS terminal A1 are not connected. Therefore, the second slave device B receives the identification command of (1, 0, 0). Furthermore, the first CS terminal C1 and the second CS terminal C2 of the third slave device C are not connected to the first CS terminal C1 and the first CS terminal B1, and are not connected to the second CS terminal C2 and the second CS terminal B2. , Remain clamped at the first potential. Therefore, the third slave device C receives the identification command (1, 1, 0). As described above, the identification command transmitted by the master device changes to a different value for each slave device. The slave device identification ID setting means sets an identification ID unique to each slave device in accordance with this identification command, so that the master device can identify each slave device by the identification ID.

  The third invention of the present application provides a stacking device in which a plurality of slave devices and master devices having the same terminal arrangement are stacked.

  Here, the master device receives from each slave device the first command transmission means for inputting the identification command to the terminal of the adjacent slave device, and the identification ID of each slave device set in accordance with the identification command. Identification ID receiving means, and association storage means for storing association between each slave device and each identification ID.

  The slave device includes a through wiring that connects at least one terminal of the adjacent slave device and its own device, a command receiving unit that receives an identification command from the master device or an adjacent slave device, and the identification command Identification ID setting means for setting the identification ID of the own device by reception, command changing means for changing the received identification command to an identification command unique to each slave device, and the changed identification command adjacent to each other via the through wiring And second command transmission means for inputting to the slave device.

  Each slave device changes the received identification command and outputs it to the adjacent slave device. Thus, each slave device can receive a unique identification command and set an identification ID unique to each slave device based on the unique identification command.

  In a fourth aspect of the present invention, in the third aspect, when the identification ID setting means sets the identification ID, a completion notification indicating completion of the setting of the identification ID is transmitted to the master device via the through wiring. A lamination apparatus is further provided, further comprising a completion notification transmission unit.

  Since the completion notification transmission means transmits a completion notification to the master device, the master device can determine whether or not each slave device has completed setting the identification ID. For example, if the master device does not receive a completion notification from the slave device even after a predetermined time has elapsed since the transmission of the identification command, the master device determines that the setting of the identification ID in each slave device has been completed. The number of slave devices stacked is changed according to the function required by the product and is not fixed information. Therefore, the master device does not grasp the number of slave devices stacked. Therefore, the master device knows that the setting of the identification ID has been completed in each slave device, so that it is possible to eliminate the waste of waiting for the setting completion. Further, the master device can move to the next operation simultaneously with the completion notification.

  A fifth invention of the present application is a master device of a stacked device in which a plurality of slave devices having the same terminal arrangement and a master device are stacked, and a command transmitting means for inputting an identification command to a terminal of an adjacent slave device; An identification ID receiving means for receiving the identification ID of each slave device set according to the identification command from each slave device, and an association storage means for storing the correspondence between each slave device and each identification ID A master device comprising:

  The master device can access each slave device based on each identification ID. Further, since the identification ID can be set after manufacturing the slave device, it is not necessary to attach a unique identification ID to each slave device at the time of manufacture. Therefore, in the case where a large number of chip-type slave devices are manufactured on the wafer, the management is easy without the complexity of managing each slave device by the identification ID.

  A sixth invention of the present application is a slave device of a stacked device in which a plurality of slave devices having the same terminal arrangement and a master device are stacked, and connects at least one terminal of the adjacent slave device and its own device. It has a through wiring, a command receiving means for receiving an identification command from the master device, and an identification ID setting means for setting the identification ID of the own device based on the identification command, and connects the adjacent slave devices to each other The position of the terminal to be different is different for each slave device, and the command receiving means of each slave device has changed to a different value for each slave device by passing through the through wiring having a different connection position for each slave device. A slave device is provided that receives an identification command.

  With this configuration, the same effects as those of the first invention of the present application can be obtained.

  A seventh invention of the present application is a slave device of a stacked device in which a plurality of slave devices having the same terminal arrangement and a master device are stacked, and connects at least one terminal of the adjacent slave device and its own device. Through wiring, command receiving means for receiving an identification command from the master device or an adjacent slave device, command changing means for changing the received identification command to an identification command unique to each slave device, and a changed identification command A slave device comprising: a second command transmission means for inputting to an adjacent slave device via the through-wiring; and an identification ID setting means for setting an identification ID of the device by receiving the identification command. provide. With this configuration, it is possible to obtain the same effects as the third invention of the present application.

  Furthermore, in the present application, it is also possible to provide the following stacking device in which a plurality of slave devices and master devices having the same terminal arrangement are stacked.

  Here, the master device receives a random number generation command for starting random number generation at the terminal of an adjacent slave device, and a random number generated by each slave device. Judgment means for judging whether there is an identification ID receiving means for receiving the identification ID of each slave device set according to the random number generation command from each slave device, and correspondence between each slave device and each identification ID Associated storage means for storing.

  Further, the slave device generates a random number in response to the random number generation command, through wiring connecting at least one terminal of the adjacent slave device and the own device, command receiving means for receiving the random number generation command, and And a random number generation means for transmitting the generated random number to the master device, and an identification ID setting means for setting the identification ID of the own device based on the determination result of the determination means of the master device.

  The master device receives random numbers generated inside each slave device, and determines whether or not the random numbers are all different. If the generated random numbers are all different, each slave device sets a unique identification ID based on the random number generated by each slave device. Therefore, even in a stacked device in which slave devices having the same terminal configuration are stacked, the master device can control each slave device based on the identification ID.

  Further, an identification ID that can identify each slave device can be set without changing the physical wiring configuration or connection state of the slave device. Furthermore, it is not necessary to change the number of terminals provided in the slave device and the physical connection state according to the number of stacked slave devices.

  Furthermore, in the present application, it is preferable that the slave device further includes an identification ID storage unit that stores an identification ID. The identification ID storage means is preferably a nonvolatile memory. Thereby, volatilization of the data of the identification ID can be prevented. Moreover, it is preferable that the identification ID storage means stores the identification ID at the time of the previous inspection after the stacking apparatus is assembled.

  Furthermore, in the present application, a master device of a stacked device in which a plurality of slave devices and master devices having the same terminal arrangement are stacked, and random number generation is started to start generation of random numbers at terminals of adjacent slave devices Command transmitting means for inputting a command, and determining means for receiving random numbers generated by the respective slave devices and determining whether the random numbers are different from each other, wherein the determining means is configured so that each of the slave devices When it is determined that the random number values from are different, it is possible to provide a master device characterized by transmitting an identification ID determination command to the slave device.

  When the slave device receives the identification ID determination command, the slave device sets the identification ID of the device based on the random number generated by the device. Thereby, the same effect as the above can be obtained.

  Here, it further includes: a stack number storage unit that stores the stack number of the slave device; and a range setting unit that determines range information indicating a range of random numbers generated by the slave device based on the stack number, Preferably, the command generation means generates a random number generation command including the range information.

  Further, each slave device has an internal resistance, and the first wiring for connecting the slave devices to each other via the internal resistance is connected to the first wiring, and the number of connections of the slave devices. And a potential number detecting means for detecting the potential output to the first wiring in response to the first wiring, and a connection number calculating means for calculating the number of connections of the slave device according to the detected potential. Preferably an apparatus is provided. Since the potential corresponding to the number of connections of the slave devices is output to the first wiring, the master device can grasp the number of connections of the slave devices based on this. Accordingly, since it is not necessary to store the number of connections in advance, the degree of freedom of the number of stacked slave devices in the stacked device increases. For example, a sudden change in the number of stacked layers can be handled.

  By using the present invention, it is possible to provide a technique capable of easily manufacturing a stacking device while identifying a plurality of devices stacked in the stacking device.

<First embodiment>
(Outline of laminating equipment)
FIG. 1A is a schematic view of a stacking apparatus according to a first embodiment of the present invention, and FIG. 1B is a schematic view showing a terminal configuration of the master apparatus and the slave apparatus of FIG. 1A. In the stacking apparatus 1000, a master apparatus 100 that controls each slave apparatus to be stacked, and first to third slave apparatuses 110, 120, and 130 that perform various controls in accordance with instructions from the master apparatus are stacked in order. The terminals α of the master device 100 and each slave device are configured in the same terminal arrangement as shown in FIG. 1B which is a plan view of each terminal. Therefore, when the master device 100 and each slave device are stacked, the terminals α of each device come into contact with each other. Further, each slave device is provided with a through wiring β penetrating through the slave device made of a substrate so as to correspond to each terminal. In addition, although the installation position of a penetration wiring is mentioned later, there exists a position which does not provide a penetration wiring. In this way, devices with the same terminal arrangement are stacked, and corresponding terminals are connected by through wires, so that various commands from the master device are transmitted to each slave device via each terminal and through wires. Is done.

(Overview of access to each slave device)
FIG. 2 is a conceptual diagram showing a bus wiring configuration of the stacking apparatus according to the first embodiment of the present invention. The bus wiring includes a selection signal line (first to third selection signal lines 171, 172, 173) and a data signal line 175 for setting each slave device to a selected state. The master device 100 is connected to the first slave device 110 via the first selection signal line 171, connected to the second slave device 120 via the second selection signal line 172, and via the third selection signal line 173. It is connected to the third slave device 130. The master device 100 is connected to the first to third slave devices 110 to 130 via the data signal line 175, respectively. Here, the master device 100 accesses a desired slave device via each selection signal line, and thereafter transmits data only to the accessed slave device via the data signal line 175. For example, when causing the first slave device 110 to perform various controls, the master device 100 transmits a selection signal via the first selection signal line 171 to set the first slave device 110 to the selected state, and the data signal line 175. A control signal is transmitted to the first slave device 110 via In this way, even when slave devices having the same terminal arrangement are stacked, only desired slave devices can perform desired control.

(Specific configuration of laminating equipment)
(1) Overall Configuration FIG. 3 is a cross-sectional configuration diagram of the stacking apparatus according to the first embodiment. In the stacking device 1000, the master device 100, the first slave device 110, the second slave device 120, and the third slave device 130 are stacked. The terminals of the master device 100 and the first to third slave devices 110 to 130 have the same terminal configuration as shown in FIG. 1B described above. Further, the terminals include a plurality of control terminals to which control signals for causing each slave device to perform various processes are input, and a plurality of CS terminals to which an identification command from the master device 100 is input. Here, an example in which three slave devices are stacked is shown, but the number of stacked devices is not limited.

