JP2006039106A - Method for manufacturing panel for image display - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a panel for image display, with which a residual film between partition walls is simply removed and deterioration in display characteristics is prevented. <P>SOLUTION: In the method for manufacturing the panel for image display, with which cells separated from one another with the partition walls are formed between two substrates placed opposite to each other, of which at least one is transparent, an image display medium is sealed in the cells, and an electric field is applied to the image display medium so as to transfer the image display medium and display an image, the partition walls 15 are formed on the substrate 14, and the residual film 13a remaining on the substrate 14 and between the partition walls 15 is removed by subjecting the substrate 14 with the partition walls formed thereon to dry etching. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  In the present invention, a cell separated from each other by a partition is formed between two opposing substrates, at least one of which is transparent, an image display medium is enclosed in the cell, an electric field is applied to the image display medium, and image display The present invention relates to a method for manufacturing an image display panel that displays an image by moving a medium.

  2. Description of the Related Art Conventionally, image display devices using techniques such as an electrophoresis method, an electrochromic method, a thermal method, and a two-color particle rotation method have been proposed as image display devices that can replace liquid crystal (LCD).

  Compared to LCDs, these conventional technologies have advantages such as a wide viewing angle close to that of ordinary printed materials, low power consumption, and a memory function. It is considered as a technology that can be used for mobile phones, and is expected to expand to image display for mobile terminals, electronic paper, and the like. Particularly recently, an electrophoretic method in which a dispersion liquid composed of dispersed particles and a colored solution is encapsulated and disposed between opposing substrates has been proposed and is expected.

  However, the electrophoresis method has a problem that the response speed becomes slow due to the viscous resistance of the liquid because the particles migrate in the liquid. Furthermore, since particles with high specific gravity such as titanium oxide are dispersed in a solution with low specific gravity, it is easy to settle, and it is difficult to maintain the stability of the dispersed state, and there is a problem of lack of image repetition stability. . Even when microencapsulation is performed, the cell size is set to the microcapsule level, and the above-described drawbacks are hardly made to appear, and the essential problems are not solved at all.

  On the other hand, a method in which conductive particles and a charge transport layer are incorporated into a part of a substrate without using a solution is proposed instead of an electrophoresis method using behavior in a solution (see, for example, Non-Patent Document 1). ). However, the structure is complicated because the charge transport layer and further the charge generation layer are arranged, and it is difficult to inject the charges into the conductive particles.

As one method for solving the various problems described above, a cell isolated from each other by a partition is formed between two opposing substrates, at least one of which is transparent, and an image display medium is sealed in the cell. 2. Description of the Related Art An image display panel that displays an image by applying an electric field to an image display medium and moving the image display medium is known.
趙 Kuniori and three others, “New Toner Display Device (I)”, July 21, 1999, Annual Meeting of the Imaging Society of Japan (83 times in total) “Japan Hardcopy'99” Proceedings, p.249-252

  In manufacturing the above-described conventional image display panel, at present, partition walls are formed on a substrate by a photoresist method. However, this method has a problem that it takes man-hours because of the steps of lamination (film formation), exposure, and development, and a large amount of development waste liquid is generated. In contrast, the mold transfer method requires a simple process of pressing the mold against the thermosetting / photocuring resin film to form the partition walls. For this reason, the partition wall has been formed by a mold transfer method.

  However, in the mold transfer method, a partition wall material is disposed on a substrate or an electrode provided on the substrate, the mold is pressed against the partition wall material, and the shape of the mold is transferred to form the partition wall. Later, there was a problem that a remaining film remained on the substrate or between the partition walls on the electrodes provided on the substrate. When an image display panel is manufactured in a state where the remaining film remains, there is a problem that the remaining film is charged with the movement of the image display medium while the image display is repeated, and the display is adversely affected. Further, in order to prevent such a phenomenon from occurring, it is necessary to devise the partition wall material, which causes other problems such as a decrease in reliability and a limitation of the partition wall material.