(2) CS terminal configuration and CS terminal connection configuration via through wiring The first CS terminal 101b, the second CS terminal 103b, and the third CS terminal 105b on the surface 100b of the master device 100 have an identification command from the master device 100 at the top. This is a terminal for transmitting to each slave device stacked on. Here, the identification command is a command for causing each slave device to set an identification ID for identifying each slave device, and is a command composed of, for example, the number of bits for stacking. For example, when three slave devices are stacked as shown in FIG. 3, the identification command is composed of a command composed of 3 bits (0, 0, 0), for example. Here, the identification command (0, 0, 0) is referred to as a first bit, a second bit, and a third bit in order from the left. Accordingly, the first bit “0” is transmitted from the first CS terminal 101b, the second bit “0” is transmitted from the second CS terminal 103b, and the third bit “0” is transmitted from the third CS terminal 105b.

  Each slave device also has each CS terminal at the same arrangement position as the master device 100. The CS terminals of the master device 100 and each slave device are provided at least as many as the number of slave devices stacked. Each CS terminal is clamped to a predetermined potential (hereinafter referred to as a first potential, represented by “1”) such as a power supply or a ground before inputting an identification command. A part of the CS terminals of each slave device is connected via through wires 151, 153, and 155. That is, a certain CS terminal is connected to each other via a through-wire, but another CS terminal is not connected to each other via a through-wire, so that the installation position of the through-wire is different for each slave device. The through wiring is a wiring that penetrates the substrate-like slave device, and is formed substantially perpendicular to the main surface of the substrate. Next, a specific CS terminal configuration and a CS terminal connection configuration through the through wiring will be described with reference to FIG.

  The first CS terminal 101b, the second CS terminal 103b, and the third CS terminal 105b on the front surface 100b of the master device 100 are respectively a first CS terminal 111a, a second CS terminal 113a, and a third CS terminal 115a on the back surface 110a of the first slave device 110. In contact. The second CS terminal 113a and the third CS terminal 115a on the back surface 110a of the first slave device 110 are connected to the second CS terminal 113b and the third CS on the front surface 110b of the first slave device 110 via the through wires 151 and 153, respectively. It is connected to the terminal 115b. Further, the second CS terminal 113b and the third CS terminal 115b on the front surface 110b of the first slave device 110 are in contact with the second CS terminal 123a and the third CS terminal 125a on the back surface 120a of the second slave device 120, respectively. The third CS terminal 125 a is connected to the third CS terminal 125 b on the surface 120 b of the second slave device 120 through the through wiring 155. The third CS terminal 125b is connected to the third CS terminal 135a on the back surface 130a of the third slave device 130. Therefore, an identification command is input to the first CS terminal 111a, the second CS terminals 113a, 113b, and 123a, and the third CS terminals 115a, 115b, 125a, 125b, and 135a through the through wiring.

  On the other hand, the first CS terminal 111b on the surface 110b of the first slave device 110 is not connected to the corresponding first CS terminal 111a on the surface 110a via a through wiring. Similarly, the second CS terminal 123a on the surface 120a of the second slave device 120 is not connected to the corresponding second CS terminal 123b on the surface 120b via a through wiring. Therefore, no identification command is input to the first CS terminals 111b, 121a, 121b, 131a, 131b and the second CS terminals 123b, 133a, 133b.

  With such a connection configuration of the CS terminal and the through wiring, it is possible to set an identification ID for identifying each slave device. A method for setting the identification ID will be described later.

(3) Control terminal configuration and control terminal connection configuration via through wiring The control terminals of each slave device have the same terminal arrangement, and the corresponding control terminals are connected through the through wiring. Having the same terminal configuration means that, for example, the arrangement of terminals such as an address terminal and a read / write terminal is the same. Thus, by having the same terminal arrangement, signals having the same function are transmitted from the master device 100 to each slave device.

  Each control terminal is connected as follows, for example, through the through wiring. As shown in FIG. 3, the control terminal 107b on the front surface 100b of the master device 100 and the control terminal 117a on the back surface 110a of the first slave device 110 are in contact with each other, and the control terminal 117b on the front surface 110b of the first slave device 110 is contacted. And the control terminal 127a on the back surface 120a of the second slave device 120 are in contact with each other, and the control terminal 127b on the front surface 120b of the second slave device 120 and the control terminal 137a on the back surface 130a of the third slave device 130 are in contact with each other. ing. Further, the control terminal 117a is connected to the control terminal 117b through the through wiring 161, the control terminal 127a is connected to the control terminal 127b through the through wiring 163, and the control terminal 137a is connected to the control terminal 137b through the through wiring 165. It is connected. With such a configuration, a control signal is transmitted from the master device 100 to a slave device that has been selected in advance by transmitting a selection signal.

(Functional configuration)
Next, a functional configuration of the master device and each slave device for setting the identification ID will be described. FIG. 4 is a functional configuration diagram of the master device and the slave device.

(1) Master Device The master device 100 includes an identification command transmission unit 187, an identification ID reception unit 189, an association storage unit 190, a selection signal transmission unit 191, and a control signal transmission unit 192.

  The identification command transmission unit 187 generates an identification command and transmits the identification command to each slave device via the first to third CS terminals 101b, 103b, and 105b. The identification ID receiving unit 189 receives an identification ID unique to each slave device set by each slave device. For example, the master device 100 receives an identification ID for each slave device via a through wiring that connects the control terminals. As will be described later, the identification ID receiving unit 189 may receive information on a selection signal line for each slave device as an identification ID. The association storage unit 191 stores the received identification ID in association with each slave device.

  The selection signal transmission unit 191 transmits a selection signal to a corresponding slave device in order to select a slave device that can perform necessary processing. At this time, the selection signal transmission unit 191 generates a selection signal based on the identification ID stored in the association storage unit 191 and transmits the selection signal to the corresponding slave device. For example, the selection signal is generated including the identification ID of the slave device to be accessed. Next, the control signal transmission unit 192 transmits a control signal for causing the slave device in the selected state to perform various controls. As a result, the master device can cause only the corresponding slave device to execute a desired process.

(2) Functional Configuration of Slave Device Each slave device includes a command receiving unit 181, an identification ID setting unit 182, an identification ID storage unit 183, a selection signal receiving unit 184, a control signal receiving unit 185, and a processing unit 186. The command receiving unit 181 receives an identification command from the master device 100 via each CS terminal. The identification command is transmitted from the master device 100 to each slave device. However, as shown in FIG. 3 described above, all bits of the identification command (0, 0, 0) may not be transmitted depending on whether or not the CS terminal of each slave device is connected by the through wiring. For example, the first CS terminal 121a of the second slave device 120 cannot receive the first bit “0” of the identification command. This is because the first CS terminal 111b of the first slave device 110 below the second slave device 120 is not connected by the through wiring. Therefore, the first CS terminal 121a remains clamped at the first potential “1”. Meanwhile, the second CS terminal 123a and the third CS terminal 125a of the second slave device 120 receive the second bit “0” and the third bit “0” of the identification command. Therefore, the command receiving unit 181 of the second slave device 120 receives the identification command (1, 0, 0) via the first CS terminal 121a, the second CS terminal 123a, and the third CS terminal 125a.

  As described above, the command receiving unit 181 of each slave device receives the identification command whose value has changed according to the arrangement position of the through wiring. FIG. 5 shows identification commands received by the command receivers of the first to third slave devices 110, 120, and 130 shown in FIG. As shown in FIG. 3, since the arrangement positions of the through wirings are different for each slave device, the values of the identification command received by the command receiving unit 181 of each slave device are different from each other.

  The identification ID setting unit 182 sets the identification ID of the own device based on identification commands having different values. As described above, since the value of the identification command is different for each slave device, the identification ID unique to each slave device can be set by setting the identification ID accordingly. The identification ID storage unit 183 stores the set identification ID of the own device.

  The selection signal receiving unit 184 receives, for example, a selection signal including an identification ID from the selection signal transmission unit 191 of the master device. Further, the selection signal receiving unit 184 compares the identification ID in the identification ID storage unit 183 with the identification ID included in the selection signal, and determines whether or not the own device is selected. Here, when the own device is selected, the selection signal receiving unit 184 instructs the control signal receiving unit 185 to receive the control signal from the master device 100. The control signal receiving unit 185 receives a control signal from the control signal transmitting unit 192 of the master device 100 via the control terminal according to the command.

  The processing unit 186 processes the control signal received by the control signal receiving unit 185 and executes various controls.

  Note that the identification ID setting unit 182 of each slave device may recognize a selection signal line for setting the own device in a selected state based on an identification command as described later. The identification ID storage unit 183 stores the selection signal line recognized by the identification ID setting unit 182. Thus, by setting the selection signal line for each slave device, only each slave device can be selected.

(Identification ID setting process)
Next, the identification ID setting process by each slave device will be described based on the connection configuration of the CS terminal and the through wiring shown in FIG.

(1) Before transmission of identification command Before the identification command is transmitted to each slave device, all the CS terminals are clamped at the first potential “1”. Next, the identification command transmission unit 187 of the master device 100 sends an identification command composed of 3 bits (0, 0, 0) to each slave device via the first to third CS terminals 101b, 103b, and 105b. Send. That is, the first bit “0” is transmitted from the first CS terminal 101b, the second bit “0” is transmitted from the second CS terminal 103b, and the third bit “0” is transmitted from the third CS terminal 105b. By transmitting this identification command, each slave device and master device enter an identification ID setting mode.

(2) After transmitting the identification command The command receiving unit 181 of each slave device receives the identification command whose value has changed according to the installation position of the through wiring. Here, each command receiver 181 of each slave device receives the identification command shown in FIG. Specifically, the first CS terminal 111 a of the first slave device 110 receives the first bit “0” of the identification command (0, 0, 0) from the first CS terminal 101 b of the master device 100. Similarly, the second CS terminal 113a and the third CS terminal 115a of the first slave device 110 receive the second bit “0” and the third bit of the identification command (0, 0, 0) from the second CS terminal 103b and the third CS terminal 105b, respectively. Bit “0” is received. Thereby, the command receiving unit 181 of the first slave device 110 receives the identification command (0, 0, 0).

  As described above, since the first CS terminals 111a and 111b of the first slave device 110 are not connected by the through wiring, the identification command (0, 0, 0) is sent to the first CS terminal 121a of the second slave device 120. The first bit “0” is not reached. Therefore, the first CS terminal 121a remains clamped at the first potential “1”. On the other hand, the second bit “0” and the third bit “0” of the identification command (0, 0, 0) are transmitted to the second CS terminals 123 a and 125 a of the second slave device 120 through the through wires 151 and 153. Is done. Therefore, the command receiving unit 181 of the second slave device 120 receives the identification command (1, 0, 0).

  Furthermore, since the first CS terminals 111a and 111b of the first slave device 110 are not connected by through wiring, the first bit of the identification command (0, 0, 0) is connected to the first CS terminal 131a of the third slave device 130. “0” does not reach. Similarly, since the second CS terminals 123a and 123b of the second slave device 120 are not connected by through wiring, the second CS terminal 133a of the third slave device 130 has a second identification command (0, 0, 0). Bit “0” is not reached. Therefore, the first CS terminal 131a and the second CS terminal 133a remain clamped at the first potential “1”. On the other hand, the third bit “0” of the identification command (0, 0, 0) is transmitted to the third CS terminal 135a of the third slave device 130 through the through wiring 153, the through wiring 155, and the third CS terminal 125b. . Therefore, the command receiving unit 181 of the third slave device 130 receives the identification command (1, 1, 0).

  Next, the identification ID setting unit 182 of each slave device is unique to each slave device based on the respective identification commands (0, 0, 0), (1, 0, 0), (1, 1, 0). An identification ID is set. The identification ID storage unit 183 stores the identification ID set by the identification ID setting unit 182.

  In the above description, the identification ID setting unit 182 of each slave device sets the identification ID based on the identification command. However, the identification ID setting unit 182 may recognize a selection signal line for setting the own apparatus in a selected state based on the identification command. For example, each slave device is identified based on the most significant bit in which “0” is output in the identification command. The first slave device 110 receives the identification command (0, 0, 0), and the most significant bit to which “0” is output is the first bit of the identification command. Therefore, the identification ID setting unit 182 of the first slave device recognizes the first CS terminal 111a as a selection signal line, and recognizes that the own device is selected when the first CS terminal 111a is “0”. The second slave device 120 receives the identification command (1, 0, 0), and the most significant bit to which “0” is output is the second bit of the identification command. Therefore, the identification ID setting unit 182 of the second slave device recognizes the second CS terminal 123a as a selection signal line, and recognizes that the own device is selected when the second CS terminal 123a is “0”. Further, the third slave device 130 has received the identification command (1, 1, 0), and the most significant bit to which “0” is output is the third bit of the identification command. Therefore, the identification ID setting unit 182 of the third slave device recognizes the third CS terminal 135a as a selection signal line, and recognizes that the own device is selected when the third CS terminal 135a is “0”.

(Various control processes in each slave device)
In order to access one of the stacked slave devices having the same terminal configuration, the selection signal transmission unit 191 of the master device 100 searches the association storage unit 190 for the identification ID of the slave device to be accessed. Then, the selection signal transmission unit 191 generates a selection signal including the searched identification ID and transmits the selection signal to the selection signal reception unit 184 of each slave device. As a result, the slave device having the corresponding identification ID enters a selection state in which various controls can be executed. Next, the control signal receiving unit 185 of the corresponding slave device receives the control signal from the master device. Based on this control signal, the corresponding slave device executes various processes.

(Function and effect)
With this configuration, the identification command transmitted by the master device becomes different information for each slave device when each slave device receives it. The identification ID setting means of the slave device sets an identification ID unique to each slave device in accordance with an identification command that differs for each slave device. Therefore, the master device can access each slave device by the set identification ID even when the terminals having the same terminal configuration of each slave device are connected through the through wiring. For example, the master device first selects a slave device to be controlled based on the identification ID, and puts the corresponding slave device in a selected state. Thereafter, a command is transmitted to the corresponding slave device to perform various controls. Here, the identification ID may be information for identifying a selection signal line for accessing only each slave device, for example. By setting a unique selection signal line for each slave device, only each slave device can be selected.

  Further, since corresponding terminals having the same terminal configuration are connected by a through wiring, the through wiring can be formed perpendicular to the slave device. Therefore, for example, a complicated manufacturing process such as forming the through wiring with an inclination with respect to the slave device is unnecessary, and the stacked device can be easily manufactured.

  It is also possible to manufacture a stacking device by stacking slave devices for which an identification ID has not yet been set, and to set the identification ID as described above at the initial setting of the stacking device. After completion of the initial setting, the master device accesses each slave device based on each set identification ID. Thus, even if the slave device before being configured as the stacking device does not have the identification ID, the identification ID can be set after manufacturing the stacking device. In other words, it is not necessary to attach an identification ID to each slave device before manufacturing the laminated device. Therefore, when a large number of chip-type slave devices are manufactured on the wafer, it is not necessary to attach an identification ID to each slave device. Thereby, the complexity of managing each slave device after dicing with the identification ID can be eliminated. For example, it is not necessary to perform a complicated operation such as selecting a slave device according to an identification ID from a large number of slave devices diced from a wafer.

  In addition, each slave device receives an identification command corresponding to the connection configuration of the through wiring after lamination. Since the slave device sets the identification ID in response to the identification command, there is no need to consider a stacking method such as a stacking order when the slave devices are stacked. Therefore, for example, each slave device can be arbitrarily stacked, and a stacked device can be easily manufactured.

  In addition, the CS terminals of the slave devices to which the identification command is input are connected to each other through a through wiring. That is, a CS terminal dedicated to each slave device for receiving the identification command is not necessary. Furthermore, since the identification command changes with the passage of each slave device, it is not necessary to input an identification command specific to each slave device to each slave device.

  Examples of the product in which the stacking apparatus according to the first embodiment is mounted include a mobile phone shown in FIG. 6, a portable computer, a PDA, a portable TV receiver, a portable audio player, a car navigation system, and the like. It is done.

(Modification 1 of the first embodiment)
In the first embodiment described above, the case where the through wiring is arranged as shown in FIG. 3 has been described. However, as long as each slave device can receive an identification command having a different value via the through wiring, the arrangement position of the through wiring is not limited to FIG. For example, as shown in FIG. 7, the first slave device 110 may be provided with through wires 151a and 153a, and the second slave device 120 may be provided with a through wire 155a. More specifically, the first CS terminals 111a and 111b of the first slave device 110 are connected by a through wiring 151a. Further, the third CS terminals 115a and 115b of the first slave device 110 are connected by the through wiring 153a. Further, the third CS terminals 125a and 125b of the second slave device 120 are connected by the through wiring 155a.

  Here, when an identification command is input from the first to third CS terminals 101b, 103b, 105b, the identification command received by each slave device is as follows. The first to third CS terminals 111a, 113a, and 115a of the first slave device 110 receive the identification command (0, 0, 0) as the identification command as it is. The first CS terminal 121a and the third CS terminal 125a of the second slave device 120 are connected to the first bit “0” and the third bit of the identification command (0, 0, 0) via the through wiring 151a and the through wiring 153a, respectively. Receives “0”. On the other hand, since the second CS terminals 113a and 113b of the first slave device 110 are not connected by the through wiring, the second CS terminal 123a of the second slave device 120 remains clamped at the first potential. Thereby, the command receiving unit 181 of the second slave device 120 receives the identification command (0, 1, 0). Further, the second CS terminals 123a and 123b of the second slave device 120 are not connected by through wiring. Therefore, the command receiving unit 181 of the third slave device 130 receives the identification command (1, 1, 0).

  From the above, the identification ID setting unit 182 of each slave device is unique to each slave device based on the respective identification commands (0, 0, 0), (0, 1, 0), (1, 1, 0). An identification ID is set.

(Other)
In the above description, the identification command is (0, 0, 0), but the identification command may be (1, 1, 1). The first potential for clamping the CS terminal may be set to “0”. In this case, the value of the identification command in FIG. 7 is “0” for “1” and “1” for “0”.

  Furthermore, in the above description, the terminals are provided on both surfaces of each slave device and the master device. However, the terminals may be provided only on one surface as long as the terminals are connected to each other through the through wiring.

<Second Embodiment>
(Configuration of laminating equipment)
(1) Overall Configuration The terminals of the master device and each slave device have the same terminal arrangement as shown in FIGS. 1A and 1B of the first embodiment.

  FIG. 8 is a cross-sectional configuration diagram of the laminating apparatus according to the second embodiment. In the stacking device 2000, the master device 200, the first slave device 210, the second slave device 220, the third slave device 230, and the fourth slave device 240 are stacked. Further, the terminals include a plurality of control terminals to which control signals for causing each slave device to perform various processes are input, and a plurality of CS terminals to which an identification command from the master device 200 is input. Here, an example in which four slave devices are stacked is shown, but the number of stacked devices is not limited.

(2) CS terminal configuration and CS terminal connection configuration via through wiring The third CS terminal 205b on the surface 200b of the master device 200 transmits an identification command from the master device 200 to each slave device stacked on top. CS terminal. Also, the through wires 271, 275 and 279 provided in each slave device are through wires for transmitting an identification command from the master device and a command from the lower slave device to the upper slave device. Further, the positions of the through wirings 271, 275, and 279 are switched for each slave device. Thereby, the command input to the CS terminal in which the through wiring is formed is transmitted to the upper slave device. On the other hand, when a command is input to the CS terminal in which no through wiring is formed, the command is not transmitted to the upper slave device. Here, the through wiring is a wiring penetrating the slave device on the substrate, and is a wiring formed substantially perpendicular to the main surface of the substrate.

  On the other hand, the through wirings 273, 277, and 281 are through wirings for transmitting a completion notification indicating that the setting of the identification ID by each slave device is completed from the slave devices to the master device 200. The through wirings 273, 277, and 281 connect the CS terminals arranged in the same manner to the first to fourth slave devices. Specifically, the structure of the CS terminal and the through wiring will be described below.

  The second CS terminal 213a on the back surface 210a of the first slave device 210 and the second CS terminal 213b on the front surface 210b are connected via a through wiring 271. The third CS terminal 225 a on the back surface 220 a of the second slave device 220 and the third CS terminal 225 b on the front surface 220 b are connected via a through wiring 275. The second CS terminal 233 a on the back surface 230 a of the third slave device 230 and the second CS terminal 233 b on the front surface 230 b are connected via a through wiring 279. Thus, the second CS terminals and the third CS terminals of each slave device are connected to each other by the through wiring arranged alternately for each slave device.

  Further, the first CS terminal 211 a on the back surface 210 a of the first slave device 210 and the first CS terminal 211 b on the front surface 210 b are connected via a through wiring 273. The first CS terminal 221 a on the back surface 220 a of the second slave device 220 and the first CS terminal 221 b on the front surface 220 b are connected via a through wiring 277. Further, the first CS terminal 231 a on the back surface 230 a of the third slave device 230 and the first CS terminal 231 b on the front surface 230 b are connected via a through wiring 281. In this way, the first CS terminals of all the slave devices are connected by the through wiring.

  In addition, the terminals of the same arrangement are in contact with each other by stacking the slave device and the master device. Each CS terminal is clamped at a predetermined potential (hereinafter referred to as a first potential, represented by “1”) such as a power source or a ground before inputting an identification command from the master device 200. ing.