  An object of the present invention is to solve the above-mentioned problems, and to provide a method for manufacturing an image display panel that can easily remove a remaining film between partition walls and prevent deterioration of display characteristics. It is.

  According to the method for manufacturing an image display panel of the present invention, cells separated from each other by a partition wall are formed between two opposing substrates, at least one of which is transparent, and an image display medium is sealed in the cell. In a method for manufacturing an image display panel in which an electric field is applied to a medium and an image display medium is moved to display an image, a partition is formed on the substrate, and a remaining film on the substrate remaining between the partition is The formed substrate is removed by dry etching.

  As a preferred example of the method for manufacturing an image display panel of the present invention, the method for forming the partition wall on the substrate is a mold transfer method, and the dry etching method is plasma etching or RIE (reactive ion etching). In other words, the RIE is oxygen RIE, and the image display medium is a particle group or a powder fluid.

According to the method for manufacturing an image display panel of the present invention, the remaining film of the partition wall material remaining on the substrate between the partition walls by performing dry etching on the partition-formed substrate (or substrate with electrodes). Can be easily removed. This is particularly effective when oxygen RIE is used as a dry etching method. That is, since oxygen RIE removes only organic matter by etching, an inorganic substrate such as glass or an ITO electrode or a SiO ₂ film and an ITO electrode provided on a substrate (including a resin substrate containing an organic matter in this case) It is possible to remove only the remaining film of the partition wall material made of an organic material without being removed by etching.

  First, a basic configuration of an image display panel that is an object of the present invention will be described. In the image display panel used in the present invention, an electric field is applied to a chargeable image display medium (particle group or powder fluid) sealed between two opposing substrates. The image display medium charged in the applied electric field direction is attracted by the electric field force, the Coulomb force, or the like, and the image display medium is reciprocated by a change in the electric field direction due to the potential switching, thereby displaying an image. Therefore, it is necessary to design the image display panel so that the image display medium moves uniformly and can maintain stability during repetition or storage. Here, the force applied to the particles or powder fluid used as the image display medium is not only the force attracted by the Coulomb force between the particles or powder fluid, but also the image power, intermolecular force, liquid crosslinking force with the electrode or substrate. , Gravity and so on.

An example of the image display panel of the present invention will be described with reference to FIGS.
In the example shown in FIG. 1, two or more kinds of image display media 3 having different colors (here, white particles 3W and black particles 3B are shown) are applied to the substrate 1, 2, the black particles 3 </ b> B are visually recognized by the observer and black display is performed, or the white particles 3 </ b> W are visually recognized by the observer and white display is performed. A partition cell 4 is provided between the substrates 1 and 2 in a lattice shape, for example, to define a display cell.
In the example shown in FIG. 2, an image display medium 3 having two or more different colors (here, white particles 3 </ b> W and black particles 3 </ b> B) are provided between an electrode 5 provided on the substrate 1 and an electrode 6 provided on the substrate 2. Depending on the electric field generated by applying a voltage between them, the substrate is moved perpendicularly to the substrates 1 and 2 and the black particles 3B are visually recognized by the observer to display black, or the white particles 3W are observed by the observer. The white display is made visible. A partition cell 4 is provided between the substrates 1 and 2 in a lattice shape, for example, to define a display cell.
In the example shown in FIG. 3, according to the electric field generated by applying a voltage between the electrode 5 and the electrode 6 provided on the substrate 1, one kind of color particle 3 (here, white particle 3W). The white particles 3W are moved in the direction parallel to the substrates 1 and 2 and the white particles 3W are visually recognized by the observer, or the color of the electrode 6 or the substrate 1 is visually recognized by the observer. The color is displayed. A partition cell 4 is provided between the substrates 1 and 2 in a lattice shape, for example, to define a display cell.
The above description can be similarly applied to the case where the white particles 3W are replaced with the white powder fluid and the black particles 3B are replaced with the black powder fluid.