(3) Control terminal configuration and control terminal connection configuration via through wiring The control terminals of each slave device have the same terminal arrangement, and the corresponding control terminals are connected through the through wiring. Having the same terminal configuration means that, for example, the arrangement of terminals such as an address terminal and a read / write terminal is the same. Thus, by having the same terminal arrangement, a signal having the same function is transmitted from the master device 200 to each slave device.

  Each control terminal is connected as shown in FIG. Thus, for example, the control signal from the control terminal 207b of the master device 200 includes the control terminal 217a, the through wiring 261, the control terminals 217b and 227a, the through wiring 263, the control terminals 227b and 237a, the through wiring 265, and the control terminals 237b and 247a. And transmitted to the slave device selected by the selection signal.

(Outline of identification ID setting method)
FIG. 9 is a timing chart showing an outline of an identification ID setting method in the stacking apparatus shown in FIG.

  Master device 200 transmits an identification command to first slave device 210. At this time, the identification command includes an identification ID “0001” for setting the first slave device 210. The first slave device 210 sets “0001” as the identification ID of the own device based on this identification command. Then, the first slave device 210 generates a command for setting an identification ID for the next second slave device 220 and transmits the command to the second slave device 220. At this time, the generated command includes the identification ID “0002” set in the second slave device 220. The identification ID of the next slave device is generated so as to be an identification ID unique to all the stacked slave devices. Here, as an example, the identification ID of the next slave device is generated by a method of counting up the identification ID of the own device one by one. When the setting of the identification ID is completed, the first slave device 210 transmits an “ACK” response indicating the completion to the master device 200.

  Next, the second slave device 220 receives the identification ID “0002” together with the command, and sets “0002” as the identification ID of the own device. Similarly, a command for setting an identification ID for the next third slave device 230 is generated and transmitted to the third slave device 230. Here, the generated command includes “0003” as the identification ID. Then, the second slave device 220 transmits an “ACK” response to the master device 200 when the setting of the identification ID of the own device is completed.

  The above processing is repeated until each of the stacked slave devices completes the setting of the identification ID.

(Functional configuration)
Next, a functional configuration of the master device and each slave device for setting the identification ID will be described. FIG. 10 is a functional configuration diagram of the master device and the slave device. FIG. 10 shows only functional configurations of the first slave device 210 and the second slave device 220, but other slave devices also have the same functional configuration.

(1) Master Device The master device 200 includes an identification command transmission unit 287, an identification ID reception unit 289, an association storage unit 290, a selection signal transmission unit 291 and a control signal transmission unit 292.

  The identification command transmission unit 287 generates an identification command and transmits the identification command to the first slave device 210 via the third CS terminal 205b.

  The identification ID receiving unit 289 receives an identification ID unique to each slave device set by each slave device and a completion notification indicating completion of setting the identification ID. The completion notification may be received by receiving the identification ID. The association storage unit 290 stores the received identification ID in association with each slave device.

  Note that the identification ID receiving unit 289 may receive a completion notification including the number of stacks and acquire the identification ID of each slave device based on the number of stacks. That is, the command receiving unit 293 of the slave device described later increments the number of stacks each time it passes through each slave device, and transmits the count value to the master device 200 as the number of stacks. Here, it is assumed that the command receiving unit 293 of each slave device sets the identification ID of the slave device stacked on the upper part by a predetermined method. In this case, the identification ID receiving unit 289 of the master device may grasp the identification ID of each slave device based on the received number of stacked layers and a predetermined identification ID setting method. For example, it is assumed that the identification ID receiving unit 289 receives the number of stacks = 5 as a completion notification from the uppermost slave device. Then, it is assumed that the command receiving unit 293 of each slave device sets the identification ID of the slave device above the own device by adding +1 to the identification ID of the own device. In this case, even if the identification ID receiving unit 289 does not receive the identification ID from each slave device, the identification ID is “0001”, “0002”, “0003” in order from the master device based on the number of stacks of 5. , “0004”, and “0005”.

  The selection signal transmission unit 291 transmits a selection signal to the corresponding slave device in order to select a slave device that can perform necessary processing. At this time, the selection signal transmission unit 291 generates a selection signal based on the identification ID stored in the association storage unit 290, and transmits the selection signal to the corresponding slave device. Next, the control signal transmission unit 292 transmits a control signal for causing the slave device in the selected state to perform various controls. As a result, only the corresponding slave device can execute a desired process.

(2) Functional Configuration of Slave Device Each slave device includes an identification ID setting unit 282, an identification ID storage unit 283, a selection signal reception unit 284, a control signal reception unit 285, a processing unit 286, a command transmission unit 293, and a command reception unit 294. including.

  The command receiving unit 294 receives an identification command from the master device or the lower slave device. The command receiving unit 294a of the first slave device 210 receives the identification command via the third CS terminal 205b of the master device 200 and the third CS terminal 215a of the first slave device 210. Here, “0” is input as the identification command. The identification command to the first slave device 210 includes the identification ID “0001”. Here, before the identification command is input, the third CS terminal 215a is clamped at the first potential “1”. Therefore, the third CS terminal 215a changes its potential from “1” to “0” when receiving the identification command “0”. The command receiving unit 294 receives the identification ID included in the identification command based on the change.

  The command transmission unit 293 generates the identification ID of the upper slave device based on the identification ID received by the command reception unit 294. Then, a command including the generated identification ID is generated and transmitted to the command receiving unit 293 of the upper slave device. The generation of the identification ID only needs to be performed so that the identification IDs of the stacked slave devices are different, and the method is not limited.

  The identification ID setting unit 282 sets the identification ID of the own device based on the received identification ID. The identification ID storage unit 283 stores the set identification ID of the own device. Further, when the setting of the identification ID is completed, the identification ID setting unit 282 generates a completion notification “ACK” and transmits it to the identification ID receiving unit 289 of the master device 200. Accordingly, when the master device 200 does not receive the completion notification “ACK” from the slave device even after a predetermined time has elapsed after the transmission of the identification command, the master device 200 determines that the setting of the identification ID in each slave device has been completed. . The master device 200 does not know the number of slave devices stacked because the number of slave devices stacked is changed according to the function required by the product and is not fixed information. Accordingly, the master device can eliminate the waste of waiting for the completion of setting by receiving the completion of setting the identification ID in each slave device. Further, the master device can shift to the next operation simultaneously with the completion notification “ACK”.

  The selection signal reception unit 284 receives, for example, a selection signal including an identification ID from the selection signal transmission unit 291 of the master device. Further, the selection signal receiving unit 284 compares the identification ID in the identification ID storage unit 283 with the identification ID included in the selection signal, and determines whether or not the own device is selected. Here, when the own device is selected, the selection signal receiving unit 284 instructs the control signal receiving unit 285 to receive the control signal from the master device 200. The control signal receiving unit 285 receives a control signal from the control signal transmitting unit 292 of the master device 200 via the control terminal according to the command.

  The processing unit 286 processes the control signal received by the control signal receiving unit 285 and executes various controls.

(Identification ID setting process)
FIG. 11 is a schematic view showing an outline of a method for setting an identification ID in the stacking apparatus shown in FIG. The identification ID setting process will be described together with the functional configuration diagram of the slave device shown in FIG.

  The identification command transmission unit 287 of the master device 200 transmits an identification command to the first slave device 210 via the third CS terminal 205b of the master device 200 and the third CS terminal 215a of the first slave device 210.

  The command receiving unit 294a of the first slave device 210 receives the identification command transmitted from the master device 200. Here, since the through wiring is not formed in the third CS terminal 215a, the identification command is not transmitted to the second slave device 210 as it is. Next, the identification ID setting unit 282a of the first slave device 210 sets an identification ID unique to the own device based on the received identification command. For example, when the identification command includes “0001” as the identification ID of the first slave device 210, the identification ID setting unit 282 a sets the identification ID “0001” in the first slave device 210. Here, when the identification ID is set in the own device, the identification ID setting unit 282a generates a completion notification “ACK” indicating the completion of setting the identification ID. Then, the identification ID setting unit 282a transmits a completion notification “ACK” together with the identification ID “0001” of the own device to the identification ID receiving unit 289a of the master device 200. Here, the completion notification “ACK” and the identification ID “0001” are transmitted to the master device 200 via the through wiring 273.

  Next, the command transmission unit 293a of the first slave device 210 generates a command that allows the upper second slave device 220 to set a unique identification ID. For example, the command transmission unit 293a generates a command based on the identification ID obtained by adding 1 to the identification ID of the own device. It is assumed that a command including an identification ID “0002” obtained by adding 1 to the identification ID “0001” of the first slave device is generated. Then, the command transmission unit 293a transmits the generated command to the second CS terminal 213a along the direction of the arrow of the first slave device 210 in FIG. As a result, the generated command is transmitted to the second CS terminal 223a of the second slave device 220 via the through wiring 271 connecting the second CS terminal 213a and the second CS terminal 213b.

  The command receiving unit 294b of the second slave device 220 receives a command from the first slave device 210 via the second CS terminal 223a. Here, since no through wiring is formed in the second CS terminal 223a, the identification command is not transmitted to the third slave device 210 as it is. The identification ID setting unit 282b sets “0002” as the identification ID of the own apparatus based on the received command. Next, the identification ID setting unit 282 b transmits a completion notification “ACK” together with the identification ID “0002” of the own device to the identification ID receiving unit 289 of the master device 200. Here, the completion notification “ACK” and the identification ID “0002” are transmitted to the master device 200 via the through wiring 277 and the through wiring 273.

  Further, the command transmission unit 293b of the second slave device 220 increments the identification ID “0002” by +1 and generates a command based on the identification ID “0003”. And the command transmission part 293b transmits the produced | generated command to the 3rd CS terminal 225a along the direction of the arrow of the 2nd slave apparatus 210 in FIG. Thus, the generated command is transmitted to the third CS terminal 235a of the third slave device 230 via the through wiring 275 that connects the third CS terminal 225a and the third CS terminal 225b of the second slave device 220.

  In this way, it is possible to set a unique identification ID for the own device based on the identification command received from the master device 200 and the command received from the lower slave device.

(Various control processes in each slave device)
The selection signal transmission unit 291 of the master device 200 searches the association storage unit 290 for the identification ID of the slave device to be accessed in order to access one of the stacked slave devices having the same terminal configuration. Then, the selection signal transmission unit 291 generates a selection signal including the searched identification ID and transmits the selection signal to the selection signal reception unit 284 of each slave device. As a result, the slave device having the corresponding identification ID enters a selection state in which various controls can be executed. Next, the control signal receiving unit 285 of the corresponding slave device receives the control signal from the master device. Based on this control signal, the corresponding slave device executes various processes.

(Function and effect)
Each slave device changes the received identification command and outputs it to the adjacent slave device. Thus, each slave device can receive a unique identification command and set an identification ID unique to each slave device based on the unique identification command. Therefore, even when a plurality of slave devices are stacked in the stacked device, the master device can identify each slave device. For example, the master device first selects a slave device to be controlled based on the identification ID, and puts the corresponding slave device in a selected state. Thereafter, a command can be transmitted to the corresponding slave device to perform various controls. In addition, the same effects as those of the first embodiment can be obtained.

(Modification 1 of the second embodiment)
In the above second embodiment, the master device 200 receives the completion notification “ACK” from each slave device, and thus the identification ID setting process is completed. However, the identification ID setting process may be terminated after a predetermined time has elapsed. For example, the master device 200 separately stores the number of slave devices stacked in advance. Then, when the time required for the number of stacked slave devices to set the identification ID elapses, the master device 200 ends the identification ID setting process. In such a case, it is not necessary to transmit a completion notification “ACK” from each slave device to the master device 200. Therefore, it can be set as a structure as shown in FIG. FIG. 12 is a cross-sectional configuration diagram of a laminating apparatus according to another second embodiment. In the configuration illustrated in FIG. 12, it is not necessary to provide the through wirings 273, 277, and 281 for transmitting the completion notification “ACK” as compared with FIG. 8. Other configurations are the same as those in FIG.

(Modification 2 of the second embodiment)
FIG. 13 is a cross-sectional configuration diagram of a laminating apparatus according to another second embodiment. In the configuration of FIG. 8 and FIG. 11 of the second embodiment, for example, no through wiring is formed in the third CS terminal 215a of the first slave device. That is, even if the third CS terminal 215a is formed on the back surface 210a of the first slave device 210, the through wiring is not necessarily formed on the third CS terminal 215a. However, in FIG. 13, when a CS terminal is formed on the back surface of each slave device, a through wiring is formed together with the CS terminal. For example, the first slave device 310 has a first CS terminal 311a, a third CS terminal 315a, and a fourth CS terminal 317a on the back surface 310a. The first CS terminal 311a is provided with a through wiring 361, the third CS terminal 315a is provided with a through wiring 363, and the fourth CS terminal 317a is provided with a through wiring 365. Similarly, the second slave device 320 has a first CS terminal 321a, a second CS terminal 323a, and a third CS terminal 325a on the back surface 320a. The first CS terminal 321a is provided with a through wiring 367, the second CS terminal 323a is provided with a through wiring 369, and the third CS terminal 325a is provided with a through wiring 371. When the terminals and the through wiring are integrally formed in this way, the slave devices can be set with an identification ID by stacking the slave devices as shown in FIG.

  FIG. 14 is a schematic view showing an outline of a method for setting an identification ID in the stacking apparatus shown in FIG. Since the functional configuration diagram of the master device and the slave device is the same as that of FIG. 10, the configuration of FIG. 13 will be described with reference to FIGS.

  The identification command transmission unit 387 of the master device 300 transmits an identification command to the first slave device 310 via the fourth CS terminal 307 b of the master device 300 and the fourth CS terminal 317 a of the first slave device 310.

  The command receiving unit 294a of the first slave device 310 receives the identification command transmitted from the master device 300. Here, although the through wiring 365 is formed in the fourth CS terminal 317 a, the through wiring 365 is not connected to the upper second slave device 320. Therefore, the identification command is not transmitted to the second slave device 320 as it is. Next, the identification ID setting unit 282a of the first slave device 310 sets an identification ID unique to the own device based on the received identification command. Here, the identification ID setting unit 282 a transmits a completion notification “ACK” together with the identification ID “0001” of the own device to the identification ID receiving unit 289 of the master device 300. Here, the completion notification “ACK” and the identification ID “0001” are transmitted to the master device 300 via the through wiring 361.

  Next, the command transmission unit 293a of the first slave device 310 generates a command that allows the upper second slave device 320 to set a unique identification ID. Then, the command transmission unit 293a transmits the generated command to the third CS terminal 315a along the direction of the arrow of the first slave device 310 in FIG. Accordingly, the generated command is transmitted to the third CS terminal 325a of the second slave device 320 via the through wiring 363 that connects the third CS terminal 315a and the third CS terminal 315b.

  The command receiving unit 294b of the second slave device 320 receives a command from the first slave device 310 via the third CS terminal 325a. Here, although the through wiring 371 is formed in the third CS terminal 325 a, the through wiring 371 is not connected to the upper third slave device 330. Therefore, the command generated by the first slave device 310 is not transmitted to the third slave device 330 as it is. Next, the identification ID setting unit 282a of the second slave device 320 sets an identification ID unique to the own device based on the received command, and sends a completion notification “ACK” and an identification ID to the through wiring 367 and the through wiring 361. To the master device 300.

  Further, the command transmission unit 293b of the second slave device 320 similarly generates a command. Then, the command transmission unit 293b transmits the generated command to the second CS terminal 323a along the direction of the arrow of the second slave device 320 in FIG. Accordingly, the generated command is transmitted to the third CS terminal 333a of the third slave device 330 via the through wiring 369 that connects the second CS terminal 323a and the second CS terminal 323b of the second slave device 320.

  The above processing is repeated until each of the stacked slave devices completes the setting of the identification ID. Thereby, based on the identification command received from the master device 300 and the command received from the lower slave device, an identification ID unique to the own device can be set.

(Other)
In the above description, the terminals are provided on both surfaces of each slave device and the master device. However, as long as the terminals are connected to each other through the through wiring, the terminals may be provided only on one surface.

<Third Embodiment>
(Overview)
A plurality of slave devices and master devices having the same terminal arrangement are stacked to form a stacked device. Here, the master device receives a random number generation command for starting random number generation at a terminal of an adjacent slave device, and receives random numbers generated by each slave device, and is a random number having a different value from each other. A determination means for determining whether or not, an identification ID receiving means for receiving the identification ID of each slave device set according to the random number generation command from each slave device, and a correspondence between each slave device and each identification ID is stored Associated storage means. In addition, the slave device generates a random number in response to the random number generation command by generating a through wire that connects at least one terminal of the adjacent slave device and its own device, a command receiving unit that receives the random number generation command, and a random number generation command. Random number generation means for transmitting the random number to the master device, and identification ID setting means for setting the identification ID of the own device based on the determination result by the determination means of the master device.

  In such a configuration, the master device receives a random number generated inside each slave device, and determines whether or not the random numbers are all different. If the generated random numbers are all different, each slave device sets a unique identification ID based on the random number generated by each slave device. Therefore, even in a stacked device in which slave devices having the same terminal configuration are stacked, the master device can control each slave device based on the identification ID.

  Further, an identification ID that can identify each slave device can be set without changing the physical wiring configuration or connection state of the slave device. Furthermore, it is not necessary to change the number of terminals provided in the slave device and the physical connection state according to the number of stacked slave devices. A specific configuration will be described below.

(Constitution)
FIG. 15 is a configuration diagram of a system for identifying an apparatus using the device identification method according to the third embodiment of the present invention.

  In FIG. 15, the master device 401 and the first slave device 411 and the second slave device 412 to the nth slave device 413 are connected by command lines 422 and 434 and data signal lines 421 and 433, respectively. The master device transmits a command for selecting each slave device to the corresponding slave device via the command line.

  Further, the terminals of the master device and each slave device have the same terminal arrangement as shown in FIGS. 1A and 1B of the first embodiment, and the corresponding terminals are connected to each other through a through wiring.

(Functional configuration)
FIG. 16A is a functional configuration diagram of the slave device in the third embodiment, and FIG. 16B is a functional configuration diagram of the master device. 16A and 16B, the same components as those in FIG. 15 are denoted by the same reference numerals, and description thereof is omitted.

  In FIG. 16A, the slave device includes a command processing unit 501, a random number generation unit 502, a data processing unit 503, and an identification ID storage unit 504. The command processing unit 501 processes a command transmitted from the master device 401 and controls response transmission to the master device 401. The command includes a command for causing the slave device to generate a random number and range information regarding the range for generating the random number. The random number generation means 502 generates a random number within a range instructed by the master device. The data processing unit 503 performs processing of data transmitted / received to / from the master device and transmission processing of response signals. The identification ID storage unit 504 stores the random number generated by the random number generation unit 502 in response to a command from the master device as the identification ID of the slave device.

  In FIG. 16B, the master device 401 includes command generation means 551, data processing means 553, response confirmation means 552, and connection number storage means 554. The command generation unit 551 generates a command such as requesting the slave device to generate a random number up to the number of slave devices or requesting a response to be returned according to the generated random number. The data processing means 553 performs processing of data transmitted / received to / from the slave device and response signal reception processing. The response confirmation unit 552 stores the number of times of the response transmitted from the slave device. The connection number storage unit 554 stores the number of slave devices connected to the master device 401.

(processing)
(1) Overall Processing in Master Device FIG. 17 is a flowchart showing an overview of overall processing when the master device identifies each slave device. With reference to FIG. 17, an outline of the entire process when the master device identifies each slave device will be described.

  Step S401: The connection number storage unit 554 of the master device 401 acquires the number of slave devices. Here, the number of slave devices is described as Dn. The slave device number Dn may be recorded in advance in the connection number storage means 554 when the master device is manufactured, or may be stored from outside the master device after manufacture.

  Step S402: The command generation means 551 of the master device 401 determines a range of random numbers to be generated by the slave device. Here, the lower limit of the range of generated random numbers is Rmin, and the upper limit is Rmax. Therefore, the range of generated random numbers is Rmin to Rmax. Here, the number obtained by subtracting Rmin from Rmax is equal to or greater than the number of slave devices Dn. The number obtained by subtracting Rmin from Rmax may be set to exceed the number of slave devices Dn.

  Step S403: In order to cause the slave device to generate random numbers in the range determined in step S402, the command generation means 551 issues a random number generation command and transmits it to each slave device. This random number generation command includes range information indicating a range of generated random numbers, and is transmitted to each slave device through a command line 422.

  Step S404: The data processing means 553 and the response confirmation means 552 of the master device 401 perform random number confirmation processing for confirming whether or not each slave device has generated a unique random number.

  Step S405: The command generation unit 551 determines whether each slave device can set an identification ID for identifying each slave device based on the result of step S404.

  Step S406: If the identification ID can be set, the command generating means 551 issues an identification ID setting command. This identification ID setting command is transmitted to each slave device via command lines 422 and 434.

(2) Random Number Confirmation Processing in Master Device FIG. 18 is a flowchart showing the contents of the random number confirmation processing in step S404 in FIG.

  Step S500: The response confirmation unit 552 performs a process of initializing a register, a buffer, and the like when starting the random number confirmation process.