  The manufacturing method of the image display panel according to the present invention is characterized in that when the image display panel having the above-described configuration is manufactured, the partition walls are formed on the substrate, and the partition walls are formed on the substrate and remain between the partition walls. The remaining film is removed by performing dry etching on the substrate on which the partition wall is formed. Hereinafter, a method for forming a partition wall, which is a feature of the present invention, will be described.

4 (a) to 4 (d) are views showing a partition wall forming step in order of steps in the method for manufacturing an image display panel of the present invention. A method for manufacturing an image display panel according to the present invention will be described with reference to FIGS. First, as shown in FIG. 4A, a mold 12 having a partition-shaped cavity 11 inside and a substrate 14 having a partition material 13 disposed on the surface thereof are prepared. As the material of the mold 12, Ni, silica, silicon, or the like can be used. As the partition wall material 13, a thermosetting resin, a photocurable resin, or the like can be used. As the substrate 14, in addition to a single substrate made of an inorganic material such as glass, an electrode in which an ITO electrode is provided on an inorganic material such as glass or an organic material such as a resin with an insulating layer made of SiO _{2 as} required. An attached substrate can be used.

  Next, as shown in FIG. 4B, when a thermosetting resin is used as the partition wall material 13, it is heated, and when a photocurable resin is used as the partition wall material 13, light is irradiated. In this state, the mold 12 is pressurized and pushed into the partition wall material 13 to fill the cavity 11 with the partition wall material 13. Thereafter, as illustrated in FIG. 4C, the partition wall 15 can be formed on the substrate 14 by releasing the mold 12 from the partition wall material 13. At this time, the remaining film 13 a of the partition wall material 13 remains on the substrate 14 between the partition walls 15. Finally, as shown in FIG. 4D, the substrate 14 having the partition wall 15 with the remaining film 13a remaining is dry-etched from the side where the partition wall 15 is provided, so that the remaining film 13a between the partition walls 15 is obtained. Remove.

  In this example, the dry etching method is not particularly limited, but plasma etching or RIE (reactive ion etching) can be used, and oxygen RIE can be used as RIE. As an example, in oxygen RIE, a substrate 14 having partition walls 15 formed between electrodes is set in an oxygen atmosphere, a voltage is applied to the electrodes to generate plasma, and the generated plasma is applied perpendicularly to the substrate 14. Thus, etching can be performed. Since this oxygen RIE etches only organic substances, the substrate 14 having the above-described configuration of the present invention is not etched. Further, since the partition wall 15 is also made of the partition material 13 containing an organic substance and is etched by oxygen RIE, the shape of the partition wall 15 is almost perpendicular to the substrate 14 and is not easily affected by the flow of plasma. By determining the shape of the partition wall 15 in consideration of the etching allowance in advance, the partition wall 15 having a desired shape can be obtained.

  In the above-described example, the mold transfer method is used to form the partition wall 15 on the substrate 14, but the present invention is not limited to this. The present invention can also be applied to the removal of residual film formed by other partition wall formation methods and the resist removal of a substrate manufactured by a photolithography method.

  Hereinafter, each member which comprises the image display panel used as the object of this invention is demonstrated.

  As for the substrate, at least one substrate is the transparent substrate 1 from which the color of the image display medium can be confirmed from the outside of the panel, and a material having high visible light transmittance and good heat resistance is preferable. The substrate 2 may be transparent or opaque. Examples of substrate materials include polymer sheets such as polyethylene terephthalate, polyethersulfone, polyethylene, polycarbonate, polyimide, and acrylic, flexible materials such as metal sheets, and flexible materials such as glass and quartz. There are no inorganic sheets. The thickness of the substrate is preferably 2 to 5000 μm, more preferably 5 to 2000 μm. If it is too thin, it will be difficult to maintain the strength and the uniformity of the distance between the substrates, and if it is thicker than 5000 μm, it will be a thin image display panel. Is inconvenient. As described above, when oxygen RIE etching is used in the present invention, it should be noted that the exposed portion of the substrate made of a polymer material is etched.