  Step S501: The response confirmation unit 552 determines the value of the first random number in order to confirm whether or not the slave device has generated a random number. Here, the determined random number value is described as Ra. Ra is determined from the range of the random number determined in step S402. Here, Ra is the minimum value Rmin.

  Step S502: The command generation means 551 issues a generated random number confirmation command to the slave device via the data processing means 553 in order to request a response to the identification ID setting command. The generated random number confirmation command includes Ra, and is a command for requesting a response to the slave device when the random number generated by the slave device is equal to Ra. Thereby, the response confirmation unit 552 of the master device receives a response from the slave device via the data processing unit 553 when the random number generated by the slave device is equal to Ra.

  Step S503: The response confirmation unit 552 confirms whether or not there is a response from the slave device.

  Step S504: When the response confirmation unit 552 receives a response in step S504, the response confirmation unit 552 stores how many times the response has been received. Here, if the response count from the slave device is described as An, 1 is added to the response count An every time there is a response. It is assumed that An is initialized to 0 in step S500.

  Step S505: Next, the response confirmation unit 552 determines whether Ra has reached Rmax.

  Step S506: If the response confirmation means 552 determines in step S505 that Ra has not yet reached Rmax, it adds 1 to Ra and changes the value of the random number to be confirmed by the slave device. Subsequently, the process returns to step S502, and the random number confirmation process by the response confirmation unit 552 is continued.

Step S507: If the response confirmation unit 552 determines that Ra has reached Rmax in Step S505, that is, whether or not the slave device has generated random numbers for all values in the range of random numbers determined in Step S402. If confirmed, it is next determined whether or not the response count An from the slave device is equal to the slave device count Dn.
As a result, it is possible to confirm whether the slave device has generated a different random number from the other slave devices.

  Step S508: When the response confirmation means 552 confirms that the response number An is equal to the slave device number Dn in Step S507, it outputs a random number determination flag. That is, the response confirmation unit 552 generates a random number determination flag when each slave device generates a different random number. In step S405 described above, when the random number determination flag is set, the command generation unit 551 determines that each slave device can set an identification ID. Then, an identification ID setting command is transmitted to each slave device.

(3) Overall Processing in Slave Device FIG. 19 is a flowchart showing an outline of processing when the slave device receives a command from the master device. Processing in the slave device will be described with reference to FIG.

  Step S601: The command processing means 501 of the slave device receives the command issued by the command generation means 551 of the master device 401 via the command line 434. Further, the command processing means 501 analyzes what processing is requested by the received command. For example, it is analyzed whether it is a random number generation confirmation command, a random number generation command, or an identification ID setting command.

  Step S602: The command processing unit 501 determines whether to perform random number generation processing, random number confirmation processing, or identification ID setting processing according to the type of received command.

  Step S611: If the command is a random number generation command, the random number generation means 502 generates a random number Rn within the random number range set by the command generation means 551 of the master device. Here, the generated random number is described as Rn.

  Step S621: When receiving the generated random number confirmation command including the random number Ra requested to be confirmed, the command processing means 501 executes the processing. That is, the command processing unit 501 receives a random number from the random number generation unit 502 and determines whether the random numbers Rn and Ra generated by each slave device are equal.

  Step S622: When the random number Ra is equal to the random number Rn generated by each slave device, the command processing unit 501 returns a response to the master device 401 via the data processing unit 503.

  Step S631: Upon receiving the above-described identification ID setting command from the command generation unit 551 of the master device 401, the command processing unit 501 uses the random number Rn generated by each slave device as the identification ID unique to each slave device, and the identification ID storage unit 504. Output to.

(Function and effect)
According to the above configuration, even when a plurality of slave devices are stacked in the stacked device, the master device can identify each slave device. For example, the master device first selects a slave device to be controlled based on the identification ID, and puts the corresponding slave device in a selected state. Thereafter, a command can be transmitted to the corresponding slave device to perform various controls.

  It is also possible to manufacture a stacked device by stacking slave devices for which an identification ID has not yet been set, and to set the identification ID as described above at the time of initial setting. After completion of the initial setting, the master device accesses each slave device based on each set identification ID. Thus, even if the slave device before being configured as a stacked device does not have an identification ID, the identification ID can be set after manufacturing the slave device. In other words, it is not necessary to attach a unique identification ID to each slave device during manufacturing. Therefore, when a large number of chip-type slave devices are manufactured on the wafer, the trouble of managing each slave device by the identification ID can be eliminated. For example, there is no need to perform complicated operations such as selecting a slave device according to the identification ID from a large number of slave devices diced from the wafer. Therefore, management of the slave device after dicing is easy.

  In particular, it is effective when the terminals of the master device and each slave device have the same terminal arrangement as shown in FIGS. 1A and 1B of the first embodiment, and the corresponding terminals are connected to each other through a through wiring. It is. That is, the master device can access each slave device by the set identification ID even when the terminals having the same terminal configuration of each slave device are connected via the through wiring. For example, the master device first selects a slave device to be controlled based on the identification ID, and puts the corresponding slave device in a selected state. Thereafter, a command is transmitted to the corresponding slave device to perform various controls. Further, since corresponding terminals having the same terminal configuration are connected by a through wiring, the through wiring can be formed perpendicular to the slave device. Therefore, for example, a complicated manufacturing process such as forming the through wiring with an inclination in the slave device is not necessary, and the laminated device can be easily manufactured.

  Further, since each slave device sets an identification ID according to a random number from the slave device after stacking, it is not necessary to consider a stacking method such as stacking order when stacking slave devices. Therefore, for example, each slave device can be arbitrarily stacked, and a stacked device can be easily manufactured.

  In addition, the terminals of the slave device to which the identification command is input are connected to each other through a through wiring. That is, a dedicated terminal for each slave device for receiving a command is not necessary. Furthermore, since the identification command changes with the passage of each slave device, it is not necessary to input a unique identification command to each slave device.

(Other)
In this embodiment, the identification ID storage unit 504 may be a non-volatile memory, and may hold the identification ID even in a non-energized state.

  Further, in this embodiment, the identification ID of the slave device is determined by a random number, but a serial identification ID unique to each slave device may be stored before assembly.

  In the present embodiment, the random number generation means may generate a random number using the serial identification ID as a seed.

  In the present embodiment, the slave device may hold the specification information of the device therein, and the master device may be able to refer to the specification information.

<Example of Fourth Embodiment>
(Constitution)
FIG. 20 is a configuration diagram of a system for identifying a device using a master device according to the fourth embodiment of the present invention. In FIG. 20, determination signal lines 701 and 702 are analog signal lines for connecting the master device and the slave device.

  Further, the terminals of the master device and each slave device have the same terminal arrangement as shown in FIGS. 1A and 1B of the first embodiment, and the corresponding terminals are connected to each other through a through wiring.

(1) Slave Device FIG. 21A is a configuration diagram of the slave device in the fourth embodiment, and FIG. 21B is a configuration diagram of the master device. 21A and 21B, the same components as those in FIGS. 16A and 16B are denoted by the same reference numerals, and description thereof is omitted.

  In FIG. 21A, the slave device includes command processing means 501, random number generation means 502, data processing means 503, identification ID storage means 504, resistor 801 and switch means 803. The determination signal line 702 is connected to a resistor 801 having a constant value via the switch unit 803. The other end of the resistor 801 is connected to the ground 802. Here, the switch unit 803 is a switch whose opening / closing is controlled by the command processing unit 501.

(2) Master Device In FIG. 21B, the master device 401 includes command generation means 551, data processing means 553, response confirmation means 552, connection number storage means 554, and device number detection means 811. The device number detection unit 811 detects the number of slave devices based on the potential of the determination signal line 702.

(3) Device Number Detection Unit FIG. 22 is a configuration diagram of an example of the device number detection unit 811 according to the fourth embodiment. In FIG. 22, the determination signal line 702 is connected to, for example, a power supply VDD having a constant voltage value via a switch unit 904 and a resistor 901 having a constant resistance value. The switch unit 904 is controlled to open and close by a command from the command generation unit 551. Further, the discrimination signal line 702 is connected to the A / D conversion means 903. Here, the A / D conversion means 903 receives the potential of the discrimination signal on the discrimination signal line, converts it to a digital value, and outputs it to the connection number calculation means 902. The connection number calculation means 902 determines the number of slave devices connected to the master device from the potential information of the input determination signal.

  FIG. 23 shows a specific example of the device number detection means. In FIG. 23, the same components as those in FIG.

  In FIG. 23, the resistance 901 of the device number detection means 811 is 1 kΩ and VDD is 5V. The slave devices connected to the master device are the first to third slave devices 411, 412, and 413, and the number of slave devices is “3”. In each slave device, the determination signal line 702 and the ground are connected via a 1 kΩ resistor.

  When the switch unit 904 is closed by a command from the command generation unit 551, the determination signal line 702 and VDD (5 V) are connected via the resistor 901. Since three 1 kΩ resistors are connected in parallel between the discrimination signal line 702 and the ground, the impedance between the discrimination signal line 702 and the ground is about 333Ω. Therefore, the potential of the determination signal line 702 becomes about 1.25 V due to the partial pressure with the resistor 901. The A / D conversion means 903 detects the potential of the discrimination signal line 702, converts it into digital data, and outputs it to the connection number calculation means 902.

  The connection number calculating means 902 has a device number detection table for calculating the number of devices from the discrimination signal potential as shown in FIG. 24, for example. Therefore, the connection number calculating means 902 calculates the number of connected slave devices based on the discrimination signal potential input while referring to the device number detection table. The device number detection table in FIG. 24 is calculated based on, for example, the value of the resistor 901 included in the master device 401 and the value of the resistor connected to the determination signal line 702 in the slave device. Here, the connection number calculation means 902 calculates that the number of slave devices is “3” because the determination signal potential is 1.25V. The connection number storage means 554 stores the calculated number of slave devices.

  As shown in the above third embodiment, the response confirmation unit 552 receives a response from the slave device that has generated a random number equal to the numerical value Ra to be confirmed. At this time, when the numerical value Ra to be confirmed is equal to the random number Rn generated by the slave device, the command generating unit 551 generates a command such that only the slave device that generated the random number closes the switch unit 803. The command generation means 551 transmits the command to the corresponding slave device. Thereby, the device number detection means 811 can obtain the number of slave devices that have generated a random number Rn equal to the numerical value Ra. Here, when the number of slave devices acquired by the device number detection unit 811 is one, the command generation unit 551 identifies the generated random number for the slave device that has generated the random number Rn equal to the numerical value Ra. An identification ID setting command to be output to the ID storage unit 504 is generated. As a result, the slave device that has received the identification ID setting command sets the identification ID in its own device based on the generated random number.