  Electrode forming materials for electrodes provided as necessary include metals such as aluminum, silver, nickel, copper, and gold, conductive metal oxides such as ITO, indium oxide, conductive tin oxide, and conductive zinc oxide, polyaniline , Conductive polymers such as polypyrrole and polythiophene are exemplified, and are appropriately selected and used. Since the polymer material is etched by oxygen RIE, care must be taken when using it as an electrode material. As a method for forming an electrode, a method of forming the above-described materials into a thin film by sputtering, vacuum deposition, CVD (chemical vapor deposition), coating, or the like, or mixing a conductive agent with a solvent or a synthetic resin binder. The method of apply | coating is used. The electrode provided on the viewing side substrate needs to be transparent, but the electrode provided on the back side substrate does not need to be transparent. In any case, the above-mentioned material that is conductive and capable of pattern formation can be suitably used. Note that the electrode thickness is not particularly limited as long as the conductivity can be secured and the light transmittance is not hindered, and is preferably 3 to 1000 nm, preferably 5 to 400 nm. The material and thickness of the electrode provided on the back side substrate are the same as those of the electrode provided on the viewing side substrate described above, but need not be transparent. In this case, the external voltage input may be superimposed with direct current or alternating current.

  The shape of the partition wall 4 is appropriately set depending on the type of image display medium involved in display, and is not limited in general. However, the partition wall width is 2 to 100 μm, preferably 3 to 50 μm, and the partition wall height is 10 μm. It is adjusted to ˜500 μm, preferably 10 to 200 μm. In forming the partition walls, a both-rib method in which ribs are formed on each of the opposing substrates and then bonded, and a one-rib method in which ribs are formed only on one substrate are conceivable. In the present invention, any method is preferably used.

  As shown in FIG. 5, the display cells formed by the partition walls made up of these ribs are exemplified by a square shape, a triangular shape, a line shape, a circular shape, and a hexagonal shape as viewed from the substrate plane direction. The shape and the mesh shape are exemplified. It is better to make the portion corresponding to the cross section of the partition wall visible from the display side (the area of the frame portion of the display cell) as small as possible, and the sharpness of the image display increases. Here, examples of the partition forming method other than the mold transfer method to which the present invention is applied include a screen printing method, a sand blast method, a photolithography method, and an additive method. In any method, the present invention can be effectively applied to the removal of the remaining film of the partition wall material remaining on the substrate surface between the formed partition walls.

  Next, the powder fluid as the image display medium of the present invention will be described. As for the name of the powder fluid as the image display medium of the present invention, the present applicant has obtained the right of “Electronic Powder Fluid (registered trademark)”.

  The “powder fluid” in the present invention is a substance in an intermediate state of both fluid and particle characteristics that exhibits fluidity by itself without borrowing the force of gas or liquid. For example, liquid crystal is defined as an intermediate phase between a liquid and a solid, and has fluidity that is a characteristic of liquid and anisotropy (optical properties) that is a characteristic of solid (Heibonsha: Encyclopedia) . On the other hand, the definition of particle is an object with a finite mass even if it is negligible, and is said to be affected by gravity (Maruzen: Physics Encyclopedia). Here, even in the case of particles, there are special states of gas-solid fluidized bed and liquid-solid fluids. When gas is flowed from the bottom plate to the particles, upward force is applied to the particles according to the velocity of the gas. Is a gas-solid fluidized bed that is in a state where it can easily flow when it balances with gravity, and it is also called a liquid-solid fluidized state that is fluidized by a fluid (ordinary) Company: Encyclopedia). As described above, the gas-solid fluidized bed body and the liquid-solid fluid are in a state of using a gas or liquid flow. In the present invention, it has been found that a substance in a state of fluidity can be produced specifically without borrowing the force of such gas and liquid, and this is defined as powder fluid.

  That is, the pulverulent fluid in the present invention is in an intermediate state having both the characteristics of particles and liquid, as in the definition of liquid crystal (liquid and solid intermediate phase), and is the characteristic of the above-mentioned particles. It is a substance that is extremely unaffected and exhibits a unique state with high fluidity. Such a substance can be obtained in an aerosol state, that is, a dispersion system in which a solid or liquid substance is stably suspended as a dispersoid in a gas, and the solid substance is used as a dispersoid in the image display device of the present invention. Is.

The image display panel which is the object of the present invention exhibits high fluidity in an aerosol state in which solid particles are stably suspended as a dispersoid as an image display medium, for example, as an image display medium between opposing substrates, at least one of which is transparent. The powder fluid is sealed, and such powder fluid can be easily and stably moved by Coulomb force or the like by applying a low voltage.
As described above, for example, the powder fluid used in the present invention is a substance in an intermediate state between fluid and particles, which exhibits fluidity by itself without borrowing the force of gas or liquid. This powder fluid can be in an aerosol state in particular, and in the image display device of the present invention, a solid substance is used in a state of relatively stably floating as a dispersoid in the gas.

  Next, the particles as the image display medium of the present invention will be described. The particles can contain a charge control agent, a colorant, an inorganic additive, and the like, if necessary, in the resin as the main component, as in the conventional case. Examples of resins, charge control agents, colorants, and other additives will be given below.

  Examples of the resin include urethane resin, urea resin, acrylic resin, polyester resin, acrylic urethane resin, acrylic urethane silicone resin, acrylic urethane fluororesin, acrylic fluororesin, silicone resin, acrylic silicone resin, epoxy resin, polystyrene resin, styrene Acrylic resin, polyolefin resin, butyral resin, vinylidene chloride resin, melamine resin, phenol resin, fluororesin, polycarbonate resin, polysulfone resin, polyether resin, polyamide resin and the like can be mentioned, and two or more kinds can be mixed. In particular, acrylic urethane resin, acrylic silicone resin, acrylic fluororesin, acrylic urethane silicone resin, acrylic urethane fluororesin, fluororesin, and silicone resin are suitable from the viewpoint of controlling the adhesive force with the substrate.

  The charge control agent is not particularly limited. Examples of the negative charge control agent include salicylic acid metal complexes, metal-containing azo dyes, metal-containing oil-soluble dyes (including metal ions and metal atoms), and quaternary ammonium salt systems. Examples thereof include compounds, calixarene compounds, boron-containing compounds (benzyl acid boron complexes), and nitroimidazole derivatives. Examples of the positive charge control agent include nigrosine dyes, triphenylmethane compounds, quaternary ammonium salt compounds, polyamine resins, imidazole derivatives, and the like. In addition, metal oxides such as ultrafine silica, ultrafine titanium oxide, ultrafine alumina, nitrogen-containing cyclic compounds such as pyridine and derivatives and salts thereof, various organic pigments, resins containing fluorine, chlorine, nitrogen, etc. are also charged. It can also be used as a control agent.

  As the colorant, various organic or inorganic pigments and dyes as exemplified below can be used.

Examples of the black colorant include carbon black, copper oxide, manganese dioxide, aniline black, activated carbon and the like.
Examples of blue colorants include C.I. I. Pigment blue 15: 3, C.I. I. Pigment Blue 15, Bituminous Blue, Cobalt Blue, Alkaline Blue Lake, Victoria Blue Lake, Phthalocyanine Blue, Metal-free Phthalocyanine Blue, Phthalocyanine Blue Partial Chlorides, Fast Sky Blue, Indanthrene Blue BC and the like.
Examples of red colorants include bengara, cadmium red, red lead, mercury sulfide, cadmium, permanent red 4R, risor red, pyrazolone red, watching red, calcium salt, lake red D, brilliant carmine 6B, eosin lake, rhodamine lake B, Alizarin Lake, Brilliant Carmine 3B, C.I. I. Pigment Red 2 etc.