  Similarly, the number-of-devices detection means 811 confirms the number of slave devices that have generated a random number equal to the numerical value for all the numerical values in the generated random number range. When the number of slave devices that have generated a random number equal to the numerical value is one, the command generation unit 551 generates an identification ID setting command. As a result, the slave device that has received the identification ID setting command sets the identification ID in its own device based on the generated random number.

  Here, the command generation unit 551 can determine a random number range that does not include the determined identification ID value for the slave device for which the identification ID has not been determined, and can transmit the random number range to each slave device. And said process is performed in the determined random number range. That is, the device number detection unit 811 confirms the number of slave devices that have generated a random number Rn equal to the numerical value Ra to be confirmed in the generated random number range. For a slave device that has one slave device that has generated a random number Rn equal to the numerical value Ra to be confirmed, the slave device outputs the generated random number to the identification ID storage unit 504 and stores the identification ID.

  As described above, when there is one slave device that has generated a random number equal to the numerical value to be confirmed, the identification ID is determined. Only when there are a plurality of slave devices, a random number is generated again. Repeat until confirmed.

(Function and effect)
As described above, the master device includes the device number detection unit 811 that detects the number of slave devices based on the potential of the determination signal line 702. At this time, the potential of the determination signal line changes according to the number of slave devices connected to the determination signal line 702. Therefore, the number of slave devices connected to the master device can be detected by determining the potential.

  At the time of response confirmation, the number of slave devices that have generated a random number Rn equal to the numerical value Ra to be confirmed is confirmed. Then, the identification ID is determined for one slave device that has generated a random number Rn equal to the numerical value Ra to be confirmed. Thereby, the probability that the random number for identification ID determination will overlap can be reduced.

  In addition, the same effects as those of the third embodiment can be obtained.

(Other)
In the above description, the connection number calculation means 902 has a device number detection table. However, information on the value of the resistor 901 of the master device 401 connected to the determination signal line 702 (referred to as Rh), the resistance value of the slave device (referred to as Rd), and the potential to which the resistor 901 is connected (referred to as Vh). Based on, for example, the number of slave devices (Dn) may be calculated based on the determination signal potential (Vr) from the following equation.

Dn≈Rd (Vh−Vr) ÷ (Rh × Vr) (1)
<Fifth Embodiment>
(Constitution)
FIG. 25 is a block diagram of a system for identifying an apparatus using the device identification method according to the fifth embodiment of the present invention. In FIG. 25, the same components as those of FIG.

  In FIG. 25, analog chip select signal wirings (hereinafter referred to as CSA signal wirings) 1201 and 1202 are analog signal lines that connect between the master device 401 and the slave devices. The resistor 1203 is a resistor for connecting the slave devices, and is a resistor having a certain value inserted in series with the CSA signal wiring.

  Further, the terminals of the master device and each slave device have the same terminal arrangement as those shown in FIGS. 1A and 1B of the first embodiment, and the corresponding terminals are connected to each other through a through wiring. An example of realizing the resistor 1203 in such a three-dimensionally mounted semiconductor device is shown below.

(1) Resistance FIGS. 26 (a) and 26 (b) are for explaining a slave device according to the embodiment of the present invention. FIG. 26 (a) is a plan view of the chip, and FIG. FIG. 27 is a cross-sectional view taken along line XX ′ in FIG.

  26A and 26B, through holes 1512 are formed along four sides of a semiconductor substrate (for example, a semiconductor memory chip) 1511. An insulating film 1513 such as silicon oxide is formed on the surface of the semiconductor substrate 1511 in these through holes 1512. In addition, an electrode 1514 made of a conductive material is provided in the through hole 1512 while being insulated from the semiconductor substrate 1511 by interposing the insulating film 1513. A bonding material layer 1518 is formed on the main surface side of the substrate 1511 in the electrode 1514.

  In addition to the above-described Cu and W, an alloy containing these, Al, Mo, polysilicon, Au, an alloy containing these, or the like can be used as the material of the electrode 1514. As the bonding material layer 1518, Au, Pb / Sn, Sn, Au / Sn, Sn / In, Sn / Bi, or the like can be used.

  Next, a method for manufacturing the semiconductor device described above will be described. 27A and 27C are enlarged views of the electrode 1514 and the vicinity thereof in the semiconductor device shown in the order of the manufacturing process.

  First, as shown in FIG. 27A, a resist 1620 is formed on the main surface of the semiconductor substrate 1511 and patterned by a photolithography method.

  As shown in FIG. 27B, the opening 1621 is formed by a chemical etching method. It can also be formed by a laser processing method or a high-density plasma etching method.

  As shown in FIG. 27C, an insulating film 1513 such as silicon oxide is formed on the inner wall of the opening 1621 by thermal oxidation or CVD.

  Next, as shown in FIG. 27 (d), a conductive paste is embedded in the openings 1621 with electrodes 1514 formed by a screen printing method. At this time, it is preferable to print twice or more in order to sufficiently embed the conductive paste in the opening 1621. Further, in order to reduce void biting in the conductive paste when printing twice or more, it is preferable to carry out in a decompressed chamber or the like. In addition, a conductive paste is preferable as a material for the electrode 1514.

As a via (that is, the through hole 1512 in FIG. 26) made in the CS terminal of a device to be stacked (for example, a memory), when the length is 100 μm, the hole diameter is 10 μm, and the resistance value is 10Ω, its conductivity The resistivity of the paste is about 1.0 × 10 ⁻⁵ Ω · m. In the case of a general metal material, since it is about 2.0 × 10 ^{−8 to} 1.0 × 10 ⁻⁶ Ω · m, it is difficult to generate a desired potential difference. The conductive paste is made of a conductive filler and a resin. As a conductive filler material, Au, Ag, Cu, Ni, Pd, Al powder or alloy particles made of them are used as a conductive material, and a thermosetting resin is kneaded therewith. Can be used as an example. In particular, Cu is effective because of its good conductivity, low migration and low price. Moreover, it is preferable to use an Ag-coated Cu powder obtained by applying an Ag coating to Cu particles because an increase in resistance due to oxidation of Cu can be suppressed. In the case of Ag-coated Cu powder, the blending amount of the conductive filler is preferably 60 to 80 wt%, particularly preferably 65 to 75 wt%. If the conductive filler exceeds 80 wt%, the resistivity of the conductive paste will drop below about 1.0 × 10 ⁻⁶ Ω · m. Moreover, it is because it will become larger than about 1.0 * 10 <^-4> ohm * m when less than 60 wt%. As the thermosetting resin, a liquid epoxy resin is stable in terms of heat resistance. When a thermosetting resin is used, a desired resistance value can be obtained by filling the opening 21 with a conductive paste and curing it at a temperature of 200 ° C. for about 30 minutes.

Next, as shown in FIG. 27E, the resist 1620 on the substrate 1511 is removed. Les

By removing the dies 1620, it is possible to remove all foreign matters and the like attached to the surface of the resist 1620 during a process using a screen printing method or the like.

  Subsequently, as shown in FIG. 27F, a bonding material layer 1518 is formed on the electrode 1514 on the main surface side of the substrate 1511.

  Thereby, a predetermined resistance can be imparted to the through hole 1512 shown in FIG.

(2) Slave Device FIG. 28A is a configuration diagram of the slave device according to the fifth embodiment, and FIG. 28B is a configuration diagram of the master device. 28A and 28B, the same components as those in FIGS. 25, 16A, and 16B are denoted by the same reference numerals, and description thereof is omitted.

  In FIG. 28A, the slave device includes a CS detection unit 1301, a resistor 801, and a data processing unit 503. The CS detection unit 1301 detects the potential of the CSA signal wiring 1202. When the potential of the CSA signal wiring 1202 is a predetermined potential, the CS detection unit 1301 permits the data processing unit 503 to transmit and receive data via the data signal line 121.

(2) Master Device In FIG. 28B, the master device 401 includes data processing means 553, CS determination means 1311, connection number storage means 554, and device number detection means 811. The CS determination unit 1311 applies different potentials to the CSA signal wiring 1202 depending on a desired slave device to be accessed.

(3) CS Determination Unit FIG. 29 shows a specific example of chip selection by the CS determination unit 1311 of the fifth embodiment. 29, the same components as those in FIGS. 28A, 28B, and 25 are denoted by the same reference numerals, and description thereof is omitted.

  In FIG. 29, the resistor 801 connected to the CSA signal line in the slave devices 411, 412, and 413 is 10Ω. The resistance 1203 between the slave devices is 10Ω. Here, it is assumed that the number of slave devices connected to the master device 401 is three. The CS detection unit 1301 permits the data processing unit 553 to transmit / receive data to / from the master device 401 via the data signal line 421 when the potential of the CSA signal line 1202 is 0.5V ± 0.1V.

  When accessing the first slave device 411, the CS determination unit 1311 of the master device applies 0.5 V to the CSA signal line 1202. As a result, the potential at the point 1411 detected by the CS detection unit of the first slave device 411 becomes 0.5V ± 0.1V. At this time, the CS detection means of the second slave device 412 detects 0.2 V as the potential at the point 1412. Note that the potential at the point 1412 is divided by resistors 801 and 1203. Further, the CS detection means of the third slave device 413 detects 0.1 V as the potential at the point 1413. Similarly, the potential at the point 1413 is divided by the resistor 801 and the two resistors 1203. Therefore, the CS detection unit 1301 does not permit data transmission / reception by the second and third slave devices.

  Next, when accessing the second slave device 412, the potential at the point 1412 needs to be 0.5V ± 0.1V. Therefore, the CS determination unit 1311 of the master device applies 1.25 V to the CSA signal line 1202. At this time, the potential at the point 1411 on the CSA signal line is 1.25 V, the potential at the point 1412 is 0.5 V, and the potential at the point 1413 is 0.25 V. Therefore, the CS detection unit 1301 permits only the second slave device 412 to transmit / receive data to / from the master device 401.

  Similarly, when accessing the third slave device 1403, the CS determination unit 1311 applies 5 V to the CSA signal line 1202.

(Function and effect)
According to this configuration, the master device applies a potential according to the slave device to be accessed. As a result, the CS detection means of the slave device can detect the potential divided by the resistance inserted between the slave devices and determine whether to transmit / receive data to / from the master device.

  In addition, the same effects as those of the third embodiment can be obtained.

<Sixth embodiment>
(Constitution)
FIG. 30 is a configuration diagram of a system for identifying an apparatus using the device identification method according to the sixth embodiment of the present invention. In FIG. 30, the same components as those in FIG.

  In FIG. 30, an inductor 1701 is an inductor having a certain value that connects slave devices and is inserted in series with the CSA signal wiring.

  Further, the terminals of the master device and each slave device have the same terminal arrangement as those shown in FIGS. 1A and 1B of the first embodiment, and the corresponding terminals are connected to each other through a through wiring.