Yellow colorants include chrome yellow, zinc yellow, cadmium yellow, yellow iron oxide, mineral first yellow, nickel titanium yellow, navel yellow, naphthol yellow S, Hansa Yellow G, Hansa Yellow 10G, Benzidine Yellow G, Benzidine Yellow GR, Quinoline Yellow Lake, Permanent Yellow NCG, Tartrazine Lake, C.I. I. Pigment Yellow 12 etc.
Examples of green colorants include chrome green, chromium oxide, pigment green B, C.I. I. Pigment Green 7, Malachite Green Lake, Final Yellow Green G, etc.
Examples of the orange colorant include red chrome yellow, molybdenum orange, permanent orange GTR, pyrazolone orange, Vulcan orange, indanthrene brilliant orange RK, benzidine orange G, indanthrene brilliant orange GK, C.I. I. Pigment Orange 31 etc.
Examples of purple colorants include manganese purple, first violet B, and methyl violet lake.
Examples of white colorants include zinc white, titanium oxide, antimony white, and zinc sulfide.

  Examples of extender pigments include barite powder, barium carbonate, clay, silica, white carbon, talc, and alumina white. Examples of various dyes such as basic, acidic, disperse, and direct dyes include nigrosine, methylene blue, rose bengal, quinoline yellow, and ultramarine blue.

Examples of inorganic additives include titanium oxide, zinc white, zinc sulfide, antimony oxide, calcium carbonate, lead white, talc, silica, calcium silicate, alumina white, cadmium yellow, cadmium red, cadmium orange, titanium yellow, Examples include bitumen, ultramarine blue, cobalt blue, cobalt green, cobalt violet, iron oxide, carbon black, manganese ferrite black, cobalt ferrite black, copper powder, and aluminum powder.
These pigments and inorganic additives can be used alone or in combination. Of these, carbon black is particularly preferable as the black pigment, and titanium oxide is preferable as the white pigment.

  The particles used as the image display medium of the present invention have an average particle diameter d (0.5) in the range of 0.1 to 50 μm, and are preferably uniform. If the average particle diameter d (0.5) is larger than this range, the display is not clear, and if it is smaller than this range, the cohesive force between the particles becomes too large, which hinders the movement of the particles.

Furthermore, in the present invention, regarding the particle size distribution of each particle, the particle size distribution Span represented by the following formula is set to less than 5, preferably less than 3.
Span = (d (0.9) −d (0.1)) / d (0.5)
(However, d (0.5) is a numerical value indicating the particle diameter in μm that 50% of the particles are larger than this, and 50% is smaller than this, and d (0.1) is a particle in which the ratio of the smaller particles is 10%. (Numerical value expressed in μm, and d (0.9) is a numerical value expressed in μm for a particle size of 90% or less.)
By keeping Span within a range of 5 or less, the size of each particle is uniform and uniform particle movement is possible.

  Furthermore, regarding the correlation between the particles, the ratio of d (0.5) of the particles having the minimum diameter to d (0.5) of the particles having the maximum diameter among the used particles is set to 50 or less, preferably 10 or less. It is essential.

The particle size distribution and the particle size can be obtained from a laser diffraction / scattering method or the like. When laser light is irradiated onto particles to be measured, a light intensity distribution pattern of diffracted / scattered light is spatially generated, and this light intensity pattern has a corresponding relationship with the particle diameter, so that the particle diameter and particle diameter distribution can be measured. .
Here, the particle size and particle size distribution in the present invention are obtained from a volume-based distribution. Specifically, using a Mastersizer2000 (Malvern Instruments Ltd.) measuring instrument, particles are introduced into a nitrogen stream, and the attached analysis software (software based on volume-based distribution using Mie theory) The diameter and particle size distribution can be measured.