(1) Slave Device FIG. 31A is a configuration diagram of the slave device according to the sixth embodiment, and FIG. 31B is a configuration diagram of the master device. 31A and 31B, the same components as those in FIGS. 16A and 16B are denoted by the same reference numerals, and description thereof is omitted.

  In FIG. 31A, the slave device includes CS detection means 1801, frequency storage means 1803, capacitance 1802, and data processing means 503. The CS detection unit 1801 is connected to the CSA signal wiring 1202 and the electrostatic capacitance 1802. Further, the electrostatic capacitance 1802 is connected between the ground and the CSA signal wiring 1202. Here, the inductor 1701 and the capacitance 1802 form a low-pass filter. The CS detection unit 1801 detects a signal frequency having a certain level of power that has passed through the low-pass filter for the signal flowing through the CSA signal wiring 1202. When the frequency detected by the CS detection unit 1801 is equal to or lower than the frequency stored in the frequency storage unit 1803, the data processing unit 503 permits transmission / reception of data via the data signal line 121.

  Further, when no frequency is recorded in the frequency storage unit 1803, the CS detection unit 1801 stores the signal frequency having a predetermined or higher detected power in the frequency storage unit 1803.

(2) Master Device The master device 401 includes data processing means 553, CS determination means 1811, connection number storage means 554, and device number detection means 811. In FIG. 31B, the CS determination unit 1811 applies signals having different constant frequencies to the CSA signal wiring 1201 according to a desired slave device to be accessed.

(Processing and effects)
The CS determination means of the master device applies a frequency corresponding to the slave device to be accessed to the analog chip select signal line connected to the slave device. As described above, the low-pass filter structure is formed by the inductor inserted between the slave devices and the capacitance connected to the analog chip select signal of the slave device. Therefore, the CS detection unit can detect a signal having a certain frequency with a certain level of power and determine whether to transmit / receive data to / from the master device.

  Note that the storage of the frequency in the frequency storage unit 1803 may be executed by a command transmitted through a command line, for example.

  In addition, the same effects as those of the third embodiment can be obtained.

<Other embodiment examples>
A computer program that causes a computer to execute the above-described method and a computer-readable recording medium that records the program are included in the scope of the present invention. Here, examples of the computer-readable recording medium include a flexible disk, hard disk, CD-ROM, MO, DVD, DVD-ROM, DVD-RAM, BD (Blue-ray Disc), and semiconductor memory. .

  The computer program is not limited to the one recorded on the recording medium, and may be transmitted via an electric communication line, a wireless or wired communication line, a network represented by the Internet, or the like.

  The device identification method and apparatus according to the present invention can also be applied to applications such as mobile devices that require high-density mounting by three-dimensional mounting and memory modules that need to connect a plurality of semiconductor devices.

1 is a schematic view of a laminating apparatus according to a first embodiment of the present invention. Schematic which shows the terminal structure of the slave apparatus of FIG. 1A, and a master apparatus. The conceptual diagram which shows the bus wiring structure of the lamination | stacking apparatus which concerns on the example of 1st Embodiment of this invention. The block diagram of the cross section of the lamination | stacking apparatus which concerns on the example of 1st Embodiment. The functional block diagram of a master apparatus and a slave apparatus. An example of the identification command which the command receiving part of the 1st-3rd slave apparatus shown in FIG. 3 receives. An example of a mobile phone. The block diagram of the cross section of the lamination apparatus which concerns on another example of 1st Embodiment. The block diagram of the cross section of the lamination apparatus which concerns on the example of 2nd Embodiment. The timing chart which shows the outline of the setting method of identification ID in the lamination | stacking apparatus shown in FIG. The functional block diagram of a master apparatus and a slave apparatus. Schematic which shows the outline of the setting method of identification ID in the lamination apparatus shown in FIG. The block diagram of the cross section of the lamination apparatus which concerns on another 2nd Embodiment. The block diagram of the cross section of the lamination apparatus which concerns on another 2nd Embodiment. Schematic which shows the outline of the setting method of identification ID in the lamination apparatus shown in FIG. The block diagram of the system using the device identification method based on 3rd Embodiment of this invention. The block diagram of a slave apparatus. The block diagram of a master apparatus. The flowchart which shows the outline | summary of the whole process at the time of a master apparatus identifying each slave apparatus. The flowchart which showed the content of the random number confirmation process. The flowchart which shows the outline | summary of a process when a slave apparatus receives the command from a master apparatus. Configuration diagram of a system using a device connection number calculating apparatus in the fourth embodiment The block diagram of the slave apparatus in the example of 4th Embodiment. The block diagram of the master apparatus in the example of 4th Embodiment. The block diagram of the apparatus number detection means which concerns on the example of 4th Embodiment. A specific example of a device number detection means. A device number detection table for calculating the number of devices from the discrimination signal potential. The block diagram of the system using the device identification method in Embodiment 3 of this invention. (A) The figure which shows the slave apparatus in 5th Example of this invention. (B) Sectional drawing of the slave apparatus in 5th Embodiment of this invention. (A) The figure which shows the 1st manufacturing process of the slave apparatus in the 5th Example of this invention. (B) The figure which shows the 2nd manufacturing process of the slave apparatus in 5th Example of this invention. (C) The figure which shows the 3rd manufacturing process of the slave apparatus in 5th Example of this invention. (D) The figure which shows the 4th manufacturing process of the slave apparatus in 5th Example of this invention. (E) The figure which shows the 5th manufacturing process of the slave apparatus in 5th Example of this invention. (F) The figure which shows the 6th manufacturing process of the slave apparatus in 5th Example of this invention. The block diagram of the master apparatus in the example of 5th Embodiment of this invention. The block diagram of the slave apparatus in the example of 5th Embodiment of this invention. The figure explaining the specific example of the device identification method in Embodiment 3 of this invention. The block diagram of the system using the device identification method in Embodiment 4 of this invention. The block diagram of the master apparatus in Embodiment 4 of this invention. The block diagram of the slave apparatus in Embodiment 4 of this invention. 1 is a configuration diagram of a three-dimensional stacked semiconductor device disclosed in Patent Document 1.

Explanation of symbols

100, 200, 300, 401: Master devices 110 to 130, 210 to 240, 310 to 330: Slave devices 181, 294: Command receiving units 182, 282: Identification ID setting units 183, 283: Identification ID storage units 184, 284 : Selection signal reception unit 185, 285: control signal reception unit 186, 286: processing unit 187, 287: identification command transmission unit 189, 289: identification ID reception unit 190, 290: association storage means 191, 291: selection signal transmission Units 192 and 292: Control signal transmission units 151, 153, 155, 273, 271, 275, 277, 279, 281: Through wirings 101, 103, 105, 111, 113, 115, 121, 123, 125, 131, 133 , 135, 211, 213, 215, 221, 223, 225, 231, 23 235, 311, 313, 315, 317, 321, 323, 325, 327, 331, 333, 335, 337: CS terminals 107, 117, 127, 137, 207, 217, 227, 237, 309, 319, 329 339: Control terminal 501: Command processing unit 502: Random number generation unit 503: Data processing unit 504: Identification ID storage unit 551: Command generation unit 552: Response confirmation unit 553: Data processing unit 554: Connection number storage unit 811: Device Number detection means 902: Connection number calculation means 903: A / D conversion means 1301, 1801: CS detection means 1311, 1811: CS determination means 1803: Frequency storage means

Claims (7)

A stacked device in which a plurality of slave devices and master devices having the same terminal arrangement are stacked,
The master device is
Command transmission means for inputting an identification command to a terminal of an adjacent slave device;
An identification ID receiving means for receiving the identification ID of each slave device set according to the identification command from each slave device;
Corresponding storage means for storing the correspondence between each slave device and each identification ID,
The slave device is
A through-wiring that connects at least one terminal of an adjacent slave device and its own device; and
Command receiving means for receiving the identification command;
Identification ID setting means for setting the identification ID of the own device based on the identification command,
The position of the terminal for connecting the adjacent slave devices is different for each slave device, and the command receiving means of each slave device passes through the through-wire having a different connection position for each slave device. A stacking apparatus that receives an identification command changed to a different value for each apparatus. Each slave device
The terminal to which the identification command is input is clamped at a predetermined potential (hereinafter referred to as a first potential) before the identification command is input.
2. The identification command received by the command receiving means is generated by changing the potential of the terminal from the first potential by inputting the identification command through the through wiring. The laminating apparatus described. A stacked device in which a plurality of slave devices and master devices having the same terminal arrangement are stacked,
The master device is
First command transmission means for inputting an identification command to a terminal of an adjacent slave device;
An identification ID receiving means for receiving the identification ID of each slave device set according to the identification command from each slave device;
Corresponding storage means for storing the correspondence between each slave device and each identification ID,
The slave device is
A through-wiring that connects at least one terminal of an adjacent slave device and its own device; and
Command receiving means for receiving an identification command from the master device or an adjacent slave device;
Identification ID setting means for setting the identification ID of the own device by receiving the identification command;
Command changing means for changing the received identification command to an identification command unique to each slave device;
And a second command transmission means for inputting the changed identification command to an adjacent slave device via the through wiring.   When the identification ID setting means sets the identification ID, the information processing apparatus further includes a completion notification transmission means for transmitting a completion notification indicating that the setting of the identification ID is completed to the master device via the through wiring. The stacking apparatus according to claim 3. A master device of a stacked device in which a plurality of slave devices and master devices having the same terminal arrangement are stacked,
Command transmission means for inputting an identification command to a terminal of an adjacent slave device;
An identification ID receiving means for receiving the identification ID of each slave device set according to the identification command from each slave device;
Association storage means for storing association between each slave device and each identification ID;
A master device comprising: A slave device of a stacked device in which a plurality of slave devices and master devices having the same terminal arrangement are stacked,
A through-wiring that connects at least one terminal of an adjacent slave device and its own device; and
Command receiving means for receiving an identification command from the master device;
Identification ID setting means for setting the identification ID of the own device based on the identification command,
The position of the terminal for connecting the adjacent slave devices is different for each slave device, and the command receiving means of each slave device passes through the through-wire having a different connection position for each slave device. A slave device that receives an identification command changed to a different value for each device. A slave device of a stacked device in which a plurality of slave devices and master devices having the same terminal arrangement are stacked,
A through-wiring that connects at least one terminal of an adjacent slave device and its own device; and
Command receiving means for receiving an identification command from the master device or an adjacent slave device;
Command changing means for changing the received identification command to an identification command unique to each slave device;
A second command transmitting means for inputting the changed identification command to the adjacent slave device via the through wiring;
Identification ID setting means for setting the identification ID of the own device by receiving the identification command;
A slave device comprising:

Images