  The charge amount of the image display medium naturally depends on the measurement conditions, but the charge amount of the image display medium in the image display panel is almost the initial charge amount, the contact with the partition wall, the contact with the substrate, and the charge decay with the elapsed time. In particular, it was found that the saturation value of the charging behavior of the image display medium is the dominant factor.

Furthermore, in the present invention, it is important to manage the gas in the gap surrounding the image display medium between the substrates, which contributes to improved display stability. Specifically, it is important that the relative humidity at 25 ° C. is 60% RH or less, preferably 50% RH or less, more preferably 35% RH or less with respect to the humidity of the gas in the gap.
In FIG. 1 to FIG. 3, this void portion is an area occupied by the electrodes 5 and 6, the image display medium (particle group or powder fluid 3), and an area occupied by the partition wall 4 from the portion sandwiched between the opposing substrates 1 and 2. The part (if present) and the gas part in contact with the so-called image display medium, excluding the device seal part, shall be indicated.
The gas in the gap is not limited as long as it is in the humidity region described above, but dry air, dry nitrogen, dry argon, dry helium, dry carbon dioxide, dry methane, and the like are preferable. This gas needs to be sealed in the apparatus so that the humidity is maintained. For example, the image display medium is filled and the substrate is assembled in a predetermined humidity environment. It is important to apply a sealing material and a sealing method to prevent the above.

The distance between the substrates in the image display panel provided in the image display device of the present invention is not limited as long as the image display medium can be moved and the contrast can be maintained, but is usually adjusted to 10 to 500 μm, preferably 10 to 200 μm. .
The volume occupation ratio of the image display medium in the space between the opposing substrates is preferably 5 to 70%, more preferably 5 to 60%. If it exceeds 70%, the movement of the image display medium is hindered. If it is less than 5%, the contrast tends to be unclear.
As the image display medium used in the present invention, the particle group and powder used in the gas have been described. However, the present invention also applies to an image display panel using an electrophoretic particle group dispersed in liquid crystal or liquid as an image display medium. Applicable.

  Image display panels subject to the manufacturing method of the present invention include display units of mobile devices such as notebook computers, PDAs, mobile phones, and handy terminals, electronic papers such as electronic books and electronic newspapers, signboards, posters, and blackboards. It is suitably used for display boards for bulletin boards, calculators, home appliances, automobile supplies, etc., card display parts such as point cards, IC cards, electronic advertisements, electronic POPs, electronic price tags, electronic musical scores, and display parts for RF-ID devices. .

It is a figure which shows an example of the panel for image display used as the object of this invention. It is a figure which shows the other example of the image display panel used as the object of this invention. It is a figure which shows the further another example of the image display panel used as the object of this invention. (A)-(d) is a figure which shows the partition formation process in the manufacturing method of the image display panel of this invention in order of a process. It is a figure which shows an example of the shape of the partition in the image display panel used as the object of this invention.

Explanation of symbols

1, 2 Substrate 3 Image display medium (particle or powder fluid)
3W white particles (white powder fluid)
3B Black particles (black powder fluid)
4 Partition 5 and 6 Electrode 11 Cavity 12 Mold 13 Partition material 13a Residual film 14 Substrate 15 Partition

Claims (5)

  A cell separated from each other by a partition is formed between two opposing substrates, at least one of which is transparent, the image display medium is enclosed in the cell, an electric field is applied to the image display medium, and the image display medium is moved. In the method for manufacturing an image display panel for displaying an image, a partition wall is formed on a substrate, and a residual film remaining on the substrate between the partition walls is dry-etched on the substrate on which the partition wall is formed. A method for producing an image display panel, wherein the image display panel is removed.   The method for producing an image display panel according to claim 1, wherein the method of forming the partition on the substrate is a mold transfer method.   3. The method for manufacturing an image display panel according to claim 1, wherein the dry etching method is plasma etching or RIE (reactive ion etching).   The method for producing an image display panel according to claim 3, wherein RIE is oxygen RIE.   The method for producing an image display panel according to claim 1, wherein the image display medium is a particle group or a powder fluid.

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